CN201334538Y - Delivery device for high-temperature liquid-state chlorsilane - Google Patents
Delivery device for high-temperature liquid-state chlorsilane Download PDFInfo
- Publication number
- CN201334538Y CN201334538Y CNU2008202228370U CN200820222837U CN201334538Y CN 201334538 Y CN201334538 Y CN 201334538Y CN U2008202228370 U CNU2008202228370 U CN U2008202228370U CN 200820222837 U CN200820222837 U CN 200820222837U CN 201334538 Y CN201334538 Y CN 201334538Y
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- China
- Prior art keywords
- chlorosilane
- reboiler
- condenser
- chlorsilane
- output tower
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Abstract
The utility model discloses a delivery device for high-temperature liquid-state chlorsilane, which is used for delivering liquid-state chlorsilane in towers of a rectification and recycling system in polycrystalline silicon production. The delivery device comprises a first chlorsilane output tower and a second chlorsilane output tower, and is characterized in that a reboiler and a condenser are sequentially arranged between the first chlorsilane output tower and the second chlorsilane output tower, the reboiler is positioned at the discharge port of the first chlorsilane output tower, the condenser is positioned between the reboiler and the second chlorsilane output tower, and the first chlorsilane output tower, the reboiler, the condenser and the second chlorsilane output tower are connected via pipelines. The delivery device replaces a shielding pump with the combination of the reboiler and the condenser, which avoids cavitation erosion phenomenon, facilitates delivery through the state change of chlorsilane and can accurately control the delivery flow rate, thereby resulting in stable flow rate.
Description
Technical field
The utility model relates to field of polysilicon production, particularly in the rectifying of production of polysilicon, recovery system, and a kind of e Foerderanlage of high temperature liquid chlorosilane.
Background technology
In the production process of polysilicon; in wherein important rectifying, the recovery system; mass transport between Ta Heta, tower and jar mainly is to adopt the canned-motor pump that does not have to reveal to finish (as shown in Figure 1) at present; but because tower still temperature is higher or the pump motor heating is bigger; the material of pump inlet place can be vaporized usually, forms cavitation phenomenons.Thereby cause this canned-motor pump cisco unity malfunction, when serious canned-motor pump can be damaged, accidents caused, final influence is produced.
Summary of the invention
The utility model provides in rectifying in production of polysilicon, the recovery system for addressing the above problem, and a kind of e Foerderanlage of high temperature liquid chlorosilane can solve cavitation phenomenons effectively, and safe in utilization, the life-span is long.
The technical solution of the utility model is as follows:
A kind of e Foerderanlage of high temperature liquid chlorosilane, be to carry for the liquid chlorosilane in the rectifying in the production of polysilicon, the recovery system tower still, comprise chlorosilane output tower one, chlorosilane output tower two, it is characterized in that: between chlorosilane output tower one and chlorosilane output tower two, be disposed with reboiler and condenser, reboiler is positioned at the discharge port of chlorosilane output tower one, condenser all passes through pipe connection between chlorosilane output tower one, reboiler, condenser and the chlorosilane output tower two between reboiler and chlorosilane output tower two.
The steam of described reboiler is imported and exported and is provided with steam regulating valve.
The RO water entrance of described condenser is provided with the RO water regulating valve.
The material inlet of described reboiler is connected with the discharge port of chlorosilane output tower one, and the material outlet of reboiler connects by the material inlet of pipeline in condenser.
The material outlet of described condenser is by the import of pipe connection high level tank.
The outlet of described high level tank connects variable valve, under meter and chlorosilane output tower two successively by pipeline.
Described condenser is higher than reboiler, and high level tank is lower than condenser.
Described variable valve and under meter all are lower than high level tank.
Described condenser is higher than 2 meters of chlorosilane output tower two opening for feeds.
The principle of work of this device is:
Liquid chlorosilane (the pressure: 0.19～0.4MPa of chlorosilane output tower one, temperature: 85～110 ℃) flows to reboiler, by the steam in the steam regulating valve adjusting reboiler, when the steam in the reboiler reaches capacity (pressure: 0.5～1.0MPa temperature: 150～180 ℃), liquid chlorosilane is heated into gaseous state by the saturation steam in the reboiler, gaseous chlorine silane rises to the condenser of eminence along pipeline, the RO water regulating valve adjusting RO water of regulating condenser (is a kind of reverse osmosis product water, be commonly called as de-salted water, water quality requirement: electricalresistivity 〉=0.5M Ω .cm; Cl ion≤10mg/L, pH value is 7.5～9) usage quantity, by RO water gaseous chlorine silane is condensed into liquid chlorosilane again, liquid chlorosilane flows into the high level tank that is lower than condenser, be lower than the variable valve and the under meter of high level tank then by adjusting, liquid chlorosilane with the flow of determining enter next tower or jar, thereby finished the conveying of high-temperature chlorine silane, wherein the absolute altitude of condenser should be greater than about 2 meters of next tower or jar opening for feeds.
The beneficial effects of the utility model are as follows:
This device adopts the cooperation of reboiler and condenser to replace canned-motor pump, has so not only solved cavitation phenomenons fully, and makes that by the condition variation of chlorosilane conveying is also very convenient, and the flow that is transmitted simultaneously can accurately be controlled, and flow velocity is steady.
Description of drawings
Fig. 1 is the traditional process program schema of the utility model background technology
Fig. 2 is a process program schema of the present utility model
Embodiment
As shown in Figure 2, a kind of e Foerderanlage of high temperature liquid chlorosilane, be for the rectifying in the production of polysilicon, liquid chlorosilane in the recovery system tower still is carried, comprise chlorosilane output tower 1, chlorosilane output tower 22, between chlorosilane output tower 1 and chlorosilane output tower 22, be disposed with reboiler 3 and condenser 4, reboiler 3 is positioned at the discharge port 7 of chlorosilane output tower 1, condenser 4 is between reboiler 3 and chlorosilane output tower 22, and chlorosilane is exported tower 1, reboiler 3, all pass through pipe connection between condenser 4 and the chlorosilane output tower 22.
The steam of described reboiler 3 is imported and exported and is provided with steam regulating valve 5.
The RO water entrance of described condenser 4 is provided with RO water regulating valve 6.
The material inlet 7 of described reboiler 3 is connected with the discharge port 7 of chlorosilane output tower 1, and the material outlet 8 of reboiler 3 connects by the material inlet 9 of pipeline in condenser 4.
The material outlet 10 of described condenser 4 is by the import 13 of pipe connection high level tank 12.
The outlet 14 of described high level tank 12 connects variable valve 15, under meter 16 and chlorosilane output tower 22 successively by pipeline.
Described condenser 4 is higher than reboiler 3, and high level tank 12 is lower than condenser 4.
Described variable valve 15 and under meter 16 all are lower than high level tank 12.
Described condenser 4 is higher than 2 meters of the opening for feeds of chlorosilane output tower 22.
The principle of work of this device is:
Liquid chlorosilane (the pressure: 0.19～0.4MPa of chlorosilane output tower one, temperature: 85～110 ℃) flows to reboiler, by the steam in the steam regulating valve adjusting reboiler, when the steam in the reboiler reaches capacity (pressure: 0.5～1.0MPa temperature: 150～180 ℃), liquid chlorosilane is heated into gaseous state by the saturation steam in the reboiler, gaseous chlorine silane rises to the condenser of eminence along pipeline, the RO water regulating valve adjusting RO water of regulating condenser (is a kind of reverse osmosis product water, be commonly called as de-salted water, water quality requirement: electricalresistivity 〉=0.5M Ω .cm; Cl ion≤10mg/L, pH value is 7.5～9) usage quantity, by RO water gaseous chlorine silane is condensed into liquid chlorosilane again, liquid chlorosilane flows into the high level tank that is lower than condenser, be lower than the variable valve and the under meter of high level tank then by adjusting, liquid chlorosilane with the flow of determining enter next tower or jar, thereby finished the conveying of high-temperature chlorine silane, wherein the absolute altitude of condenser should be greater than about 2 meters of next tower or jar opening for feeds.
Claims (9)
1, a kind of e Foerderanlage of high temperature liquid chlorosilane, be for the rectifying in the production of polysilicon, liquid chlorosilane in the recovery system tower still is carried, comprise chlorosilane output tower one (1), chlorosilane output tower two (2), it is characterized in that: between chlorosilane output tower one (1) and chlorosilane output tower two (2), be disposed with reboiler (3) and condenser (4), reboiler (3) is positioned at the discharge port (7) of chlorosilane output tower one (1), condenser (4) is positioned between reboiler (3) and the chlorosilane output tower two (2), chlorosilane output tower one (1), reboiler (3), all pass through pipe connection between condenser (4) and the chlorosilane output tower two.
2, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: the steam of described reboiler (3) is imported and exported and is provided with steam regulating valve (5).
3, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: the RO water entrance of described condenser (4) is provided with RO water regulating valve (6).
4, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: the material inlet (8) of described reboiler (3) is connected with the discharge port (7) of chlorosilane output tower one (1), and the material outlet (9) of reboiler (3) connects by the material inlet (10) of pipeline in condenser (4).
5, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: the material outlet (11) of described condenser (4) is by the import (13) of pipe connection high level tank (12).
6, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: the outlet (14) of described high level tank (12) connects variable valve (15), under meter (16) and chlorosilane output tower two (2) successively by pipeline.
7, according to the e Foerderanlage of the described a kind of high temperature liquid chlorosilane of claim 1, it is characterized in that: described condenser (4) is higher than reboiler (3), and high level tank (12) is lower than condenser (4).
8, according to the e Foerderanlage of claim 1 or 7 described a kind of high temperature liquid chlorosilanes, it is characterized in that: described variable valve (15) and under meter (16) all are lower than high level tank (12).
9, according to the e Foerderanlage of claim 1 or 7 described a kind of high temperature liquid chlorosilanes, it is characterized in that: described condenser (4) is higher than 2 meters of the opening for feeds of chlorosilane output tower two (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202228370U CN201334538Y (en) | 2008-11-24 | 2008-11-24 | Delivery device for high-temperature liquid-state chlorsilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202228370U CN201334538Y (en) | 2008-11-24 | 2008-11-24 | Delivery device for high-temperature liquid-state chlorsilane |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201334538Y true CN201334538Y (en) | 2009-10-28 |
Family
ID=41286188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202228370U Expired - Lifetime CN201334538Y (en) | 2008-11-24 | 2008-11-24 | Delivery device for high-temperature liquid-state chlorsilane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201334538Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11624049B2 (en) | 2017-12-22 | 2023-04-11 | Orizuru Therapeutics, Inc. | Cell culturing apparatus, culture solution aspirator, and cell culturing method |
-
2008
- 2008-11-24 CN CNU2008202228370U patent/CN201334538Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11624049B2 (en) | 2017-12-22 | 2023-04-11 | Orizuru Therapeutics, Inc. | Cell culturing apparatus, culture solution aspirator, and cell culturing method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091028 |
|
| CX01 | Expiry of patent term |