CN201322722Y - Film absorption multichannel measuring device - Google Patents
Film absorption multichannel measuring device Download PDFInfo
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- CN201322722Y CN201322722Y CNU2008201570017U CN200820157001U CN201322722Y CN 201322722 Y CN201322722 Y CN 201322722Y CN U2008201570017 U CNU2008201570017 U CN U2008201570017U CN 200820157001 U CN200820157001 U CN 200820157001U CN 201322722 Y CN201322722 Y CN 201322722Y
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- laser
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Abstract
The utility model relates to a film absorption multichannel measuring device applied to a large-aperture laser film. The measuring device comprises an exciting laser, a detection laser, an exciting optical attenuator, a first electronic shutter, an exciting optical lens system, a detectable optical attenuator, a reflecting mirror, a second electronic shutter, a detectable optical attenuator, a detectable optical lens system, a sample clamp, a stepping motor, a filter plate, a focusing lens, an area array CCD camera, a shutter driver, an image acquisition card, a data card and a computer. The utility model has the advantages of accurate measurement, quickness, high efficiency, stable operation and automatic data processing.
Description
Technical field
The utility model is relevant with the absorptiometry of laser film, is a kind of membrane absorption multichannel measuring apparatus that is applicable to the large-caliber laser thin-film component.
Technical background
Optical film absorption loss is the important parameter that influences the optical thin film performance, and the existence of absorption loss has reduced the damage threshold of optical thin film element, has limited the through-put power and the transmission quality of laser system.The accurate measurement of absorption loss is to optimizing the design of coating process and film system, and research film micromechanism of damage is very important.
In the Detection Techniques of laser film absorption characteristic, photothermal technique becomes desirable nondestructive measurement means because of having high sensitivity and degree of accuracy.The surface thermal lens technology adopts greater than the single mode exploring laser light of excitation hot spot and measures, and has improved stability when assurance is easy to adjust.During application surface thermal lens commercial measurement heavy caliber film sample, by transmission platform sample is carried out point-to-point measurement usually.This measuring method is called as grid scan pattern or single pixel measurement pattern, is a kind of single channel measuring method in essence.
For the large-caliber laser thin-film component, utilize the grid scan pattern to be difficult to finish absorptiometry to the whole face of large-caliber laser film: on the one hand, measure single sample spent for up to tens of hours; On the other hand, the long-time measurement because the stability of Laser Devices influences the accuracy of measuring.Therefore, set up a kind of film sample and absorb the instrument of measuring fast, significant to performance and the micromechanism of damage of analyzing the heavy caliber film.
Summary of the invention
The purpose of this utility model is to overcome the deficiency that simple scan is measured in the above-mentioned surface thermal lens technology, and a kind of membrane absorption multichannel measuring apparatus that is applied to the large-aperture optical thin-film component is provided.This device should have the characteristics of measuring accurate, quick, efficient, stable and datamation.
Technical solution of the present utility model is as follows:
A kind of membrane absorption multichannel measuring apparatus that is applied to the large-caliber laser film, its characteristics be this device by excitation laser, detecting laser, exciting light attenuator, first electronic shutter, exciting light lens combination, survey optical attenuator, catoptron, second electronic shutter and survey optical attenuator, survey optical lens group, sample clamp, stepper motor, filter plate, condenser lens, area array CCD camera, shutter driver, image pick-up card, data card and computing machine and forms, above-mentioned each position component concerns as follows:
The sample clamp that step motor drive is described, this sample clamp are used to place film sample to be measured;
Excitating optical path comprises excitation laser, and the exciting beam that is sent by this excitation laser constitutes the excitation hot spot through exciting light attenuator, first electronic shutter, exciting light lens combination vertical irradiation on the surface of described film sample successively;
Survey light path, comprise detecting laser, the exploring laser light Shu Yici that is sent by this detecting laser tiltedly incides described film sample surface and constitutes the detection hot spot through detection optical attenuator, catoptron, second electronic shutter, the hypsokinesis of detection optical lens group expansion bundle, and this center of surveying hot spot overlaps with the center of described excitation hot spot;
Detecting light beam imaging on area array CCD camera behind filter plate, condenser lens by described film sample surface reflection;
The output termination input end and computer of described area array CCD camera, described image pick-up card and data card are positioned at the slot of this computing machine, the output terminal of this computing machine links to each other with the control end of described first electronic shutter and second electronic shutter respectively through shutter driver, the described Stepping Motor Control end of another output termination of this computing machine.
On the excitating optical path between described excitation laser and the exciting light attenuator, be provided with beam splitter, on the reflected light path of this beam splitter, laser powermeter be set.
Described excitation laser is infrared basic frequency laser device, or its two frequencys multiplication or frequency tripling laser; Described detecting laser is the He-Ne laser instrument.
Described data card produces same frequency under the control of described computing machine driving pulse row and direct impulse row row drive described first electronic shutter and second electronic shutter respectively through described shutter driver, in the cycle that a relative phase changes, the first phase potential difference between described driving pulse row and the direct impulse row row is passed through computer settings.
Described area array CCD camera has the pixel more than 1,000,000 or 1,000,000, and its image is by described image pick-up card collection.
The utlity model has following advantage:
1, the utility model adopts the exciting light beam and the detecting light beam of expansion, and is big to the measurement range of sample, can realize the multi-channel measurement to each point in the excitation area;
2, the utility model adopts the detection of optics phase-lock technique realization to absorption signal a little less than the film whole audience, efficiency of measurement height;
3, the utility model adopts electronic shutter as modulator, digital controllable, modulation accuracy height;
4, the utility model adopts data card as the pulse generation source, and signal accuracy is high and stable;
5, the utility model adopts high pixel faces array CCD camera, spatial resolution height, good measuring accuracy;
6, the utility model adopts the computer software control measuring process, and integration is good, and the robotization height is easy and simple to handle.
Description of drawings
Fig. 1 is the utility model membrane absorption multichannel measuring apparatus structural representation
Fig. 2 is the utility model multichannel measuring apparatus driving pulse figure
Fig. 3 is the process of measurement process flow diagram
Embodiment
The utility model is described in further detail below in conjunction with embodiment and accompanying drawing, but should not limit protection domain of the present utility model with this.
See also Fig. 1 earlier, Fig. 1 is the structural representation of the utility model membrane absorption multichannel measuring apparatus embodiment.By this figure as seen, the utility model membrane absorption multichannel measuring apparatus is by excitation laser 1, detecting laser 2, beam splitter 3, exciting light attenuator 4, first electronic shutter 5, exciting light lens combination 6, survey optical attenuator 7, catoptron 8, second electronic shutter 9 is surveyed optical attenuator 7, survey optical lens group 10, sample clamp 11, stepper motor 12, filter plate 13, condenser lens 14, area array CCD camera 15, shutter driver 16, image pick-up card 19, data card 20, computing machine 17 and laser powermeter 18 formed, reflected light path on that above-mentioned each position component relation is set is as follows:
Excitating optical path, comprise excitation laser 1, the exciting beam that is sent by this excitation laser 1 forms the excitation hot spot through beam splitter 3, exciting light attenuator 4, first electronic shutter 5, exciting light lens combination (6) vertical irradiation successively on the surface of described film sample;
Survey light path, comprise detecting laser 2, the exploring laser light Shu Yici that is sent by this detecting laser 2 tiltedly incides described film sample surface and forms the detection hot spot through detection optical attenuator 7, catoptron 8, second electronic shutter 9, the 10 expansion bundle hypsokinesis of detection optical lens group, and center of this detection hot spot overlaps with the center of described excitation hot spot;
Detecting light beam imaging on area array CCD camera 15 behind filter plate 13, condenser lens 14 by described film sample surface reflection;
The input end of the output termination computing machine 17 of described area array CCD camera 15, described image pick-up card 19 and data card 20 are inserted in the slot in this computing machine 17, the output terminal of this computing machine 17 links to each other with the control end of described first electronic shutter 5 and second electronic shutter 9 respectively through shutter driver 16, the control end of the described stepper motor 12 of another output termination of this computing machine 17.
Described laser powermeter 18 is set on the reflected light path of this beam splitter 3.
Described excitation laser 1 is infrared basic frequency laser device, or its two frequencys multiplication or frequency tripling laser; Described detecting laser 2 is the He-Ne laser instrument.
Described area array CCD camera 15 has the pixel more than 1,000,000 or 1,000,000, and its image is gathered by described image pick-up card 19.
The method of utilizing above-mentioned membrane absorption multichannel measuring apparatus MEASUREMENTS OF THIN to absorb comprises the following steps:
1. film sample to be measured is fixed in the described sample clamp 11;
2. start excitation laser 1 and detecting laser 2, regulate exciting light attenuator 4 respectively and survey optical attenuator 7, set exciting laser power and exploring laser light power;
3. open described shutter driver 16 power supplys, area array CCD camera 15 power supplys and stepper motor 12 power supplys;
4. adjust exploring laser light bundle and exciting beam and overlap, and observe the reflected probe light beam and the diffraction ring pattern occurs, in excitating optical path, insert baffle plate on described film sample surface;
5. start process of measurement, on the program master interface of computing machine 17, set:
The spot area number of film sample to be measured;
Frequency, umber of pulse, dutycycle and the first phase potential difference of the driving pulse row A that data card 20 produces and four train of impulses of direct impulse row B;
The data storage path;
6. remove the baffle plate of excitating optical path, clicking the start button of measuring main interface begins to measure (described process of measurement flow process as shown in Figure 3): 17 pairs of described stepper motors 12 of described computing machine send the transmission pulse, move described film sample, make described exploring laser light bundle and exciting beam enter into first spot area to be measured;
7. described computing machine 17 drives described excitation laser 1 simultaneously and detecting laser 2 sends exciting beam and exploring laser light bundle respectively, simultaneously under the control of described computing machine 17, described data card 20 produces driving pulse row A and the direct impulse row B that four train of impulses with same frequency, umber of pulse and dutycycle are formed according to above-mentioned setting, but the first phase potential difference of four train of impulses of four train of impulses of described driving pulse row A and direct impulse row B is followed successively by φ
n=0, pi/2, π, 3 pi/2s, as shown in Figure 2, as seen from the figure, described direct impulse row row B has identical frequency, umber of pulse and dutycycle with driving pulse row A; Their first phase potential difference is according to 0, pi/2, and π, 3 pi/2 cycles changed.The trigger pulse C of described area array CCD camera 15, this trigger pulse C is identical with the initial phase of direct impulse row B, promptly triggers the collection of area array CCD camera when direct impulse row B sends simultaneously; Detectable signal under described four phase places is by described area array CCD camera 15 record respectively.In each phase state, the positive pulse duration of described trigger pulse C is the cycle sum of direct impulse row.Drive described first electronic shutter 5 and second electronic shutter 9 respectively through described shutter driver 16, modulate described exciting beam and exploring laser light bundle respectively, the exciting beam of being modulated produces thermal lensing effect through described exciting light lens combination 6 vertical irradiations on the surface of described film sample; The exploring laser light bundle of being modulated expands the bundle hypsokinesis through described detection optical lens group 10 and tiltedly incides described film sample surface; The information that has the film sample thermal lensing effect by the detecting light beam of described film sample surface reflection, imaging on area array CCD camera 15 behind filter plate 13, condenser lens 14, this area array CCD camera obtain detectable signal corresponding to four train of impulses of described exploring laser light bundle modulation for being respectively S
0, S
Pi/2, S
π, S
3 pi/2s, gather and deposit in described computing machine 17 through described image pick-up card 19; Described computing machine 17 is pressed the following formula computing, obtains the amplitude and the phase place of the optics lockin signal of the reflection absorption signal on all each points in the film sample spot area:
8. 17 pairs of described stepper motors 12 of described computing machine send the transmission pulse, move described film sample to spot area next to be measured, described computing machine 17 drives described excitation laser 1 simultaneously and detecting laser 2 sends exciting beam and exploring laser light bundle respectively, repeated for the 7. step, finish the measurement of next spot area;
9. repeated for the 8. step, finish until the measurement of described last spot area of film sample;
The measurement interface display " measurement is finished " of 10. described computing machine 17, program is in waiting status, clicks stop button and can stop measuring, and clicks exit button and withdraws from process of measurement.
Claims (5)
1, a kind of membrane absorption multichannel measuring apparatus that is applied to the large-caliber laser film, it is characterized in that this device is by excitation laser (1), detecting laser (2), exciting light attenuator (4), first electronic shutter (5), exciting light lens combination (6), survey optical attenuator (7), catoptron (8), second electronic shutter (9) is surveyed optical attenuator (7), survey optical lens group (10), sample clamp (11), stepper motor (12), filter plate (13), condenser lens (14), area array CCD camera (15), shutter driver (16), image pick-up card (19), data card (20) and computing machine (17) are formed, and above-mentioned each position component relation is as follows:
Stepper motor (12) drives described sample clamp (11), and this sample clamp (11) is used to place film sample to be measured;
Excitating optical path, comprise excitation laser (1), the exciting beam that is sent by this excitation laser (1) forms the excitation hot spot through exciting light attenuator (4), first electronic shutter (5), exciting light lens combination (6) vertical irradiation successively on the surface of described film sample;
Survey light path, comprise detecting laser (2), the exploring laser light Shu Yici that is sent by this detecting laser (2) tiltedly incides the surperficial detection hot spot that forms of described film sample through detection optical attenuator (7), catoptron (8), second electronic shutter (9), the hypsokinesis of detection optical lens group (10) expansion bundle, and center of this detection hot spot overlaps with the center of described excitation hot spot;
Detecting light beam by described film sample surface reflection is gone up imaging at area array CCD camera (15) behind filter plate (13), condenser lens (14);
The input end of the output termination computing machine (17) of described area array CCD camera (15), described image pick-up card (19) and data card (20) are inserted in the interior slot of this computing machine (17), the output terminal of this computing machine (17) links to each other with the control end of described first electronic shutter (5) with second electronic shutter (9) respectively through shutter driver (16), the control end of another output described stepper motor of termination (12) of this computing machine (17).
2, membrane absorption multichannel measuring apparatus according to claim 1, it is characterized in that on the excitating optical path between described excitation laser (1) and the exciting light attenuator (4), being provided with beam splitter (3), laser powermeter (18) is set on the reflected light path of this beam splitter (3).
3, membrane absorption multichannel measuring apparatus according to claim 1 is characterized in that described excitation laser (1) is infrared basic frequency laser device, or its two frequencys multiplication or frequency tripling laser; Described detecting laser (2) is the He-Ne laser instrument.
4, membrane absorption multichannel measuring apparatus according to claim 1, it is characterized in that described data card (20) produces the driving pulse row (A) and the direct impulse row row (B) of same frequency under the control of described computing machine (17), drive described first electronic shutter (5) and second electronic shutter (9) respectively through described shutter driver (16), in the cycle that an initial phase changes, the first phase potential difference between described driving pulse row (A) and the direct impulse row row (B) is set by computing machine (17).
5, membrane absorption multichannel measuring apparatus according to claim 1 is characterized in that described area array CCD camera (15) has the pixel more than 1,000,000 or 1,000,000, and its image is gathered by described image pick-up card (19).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201570017U CN201322722Y (en) | 2008-12-12 | 2008-12-12 | Film absorption multichannel measuring device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201570017U CN201322722Y (en) | 2008-12-12 | 2008-12-12 | Film absorption multichannel measuring device |
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| Publication Number | Publication Date |
|---|---|
| CN201322722Y true CN201322722Y (en) | 2009-10-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201570017U Expired - Fee Related CN201322722Y (en) | 2008-12-12 | 2008-12-12 | Film absorption multichannel measuring device |
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| CN (1) | CN201322722Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330895A (en) * | 2014-12-02 | 2015-02-04 | 中国航天科工集团第三研究院第八三五八研究所 | Oblique incidence high-reflection film laser electric field distribution design method |
| CN117213406A (en) * | 2023-11-09 | 2023-12-12 | 南京施密特光学仪器有限公司 | Device and method for detecting parallelism of emergent light of collimator |
-
2008
- 2008-12-12 CN CNU2008201570017U patent/CN201322722Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104330895A (en) * | 2014-12-02 | 2015-02-04 | 中国航天科工集团第三研究院第八三五八研究所 | Oblique incidence high-reflection film laser electric field distribution design method |
| CN117213406A (en) * | 2023-11-09 | 2023-12-12 | 南京施密特光学仪器有限公司 | Device and method for detecting parallelism of emergent light of collimator |
| CN117213406B (en) * | 2023-11-09 | 2024-01-30 | 南京施密特光学仪器有限公司 | Device and method for detecting parallelism of emergent light of collimator |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091007 Termination date: 20100112 |