CN201300352Y - Parade wheel - Google Patents
Parade wheel Download PDFInfo
- Publication number
- CN201300352Y CN201300352Y CNU2008202211045U CN200820221104U CN201300352Y CN 201300352 Y CN201300352 Y CN 201300352Y CN U2008202211045 U CNU2008202211045 U CN U2008202211045U CN 200820221104 U CN200820221104 U CN 200820221104U CN 201300352 Y CN201300352 Y CN 201300352Y
- Authority
- CN
- China
- Prior art keywords
- parade
- porcelain plate
- parade wheel
- wheel
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Polishing Bodies And Polishing Tools (AREA)
Abstract
The utility model relates to a semi-conductor processing device, in particular to a parade wheel used as a semi-conductor porcelain plate to finely process and grind carriers. The parade wheel comprises a parade wheel main body, and is characterized in that the center of the parade wheel main body is provided with a sheet-shaped structure of a mounting hole, and the main body is further provided with a hole for mounting the porcelain plate, the appearance structure of a parade sheet is circular, and the periphery is provided with teeth, since the above structure is adopted, the parade wheel is led to have the advantages of convenient operation, low labor intensity and excellent grinding effect, which is not easy to lead the porcelain plate to crack.
Description
Technical field
The utility model relates to a kind of semiconductor processing, specifically relates to a kind of parade wheel as semiconductor porcelain plate fine finishining grinding carrier.
Background technology
Form semi-conductive porcelain plate and have strict requirement, in semiconductor fabrication processes, need finish grind porcelain plate, existing correct grinding is to arrest porcelain plate with hand to polish on the sand sheet, and such polishing has that labour intensity is big, polishing weak effect, the broken easily phenomenon of porcelain plate.
Summary of the invention
The purpose of this utility model is exactly the problem at above-mentioned existence, provides that a kind of labour intensity is low, processing ease, the not breakable parade wheel of porcelain plate.
The parade wheel that is achieved in that of the present utility model comprises parade wheel body, it is characterized in that: parade wheel body is the laminated structure that the center has installing hole, also has the hole that porcelain plate can be installed on the body; The contour structures of parade sheet is circular, and periphery has tooth; The hole of described installation porcelain plate is 1---10.
The beneficial effects of the utility model are: owing to taked above structure, make such parade wheel have easy to operate, labour intensity is low, grinding effect good, be difficult for making the advantage of porcelain plate fragmentation.
Description of drawings
Fig. 1 is the structural representation of the utility model parade wheel
Wherein, 1, hole 4 teeth of parade wheel body 2, installing hole 3, installation porcelain plate
The specific embodiment
The utility model will be further described below in conjunction with accompanying drawing.
As shown in Figure 1: the parade wheel, comprise parade wheel body 1, it is characterized in that: parade wheel body 1 is the laminated structure that the center has installing hole 2, also has the hole 3 that porcelain plate can be installed on the body; The contour structures of parade sheet is circular, and periphery has tooth 4; The hole of described installation porcelain plate is 1-10.
During use, parade wheel contact sand face under the sand face of porcelain plate is installed, rotation parade wheel, the sand face grinds the porcelain plate surface.
The center has installing hole 2 and the parade wheel can be installed on the rotatable platform, makes the rotation of parade wheel.
The hole 3 of porcelain plate can be installed, can make the porcelain plate linchpin in the hole, play fixation.
The contour structures of parade sheet is circular, and periphery has tooth 4; Can be that the multi-disc parade is taken turns on an abradant surface, form interlock, boost productivity.
The hole of described installation porcelain plate is 1---10, can on a parade wheel, the multi-disc porcelain plate be installed simultaneously as required, and boost productivity, provided the schematic diagram in the hole that 6 blocks of porcelain plates are installed among the figure, other omissions.
Claims (3)
1, parade wheel comprises parade wheel body (1), and it is characterized in that: parade wheel body (1) is the laminated structure that the center has installing hole (2), also has the hole (3) that porcelain plate can be installed on the body.
2, parade wheel according to claim 1, it is characterized in that: the contour structures of parade sheet is circular, and periphery has tooth (4).
3, parade wheel according to claim 1, it is characterized in that: the hole of described installation porcelain plate (3) are 1-10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202211045U CN201300352Y (en) | 2008-11-19 | 2008-11-19 | Parade wheel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202211045U CN201300352Y (en) | 2008-11-19 | 2008-11-19 | Parade wheel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201300352Y true CN201300352Y (en) | 2009-09-02 |
Family
ID=41083970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202211045U Expired - Fee Related CN201300352Y (en) | 2008-11-19 | 2008-11-19 | Parade wheel |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201300352Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310349A (en) * | 2011-06-29 | 2012-01-11 | 蒋菊生 | Die for plane substrate sanding machine |
-
2008
- 2008-11-19 CN CNU2008202211045U patent/CN201300352Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102310349A (en) * | 2011-06-29 | 2012-01-11 | 蒋菊生 | Die for plane substrate sanding machine |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090902 Termination date: 20101119 |