CN201287408Y - Cooling water supply facility of single crystal stick cut-off machine - Google Patents
Cooling water supply facility of single crystal stick cut-off machine Download PDFInfo
- Publication number
- CN201287408Y CN201287408Y CNU2008203027650U CN200820302765U CN201287408Y CN 201287408 Y CN201287408 Y CN 201287408Y CN U2008203027650 U CNU2008203027650 U CN U2008203027650U CN 200820302765 U CN200820302765 U CN 200820302765U CN 201287408 Y CN201287408 Y CN 201287408Y
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- Prior art keywords
- water
- pipeline
- single crystal
- cooling water
- supply facility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a cooling water supplier for single crystal bar cutting machine, comprising a water tank (1) containing water (2), wherein the bottom of the water tank (1) is connected with the inlet of a water pump (3) via a pipeline; the outlet of the water pump (3) is connected with a spray nozzle (4) via a pipeline; a water pan (5) is provided under the spray nozzle (4) and is connected with the water tank (1) via a pipeline; and the water (2) is pure water. The utility model adopts pure water circulation to realize cooling water supply of single crystal bar cutting machine, and adds a water pump to improve the pure stability of cooling water and improve the flatness of the cut end face of single crystal plate, and since pure water has low corrosion on cutting tools, the service life of the cutting tools can be prolonged significantly.
Description
Technical field
The utility model relates to a kind of water supply installation, particularly a kind of cooling water supply facility of monocrystal rod cutting machine.
Background technology
In the cut-out and slicing processes of monocrystal rod, too high in order to prevent temperature, need blade and monocrystal rod to cool off.Prior art is directly to cool with running water, because the pressure transient of running water, must make the flow when flowing through blade change, because cutting blade thickness as thin as a wafer, blade is deformed, make the single-chip end face flatness variation scale off, and running water is to the corrosiveness of stainless steel cut blade, the service life of blade is short.
The utility model content
The purpose of this utility model is, a kind of cooling water supply facility of monocrystal rod cutting machine is provided, and to improve the flatness of single-chip cutting end face, reduces the corrosiveness of running water to cutting blade, prolongs the service life of blade.
The technical solution of the utility model: a kind of cooling water supply facility of monocrystal rod cutting machine.It comprises water tank, and water is arranged in the water tank, and the bottom of water tank is connected with the inlet of water pump through pipeline, and the outlet of water pump is connected with shower nozzle through pipeline, and the below of shower nozzle is provided with drip tray, and drip tray is connected with water tank through pipeline.
In the cooling water supply facility of above-mentioned monocrystal rod cutting machine, described water is pure water.
Compared with prior art, can guarantee the pressure stability of cooling water,, the flatness of single-chip cutting end face is improved so guaranteed the stable of cutting temperature owing to increased water pump 3.It is little to use pure water to cool off the corrosiveness of cutting blade in addition, therefore can prolong the service life of cutting blade greatly.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Being labeled as in the accompanying drawing: 1-water tank, 2-water, 3-water pump, 4-shower nozzle, 5-drip tray, 6-monocrystal rod, 7-blade.
The specific embodiment
Be described in further detail below in conjunction with the cooling water supply facility of drawings and Examples monocrystal rod cutting machine of the present utility model, but not as the foundation that the utility model is imposed any restrictions.
The utility model pipeline as shown in Figure 1, it comprises water tank 1, water 2 is arranged in the water tank 1, the bottom of water tank 1 is connected through the inlet of pipeline with water pump 3, the outlet of water pump 3 is connected with shower nozzle 4 through pipeline, and shower nozzle 4 is provided with drip tray 5 facing to the blade 7 of cutting single-chip 6 below cutting mouth, drip tray 5 is connected with water tank 1 through pipeline, described hydromining pure water.
Operation principle of the present utility model:
Because having increased water pump 3 can guarantee the pressure stability of cooling water,, the flatness of single-chip cutting end face is improved so guaranteed the stable of cutting temperature.Owing to change the running water that uses in the prior art into pure water, reduced the corrosiveness of running water to cutting blade, therefore can prolong the service life of cutting blade greatly.
Claims (2)
- The cooling water supply facility of [claim 1] a kind of monocrystal rod cutting machine, it is characterized in that: it comprises water tank (1), water (2) is arranged in the water tank (1), the bottom of water tank (1) is connected through the inlet of pipeline with water pump (3), the outlet of water pump (3) is connected with shower nozzle (4) through pipeline, the below of shower nozzle (4) is provided with drip tray (5), and drip tray (5) is connected with water tank (1) through pipeline.
- The cooling water supply facility of [claim 2] monocrystal rod cutting machine according to claim 1 is characterized in that: described water (2) is pure water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008203027650U CN201287408Y (en) | 2008-11-13 | 2008-11-13 | Cooling water supply facility of single crystal stick cut-off machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008203027650U CN201287408Y (en) | 2008-11-13 | 2008-11-13 | Cooling water supply facility of single crystal stick cut-off machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201287408Y true CN201287408Y (en) | 2009-08-12 |
Family
ID=40979080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008203027650U Expired - Fee Related CN201287408Y (en) | 2008-11-13 | 2008-11-13 | Cooling water supply facility of single crystal stick cut-off machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201287408Y (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102581975A (en) * | 2011-01-12 | 2012-07-18 | 硅电子股份公司 | Method for cooling a workpiece made of semiconductor material during wire sawing |
| CN102729350A (en) * | 2011-04-02 | 2012-10-17 | 江苏协鑫硅材料科技发展有限公司 | Cooling system on squaring machine for cutting wafers |
| CN103395003A (en) * | 2013-06-24 | 2013-11-20 | 苏州快吉刀片制造有限公司 | Circulating cooling device used for production of blade |
| CN103737733A (en) * | 2013-10-30 | 2014-04-23 | 章博 | Steel wire cleaning device of multi-wire cutting machine |
| CN104162937A (en) * | 2014-08-04 | 2014-11-26 | 陈菊芳 | Stone slab cutting machine |
| CN104385470A (en) * | 2014-11-18 | 2015-03-04 | 泉州市永茂电子科技有限公司 | Crystal bar slicing system |
| CN104999576A (en) * | 2015-08-11 | 2015-10-28 | 镇江环太硅科技有限公司 | External cooling system of diamond wire cutting machine |
| CN110549250A (en) * | 2019-10-09 | 2019-12-10 | 商洛学院 | Wafer manufacturing tool and use method thereof |
| CN113172782A (en) * | 2021-05-17 | 2021-07-27 | 伍路旺 | Single-chip microcomputer wafer slicing device |
| CN113245698A (en) * | 2021-07-14 | 2021-08-13 | 深圳光远智能装备股份有限公司 | Automatic water supply system for nondestructive laser scribing of battery piece |
-
2008
- 2008-11-13 CN CNU2008203027650U patent/CN201287408Y/en not_active Expired - Fee Related
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8968054B2 (en) | 2011-01-12 | 2015-03-03 | Siltronic Ag | Method for cooling a workpiece made of semiconductor material during wire sawing |
| CN102581975A (en) * | 2011-01-12 | 2012-07-18 | 硅电子股份公司 | Method for cooling a workpiece made of semiconductor material during wire sawing |
| CN102581975B (en) * | 2011-01-12 | 2014-12-17 | 硅电子股份公司 | Method for cooling a workpiece made of semiconductor material during wire sawing |
| CN102729350A (en) * | 2011-04-02 | 2012-10-17 | 江苏协鑫硅材料科技发展有限公司 | Cooling system on squaring machine for cutting wafers |
| CN102729350B (en) * | 2011-04-02 | 2015-12-16 | 江苏协鑫硅材料科技发展有限公司 | Be used in the cooling system on the excavation machine of cut crystal |
| CN103395003A (en) * | 2013-06-24 | 2013-11-20 | 苏州快吉刀片制造有限公司 | Circulating cooling device used for production of blade |
| CN103737733A (en) * | 2013-10-30 | 2014-04-23 | 章博 | Steel wire cleaning device of multi-wire cutting machine |
| CN103737733B (en) * | 2013-10-30 | 2015-10-28 | 章博 | A kind of steel wire cleaning device of multi-line cutting machine |
| CN104162937A (en) * | 2014-08-04 | 2014-11-26 | 陈菊芳 | Stone slab cutting machine |
| CN104385470A (en) * | 2014-11-18 | 2015-03-04 | 泉州市永茂电子科技有限公司 | Crystal bar slicing system |
| CN104385470B (en) * | 2014-11-18 | 2016-07-06 | 泉州市永茂电子科技有限公司 | A kind of crystal bar slice systems |
| CN104999576A (en) * | 2015-08-11 | 2015-10-28 | 镇江环太硅科技有限公司 | External cooling system of diamond wire cutting machine |
| CN110549250A (en) * | 2019-10-09 | 2019-12-10 | 商洛学院 | Wafer manufacturing tool and use method thereof |
| CN113172782A (en) * | 2021-05-17 | 2021-07-27 | 伍路旺 | Single-chip microcomputer wafer slicing device |
| CN113245698A (en) * | 2021-07-14 | 2021-08-13 | 深圳光远智能装备股份有限公司 | Automatic water supply system for nondestructive laser scribing of battery piece |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090812 Termination date: 20121113 |