CN201280603Y - 一种电镀生产装置 - Google Patents
一种电镀生产装置 Download PDFInfo
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- CN201280603Y CN201280603Y CNU2008201866092U CN200820186609U CN201280603Y CN 201280603 Y CN201280603 Y CN 201280603Y CN U2008201866092 U CNU2008201866092 U CN U2008201866092U CN 200820186609 U CN200820186609 U CN 200820186609U CN 201280603 Y CN201280603 Y CN 201280603Y
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2008201866092U CN201280603Y (zh) | 2008-10-30 | 2008-10-30 | 一种电镀生产装置 |
Applications Claiming Priority (1)
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CNU2008201866092U CN201280603Y (zh) | 2008-10-30 | 2008-10-30 | 一种电镀生产装置 |
Publications (1)
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CN201280603Y true CN201280603Y (zh) | 2009-07-29 |
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CNU2008201866092U Expired - Fee Related CN201280603Y (zh) | 2008-10-30 | 2008-10-30 | 一种电镀生产装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102044427B (zh) * | 2009-10-09 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | 铜互连线的形成方法及电镀装置 |
CN103981564A (zh) * | 2014-05-27 | 2014-08-13 | 张军 | 逐级传递全自动滚镀方法及生产线 |
-
2008
- 2008-10-30 CN CNU2008201866092U patent/CN201280603Y/zh not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102044427B (zh) * | 2009-10-09 | 2012-06-06 | 中芯国际集成电路制造(上海)有限公司 | 铜互连线的形成方法及电镀装置 |
CN103981564A (zh) * | 2014-05-27 | 2014-08-13 | 张军 | 逐级传递全自动滚镀方法及生产线 |
CN103981564B (zh) * | 2014-05-27 | 2016-08-24 | 张军 | 逐级传递全自动滚镀方法及生产线 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU STAR SEA ELECTRONICS CO., LTD. Free format text: FORMER OWNER: CHANGZHOU XINGHAI SEMICONDUCTOR DEVICE CO., LTD. Effective date: 20130208 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20130208 Address after: 213022 Tianmu Lake, Changzhou, Jiangsu New District, No. 1 Patentee after: Changzhou Star Sea Electronics Co., Ltd. Address before: 213022 Changzhou, Jiangsu new North District, Tianmu Lake Road, No. 1 Patentee before: Changzhou Xinghai Semiconductor Device Co., Ltd. |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090729 Termination date: 20131030 |