CN201273451Y - System, gas cylinder, valve assembly and bellows component used for controlling pressurized fluid - Google Patents
System, gas cylinder, valve assembly and bellows component used for controlling pressurized fluid Download PDFInfo
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- CN201273451Y CN201273451Y CNU2007201820323U CN200720182032U CN201273451Y CN 201273451 Y CN201273451 Y CN 201273451Y CN U2007201820323 U CNU2007201820323 U CN U2007201820323U CN 200720182032 U CN200720182032 U CN 200720182032U CN 201273451 Y CN201273451 Y CN 201273451Y
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Abstract
The utility model relates to a system, an air bottle, a valve component and a corrugated pipe component which are used to control pressurized fluid, wherein a system which is used to control the pressurized fluid to be discharged from an outlet of a pressurized tank of compound which contains hydride or halide comprises a tank which is used to keep the pressurized fluid of gas phase or a part of gas phase, a port main body which is used to communicate with the outlet of the pressurized tank which restricts a liquid discharge path, a valve component which is fixed in the port main body or on the upriver position and is suitable for the movements between a sealed position which interrupts the flow of the liquid through the liquid discharge path and an opened position which allows the liquid to flow along the liquid path, and corrugated pipe chambers which are distributed in the shell on the downriver position of the valve component, wherein the corrugated pipe chambers are filled and sealed with pressure with the range from about 14.7psia to about 50psia, corrugated pipes are manufactured by materials which are selected from the following groups: age hardening steel alloy, age hardening nickel base alloy, and berylliumcopper alloy, the corrugated pipes are partially communicated with the corrugated pipe chambers and the liquid discharge path on the downriver position of the valve component, and the valve component is moved to the opened position when the corrugated pipes generate vacuum conditions in the shell through communicating with the discharge path.
Description
Technical field
The utility model relates to high pressure storage and the transporting system with emergency protection vacuum actuated valve, in case the fluid stopping body from for example pressurized cylinder or jar container in noxious emission.The emergency protection valve of allocated product when more specifically, the utility model relates to the high product volume that is designed to adapt in the transporting system and applies predetermined vacuum condition in the valve downstream side.
Background technique
Industrial processes and manufacturing application requirements use highly poisonous fluid.The semi-conducting material manufacturing representative such application, wherein to become be essential for An Quan storage and (hydridic) or halid (halidic) gas of handling poisonous to heavens hydride.The example of such gas comprises silane, germane, ammonia, hydrogen phosphide, arsenic hydride, antimonous hydride, hydrogen sulfide, hydrogen selenide, hydrotelluric acid, phosphorus trifluoride, arsenic pentafluoride and other halide compound.As to the result of toxicity, in industrial processing equipment, must store and handle these gases carefully with the consideration of safety.Semi-conductor industry depends on gaseous state hydride of arsenic (AsH especially
3) and phosphoreted hydrogen (PH
3), boron trifluoride (BF
3), the source of arsenic (As), phosphorus (P), boron (B) and the silicon (Si) of ocratation in implanting as ion.The ion implant system typically uses in the transport box stored at height AsH to the pressure of 800psig
3And PH
3The diluted mixture thing and in the transport box stored at for example BF of height to the pressure of 1500psig
3And SiF
4Scrubbed gas.Because their extreme toxicity and high vapour tension, their use, transportation and storage have increased significant safety issue for semi-conductor industry.
For solving multiple safety issue, a plurality of systems have been developed so that these hydride are transported to ion implant tool with halid compound being lower than under the atmospheric pressure.For example, be known as SDS
TMAnd by ATMI, the chemical system that Inc sells relates to physical absorption agent material (bead active carbon) fills the pressurized gas gas cylinder and reversibly dopant gas is adsorbed onto on the material.Removing adsorptive process relates to vacuum or heat is applied to sorbent material/gas cylinder.In practice, the vacuum from ion implanter is used for gas is removed absorption from solid-phase adsorbent.Have some restriction relevant with the SDS technology, restriction comprises: 1) sorbent material has limited useful load, has therefore limited the amount of obtainable product in the gas cylinder of given size; 2) removing adsorptive process can be initial by the gas cylinder packing is exposed to heat, therefore cause when gas cylinder is exposed to temperature greater than 70 Fahrenheits, reaching barometric pressure and super-atmospheric pressure and under this pressure conveying gas, this is common temperature in many gas cylinder inventory locations and ion implant tool; 3) because the absorption of the other materials/gas on sorbent material/releasing absorption may jeopardize from the purity of the gas of gas cylinder conveying; 4) utilization of gas cylinder percentage is subjected to being applied to the influence of the level of vacuum of packing to heavens, and promptly gas cylinder often returns with the product that significantly remains in the packing; With 5) adsorbent attrition may cause the particle contamination in gas delivery system.
Additionally, a plurality of mechanical systems have been developed to be used to be lower than the conveying of the dopant gas under the barometric pressure.Some relate to the working pressure regulator, and other the valve device that requires is being lower than control and conveying products under the barometric pressure.These apparatus settings are for conveying when being lower than barometric pressure or vacuum condition and being applied to the delivery port of gas cylinder or open.The accurate position of these equipment can be in the mouth main body, in the neck chamber, the combination of or all three positions inner at gas cylinder self.In each situation, pressure regulator or valve device are positioned at the upstream mobile from gas cylinder inside to delivery port with respect to gas of gas cylinder valve seat.
US Patent No 6,089,027 and No 6,101,816 all relate to fluid storage and the distribution system that comprises the container that is used to keep the pressure of wishing.Container comprises pressure regulator, and is for example relevant with vessel port and be set in single-stage or multistage regulator under the predetermined pressure.For example comprising that allocation component such as the flow control apparatus of valve is arranged as to flow with the regulator gases/vapors is communicated with, and has realized the distribution of gases/vapors from container with opening of this valve.Fluid in the container can be formed by liquid, this liquid under the main temperature conditions of for example ambient temperature (room temperature) at the low pressure limit that surpasses its liquefaction pressure in container.
US Patent No 6,857,442 B2 have disclosed the gas distribution assembly that source container wherein comprises the gas under the pressure in 20 to 2000psig the scope.This equipment require to have greater than the pressurized gas gas cylinder of typical neck opening with adapt to two pressure regulators in series longshore current body emission path introduce.At first regulator of inlet gas side pressure is reduced to 100psig from 1000psig (or the actual pressure in this moment container), and second regulator is reduced to pressure and is lower than barometric pressure from 100psig.
US Patent No 5,937,895 relate to fluid storage and distribution container, container have distributing valve and fluid limiting device with system that emergency protection in fact is provided in case the fluid stopping body from pressurized cylinder or jar in noxious emission.US Patent No 6,007,609 and No 6,405,115 have disclosed the flow restriction device of longshore current body flow path arrangement, and limiter provides the opening that has minimized from the capillary dimensions of the toxic gas discharging of pressurized gas gas cylinder under the situation that unlikely distributing valve lost efficacy.After this disclosure of three documents provides and has been used for subatmospheric transporting system, and wherein bellows chamber is positioned at the downstream with respect to the gas flow of passing through valve of valve seat.
The shortcoming relevant with transporting system with the storage of correlation technique is that they can not handle the gas cylinder stuffing pressure that is higher than 600psig, or as handling the equipment that then requires two series connection.For example, when arsenic hydride and hydrogen phosphide gas cylinder packing during as the liquefaction fluid filled, the internal pressure of these fluids is restricted to its vapour tension separately, this vapour tension under the temperature of 70 Fahrenheits typically in about scope of 205 to about 580psig.Yet for example the fluid of boron trifluoride and ocratation fluid are filled as gaseous products, and the gas cylinder stuffing pressure that requires is 600psig or higher.Especially, the system of correlation technique can not work under the pressure greater than 600psig, because from the thrust deficiency of bellows.
Another shortcoming in present system is that they can not adapt to higher fluid product capacity, and therefore requires to replace continually the gas cylinder packing.This product gas cylinder and of causing again swapping out continually for downtime of semiconductor maker's increase.
Further, current utilization distribute the system requirements of safety check before assembled valve, must regulate to handle bellows to remove residual stress.Especially, distributing valve passes through the temperature and pressure system of rising widely with nitrogen circulation.As a result of, corrugated stainless steel tubing is exposed to thermoae limit and pressure limit during adjustment process.
For overcoming the shortcoming of correlation technique, the purpose of this utility model provides and is used to store and carries the gaseous state and/or the system of gaseous state/liquefaction fluid mutually partly of being in, and wherein fluid is stored being higher than under the pressure of 600psig.Especially, distributing valve comprises the bellows chamber of filling, and bellows is by providing suitable end thrust to make with the material that overcomes the pressure in gas cylinder/jar.
Another purpose of the present utility model is to increase the capacity of gas cylinder/jar and the size that do not change gas cylinder/jar or comprise the gas cylinder valve head of mouthful main body.Can in gas cylinder/jar, hold higher gas flow in this way.As a result of, client's the process variability and the raising of productivity have been realized reducing.In addition, swap out,, obtained economy and safety benefits with this downtime of having reduced semiconductor manufacturing tool by the gas cylinder/jar that has still less.
Further purpose of the present utility model is to eliminate the adjusting of valve, and this is the process of effort.
Persons skilled in the art read specification, accompanying drawing and subsidiary claim postscript will know other purposes of the present utility model and aspect.
The model utility content
According to aspect of the present utility model, provide to be used to control pressure fluid from system that the outlet that comprises pressurized canister hydride or halid compound is discharged.Equipment comprises the jar of the pressure fluid that is used to keep gas phase or part gas phase; Be used for the mouth main body that is communicated with the outlet of the pressurized canister that defines fluid discharge path; Be fixed in mouthful main body or the upstream and be suitable for blocking the valve element that the sealing station that flow and allow of fluid by fluid discharge path moves between the open position in fluid longshore current body path; Be arranged in the interior bellows chamber of housing in valve element downstream, wherein bellows chamber is filled with and is sealed to the pressure of scope from about 14.7psia to about 50psia, and bellows is made by the material of selecting from the group that comprises following item: the Steel Alloy of timeliness (age) sclerosis, the nickel-base alloy and the copper beryllium alloy of age hardening; And wherein bellows chamber is communicated with the part of valve element fluid downstream emission path, when having produced vacuum condition with being communicated with of emission path in housing the valve element is moved to open position.
According to another aspect of the present utility model, provide gas cylinder and valve assembly to comprise pressure fluid and control discharging from the pressure fluid of gas cylinder.Gas cylinder and valve assembly comprise: the gas cylinder with gas cylinder opening; Has the cylinder valve that is suitable for the mouth main body of gas cylinder opening sealing engagement; By the mouth main part limitation and fluid input that be positioned at gas cylinder; By the mouth main part limitation and fluid output that be positioned at the gas cylinder outside; The fluid discharge path between fluid input and fluid output by the mouth main part limitation; Manual or operate the automatically mobile cut-off valve of fluid that is used to control longshore current body emission path; With vacuum actuated safety check, safety check comprises that the longshore current body emission path that is biased to the valve element of having blocked the sealing station that fluid longshore current body emission path flows and filling and is sealed to pressure range from about 14.7psia to about 50psia is positioned at the bellows chamber in valve element downstream, and bellows is made by the material of selecting from comprise following group: the Steel Alloy of age hardening, the nickel-base alloy of age hardening and copper beryllium alloy; And wherein bellows chamber has with respect to the fixing part of the main body of vacuum actuated safety check with when the relative pressure between bellows inside and outside and makes bellows expansion and the valve element is biased in another part that open position can be linked to the valve element when allowing fluid longshore current body emission path mobile with moving.
According to another aspect more of the present utility model, provide the bellows component of vacuum actuated safety check.Safety check comprises the bellows chamber that is arranged in the vacuum actuated safety check housing, wherein bellows is filled with and is sealed to the pressure of scope from 14.7psia to 50psia, and wherein bellows is made by the material of selecting from the group that comprises following item: the Steel Alloy of age hardening, the nickel-base alloy of age hardening and Cuprum alloy.Bellows chamber in response to indoor on the bellows outside vacuum condition so that bellows expand with the thrust of 4lbf at least.
Especially, by vacuum actuated check valve design of the present utility model, system can adapt to the product volume in the gas cylinder that is three times in similar size.
Description of drawings
The purpose of this utility model and advantage will be from following in conjunction with the accompanying drawings to understanding the detailed description of preferred embodiment of the present utility model better, in institute's drawings attached similarly numeral indicated identical feature, each figure is:
Fig. 1 illustrates the diagrammatic cross-sectional view that is used to store and control from the system of its dispense pressurised fluid;
Fig. 2 has described to have the diagrammatic cross-sectional view of amplification of the valve head assembly of layout vacuum actuated safety check within it;
Fig. 3 is the explanatory view according to the bellows component/chamber of exemplary embodiments of the present utility model;
Fig. 4 has described the diagrammatic cross-sectional view according to the internal flow limiter of exemplary embodiments;
Fig. 5 is the explanatory view of the bellows component/chamber of prior art; With
Fig. 6 illustrates the test result for the safety check that has merged bellows chamber of the present utility model, and wherein system pressurizes under 1230psig with nitrogen, promptly tests the HP bellows with nitrogen in the flow measurement of 1230psig inlet pressure.
Embodiment
The utility model low pressure is provided or be lower than barometric pressure storage and transporting system as being used to relate to for example gas supply source of the application of the semiconductor machining of ion implantation.System has controlled with gas phase or the partly discharging of the pressure fluid of gas phase storage.Be task of explanation, the utility model is further described with the conveying boron trifluoride in context.Yet persons skilled in the art will be appreciated that to utilize and anyly for example are rich in boron trifluoride (promptly
11BF
3), hydride or the halid compound of silane, fluorine or ocratation.
As in Fig. 1, illustrating, described to be used to store and carry the system 10 of pressurization and poisonous fluid among the figure.System 10 comprises and has comprised the gas phase or the gas cylinder or jars 12 of the boron trifluoride of gas phase partly.The pressurized gas gas cylinder can be the gas cylinder of conventional 500cc, the gas cylinder ratified of Department ofTransportation 3AA cylinder for example, but be not restricted to this.Gas cylinder valve head 14 can threadably be bonded on the top end of gas cylinder 12.Gas cylinder valve head 14 can be the Stainless Steel Valve of twoport 316, and for example by Ceodeux, Inc makes.Double ported valve gas cylinder head 14 has the filling mouth 16 of anti-interference (tamperresistant), by it gas cylinder 12 is filled with product.When filling, the user can extract product out by user's mouth 18 from gas cylinder, and this user's mouth 18 is to have from the about 0.25 face seal VCR mouth to about 0.5 inch exit opening scope.Gas cylinder inside comprises the internal flow limiter 20 with inlet 22.Boron trifluoride flow in the inlet 22, by internal flow limiter and vacuum actuated safety check 26, along the fluid flow path that is described in more detail below to user's mouth 18, until exhausting.
Vacuum actuated safety check 26 comprises automatically controls the bellows chamber of boron trifluoride fluid from the discharging of gas cylinder.Certainly, safety check 26 can be arranged in the mouth main body of double ported valve, in the double ported valve upstream, gas cylinder or longshore current body flow path partly in double ported valve and partly in gas cylinder.As shown in the exemplary embodiments of Fig. 1, by with a partial fixing of safety check in the housing of longshore current body emission path location, vacuum actuated safety check fully is arranged in the gas cylinder 12.The handle of locating at the top of double ported valve 28 allows manually to control the fluid that longshore current body emission path leads to user's mouth 18.Fluid storage of this type and distribution system are described in aforesaid US Patent No 5,937,895, No 6,007,609 and No 6,045,115, but they are with reference to single-ported valve gas cylinder head, and they fully merge by reference at this.
With reference to figure 2, fluid flow path illustrates about inner member.In typical embodiment, and for explaining that vacuum actuated safety check 26 is arranged in the mouth main body 29 of single port gas cylinder valve head 14 easily.Follow boron triflouride gas and leave the path of head valve 14, gas at first enters valve inlet 30 by internal flow restriction organ pipe 20.The mouth main body of head valve 14 comprises vacuum actuated safety check 26.The gas that enters at first contacts the valve element with poppet valve 32 forms.Spring 34 is biased to against valve seat 36 poppet valve 32 to cause the condition of closing along gas flow paths.The top of poppet valve 32 can keep elastic washer or other seal elements, to keep the sealing of the forward that strides across valve seat 36.Spring 34 is pressed against poppet valve 32 on the valve seat 36 usually, expands with mobile contact plate 40 until bellows 38.Contact plate 40 acts on the control pin 42, and control pin 42 pushes away poppet valve 32 from valve seat 36.Boron triflouride gas can flow through around the pin passage 44 of pin 42 then and enter in the housing 54 that has held bellows 38.
Bellows chamber 50 comprises and defines the bellows guiding element 48 that has around the inner pressure chamber of the outer sleeve/housing 54 of bellows chamber outside; Also comprise bottom guide plate 56.Contact with the sealing of contact plate 40 in the upper end of bellows and bellows guiding element 48 and lower end the bellows pressure isolation in vacuum actuated safety check 26 and the gas flow paths usually at bellows.The interior section of bellows chamber 50 (being the pressure chamber) is sealing under atmospheric pressure typically, make reduction at the pressure in the housing of bellows chamber 50 cause gas bellows chamber 50 in to make bellows expansion and with contact plate 40 promotions downwards against pin 42.
Bellows guiding element 48 has kept the outer sleeve 54 around its external margin.Outer sleeve 54 is with guide plate 56 location.Bellows guiding element 48, outer sleeve 54 and guide plate 56 have sealed bellows chamber 50 together with protecting.Pin 42 by the center hole in the guide plate 56 to keep itself and the aliging of contact plate 40.
Leading to the outer boron triflouride gas of housing that has surrounded bellows chamber 50 flows by valve inlet 58 and crosses sealing surfaces 60.Threaded lining 62 is clamped to mouthful main body 29 with multiple layer metal barrier film 64, has therefore formed the forward sealing of opposing by the escape of liquid of valve rod 66.Handle 28 and threaded valve rod 66 concurrent operations impel piston 68 to diaphragm 64 by friction pad 70, so that main valve plunger 72 is moved down and the resistance of antagonistic spring 74.Moving down of plunger 72 impels the elastomeric seal member 76 that is kept by nut 78 to cause sealing at surperficial 60 places.The support valve rod 66 that leaves diaphragm 64 allows spring 74 to impel valve plunger 72 upwards, therefore sealing surfaces 60 separation and permission gas through port 58 is flowed.In case through sealing surfaces 60, boron triflouride gas 80 flows and flows to user's mouth 18 by conduit 82 from the chamber.
This safety check 26 can be set at the pressure of opening in the bellows housing that prevents poppet valve 32 reliably and be reduced to vacuum condition.This condition is generally equal to 760 holders or lower.With this setting of vacuum actuated safety check, handle with sleeve 28 will not cause the distribution of boron trifluoride from gas cylinder with retract valve plunger 70 in the counterclockwise direction.Because typical end user's equipment moves under the pressure less than 100 holders, under vacuum and especially under 500 holders or lower pressure, distribute boron trifluoride to have several tangible advantages.For example, in all connections that boron triflouride gas connects, there is negative pressure, may only leaks in end user's equipment, wherein, leak and detected soon by equipment self so leak.Therefore, needn't check to confirm to have any leakage by joint ground.In addition, do not require that external regulator filter arrives end user's the acceptable pressure of mass flow controller with the pressure that reduces jar.The more important thing is that to open the harmfulness that the accident that connects than high pressure delivery system on magnitude opens littler for the accident that pipeline connects in the boron trifluoride system as previously discussed.
Yet, find that for the gas cylinder that comprises the gaseous fluid of boron trifluoride for example (promptly surpass 600psig and under the pressure of 1500psig), the thrust of bellows is not enough to pin 42 is moved and again poppet valve 32 moved from its valve seat.
Find, to the inner filling of seal bellows chamber 50 or be forced into greater than atmospheric pressure (promptly greater than 14.7psia) and cause being applied to the bigger pressure gap of bellows when outside when vacuum.As shown in Figure 3, bellows chamber is fills up to scope from the extremely about 50psia of about 14.7psia with the inert gas of for example argon gas, is preferably about 14.7psia to 35psia, and is most preferably the pressure of about 29.5psia.For the necessary thrust of intrasystem pin that the gas pressure of wherein being stored surpasses 600psig being moved in bellows chamber 50 fillings and acquisition with the gas under the super-atmospheric pressure, find that the bellows material of age hardening will bear the inside ripple pipe pressure of sealing and provide enough thrust again so that poppet valve 32 disseats.Preferably, the bellows material is selected from the group that comprises following item: the Steel Alloy of age hardening, the nickel-base alloy of age hardening (for example inconel) and copper beryllium alloy.Though aforementioned is preferable material, persons skilled in the art will be understood, and can use the other materials with similar physical property.
Especially, the operation of vacuum actuated safety check based on bellows when the repeatably extension that senses when being lower than barometric pressure.The operation of bellows in its length is crucial (promptly repeatable in response to extension/contraction of pressure condition) in working life.Has instable potentiality in total length changes by the bellows of the cold-worked material manufacturing of for example Austenitic Stainless Steel (in correlation technique, using).Bellows length reduces or compressive strain is the feature (be bellows and helical spring, wherein residual stress applies during its forming process) of spring element.Being used for making the optimum type have the material of the high-drag of compressive strain (or length reduction) and long-term repeatable bellows element is timeliness or precipitation (precipitation) hardener, for example above-described those.Age hardening alloy is preferred candidate material, because the bellows chamber that forms of types of material has high corrosion resistance and the mechanical property of the thrust that is used to wish thus.By the other benefit that provides with age hardening made bellows is to have eliminated the bellows adjustment process.Especially, the bellows adjustment process is set up before bellows chamber is assembled into system and is implemented in correlation technique.As the result who utilizes age hardening material of the present utility model, no longer require the big process of this labor intensity.
Based on to the modification of bellows material with to the filling of bellows chamber, gas cylinder 12 can be filled into until than current be used for gas cylinder Senior Three that ion implants doubly capacity and do not change the size of gas cylinder.For example, for boron trifluoride, use 2.27 liters of current gas cylinders of bellows chamber of the present utility model can be filled into the capacity of 1000 grams (under 1235psig), in contrast to 335 grams (under 600psig pressure), be filled into 3180 grams with 6.33 liters gas cylinder, in contrast to 1065 grams for current use.
Refer back to Fig. 1, can the longshore current moving path of restricted flow passage 20 is placed on the upstream of vacuum actuated valve 26, to limit gas flow at safety check in impossible situation that open position fault or the other valve head that has safety check within it 14 are sheared.Such limiter with capillary tube form provides flexibility and the reliability as the maximum of flow limiter.No matter by single or a plurality of small diameter bore provide or provided by the material of closely filling, the suitable limiter of this type will limit the low-down speed of being transported to of gaseous fluid with wishing.
For example, the boron trifluoride that the single hole capillary tube can limit atmosphere is discharged under the storage pressure of 1200psig and be lower than the boron trifluoride of about 35sccm under the temperature of 68 Fahrenheits, and the seven apertures in the human head capillary tube can be with flow restriction to about 245sccm under similar condition.Capillary tube provides from only outlet of gas cylinder 12 and can be twine to form and have internal diameter less than 0.02 millimeter (0.001 inch) usually.
Can cause a plurality of suitable capillary pipe structures.As more being shown clearly in by the cross sectional view among Fig. 4, typically the metal tube 84 protectiveness ground that is made of stainless steel centers on glass tube 86.The inboard of diameter tube 86 around center glass rod 90 kept the hexagonal arrangement of 6 solid glass rod 88 and wherein all bars have approximately identical diameter.Between bar 88 and the bar 90 and bar 88 and manage the flow region that space 92 between 86 the inboard provides capillary size, with the gas of metering by internal flow limiter 20.The glass tube of the contraction on glass rod 88 and 90 provides the pipe of rigidity and the assembly of bar.Therefore, even inner shaft fracture, the maintenance of the part by glass tube 86 will be kept the capillary flow by the internal diameter of glass tube 86.Metal tube 84 is when selectively having increased further rigidity and durability so that reinforcement elements to be provided when glass rod 88 and 90 shrinks.By the reinforcement of the metal tube 84 selected, the fractureing of glass rod or the glass tube around it will make the function by the restricted flow path of capillary structure not change substantially.
The utility model will further come illustration following by following example and the comparative example of reference, yet they are not interpreted as restriction the utility model.
Comparative example 1
Carry out the measurement of the thrust of the bellows in the conventional vacuum actuated safety check.With reference to figure 5, it illustrates threaded stem, framework, bellows, lid, action of mechanical stop, and the interior annular space of seal bellows chamber is filled into the pressure of 14.7psig with argon gas.Bellows is constructed by 321 stainless steels (being Austenitic Stainless Steel).Suppose that bellows average effective area (MEA) is 0.237in, then the downward power (is unit with the pound) that is produced by the actuating pressure of 300 holders (5.8psia) is that the difference of its internal pressure (14.7psia) and actuating pressure (5.8psia) multiply by MEA (0.237in).Therefore, the downward power of 2.11lbf is applied on pin/poppet valve assembly, thereby has opened safety check, makes gas flow in the gas cylinder.Produced enough breaking forces with this bellows design and be applied to the power of closing on pin/poppet valve, for BF to overcome combination by precompressed spring and internal gas pressure
3, this internal gas pressure is until 600psig.Yet under greater than 600 internal gas pressure, conventional bellows component can not produce enough downward thrust to open valve.Therefore, for BF
3(with other gas), the gas cylinder capacity limit is to the gas cylinder pressure maximum of 600psig.
Example 2
In vacuum actuated safety check of the present utility model, bellows thrust increases by revising the bellows parameter, to utilize conventional gas cylinder mouth opening, has held higher substantially BF again in storage and transporting system
3Capacity.Be used for high power capacity BF
3The bellows component structure of design is shown in Figure 3.The significant change is the bellows material and the annular space stuffing pressure of structure.As previously mentioned, timeliness or precipitation hardening alloy have the manufacturing that is used for bellows, bowden (bordon) pipe, spring etc. and the best property combination of operation.The acquisition of their elastic characteristic is heat treated result, and these are different with Austenitic Stainless Steel.Stuffing pressure in the annular space is increased to the downward thrust that 29.5psia causes the 5.62lbf under the actuating pressure of 300 same holders.Bellows configuration in the utility model has been set up enough power opening valve, thereby allows the gas cylinder fill volume to be higher than 600psig substantially.
At this, vacuum actuated safety check of the present utility model is installed in atmosphere storage and the transporting system and has carried out flux test.Nitrogen is provided in the system, makes that the inlet pressure on the vacuum actuated safety check is 1230psig.Flux test carries out in the time durations of two and one-half-hours.When MFC with flow control when the 2sccm, the pressure transducer that is connected the downstream of user's mouth has been measured and has been lower than the barometric pressure actuating pressure.As shown in fig. 6, for the safety check of the gas cylinder stuffing pressure that has 1230psig, vacuum actuated pressure is between 420 and 440 holders.Therefore, the power additive model that this has indicated the bellows function under the incoming pressure of 1230psig and has confirmed above calculating and illustrated moves out poppet valve and allow gas to remove from high pressure high-capacity storage vacuum conveying system from its valve seat so that suitable thrust to be provided.
Though the utility model is described in detail with reference to its specific embodiment, to persons skilled in the art will be obvious be to carry out multiple change and modification and use equivalent, and do not depart from the scope of subsidiary claims.
Claims (20)
1. system that is used to control pressure fluid, this pressure fluid is discharged from the outlet that comprises pressurized canister hydride or halid compound, and this equipment comprises:
Be used to keep the jar of the pressure fluid of gas phase or part gas phase;
Be used for the mouth main body that is communicated with the outlet of the pressurized canister that defines fluid discharge path;
Be fixed in mouthful main body or the upstream and be suitable for blocking the valve element that the sealing station that flow and allow of fluid by fluid discharge path moves between the open position in fluid longshore current body path;
It is characterized in that, be arranged in the interior bellows chamber of housing in valve element downstream, wherein bellows chamber is filled with and is sealed to the pressure of scope from 14.7psia to 50psia, and bellows is made by the material of selecting from the group that comprises following item: the Steel Alloy of age hardening, the nickel-base alloy of age hardening and copper beryllium alloy; With
Described bellows chamber is communicated with the part of valve element fluid downstream emission path, when having produced vacuum condition with being communicated with of emission path in housing the valve element is moved to open position.
2. system according to claim 1 is characterized in that, the valve element comprises that the expansion of poppet valve and bellows causes pin that poppet valve is displaced to open position.
3. system according to claim 1 is characterized in that, jar at the gaseous fluid of the scope that is included under the maximum capacity condition under the pressure of 600psig to 1500psig.
4. system according to claim 1 is characterized in that bellows chamber is with the wiper seal of 25psia.
5. system according to claim 1 is characterized in that, bellows is the inconel material of age hardening.
6. system according to claim 1 is characterized in that, jar further comprises the limiter to small part in the moving path of longshore current, and it will be included in gas flow in the container and be restricted under the atmospheric pressure and be lower than 35sccm.
7. system according to claim 6 is characterized in that, limiter is at least one conduit.
8. system according to claim 7 is characterized in that, this at least one conduit is the capillary tube that internal diameter is no more than 0.2mm.
9. gas cylinder and valve assembly, it is used to comprise pressure fluid and the control discharging from the pressure fluid of gas cylinder, and this gas cylinder and valve assembly comprise:
Gas cylinder with gas cylinder opening;
Be suitable for mouth main body with gas cylinder opening sealing engagement;
By the mouth main part limitation and fluid input that be positioned at gas cylinder;
By the mouth main part limitation and fluid output that be positioned at the gas cylinder outside;
The fluid discharge path between fluid input and fluid output by the mouth main part limitation;
Be used to control the mobile cut-off valve of fluid of longshore current body emission path;
Be biased to the valve element of having blocked the sealing station that fluid longshore current body emission path flows;
It is characterized in that, vacuum actuated safety check, it comprises filling and the longshore current body emission path of the pressure of the scope that is sealed to from 14.7psia to 50psia is positioned at the bellows chamber in valve element downstream, and bellows is made by the material of selecting from comprise following group: the Steel Alloy of age hardening, the nickel-base alloy of age hardening and copper beryllium alloy; With
Bellows chamber has with respect to the fixing part of the main body of vacuum actuated safety check with when the relative pressure between bellows inside and outside to be made bellows expansion and the valve element is biased in another part that open position can be linked to the valve element when allowing fluid longshore current body emission path mobile with moving.
10. gas cylinder according to claim 9 and valve assembly is characterized in that vacuum actuated safety check intactly or partly is arranged in mouthful main body.
11. gas cylinder according to claim 9 and valve assembly is characterized in that, vacuum actuated safety check is arranged in the upstream of the inherent mouthful main body of gas cylinder.
12. gas cylinder according to claim 9 and valve assembly is characterized in that, bellows is suitable in response to vacuum condition the valve element being moved to open position.
13. gas cylinder according to claim 9 and valve assembly is characterized in that, vacuum actuated safety check comprises poppet valve.
14. gas cylinder according to claim 9 and valve assembly is characterized in that, further comprise the limiter to small part in the moving path of longshore current.
15. gas cylinder according to claim 14 and valve assembly is characterized in that, limiter will be included in gas flow in the gas cylinder and be restricted under atmospheric pressure and be lower than 35sccm.
16. gas cylinder according to claim 15 and valve assembly is characterized in that, limiter comprises the capillary tube of at least one internal diameter less than 0.2mm.
17. gas cylinder according to claim 9 and valve assembly is characterized in that, jar has comprised the gaseous fluid under the pressure of scope from 600psig to 1500psig.
18. gas cylinder according to claim 9 and valve assembly is characterized in that, bellows chamber is with the wiper seal of 25psia.
19. gas cylinder according to claim 9 and valve assembly is characterized in that, bellows is the inconel material of age hardening.
20. the bellows component of a vacuum actuated safety check is characterized in that,
Be arranged in the bellows chamber in the vacuum actuated safety check housing, wherein bellows chamber is filled with and is sealed to the pressure of scope from 14.7psia to 50psia, and wherein bellows is made by the material of selecting from the group that comprises following item: the Steel Alloy of age hardening, the nickel-base alloy of age hardening and copper beryllium; With
Described bellows is in response to the vacuum condition on the bellows chamber outside, so that bellows is with the thrust expansion of 41bf at least.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201820323U CN201273451Y (en) | 2007-12-10 | 2007-12-10 | System, gas cylinder, valve assembly and bellows component used for controlling pressurized fluid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201820323U CN201273451Y (en) | 2007-12-10 | 2007-12-10 | System, gas cylinder, valve assembly and bellows component used for controlling pressurized fluid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201273451Y true CN201273451Y (en) | 2009-07-15 |
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ID=40883798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201820323U Expired - Lifetime CN201273451Y (en) | 2007-12-10 | 2007-12-10 | System, gas cylinder, valve assembly and bellows component used for controlling pressurized fluid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201273451Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103953769A (en) * | 2014-03-28 | 2014-07-30 | 党新洲 | Pressure reducing valve |
| CN111547727A (en) * | 2020-04-17 | 2020-08-18 | 淮阴工学院 | Cylinder re-strengthening device of polysilicon hydrogenation reactor |
| CN112546376A (en) * | 2015-03-24 | 2021-03-26 | 万泰生命系统公司 | Active exhalation valve |
| CN113701051A (en) * | 2020-05-20 | 2021-11-26 | 邦查工业股份有限公司 | Pressure regulating device and gas storage equipment with same |
| WO2023101962A1 (en) * | 2021-12-01 | 2023-06-08 | Entegris, Inc. | Pressure sensing unitary device |
-
2007
- 2007-12-10 CN CNU2007201820323U patent/CN201273451Y/en not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103953769A (en) * | 2014-03-28 | 2014-07-30 | 党新洲 | Pressure reducing valve |
| CN112546376A (en) * | 2015-03-24 | 2021-03-26 | 万泰生命系统公司 | Active exhalation valve |
| CN111547727A (en) * | 2020-04-17 | 2020-08-18 | 淮阴工学院 | Cylinder re-strengthening device of polysilicon hydrogenation reactor |
| CN111547727B (en) * | 2020-04-17 | 2022-03-11 | 淮阴工学院 | Cylinder re-strengthening device of polysilicon hydrogenation reactor |
| CN113701051A (en) * | 2020-05-20 | 2021-11-26 | 邦查工业股份有限公司 | Pressure regulating device and gas storage equipment with same |
| CN113701051B (en) * | 2020-05-20 | 2023-02-17 | 邦查工业股份有限公司 | Pressure regulating device and gas storage equipment with same |
| WO2023101962A1 (en) * | 2021-12-01 | 2023-06-08 | Entegris, Inc. | Pressure sensing unitary device |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090715 |
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| CX01 | Expiry of patent term |