CN201262572Y - Single photon counting imager - Google Patents

Single photon counting imager Download PDF

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Publication number
CN201262572Y
CN201262572Y CNU2007200327019U CN200720032701U CN201262572Y CN 201262572 Y CN201262572 Y CN 201262572Y CN U2007200327019 U CNU2007200327019 U CN U2007200327019U CN 200720032701 U CN200720032701 U CN 200720032701U CN 201262572 Y CN201262572 Y CN 201262572Y
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China
Prior art keywords
single photon
photon counting
anode
microchannel plate
anode collector
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Expired - Lifetime
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CNU2007200327019U
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Chinese (zh)
Inventor
朱香平
赵宝升
缪振华
刘永安
邹玮
张兴华
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

A single photon counting imaging detection device is characterized in that a high-voltage power supply is connected with a low-light-level image intensifier tube through a high-voltage lead; the display, the image processing device and the printer are respectively connected with the computer, an anode collector is also arranged between the micro-optical image intensifier tube and the preamplifier, the anode collector comprises an electrode and a signal lead, wherein the substrate is plated on the substrate, and the anode is connected with the preamplifier through the signal lead; the micro-optical image enhancement tube comprises a photocathode and a microchannel plate, wherein the photocathode and the microchannel plate are sequentially arranged along a light path. The utility model discloses both can read out as the time mark of arrival moment, also can read out the total image of the interior integral number of a cycle in the lump, realize that the single photon of extremely weak target counts and two-dimensional imaging surveys, not only have single photon counting function, can carry out two-dimensional imaging's characteristics to extremely weak luminous target moreover. The utility model has the advantages of large area array, high sensitivity, dark count low, resolution high, imaging linearity good, real-time measurement handles.

Description

Single photon counting formatter
Technical field
The utility model relates to a kind of photon counting imager of atomic low light level acquisition of signal, is specifically related to a kind of single photon counting formatter that is used for the atomic Weak ultraviolet information detection in space.
Background technology
At present, constantly strengthen for atomic low light level Testing requirement in a lot of fields, the faint light detection technology more and more comes into one's own.Faint light image intensifying The Application of Technology has obtained some development, and for example: image intensifier can be realized the low-light (level) target detection; But for the more application in low-light (level) field, the performance of these instruments does not satisfy requirement, for example: the research of utmost point low light level phenomenon such as astronomical sight, the atomic weak light detection in space, bioluminescence are luminous.In these atomic weak light detections, need to obtain complete image by the certain hour integration with after handling by surveying the image space of single photon.These field demands of applications have been facilitated the birth and the development of photon counting imaging counting technology.
At present, with conventional low light level image device, for example: image intensifier, ICCD etc. do not have the single photon counting pattern, so survey less than utmost point weak one; (PMT) can only realize single photon counting with photomultiplier; And realizing that with the array photomultiplier single photon counting imaging mode is very complicated, resolution is not high yet; And for using photon attribute charge-coupled device (CCD), a plurality of pixels of having sampled, the corresponding generation counting of the corresponding incident photon of each pixel, usually adopt the multiframe stack, require high frame speed, otherwise counting rate is low, and need complicated internal circuit, practicality is bad.
Summary of the invention
The purpose of this utility model provides a kind of single photon counting formatter.
The utility model can be realized the detection of single electronics, ion, charged particle, photon, behind position decoding to each electronics, ion, charged particle, photo-event, both can read as the time mark of due in, also total image of one-period integrates can be read in the lump, realize atomic weak target single photon counting and two-dimensional imaging detection, not only have the single photon counting function, and can carry out the characteristics of two-dimensional imaging atomic weak light target.
Technical solution of the present utility model is:
A kind of single photon counting imaging detecting device comprises housing 1, is arranged at optical window 2, low-light image intensifier tube 3, prime amplifier 5, amplification and rectification circuit 6, data collector 7, image processing apparatus 8, computing machine 9 in the housing 1; Display 10, printer 11, high-voltage power supply 12; Described high-voltage power supply 12 is connected with low-light image intensifier tube 3 by high-voltage connection 33; Described display 10, image processing apparatus 8, printer 11 are connected with computing machine 9 respectively, its special character is: also be provided with anode collector 4 between described low-light image intensifier tube 3 and the prime amplifier 5, described anode collector 4 comprises quartz glass substrate 42, is plated in anode 41 and signal lead 43 on the substrate 42, and described anode 41 is connected with prime amplifier 5 by signal lead 43; Described low-light image intensifier tube 3 comprises photocathode 31 that sets gradually along light path and the microchannel plate 32 that is connected with photocathode 31.
Above-mentioned anode collector 4 comprises W, S, three electrodes of Z, and three above-mentioned electrode mutually insulateds, insulated wire width are 20~30 μ m.
Above-mentioned microchannel plate 32 is two or three and is cascaded as good.
Above-mentioned anode 41 is advisable with gold electrode.
The conductive layer thickness of above-mentioned gold electrode is 2 μ m.
Above-mentioned substrate 42 is quartz glass or pottery, thickness 2mm~3mm.
Also comprise support 13, above-mentioned microchannel plate 32 is fixed on the support 13 with anode collector 4.
Above-mentioned microchannel plate 32 and the distance between the anode collector 4 are 7~11mm.
Behind above-mentioned prime amplifier 5 and amplification and rectification circuit 6 electromagnetic screens, closely arrange and place after the housing 1.
Above-mentioned housing 1 is the shielded metal housing, and described shielded metal housing has a vacuum lumen.
The utlity model has following advantage:
1) big face battle array.Traditional C CD focal plane is generally 1/3,1/2,2/3 inch, need big area array CCD will take the splicing scheme usually, and the anode collector in this instrument according to demand, can design arbitrarily and process, and need not splicing.
2) high sensitivity, great dynamic range.Native system adopts 2 or 3 microchannel plate 32 cascades, and gain reaches 10 6~10 8, can improve sensitivity and dynamic range greatly.
3) dark counts is low.Adopt microchannel plate 32 concatenated schemes, effectively reduce the ion feedback, thereby effectively reduce dark counts, dark counts is lower than 0.2counts.cm at present -2.s -1
4) resolution height.This single photon counting formatter adopts continuous anode decoding photo-event, spatial resolution mainly is subjected to the electronic noise influence of electronics read-out system, adopt low noise charge sensitive preamplifier that signal is amplified, optimization by the electronics read-out system, can reduce the influence of electronic noise greatly, thereby effectively improve spatial resolution, spatial resolution can reach 30~50 μ m at present.
5) the imaging linearity is good, measures in real time and handles.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present utility model;
Fig. 2 anode collector structural representation;
The drawing reference numeral explanation:
1-housing; 2-optical window; 3-low-light image intensifier tube; 31-photocathode; 32-microchannel plate; 33-high-voltage connection; 4-anode collector; 41-anode; 42-substrate; 43-signal lead; 5-prime amplifier; 6-amplification and rectification circuit; 7-data collector; 8-image processing apparatus; 9-computing machine; 10-display; 11-printer; 12-high-voltage power supply; 13-support.
Embodiment
The utility model principle and the course of work:
The single photon counting method is utilized the characteristics of photosignal nature discretize under the low light level, adopts accurate pulse height to screen technology and digital counting technology, can come out the low light level signal extraction that is submerged in the ground unrest.Particularly when the low light level shines the photoelectron negative electrode, each incident photon makes electronics of photocathode 31 emissions with certain probability (being quantum efficiency), this photoelectron forms a current impulse at last through the multiplication of dynode system in plate tank, form a potential pulse by pull-up resistor, this pulse is called single photon pulses.
Electron cloud (electron beam group) after microchannel plate 32 multiplications is collected by anode collector 4, and anode collector 4 panels have W, S, and three electrodes of Z are referring to accompanying drawing 2.
At anode W, S, three contact conductors of Z are connected with prime amplifier 5 respectively, and prime amplifier 5 output signals are shaped the back by digital acquisition device 7 collections, stores processor on computing machine 9 through main amplifier.By calculating the centroid position of output charge ratio decision electron cloud on anode plate.
The position decoding algorithm is:
x = Q S - X talk Q Z Q W + Q S + Q Z y = Q W - X talk Q Z Q W + Q S + Q Z
X TalkBe the correction factor of crosstalking, the capacitive coupling between it and the electron collection area is relevant.
The microelectronics planar technology is adopted in the design of anode collector 4, and is gold-plated on quartz glass substrate, obtains gold electrode by photoetching.In order to improve sensitivity, anode collector 4 anode conductive layers adopt gold.Anode collector 4 anodes make to need to go up the coating photoresist at treated substrate (quartz glass, pottery) earlier, then substrate are carried out preceding baking, and again with the radiation source exposure, exposure is after development, rinsing, back baking, etching, manufacturing procedure such as remove photoresist.Through just can on substrate, forming how much bargraphss that have identical image information with mask after this a whole set of operation.
Referring to Fig. 1, optical window 2 is used to import the photon from target, and low-light image intensifier tube 3 strengthens as opto-electronic conversion and electronics, receives described photon by described optical window 2; Photoelectron forms electron cloud through the multiplication of cascade microchannel plate 32 assemblies, is collected by anode collector 4, by signal electrode signal is drawn again, and electrode is with the signal output of obtaining; By prime amplifier 5 signal is amplified, by amplification and rectification circuit 6 signal done further amplification shaping again; Data collector 7 is responsible for 3 road signals are gathered, and digitizing as a result, obtains three way word signals, passing to computing machine 9 stores, shows, handles in real time by image processing apparatus 8, with three tunnel results added, obtain data and put as threshold, whether judgment data is incident, if incident, then effectively handle, by the geometric position X that position decoding is calculated this incident, Y coordinate, be mapped to the corresponding pixel of image, give corresponding gray scale; Like this, the integration of certain hour (exposure) has just been realized single photon counting and imaging.
The low-light image intensifier tube is installed in the housing 1, and housing 1 is evacuated, and the outside metal material of using is as shielding.Microchannel plate 32 is by electrode and high pressure is provided, and 2 microchannel plate 32 high pressure are generally 1800V.Prime amplifier 5 is used to amplify the signal from anode collector 4 outputs, is attached thereto by signal lead 43.In order to guarantee the high frequency characteristics of treatment circuit, effectively reduce noise level again, prime amplifier 34 and the compact as far as possible mode of amplification and rectification circuit 35 are contained in the back of housing 1, and carry out electromagnetic screen.
Microchannel plate 32 could be worked under certain high pressure, the operating voltage of monolithic microchannel plate 32 is generally 800~1000V, relative microchannel plate 32 output faces of anode collector 4 anodes also must have certain current potential, the electron cloud that microchannel plate 32 is come out is normally beaten in the above, help anode and collect electronics, distorted in the electron cloud center.Therefore 2 microchannel plate 32 cascades of this novel employing need microchannel plate 32 operate as normal to need D.C. regulated power supply about 1800V~2000V, and stabilized voltage supply adopts the miniature high-voltage power supply 12 of modularization, requires power supply stability high, and ripple factor is little.High-voltage power supply 12 each several part functional circuits are encapsulated respectively, done High-Voltage Insulation and shielding processing after, be assembled in the cabinet, output voltage values is directly shown by the front panel digital watch.
The function of amplifier is photoelectron pulse and noise spike linear amplification, electronic impulse rise time≤the 3ns that comes out from two microchannel plates 32, this reaches 100MHz with regard to the pass band that requires to amplify big device, and the linear dynamic range of broad and lower thermonoise are arranged.
This imager will design a rational support 13 and be used for fixing two V-type cascade microchannel plates 32 and anode collector 4, and major requirement has:
1) degree of tightness of mechanical fixation is suitable, the stationkeeping that should guarantee microchannel plate 32 and anode collector 4 is firm, the electrode contact is good, do not press too tightly again or too the pine, press to such an extent that too tightly understand microchannel plate 32 pressure breaks, too pine can cause electrode contact bad, the excessive even discharge of local current and damage MCP;
2) compact conformation has function of shielding to signal, especially to fast signal.But the distance between WSZ anode and the MCP is wanted suitably too far can to influence resolution, too closely can increase the distributed capacitance between WSZ anode and the microchannel plate 32, influences fast signal quality, and the distance between them generally remains on 7~11mm for well;
3) microchannel plate 32 damages easily, need to change, so dismounting will make things convenient for repeatability to get well, smooth with microchannel plate 32 electrodes in contact in addition, flexible, guarantee that electric conductivity is good, between two microchannel plates 32 slit of giving vent to anger is arranged, and installation process will carry out in very clean environment, uses or causes partial breakdown in case dust in air drops on to have a strong impact on microchannel plate 32 surfaces.
Determine the centroid position of electron cloud by the ratio of surveying three path electrode output charge amounts, so the key of electronics read-out system is how to obtain the quantity of electric charge of three road signals accurately.Because the signal amplitude less (tens millivolts) of detector output need be amplified signal, and then be handled measurement.The transmission line that detector is connected with amplifier is long more, and distributed capacitance is just big more, and signal to noise ratio (S/N ratio) is more little.In addition, also be subjected to extraneous interference easily, in this section distance transmission course, be subjected to extraneous interference in order to reduce the detector output terminal to the influence of distributed capacitance between the amp.in and signal, improve signal to noise ratio (S/N ratio), usually the signal amplifying part branch is divided into prime amplifier 5 and amplification and rectification circuit 6 two parts.
The utility model single photon counting formatter can be surveyed single electrons/ions/charged particle/photon, behind position decoding to each electrons/ions/charged particle/photo-event, both can read, also total image of one-period integrates can be read in the lump as the time mark of due in.Realization is to the imaging detection of low light level imaging and ultraviolet, extreme ultraviolet waveband etc.
Single those of skill in the art know; can make different distortion according to mentality of designing of the present utility model; for example adopt different photocathodes; can derive ultraviolet single photon counting formatter, visible light single photon counting formatter, infrared single photon counting formatter etc.; and not being subjected to the restriction of the examples of implementation announced, these distortion all do not exceed the scope that claim of the present invention is asked for protection.

Claims (10)

1. single photon counting formatter, comprise housing (1), be arranged at optical window (2), low-light image intensifier tube (3), prime amplifier (5), amplification and rectification circuit (6), data collector (7), image processing apparatus (8), computing machine (9) in the housing (1); Display (10), printer (11), high-voltage power supply (12); Described high-voltage power supply (12) is connected with low-light image intensifier tube (3) by high-voltage connection (33); Described display (10), image processing apparatus (8), printer (11) are connected with computing machine (9) respectively, it is characterized in that: also be provided with anode collector (4) between described low-light image intensifier tube (3) and the prime amplifier (5), described anode collector (4) comprises substrate (42), is plated in anode (41) and signal lead (43) on the substrate (42), and described anode (41) is connected with prime amplifier (5) by signal lead (43); Described low-light image intensifier tube (3) comprises photocathode (31) that sets gradually along light path and the microchannel plate (32) that is connected with photocathode (31).
2. according to right 1 described single photon counting formatter, it is characterized in that: described anode collector (4) comprises W, S, three electrodes of Z, and described three electrode mutually insulateds, insulated wire width are 20~30 μ m.
3. according to right 1 described single photon counting formatter, it is characterized in that: described microchannel plate (32) is two or three.
4. according to right 1~3 arbitrary described single photon counting formatter, it is characterized in that: described anode (41) is a gold electrode.
5. according to right 4 described single photon counting formatters, it is characterized in that: the conductive layer thickness of described gold electrode is 2 μ m.
6. according to right 5 described single photon counting formatters, it is characterized in that: described substrate (42) is quartz glass or pottery etc.
7. according to right 6 described single photon counting formatters, it is characterized in that: also comprise support (13), described microchannel plate (32) is fixed on the support (13) with anode collector (4).
8. according to right 7 described single photon counting formatters, it is characterized in that: the distance between described microchannel plate (32) and the anode collector (4) is 3~5mm.
9. according to right 8 described single photon counting formatters, it is characterized in that: behind described prime amplifier (5) and amplification and rectification circuit (6) electromagnetic screen, closely arrange and place housing (1) afterwards.
10. according to right 9 described single photon counting formatters, it is characterized in that: described housing (1) is the shielded metal housing, and described shielded metal housing has a vacuum lumen.
CNU2007200327019U 2007-09-11 2007-09-11 Single photon counting imager Expired - Lifetime CN201262572Y (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101387548B (en) * 2007-09-11 2011-12-07 中国科学院西安光学精密机械研究所 Single Photon Counting Imager
CN102507464A (en) * 2011-10-14 2012-06-20 深圳市世纪天源环保技术有限公司 Photon counting full-spectrum direct reading absorption spectrometer
CN104079828A (en) * 2014-06-30 2014-10-01 中国科学院西安光学精密机械研究所 Low-light-level ultrafast high-repetition-frequency imaging detection device and method
CN104568176A (en) * 2014-12-29 2015-04-29 成都麟鑫泰来科技有限公司 Ultrahigh-speed single-photon imaging device of photon camera
CN106054038A (en) * 2016-06-29 2016-10-26 南京理工大学 Connected-domain-marking-based ultraviolet single photon counting method
CN112197879A (en) * 2020-09-14 2021-01-08 中国科学院西安光学精密机械研究所 High-time-resolution single photon detection method and single photon detection system

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101387548B (en) * 2007-09-11 2011-12-07 中国科学院西安光学精密机械研究所 Single Photon Counting Imager
CN102507464A (en) * 2011-10-14 2012-06-20 深圳市世纪天源环保技术有限公司 Photon counting full-spectrum direct reading absorption spectrometer
CN102507464B (en) * 2011-10-14 2014-05-07 深圳市世纪天源环保技术有限公司 Photon counting full-spectrum direct reading absorption spectrometer
CN104079828A (en) * 2014-06-30 2014-10-01 中国科学院西安光学精密机械研究所 Low-light-level ultrafast high-repetition-frequency imaging detection device and method
CN104079828B (en) * 2014-06-30 2017-12-19 中国科学院西安光学精密机械研究所 Low-light-level ultrafast high-repetition-frequency imaging detection device and method
CN104568176A (en) * 2014-12-29 2015-04-29 成都麟鑫泰来科技有限公司 Ultrahigh-speed single-photon imaging device of photon camera
CN104568176B (en) * 2014-12-29 2017-10-13 成都麟鑫泰来科技有限公司 Photon camera ultrahigh speed single photon image device
CN106054038A (en) * 2016-06-29 2016-10-26 南京理工大学 Connected-domain-marking-based ultraviolet single photon counting method
CN106054038B (en) * 2016-06-29 2019-01-15 南京理工大学 A kind of method of the ultraviolet single photon counting of connected component labeling
CN112197879A (en) * 2020-09-14 2021-01-08 中国科学院西安光学精密机械研究所 High-time-resolution single photon detection method and single photon detection system
CN112197879B (en) * 2020-09-14 2021-10-12 中国科学院西安光学精密机械研究所 High-time-resolution single photon detection method and single photon detection system

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