CN201254620Y - Continuous polysilicon purification crystallization furnace - Google Patents
Continuous polysilicon purification crystallization furnace Download PDFInfo
- Publication number
- CN201254620Y CN201254620Y CNU2008200303714U CN200820030371U CN201254620Y CN 201254620 Y CN201254620 Y CN 201254620Y CN U2008200303714 U CNU2008200303714 U CN U2008200303714U CN 200820030371 U CN200820030371 U CN 200820030371U CN 201254620 Y CN201254620 Y CN 201254620Y
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Abstract
The utility model relates to a continuous type polysilicon purifying and crystallizing furnace and belongs to polysilicon smelting equipment, in particular to a continuous type purifying and crystallizing equipment of polysilicon materials used for the solar energy photovoltaic industry; the furnace is mainly composed of a preheating furnace, a purifying and crystallizing furnace, an electric trailer and the like. The preheating furnace is used for the preheating treatment of a crucible and takes on a shuttle kiln structure which comprises a furnace body, a trolley, a lifting door, the crucible, a heating system, an electric control part and the like. The purifying and crystallizing furnace comprises the furnace body, the trolley, the lifting door, the heating system, a temperature reducing system and the like. The furnace body of the purifying and crystallizing furnace is tunnel type, the top part of the furnace body is arched type, two groups of U-type silicon-molybdenum rod heating elements are vertically hung at the two sides, the furnace body is divided into a high-temperature stewing zone, a temperature reducing zone, a crystallizing zone and a cooling zone along the length direction of the furnace body. The continuous type polysilicon purifying and crystallizing furnace utilizes the preheating furnace and the purifying and crystallizing furnace in a combined manner and can realize the characteristics of continuous production, high output, low production cost, less pollution, less investment and high automation degree; the continuous type polysilicon purifying and crystallizing furnace realizes the directional cooling in a continuous type furnace, thus being good for improving the acceptability of the silicon purification and has good economic as well as social benefits.
Description
One, technical field
The utility model belongs to a kind of polysilicon smelting equipment, is the continous way purifying crystal equipment of photovoltaic industry with polycrystalline silicon material.
Two, background technology
Polysilicon has semiconductor property, is very important defect semiconductor material, is widely used in fields such as electronics, photovoltaic industry, space flight, aviation, information, traffic, communication, and the market requirement is with increasing.The purification of polycrystalline silicon material at present is divided into physical metallurgy method and improvement Siemens Method substantially, and the investment of improvement Siemens Method is big, seriously polluted, cost is high, technical requirements is high.
Three, summary of the invention
The purpose of this utility model provides a kind of continuous polysilicon purifying crystal equipment that utilizes the physical metallurgy method, fused silicon material is poured in the crucible of preheating, in purifying crystal oven, realize the continuous purifying crystal of polysilicon product, have that technology is simple, pollution is little, cost is low, the output advantages of higher.
The utility model is achieved like this: it mainly is made up of preheating oven, purifying crystal oven, electric trailer etc.
Preheating oven is used for the thermal pretreatment of crucible, preheating oven is the shuttle kiln structure, comprise body of heater, chassis, overhead door, crucible, heating system, the electrical control division composition that grades, the preheating oven body of heater is that high-temperature refractory is built into, the top is an arch form, the both sides hanging of U type Si-Mo rod heating unit, and chassis is positioned at the body of heater bottom, overhead door respectively is provided with one before and after body of heater, crucible is placed on the chassis;
Purifying crystal oven comprises compositions such as body of heater, chassis, overhead door, heating system, cooling system; The purifying crystal furnace body is a tunnel like, the body of heater top is an arch form, be built into high temperature corundum-mullite refractory materials, alumina hollow ball, mullite light cinder brick etc., the both sides hanging of two groups of U type Si-Mo rod heating units, size at the effective fire end of crystallizing field U type Si-Mo rod is progressively shortening arrangement, is divided into quiescence in high temperature district A, cooling area B, crystallizing field J, cooling zone D along the body of heater length direction;
Chassis is built into refractory materials, is provided with leakage hopper, and four-wheel is arranged down; Overhead door is electronic mode.Add thermal recovery SCR control mode; Cooling system adopts indirect spacer cooling method;
Electric trailer is made up of motor, step-down gear, chain, trailer etc., realizes that chassis is by the ferry-boat of preheating oven to purifying crystal oven.
The utlity model has following advantage and characteristics:
1, the utility model adopts preheating oven and purifying crystal oven to be used in combination, and can realize serialization production, the output height.
2, the utlity model has the low characteristics of production cost.
3, the utlity model has the little advantage of pollution.
4, the utility model adopts the special arrangement of many warm area controls and heating power, has directed refrigerative characteristics.
5, the utlity model has the characteristics that investment is little, level of automation is high.
The utility model continuous polysilicon purifying crystal oven is realized directed cooling in continuous furnace, help the raising of silicon purification qualification rate, has good economic benefit and social benefit.
Four, description of drawings
Below in conjunction with accompanying drawing the utility model is described further.
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is a preheating oven structure iron of the present utility model.
Fig. 3 is the indirect spacer air-cooled structure figure of the utility model crystallizing field.
Fig. 4 is a crystallizing field heating unit layout drawing of the present utility model.
Wherein:
Five, implementation
The utility model relates to a kind of continuous polysilicon purifying crystal oven, it mainly is made up of preheating oven, purifying crystal oven, electric trailer etc., comprises that thruster (1), electric trailer (2), overhead door (3) (5) (7) (9), crystal growing furnace (4), outside track (6), preheating oven (8), chassis (10) constitute.Thruster (1) advances for hydraulic pressure, provide power resources by Hydraulic Station, be positioned at the positive front portion of crystal growing furnace (4), preheating oven (8) is used for the thermal pretreatment of crucible, preheating oven (8) is the shuttle kiln structure, roof of the furnace is an arch form structure, but front and back are provided with free lifting hermatic door (7) (9), preheating oven (8) is used for the preheating of chassis (10) and top crucible, adopt U type Si-Mo rod (8-1) both sides vertically to heat in the preheating oven (8), the body of heater of preheating oven (8) is with high temperature resistant corundum mullite, refractory materialss such as alumina hollow ball (8-2) are built into, and need the crucible (8-3) of preheating to be placed on the chassis (10).
Purifying crystal oven (4) inside is the arch form tunnel like, adopt many warm area controls according to the parking stall, crystal growing furnace (4) but body of heater cover on the tangential movement successive chassis (10) by dynamic seal, in order to guarantee the stability of crystal growing furnace (4) internal temperature, but hermatic door (3) (5) outside track (6) that is provided with free lifting before and after it be arranged in parallel with crystal growing furnace (4), is used for the circulation of chassis (10).Electric trailer (2) is made up of drive-motor, step-down gear, chain etc., respectively establishes a cover before and after crystal growing furnace (4), is used for the ferry-boat that outside track (6) is gone up chassis and the inner chassis of crystal growing furnace (4).
Purifying crystal oven (4) comprises compositions such as body of heater, chassis, overhead door, heating system, cooling system; The purifying crystal furnace body is a tunnel like, be built into high temperature corundum-mullite refractory materials (T), alumina hollow ball, mullite light cinder brick etc., the top of purifying crystal oven (4) is an arch form, the both sides hanging of two groups of U type Si-Mo rods (R) heating unit, size at the effective fire end of two groups of U types of crystallizing field Si-Mo rod (R) is progressively shortening arrangement, is divided into quiescence in high temperature district A, cooling area B, crystallizing field J, cooling zone D along the body of heater length direction; In order to improve the cooling-down effect of crystal growing furnace (4) at crystallizing field, realize effective control that the crystallizing field temperature field distributes, the interference of air-flow to burner hearth reduces to lower the temperature, adopt indirect spacer air-cooled structure in crystallizing field J burner hearth both sides, its underpart is provided with cold wind import a, and top side portion is provided with heat outlet b, and freezing air flows into from bottom cold wind import a, take away the heat that discharges by the burner hearth product, discharge through top side portion heat outlet b; Chassis (10) top is provided with supporting bable tops, and sidepiece is established the leakage receiving tank, and structures such as thermal trough are established in the bottom, can improve the temperature of crucible bottom, can prevent that also a small amount of leakage from causing the truck accident.Chassis (10) adopts bent envelope+sand seal sealed structure with purifying crystal oven (4), reduces freezing air and enters in the stove, and chassis (10) bottom is provided with four-wheel, and bearing is the heatproof bearing.
The crystallizing field of purifying crystal oven (4) is provided with a plurality of control warm areas in order to realize product directed refrigerative effect from bottom to top at crystallizing field, and progressively shortens the size of effective fire end of U type Si-Mo rod (R) at crystallizing field, to reduce the layout of power in the bottom.
Claims (3)
1, a kind of continuous polysilicon purifying crystal oven, it is characterized in that it is by preheating oven (8), purifying crystal oven (4), compositions such as electric trailer, it comprises thruster (1), electric trailer (2), overhead door (3) (5) (7) (9), purifying crystal oven (4), outside track (6), preheating oven (8), chassis (10), thruster (1) advances for hydraulic pressure, be positioned at the positive front portion of crystal growing furnace (4), preheating oven (8) is the shuttle kiln structure, roof of the furnace is an arch form structure, preheating oven (8) is preceding, but after be provided with free lifting hermatic door (7) (9), the both sides hanging of U type Si-Mo rod (8-1) heating unit, the crucible of preheating (8-3) is placed on the chassis (10); Purifying crystal oven (4) comprises body of heater, chassis, overhead door, heating system, compositions such as cooling system, purifying crystal oven (4) body of heater is a tunnel like, the top is an arch form, the both sides hanging of two groups of U type Si-Mo rods (R) heating unit, size at the effective fire end of two groups of U types of crystallizing field Si-Mo rod (R) is progressively shortening arrangement, be divided into quiescence in high temperature district A along the body of heater length direction, cooling area B, crystallizing field J, cooling zone D, adopt indirect spacer air-cooled structure in crystallizing field J burner hearth both sides, chassis (10) top is provided with supporting bable tops, sidepiece is established the leakage receiving tank, thermal trough is established in the bottom, chassis (10) adopts bent envelope+sand seal sealing with purifying crystal oven (4), chassis (10) bottom is provided with four-wheel, and bearing is the heatproof bearing; Electric trailer (2) is made up of drive-motor, step-down gear, chain etc., respectively establishes a cover before and after crystal growing furnace (4), and realization outside track (6) is gone up the ferry-boat of chassis and the inner chassis of crystal growing furnace (4).
2, continuous polysilicon purifying crystal oven as claimed in claim 1, the body of heater that it is characterized in that preheating oven (8) is built into refractory materialss such as high temperature resistant corundum mullite, alumina hollow balls, and refractory materialss such as the high temperature resistant corundum mullite of the usefulness of purifying crystal oven (4), alumina hollow ball are built into.
3, continuous polysilicon purifying crystal oven as claimed in claim 1 is characterized in that: indirect spacer air-cooled structure is adopted in crystallizing field J burner hearth both sides, and its underpart is provided with cold wind import a, and top side portion is provided with heat outlet b.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200303714U CN201254620Y (en) | 2008-09-24 | 2008-09-24 | Continuous polysilicon purification crystallization furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008200303714U CN201254620Y (en) | 2008-09-24 | 2008-09-24 | Continuous polysilicon purification crystallization furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201254620Y true CN201254620Y (en) | 2009-06-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008200303714U Expired - Lifetime CN201254620Y (en) | 2008-09-24 | 2008-09-24 | Continuous polysilicon purification crystallization furnace |
Country Status (1)
| Country | Link |
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| CN (1) | CN201254620Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102002755A (en) * | 2010-12-14 | 2011-04-06 | 上海晨华电炉有限公司 | Crystalline silicon ingot furnace thermal field structure with two-stage thermal insulation cage |
| CN102303868A (en) * | 2011-07-28 | 2012-01-04 | 江苏兆晶光电科技发展有限公司 | Reusing and degumming process of polycrystalline or monocrystalline silicon waste material and special annealing furnace |
| CN102701213A (en) * | 2012-06-28 | 2012-10-03 | 佳科太阳能硅(龙岩)有限公司 | Solar polycrystalline silicon purification equipment employing directional solidification metallurgical method |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN103643290A (en) * | 2013-12-02 | 2014-03-19 | 昆明理工大学 | Method for purifying high-purity alumina for sapphire crystals |
-
2008
- 2008-09-24 CN CNU2008200303714U patent/CN201254620Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102002755A (en) * | 2010-12-14 | 2011-04-06 | 上海晨华电炉有限公司 | Crystalline silicon ingot furnace thermal field structure with two-stage thermal insulation cage |
| CN102303868A (en) * | 2011-07-28 | 2012-01-04 | 江苏兆晶光电科技发展有限公司 | Reusing and degumming process of polycrystalline or monocrystalline silicon waste material and special annealing furnace |
| CN102303868B (en) * | 2011-07-28 | 2012-10-10 | 江苏兆晶光电科技发展有限公司 | Reusing and degumming process of polycrystalline or monocrystalline silicon waste material and special annealing furnace |
| CN102701213A (en) * | 2012-06-28 | 2012-10-03 | 佳科太阳能硅(龙岩)有限公司 | Solar polycrystalline silicon purification equipment employing directional solidification metallurgical method |
| CN102701213B (en) * | 2012-06-28 | 2015-02-11 | 佳科太阳能硅(龙岩)有限公司 | Solar polycrystalline silicon purification equipment employing directional solidification metallurgical method |
| CN103451722A (en) * | 2013-08-06 | 2013-12-18 | 浙江晶盛机电股份有限公司 | External continuous feeder capable of being shared by multiple coil bases |
| CN103643290A (en) * | 2013-12-02 | 2014-03-19 | 昆明理工大学 | Method for purifying high-purity alumina for sapphire crystals |
| CN103643290B (en) * | 2013-12-02 | 2016-03-30 | 昆明理工大学 | Method for purifying high-purity alumina for sapphire crystals |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090610 |