CN201220915Y - Liquid supply apparatus capable of improving stable reliability - Google Patents

Liquid supply apparatus capable of improving stable reliability Download PDF

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Publication number
CN201220915Y
CN201220915Y CNU2008200576938U CN200820057693U CN201220915Y CN 201220915 Y CN201220915 Y CN 201220915Y CN U2008200576938 U CNU2008200576938 U CN U2008200576938U CN 200820057693 U CN200820057693 U CN 200820057693U CN 201220915 Y CN201220915 Y CN 201220915Y
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CN
China
Prior art keywords
liquid
buffer container
withstand voltage
feed device
improves reliability
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Expired - Lifetime
Application number
CNU2008200576938U
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Chinese (zh)
Inventor
王学利
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Semiconductor Manufacturing International Beijing Corp
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Semiconductor Manufacturing International Shanghai Corp
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Priority to CNU2008200576938U priority Critical patent/CN201220915Y/en
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Abstract

The utility model provides a liquid feeding device capable of improving the stable reliability. The device is provided with a liquid storage tank filled with liquid, an imbibing pipeline arranged in the liquid storage tank, an imbibing module for imbibing the liquid in the liquid storage tank and a liquid supply pipeline for supplying the liquid imbibed by the imbibing module. The imbibing module in the prior art is a pump electrically controlled has the problems such as bad stability and low reliability. The liquid feeding device is further provided with a voltage withstand buffer container arranged between a driving module and the liquid supply pipeline; the imbibing module is a vacuum generator with a first inlet, a second inlet and an outlet; the first inlet is used for pumping in compressed gas; the second inlet is connected with the imbibing pipeline; and both the outlet and the liquid supply pipeline are connected on the voltage withstand buffer container. By adopting the utility model, the stable reliability of liquid supply can be improved.

Description

A kind of liquid feed device that improves reliability
Technical field
The utility model relates to liquid feed device, relates in particular to a kind of liquid feed device that improves reliability.
Background technology
In the commercial production field,, can when using solution or liquid, not prepare specially again or prepare usually, and the liquid feed device of use prior art is as shown in Figure 1 realized the supply of solution or liquid for raising the efficiency and handled easily.As shown in Figure 1, the liquid feed device of prior art has the fluid reservoir 10 that liquid is housed, be arranged on the liquid sucking tube road 11 in the fluid reservoir 10, be connected on the liquid sucking tube road 11 and draw drawing liquid module 12 and being used to supply the feed liquid pipeline 13 that draws the liquid that liquid module 12 drawn of liquid in the fluid reservoir 10, wherein, this draws liquid module 12 and is diaphragm pump, it comes compressed gas supplying by electromagnetic valve 14, also be respectively arranged with on this liquid sucking tube road 11 and this feed liquid pipeline 13 and draw fluid valve 110 and feed flow valve 130, this electromagnetic valve 14 is controlled its state by control module 15, also be connected with pressure gas on this electromagnetic valve 14, this pressure gas enters electromagnetic valve 14 by pressure-modulation valve 17 and air intake valve 16.
The liquid feed device of above-mentioned prior art needs to open earlier control module 15 and air intake valve 16 and passes through pressure-modulation valve 17 and regulate compressed-air actuated pressure when feed flow, pressurized air after will regulating is afterwards delivered to by electromagnetic valve 14 and is drawn liquid module 12 (being diaphragm pump), fluid valve 110 is drawn in unlatching this moment and feed flow valve 130 carries out feed flow, but because the employed liquid module 12 of drawing is the situation that therefore membrane pump exists the feed flow shakiness, membrane pump needs control module 15 and electromagnetic valve 14 to come supply gas in addition, thereby causes diaphragm pump to have the labile factor that exists because of power supply trouble.
Therefore, how to provide a kind of liquid feed device that improves reliability, become the technical matters that industry needs to be resolved hurrily to improve the reliability of feed flow.
The utility model content
The purpose of this utility model is to provide a kind of liquid feed device that improves reliability, by described liquid feed device can be reliable and stable supply liquid.
The purpose of this utility model is achieved in that a kind of liquid feed device that improves reliability, it has a fluid reservoir that liquid is housed, one is arranged on the liquid sucking tube road in the fluid reservoir, one draws the feed liquid pipeline that the liquid that the liquid module drawn is drawn in liquid module and a supply that draws of liquid in the fluid reservoir, this liquid feed device also has a withstand voltage buffer container that is arranged between driver module and feed liquid pipeline, this draws the liquid module for having first inlet, the vacuum generator of second inlet and an outlet, this first inlet is used to feed pressure gas, this second inlet is connected on this liquid sucking tube road, and this outlet and feed liquid pipeline all are connected on this withstand voltage buffer container.
In the liquid feed device of above-mentioned improved reliability, this is withstand voltage, and buffer container inside is provided with a vertical slide bar, this vertical slide bar is provided with a floating block that this vertical slide bar moves in the buoyancy function lower edge, and this floating block contacts with this withstand voltage buffer container internal face.
In the liquid feed device of above-mentioned improved reliability, the path of this floating block institute warp of this withstand voltage buffer container is provided with a perforate, and this perforate is apart from this withstand voltage buffer container bottom one preset height.
In the liquid feed device of above-mentioned improved reliability, be connected with a circulating line in this perforate, an end of this circulating line is connected to this withstand voltage buffer container by this perforate, and the other end of this circulating line is connected on this liquid sucking tube road.
In the liquid feed device of above-mentioned improved reliability, the diameter in this liquid sucking tube road equals the diameter of this liquid-transport pipe-line and this feed liquid pipeline, and less than the diameter of this circulating line.
In the liquid feed device of above-mentioned improved reliability, this is withstand voltage, and the buffer container bottom also is provided with a pressure release valve.
In the liquid feed device of above-mentioned improved reliability, this outlet is connected to the top of this withstand voltage buffer container by a liquid-transport pipe-line.
In the liquid feed device of above-mentioned improved reliability, be respectively arranged with one on this liquid sucking tube road and this feed liquid pipeline and draw a fluid valve and a feed flow valve.
In the liquid feed device of above-mentioned improved reliability, this pressure gas is a compressed nitrogen.
In the liquid feed device of above-mentioned improved reliability, this liquid sucking tube road is provided with an one-way cock between outlet and circulating line.
Thereby compare for the reliability that the pump by electrical control influences feed flow with the liquid device that draws of the prior art, the liquid feed device that improves reliability of the present utility model uses vacuum generator as drawing liquid device, and the liquid that is drawn is focused in the withstand voltage buffer container, and on withstand voltage buffer container wall, offer perforate and connect circulating line, the vertical slide bar that is connected with floating block is set in withstand voltage buffer container again, floating block can move up and down under buoyancy function to open this perforate and to stablize liquid level in the withstand voltage buffer container, so can guarantee stably to carry out feed flow, the liquid sucking tube road is not influenced by power failure etc. in addition, thereby can increase the reliability of feed flow greatly.
Description of drawings
The liquid feed device that improves reliability of the present utility model is provided by following embodiment and accompanying drawing.
Fig. 1 is the composition structural representation of the liquid feed device of prior art;
Fig. 2 is the composition structural representation that improves the liquid feed device of reliability of the present utility model.
The specific embodiment
Below will be described in further detail the liquid feed device that improves reliability of the present utility model.
The liquid feed device that improves reliability of the present utility model has fluid reservoir 20, liquid sucking tube road 21, withstand voltage buffer container 22, draws liquid module 23, feed liquid pipeline 24, air supply valve 25, pressure-modulation valve 26, pressure relief valve 27 and maintenance pipeline 28, below the important document of respectively forming that improves the liquid feed device of reliability of the present utility model is described in detail.
The solution that described fluid reservoir 20 is used for device liquid or prepares, described liquid sucking tube road 21 is arranged in the fluid reservoir 20 and it is provided with feed flow valve 210, withstand voltage buffer container 22 inside are provided with vertical slide bar 220, described vertical slide bar 220 is provided with a floating block 221 that described vertical slide bar 220 moves in the buoyancy function lower edge, and described floating block 221 contacts with the internal face of described withstand voltage buffer container 22.The path of 221 warps of described withstand voltage buffer container 22 described floating blocks is provided with a perforate (not shown), described perforate is apart from described withstand voltage buffer container 22 bottoms one preset height (choosing is greater than half height of withstand voltage buffer container usually), be connected with circulating line 222 in the described perforate, one end A of described circulating line 222 is connected to described withstand voltage buffer container 22 by described perforate, and the other end B of described circulating line 222 is connected on the described liquid sucking tube road 21.Described liquid sucking tube road 21 is provided with one-way cock 211 and enters fluid reservoir 20 to avoid pressure gas in outlet 231 and 222 of circulating lines.
The described liquid module 23 of drawing is vacuum generator, it has first inlet, 230, second inlet 231 and exports 232, described first inlet 230 is used to feed pressure gas, described second inlet 231 is connected on the described liquid sucking tube road 21, and described outlet 232 is connected to the top of described withstand voltage buffer container 22 by liquid-transport pipe-line 233.Feed liquid pipeline 24 is used to supply and draws the liquid that liquid module 23 is drawn, and it is provided with feed flow valve 240.Pressure-modulation valve 26 is used to regulate the pressure of pressure gas, and air supply valve 25 will be through the compressed air delivery after pressure-modulation valve 26 is regulated to first inlet 230 that draws liquid module 23.Pressure relief valve 27 is arranged on the sidepiece or the top of described withstand voltage buffer container 22, opens when its pressure in withstand voltage buffer container 22 surpasses default normal value (can set according to the withstand voltage limit of withstand voltage buffer container 22) and will press the pressure in the buffer container 22 to be adjusted to default normal value.Described maintenance pipeline 28 is provided with maintenance valve 280, when needing repairing liquid feed device of the present utility model, can open maintenance valve 280 discharges the liquid in the withstand voltage buffer container 22 and keep in repair, when liquid feed device of the present utility model normally used, described maintenance valve 280 was in closed condition.
The diameter in described liquid sucking tube road 21 equals the diameter of described liquid-transport pipe-line 233 and described feed liquid pipeline 240, and less than the diameter of described circulating line 222.
In the present embodiment, described pressure gas is a compressed nitrogen, and the diameter of described liquid sucking tube road 21, described liquid-transport pipe-line 233 and described feed liquid pipeline 240 is 1.27 centimetres, and the diameter of described circulating line 222 is 1.905 centimetres.
Below will describe in detail and use the liquid feed device that improves reliability of the present utility model to carry out the process of feed flow, when needs supply liquid, at first open feed flow valve 210 and air supply valve 25, then pressure gas is fed pressure-modulation valve 26 and after its adjusting, also enter in first inlet 230 that draws liquid module 23 through air supply valve 25, so draw liquid module 23 and promptly can produce negative pressure at second outlet, 231 places, the liquid that described negative pressure can drive in the fluid reservoir 20 enters in the withstand voltage buffer container 22 by liquid sucking tube road 21, and liquid is discharged by feed liquid pipeline 24 afterwards.Liquid during feed flow in the withstand voltage buffer container 22 can rise gradually, when liquid level rises to preset height and promptly arrives perforate, floating block 221 rises thereupon and perforate is opened, drawing liquid that liquid module 23 promptly can drive withstand voltage buffer container 22 this moment discharges from circulating line 222 and loops back and drain in the described withstand voltage buffer container 22, because the diameter of circulating line 222 is greater than the diameter that passes liquid pipeline 233, so the amount of liquid of discharging withstand voltage buffer container 22 is greater than the amount of liquid that enters withstand voltage buffer container 22, so the liquid level of withstand voltage buffer container 22 can descend, floating block 221 descends thereupon and blocks perforate, the liquid level of withstand voltage buffer container 22 like this will keep within the specific limits, thereby guarantees the stability of feed flow.
In sum, the liquid feed device that improves reliability of the present utility model uses vacuum generator as drawing liquid device, and the liquid that is drawn is focused in the withstand voltage buffer container, and on withstand voltage buffer container wall, offer perforate and connect circulating line, the vertical slide bar that is connected with floating block is set in withstand voltage buffer container again, floating block can move up and down under buoyancy function to open described perforate and to stablize liquid level in the withstand voltage buffer container, so can guarantee stably to carry out feed flow, the liquid sucking tube road is not influenced by power failure etc. in addition, thereby can increase the reliability of feed flow greatly.

Claims (10)

1, a kind of liquid feed device that improves reliability, it has a fluid reservoir that liquid is housed, one is arranged on the liquid sucking tube road in the fluid reservoir, one draws the feed liquid pipeline that the liquid that the liquid module drawn is drawn in liquid module and a supply that draws of liquid in the fluid reservoir, it is characterized in that, this liquid feed device also has a withstand voltage buffer container that is arranged between driver module and feed liquid pipeline, this draws the liquid module for having first inlet, the vacuum generator of second inlet and an outlet, this first inlet is used to feed pressure gas, this second inlet is connected on this liquid sucking tube road, and this outlet and feed liquid pipeline all are connected on this withstand voltage buffer container.
2, the liquid feed device that improves reliability as claimed in claim 1, it is characterized in that, this is withstand voltage, and buffer container inside is provided with a vertical slide bar, this vertical slide bar is provided with a floating block that this vertical slide bar moves in the buoyancy function lower edge, and this floating block contacts with this withstand voltage buffer container internal face.
3, the liquid feed device that improves reliability as claimed in claim 2 is characterized in that, the path of this floating block institute warp of this withstand voltage buffer container is provided with a perforate, and this perforate is apart from this withstand voltage buffer container bottom one preset height.
4, the liquid feed device that improves reliability as claimed in claim 3, it is characterized in that, be connected with a circulating line in this perforate, an end of this circulating line is connected to this withstand voltage buffer container by this perforate, and the other end of this circulating line is connected on this liquid sucking tube road.
5, the liquid feed device that improves reliability as claimed in claim 4 is characterized in that, the diameter in this liquid sucking tube road equals the diameter of this liquid-transport pipe-line and this feed liquid pipeline, and less than the diameter of this circulating line.
6, the liquid feed device that improves reliability as claimed in claim 1 or 2 is characterized in that, this is withstand voltage, and the buffer container bottom also is provided with a pressure release valve.
7, the liquid feed device that improves reliability as claimed in claim 1 is characterized in that, this outlet is connected to the top of this withstand voltage buffer container by a liquid-transport pipe-line.
8, the liquid feed device that improves reliability as claimed in claim 1 is characterized in that, is respectively arranged with one on this liquid sucking tube road and this feed liquid pipeline and draws a fluid valve and a feed flow valve.
9, the liquid feed device that improves reliability as claimed in claim 1 is characterized in that, this pressure gas is a compressed nitrogen.
10, the liquid feed device that improves reliability as claimed in claim 1 is characterized in that, this liquid sucking tube road is provided with an one-way cock between outlet and circulating line.
CNU2008200576938U 2008-04-24 2008-04-24 Liquid supply apparatus capable of improving stable reliability Expired - Lifetime CN201220915Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2008200576938U CN201220915Y (en) 2008-04-24 2008-04-24 Liquid supply apparatus capable of improving stable reliability

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Application Number Priority Date Filing Date Title
CNU2008200576938U CN201220915Y (en) 2008-04-24 2008-04-24 Liquid supply apparatus capable of improving stable reliability

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102182917A (en) * 2011-03-16 2011-09-14 中国科学院上海技术物理研究所 Working medium filling device and method of loop circuit heat pipe at medium and low temperature
CN102465413A (en) * 2010-11-03 2012-05-23 无锡华润上华半导体有限公司 Slurry supply system
CN103775828A (en) * 2013-01-23 2014-05-07 摩尔动力(北京)技术股份有限公司 Gas liquefied object hot-pressure pumping system
CN105196182A (en) * 2015-09-21 2015-12-30 蓝思科技(长沙)有限公司 Liquid delivery device and device for adding grinding liquid into grinding disc
CN109268687A (en) * 2018-10-16 2019-01-25 迈得医疗工业设备股份有限公司 Liquid feed device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102465413A (en) * 2010-11-03 2012-05-23 无锡华润上华半导体有限公司 Slurry supply system
CN102465413B (en) * 2010-11-03 2014-04-16 无锡华润上华半导体有限公司 Slurry supply system
CN102182917A (en) * 2011-03-16 2011-09-14 中国科学院上海技术物理研究所 Working medium filling device and method of loop circuit heat pipe at medium and low temperature
CN102182917B (en) * 2011-03-16 2013-01-09 中国科学院上海技术物理研究所 Working medium filling device and method of loop circuit heat pipe at medium and low temperature
CN103775828A (en) * 2013-01-23 2014-05-07 摩尔动力(北京)技术股份有限公司 Gas liquefied object hot-pressure pumping system
CN105196182A (en) * 2015-09-21 2015-12-30 蓝思科技(长沙)有限公司 Liquid delivery device and device for adding grinding liquid into grinding disc
CN105196182B (en) * 2015-09-21 2017-12-19 蓝思科技(长沙)有限公司 A kind of liquid transporting apparatus and a kind of device that grinding fluid is added into mill
CN109268687A (en) * 2018-10-16 2019-01-25 迈得医疗工业设备股份有限公司 Liquid feed device

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ASS Succession or assignment of patent right

Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING

Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION

Effective date: 20130222

C41 Transfer of patent application or patent right or utility model
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Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING

TR01 Transfer of patent right

Effective date of registration: 20130222

Address after: 100176 No. 18, Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing

Patentee after: Semiconductor Manufacturing International (Beijing) Corporation

Address before: 201203 No. 18 Zhangjiang Road, Shanghai

Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20090415