CN102465413B - Slurry supply system - Google Patents
Slurry supply system Download PDFInfo
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- CN102465413B CN102465413B CN201010531022.2A CN201010531022A CN102465413B CN 102465413 B CN102465413 B CN 102465413B CN 201010531022 A CN201010531022 A CN 201010531022A CN 102465413 B CN102465413 B CN 102465413B
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- feeding pipe
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Abstract
The invention relates to a slurry supply system, which comprises at least two slurry supply pipelines, a distribution module and at least two branch pipelines connected with the distribution module through a slurry pump. The distribution module is divided into at least two independent sub-modules communicated with the slurry supply pipelines, each sub-module is connected with at least one branch pipeline, and the slurry supply pipelines can deliver slurry of the same type or different types to each branch pipeline through the distribution module and the slurry pump. The distribution module is divided into multiple sub-modules with no increase of working platforms, the distribution module is divided into multiple sub- modules , and to supply the same amount of slurry pipeline and thus the purpose of supplying different types of slurry can be realized.
Description
[technical field]
The present invention relates to technology controlling and process, particularly relate to a kind of slurry feed system.
[background technology]
In some production technologies, relate to the supply of slurry.Slurry is transported to distribution module by slurry feeding pipe, after over-allocation, by each branch road, is exported.General maximum two slurry feeding pipes and the corresponding distribution module of providing of traditional slurry feed system as shown in Figure 1, are the mirra3400 slurry feed system structural representations of AMAT company.This system comprises two workbenches: platform A and platform B, platform A is identical with the structure of platform B.Take platform A as example, and this platform comprises slurry feeding pipe A1 and distribution module A2.Slurry feeding pipe A1 controls pneumatic operated valve by electromagnetic signal slurry is transported to distribution module A2, distribution module A2 arrives each branch road by slurry dispense, the mashing pump of each branch road is by rotational speed regulation squeezing tube, the slurry of exportable different flow, to complete the supply task of same slurry in different operations.
Traditional slurry feed system can only provide the slurry that kind is identical with workbench quantity at most by slurry feeding pipe simultaneously, and the quantity of the workbench that traditional slurry feed system comprises is generally no more than two, therefore be difficult to realize the diversification that slurry is supplied with, to technological experiment, bring red tape, affected quality testing (qualify slurry) process of slurry.
[summary of the invention]
Based on this, be necessary can not provide for traditional slurry feed system the problem of slurry diversification supply, a kind of slurry feed system that slurry diversification is supplied with of realizing is provided.
A kind of slurry feed system, comprise at least two-way slurry feeding pipe, distribution module and by mashing pump and distribution module at least two bypass line in succession, described distribution module is separated at least two separate submodules that are communicated with slurry feeding pipe, each submodule connects at least one bypass line, wherein, described slurry feeding pipe flows to each bypass line by distribution module via mashing pump by identical or different slurry.
Preferably, the quantity of described slurry feeding pipe, submodule and bypass line is three, and each slurry feeding pipe, submodule and bypass line connect one to one.
Preferably, the quantity of described slurry feeding pipe, submodule is two, and the quantity of described bypass line is three, and a submodule connects wherein two bypass line, and another submodule connects a remaining bypass line.
Preferably, between described every bypass line and mashing pump, be provided with air valve.
Preferably, described air valve is triple valve, and an entrance of described triple valve is connected with mashing pump, bypass line respectively with an outlet, and a remaining outlet connects backflow recovery channel.
Preferably, between described each submodule and the mashing pump being connected, be also provided with air valve.
Preferably, described air valve is triple valve, and an entrance of described triple valve is connected with submodule, mashing pump respectively with an outlet, and a remaining entrance connects deionized water pipeline.
Not increasing under the prerequisite of workbench, distribution module is divided into a plurality of submodules, and is equipped with the slurry feeding pipe of equal number, at slurry feeding pipe, input different slurries to submodule, can reach the object of the slurry supply of diversification.
[accompanying drawing explanation]
Fig. 1 is the structural representation of traditional slurry feed system;
Fig. 2 is the structural representation of the slurry feed system of an embodiment;
Fig. 3 is the structural representation of the slurry feed system of another embodiment;
Fig. 4 is for being used a submodule to coordinate the operation principle schematic diagram of two bypass line.
[embodiment]
Below in conjunction with accompanying drawing, be further detailed.
As shown in Figure 2, be the slurry feed system schematic diagram of an embodiment.This slurry feed system comprises slurry feeding pipe, distribution module and by mashing pump and distribution module three bypass line in succession.Wherein, slurry feeding pipe is 102,104,106 3, distribution module is separated into three separate submodules 202,204,206, bypass line is 402,404,406 3, and three bypass line 402,404,406 are connected to submodule 202,204,206 by mashing pump 302,304,306 respectively.And slurry feeding pipe 102,104,106 respectively with the corresponding connection of submodule 202,204,206.Slurry is delivered to submodule 202,204,206 by slurry feeding pipe 102,104,106 respectively, and flows to bypass line 402,404,406 by mashing pump 302,304,306.Each slurry feeding pipe can be carried the slurry of identical or different kind.
As shown in Figure 3, be the slurry feed system schematic diagram of another embodiment.This slurry feed system comprises slurry feeding pipe, distribution module and by mashing pump and distribution module three bypass line in succession.Wherein, slurry feeding pipe is 108,110 two, distribution module is separated into two separate submodules 208,210, bypass line is 408,410,412 3, wherein bypass line 408,410 is connected to submodule 208 by mashing pump 308,310 respectively, and bypass line 412 is connected to submodule 210 by mashing pump 312.And slurry feeding pipe 108,110 respectively with the corresponding connection of submodule 208,210.Slurry is delivered to submodule 208,210 by slurry feeding pipe 108,110 respectively, then the slurry in submodule 208 flows to bypass line 408,410 by mashing pump 308,310, and the slurry in submodule 210 flows to bypass line 412 by mashing pump 312.Slurry feeding pipe 108,110 provides identical or different slurry.
The slurry feed system of above embodiment all can be integrated on a workbench, this workbench all can expand to two, the submodule quantity of distribution module, bypass line also can extend to more, the quantity that each submodule connects bypass line can be one, two or more.
In addition, also can in every bypass line, establish the air valve of manual control, be used for controlling the output of slurry.As shown in Figure 4, for using a submodule to coordinate the operation principle schematic diagram of two bypass line.As the submodule 208 in second embodiment flows to bypass line 408,410 by two mashing pumps 308,310 by slurry.Between mashing pump 308 and bypass line 408, be provided with air valve 508, this air valve 508 is triple valves, mashing pump 308 enters from an entrance of this air valve 508, then, from two other outlet output, enters respectively bypass line 408 and backflow recovery channel.Air valve 510 operation principles of being located between mashing pump 310 and bypass line 410 are the same.Air valve 508,510 obtains the signal of valve break-make from signal input port, the break-make of by-pass valve control, thus according to the conditions of demand of slurry, control.
In addition, submodule 208 also can arrange air valve 500 at its slurry delivery outlet, this air valve 500 is also a triple valve, slurry enters from an entrance of air valve 500, the deionized water that prevents slurry crystallization enters from another entrance, then from another outlet, exports and enter respectively mashing pump 308,310 together.Air valve 500 obtains the signal of valve break-make, the break-make of by-pass valve control from signal input port.
Not increasing under the prerequisite of workbench, distribution module is divided into a plurality of submodules, and is equipped with the slurry feeding pipe of equal number, at slurry feeding pipe, input different slurries to submodule, can reach the object of the slurry supply of diversification.
The above embodiment has only expressed several execution mode of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection range of patent of the present invention should be as the criterion with claims.
Claims (7)
1. a slurry feed system, it is characterized in that, be integrated on a workbench, comprise at least two-way slurry feeding pipe, distribution module and by mashing pump and distribution module at least two bypass line in succession, described distribution module is separated at least two separate submodules that are communicated with slurry feeding pipe, each submodule connects at least one bypass line, wherein, described slurry feeding pipe flows to each bypass line by distribution module via mashing pump by different slurries.
2. slurry feed system as claimed in claim 1, is characterized in that, the quantity of described slurry feeding pipe, submodule and bypass line is three, and each slurry feeding pipe, submodule and bypass line connect one to one.
3. slurry feed system as claimed in claim 1, it is characterized in that, the quantity of described slurry feeding pipe, submodule is two, and the quantity of described bypass line is three, a submodule connects wherein two bypass line, and another submodule connects a remaining bypass line.
4. the slurry feed system as described in claim 1-3 any one, is characterized in that, between every bypass line and mashing pump, is provided with air valve.
5. slurry feed system as claimed in claim 4, is characterized in that, described air valve is triple valve, and an entrance of described triple valve is connected with mashing pump, bypass line respectively with an outlet, and a remaining outlet connects backflow recovery channel.
6. slurry feed system as claimed in claim 1, is characterized in that, between described each submodule and the mashing pump being connected, is also provided with air valve.
7. slurry feed system as claimed in claim 6, is characterized in that, described air valve is triple valve, and an entrance of described triple valve is connected with submodule, mashing pump respectively with an outlet, and a remaining entrance connects deionized water pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010531022.2A CN102465413B (en) | 2010-11-03 | 2010-11-03 | Slurry supply system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010531022.2A CN102465413B (en) | 2010-11-03 | 2010-11-03 | Slurry supply system |
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| CN102465413A CN102465413A (en) | 2012-05-23 |
| CN102465413B true CN102465413B (en) | 2014-04-16 |
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| CN201010531022.2A Active CN102465413B (en) | 2010-11-03 | 2010-11-03 | Slurry supply system |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313794A (en) * | 1998-08-25 | 2001-09-19 | 科金斯公司 | Process and apparatus for formulating a textile finish |
| CN201180219Y (en) * | 2008-04-10 | 2009-01-14 | 山东如意科技集团有限公司 | Automatic charging apparatus of steeping press |
| CN201220915Y (en) * | 2008-04-24 | 2009-04-15 | 中芯国际集成电路制造(上海)有限公司 | Liquid supply apparatus capable of improving stable reliability |
| CN101476222A (en) * | 2008-12-16 | 2009-07-08 | 机械科学研究总院先进制造技术研究中心 | Automatic delivery method for cone yarn dyeing powdery dye and special equipment therefor |
| CN201313990Y (en) * | 2008-12-18 | 2009-09-23 | 江苏联发纺织股份有限公司 | Automatic size discharge system for spinning machine platform |
| CN201581258U (en) * | 2009-11-30 | 2010-09-15 | 天津纺织工程研究院有限公司 | Material distributing and feeding system in printing and dyeing industry |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007021680A (en) * | 2005-07-19 | 2007-02-01 | Shin Etsu Handotai Co Ltd | Double-side lapping method for wafer |
-
2010
- 2010-11-03 CN CN201010531022.2A patent/CN102465413B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1313794A (en) * | 1998-08-25 | 2001-09-19 | 科金斯公司 | Process and apparatus for formulating a textile finish |
| CN201180219Y (en) * | 2008-04-10 | 2009-01-14 | 山东如意科技集团有限公司 | Automatic charging apparatus of steeping press |
| CN201220915Y (en) * | 2008-04-24 | 2009-04-15 | 中芯国际集成电路制造(上海)有限公司 | Liquid supply apparatus capable of improving stable reliability |
| CN101476222A (en) * | 2008-12-16 | 2009-07-08 | 机械科学研究总院先进制造技术研究中心 | Automatic delivery method for cone yarn dyeing powdery dye and special equipment therefor |
| CN201313990Y (en) * | 2008-12-18 | 2009-09-23 | 江苏联发纺织股份有限公司 | Automatic size discharge system for spinning machine platform |
| CN201581258U (en) * | 2009-11-30 | 2010-09-15 | 天津纺织工程研究院有限公司 | Material distributing and feeding system in printing and dyeing industry |
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| CN102465413A (en) | 2012-05-23 |
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Effective date of registration: 20170926 Address after: 214028 Xinzhou Road, Wuxi national hi tech Industrial Development Zone, Jiangsu, China, No. 8 Patentee after: Wuxi Huarun Shanghua Technology Co., Ltd. Address before: 214028 Wuxi provincial high tech Industrial Development Zone, Hanjiang Road, No. 5, Jiangsu, China Co-patentee before: Wuxi Huarun Shanghua Technology Co., Ltd. Patentee before: Wuxi CSMC Semiconductor Co., Ltd. |