CN201154269Y - Plate chemical filter for clean room - Google Patents
Plate chemical filter for clean room Download PDFInfo
- Publication number
- CN201154269Y CN201154269Y CNU2007200738213U CN200720073821U CN201154269Y CN 201154269 Y CN201154269 Y CN 201154269Y CN U2007200738213 U CNU2007200738213 U CN U2007200738213U CN 200720073821 U CN200720073821 U CN 200720073821U CN 201154269 Y CN201154269 Y CN 201154269Y
- Authority
- CN
- China
- Prior art keywords
- filter element
- filter
- active carbon
- shell
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
The utility model relates to a filter for purifying air, in particular to a chemical filter which can remove gaseous contaminant in the air and is used in semiconductor industry and medical treatment. The filter is provided with a shell, a protective covering net, a filter element and airproof glue, wherein, the protective covering net is arranged between the filter element of an air inlet-outlet face and the shell; the filter element is arranged inside the shell, and the periphery of the shell is perfused with the airproof glue for sealing; the basal body of the filter element is poriferous polyurethane, and the surface of the filter element is agglutinated with a layer of dipping active carbon. Compared with the prior art, the chemical filter has the structure that the basal body of the filter element adopts the poriferous polyurethane, and the surface of the filter element is agglutinated with the dipping active carbon is adopted, especially the dipping active carbon is granule-shaped active carbon dipped in water solution of potassium hydroxide, in this way, contaminant SO2 and H2S in the air react with the chemical components on the filter element material when passing through the filter element to generate solid components or innocuous gases. The chemical filter can be widely applied to occasions such as a chip factory, nuclear industry, an airport, etc.
Description
Technical field:
The utility model relates to a kind of filter of Purge gas, especially relates to a kind of at semi-conductor industry or chemical filter use, that remove gaseous contamination material in the air such as medical.
Background technology:
In semiconductor manufacturing industry, the dust that is bonded at integrated circuit may cause open circuit, short circuit, dust directly influences the yield rate of product, thus fastidious to production environment air cleaning degree height, also harsh to the requirement of air cleaner.Though current filtering technique can drop to the dust concentration of toilet the degree of being almost equal to zero, but still exists the product quality different quality to close the situation of requirement, analyze its main cause and be: airborne chemical pollutant has become to influence the main harm of yield rate.For example in silver-plated, copper-plated technology, SO
2, H
2The existence of S gas influences the arch-criminal of product quality exactly.
The utility model content:
Purpose of the present invention is to provide a kind of chemical filter that can effectively remove gaseous contamination material in the air at the prior art weak point.
The objective of the invention is to realize by following measure: the board-like chemical filter in a kind of toilet, having shell, its special character is to also have: mask net, filter core, fluid sealant; The mask net is installed between the filter core and shell of outlet and inlet face; Filter core is installed in the enclosure, has the fluid sealant jar to annotate sealing all around; The matrix of described filter core is a cellular polyurethane, its surperficial bonding one deck Immesion active carbon.
The matrix cellular polyurethane of described filter core is the planar shaped layer structure.
The matrix cellular polyurethane of described filter core is the waveform layer structure.
The Immesion active carbon that the matrix cellular polyurethane appearance of described filter core adheres to is the particle charcoal, and described Immesion active carbon is that granular active carbon is immersed in potassium hydroxide aqueous solution and gets.
The Immesion active carbon that the matrix cellular polyurethane appearance of described filter core adheres to is the fiber charcoal, and described Immesion active carbon is that fibrous activated carbon is immersed in potassium hydroxide aqueous solution and gets.
Compared with prior art, having adopted the filter core matrix is cellular polyurethane, and at the chemical filter of its surperficial bonding one deck Immesion active carbon, particularly described Immesion active carbon is that granular active carbon is immersed in potassium hydroxide aqueous solution and gets airborne like this pollutant SO
2, H
2S during by filter core and the chemical composition on the material for core react, generate solid constituent or innocuous gas, the utility model can be widely used in occasions such as chip factory, nuclear industry, airport.
Description of drawings:
Fig. 1 is the structure diagram of an embodiment the utility model proposes.
The specific embodiment:
Below in conjunction with accompanying drawing the specific embodiment is elaborated:
In an embodiment of the present utility model shown in Figure 1, the board-like chemical filter in toilet has shell 1, mask net 2, filter core 3, fluid sealant 4; Mask net 2 is installed in 1 on the filter core 3 of outlet and inlet face and shell; Filter core 3 is installed in the shell 1, has the fluid sealant jar to annotate sealing all around; The matrix of described filter core 3 is a cellular polyurethane, its surperficial bonding one deck Immesion active carbon.
The cellular polyurethane that adopts in the utility model is a loose structure, and the average diameter in its hole is 2-4mm, if the aperture is too small, the pressure loss during gas permeation strengthens, and when the aperture was excessive, gas became insufficient with contacting of filter core, and efficient reduces; Secondly total pore volume of polyurethane is 0.566cm
3/ g, when this is worth when too small, the gas flow that sees through that the unit section is long-pending diminishes, and the intensity of polyurethane will descend when excessive, also be unfavorable; Once more, the thickness preferable range of polyurethane is 5-30mm, and the index of its measurement is that gas both can circulate smoothly, has sufficient mechanical again.
After the porous polyurethane is selected, water-soluble glue is sprayed in the porous polyurethane, and then Immesion active carbon evenly is sprinkled upon on the polyurethane, active carbon can be penetrated in the polyurethane hole, dries.
The Immesion active carbon that adopts in the utility model is a graininess, and granular active carbon has broad spectrum activity, particularly be immersed in potassium hydroxide solution after, potassium hydroxide is attached to the surface of active carbon, works as SO
2, H
2S gas through the surface after, can take place as chemical reaction:
KOH+H
2S＝KHS+H
2O
SO
2+H
2O＝H
2SO
3
2KOH+H
2SO
4+H
2O
By above-mentioned chemical reaction, remove SO effectively
2, H
2Pernicious gases such as S.
During assembling the utility model, filter core 3 is installed in the shell 1, annotates sealing for 4 jars with fluid sealant around the filter core, and chemical filter is installed in the pipeline like this, and good airproof performance can not produce gas leakage.
The foregoing description does not constitute restriction of the present utility model, no matter be that cellular polyurethane is made plane or the waveform shape, active carbon is made graininess or fibrous, or its combination, and those skilled in the art can make various distortion or modification within the scope of the appended claims.
Claims (3)
1. the board-like chemical filter in toilet has shell (1), it is characterized in that also having: mask net (2), filter core (3), fluid sealant (4); Mask net (2) is installed between the filter core (3) and shell (1) of outlet and inlet face; Filter core (3) is installed in the shell (1), and fluid sealant (4) jar notes sealing is arranged all around; The matrix of described filter core (3) is a cellular polyurethane, its surperficial bonding one deck Immesion active carbon.
2. the board-like chemical filter in a kind of toilet according to claim 1, the matrix cellular polyurethane that it is characterized in that described filter core (3) is the planar shaped layer structure.
3. the board-like chemical filter in a kind of toilet according to claim 1, the matrix cellular polyurethane that it is characterized in that described filter core (3) is the waveform layer structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200738213U CN201154269Y (en) | 2007-08-20 | 2007-08-20 | Plate chemical filter for clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200738213U CN201154269Y (en) | 2007-08-20 | 2007-08-20 | Plate chemical filter for clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201154269Y true CN201154269Y (en) | 2008-11-26 |
Family
ID=40102060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200738213U Expired - Fee Related CN201154269Y (en) | 2007-08-20 | 2007-08-20 | Plate chemical filter for clean room |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201154269Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103585882A (en) * | 2013-11-01 | 2014-02-19 | 镇江市京口区鹏程科教仪器厂 | Laboratory air purifier |
| WO2018045867A1 (en) * | 2016-09-09 | 2018-03-15 | 上海科力玛数据科技有限公司 | Composite material for air purification, preparation method therefor and application thereof |
-
2007
- 2007-08-20 CN CNU2007200738213U patent/CN201154269Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103585882A (en) * | 2013-11-01 | 2014-02-19 | 镇江市京口区鹏程科教仪器厂 | Laboratory air purifier |
| CN103585882B (en) * | 2013-11-01 | 2015-12-30 | 镇江市京口区鹏程科教仪器厂 | A kind of Laboratory air purifier |
| WO2018045867A1 (en) * | 2016-09-09 | 2018-03-15 | 上海科力玛数据科技有限公司 | Composite material for air purification, preparation method therefor and application thereof |
| US10780379B2 (en) | 2016-09-09 | 2020-09-22 | Climasys DataSmart Technology CO., LTD. | Composite material for air purification, preparation method therefor and application thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081126 Termination date: 20090921 |