CN201149573Y - Simple vacuum piezoelectric sensor - Google Patents
Simple vacuum piezoelectric sensor Download PDFInfo
- Publication number
- CN201149573Y CN201149573Y CNU2007201591447U CN200720159144U CN201149573Y CN 201149573 Y CN201149573 Y CN 201149573Y CN U2007201591447 U CNU2007201591447 U CN U2007201591447U CN 200720159144 U CN200720159144 U CN 200720159144U CN 201149573 Y CN201149573 Y CN 201149573Y
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- film electrode
- gold film
- glass container
- tube
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Abstract
The utility model pertains to the transducer technique field, to be exact, a simple vacuum piezoelectric transducer which comprises a glass container (1), a glass ring (2), a lanthanum gallium silicate wafer (3), an inlet glass tube (4), cocks (5), a micro-injector (6), a conical pipe (7), an outlet glass tube (8) and a gold film electrode (9). The gold film electrode (9) which shapes like a keyhole is positioned on the glass ring by silicone rubber and appears to be a detection cell which is arranged inside the cuboid glass container (1). Two glass tubes with cocks (5) are inserted into the glass container (1), one is connected with the conical pipe and the injector as a gas inlet while the other one is connected with the vacuum pump as a gas outlet. The piezoelectric transducer has the advantages that: the transducer also has the sensitivity of quality at nanogram level, and has stronger oscillation capability and mass loading capability than QCM; and the frequency response to the high viscosity liquid is good as well.
Description
Technical field
The utility model belongs to sensor technical field, exactly is a kind of simple vacuum piezoelectric sensor.
Background technology
Piezoelectric sensor is a kind of to the extremely sensitive sensor of quality, can detect the mass change of nanogram level, sticking variable density to solution also has response simultaneously, present most widely used sensor is QCM (Quartz Crystal Microbalance) (QCM), its shortcoming is: the vibration ability, the mass loading ability is little, and is poor to the frequency response of high viscosity liquid.Though the novel crystal material constantly occurs in recent years, really can be applied to piezoelectric sensor seldom.
Summary of the invention
The purpose of this utility model is to overcome above-mentioned deficiency, provide a kind of mass sensitivity that not only also has the nanogram level, and its oscillation energy force rate QCM is stronger, the mass loading ability is bigger, high viscosity liquid is also had the simple vacuum piezoelectric sensor of fine frequency response.
The utility model is achieved in that this sensor is by glass container, glass ring, lanthanum gallium silicate disc, the inlet glass tube, cock, micro syringe, tapered tube, outlet glass tube and gold film electrode are formed, gold film electrode is " keyhole " shape, be to form in the spraying plating of wafer two sides respectively with the vacuum evaporating method, with silicon rubber wafer is fixed in then and constitutes detection cell on the glass ring, place the rectangular parallelepiped glass container, the glass tube of two bands cock is inserted in the glass container top, one links to each other with syringe with tapered tube, as the gas access, reagent is injected tapered tube and is imported container by drying nitrogen by syringe, and another root links to each other with vacuum pump as gas vent.
The utility model has the advantages that: have the mass sensitivity of nanogram level equally, and its oscillation energy force rate QCM is stronger, the mass loading ability is bigger, and high viscosity liquid is also had good frequency response, and a kind of simple vacuum environment is provided; This device material therefor, equipment source enrich, and be cheap and easy to get, therefore greatly reduces cost, and its method for making is simple, and the reagent expense is little, and environmental pollution is light, under the less demanding situation to vacuum tightness, can satisfy requirement of experiment well.
Description of drawings
Fig. 1 is the synoptic diagram of the utility model structure.
Fig. 2 is the vertical view of detection cell.
Fig. 3 is the upward view of detection cell.
Among the figure: 1. glass container, 2. glass ring, 3. lanthanum gallium silicate disc, 4. inlet glass tube, 5. cock, 6. micro syringe, 7. tapered tube, 8. outlet glass tube, 9. gold film electrode.
Embodiment
Further specify below in conjunction with accompanying drawing: this sensor is by glass container 1, glass ring 2, lanthanum gallium silicate disc 3, inlet glass tube 4, cock 5, micro syringe 6, tapered tube 7, outlet glass tube 8 and gold film electrode 9 are formed, used lanthanum gallium silicate disc fundamental frequency is 9---10MHz, crystalline areas 14 * 14mm, adopt the gold film electrode of vacuum evaporating method two " keyhole " shapes of two-sided preparation of wafer, electrode diameter is 5-8mm, measuring junction by lead and high-performance electric impedance analyzer links, and electric impedance analyzer is by computer control and realize data acquisition and analysis; Wafer is fixed on internal diameter 9-13mm with 704 silicon rubber, external diameter 30---50mm, constitute detection cell on the glass ring of thickness 3-8mm, the bottom adds a base and fixedly is placed in the airtight rectangular parallelepiped glass container, container volume is about 4.8 liters, having four openings links to each other with the external world, below two openings draw lead, above two openings plug in the glass tube of band cock, one pipe is used for the importing of reagent, and another pipe links to each other with vacuum pump by one section rubber tube, is used to vacuumize, all opening parts are all good with epoxy sealing, guarantee that container is air tight.
Utilize this device can monitor ionic liquid in real time to the absorption property of various organic solvents and the variation of absorption back physical property.Ionic liquid is meant the material that is made of ion that is in a liquid state under-30 ℃～50 ℃, be the novel green solvent that causes people's broad research interest at present.Utilize LCM that the viscosity of liquid of contact is with it had frequency and these characteristics of impedance response, can monitor the viscosity change curve of ionic liquid in absorption organic solvent steam process in real time, for the viscosity variation of monitoring liquid in real time provides a kind of method fast and effectively.(be abbreviated as [C with ionic liquid bromo 1-methyl-3-n-octyl imidazoles
8Mim] [Br]) be example, in detection cell, add the skim ionic liquid, begin to vacuumize after putting into glass container, treat that the sensor response frequency closes vacuum pump after stable.Organic solvent (as ethanol, acetone, chloroform, phenixin, toluene etc.) is injected tapered tube as shown in the figure with micro syringe, open cock simultaneously, Xiang Guanzhong feeds dry N
2(eliminating the interference that water in air is divided) is by N
2Solvent is imported in the mensuration container, and organic solvent evaporates into steam and adsorbs on the ionic liquid film in container; In the desorption experiment, adopt the method that vacuumizes to quicken the effusion speed of organic solvent from the ionic liquid film.In whole absorption and desorption process, ion liquid viscosity changes with the variation of adsorbance, and this change procedure can be monitored with the viscosity response modes of LCM.Because ionic liquid has fabulous absorption and desorption performance to organic solvent, after finishing once testing, need not handle and can measure next time, continuity is good, and the utilization factor height of ionic liquid and wafer has reduced unnecessary loss.This device is done change slightly promptly can be used as other mass sensors.
Claims (3)
1, a kind of simple vacuum piezoelectric sensor, it is characterized in that: it is by glass container (1), glass ring (2), lanthanum gallium silicate disc (3), inlet glass tube (4), cock (5), micro syringe (6), tapered tube (7), outlet glass tube (8) and gold film electrode (9) are formed, gold film electrode (9) is " keyhole " shape, be fixed in silicon rubber and constitute detection cell on the glass ring, place rectangular parallelepiped glass container (1), the glass tube of two band cocks (5) is inserted in glass container (1) top, one links to each other with syringe with tapered tube, as the gas access, another root links to each other with vacuum pump as gas vent.
2, simple vacuum piezoelectric sensor according to claim 1 is characterized in that: lanthanum gallium silicate disc (3) can be circle.
3, simple vacuum piezoelectric sensor according to claim 1 and 2 is characterized in that: gold film electrode (9) can adopt platinum or ag material to make.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201591447U CN201149573Y (en) | 2007-12-27 | 2007-12-27 | Simple vacuum piezoelectric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007201591447U CN201149573Y (en) | 2007-12-27 | 2007-12-27 | Simple vacuum piezoelectric sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201149573Y true CN201149573Y (en) | 2008-11-12 |
Family
ID=40117344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007201591447U Expired - Fee Related CN201149573Y (en) | 2007-12-27 | 2007-12-27 | Simple vacuum piezoelectric sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201149573Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535449A (en) * | 2015-01-21 | 2015-04-22 | 山东师范大学 | Non-contact electrode piezoelectric transducer device for monitoring strongly-corrosive gas and method |
-
2007
- 2007-12-27 CN CNU2007201591447U patent/CN201149573Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104535449A (en) * | 2015-01-21 | 2015-04-22 | 山东师范大学 | Non-contact electrode piezoelectric transducer device for monitoring strongly-corrosive gas and method |
| CN104535449B (en) * | 2015-01-21 | 2017-02-22 | 山东师范大学 | Non-contact electrode piezoelectric transducer device for monitoring strongly-corrosive gas and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |