CN201148275Y

CN201148275Y - Wafer rack

Info

Publication number: CN201148275Y
Application number: CNU2007203109641U
Authority: CN
Inventors: 周士杰
Original assignee: KESHIDA TECHNOLOGY CORP
Current assignee: KESHIDA TECHNOLOGY CORP
Priority date: 2007-12-19
Filing date: 2007-12-19
Publication date: 2008-11-12
Anticipated expiration: 2017-12-19

Abstract

The utility model relates to a wafer-depositing framework which comprises at least two oppositely arranged lateral plates, a plurality of support bars, a plurality of fixed bars and a plurality of bearing units; wherein, both ends of each support bar are respectively arranged on the opposite sides of the lateral plates, and the support bars are adjacent to both sides and bottom edge of each lateral plate; both ends of each fixed bar are respectively arranged on the opposite sides of the lateral plates, and the fixed bars are near to the opposite inner edges of the support bars; the bearing units are respectively opposite to the inner edges of the fixed bars. Consequently, needed wafers can be centrally deposited in the bearing units, and the wafer-depositing framework can not only prevent the wafers from being cracked and dirtied but also achieve the efficacy of easy taking and carrying.

Description

The wafer holder

Technical field

The utility model relates to a kind of rack, refer to especially a kind of except that can prevent wafer when depositing, produce break and stained, also can reach simultaneously within easy reach and the carrying effect the wafer holder.

Background technology

The wafer of prior art normally is placed on after making in the box body with several disposal areas, deposits as collection, utilizes mechanical arm to carry out gripping during in order to successive process and uses.

But because this wafer is thinner, light weight and easily crisp object, therefore, when placing the disposal area, and be not suitable for collecting and deposit in direct stacked mode, therefore must use large-scale box body could place more wafer with several disposal areas, and when wafer is positioned over the disposal area, for preventing that these wafers from producing collision because of when carrying, the periphery of each disposal area of general box body all can design several salients, use with location as each wafer, if each salient with wafer location firmly the time, this mechanical arm then must could take off wafer with stronger external force, cause the damage of some wafer, and because this wafer is to belong to the higher object of degree of precision, even if therefore slight breaking and the stained very big influence that still can cause its characteristic, so, deposit the box body of wafer with present collection, can't realistic use required.

Novel content

Therefore, main purpose of the present utility model is to be, required wafer can be concentrated to be placed in the load-carrying unit, except that can prevent wafer when depositing, produce break and stained, also can reach the effect of within easy reach and carrying simultaneously.

In order to achieve the above object, the utility model is a kind of wafer holder, comprises at least two side plates that are corresponding setting; Several two ends are located on the corresponding one side of each side plate respectively and the strut bar of contiguous each side plate both sides and root edge; Several two ends are located on the corresponding one side of each side plate respectively and are close to the fixed link of the corresponding medial margin of each strut bar; And several corresponding respectively load-carrying units of being located at each fixed link medial margin.

Description of drawings

Fig. 1 is a perspective exploded view of the present utility model.

Fig. 2 is a three-dimensional appearance scheme drawing of the present utility model.

Fig. 3 is a running condition scheme drawing of the present utility model.

Wherein:

1 side plate, 2 strut bars, 21 fixation kits

3 fixed links, 31 fixation kits, 4 load-carrying units

41 base plates, 411 fixation kits, 42 extension boards

43 caulking grooves, 5 wafers

The specific embodiment

Fig. 1, Fig. 2, Fig. 3 are respectively perspective exploded view of the present utility model, three-dimensional appearance scheme drawing of the present utility model and running condition scheme drawing of the present utility model.As shown in the figure: the utility model is a kind of wafer holder, and it is made of at least two side plates 1, several strut bars 2, several fixed links 3 and several load-carrying units 4.

The above-mentioned side plate of carrying 1 is corresponding setting.

Each strut bar 2 two ends is located on above-mentioned two side plates, the 1 corresponding one side respectively and the both sides and the root edge of contiguous each side plate 1, and the two ends of each strut bar 2 are to cooperate fixation kit 21 and side plate 1 affixed respectively.

Each fixed link 3 its two ends is located on above-mentioned two side plates, the 1 corresponding one side respectively and contiguous each strut bar 2 corresponding medial margin, and the two ends of each fixed link 3 cooperate fixation kit 31 and side plate 1 affixed respectively.

The corresponding respectively medial margin of being located at above-mentioned each fixed link 3 of each load-carrying unit 4, wherein each load-carrying unit 4 includes the base plate 41 that cooperates fixation kit 411 and fixed link 3 affixed, several are vertical at extension board 42 on the base plate 41, reach several by 42 caulking grooves that defined 43 of each extension board.In this way, utilize above-mentioned structure to constitute a brand new wafer holder.

When the utility model in when utilization, can utilize automatic tools (as: mechanical arm, figure does not show) wafer 5 is drawn, and from top to bottom (or from lower to upper) be positioned over one by one in each load-carrying unit 4 corresponding caulking groove 43, use the concentrated storing of finishing wafer 5, break and stained to prevent that wafer from producing when depositing; And when using, the utility model can be arranged at required process apparatus (as: lifting mechanism in upright mode, figure does not show) on, and with side plate 1 as be located on the process apparatus against, and cooperate each strut bar 2 and fixed link 3 to increase structural strength, can bear process apparatus start or the external force when mobile in order to wafer holder of the present utility model, and utilize this process apparatus from lower to upper (or from top to bottom) move this wafer holder, making automatic tools can adsorb this wafer 5 one by one takes, so, can make the utility model reach the effect of within easy reach and carrying wafer 5.

In sum, the utility model wafer holder can effectively improve the various shortcoming of prior art, required wafer can be concentrated and be placed in the load-carrying unit, except that can prevent wafer when depositing, produce break and stained, also can reach the effect of within easy reach and carrying simultaneously, and then make generation of the present utility model can more progressive, more practical, more meet institute's palpus of user, and really having met the important document of creating patent application, the whence proposes patent application in accordance with the law.

Claims

1, a kind of wafer holder is characterized in that including:

At least two side plates are corresponding setting;

Several strut bars, its two ends are located at respectively on above-mentioned two corresponding one sides of side plate and at the both sides and the root edge of each side plate;

Several fixed links, its two ends are located at respectively on above-mentioned two corresponding one sides of side plate and at the corresponding medial margin of each strut bar; And

Several load-carrying units, the corresponding respectively medial margin of being located at above-mentioned each fixed link.

2, wafer holder as claimed in claim 1 is characterized in that: the two ends of each strut bar cooperate fixation kit and side plate affixed respectively.

3, wafer holder as claimed in claim 1 is characterized in that: the two ends of each fixed link cooperate fixation kit and side plate affixed respectively.

4, wafer holder as claimed in claim 1 is characterized in that: each load-carrying unit includes the base plate that cooperates fixation kit and fixed link affixed, several are vertical at extension board on the base plate, reach several by the caulking groove that is defined between each extension board.