CN201148275Y - Wafer rack - Google Patents

Wafer rack Download PDF

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Publication number
CN201148275Y
CN201148275Y CN 200720310964 CN200720310964U CN201148275Y CN 201148275 Y CN201148275 Y CN 201148275Y CN 200720310964 CN200720310964 CN 200720310964 CN 200720310964 U CN200720310964 U CN 200720310964U CN 201148275 Y CN201148275 Y CN 201148275Y
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CN
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Grant
Patent type
Prior art keywords
fixed
wafer
plurality
side
plate
Prior art date
Application number
CN 200720310964
Other languages
Chinese (zh)
Inventor
周士杰
Original Assignee
可士达科技有限公司
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Abstract

The utility model relates to a wafer-depositing framework which comprises at least two oppositely arranged lateral plates, a plurality of support bars, a plurality of fixed bars and a plurality of bearing units; wherein, both ends of each support bar are respectively arranged on the opposite sides of the lateral plates, and the support bars are adjacent to both sides and bottom edge of each lateral plate; both ends of each fixed bar are respectively arranged on the opposite sides of the lateral plates, and the fixed bars are near to the opposite inner edges of the support bars; the bearing units are respectively opposite to the inner edges of the fixed bars. Consequently, needed wafers can be centrally deposited in the bearing units, and the wafer-depositing framework can not only prevent the wafers from being cracked and dirtied but also achieve the efficacy of easy taking and carrying.

Description

晶圆置》文架技术领域本实用新型涉及一种置物架,尤指一种除可防止晶圆在存放时产生破裂及污损之外,也可同时达到易于取用及搬运功效的晶圓置放架。 The wafer is set to "text frame Technical Field The present invention relates to shelving, particularly to a wafer other than the generation of cracks can be prevented and offset in the storage, access can be achieved easily and at the same time conveying the efficacy of the wafer shelf placement. 背景技术现有技术的晶圆在制成之后通常是放置在一个具有数个容置区的盒体中,作为收藏存放,以利后续制程时利用机械手臂进行夹取使用。 BACKGROUND wafer prior art is generally made after the cartridge is placed in a body having a plurality of accommodation area, as the storage collection, in order to facilitate subsequent Chengshi Li prepared by using a robot arm for gripping. 但是由于该晶圓是较薄、质轻及易脆的物体,因此,当置于容置区中时,并不适合以直接层叠的方式收藏存放,因此必须使用具有数个容置区的大型盒体才能放置较多的晶圓,且当晶圆放置于容置区时,为防止这些晶圓因搬运时产生碰撞, 一般盒体的各容置区的周缘皆会设计有数个凸出部,以作为各晶圓的定位使用,倘若各凸出部将晶圓定位的较牢固时,该机械手臂则必须以较强的外力才能将晶圓取下,造成某些晶圆的损伤,而由于该晶圓是属精密度较高的物体,因此就算轻微的破裂及污损仍会导致其特性的极大影响,故,以目前收藏存放晶圓的盒体而言,较无法符合实际使用的所需。 However, since the wafer is thin, light and fragile object, therefore, when the accommodating region is not suitable for direct collection stored in a layered manner, and therefore must be used with a plurality of accommodating large area the cassette can be placed more wafers, and when the wafer is placed in the accommodation area, in order to prevent a collision because the wafers during transport, each of the peripheral edge region of the accommodating cassette of the general design are several projections will for use as a positioning of each wafer, while the wafer if the projections positioned a relatively strong, the robot must be removed before the wafer with a strong force, some damage the wafer, and Since the wafers are of high precision objects, so even a slight fracture and fouling will lead to greatly affect its characteristics, so as to present the collection to store the wafer cassette, it can not be a more realistic use required. 新型内容因此,本实用新型的主要目的是在于,可将所需的晶圆集中置放于承载单元中,除可防止晶圓于存放时产生破裂及污损之外,也可同时达到易于取用及搬运的功效。 SUMMARY Accordingly, the main object of the present invention is that the concentrate can be placed in a desired wafer carrying unit in addition to the generation of cracks can be prevented and offset of the wafer at the time of storage, while being easy to reach may be taken use and effectiveness of handling. 为达上述的目的,本实用新型是一种晶圓置放架,包含至少两个呈相对应设置的侧板;数个两端分别设于各侧板相对应一面上且邻近各侧板两侧及底缘的支撑杆;数个两端分别设于各侧板相对应一面上且邻近各支撑杆相对应内侧缘的固定杆;以及数个分别相对应设于各固定杆内侧缘的承载单元。 To achieve the above objects, the present invention is a wafer carrier placed, comprising at least two side plates disposed corresponding to the form; a plurality of side plates provided on the two ends corresponding to one side of and adjacent to the two side plates side and the bottom edge of the support rod; a plurality of side plates provided on both ends on one side of and adjacent the corresponding inner edge corresponding to the respective support rods fixed rod; and a plurality of corresponding respectively provided on the inner edge of each fixed rod bearing unit. 附图说明 BRIEF DESCRIPTION

图1是本实用新型的立体分解示意图 FIG. 1 is a perspective exploded view of the invention

图2是本实用新型的立体外观示意图 FIG 2 is a perspective view of the present invention Appearance of

图3是本实用新型的使用状态示意图 FIG 3 is a schematic view of a use state of the present invention

其中: among them:

1侧板 1 side

2支撑杆 2 support bar

21固定组件 21 Fixed assembly

3固定牙干 3 is fixed teeth dry

31固定组件 Fixing assembly 31

4承载单元 4 carrying unit

41底板 41 floor

411固定组件 411 fixed components

42延伸板 Extension plate 42

43嵌槽 43 embedded in the groove

具体实施方式 Detailed ways

图1、图2、图3,分别为本实用新型的立体分解示意图、本实用新型的立体外观示意图及本实用新型的使用状态示意图。 Figures 1, 2, 3, respectively, a perspective exploded view of the present a new type of practical, according to the present invention a schematic perspective external view of the present invention and the state of use. 如图所示:本实用新型是一种晶圓置放架,其由至少两个侧板l、数个支撑杆2、数个固定杆3以及数个承载单元4所构成。 As shown: the present invention is a wafer carrier disposed, consisting of at least two side panels L, a plurality of support rods 2, a plurality of fixing rod 3 and a plurality of bearing unit 4 configured.

上述所冲是的侧板1呈相对应设置。 The side panels are punched above 1 should be disposed in an opposing.

各支撑杆2两端分别设于上述两个侧板1相对应的一面上且邻近各侧板1的两侧及底缘,而各支撑杆2的两端是分别配合固定组件21与侧板1固接。 Both ends of each supporting rods 2 are provided on the two side plates 1 corresponds to one side of and adjacent to the sides and bottom edge of each side plate 1, and both ends of each support rod 2 is fitted, respectively, with the fixed plate assembly 21 1 fixed.

各固定杆3其两端分别设于上述两个侧板1相对应的一面上且邻近各支撑杆2相对应的内侧缘,而各固定杆3的两端分别配合固定组件31 与侧板1固接。 Each rod 3 is fixed at its opposite ends to the two side plates 1 disposed on one side of and adjacent to the inner edge of each corresponding support rod 2 corresponding to the both ends of each rod 3 are fixed to the fixed assembly 31 and the mating plate 1 fixed.

各承载单元4分别相对应设于上述各固定杆3的内侧缘,其中各承载单元4包含有配合固定组件411与固定杆3固接的底板41、数个垂直设于底板41上的延伸板42、及数个由各延伸板42间所定义出的嵌槽43。 Each carrying unit 4 correspond respectively provided in each of the fixed rod inner edge 3, wherein each of the carrying unit 4 comprises a mating fixing assembly 411 and the fixed shaft 3 is fixed to the base plate 41, a plurality of vertically disposed extension plate on the base plate 41 42, and a plurality of extension panels 42 each defined by an insert groove 43. 如是,利用上述的结构构成一全新的晶圓置放架。 If so, the above-described configuration constitutes a new wafer carrier placed. 当本实用新型在运用时,可以利用自动化的工具(如:机械手臂, 图未示)将晶圓5吸取,并由上往下(或由下往上)逐一放置于各承载单元4相对应的嵌槽43中,藉以完成晶圆5的集中置放,以防止晶圓于存放时产生破裂及污损;而使用时,可将本实用新型以直立的方式设置于所需的制程设备(如:升降机构,图未示)上,并以侧板1作为设于制程设备上的抵靠,且配合各支撑杆2及固定杆3增加结构强度,以利本实用新型的晶圆置放架可承受制程设备作动或移动时的外力,并利用该制程设备由下往上(或由上往下)移动该晶圆置放架,使自动化的工具可逐一吸附该晶圆5进行取用,如此,即可使本实用新型达到易于取用及搬运晶圓5的功效。 When the present invention is in use, you can use automated tools (such as: mechanical arm, not shown) to draw the wafer 5 by the down (or from bottom to top) are placed one by one in the respective carrying unit 4 corresponds the insertion groove 43, so as to implement centralized placement of the wafer 5, and to prevent cracking of the wafer storing offset time; while in use, the present invention is provided in a standing manner at a desired process equipment ( such as: lifting mechanism, not shown in the FIG.), and is provided on the side plate 1 as against the process equipment, and with 2 and 3 increase the structural strength of the respective support rod fixation rod, according to the present invention to facilitate the placement of the wafer in which the frame can withstand the process equipment or mobile actuating force, using the process and apparatus from bottom to top (or down by a) moving the wafer holder disposed so that automated tools may individually be taken adsorbing the wafer 5 by, so, you can achieve the present invention is easy to access and handling wafers efficacy 5. 综上所述,本实用新型晶圓置放架可有效改善现有技术的种种缺点, 可将所需的晶圓集中置放于承载单元中,除可防止晶圆在存放时产生破裂及污损之外,也可同时达到易于取用及搬运的功效,进而使本实用新型的产生能更进步、更实用、更符合使用者的所须,确已符合创作专利申请的要件,爰依法提出专利申请。 In summary, the present invention can improve the wafer carrier disposed shortcomings of the prior art, can be placed in the desired concentration wafer carrier unit, the wafer is generated in the storage can be prevented and cracking in addition to sewage outside damage, it can also achieve the effect of handling and easy access, and thus utility of the present novel type of more progressive, more practical, to be more in line with the user, indeed comply with the requirements of patent application creation, according to the law proposed Yuan patent application.

Claims (4)

  1. 1、一种晶圆置放架,其特征是包括有: 至少两个侧板,呈相对应设置; 数个支撑杆,其两端分别设于上述两个侧板相对应的一面上且在各侧板的两侧及底缘; 数个固定杆,其两端分别设于上述两个侧板相对应的一面上且在各支撑杆相对应的内侧缘;以及数个承载单元,分别相对应设于上述各固定杆的内侧缘。 1. A wafer carrier placed, which is characterized in comprising: at least two side panels, disposed corresponding to the form; a plurality of support rods, which are provided on the two ends corresponding to the two side plates at one side, and the sides and bottom edge of each side plate; a plurality of fixing bars, which are provided on the two ends corresponding to the two side plates at one side and the corresponding inner edge of each support rod; and a plurality of bearing units, respectively corresponding to each of the inner edge disposed in the fixed rod.
  2. 2、 如权利要求1所述的晶圆置放架,其特征在于:各支撑杆的两端分别配合固定组件与侧板固接。 2, a wafer as claimed in claim 1 frame is placed, wherein: both ends of the support rods are fixed with the fixed plate assembly.
  3. 3、 如权利要求1所述的晶圓置放架,其特征在于:各固定杆的两端分别配合固定组件与侧板固接。 3, a wafer as claimed in claim 1 frame is placed, wherein: both ends of the fixing bars are respectively fitted to the side plate fixed to the fixed assembly.
  4. 4、 如权利要求1所述的晶圆置放架,其特征在于:各承载单元包含有配合固定组件与固定杆固接的底板、数个垂直设于底板上的延伸板、 及数个由各延伸板间所定义出的嵌槽。 4, a wafer as claimed in claim 1 frame is placed, wherein: each of the carrier with fixing means comprises a fixing rod assembly and the fixed base plate, a plurality of vertically extending plate disposed on the bottom plate, and a plurality of among the extension plate defined an insertion groove.
CN 200720310964 2007-12-19 2007-12-19 Wafer rack CN201148275Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200720310964 CN201148275Y (en) 2007-12-19 2007-12-19 Wafer rack

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200720310964 CN201148275Y (en) 2007-12-19 2007-12-19 Wafer rack

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CN201148275Y true CN201148275Y (en) 2008-11-12

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102792434A (en) * 2010-02-18 2012-11-21 动力微系统公司 Stackable substrate carriers
CN102956529A (en) * 2011-08-22 2013-03-06 阿斯莫国际公司 Wafer boat package
CN104192556A (en) * 2014-08-29 2014-12-10 浙江集英工业智能机器技术有限公司 Touch screen substrate conveying device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102792434A (en) * 2010-02-18 2012-11-21 动力微系统公司 Stackable substrate carriers
CN102956529A (en) * 2011-08-22 2013-03-06 阿斯莫国际公司 Wafer boat package
CN102956529B (en) * 2011-08-22 2015-07-29 阿斯莫国际公司 Package boat
CN104192556A (en) * 2014-08-29 2014-12-10 浙江集英工业智能机器技术有限公司 Touch screen substrate conveying device

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