CN201133900Y - System for measuring space atomic oxygen environmental simulation experiment VUV - Google Patents

System for measuring space atomic oxygen environmental simulation experiment VUV Download PDF

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Publication number
CN201133900Y
CN201133900Y CNU2007203049759U CN200720304975U CN201133900Y CN 201133900 Y CN201133900 Y CN 201133900Y CN U2007203049759 U CNU2007203049759 U CN U2007203049759U CN 200720304975 U CN200720304975 U CN 200720304975U CN 201133900 Y CN201133900 Y CN 201133900Y
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China
Prior art keywords
atomic oxygen
telluride detector
cesium telluride
vuv
cesium
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Expired - Fee Related
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CNU2007203049759U
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Chinese (zh)
Inventor
李涛
郑慧奇
姜利祥
刘向鹏
冯伟泉
郭亮
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Beijing Institute of Spacecraft Environment Engineering
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Beijing Institute of Spacecraft Environment Engineering
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Priority to CNU2007203049759U priority Critical patent/CN201133900Y/en
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Publication of CN201133900Y publication Critical patent/CN201133900Y/en
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Abstract

The utility model provides a measuring system accompanying VUV in a spatial atomic oxygen environment simulation experiment, which consists of an atomic oxygen source, a vacuum container, a magnesium fluoride plate, a cesium telluride detector and a cesium telluride detector signal collector; wherein, the upper end of the vacuum container is provided with an opening, over which the atomic oxygen source is arranged; the cesium telluride detector is arranged at the middle of the vacuum container; the magnesium fluoride plate is arranged between the cesium telluride detector and the atomic oxygen source in order to shield atomic oxygen, stray light and pollutants; the cesium telluride detector is electrically connected with the cesium telluride detector signal collector outside the vacuum container. The measuring system uses the magnesium fluoride plate to shield atomic oxygen, stray light and pollutants in order to reduce the affection of atomic oxygen, stray light and pollutants on a VUV measuring result. Meanwhile, the measuring system can reduce the damage of the cesium telluride detector caused by environment factors in the process of measurement, enhance the repetitiveness of measurement and reduce the measuring errors of multiple measurements.

Description

The system of VUV in a kind of measurement space atomic oxygen environment simulation test
Technical field
The utility model belongs to the vacuum ultraviolet fields of measurement, specifically, relates to the system of the VUV (VUV followed in abbreviation) that produces owing to plasma exciatiaon in a kind of accurately measurement space atomic oxygen environment simulation test procedure.
Background technology
Atomic oxygen environment is meant the residual gas environment that Low Earth Orbit (it has been generally acknowledged that 200~700km height) upward exists with atomic oxygen.Space flight test and ground simulation test show, elemental oxygen can cause the spacecraft structure material to degrade aging, functional material function reduction, mainly shows the loss of quality of materials and thickness, the variation of surface topography and the various aspects such as decline of various performance parameters.And being China, ground simulation test carries out the main verification experimental verification means of spacecraft space atomic oxygen environment adaptability design at present.
In the present employed institute atomic oxygen environment ground-based simulation equipment that has living space, all exist oxygen to dissociate and produce the such physical process of oxygen plasma, the characteristic spectrum wavelength of oxygen plasma is mainly 130.4nm, 394.7nm, 436.8nm, 777.2nm, 844.6nm, and intensity is along with factors such as the producing method of oxygen plasma, power, working vacuum conditions and change.Wavelength is that the emission spectrum of 130.4nm is in vacuum ultraviolet (VUV) wave band.
UV radiation, particularly vacuum ultraviolet, owing to have higher photon energy, the fracture of meeting initiation chemical bond and functional group or crosslinked was mainly reflected in aspects such as surface color variation, surface composition variation, material function characteristic variations after polymkeric substance absorbed.Because the above-mentioned destruction that vacuum ultraviolet (VUV) may cause material, so the VUV of oxygen plasma emission may affect to the result of space atomic oxygen environment simulation test in the atomic oxygen environment simulation test procedure of space, thereby causes the deviation of test findings or the inefficacy of test.Given this, be necessary the VUV that follows in the atomic oxygen environment simulation test of space is tested, so that evaluation provides useful technical support to the space material atomic oxygen environment.Using the cesium telluride detector that photocurrent is carried out test analysis is to carry out a kind of means that VUV measures at present, but because in the atomic oxygen environment simulation test of ground, except that vacuum environment, also there are multiple factors such as pollutant, charged particle and elemental oxygen line in the measuring position, can cause interference to the test of VUV, thereby cause bigger measuring error, therefore, be necessary to take certain technical measures to eliminate these and disturb, to improve the accuracy of test.
Summary of the invention
The purpose of this utility model provides a kind of caused error of disturbing factor (pollutant, charged particle, elemental oxygen etc.) that can eliminate when following VUV to measure in the atomic oxygen environment simulation test of space, thereby high precision, carries out the device of following VUV to measure in the atomic oxygen environment simulation test of space exactly.Thereby for the test condition of ground simulation atomic oxygen environment accurately and effectively is provided, that improves the long-life low orbit spacecraft provides strong guarantee in the rail reliability.
To achieve these goals, the utility model has adopted following technical scheme:
The utility model provides the measuring system of following VUV in the atomic oxygen environment simulation test of a kind of space, and it comprises atomic oxygen source, and vacuum tank is fluoridized magnesium sheet, cesium telluride detector, cesium telluride detector signal harvester; The vacuum tank upper end has an opening, atomic oxygen source is set directly over the opening, the vacuum tank middle part is provided with the cesium telluride detector, fluoridize magnesium sheet and be arranged on the position between cesium telluride detector and the atomic oxygen source so that elemental oxygen, parasitic light and pollutant are shielded, the outer cesium telluride detector signal harvester of cesium telluride detector and vacuum tank is electrically connected.
In the said system, the diameter of fluoridizing magnesium sheet is 50mm-100mm, and thickness is 1mm-5mm.
In the said system, the electrode package of cesium telluride detector is covered with Kapton (polyimide) substrate vacuum insulation adhesive tape, and its thickness is 10 μ m-50 μ m.
In the said system, the distance of fluoridizing between magnesium sheet and the cesium telluride detector is preferably 5mm-15mm.
In the said system, fluoridize the magnesium sheet installation site apart from atomic oxygen beam inflow entrance 10mm-20mm.
Native system uses the cesium telluride detector that the wavelength that excites generation by oxygen plasma in the elemental oxygen simulation test of the space VUV that follows as 130.4nm is measured.The native system use is fluoridized magnesium sheet and is positioned over cesium telluride detector front portion, and elemental oxygen, parasitic light and pollutant are shielded, and reduces their influences to the VUV measurement result.Magnesium fluoride glass can play a good protection to the cesium telluride detector simultaneously; reduce environmental factor (elemental oxygen, pollutant and charged particle) in the measuring process to the damage of cesium telluride detector, strengthen the repeatability of measuring, the measuring error that reduces repeatedly to measure.Simultaneously, it is that the Kapton substrate vacuum insulation adhesive tape of 25 μ m has carried out excellent protection to the cesium telluride detector electrodes that native system utilizes thickness, the influence of VUV being measured with the charged particle that reduces in the elemental oxygen line.
Description of drawings
Fig. 1 is a synoptic diagram of following the VUV measuring system in the atomic oxygen environment test of space of the present utility model.
Wherein, 1, atomic oxygen source; 2, fluoridize magnesium sheet; 3, vacuum tank wall; 4, cesium telluride detector; 5, vacuum insulation adhesive tape; 6, cesium telluride detector signal harvester;
Embodiment
Below in conjunction with accompanying drawing measuring system of the present utility model is elaborated.
As shown in Figure 1, follow the measuring system of VUV to have atomic oxygen source 1 in the atomic oxygen environment simulation test of space of the present utility model, fluoridize magnesium sheet 2, vacuum tank 3, cesium telluride detector 4, cesium telluride detector signal harvester 6; Vacuum tank 3 upper ends have the atomic oxygen beam inflow entrance, atomic oxygen source 1 is set directly over the atomic oxygen beam inflow entrance, vacuum tank 3 middle parts are provided with cesium telluride detector 4, the electrode thickness of cesium telluride detector 4 is Kapton substrate vacuum insulation adhesive tape 5 parcels of 10 μ m-50 μ m, fluoridize magnesium sheet 2 and be arranged on the position between cesium telluride detector 4 and the atomic oxygen source 1 so that elemental oxygen, parasitic light and pollutant are shielded, cesium telluride detector 4 and vacuum tank 3 outer cesium telluride detector signal harvesters 5 are electrically connected.Measuring system is carried out space atomic oxygen environment ground simulation test when following VUV to measure, and the system constructing step is as follows:
1) at first fixes magnesium fluoride glass (diameter is that 50mm-100mm, thickness are 1mm-5mm) atomic oxygen beam inflow entrance place in vacuum chamber of a cleaning, remain on 10mm~20mm apart from the inlet distance, guarantee that atomic oxygen source can be in good working order when measuring;
2) used thickness is that the Kapton substrate vacuum insulation adhesive tape of 10 μ m-25 μ m wraps up the cesium telluride detector electrodes, the good isolation when guaranteeing to measure between charged particle and the detector electrodes;
3) the cesium telluride detector is installed and is located, guarantee the sensitivity of measuring position detection system in magnesium fluoride glass rear 5mm-15mm (along elemental oxygen line bombardment direction);
4) carry out the wiring of each electrode of detector and cesium telluride detector signal harvester according to accompanying drawing 1;
Below come the utility model is described further with specific embodiment:
Embodiment 1:
Use this cover measuring system that the VUV that follows in the compact ECR beam current type atomic oxygen environment analog machine is measured, the measuring position should be when environmental evaluation is tested near the sample placement location (the atomic oxygen beam inflow entrance 25mm of place in according to vacuum chamber).
According to above-mentioned implementation step measuring system is built, wherein fluoridizing the magnesium sheet diameter is that Φ 65mm, thickness are 2mm, and the ultraviolet of 113nm~200nm is had good transmission performance.Space level 3M Kapton Tape is selected in the insulation of electrode for use, and thickness is 25 microns, has pliability, anti-extreme ultraviolet performance and vacuum adaptability preferably.Fluoridize the magnesium sheet installation site apart from atomic oxygen beam inflow entrance 15mm, the detector installation site is apart from fluoridizing magnesium sheet 10mm.
After measuring system is built and finished, open the atomic oxygen environment analog machine.The atomic oxygen beam current density is 2.0 * 10 when following the uv measurement system works 15Atoms/cm 2/ s; Detector temperature is 50 ℃~55 ℃, is in the normal working temperature interval; Vacuum condition is 1.6 * 10 -2Pa satisfies the detector normal running conditions.
The photocurrent that uses the detector placement location place that this cover system measures is in the pA magnitude, and promptly atomic oxygen source produces, and to follow VUV dosage apart from atomic oxygen beam inflow entrance 35mm place in vacuum chamber be zero.
Comparing embodiment 1
Do not adopt this cover measuring system, only use commercial cesium telluride detector that the VUV that follows in the compact ECR beam current type atomic oxygen environment analog machine is measured, the atomic oxygen beam current density is 2.0 * 10 during measurement 15Atoms/cm 2/ s; Detector temperature is 50 ℃~55 ℃, is in the normal working temperature interval; Vacuum condition is 1.6 * 10 -2Pa satisfies the detector normal running conditions.
Measurement result shows that serious interference phenomenon appears in the photocurrent collection, and numerical value is about the mA magnitude, but numerical value is extremely unstable, can't carry out reading; Measure back taking-up detector and carry out visual inspection, obvious pollutant appears in the detector front end window as can be seen.
Compare with embodiment 1 by comparing embodiment 1; find that this measuring system compares with the cesium telluride detector that does not add any innovative approach; when in carrying out space atomic oxygen environment simulation test, following the VUV test; have advantages such as effectively to reduce interference, raising measurement accuracy and stability; also can play the certain protection effect to cesium telluride detector itself simultaneously, help the raising of its measurement result repeatability.

Claims (5)

1, the system of VUV in a kind of measurement space atomic oxygen environment simulation test, comprise atomic oxygen source, vacuum tank, fluoridize magnesium sheet, the cesium telluride detector, cesium telluride detector signal harvester, it is characterized in that, the vacuum tank upper end has an opening, atomic oxygen source is set directly over the opening, vacuum tank middle part is provided with the cesium telluride detector, fluoridizes magnesium sheet and is arranged on the position between cesium telluride detector and the atomic oxygen source with to elemental oxygen, parasitic light and pollutant shield, and the cesium telluride detector is electrically connected with vacuum tank cesium telluride detector signal harvester outward.
2, the system as claimed in claim 1 is characterized in that, the described diameter of fluoridizing magnesium sheet is 50mm-100mm, and thickness is 1mm-5mm.
3, the system as claimed in claim 1 is characterized in that, the electrode package of described cesium telluride detector is covered with polyimide substrate vacuum insulation adhesive tape.
4, system as claimed in claim 3 is characterized in that, the thickness of described vacuum insulation adhesive tape is 10 μ m-50 μ m.
5, the system as claimed in claim 1 is characterized in that, described distance of fluoridizing between magnesium sheet and the cesium telluride detector is 5mm-15mm.
CNU2007203049759U 2007-12-04 2007-12-04 System for measuring space atomic oxygen environmental simulation experiment VUV Expired - Fee Related CN201133900Y (en)

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Application Number Priority Date Filing Date Title
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102085920B (en) * 2009-12-04 2013-06-19 北京卫星环境工程研究所 Atomic oxygen, ultraviolet and electronic integrated environment ground simulation system of low earth orbit space
CN104375161B (en) * 2014-11-05 2017-02-15 北京卫星环境工程研究所 atomic oxygen beam energy testing system
CN107941757A (en) * 2016-09-28 2018-04-20 朗姆研究公司 The system and method for oxygen in the substrate area of in situ detection lining treatment system
CN108974398A (en) * 2018-09-18 2018-12-11 上海空间电源研究所 A kind of multi-angle atomic oxygen test on-Line Monitor Device and monitoring method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102085920B (en) * 2009-12-04 2013-06-19 北京卫星环境工程研究所 Atomic oxygen, ultraviolet and electronic integrated environment ground simulation system of low earth orbit space
CN104375161B (en) * 2014-11-05 2017-02-15 北京卫星环境工程研究所 atomic oxygen beam energy testing system
CN107941757A (en) * 2016-09-28 2018-04-20 朗姆研究公司 The system and method for oxygen in the substrate area of in situ detection lining treatment system
CN108974398A (en) * 2018-09-18 2018-12-11 上海空间电源研究所 A kind of multi-angle atomic oxygen test on-Line Monitor Device and monitoring method

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Granted publication date: 20081015

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