CN205539338U - Ultraviolet fluorescence detection device of eccentric structure - Google Patents
Ultraviolet fluorescence detection device of eccentric structure Download PDFInfo
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- CN205539338U CN205539338U CN201620289903.0U CN201620289903U CN205539338U CN 205539338 U CN205539338 U CN 205539338U CN 201620289903 U CN201620289903 U CN 201620289903U CN 205539338 U CN205539338 U CN 205539338U
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Abstract
The utility model provides an ultraviolet fluorescence detection device of eccentric structure, the device includes induction regulator, corona free experiment transformer, no partial discharge protection resistance, standard capacitor divider, non -inductive resistance, GIS analog device, digital storage oscilloscope, sets up the ultraluminescence system, the ultraluminescence system arouses subassembly, fluorescence entrapment subassembly, gas circuit subassembly including fluorescence, examine time measuring and carry out system performance parameter measurement earlier, then detect the concentration of sulfur hexafluoride gas discharge microcomponent. This device is real -time, online, continuous monitor for a long time, and is comprehensive strong, can extensively be used for SF6 gas -insulated electrical equipment, especially GIS equipment middle game to put down the detection that sulfur hexafluoride decomposes the component.
Description
Technical field
This utility model belongs to the state of insulation on-line monitoring technique field of gas insulated electric apparatus, particularly relates to a kind of inclined
The Ultravoilet light/fluorescent light detection apparatus of core structure.
Background technology
Gas insulated combined electrical equipment (be called for short GIS) has that floor space is little, safe and reliable to operation, maintenance workload is few,
The advantages such as time between overhauls(TBO) length, are widely used in power system.But, the internal inevitably insulation of GIS lacks
Sunken meeting progressively extends and causing trouble occurs, and modal electric fault feature is to puncture completely in insulation or occur before flashover
Shelf depreciation (is called for short PD).Research shows, PD can cause insulating gas SF6Decompose, and with the O in impurity2、
H2There is complicated chemical reaction in O and Organic substance, generates such as SOF2、SO2F2、SOF4、SO2、CF4、CO2、
HF、H2The products such as S, these products can be further exacerbated by the deterioration of insulation defect, so that the integral insulation of equipment
Performance reduces, and jeopardizes the safe operation of equipment.Therefore, it is quite necessary to SF6The early stage of gas insulated electric apparatus is exhausted
Edge situation is effectively assessed and early warning.The development of modern test and analysis technology so that by test SF6Catabolite
Type and content whether to exist inside diagnostic device fault, and the type of electric discharge is carried out pattern recognition, and then to setting
Standby running status carries out diagnosing and assessment is possibly realized.This utility model is for SF6The ultraviolet of failure gas in electrical equipment
Fluorescent effect, devises the Ultravoilet light/fluorescent light detection apparatus of sulfur hexafluoride gaseous discharge micro component, and its detection limit can reach
Ppb rank, for ensureing the safe and reliable operation of GIS, it is achieved GIS insulation defect causes the early stage of catastrophic discontinuityfailure
Diagnosis and prediction have highly important meaning.
The detection apparatus and method of existing GIS PD electric discharge decomposition components, such as " the six of Publication No. CN101644670A
The infrared detecting device of sulfur fluoride gas discharge microcomponent and method " patent, disclosed device mainly includes Induction Regulation
Device, corona free experimental transformer, put discharge prevention resistance, standard capacitor divider, GIS analog element, noninductive without office
Resistance, Fourier transform infrared spectrometer, wideband high speed vast capacity digital storage oscilloscope etc., disclosed method is profit
With its practical new device to SF under PD6Decomposition components carries out infrared spectrum detection.The major defect of this patent is:
(1) infrared spectrum detection is the light intensity change of the infrared light incident by contrast and the exiting infrared light after GAS ABSORPTION
Change and carry out detected gas concentration, due to SF under PD6Decomposition components concentration is less, generally 0.01 μ L/L-10 μ L/L amount
Level, so the light intensity change of the infrared light of incidence and the exiting infrared light after decomposition gas absorbs is less, adds mesh
Infrared detector sensitivity used by the infrared light intensity of front detection is low, thus causes infrared spectrum detection sensitivity relatively low, even if
Using the long gas cell described in the disclosure patent, sensitivity also only has μ L/L rank.
(2) relatively low due to infrared spectrum detection sensitivity, certain detection sensitivity to be reached, be necessary for selecting SF under PD6
The stronger absworption peak of decomposition components is as characteristic absorption peak, due to SF under PD6Decomposition components is complex, each component
There is juxtaposition in infrared absorption peak, can cause cross interference during detection, causes infrared spectrum accuracy of detection to be substantially reduced.
(3) gas cell used in this patent is long path cell, and profile is the cylinder of Φ 104mm*500mm,
Gas cell volume is relatively big (about 4.25L), and measure needs a large amount of sample gas every time, adds cost and the difficulty of measurement.
Utility model content
The purpose of this utility model is to solve current domestic prior art and the design principle defect in this field and deficiency,
Later development according to Modern Analytical Chemistry and Instrumental Analysis proposes the Ultravoilet light/fluorescent light detection apparatus of a kind of eccentric structure,
Have highly sensitive, precision is high, good stability, consumption sample gas are few, without any chemical reagent, can be the most continuous
The features such as real time on-line monitoring.
Above-mentioned technical problem of the present utility model is mainly addressed by following technical proposals:
The Ultravoilet light/fluorescent light detection apparatus of a kind of eccentric structure, including induction voltage regulator, corona free experimental transformer, nothing local
Discharge prevention resistance, standard capacitor divider, noninductive resistance, GIS analog element, digital storage oscilloscope, arrange purple
Outer fluorescing system, described Ultraluminescence system, including fluorescence excitation assembly, fluorescence trapping assembly, gas circuit assembly；
Described fluorescence excitation assembly includes ultraviolet source 9, exciting light optical filter 10, quartz lens 11, fluorescence air chamber
12, delustring cone 13, photocell 14 and temperature controller 15, the exciting light that ultraviolet source 9 sends sequentially passes through exciting light
After the focusing of optical filter 10 and quartz lens 11, entering fluorescence air chamber 12, described fluorescence air chamber 12 afterbody is provided with and disappears
Light cone 13, photocell 14, top is provided with temperature controller 15；Described fluorescence air chamber 12 is monochromatic light journey air chamber, enters
The excitation beam of fluorescence air chamber 12 uses eccentric structure, makes ultraviolet source 9, exciting light optical filter 10 and quartz lens 11
Center on same horizontal line, and this horizontal line deviation air chamber axis closer to fluorescence dust trapping chamber 16；Photocell
14 with the center of incident ray on the same line.
And, described fluorescence trapping assembly includes fluorescence dust trapping chamber 16, focus lamp 17, fluorescent optical filter 18, photoelectricity
Multiplier tube 19 and single photon counter system 20, be provided with the fluorescence dust trapping chamber 16 of cylinder in the front side of fluorescence air chamber 12,
Described fluorescence dust trapping chamber 16 is internal is sequentially installed with focus lamp 17, fluorescent optical filter 18, photomultiplier tube 19, photoelectricity
Multiplier tube 19 is connected with outside single photon counter system 20.
And, described single photon counter system 20 includes amplifier 27, discriminator 28 sum counter being sequentially connected with
29。
And, described gas circuit assembly includes air inlet 21, intake valve 22, effusion meter 23, gas outlet 24, air outlet valve
25, air pump 26 is constituted, and is provided with air inlet 21 and gas outlet 24, described air inlet 21 at the top of fluorescence air chamber 12
By intake valve 22, side connects tested gas, and opposite side connection traffic meter 23, air outlet valve is passed through in described gas outlet 24
25 connect air pump 26.
And, the angle of the axis of horizontal line deviation air chamber is 5 to 15 degree.
Feature of the present utility model with provide the benefit that:
(1) this utility model device is highly sensitive, can effectively detect the SO of as little as ppb rank2, the gas component such as NO,
Can play a game and put down sulfur hexafluoride feature decomposition component and carry out qualitative and quantitative analysis.
(2) existing office puts down sulfur hexafluoride decomposition components infrared spectrum detection method, because sensitivity is low, it is necessary to select stronger
Infrared absorption peak as the absworption peak of detection, the problem that there is absworption peak cross interference, and this utility model device is adopted
With ultraviolet fluorescence method, selectivity is strong, effectively avoids the cross interference problem of absworption peak, improves the detection essence of device
Degree.
(3) this utility model device detects every time only needs sample gas 0.36L (cavity volume of fluorescence air chamber), much smaller than existing
Office puts down the 4.25L of sulfur hexafluoride decomposition components infrared spectrum detection method, saves gas, reduces gas production and detection
Difficulty, saves a large amount of manpower and materials cost.
This utility model can the most in real time, online, monitor continuously, comprehensive by force, can be widely used for SF6Gas is exhausted
In edge electrical equipment, particularly GIS device, office puts down the detection of sulfur hexafluoride decomposition components, for scientific research, imparts knowledge to students, studies
Institute, to GIS device SF in device fabrication producer and power system6Theory analysis and the applied research of state-detection provide
A kind of easy method reliably.
Accompanying drawing explanation
Fig. 1 is the key wiring diagram of this utility model embodiment device；
Fig. 2 is the structural representation of this utility model embodiment device medium ultraviolet fluorescing system；
Fig. 3 is the structure chart of single photon technique system in this utility model embodiment device；
In figure: 1 induction voltage regulator；2 corona free experimental transformers；3 without shelf depreciation protective resistance；4 standard capacitor dividers；
5 noninductive resistances；6GIS analog element；7 Ultraluminescence systems；8 wideband high speed vast capacity digital storage oscilloscopes；9
Ultraviolet source；10 exciter filters；11 quartz lenss；12 fluorescence air chambers；13 delustring cones；14 temperature controllers；16
Fluorescence dust trapping chamber；17 focus lamps；18 fluorescent optical filters；19 photomultiplier tubes；20 single photon counter systems；21 air inlets
Mouthful；22 intake valves；23 effusion meters；24 gas outlets；25 air outlet valves；26 air pumps；27 amplifiers；28 discriminators；
29 enumerators.
Detailed description of the invention
Below by embodiment, and combine accompanying drawing, the technical solution of the utility model is described in further detail.
This utility model initiates the side proposing to use Ultraluminescence at the state of insulation detection field of gas insulated electric apparatus
Formula, mechanism is: under ultraviolet light irradiates, characteristic gas molecule can absorb ultraviolet light and jump to excited state, is in excited state
Molecule the most unstable, ground state can be returned to again, and radiate fluorescence, the concentration of the fluorescence intensity inspired and characteristic gas
It is directly proportional, uses photomultiplier measurement to go out fluorescence intensity and i.e. can determine that SF6The concentration of decomposition components.Due to variety classes
The wavelength of its ultraviolet absorption peak of gas different, the wavelength of fluorescence exciting generation is the most different, by absworption peak wavelength and fluorescence
Wavelength just can determine whether the kind of gas.
The technical scheme realizing this utility model purpose is: the Ultravoilet light/fluorescent light detection apparatus of a kind of eccentric structure, mainly includes
Induction voltage regulator 1, corona free experimental transformer 2, without shelf depreciation protective resistance 3, standard capacitor divider 4, noninductive
Resistance 5, GIS analog element 6, wideband high speed vast capacity digital storage oscilloscope 8, Ultraluminescence system 7 etc..Institute
State Ultraluminescence system 7, mainly trapped assembly, gas circuit assembly by fluorescence excitation assembly, fluorescence and be interconnected to constitute.
The secondary of induction voltage regulator 1 is connected with the former limit of corona free experimental transformer 2, the secondary of corona free experimental transformer 2 with
One end of protective resistance without shelf depreciation 3 connects, and one end of standard capacitor divider 4 and one end of GIS analog element are equal
Being connected with the other end without shelf depreciation protective resistance 3, the other end ground connection of standard capacitor divider 4, GIS simulates unit
The other end of part 6 connects one end of noninductive resistance 5, the other end ground connection of noninductive resistance 5, GIS analog element 6 another
One end is also connected with wideband high speed vast capacity digital storage oscilloscope 8.
As it is shown in figure 1, the Ultravoilet light/fluorescent light detection apparatus of a kind of eccentric structure of embodiment offer, it is at existing insulation gas
On the basis of body shelf depreciation decomposition components detection method, introducing ultraviolet fluorescence method, design fluorescence excitation assembly and fluorescence are caught
Collection assembly, can realize the high-precision device of on-line monitoring to electrical equipment.
Described fluorescence excitation assembly is by ultraviolet source 9, exciting light optical filter 10, quartz lens 11, fluorescence air chamber
12, delustring cone 13, photocell 14, temperature controller 15 are constituted.Ultraviolet source 9, exciting light optical filter 10, quartz
Lens 11, fluorescence air chamber 12 are sequentially connected with, and the exciting light that ultraviolet source 9 sends sequentially passes through exciting light optical filter 10
After focusing with quartz lens 11, enter fluorescence air chamber 12.Described fluorescence air chamber is rustless steel cuboid, and afterbody sets
Having delustring cone 13, photocell 14, top is provided with temperature controller 15.
Described ultraviolet source 9 is commercial products, the deuterium lamp light source selecting wave-length coverage to be 190-400nm, and exciting light leads to
Crossing the output of SMA905 optical fiber, its peak-peak stability is less than 0.005%, and drift is only +/-0.5% per hour, intensity is big,
Stability is high.In embodiment, described ultraviolet source 9 uses the D-2000-DUV deuterium that Ocean Optics of the U.S. produces
Lamp source.
Described exciting light optical filter 10 is commercial products, and research shows, during more than 230nm, and SO2, NO etc. decomposes
Component is the most weak to the absorption of ultraviolet, and therefore this device selects the exciting light optical filter of 190-230nm, filters beyond wavelength
The ultraviolet light of scope, reduces the interference to fluoroscopic examination.In embodiment, described exciting light optical filter 10 selects the U.S.
Andover 214FS2175 optical filter, a diameter of 25mm of filter, its transmitance can reach at 213.75nm
24.2829%, drop to less than 0.7% more than transmitance during 240nm, filter effect is good.
Described quartz lens 11 is commercial products, and its spot diameter is 43mm, and large spot is conducive to tested gas and swashs
Luminescence is fully contacted, thus improves the accuracy of detection of device.
Described fluorescence air chamber 12 is monochromatic light journey air chamber, and light path is 20CM, main cavity a size of 200*65*65mm,
Internal diameter is Φ 48mm, and volume is 360mL.Base plane is installed, and 4 Φ 6 slotted holes are four angular distribution；Cavity uses
Extraordinary aluminium alloy, internal black coating color teflon processes, to reduce the inwall absorption to gas molecule.The pressure of air chamber is 1.5
Individual atmospheric pressure, heatproof is 50 DEG C.The excitation beam entering fluorescence air chamber uses eccentric structure, i.e. ultraviolet source, exciting light
The center of optical filter and quartz lens is on same horizontal line (horizontal axis), and the axle of this horizontal line deviation air chamber
Line, closer to fluorescence dust trapping chamber 16, relative to the symmetrical structure of conventional fluorescent air chamber, this design is more beneficial for reducing light
The background counting rate of electricity multiplier tube 19, thus improve the precision of detection.The angle of the axis of recommended levels line deviation air chamber
It is 5 to 15 degree.The axis 5mm of the horizontal axis deviation air chamber of quartz lens in embodiment.
Fluorescence air chamber afterbody is provided with delustring cone 13, has strong Absorption to exciting light, reduces reflection, thus reduces and excite
The light interference to fluoroscopic examination.Photocell 14 embeds in delustring cone 13, and photocell 14 and the center of incident ray are same
On one straight line, the excitation light intensity of ultraviolet source 9 can be received, for compensating owing to light source rises and falls on the impact measured.Pass through
Plenum roof is provided with temperature controller 15, and the temperature in air chamber is detected.
Described fluorescence trapping assembly is by fluorescence dust trapping chamber 16, focus lamp 17, fluorescent optical filter 18, photomultiplier tube
19, single photon counter system 20 is constituted.The fluorescence dust trapping chamber 16 of cylinder it is provided with in the front side of fluorescence air chamber 12, described
The receipts light aperture size of fluorescence dust trapping chamber be Φ 40, inside is sequentially installed with focus lamp 17, fluorescent optical filter 18 and light
Electricity multiplier tube 19, photomultiplier tube 19 is connected with outside single photon counter system 20.Photomultiplier tube 19 is by fluorescence
Signal is converted to pulse electrical signal, by single photon counter system 20, it is achieved the counting to electric pulse.
The wave band of described fluorescent optical filter 18 is determined by the extent of fluorescence of tested gas molecule, with SO2As a example by gas,
The extent of fluorescence of its gas molecule is 240nm～420nm, reaches maximum, for SO at 320nm2Gas, this
Device selects U.S.'s THORLABS FGUV11 optical filter, and a diameter of 25mm of filter, its transmitance is at 320nm
Place can reach 81.55398%.
Described photomultiplier tube 19 is commercial products, by SF6It is faint that gas discharge decomposition component produces after being stimulated
Fluorescence signal is converted into the signal of telecommunication, and its running voltage is ± 15V, and controlling voltage regulation limits is+0.25V-+0.9V.Implement
In example, this device selects H9656-02 type photomultiplier tube conversion photosignal, uses 22HP-10 multiturn potentiometer,
Being produced by SAKAE company, its resistance is 10k Ω, and resistance tolerance is ± 5% (standard level).
Described single photon counter system 20 includes amplifier 27, discriminator 28 sum counter 29 being sequentially connected with, institute
The amplifier 27 stated is commercial products, and this device selects MAX4414 amplifier, and three dB bandwidth during its small-signal is
400MHz.Described discriminator 28 is commercial products, and this device selects MAX9012 as descriminator, and this chip contains
Two panels high-speed comparator, time delay is 5ns.Described enumerator 29 counts for single-chip microcomputer, the single-chip microcomputer model that this device is selected
For MSP430F149.
Described gas circuit assembly is by air inlet 21, intake valve 22, effusion meter 23, gas outlet 24, air outlet valve 25, takes out
Air pump 26 is constituted.Air inlet 21 and gas outlet 24 it is provided with at the top of fluorescence air chamber 12, a diameter of Φ 6mm, stainless
Steel matter, good corrosion resistance.Described air inlet 21 connects tested gas by intake valve 22, side, and opposite side connects
Effusion meter 23.Described gas outlet connects air pump 26 by air outlet valve 25.The each assembly of gas circuit is by pressure and decay resistance
Preferably teflon hose connects.I.e. converting interface is politef material, pressure and corrosion resistance and good.
Described air inlet 21 and gas outlet 24, diameter is Φ 6mm, stainless steel, good corrosion resistance.
Described intake valve 22 and air outlet valve 25 are commercial products, politef material, pressure and corrosion resistance and good.
Described vacuum pump is commercial products, and power is 150W, and the speed of exhaust is 3.6m3/ h, end vacuum 5Pa.
The profile of described fluorescence air chamber, in addition to aforesaid cuboid, can be also cylinder, square etc..
During using reference for ease of those skilled in the art, utilize this utility model device, in its GIS analog element
PD SF6Decomposition components carries out specifically comprising the following steps that of Ultraluminescence detection
(1) preparation before detection
1. clean and debug
First clean the inwall of fluorescence air chamber 12 with anhydrous alcohol, remove impurity in air chamber, after fluorescence air chamber 12 air-dries,
Exciting light optical filter 10, quartz lens 11, photocell 14, focus lamp 17, fluorescent optical filter 18, photoelectricity times are installed again
Increasing pipe 19 parts such as grade, when installing each tool component, each threaded connection place need to add raw material band and fluid sealant, it is ensured that fluorescence gas
There is good air-tightness room 12.Finally by inlet, outlet 21/24 with into and out of air valve 22/25 and air pump 26,
First with nitrogen, fluorescence air chamber 12 is carried out 2-3 time to clean, by air pump 26, fluorescence air chamber 12 is taken out very after cleaning
Empty.
2. system performance parameter is measured
First it is the dark counting measurement of photomultiplier tube 19.Suggestion ensures that the available machine time is 1 hour, at room temperature and photoelectricity
In the case of the temperature constant of multiplier tube, indoor humidity are constant, do not turn on light, stuffiness, record photomultiplier tube 19
Background count, is dark counting.
After the dark counting of photomultiplier tube 19 tends towards stability, open deuterium lamp, after treating that deuterium lamp is stably, just can carry out
Next step operation.Before general test, deuterium lamp lighting time will maintain 20 minutes.
It is followed by the sample-out count of device.In the case of excitation source is stable, it is passed through zero gas, records background counting rate.
Zero gas selects High Purity Nitrogen, by its flow-control of aerator at about 1L/min, it is proposed that for 0.8-1.2L/min.Device
Sample-out count is very big on subsequent experimental impact, and direct reaction is in the accuracy of net signal.
Then response factor λ is measured.Including the Standard Gases that with air distributing device, gas to be measured is made into variable concentrations
Body, is filled with fluorescence air chamber 12 by air inlet 21 and air intake valve 22 respectively；Photo Counting System 20 is used to carry out list
Photon counting, such as counting door time 1s, 60 are averaged, and obtain photomultiplier tube 19 under variable concentrations calibrating gas
The average total signal recorded, after deduction background count, obtains net signal Nph, net signal value and corresponding gas concentration
Ratio, be response factor λ.
Finally calculate device lowest detectable limit, by existing signal to noise ratio formulaObtain
The detection limit of system in cumulative time T.
(2) concentration of sulfur hexafluoride gaseous discharge micro component is detected
After (1st) step completes, first open ultraviolet source 9 and preheat, then pass through gas outlet 24, air outlet valve 25
And fluorescence air chamber 12 is evacuated by air pump 26, it is filled with GIS to be measured by air inlet 21, intake valve 22 afterwards
SF in analog element6Decomposition components, writes down the corresponding counting of the fluorescent pulse corresponding to single photon counter system 20,
Finally may utilize the fluorescent pulse counting S that single photon counter system 20 is recorded by computer programi(i=1,2 ...) read in calculating
Machine, on computers by formula Ci=Si÷ λ, (i=1,2 ...) carry out calculating that (in formula, λ is response factor, SiFor
Fluorescence signal value, labelling i represents i & lt), draw SO accurately2Concentration value Ci(i=1,2 ...).
When being embodied as, those skilled in the art can arrange software voluntarily and realize computer program according to prior art.
(3) clean and safeguard
After (2nd) step completes, first open air outlet valve 24 and air pump 26, be evacuated to give up by the gas in fluorescence air chamber 12
Abandon in pond and discharge, rear air outlet valve 24 and the air pump 26 of closing, then open intake valve 22 and be filled with nitrogen, open the most successively
Air outlet valve 25 and air pump 26, be evacuated to the gas in fluorescence air chamber 12 in discarded pond discharge.2-3 is operated more than repeating
Secondary, fluorescence air chamber nitrogen is cleaned up.Finally place a device in dry environment and properly preserve.
This utility model claims hardware designs, is not related to the improvement of software aspects.
Specific embodiment described herein is only to this utility model spirit explanation for example.Belonging to this utility model
Described specific embodiment can be made various amendment or supplements or use similar by those skilled in the art
Mode substitute, but without departing from spirit of the present utility model or surmount scope defined in appended claims.
Claims (5)
1. a Ultravoilet light/fluorescent light detection apparatus for eccentric structure, including induction voltage regulator, corona free experimental transformer, puts without local
Electric protection resistance, standard capacitor divider, noninductive resistance, GIS analog element, digital storage oscilloscope, its feature exists
In: arranging Ultraluminescence system, described Ultraluminescence system, including fluorescence excitation assembly, fluorescence trapping assembly, gas circuit
Assembly；
Described fluorescence excitation assembly includes ultraviolet source (9), exciting light optical filter (10), quartz lens (11), fluorescence gas
Room (12), delustring cone (13), photocell (14) and temperature controller (15), the exciting light that ultraviolet source (9) sends sequentially passes through
After the focusing of exciting light optical filter (10) and quartz lens (11), enter fluorescence air chamber (12), described fluorescence air chamber (12) tail
Portion is provided with delustring cone (13), photocell (14), and top is provided with temperature controller (15)；Described fluorescence air chamber (12) is monochromatic light
Journey air chamber, the excitation beam entering fluorescence air chamber (12) uses eccentric structure, makes ultraviolet source (9), exciting light optical filter (10)
With the center of quartz lens (11) on same horizontal line, and the axis of this horizontal line deviation air chamber is caught closer to fluorescence
Collection room (16)；The center of photocell (14) and incident ray is on the same line.
The Ultravoilet light/fluorescent light detection apparatus of eccentric structure the most according to claim 1, it is characterised in that: described fluorescence trapping group
Part includes fluorescence dust trapping chamber (16), focus lamp (17), fluorescent optical filter (18), photomultiplier tube (19) and single photon counting system
System (20), is provided with in the front side of fluorescence air chamber (12) in the fluorescence dust trapping chamber (16) of cylinder, described fluorescence dust trapping chamber (16)
Portion is sequentially installed with focus lamp (17), fluorescent optical filter (18), photomultiplier tube (19), photomultiplier tube (19) and outside
Single photon counter system (20) is connected.
The Ultravoilet light/fluorescent light detection apparatus of eccentric structure the most according to claim 2, it is characterised in that: described single photon counting
System (20) includes amplifier (27), discriminator (28) sum counter (29) being sequentially connected with.
The Ultravoilet light/fluorescent light detection apparatus of eccentric structure the most according to claim 1, it is characterised in that: described gas circuit assembly bag
Include air inlet (21), intake valve (22), effusion meter (23), gas outlet (24), air outlet valve (25), air pump (26) composition,
The top of fluorescence air chamber (12) is provided with air inlet (21) and gas outlet (24), described air inlet (21) pass through intake valve (22), one
Side connects tested gas, opposite side connection traffic meter (23), and described gas outlet (24) connect air pump by air outlet valve (25)
(26)。
5. according to the Ultravoilet light/fluorescent light detection apparatus of eccentric structure described in claim 1 or 2 or 3 or 4, it is characterised in that: level
The angle of the axis of line deviation air chamber is 5 to 15 degree.
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| CN201620289903.0U CN205539338U (en) | 2016-04-08 | 2016-04-08 | Ultraviolet fluorescence detection device of eccentric structure |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107335A (en) * | 2017-11-27 | 2018-06-01 | 中山市光圣半导体科技有限责任公司 | A kind of uv-LED device test device and test method |
| CN109406966A (en) * | 2018-11-28 | 2019-03-01 | 杭州电力设备制造有限公司 | High-tension switch cabinet local discharge on-line monitoring device based on gas method |
| CN112179490A (en) * | 2020-09-01 | 2021-01-05 | 北京九辰智能医疗设备有限公司 | Light intensity detection circuit and method with wide variation frequency and range |
| TWI728614B (en) * | 2019-10-12 | 2021-05-21 | 大陸商長江存儲科技有限責任公司 | Method for detecting defects in deep features |
-
2016
- 2016-04-08 CN CN201620289903.0U patent/CN205539338U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108107335A (en) * | 2017-11-27 | 2018-06-01 | 中山市光圣半导体科技有限责任公司 | A kind of uv-LED device test device and test method |
| CN108107335B (en) * | 2017-11-27 | 2024-05-24 | 中山市光圣半导体科技有限公司 | Ultraviolet LED device testing device and testing method |
| CN109406966A (en) * | 2018-11-28 | 2019-03-01 | 杭州电力设备制造有限公司 | High-tension switch cabinet local discharge on-line monitoring device based on gas method |
| CN109406966B (en) * | 2018-11-28 | 2023-12-08 | 杭州电力设备制造有限公司 | High-voltage switch cabinet partial discharge on-line monitoring device based on gas method |
| TWI728614B (en) * | 2019-10-12 | 2021-05-21 | 大陸商長江存儲科技有限責任公司 | Method for detecting defects in deep features |
| CN112179490A (en) * | 2020-09-01 | 2021-01-05 | 北京九辰智能医疗设备有限公司 | Light intensity detection circuit and method with wide variation frequency and range |
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