CN201132853Y - Apparatus for manufacturing hybrid integrated circuit substrate by dual-beam dual-wavelength laser three-dimensional micro-cladding - Google Patents
Apparatus for manufacturing hybrid integrated circuit substrate by dual-beam dual-wavelength laser three-dimensional micro-cladding Download PDFInfo
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- CN201132853Y CN201132853Y CN 200720046276 CN200720046276U CN201132853Y CN 201132853 Y CN201132853 Y CN 201132853Y CN 200720046276 CN200720046276 CN 200720046276 CN 200720046276 U CN200720046276 U CN 200720046276U CN 201132853 Y CN201132853 Y CN 201132853Y
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Abstract
The utility model relates to equipment for manufacturing a hybrid integrated circuit base plate through double-beam double wave length laser three-dimensional cladding, and belongs to the technical field for manufacturing a hybrid integrated circuit in the electron industry. The equipment utilizes Nd with a symmetrical double Z-shaped resonant cavity: a YAG laser emits double-beam double wave length laser through a rectangular prism, a multichannel intelligent microflaring power feeding is arranged, a polarizer and a worktable are controlled to move by a five-axes paralleling technology, the laser three-dimensional cladding manufacture of the hybrid integrated circuit base plate and a multilayer and three-dimensional breadboard is realized through the feedback of three-dimensional intelligent visual checking and identification equipment and using a system center control module to control the whole equipment to run.
Description
The utility model relates to the equipment that hybrid integrated circuit substrate is made in the little cladding of a kind of double-beam double-wavelength laser three-dimensional, belongs to electron trade hybrid integrated circuit manufacturing technology field.
Background technology
Technology and equipment about the little cladding manufacturing of double-beam double-wavelength laser three-dimensional numerical control hybrid integrated circuit substrate still do not have relevant report at present both at home and abroad.
Hybrid integrated circuit substrate, the manufacturing of multilayer and three-dimensional wiring board is the core pillar of electronic industry, particularly commercial at present computer, the acp chip in the electronic and communication facility and the manufacturing of high-end integrated circuit (IC) chip are the trend and the pillars of world technology economy and industry, the development foundation of the sector is, make " the little melting and coating technique of industrial digital control laser and the equipment " of high-end unicircuit, for this reason, the utility model proposes the little cladding of a kind of double-beam double-wavelength laser three-dimensional numerical control and make the technology and the equipment of hybrid integrated circuit substrate, it utilizes the Nd:YAG laser apparatus of symmetrical double Z shaped resonator cavity to launch double-beam double-wavelength laser through prism square, the configuration multichannel intelligent micro-spraying powder feed, adopt five-shaft parallel technology control two-beam galvanometer and movable workbench, realize hybrid integrated circuit substrate, the little cladding manufacturing of the laser three-D of multilayer and three-dimensional wiring board.
The utility model content
The purpose of this utility model is to provide the little cladding of a kind of double-beam double-wavelength laser three-dimensional numerical control to make the technology and the equipment of hybrid integrated circuit substrate, it utilizes the Nd:YAG laser apparatus of symmetrical double Z shaped resonator cavity to launch double-beam double-wavelength laser through prism square, configuration multichannel intelligent micro-spraying powder feed, employing five-shaft parallel technology control two-beam galvanometer and movable workbench realize the little cladding manufacturing of laser three-D of hybrid integrated circuit substrate, multilayer and three-dimensional wiring board.
The utility model is mainly by the double-beam double-wavelength laser device, multichannel intelligent micro-spraying powder feed, the identification of 3 D intelligent vision-based detection, five-shaft parallel control galvanometer and worktable and central authorities of system intelligent control module are formed, it is characterized in that: head is equipped with the double Z shaped resonator cavity double-beam double-wavelength laser Nd:YAG laser apparatus of X-Y galvanometer and condensing lens, be placed in X, three worktable tops of Y and Z, the multichannel intelligent micro-spraying powder feed device is arranged at the top, both sides of " X; three worktable of Y and Z ", with the former staggered positions 3 D intelligent vision-based detection means of identification is installed, all device all links to each other with the system numer centre by umbilical cable.
The technical solution of the utility model is: utilize two symmetrical Z type Nd:YAG laser resonant cavities, the output double beams laser, utilize 3 " wavelength Conversion mirrors ", realize 532nm, the array output of 1064nm dual wavelength, by the synthetic parallel two-way output of prism square, focus on the little cladding part of laser surface, dispose multichannel intelligent micro-spraying powder feed cladding system again, 3 D intelligent vision-based detection identification feedback system, five-shaft parallel control galvanometer and movable workbench system, by complete machine computer center Controlling System, control realizes the little cladding of two-wire dual-wavelength laser, realizes hybrid integrated circuit substrate, the little cladding manufacturing of the laser three-D of multilayer and three-dimensional wiring board.
Of the present utility model being characterised in that, it comprises Nd:YAG laser apparatus, multichannel intelligent micro-spraying powder feed device, 3 D intelligent vision-based detection means of identification and galvanometer x, y axle and worktable X, the Y of double Z shaped resonator cavity double-beam double-wavelength laser and the five-shaft parallel building mortion of Z axle; The structure of the Nd:YAG laser apparatus of its double Z shaped resonator cavity double-beam double-wavelength laser adopts symmetric Z type resonator cavity, be provided with two-sided plating 532nm, 1064nm highly reflecting films prism square, the light beam fine setting mirror that one dimension rotates is set; The multichannel intelligent micro-spraying powder feed cladding apparatus adopts the fine needle tubing of the double little spray of intelligence; The twin camera structure of the 3 D visual Information Monitoring of 3 D intelligent vision-based detection means of identification, the five-shaft parallel building mortion of five parallel interlock control galvanometer x, y axle and worktable X, Y and Z axles, five of the light beam fine setting mirror axle that rotates of one dimension and galvanometer x, y axle, worktable X, Y, Z axle in addition, parallel connection six parallel institutions that are as the criterion.
In addition, adopt double-deck 6061 aluminium alloy plate structure fabrication substrates, the levels structure of light path and water, circuit layered arrangement, the best Z type of research and design resonator parameter.System's employing prism square is realized synthetic walk abreast output of two-way dual wavelength and focusing, and parts 7 light beams fine setting mirror is set, and the influence of correcting device precision ensures the accurate of light path; Plate the two high-reflecting films of 532nm, 1064nm on prism square, designing optimal focuses on the parameter of field lens, Z type resonator cavity simultaneously, reduces the loss of light.
Its technical index:
The maximum line width that the micro-pen device is directly write :≤60 μ m
Compound little cladding processing maximum line width of little spray of laser or micro-pen device :≤10 μ m
Maximum processing breadth: 400mm * 300mm * 100mm
Bearing accuracy: ± 0.001mm
Repetitive positioning accuracy: ± 0.001mm
Stream time: 〉=8 hours
Life-span: 〉=5000 hours
Description of drawings:
Accompanying drawing: the structural representation of the equipment of hybrid integrated circuit substrate is made in the little cladding of double-beam double-wavelength laser three-dimensional.
Wherein, 1 is the Y galvanometer motor, and 2 is the Y galvanometer, 3 is the X galvanometer, 4 is the X galvanometer motor, and 5 is beam expanding lens, and 6 is prism square, 7 are light beam fine setting mirror, 8 is 532nm plane mirror I, and 9 is 532nm harmonic reflection mirror I, and 10 is 1064nm plane mirror I, 11 is acousto-optic Q-switching I, 12 is wavelength Conversion mirror I, and 13 is concave mirror I, and 14 is acousto-optic Q-switching II, 15 is ktp crystal, 16 is wavelength Conversion mirror II, and 17 are the pumping assembly, and 18 is the Nd:YAG laser crystals, 19 is wavelength Conversion mirror II, 20 plane mirror II, 21 are collimation tracking illumination source, 22 is CCD camera I, 23 is laser beam, 24 is the fine needle tubing I of intelligent little spray, and 25 is laser melting coating spare, and 26 is X-axis shift servo motor, 27 is z axle shift servo motor, 28 is the fine needle tubing II of intelligent little spray, and 29 is condensing lens, and 30 is CCD camera II, 31 is y axle shift servo motor, 32 is operating mode transmitter such as temperature, and 33 is mobile working platform, and 34 are the overhead control cable, 35 are central intelligent control box (comprising Laser Power Devices etc.), 36 is computer, and 37 is water-cooled constant temperature unit umbilical cable, and 38 is water-cooled constant temperature unit, 39 is the water-cooled circulating pipe, and 40 is the laser apparatus casing.This laser apparatus adopts symmetrical structure, and promptly the group of another in laser apparatus light path is identical with above-mentioned light path symmetry, is omitted so introduce, and above-mentioned one group of light path is called the A laser apparatus, and another group is called the B laser apparatus.
Embodiment:
Below in conjunction with accompanying drawing the utility model is illustrated.
Machine system mainly comprises following five parts:
(1) the little cladding double-beam double-wavelength laser of laser device system is made up of parts 2,3,5～21,28, and the water-cooled constant temperature unit of laser apparatus is made up of parts 38,39.。
(2) multichannel intelligent micro-spraying powder feed cladding system is made up of parts 24,28.
(3) 3 D intelligent vision-based detection identification feedback control system is made up of parts 22,30.
(4) five-shaft parallel control galvanometer and movable workbench system are made up of parts 1,4,26,27,31.
(5) central authorities of system intelligent control module is made up of parts 35,36,34,37.
Be illustrated respectively below.
1. double-beam double-wavelength laser device system mainly is made of parts 2,3,5～21,29,38, and 23 is laser beam.Referring to accompanying drawing 3, and part description.
1. the embodiment of the output green glow of double-beam double-wavelength laser device
Output 532nm green glow technical scheme is: by parts 16,20,18,17,14,12,19,15 and 13 form Z type resonator cavity I, produce the green laser of 532nm, from parts 12 outputs, again through parts 9, parts 8, incide 7 light beams fine setting mirror I, reflex to again on parts 6 prism squares, simultaneously, another green laser of 532nm of organizing the same generation of symmetrical light path incides parts 6 from symmetry direction in the laser apparatus, and merging two bundles, 532 laser by parts 6 prism squares is collimated beam, incides in parts 5 beam expanding lenss, after expanding bundle, through parts 2,3, incide parts 29 condensing lenss, be radiated at after the focusing on the 25 laser melting coating spares.
2. the embodiment of the infrared 1064nm laser of the output of double-beam double-wavelength laser device
Exporting infrared 1064nm laser technology scheme is: by by parts 16,20,18,17,14,12 and 19 form Z type resonator cavity II, produce 1064nm laser laser, from parts 16, again through parts 21, parts 10, through parts 9, incide 7 light beams fine setting mirror I, reflex on the parts 6, simultaneously, another 1064nm laser of organizing the same generation of symmetrical light path incides on the parts 6 from symmetry direction in the laser apparatus again, merging two bundle 1064nm laser by parts 6 prism squares is collimated beam, incide in the parts 5, behind the expansion bundle, through parts 2,3, incide parts 29, be radiated at after the focusing on the 25 laser melting coating spares.Adjust spacing, position and the dynamic motion of control double beams laser by parts 7.
3. the embodiment of wavelength conversion
In the double-beam double-wavelength laser device system, form Z type resonator cavity I by parts 16,20,18,17,14,12,19,15 and 13, output 532nm laser, and by form Z type resonator cavity II by parts 16,20,18,17,14,12 and 19, output 1064nm laser, eyeglass by parts 12, parts 16 and parts 19 switches, and realizes the conversion of Z type resonator cavity I and Z type resonator cavity II, and detailed process is as follows:
(1) the Z type resonator cavity I of output 532nm laser:
With parts 12, switch to the 532nm outgoing mirror; Parts 16 are switched to the 1064nm total reflective mirror; Parts 19 are switched to 532nm and the two high reflection mirrors of 1064nm, constitute and form Z type resonator cavity I, by parts 12 output 532nm laser by parts 16,20,18,14,12,19,15 and 13.
(2) the Z type resonator cavity II of output 1064nm laser:
(3) the Z type resonator cavity III of 532nm, 1064nm dual wavelength output laser:
(4) two groups of laser apparatus 532nm of A, B, the array output of 1064nm dual wavelength
Two groups of laser apparatus of A, B can be realized 532nm, the array output of 1064nm dual wavelength, can be the output of two-beam 1064nm wavelength, also can be the output of two-beam 532nm wavelength, can also be that single bundle 532nm, single bundle 1064nm export respectively,, can also be single bundle 532nm, 1064nm array output.
2. multichannel intelligent micro-spraying powder feed cladding system is made up of parts 23,27.
The laser melting coating slurry is injected the fine needle tubing I of intelligent little spray, II in advance and changes fine needle tubing fully, by the intelligent control module control of central authorities of system, carry out multichannel intelligent micro-spraying powder feed, can implement the combination cladding mode of light beams such as " powder two light, the two light of two powder and the two light of many powder " and powder feeding.
3. 3 D intelligent vision-based detection identification feedback control system is made up of parts 22,29.
By parts 22,29 is CCD camera I, II vision collecting laser spots three-dimensional information, by little cladding work informations of laser such as parts 31 collecting temperatures, viscosity, by the intelligent control module control of central authorities of system, the little cladding operating mode of laser is implemented identification of 3 D intelligent vision-based detection and feedback control.
4. five-shaft parallel control galvanometer and movable workbench system are made up of parts 1,4,25,26,30.
X, Y and the mobile and laser galvanometer x of Z axle, the rotation of y axle by three-dimensional working platform constitute five parallel linked systems, by central authorities of system intelligent control module, control five parallel interlocks, realize little cladding of local fine high-speed, high precision and combining that the worktable large format moves, the straight writing rate of local fine point can reach 5000mm/s, and the maximum breadth of movable workbench can reach 500mm * 400mm * 100mm.
5. central authorities of system intelligent control module is made up of parts 34,35,33,36.
Send instruction by central authorities of system intelligent control module, double-beam double-wavelength laser device, multichannel intelligent micro-spraying powder feed, the identification of 3 D intelligent vision-based detection and five-shaft parallel control galvanometer and worktable are implemented complete machine control, realize that the little cladding complete machine of laser runs well.
Claims (4)
1. the equipment of hybrid integrated circuit substrate is made in the little cladding of a double-beam double-wavelength laser three-dimensional, it is characterized in that: head is equipped with the double Z shaped resonator cavity double-beam double-wavelength laser Nd:YAG laser apparatus of X-Y galvanometer and condensing lens, be placed in X, three worktable tops of Y and Z, multichannel intelligent micro-spraying powder feed cladding apparatus with the fine needle tubing of the double little spray of intelligence is arranged at the top, both sides of " X; three worktable of Y and Z ", with the former staggered positions the 3 D intelligent vision-based detection means of identification of the twin camera structure with 3 D visual Information Monitoring is installed, all device all links to each other with the system numer centre by umbilical cable.
2. the little cladding equipment of laser three-D according to claim 1, the structure that it is characterized in that the Nd:YAG laser apparatus of described double Z shaped resonator cavity double-beam double-wavelength laser adopts symmetric Z type resonator cavity, be provided with two-sided plating 532nm, 1064nm highly reflecting films prism square, the light beam fine setting mirror that one dimension rotates is set.
3. the little cladding equipment of laser three-D according to claim 1 is characterized in that galvanometer x, the y axle of the five-shaft parallel building mortion of galvanometer x, y axle and worktable X, Y and Z axle rotates five parallel interlocks of moving with worktable X, Y and Z axle.
4. the little cladding equipment of laser three-D according to claim 2 is characterized in that light beam fine setting mirror axle and galvanometer x, y axle, worktable X, Y, Z axle five, parallel connection six parallel institutions that are as the criterion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200720046276 CN201132853Y (en) | 2007-10-08 | 2007-10-08 | Apparatus for manufacturing hybrid integrated circuit substrate by dual-beam dual-wavelength laser three-dimensional micro-cladding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200720046276 CN201132853Y (en) | 2007-10-08 | 2007-10-08 | Apparatus for manufacturing hybrid integrated circuit substrate by dual-beam dual-wavelength laser three-dimensional micro-cladding |
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| Publication Number | Publication Date |
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| CN201132853Y true CN201132853Y (en) | 2008-10-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200720046276 Expired - Fee Related CN201132853Y (en) | 2007-10-08 | 2007-10-08 | Apparatus for manufacturing hybrid integrated circuit substrate by dual-beam dual-wavelength laser three-dimensional micro-cladding |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2463246C1 (en) * | 2011-04-12 | 2012-10-10 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Unit for producing nanostructured layers on complex shape part surface by laser-plasma treatment |
| CN103433619A (en) * | 2013-08-30 | 2013-12-11 | 深圳市大族激光科技股份有限公司 | Laser cladding printer and manufacturing method of circuit board |
| CN105643110A (en) * | 2014-11-14 | 2016-06-08 | 大族激光科技产业集团股份有限公司 | Precise laser cutting system |
| CN105974581A (en) * | 2016-07-15 | 2016-09-28 | 北京金海创科技发展有限公司 | High-speed dynamic focusing laser vibrating mirror module group |
| CN106425106A (en) * | 2015-07-21 | 2017-02-22 | 上海咔咻智能科技有限公司 | 3D material carving and cutting machine and 3D material carving and cutting method |
| CN106498387A (en) * | 2016-11-08 | 2017-03-15 | 暨南大学 | Laser cladding apparatus based on the pre- hot-working slow cooling power of liquid crystal modulation |
| CN107119271A (en) * | 2017-06-21 | 2017-09-01 | 江苏双阳机械科技有限公司 | A kind of industrial knife equipment laser new material cladding and precision heat treatment and heat-treating machine |
| CN108088387A (en) * | 2017-12-21 | 2018-05-29 | 重庆大学 | Six degree of freedom gear measuring system based on digital raster |
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- 2007-10-08 CN CN 200720046276 patent/CN201132853Y/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2463246C1 (en) * | 2011-04-12 | 2012-10-10 | Российская Федерация, от имени которой выступает Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Unit for producing nanostructured layers on complex shape part surface by laser-plasma treatment |
| CN103433619A (en) * | 2013-08-30 | 2013-12-11 | 深圳市大族激光科技股份有限公司 | Laser cladding printer and manufacturing method of circuit board |
| CN103433619B (en) * | 2013-08-30 | 2015-10-21 | 大族激光科技产业集团股份有限公司 | The preparation method of laser melting coating printer and wiring board |
| CN105643110A (en) * | 2014-11-14 | 2016-06-08 | 大族激光科技产业集团股份有限公司 | Precise laser cutting system |
| CN105643110B (en) * | 2014-11-14 | 2018-04-06 | 大族激光科技产业集团股份有限公司 | A kind of precise laser cutting system |
| CN106425106A (en) * | 2015-07-21 | 2017-02-22 | 上海咔咻智能科技有限公司 | 3D material carving and cutting machine and 3D material carving and cutting method |
| CN105974581A (en) * | 2016-07-15 | 2016-09-28 | 北京金海创科技发展有限公司 | High-speed dynamic focusing laser vibrating mirror module group |
| CN106498387A (en) * | 2016-11-08 | 2017-03-15 | 暨南大学 | Laser cladding apparatus based on the pre- hot-working slow cooling power of liquid crystal modulation |
| CN106498387B (en) * | 2016-11-08 | 2018-08-17 | 暨南大学 | Laser cladding apparatus based on the pre- hot-working slow cooling power of liquid crystal modulation |
| CN107119271A (en) * | 2017-06-21 | 2017-09-01 | 江苏双阳机械科技有限公司 | A kind of industrial knife equipment laser new material cladding and precision heat treatment and heat-treating machine |
| CN108088387A (en) * | 2017-12-21 | 2018-05-29 | 重庆大学 | Six degree of freedom gear measuring system based on digital raster |
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Granted publication date: 20081015 Termination date: 20101008 |