CN201107495Y - Bottom shot type laser mending apparatus - Google Patents

Abstract

Applied to repair one defective surface of a substrate, an upward-emitted laser repairer comprises a frame, a clamping unit, a supporting unit, a carrying unit and a laser-emitting unit, wherein, the clamping unit, the supporting unit and the carrying unit are arranged on the frame, and the laser-emitting unit is mounted on the carrying unit and positioned below the substrate. Consequently, when the substrate is conveyed to the frame, the clamping unit is utilized to clamp and position the substrate along a horizontal direction, the supporting unit is utilized to define a bearing surface supporting the defective surface, so that the substrate is firmly positioned, then the carrying unit carries the laser-emitting unit to repair the defective surface according to the coordinates of defects, and therefore the purpose of accurate repairing is achieved.

Description

The bottom emitting laser repairing device

Technical field

The utility model relates to a kind of repair apparatus of substrate, particularly relates to a kind of bottom emitting laser repairing device.

Background technology

Crystal liquid substrate is in electrode patternization (electrode patterning) processing procedure, and Chang Yinwei tolerance or pollution produce defective, causes the picture of final products permanent bright or permanent dark at the defect point place.So will see through the coordinate position that checkout equipment is sought out each defect point, utilize laser repairing device that each defect point is repaired one by one again.

As shown in Figure 1, existing a kind of bottom emitting liquid crystal laser repairing device includes a pedestal 1, one and is arranged on cushion cap 2 on this pedestal 1, one and is arranged on this cushion cap 2 wherein X-axis transfer anchor clamps 3, y-axis shift that is arranged on these cushion cap 2 belows of a side carry anchor clamps 4 and one and be erected at this y-axis shift and carry generating laser 5 on the anchor clamps 4.This cushion cap 2 is in order to carry a crystal liquid substrate 6, and prop up microscler plate body 201 by majority and define a continuing surface 202 jointly, described plate body 201 is equipped with most pores 203, and this cushion cap 2 is jet allowing crystal liquid substrate 6 air supportings above this continuing surface 202 by described pore 203, and these continuing surface 202 stage casings have together along Y-axis to the slit 204 of extending.These X-axis transfer anchor clamps 3 have one and are located at the linear slide rail 301 on this cushion cap 1 side, long-armed 302 and two jig arm 303 of being located at these long-armed 302 both sides along these linear slide rail 301 displacements along an X axis, and described jig arm 303 is in order to holding liquid crystal substrate 6.This y-axis shift carry anchor clamps 4 have one be installed on this pedestal 1 and along one perpendicular to the Y-axis of this X axis linear slide rail 401 to displacement.This generating laser 5 is to be right against this slit 204.

Whereby, utilize pore 203 jet to allow crystal liquid substrate 6 air supportings above this continuing surface 202, and utilize these X-axis transfer anchor clamps 3 holding liquid crystal substrates 6 to produce displacement in X axis, cooperate this generating laser 5 by emission up down, to the Y-axis of crystal liquid substrate 6 to carrying out patch work.

Though this liquid crystal laser repairing device can reach the repairing purpose of expection, following disappearance is arranged still during practical application:

One, it is to obtain the defect point coordinate at these crystal liquid substrate 6 stationary states that leading portion detects, but patch work but must make this crystal liquid substrate 6 move along this X axis, as long as error is arranged slightly, just can't accurately reappear the coordinate of defect point, for example because produce abrasion after making the tolerance of assembly or using one section, cause X-axis transfer anchor clamps 3 long-armed 302 with respect to this cushion cap 2 and non-straight, or jig arm 303 long-armed 302 produces when crooked with respect to this, then utilize X-axis transfer anchor clamps 3 to move this crystal liquid substrate 6, can not with these slit 204 complete quadratures, just can't reach the purpose of accurate correction of the defect point.

Two, this crystal liquid substrate 6 be utilize pore 203 jet with air supporting above this continuing surface 202, and cooperate these X-axis transfer anchor clamps 3 carryings to produce mobile, so crystal liquid substrate 6 is to produce displacement under the air supporting state, displacement and stop after still can produce microseismic activity, if repair at once, can cause inaccurate, the inaccurate disappearance of laser preparing of these generating laser 5 focusings.

Three, behind air float displacement, need to hold the location in order to overcome this crystal liquid substrate 6,, then also can produce the low disappearance of repairing efficiency needing certain hour when dynamically changing into static state.

The utility model content

The purpose of this utility model is that a kind of accurate reproduction defect point coordinate and laser preparing is accurate, efficient is high bottom emitting laser repairing device are being provided.Bottom emitting laser repairing device of the present utility model, be to be applicable to that a repairing face to a substrate carries out laser preparing, and comprise grip unit that a frame, one be arranged on this frame, support unit that is arranged on this frame, one and be arranged on the transfer unit of this frame and one and be installed on this transfer unit and the laser emission element of position below this substrate.This grip unit has a location group of making a datum line, two to clipping group and a pushing and pressing group that is oppositely arranged with this location group that should the location group, this datum line be along first direction extend and for this substrate wherein a side against the location, described clipping group respectively has most the pinch that are provided with at interval, described pinch be along this first direction to two other relative side clipping of this substrate location, this pushing and pressing group have one cooperate with this datum line so that substrate along a push piece of locating perpendicular to the second direction of this first direction.This support unit is to define one jointly along horizontally disposed support face by most support members, this support face supports the repairing face of this substrate, described support member vertically produces lifting with respect to substrate, and along continuous straight runs is with respect to this frame generation displacement, to change the Support Position with respect to this substrate.This transfer unit have first a linear slide rail group of extending along this first direction, one be arranged on slide plate on this first linear slide rail group, group be located at this slide plate and the second linear slide rail group of extending along second direction, one be arranged on pedestal on this second linear slide rail group, one and drive the first driving group that this slide plate moves with respect to frame along this first direction and one and drive the second driving group that this pedestal moves with respect to this slide plate along this second direction.This laser emission element is subjected to this transfer unit delivery to produce displacement along this first direction and second direction with respect to this substrate, and has one to repairing the laser emission section of face.

The beneficial effects of the utility model are: utilize this grip unit that substrate along continuous straight runs clipping is located, utilize the support face of this support unit to make substrate obtain strong fix, cooperate this transfer unit to deliver this laser emission element again and repair, the purpose that reaches accurate reproduction defect point and accurately repair according to the defect point coordinate.

Description of drawings

Fig. 1 be existing a kind of bottom emitting liquid crystal laser repairing device overlook the combination synoptic diagram;

Fig. 2 is the three-dimensional combination figure of first preferred embodiment of the utility model;

Fig. 3 be the above-mentioned preferred embodiment of the utility model overlook the combination synoptic diagram;

Fig. 4 is the cross-sectional schematic of being got along the straight line IV-IV among Fig. 3;

Fig. 5 is the operation chart of the above-mentioned preferred embodiment of the utility model, illustrates in one, the large scale liquid crystal substrate moves into a frame top with mechanical arm;

Fig. 6 is the operation chart of the above-mentioned preferred embodiment of the utility model, illustrates that a grip unit inhales vacuum to this crystal liquid substrate clipping, support unit to crystal liquid substrate and fix;

Fig. 7 is the operation chart of the above-mentioned preferred embodiment of the utility model, and the zone that the support group displacement of this support unit fails to repair with repairing is described;

Fig. 8 is the operation chart of the above-mentioned preferred embodiment of the utility model, the support group vacuum breaker of this support unit is described and returns back to original position, grip unit cancellation clipping and gets sheet with mechanical arm;

Fig. 9 is another operating process synoptic diagram of the above-mentioned preferred embodiment of the utility model, illustrates to be applicable to a middle size crystal liquid substrate is repaired;

Figure 10 is the operation chart of second preferred embodiment of the utility model, illustrates in one, the small size crystal liquid substrate moves into a frame top with mechanical arm;

Figure 11 is the operation chart of second preferred embodiment of the utility model, illustrates that a grip unit inhales vacuum to this crystal liquid substrate clipping and support unit to crystal liquid substrate and fix;

Figure 12 is the operation chart of second preferred embodiment of the utility model, and the zone that the support group displacement of this support unit fails to repair with repairing is described;

Figure 13 is the operation chart of second preferred embodiment of the utility model, the support group vacuum breaker of this support unit is described and returns back to original position, grip unit cancellation clipping and gets sheet with mechanical arm.

Embodiment

Below in conjunction with drawings and Examples the utility model is elaborated:

As Fig. 2, Fig. 3 and shown in Figure 4, first preferred embodiment of the utility model bottom emitting laser repairing device, be to be applicable to greatly to one, a repairing face 110 of the crystal liquid substrate 100 of middle size (for example 47 o'clock ~ 17 o'clock) carries out laser preparing, this crystal liquid substrate 100 has one first long side 120 that be arranged in parallel, one second long side 130 and be connected in this first, two long sides 120, one first short side 140 and one second short side 140 ' of 130, and wherein three round angle places respectively are provided with the mark 150 that makes zero, 150 ', 150 " (see figure 6), this laser repairing device comprise a frame 10; two groups are located at the guide rail 20 of this frame 10; two are arranged on this frame 10 and parallel respectively and be located at the screw rod 30 of described guide rail 20 sides; grip unit 40 that is arranged on this frame 10; support unit 50 that is arranged on 40 of this grip unit; a transfer unit 60 and a laser emission element 70 that is installed on this transfer unit 60 that is arranged on this frame 10.

This frame 10 is to prop up frame bar 11 with majority to constitute square type cube frame-like, and have a top 12 and a bottom 13 of being located at these 12 belows, top, this top 12 has the second side 15 of the first side 14 of a corresponding feedstock direction and and these first side 14 opposite settings, and this first and second side the 14, the 15th extends along a first direction X.In addition, the second end 17 that has a first end 16 and and these first end 16 opposite settings at this 14,15 of first and second side again.

Described guide rail 20 is to be elongated rod shape, and group is located at first and second side 14,15 of this frame 10 respectively, and extends to this second end 17 by this first end 16 along this first direction X.

Described screw rod 30 is separately positioned on first and second side 14,15 of this frame 10 and extends along this first direction X.

This grip unit 40 is arranged on the top 12 of this frame 10, and has a location group 41, one the first clipping group 42 to should location group 41, the second clipping group 43 and a pushing and pressing group 44 that is oppositely arranged with this location group 41.

The roller 413 that the fixed mount 411, four that this location group 41 has a second side 15 that is installed in this frame 10 is installed in these fixed mount 411 tops and is located at described backstay 412 terminal bottoms along a backstay 412 that extends perpendicular to the second direction Y of this first direction X and most shafts, and the outboard peripheries of described roller 413 defines the datum line L (as shown in Figure 5) of these crystal liquid substrate 100 first long sides 120 of a confession against the location jointly, that is to say, this datum line L extends along this first direction X, and is tangential on the outer peripheral edges of roller 413.

This is first years old, two clipping groups 42,43 correspond respectively to this first, two ends 16,17, and respectively have two slides 421 that slide along guide rail 20 respectively, 431, one is connected described slide 421,431 and the cross bar 422 that extends along this second direction Y, 432, most are disposed on this cross bar 422, clamping bar 423 on 432,433, most are installed in this cross bar 422, on 432 and drive described clamping bar 423,433 pressure cylinders 424 that move along first direction X, 434 and two groups are located at slide 421,431 is inner and be screwed on servo-driver 425 on the screw rod 30,435.It is the pinch 426,436 of example with the roller that the end of described clamping bar 423,433 respectively is provided with one, and described pinch 426,436 is located (as shown in Figure 6) to these crystal liquid substrate 100 first and second short sides 140,140 ' clipping jointly along this first direction X.

This pushing and pressing group 44 has the guide member 441 that two groups are located at these frame 10 tops 12 and extend along this first direction X, a screw rod 442 that be arranged in parallel with described guide member 441, one drives the motor 442 ' that this screw rod 442 rotates, one along guide member 441 and the positioning seat 443 that driven by this screw rod 442, one is installed in Z on this positioning seat 443 to pressure cylinder 444, one be arranged on these positioning seat 443 belows and be subjected to this Z to pressure cylinder 444 drive along one perpendicular to this first, two direction X, the fixed head 445 of the third direction Z lifting of Y, the screw rod 446 that one fulcrum is located at these fixed head 445 bottoms and extends along this second direction Y, one drives the motor 447 that this screw rod 446 rotates, a movable block 448 that is arranged on this screw rod 446 and moved along this second direction Y by these motor 447 drivings, a driving cylinder pressure 448 ' and a push piece 449 that is subjected to this driving cylinder pressure 448 ' interlock that is installed in these movable block 448 bottoms, this push piece 449 are two rollers that are provided with at interval.

This support unit 50 is arranged on this frame 10 tops 12, and have be set on the guide rod 20 and the position one first support group 51 of 40 of clipping groups, position second support group 52 of 43 of this first support group 51 and this second clipping groups, position in the 3rd support group 53 of 42 of this first support group 51 and this first clipping groups and position the 4th support group 54 43 of this second support group 52 and this second clipping groups.

This is first years old, two, three, four support group 51,52,53,54 respectively have two sliding shoes 511 that slide along guide rail 20 respectively, 521,531,541, one is connected described sliding shoe 511,521,531,541 support member 512,522,532,542, two groups are located at sliding shoe 511,521,531,541 is inner and be screwed together in servo-driver 513 on the screw rod 30,523,533,543 and two are installed in sliding shoe 511,521,531,541 with support member 512,522,532,542 pressure cylinder 514,524,534,544, this is first years old, two, three, four support group 51,52,53,54 support member 512,522,532,542 all is to extend and be elongated rod shape along this second direction Y, and support member 512,522,532,542 are subjected to pairing pressure cylinder 514,524,534,544 drive along third direction Z generation lifting.Described support member 512,522,532,542 defines the support face 55 that an edge was horizontally disposed with and supported the repairing face 110 of this crystal liquid substrate 100 jointly, and respectively having most pore 56 and most grooves 57 that are arranged with by end face to these crystal liquid substrate 100 air blowings or suction vacuum, described groove 57 passes for roller 413 and pinch 426,436.

This transfer unit 60 is that group is located at this frame 10 bottoms 13, and have first a linear slide rail group 61 of extending along this first direction X, one be arranged on slide plate 62 on this first linear slide rail group 61, group be located at this slide plate 62 and the second linear slide rail group 63 of extending along this second direction Y, one be arranged on pedestal 64 on this second linear slide rail group 63, one and drive the first driving group 66 that this slide plate 62 moves with respect to frame 10 along this first direction X, one and drive the second driving group 67 that this pedestal 64 moves with respect to this slide plate 62 along this second direction Y.

This laser emission element 70 be mounted on the pedestal 64 of this transfer unit 60 and the position below this crystal liquid substrate 100, driven along this first direction X and second direction Y by this first and second driving group 66,67 and produce displacement, and have two repairing face 100 and having the laser emission section 72 of phtographic lens 71 and two different spot sizes of emission of different enlargement ratios with respect to this crystal liquid substrate 100.

This crystal liquid substrate 100 passed through the detection of previous workstation in advance before repairing, defect point coordinate also addressing is obtained.Fig. 2 and shown in Figure 5 for another example, when desire to large scale (for example 47 time, 37 time) when crystal liquid substrate 100 is repaired, first and second clipping group 42,43 of this grip unit 40 is retired outwardly, when utilizing mechanical arm 200 to send crystal liquid substrate 100 to these frame 10 tops 12, first long side 120 of this crystal liquid substrate 100 is not as yet on the datum line L that is positioned at this location group 41, at this moment, the pore of this support unit 50 56 is blown, and mechanical arm 200 decline film releasings, shifts out.Then, as Fig. 2, shown in Fig. 4 and 6, the Z of this pushing and pressing group 44 drives this fixed head 445 behind bottom offset to pressure cylinder 444, utilize this driving cylinder pressure 448 ' to drive second long side 130 of these push piece 449 these crystal liquid substrates 100 of pushing and pressing again, and make crystal liquid substrate 100 along Y to moving, up to this first long side 120 against being positioned on this datum line L, continue, this is first years old, two clipping groups 42,43 respectively to the right, left dislocation, make pinch 426, first of this crystal liquid substrate 100 of 436 clampings, two short sides 140,140 ', this driving cylinder pressure 448 ' drives this push piece 449 again toward retiring in the other direction immediately, this Z drives this fixed head 445 again to pressure cylinder 444 and upwards rises, operate the pore 56 of this support unit 50 again and inhale vacuum to fix this crystal liquid substrate 100, utilize this transfer unit 60 these laser emission elements 70 of delivery, read the mark 150 that makes zero of this crystal liquid substrate 100 with phtographic lens 71,150 ', 150 " after; just, repair one by one with 72 pairs of defect points of laser emission section according to the coordinate displacement of each defect point.For another example shown in Fig. 2 and 7, for repair this first, two, three, four support group 51,52,53,54 pairs of parts that this crystal liquid substrate 100 covers, the 3rd, four support group 53,54 while vacuum breakers, and utilize this pressure cylinder 534,544 drive support member 532,542 descend earlier more respectively relatively to intrinsic displacement, inhale vacuum (at this moment after upwards rise holds on crystal liquid substrate 100 again, still have this first, two support group 51,52 pairs of crystal liquid substrates 100 support), afterwards, this is first years old, two support group 51,52 also behind vacuum breaker, utilize this pressure cylinder 514,524 drive this support member 512,522 descend earlier more respectively relatively to intrinsic displacement, inhale vacuum (at this moment after upwards rise holds on crystal liquid substrate 100 again, still have the 3rd, four support group 53,54 pairs of crystal liquid substrates 100 support), thus, utilize this laser emission section 72 repair original this first, two, three, four support group 51,52,53,54 zones of being covered.Last as Fig. 2 and shown in Figure 8, the 3rd, four support group 53, behind 54 vacuum breakers, utilize pressure cylinder 534,544 drive support member 532,542 descend earlier more respectively relatively to outer displacement, it (is exactly to return back to Fig. 5 that the rise that makes progress again holds on crystal liquid substrate 100, the original position of Fig. 6), this is first years old, two support group 51,52 also behind vacuum breaker, utilize this pressure cylinder 514,524 drive this support member 512,522 descend earlier more respectively relatively to outer displacement, it (is exactly to return back to Fig. 5 that the rise that makes progress again holds on crystal liquid substrate 100, the original position of Fig. 6), and operate again this first, two clipping groups 42,43 outwards shift out, to the clamping of this crystal liquid substrate 100, wait for that this mechanical arm 200 gets sheet with cancellation.

Fig. 2 and shown in Figure 9 for another example, when desiring centering size when 32 time ~ 17 (for example) when crystal liquid substrate 100 is repaired, operational motion and Fig. 5 ~ Fig. 8 be similar no longer to add explanation, the difference place only is: utilize this first, two support group 51,52 pairs of crystal liquid substrates 100 just are enough to stable support, and the 3rd, four support group 53,54 there is no effect, only can carry out clipping in this grip unit 40, during releasing operation, with this first, two clipping groups 42,43 inwardly, outer generation displacement, and for being suitable for the crystal liquid substrate 100 of different size, this pushing and pressing group 44 is utilized motor 447 drive screws 446, makes movable block 448 drive push piece 449 indirectly along second direction Y displacement.

Therefore, effect of the present utility model is summarized as follows:

One, through detecting in advance, defect point coordinate addressing is obtained, and this crystal liquid substrate 100 utilizes the cooperation strong fix of this grip unit 40 and this support unit 50 when moving to this frame 10, and reappear the defect point coordinate exactly, carry out reaching the purpose of repairing fully behind the laser preparing.

Two, since these crystal liquid substrate 100 strong fixs at these frame 10 tops 12, and this laser emission element 70 utilizes accurately focusing of this transfer unit 60 deliveries, accurately repairs.

Three, because of no little generation of vibration, this crystal liquid substrate 100 is also had no way of and is dynamically changed into static problem, repairing efficiency height.

(element that does not see Figure 10 ~ 13 please cooperate consult Fig. 2) more as shown in figure 10, the constituent components of second embodiment of the present utility model and first embodiment is roughly the same, and difference only is that 50 of this support units have one first support group 51 and one second support group 52.And be applicable to that centering, small size () crystal liquid substrate 100 repair at for example 26 o'clock ~ 12.1 o'clock, utilize mechanical arm 200 that crystal liquid substrate 100 is delivered to this frame 10 tops 12, the first short side 140 is as yet against being positioned on this datum line L, at this moment, 51,52 pairs of crystal liquid substrates of this first and second support group 100 produce and support, and utilize pore 56 to blow, mechanical arm 200 decline film releasings, shift out.Then, as shown in figure 11, the second short side 140 ' of push piece 449 these crystal liquid substrates 100 of pushing and pressing of this pushing and pressing group 44, and make the first short side 140 on the datum line L that is positioned at this location group 41, continue, this is first years old, two clipping groups 42,43 to the right, left dislocation, pinch 426,436 clippings are at this crystal liquid substrate 100 first, two long sides 120, after 130, this pushing and pressing group 44 is retired immediately, operate again this first, two support group 51,52 pore 56 is inhaled vacuum to fix this crystal liquid substrate 100, utilize this transfer unit 60 these laser emission elements 70 of delivery, read the mark 150 that makes zero of this crystal liquid substrate 100 with phtographic lens 71,150 ', 150 " after;, repair one by one with 72 pairs of defect points of laser emission section according to the coordinate displacement of each defect point.

Again as shown in figure 12, for repair this first, two support group 51,52 pairs of parts that this crystal liquid substrate 100 covers, these first support group, 51 vacuum breakers, this pressure cylinder 514 drives this support member 512 and descends earlier again towards these second support group, 52 displacements, inhale vacuum (at this moment after upwards rise holds on crystal liquid substrate 100 again, still there are 52 pairs of crystal liquid substrates of this second support group 100 to support), this second support group 52 is also behind vacuum breaker, utilizing this pressure cylinder 524 to drive this support member 522 descends earlier again towards these first support group, 51 displacements, inhale vacuum (at this moment after upwards rise holds on crystal liquid substrate 100 again, still there are 51 pairs of crystal liquid substrates of this first support group 100 to support), thus, utilize this laser emission section 72 repair original this first, two support group 51,52 zones of being covered.At last as shown in figure 13, this first and second support group 51,52 is also behind vacuum breaker, utilizing this pressure cylinder 514,524 to drive this support member 512,522 descends earlier more respectively relatively to outer displacement, upwards rise again and hold on crystal liquid substrate 100 (being exactly the original position that returns back to Figure 10, Figure 11), and operating this first and second clipping group 42,43 more outwards shifts out, and cancellation is to the clamping of this crystal liquid substrate 100, waits for that this mechanical arm 200 gets sheet.

Therefore, the crystal liquid substrate 100 of the suitable multiple size of first and second embodiment of the utility model carries out repairing work by the below.

What deserves to be explained is, though the foregoing description is to repair crystal liquid substrate as exemplary applications, so long as any substrate (substrate) of laser preparing demand is arranged, to be the utility model applicable scope.

Claims (10)

1. bottom emitting laser repairing device, be to be applicable to that a repairing face to a substrate carries out laser preparing, and comprise a frame, one and be arranged on the grip unit of this frame, a support unit that is arranged on this frame, a transfer unit and a laser emission element that is installed on this transfer unit that is arranged on this frame; This bottom emitting laser repairing device is characterised in that:

This grip unit, have a location group of making a datum line, two to clipping group and a pushing and pressing group that is oppositely arranged with this location group that should the location group, this datum line be along first direction extend and for this substrate wherein a side against the location, described clipping group respectively has most the pinch that are provided with at interval, described pinch be along this first direction to two other relative side clipping of this substrate location, this pushing and pressing group have one cooperate with this datum line so that substrate along a push piece of locating perpendicular to the second direction of this first direction;

This support unit, be to prop up support member by majority to define one jointly along horizontally disposed support face, this support face supports the repairing face of this substrate, described support member vertically produces lifting with respect to substrate, and along continuous straight runs produces displacement with respect to this frame, and changes the Support Position with respect to this substrate;

This transfer unit, have first a linear slide rail group of extending along this first direction, one be arranged on slide plate on this first linear slide rail group, group be located at this slide plate and the second linear slide rail group of extending along second direction, one be arranged on pedestal on this second linear slide rail group, one and drive the first driving group that this slide plate moves with respect to frame along this first direction and one and drive the second driving group that this pedestal moves with respect to this slide plate along this second direction;

This laser emission element, be arranged on the pedestal of this transfer unit and the position below this substrate, and be subjected to this transfer unit delivery to produce displacement with respect to this substrate, and have one repairing the laser emission section of face along this first direction and second direction.

2. bottom emitting laser repairing device as claimed in claim 1, it is characterized in that: this frame has the second side of a first side and an opposite setting with this first side, and this laser repairing device also include two respectively group be located at first of this frame, dual side-edge and the guide rail that extends along this first direction, each clipping group of this grip unit also respectively has two slides that slide along described guide rail respectively, a cross bar and most clamping bars that are installed on this cross bar that are connected between described slide and extend along this second direction, described pinch is provided in a side of the end of clamping bar.

3. bottom emitting laser repairing device as claimed in claim 2 is characterized in that: each clipping group of this grip unit also has most and is installed on this cross bar and drives the pressure cylinder that clamping bar moves along first direction.

4. bottom emitting laser repairing device as claimed in claim 3, it is characterized in that: also include at least one screw rod that is arranged on this frame and extends along this first direction, each clipping group of this grip unit also has at least one group, and to be located at one of them slide inner and screw togather servo-driver on this screw rod.

5. bottom emitting laser repairing device as claimed in claim 4, it is characterized in that: this support unit has most and is set on the guide rod and the support group of position between the clipping group, described support group respectively has two sliding shoes that slide along guide rail, one and is connected support member between described sliding shoe and group to be located at this sliding shoe inner and be screwed together in servo-driver on this screw rod, and the support member of each support group is to extend and be elongated rod shape along this second direction.

6. bottom emitting laser repairing device as claimed in claim 5, it is characterized in that: each support group of this support unit also has at least one and is installed in pressure cylinder between sliding shoe and this support member, and pressure cylinder drives along a third direction perpendicular to this first and second direction.

7. bottom emitting laser repairing device as claimed in claim 6 is characterized in that: the support member of this support unit all has most pores.

8. bottom emitting laser repairing device as claimed in claim 3, it is characterized in that: the location group of this grip unit has a fixed mount that is installed in the second side of this frame, most and is installed in this fixed mount and is hung on the backstay of support member top and the roller that most shafts is located at described backstay end, and this datum line is tangential on the outer peripheral edges of described roller.

9. bottom emitting laser repairing device as claimed in claim 8 is characterized in that: the support member of this support unit also respectively has most the grooves that are arranged with by an end face, and described groove passes for roller and pinch.

10. bottom emitting laser repairing device as claimed in claim 9, it is characterized in that: the pushing and pressing group of this grip unit also has the guide member that two groups are located at this frame and extend along this first direction, a screw rod that be arranged in parallel with described guide member, one along guide member and be subjected to the positioning seat of this screw drive, a pressure cylinder that is installed on this positioning seat, a fixed head that is arranged on this positioning seat below and driven by this pressure cylinder, the screw rod that one fulcrum is located at this fixed head bottom and extends along this second direction, one drives the motor that this screw rod rotates, a movable block and a driving cylinder pressure that is installed in this movable block bottom that is arranged on this screw rod and is subjected to this motor driven, this push piece is to be subjected to this driving cylinder pressure interlock.

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