CN201083559Y - Self-compensation high precision pressure-temperature composite sensor - Google Patents

Self-compensation high precision pressure-temperature composite sensor Download PDF

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Publication number
CN201083559Y
CN201083559Y CNU2007200766529U CN200720076652U CN201083559Y CN 201083559 Y CN201083559 Y CN 201083559Y CN U2007200766529 U CNU2007200766529 U CN U2007200766529U CN 200720076652 U CN200720076652 U CN 200720076652U CN 201083559 Y CN201083559 Y CN 201083559Y
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China
Prior art keywords
temperature
pressure
sensor
temperature sensor
constant current
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Expired - Fee Related
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CNU2007200766529U
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Chinese (zh)
Inventor
胡际明
陈文海
单志慧
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BAOLU ELECTRONIC SYSTEM Co Ltd SHANGHAI
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BAOLU ELECTRONIC SYSTEM Co Ltd SHANGHAI
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Publication of CN201083559Y publication Critical patent/CN201083559Y/en
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Abstract

The utility model provides a self-compensation high-accuracy pressure-temperature combined sensor which is a combined sensor for measuring the pressure and the temperature. A pressure sensor 3 and a temperature sensor 4 which are connected in parallel with each other are connected in series with a power supply 1 and a constant-current source 2. The constant-current source adopts a constant-current tube DH 311, a current input terminal of the constant-current tube is connected with the power supply, the output terminal is connected with the pressure sensor and the temperature sensor, and an adjustable resistor is arranged between a control terminal of the constant-current tube DH 311 and the current input terminal. The pressure sensor consists of an electric bridge consisting of voltage dependent resistors of R1 and R2 as well as R3 and R4, 'ten and one' terminals of the electric bridge are the pressure signal output terminals, an adjustable resistor P1 is arranged between the connecting points of the voltage dependent resistors of R1 and R2 and a cathode of the power supply. The temperature sensor consists of a temperature sensing element AD 590 and an adjustable resistor P2 which are connected in series, a movable terminal of the adjustable resistor P2 and the cathode of the power supply are the output terminals of a temperature sensing signal.

Description

Self compensation high-precision pressure-temperature complex sensor
Technical field
The utility model is the compound sensor of a kind of gaging pressure, temperature, relates to the technical field that electrical measuring device is made.
Background technology
The silicon piezoresistive pressure sensor has the advantage highly sensitive, that volume is little, cheap.But its temperature characterisitic is poor, and zero point and Sensitivity Temperature are floated greatly.Therefore, many soft, hardware approachs have been studied both at home and abroad, document [1] (Zhang Xiuzhen, Ma Xiujuan, Dai Fusheng: the compensation method research of diffuse si absolute pressure transducer, metering and measuring technology, 01 phase of calendar year 2001) to the silicon piezoresistive transducer temperature compensation.Adopt the sensor circuit string and connect that resistive method reduces sensor zero point and the full scale temperature is floated coefficient, reach 2 * 10 -4/ ℃; Document [2] (Liu Shibin, Gao Deyuan, Japanese plum state: the debugging rule research of sensor temperature compensation, chemical process automation and instrument, 2000 01 phases).Propose to adjust the accurately method of control compensation amount of front and back sensor output variable quantity, reduce the debugging cost of the temperature compensation of sensor with measuring; Document [3] (Meng Qinghao writes for Sun Yicai, Liu Yuling: pressure sensor design, manufacturing and application, metallurgical industry publishing house, Beijing, 2000).Discussed silicon piezoresistive pressure sensor temperature drift compensation ten surplus kind of circuit and software approach, the precision of compensation back sensor reaches the compensation method of 0.2%F.S. said temperature and new device only at the temperature compensation of sensor, and soft, the hardware approach of compensation have certain limitation.
Summary of the invention
The purpose of this utility model provides a kind of temperature that can the full remuneration pressure transducer and floats, and is with low cost, debugs simple self compensation high-precision pressure-temperature complex sensor.
The utility model self compensation high-precision pressure-temperature complex sensor is made up of pressure transducer 3 and temperature sensor 4, pressure transducer 3 and temperature sensor 4 back and power supply 1, constant current source 2 composition that is in series that is in parallel.The input termination power of constant current source 2, output termination pressure transducer and temperature sensor are connected to an adjustable resistance between the control end of constant current tube 2 and the current input terminal.
Pressure transducer is made up of the electric bridge that voltage dependent resistor (VDR) R1, R2, R3, R4 form, and " ten, one " end of this electric bridge is connected to an adjustable resistance P1 for the pressure signal output terminal between the tie point of voltage dependent resistor (VDR) R2, R3 and the power cathode.
Temperature sensor is in series by current mode temperature-sensing element AD590 and variable resistor P2 and forms, and the movable end of adjustable resistance P2 and power cathode are the output terminal of temperature sensor signal.
The utility model has overcome the limitation of soft, the hardware compensating method of existing temperature compensation and new device.Self-compensation circuit and the adjustment method thereof of the compound sensor of gaging pressure, temperature have been proposed.Temperature that in theory can the full remuneration pressure transducer is floated, and experimentally reaches 10 -5/ ℃, sensor accuracy reaches 0.05%F.S. compensatory theory and method novelty, and is with low cost, and debugging is simple.
Description of drawings:
Fig. 1 is a schematic block circuit diagram of the present utility model.Power supply 1, constant current source 2, pressure transducer 3, temperature sensor 4 are wherein arranged.
Fig. 2 is circuit theory diagrams of the present utility model.
Embodiment
Self compensation high-precision pressure-temperature complex sensor of the present utility model is made up of pressure transducer 3 and temperature sensor 4, pressure transducer 3 and temperature sensor 4 back and power supply 1, constant current source 2 composition that is in series that is in parallel.Constant current source 2 adopts constant current tube DH311, and its current input terminal connects power supply 1, and output termination pressure transducer 3 and temperature sensor 4 are connected to an adjustable resistance between the control end of constant current tube DH311 and the current input terminal.Pressure transducer 3 is made up of the electric bridge that voltage dependent resistor (VDR) R1, R2, R3, R4 form, and " ten, one " end of this electric bridge is connected to an adjustable resistance P1 for the pressure signal output terminal between the tie point of voltage dependent resistor (VDR) R2, R3 and the power cathode.Temperature sensor 4 is in series and is formed by temperature-sensing element AD590, variable resistor P2, and the movable end of adjustable resistance P2 and power cathode are the output terminal of temperature sensor signal.
Constant current tube DH311 is by adjusting potentiometer, and output current is adjustable (0.1-1.5mA), and constant current tube itself also has drift; Temperature sensor AD 590 and pressure transducer are connected in parallel in the constant current loop.The pressure signal u of pressure transducer is subjected to constant current tube DH311, temperature sensor AD 590, bridge resistance, R bWith the influence of the temperature drift of pressure sensitivity G, the purpose of temperature compensation makes them cancel each other exactly.According to the self compensation theoretical derivation, the working current of the pressure signal temperature drift coefficient of pressure transducer compensation is: I 0 = I 20 ( α 2 + β + γ ) α + β + γ , Just the temperature drift coefficient that can make pressure transducer plays compensating action near 0.Combined pressure-temperature sensor is made up of constant current tube, pressure transducer, temperature sensor, as shown in the figure.Pressure transducer is converted to electric signal with pressure, and constant current tube and temperature sensor carry out temperature self-compensation to pressure transducer.Self-compensating key is appropriate constant current tube working current, definite temperature coefficient α by constant current tube temperature coefficient α, temperature sensor of working current 2, pressure transducer sensitivity temperature coefficient β and bridge resistor temperature coefficient γ determine.

Claims (4)

1. a self compensation high-precision pressure-temperature complex sensor is made up of pressure transducer and temperature sensor, it is characterized in that pressure transducer (3) and temperature sensor (4) back and power supply (1), constant current source (2) composition that is in series that is in parallel.
2. self compensation high-precision pressure-temperature complex sensor according to claim 1, it is characterized in that constant current source (2) adopts constant current tube DH311, its current input terminal connects power supply (1), output termination pressure transducer (3) and temperature sensor (4) are connected to an adjustable resistance between the control end of constant current tube DH311 and the current input terminal.
3. self compensation high-precision pressure-temperature complex sensor according to claim 1 and 2, it is characterized in that pressure transducer (3) is made up of the electric bridge that voltage dependent resistor (VDR) R1, R2, R3, R4 form, " ten, one " end of this electric bridge is connected to an adjustable resistance P1 for the pressure signal output terminal between the tie point of voltage dependent resistor (VDR) R2, R3 and the power cathode.
4. self compensation high-precision pressure-temperature complex sensor according to claim 1 and 2, it is characterized in that temperature sensor (4) is in series by temperature-sensing element AD590 and variable resistor P2 forms, and the movable end of adjustable resistance P2 and power cathode are the output terminal of temperature sensor signal.
CNU2007200766529U 2007-10-25 2007-10-25 Self-compensation high precision pressure-temperature composite sensor Expired - Fee Related CN201083559Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU2007200766529U CN201083559Y (en) 2007-10-25 2007-10-25 Self-compensation high precision pressure-temperature composite sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU2007200766529U CN201083559Y (en) 2007-10-25 2007-10-25 Self-compensation high precision pressure-temperature composite sensor

Publications (1)

Publication Number Publication Date
CN201083559Y true CN201083559Y (en) 2008-07-09

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU2007200766529U Expired - Fee Related CN201083559Y (en) 2007-10-25 2007-10-25 Self-compensation high precision pressure-temperature composite sensor

Country Status (1)

Country Link
CN (1) CN201083559Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102156019A (en) * 2011-03-28 2011-08-17 豪展医疗科技股份有限公司 Pressure sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102156019A (en) * 2011-03-28 2011-08-17 豪展医疗科技股份有限公司 Pressure sensor
CN102156019B (en) * 2011-03-28 2013-11-27 豪展医疗科技股份有限公司 Pressure sensor

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Address after: No. 2, building 1, Zhi Cheng Bureau, 169 Mengzi Road, Shanghai, Luwan District, China: 200023

Patentee after: Baolu Electronic System Co., Ltd., Shanghai

Address before: 56, Lane 20, Jianguo West Road, Shanghai, Luwan District: 200030

Patentee before: Baolu Electronic System Co., Ltd., Shanghai

DD01 Delivery of document by public notice

Addressee: Baolu Electronic System Co., Ltd., Shanghai

Document name: Notification to Pay the Fees

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Addressee: Baolu Electronic System Co., Ltd., Shanghai

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080709

Termination date: 20151025