CN200986609Y - Grating fixing and adjusting apparatus - Google Patents
Grating fixing and adjusting apparatus Download PDFInfo
- Publication number
- CN200986609Y CN200986609Y CN 200620133973 CN200620133973U CN200986609Y CN 200986609 Y CN200986609 Y CN 200986609Y CN 200620133973 CN200620133973 CN 200620133973 CN 200620133973 U CN200620133973 U CN 200620133973U CN 200986609 Y CN200986609 Y CN 200986609Y
- Authority
- CN
- China
- Prior art keywords
- grating
- rotating shaft
- seat support
- grating seat
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Moving Of The Head For Recording And Reproducing By Optical Means (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620133973 CN200986609Y (en) | 2006-09-30 | 2006-09-30 | Grating fixing and adjusting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 200620133973 CN200986609Y (en) | 2006-09-30 | 2006-09-30 | Grating fixing and adjusting apparatus |
Publications (1)
Publication Number | Publication Date |
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CN200986609Y true CN200986609Y (en) | 2007-12-05 |
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ID=38916069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 200620133973 Expired - Lifetime CN200986609Y (en) | 2006-09-30 | 2006-09-30 | Grating fixing and adjusting apparatus |
Country Status (1)
Country | Link |
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CN (1) | CN200986609Y (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102789144A (en) * | 2011-05-18 | 2012-11-21 | 上海微电子装备有限公司 | Adjustment mechanism of lithography aligning system reference plate, and adjustment method thereof |
CN103235383A (en) * | 2013-04-01 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Precision adjusting device for large-sized gratings |
CN103760652A (en) * | 2013-12-17 | 2014-04-30 | 哈尔滨工业大学 | Automatic installing device for gratings with large radius-thickness ratios |
CN105043540A (en) * | 2015-07-05 | 2015-11-11 | 钢研纳克检测技术有限公司 | Raster fixing structure with three-dimensional attitude adjusting function |
CN109491034A (en) * | 2018-10-11 | 2019-03-19 | 上海荣高电子科技有限公司 | A kind of grating adjustment mechanism |
-
2006
- 2006-09-30 CN CN 200620133973 patent/CN200986609Y/en not_active Expired - Lifetime
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102789144A (en) * | 2011-05-18 | 2012-11-21 | 上海微电子装备有限公司 | Adjustment mechanism of lithography aligning system reference plate, and adjustment method thereof |
CN103235383A (en) * | 2013-04-01 | 2013-08-07 | 中国科学院上海光学精密机械研究所 | Precision adjusting device for large-sized gratings |
CN103760652A (en) * | 2013-12-17 | 2014-04-30 | 哈尔滨工业大学 | Automatic installing device for gratings with large radius-thickness ratios |
CN103760652B (en) * | 2013-12-17 | 2015-09-09 | 哈尔滨工业大学 | A kind of aut.eq. of installing for large radius-thickness ratio grating |
CN105043540A (en) * | 2015-07-05 | 2015-11-11 | 钢研纳克检测技术有限公司 | Raster fixing structure with three-dimensional attitude adjusting function |
CN105043540B (en) * | 2015-07-05 | 2017-05-03 | 钢研纳克检测技术有限公司 | Raster fixing structure with three-dimensional attitude adjusting function |
CN109491034A (en) * | 2018-10-11 | 2019-03-19 | 上海荣高电子科技有限公司 | A kind of grating adjustment mechanism |
CN109491034B (en) * | 2018-10-11 | 2023-04-18 | 烟台荣高数字科技有限公司 | Grating adjusting mechanism |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090320 Address after: No. 3, Ping three road, Pinggu District, Beijing, China: 101200 Patentee after: Puxi General Instrument Co., Ltd., Beijing Address before: Granville Technology Building 8, Zhongguancun South Avenue, Beijing, Haidian District, China: 100081 Patentee before: Beijing Puxi Scientific Instrument Co., Ltd. |
|
ASS | Succession or assignment of patent right |
Owner name: BEIJING PUXI GENERAL INSTRUMENT CO., LTD. Free format text: FORMER OWNER: BEIJING PUXI SCIENTIFIC INSTRUMENTS CO., LTD. Effective date: 20090320 |
|
CX01 | Expiry of patent term |
Granted publication date: 20071205 |
|
EXPY | Termination of patent right or utility model |