CN200986390Y - Copple axis transmission member for silicon monocrystal furnace - Google Patents
Copple axis transmission member for silicon monocrystal furnace Download PDFInfo
- Publication number
- CN200986390Y CN200986390Y CN 200620116090 CN200620116090U CN200986390Y CN 200986390 Y CN200986390 Y CN 200986390Y CN 200620116090 CN200620116090 CN 200620116090 CN 200620116090 U CN200620116090 U CN 200620116090U CN 200986390 Y CN200986390 Y CN 200986390Y
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- CN
- China
- Prior art keywords
- furnace
- groups
- pot
- tray
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a pot drive component used for a silicon single crystal furnace. Regarding the utility model, two groups of rolling guides arranged on a lower drive guide column and four sliding blocks are connected with a slide plate so that the pot shaft rises and goes down; three groups of wedge iron components arranged at the bottom of the pot shaft drive component are used to adjust the rotation center of the pot shaft to be coaxial with the central hole of a tray at the bottom of the furnace and to be normal to the plane (level) on the tray of the bottom of the furnace. The drive component has high driving accuracy, and high rigidity; the accuracy of the position of the rotation center of the pot shaft relative to the tray at the bottom of the furnace is high; and to adjust the relative position is very easy and convenient.
Description
Technical field
The utility model relates to a kind of crystal growing furnace parts of semicon industry, adopts this modular construction simple, good rigidity.Be easy to adjust coaxial and level to crystal oven furnace hearth plate center.
Background technology
Present known monocrystal stove with vertical pulling method (Czochralski method) grown crystal needs to be equipped with the crucible drive disk assembly.Known crucible drive disk assembly adopts the cylinder guiding more, makes crucible axis finish the lifting transmission by linear bearing, the complex structure of this structure, and rigidity is low, and component weight is big; Its crucible axis pivot of known crucible drive disk assembly is to rely on to look for the precision of parts installed surface to finish to the coaxial and horizontal accuracy at furnace hearth plate center, and workload is big, and efficient is low.
Summary of the invention
In order to overcome existing monocrystal stove crucible axis drive disk assembly complex structure, rigidity is low, weight is big, and the problem that the crucible axis pivot is coaxial to the furnace hearth plate center and horizontal accuracy is difficult for looking for, and the utility model provides a kind of crucible axis drive disk assembly that is used for monocrystal stove, this parts transmission accuracy height, good rigidity, simple in structure, weight is little, simple to heart adjustment work, reliable.
The utility model is used for the crucible axis drive disk assembly of monocrystal stove, and the technical scheme that is adopted is:
Adopt 2 groups of rolling guide-rail pairs and 4 slide blocks to connect slide plate, crucible axis is contained on the slide plate, and feature bottom is equipped with 3 groups carves iron component.
With 2 groups of rolling guide-rail pairs guiding, drive crucible axis and finish elevating movement.
Feature bottom adopts 3 groups of adjustment to carve iron component, finishes parts crucible axis pivot to the coaxial of furnace hearth plate center and vertical the adjustment.
The beneficial effects of the utility model are: compare with known modular construction, and transmission accuracy height of the present utility model, good rigidity, simple in structure, weight is 2/3rds of known configurations.The utility model employing is carved iron component and is finished the precision adjustment, and adjustment work is simple, need not installed surface is looked for precision high efficiency.
Description of drawings
Fig. 1 is the utility model embodiment sectional structural map
Fig. 2 is the utility model embodiment schematic diagram
Among the figure:
1 underdrive guide rail column, 2 rolling guides, 3 slide blocks, 4 slide plates, 5 crucible axis, 6 leading screws
7 carve iron component
The specific embodiment
Two groups of rolling guides 2 are housed on underdrive guide rail column 1, and slide block 3 of 4 groups of rolling guides of dress links with slide plate 4 on it.Dress crucible axis 5 above the slide plate 4 is done accurate elevating movement by the rotation drive slide plate and the crucible axis of leading screw 6.
Be equipped with 3 groups in the bottom surface of underdrive guide rail column and carve iron component 7, carve the iron component height by translation underdrive guide rail column and adjustment, the rotation crucible axis can look for the crucible axis pivot and the centre bore of furnace hearth plate coaxial reaching with furnace hearth plate A to go up the vertical of plane easily.Use screw and the fastening maintenance precision of base B behind the centering.
Claims (1)
1. crucible axis drive disk assembly that is used for monocrystal stove is characterized in that: connect slide plates with 2 groups of rolling guide-rail pairs and 4 slide blocks, crucible axis is contained on the slide plate, and feature bottom is equipped with 3 groups carves iron component.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620116090 CN200986390Y (en) | 2006-05-26 | 2006-05-26 | Copple axis transmission member for silicon monocrystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620116090 CN200986390Y (en) | 2006-05-26 | 2006-05-26 | Copple axis transmission member for silicon monocrystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN200986390Y true CN200986390Y (en) | 2007-12-05 |
Family
ID=38915847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620116090 Expired - Fee Related CN200986390Y (en) | 2006-05-26 | 2006-05-26 | Copple axis transmission member for silicon monocrystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN200986390Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718490B (en) * | 2009-07-20 | 2012-05-23 | 浙江传媒学院 | Outlet positioning and adjusting device for fusant in crucible in closed cavity |
-
2006
- 2006-05-26 CN CN 200620116090 patent/CN200986390Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101718490B (en) * | 2009-07-20 | 2012-05-23 | 浙江传媒学院 | Outlet positioning and adjusting device for fusant in crucible in closed cavity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Zhuolu Jingyi Electronics Co., Ltd. Assignor: Beijing Jingyi Century Automatic Equipment Co., Ltd. Contract fulfillment period: 2008.10.10 to 2013.10.10 Contract record no.: 2008990001265 Denomination of utility model: Copple axis transmission member for silicon monocrystal furnace Granted publication date: 20071205 License type: Exclusive license Record date: 20081124 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.10.10 TO 2013.10.10; CHANGE OF CONTRACT Name of requester: ZHUOLU JINGYI ELECTRON CO.,LTD. Effective date: 20081124 |
|
| C56 | Change in the name or address of the patentee |
Owner name: BEIJING JINGYI CENTURY ELECTRONIC CO., LTD. Free format text: FORMER NAME: BEIJING JINGYI CENTURY AUTOMATION EQUIPMENT CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100079 Beijing City, Fengtai District Songjiazhuang Yongwai weizikeng 2 Patentee after: Beijing Jingyishiji Electronic Co., Ltd. Address before: 100079 Beijing City, Fengtai District Songjiazhuang Yongwai weizikeng 2 Patentee before: Beijing Jingyi Century Automatic Equipment Co., Ltd. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071205 Termination date: 20140526 |