CN200981191Y - Optical accessory fine-grinding polishing machine - Google Patents
Optical accessory fine-grinding polishing machine Download PDFInfo
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- CN200981191Y CN200981191Y CN 200620079302 CN200620079302U CN200981191Y CN 200981191 Y CN200981191 Y CN 200981191Y CN 200620079302 CN200620079302 CN 200620079302 CN 200620079302 U CN200620079302 U CN 200620079302U CN 200981191 Y CN200981191 Y CN 200981191Y
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Abstract
The utility model provides an optical part fine grinding and polishing machine, mainly comprising an engine base, a work main shaft device, and a fine grinding tool, wherein the wok is clamped in the work main shaft device with three-dimensional motion as moving, auto-rotating, and swinging, the work surface is in self-adaptive coincidence with the flexible fine grinding and polishing tool to proceed the fine grinding and polishing. The fine grinding tool further comprises a non-magnetic loading trough, a magnetic core, a magnet coil, an up-down regulating device, a fluid supply duct, a fluid circulating device, a recovering duct, and magnetorheological polishing fluid, wherein the magnetorheological polishing fluid forms a return circuit. When power-on working, a gradient magnetic field is formed from an inner magnetic pole end face to an outer magnetic pole end face, the magnetorheological polishing fluid is magnetized by the magnetic field in the inner magnetic pole end face and the nearby space and produces a looping Bingham plasticity solid body, forming a looping flexible fine grinding and polishing tool. The utility model solves the problem of super-smooth processing with the roughness of the optical surface less than couple of nanometers, and simultaneously realizing the flexibility, the plasticity, and the versatility processing with high efficiency and low costs.
Description
Technical field
The utility model relates to the accurate manufacturing technology of optical element field, mainly relates to adopt the equipment of magnetic rheologic flexible, fine grinding polishing.A kind of optical element fine grinding polishing machine is provided, has been mainly used in the optical element manufacturing, also can be used for the manufacturing that other needs the part of smooth surface.
Background technology
At the manufacturing technology of precision instrument, optical instrument, optical, mechanical and electronic integration and communication, automation field, all usually can relate to optics fine-grinding and polishing manufacturing technology field.
At present, known optics fine-grinding and polishing manufacturing technology is that grinding tool or the polishing disk that utilization and workpiece face type coincide carries out fine-grinding and polishing manufacturing optical element.Data and practice show, they have easy, be easy to realize and characteristics that working (machining) efficiency is high, be the manufacture method that generally adopts in the present optics fine-grinding and polishing technology, be widely used in industrial production.Fine-grinding and polishing apparatus in these class methods is with comprising diamond pellet sheet, resin, polyurethane, pitch, material adhesives such as felt are made on the metal die close with part to be processed face shape and are formed, they have an identical feature, and relatively hard and changeless type are arranged.In the processing of reality,, need make the not special fine-grinding and polishing grinding tool of coplanar shape to the optical element of coplanar shape not; And, need in the process of processing to do one initial grinding, after the tru(e)ing face shape, just can be used to produce the optical element that guarantees that manufacturing is qualified; Simultaneously, in the process of processing, need constantly to detect and proofread and correct the face shape of fine-grinding and polishing grinding tool, could guarantee the continuation of processing.This is the processes that needs constantly repeat, and careless slightlyly will produce waste product.Process the optical element of new face shape, need to make another special fine-grinding and polishing grinding tool.In whole process, need constantly revise the polishing mould, to satisfy the demand of processed object precision according to the variation of part surface shape.Thereby artificial sense datum also is a very important condition in above-mentioned conventional method.
In addition, an important problem is the optical element that conventional method produces, and its surface is the optical surface of a roughness in tens nanometer left and right sides magnitudes, and using in the optical technical field of routine is can be to meet the demands; But have in the technical field of super-smooth surface requirement in laser technology and other, the optical surface of this tens nanometer left and right sides magnitudes is to satisfy instructions for use, the desirability roughness promptly reaches the optical surface level of ultra-smooth less than the optical surface of several nanometers in the present industrial production reality.
In disclosed data, Technique of Magnetorheological Finishing has development faster, facts have proved that it has the performance of good fine-grinding and polishing, can produce the optical element of ultra-smooth optical surface.The magnetic rheological polishing method and the equipment of the invention of U.S. Rochester University have been obtained commercial distribution, has leading technical merit in the world, Chinese patent ZL96198445.7 is being described in detail of U.S. Rochester University inventive method, it is the method with magneto-rheological fluid finishing workpiece surface, in the method, magnetic flow liquid is placed the wheel surface of a rotation, drive in magnetic flow liquid to a magnetic field, there is certain clearance in workpiece and magnetic field, magnetic flow liquid is magnetized by this gap the time, and form instantaneous finisher, be used for contacting and remove this part material of surface of the work with the part of surface of the work.It is similar to a some contact grinding and polishing that contact-making surface is very little, realizes the face shape and the smooth surface that need; It need be realized in conjunction with ultraprecise mechanical system and Numeric Control Technology.Domestic have many units also in the research of carrying out magnetorheological polishing, Chinese patent ZL03124557.9 discloses another and has utilized the method for magnetorheological polishing, it is to make it form the nozzle peripheral hardware magnetic field of jet can spraying magnetic flow liquid, movement position and the direction of nozzle surrounding magnetic field and the rheological characteristic that size is controlled magnetic flow liquid by control workpiece space, realize optical element quantitatively grinding and polishing processing really, this finishing method needs complicated precision mechanical system and control equally.Chinese patent 200410044076.0 discloses the rotary tool head of a kind of ultrasonic magnetic rheology composite polishing method and device, portion feeds the magnetic flow liquid that is mixed with abrasive material within it, and apply certain magnetic field, make magnetic flow liquid on tool heads, be formed with certain removal ability, it also is position by numerical control table, NC table control rubbing head, processing work is driven by the workpiece numerical control table, NC table, forms the machining locus and the high-precision optical surface that require.
In the above-mentioned magnetic rheological polishing method, common characteristic all is the Ginding process of a similar some contact, needs the precision mechanical system and the digital control optical element of making of superhigh precision, the control system in using at different product needed adjustment.It belongs to computer control optical surfacing technology, and this technology has promoted the development of the optical element manufacturing technology of ultra-smooth.Compare with conventional method, big raising arranged on machining accuracy and surface quality, but aspect working (machining) efficiency and processing cost far away not as good as the level of conventional method.
Summary of the invention
The purpose of this utility model is the deficiency that overcomes the said equipment and technology existence, provide a kind of surface to be machined and flexible, fine grinding polishing abrasive tool self adaptation of making to coincide, carrying out flexibility and plasticity face grinds, can also be at the optical element of certain scope processing and manufacturing different curvature radius face shape, has versatility, the working (machining) efficiency height is easy to operate and control; Also have simple in structurely simultaneously, cost is low, realizes the Surface Machining of ultra-smooth, need not to change grinding tool and just can carry out processing optical part fine grinding polishing machine to the workpiece of different curvature or different profiles.
Below the technical solution of the utility model is elaborated:
Realization of the present utility model is the optical element fine grinding polishing machine, mainly constitute by support, workpiece spindle device and lappingout grinding tool, workpiece spindle device and lappingout grinding tool are connected with support respectively, workpiece to be machined is clamped on the main shaft of workpiece spindle device, it is characterized in that: the lappingout grinding tool is the flexible, fine grinding polishing abrasive tool of ring-band shape, and workpiece is placed on the flexible, fine grinding polishing abrasive tool of ring-band shape; The lappingout grinding tool mainly is made up of non magnetic work nest, magnetic core, solenoid, up-down adjustment device, feed liquid pipeline, liquid circulating apparatus, recovery channel, Magnetorheologicai polishing liquid, wherein magnetic core and solenoid constitute electromagnet, the end face of magnetic core internal magnetic pole is a ring-band shape, whole electromagnet and up-down adjustment device are fixed together, the up-down adjustment device can the adjustable ring band shape the upper-lower position of flexible, fine grinding polishing abrasive tool, flexible, fine grinding polishing abrasive tool position in the horizontal direction that also can the adjustable ring band shape.The bottom of non magnetic work nest has the magnetic pole hole, and the internal magnetic pole of magnetic core passes this hole, exceeds base plane and magnetic pole hole and bonds together and seal; Also have the hole on the internal magnetic pole of electromagnet, be liquid flow path, the via hole that passes the up-down adjustment device is connected with feed liquid pipeline, the feed liquid pipeline other end is received liquid circulating apparatus, liquid circulating apparatus also is connected with the liquids recovery pipeline, the other end of recovery channel is connected on the liquid pores of non magnetic work nest 2 bottoms, form liquid circulation loop, during solenoid energising work, the internal magnetic pole end face forms gradient magnetic to the outer magnetic pole end face, the internal magnetic pole end face of magnetic core and near the Magnetorheologicai polishing liquid in space by magnetic field magnetisation, produce the solid-state shape object of Ben-Hur (Bingham) plasticity of ring-band shape, form the flexible, fine grinding polishing abrasive tool of ring-band shape.
The non magnetic work nest, magnetic core, the solenoid that are fixed together, link together with magnetic field up-down adjustment device, can move up and down and horizontal direction move back and forth, but the fine adjustment that moves up and down position, the flexible, fine grinding polishing abrasive tool that has guaranteed formation ring-band shape in the non magnetic work nest can be in the technology position of needs, the distance adjustment that cooperates the imaginary axis of surface of the work and oscillating motion realizes the technological requirement to the processing and manufacturing of different workpiece.It is the processing that is used for the plane optical surface that horizontal direction moves back and forth.
The design of lappingout grinding tool has changed the method for existing polishing technology, do not need to adopt and the corresponding serial stationary plane shape polishing tool of processed object, do not adopt a way of contact to process yet, need not the mobile accuracy of ultraprecise Digit Control Machine Tool control workpiece or bistrique.The magnetic rheologic flexible, fine grinding polishing abrasive tool of ring-band shape closely contacts with the motion workpiece, and the solid-state shape object surfaces of plasticity has realized plasticity along with the surface of the work change of shape, and therefore the contact of larger area face is arranged, and has higher removal efficient.When workpiece motion s, the magnetic rheologic flexible, fine grinding polishing abrasive tool produces shearing force at surface of the work, realizes the removal to the surface of the work material.Can adapt to the processing of different curvature radius face shape and reach the superlinishing purpose.
Realization of the present utility model also be workpiece spindle device be move, the three-dimensional motion main shaft device of rotation and swing, mainly by swing mechanism, slide up and down mechanism and the speed change rotating mechanism is formed, support upwards is connected with rocker by connecting axle, and the connecting axle center line promptly polishes the imaginary axis of machining control; Collar bush, rocker, bracing frame are formed swing mechanism, and bracing frame and rocker are fixed together, and sliding up and down mechanism is cylinder control spline spindle mechanism, is installed on the rocker by cylinder, and the speed change rotating mechanism is the belt transmission gear; The speed change rotating mechanism also is fixedly connected on the bracing frame, is enclosed within the collar bush that slides up and down in the mechanism, also is connected on the bracing frame simultaneously; Oscillating control device also is installed on the support.The control device that the swing of rocker is mounted on the equipment support 23 realizes that pendulum angle and hunting period are adjustable.To satisfy different technological requirements.
The design of workpiece spindle device, solved that work piece moves, the three-dimensional motion of rotation and swing, realized that the workpiece spatial movement can spinning motion and carry out oscillating motion the time, guaranteed that each point fully contacts with the magnetic rheologic flexible, fine grinding polishing abrasive tool of ring-band shape on the workpiece, the speed of rotation and pendulum angle and hunting period are controlled, need not to change grinding tool just can to different curvature or not the workpiece of similar shape face polish processing, to satisfy different technological requirements.Increased the versatility of equipment, changed the present situation of a corresponding cover grinding tool of product, adopt the magnetic rheologic flexible, fine grinding polishing abrasive tool and the work piece of ring-band shape to move, the combination of the three-dimensional motion of rotation and swing, realized of the processing of same equipment effectively to the optical element of different curvature radius face shape, not only be easy to control, and simple.
Realization of the present utility model also is to be provided with liquid storage tank, liquid circulation pump, cooling system, stirring system in the liquid circulating apparatus of optical element fine grinding polishing machine; Liquid circulation pump enters in the non magnetic work nest Magnetorheologicai polishing liquid through the liquid flow path in the middle of the internal magnetic pole of infusion channel and magnetic core from liquid storage tank, Magnetorheologicai polishing liquid to non magnetic work nest carries out supply, guarantees that the Magnetorheologicai polishing liquid of non magnetic work nest enough satisfies technological requirement.Magnetorheologicai polishing liquid circulates in the process also to magnetic pole and work-piece cools.
Realization of the present utility model is that also the end face of the magnetic core 3 internal magnetic pole ring-band shapes in the optical element fine grinding polishing machine is annulus band shapes.According to the surface configuration of work piece, can also be made as the Else Rule ring-band shape, as: elliptical ring band shape, square ring-band shape, triangle ring-band shape, and irregular ring-band shape.
Optical element fine grinding polishing machine of the present utility model has simple in structure, and the device fabrication cost is compared low.And, improved the efficient of processing and manufacturing, reduce the cost of device fabrication cost and processing and manufacturing optical element.
The utility model is according to such principle: the annulus of a radius r, and during with respect to a some motion, the track enveloping surface of being had a few on the annulus is a sphere, its sphere curvature radius is the distance that annulus a bit arrives fixing point arbitrarily.When annular radii r is constant, change annulus arbitrarily a bit to the distance of fixing point, the radius of track envelope spheric curvature will change thereupon, forms the sphere of different radii.
This mathematics geometrical principle of base, machinery that the utility model utilization is classical terse and control have designed and have processed required lappingout grinding tool, workpiece spindle device, support and the cooperation between them, combination is installed, provide a kind of surface to be machined and flexible, fine grinding polishing abrasive tool self adaptation to coincide, carrying out flexibility and plasticity face grinds, can also be at the optical element of certain scope processing and manufacturing different curvature radius face shape, have versatility, the working (machining) efficiency height is easy to operate and control; Also have simple in structurely simultaneously, cost is low, realizes the Surface Machining of ultra-smooth, need not to change grinding tool and just can polish the optical element fine grinding polishing machine of processing to the workpiece of different curvature or different profiles.Solved the problem of the roughness of urgent need in producing, realized processing flexibility and processing, plasticity and versatility simultaneously less than the ultra-smooth processing of the optical surface of several nanometers, the working (machining) efficiency height, equipment and processing cost are low.
Description of drawings:
Fig. 1 is the principle schematic of the utility model lappingout grinding tool;
Fig. 2 is a ring-band shape flexible, fine grinding polishing abrasive tool schematic diagram of the present utility model;
Fig. 3 is a workpiece spindle device principle schematic of the present utility model;
Fig. 4 is the schematic diagram that the utility model is processed protruding spherical optics face;
Fig. 5 is the schematic diagram of the utility model processing concave spherical surface optical surface;
Fig. 6 is the schematic diagram of the utility model processing plane optical surface;
Fig. 7 is a square magnetic pole schematic diagram in the utility model;
Fig. 8 is an oval magnetic pole schematic diagram in the utility model.
The specific embodiment: be elaborated below in conjunction with accompanying drawing:
Embodiment 1: as shown in Figure 1, the utility model is the optical element fine grinding polishing machine, mainly be made of support, workpiece spindle device and lappingout grinding tool, workpiece spindle device and lappingout grinding tool are connected with support respectively, and workpiece to be machined 1 is clamped on the main shaft 10 of workpiece spindle device.The lappingout grinding tool is the flexible, fine grinding polishing abrasive tool of ring-band shape, and workpiece is placed on the flexible, fine grinding polishing abrasive tool of ring-band shape; The lappingout grinding tool mainly is made up of non magnetic work nest 2, magnetic core 3, solenoid 4, up-down adjustment device 5, feed liquid pipeline 6, liquid circulating apparatus 7, recovery channel 8, Magnetorheologicai polishing liquid 9, wherein magnetic core 3 and solenoid 4 constitute electromagnet, the end face of magnetic core 3 internal magnetic poles is ring-band shapes, whole electromagnet and up-down adjustment device 5 are fixed together, the bottom of non magnetic work nest 2 has the magnetic pole hole, the internal magnetic pole of magnetic core 3 passes this hole, exceeds base plane and magnetic pole hole and bonds together and seal; Also have the hole on the internal magnetic pole of electromagnet, be liquid flow path, the via hole that passes up-down adjustment device 5 is connected with feed liquid pipeline 6, feed liquid pipeline 6 other ends are received liquid circulating apparatus 7, liquid circulating apparatus 7 also is connected with liquids recovery pipeline 8, the other end of recovery channel 8 is connected on the liquid pores of non magnetic work nest 2 bottoms, form liquid circulation loop, during solenoid 4 energising work, the internal magnetic pole end face forms gradient magnetic to the outer magnetic pole end face, the internal magnetic pole end face of magnetic core 3 and near the Magnetorheologicai polishing liquid 9 in space by magnetic field magnetisation, produce the solid-state shape object 26 of Bingham plasticity of ring-band shape, form the flexible, fine grinding polishing abrasive tool of ring-band shape, referring to Fig. 2.
The preferred electromagnet of flexible, fine grinding polishing abrasive tool of ring-band shape is realized, can also be other magnetisable material, uses permanent magnet, can also realize jointly with electromagnet and permanent magnet.
Embodiment 2: the overall formation of optical element fine grinding polishing machine is with embodiment 1, workpiece spindle device wherein be move, the three-dimensional motion main shaft device of rotation and swing, mainly by swing mechanism, slide up and down mechanism and the speed change rotating mechanism is formed, support 23 upwards is connected with rocker 18 by connecting axle, and the connecting axle center line promptly polishes the imaginary axis of machining control; Collar bush 12, rocker 18, bracing frame 22 are formed swing mechanism, and bracing frame 22 and rocker 18 are fixed together, and sliding up and down mechanism is cylinder control spline spindle mechanism, is installed on the rocker 18 by cylinder 16, and the speed change rotating mechanism is a belt transmission gear; The speed change rotating mechanism is fixedly connected by bracing frame 22, is enclosed within the collar bush 12 that slides up and down in the mechanism and also is connected on the bracing frame 22 simultaneously.Oscillating control device also is installed on the support 23.
Embodiment 3: the overall formation of optical element fine grinding polishing machine is with embodiment 2, and the concrete enforcement of workpiece spindle device is to slide up and down mechanism to be installed on the swing mechanism, and the speed change rotating mechanism is fixed on swing mechanism, and swing mechanism moves together.Collar bush 12, rocker 18, bracing frame 22 are formed swing mechanism, and collar bush 12 is fixed on the bracing frame 22, and is fixed on together on the rocker 18.Main shaft 10, rotating shaft 14, rotating shaft cover 15, cylinder 16, cylinder axis 17 compositions slide up and down mechanism, main shaft 10 upper ends are connected with rotating shaft 14, rotating shaft cover 15 is connected with cylinder 16 upper cylinder axles 17, and drive cylinder axis 17, rotating shaft overlap 15 during cylinder 16 work, rotating shaft 14 and main shaft 10 move up and down.Cylinder 16 is installed on the rocker 18, can fine adjustment cylinder 16 position by leading screw 25, just control the position of workpiece 1 surface to be machined and rocker 18 imaginary axis, and realize processing technology requirement to different workpieces.When main shaft 10 and rotating shaft 14 rotations, rotating shaft 14 can rotate freely in rotating shaft cover 15, and rotating shaft cover 15, cylinder axis 17 and cylinder 16 can not followed rotation.Main shaft 10 is that its rotation of splined shaft is to be driven by the speed change rotating mechanism, spline housing 11, negative pulley wheel 13, motor 19, drive pulley 20, belt 21 is formed the speed change rotating mechanism, motor 19 is fixed on the bracing frame 22, negative pulley wheel 13 is supported by collar bush 12 by bearing with spline housing 11, motor 19 drives drive pulley 20 rotations, by belt 21 transmissions, negative pulley wheel 13 is fixed together with spline housing 11 and drives main shaft 10 rotations, main shaft 10 can slide in spline housing 11, when main shaft 10 slides up and down, spline housing 11 keeps rotation can not slide up and down, negative pulley wheel 13 can be realized three-step gear shift with drive pulley 20, motor 17 is realized infinitely variable speeds by frequency converter, the rotating speed that has guaranteed main shaft 10 is that per minute 0～2600 changes adjustable, satisfy the processing technology requirement, the control device that the swing of rocker 18 is mounted on the equipment support 23 realizes that pendulum angle and hunting period are adjustable.To satisfy different technological requirements.
Work spindle and motion control mechanism have been realized the motion in workpiece space, it is that spinning motion and oscillating motion are carried out simultaneously, guaranteed that each point fully contacts with the magnetic rheologic flexible, fine grinding polishing abrasive tool of ring-band shape on the workpiece, the speed of rotation and pendulum angle and hunting period are controlled, to satisfy different technological requirements
Embodiment 4: the overall formation of optical element fine grinding polishing machine is provided with liquid storage tank, liquid circulation pump, cooling system, stirring system with embodiment 3 in the liquid circulating apparatus 7 wherein; Liquid circulation pump enters in the non magnetic work nest 2 Magnetorheologicai polishing liquid 9 through the liquid flow path in the middle of the internal magnetic pole of infusion channel 6 and magnetic core 3 from liquid storage tank, the Magnetorheologicai polishing liquid 9 of non magnetic work nest 2 is carried out supply.
Embodiment 5: the overall formation of optical element fine grinding polishing machine is with embodiment 3, and referring to Fig. 2, the end face of magnetic core 3 internal magnetic pole ring-band shapes is to be made as the annulus band shape in the lappingout grinding tool, has realized having the larger area face to contact with workpiece, has higher removal efficient.
Embodiment 6: the overall formation of optical element fine grinding polishing machine is with embodiment 3, size according to work piece, the end face of magnetic core 3 internal magnetic pole ring-band shapes is made as the elliptical ring band shape in the lappingout grinding tool, removal with the zones of different that changes surface of the work, the end face of magnetic core 3 internal magnetic pole ring-band shapes in the lappingout grinding tool can be made as the Else Rule ring-band shape, see Fig. 8.
Embodiment 7: embodiment is with embodiment 6, and difference is the surface configuration according to work piece, and the end face side of the being made as ring-band shape of magnetic core 3 internal magnetic pole ring-band shapes is seen Fig. 7 in the lappingout grinding tool.
Embodiment 8: embodiment is with embodiment 6, and difference is the surface configuration according to work piece, and the end face of magnetic core 3 internal magnetic pole ring-band shapes is made as the triangle ring-band shape in the lappingout grinding tool.
Embodiment 9: embodiment is with embodiment 6, and difference is the surface configuration according to work piece, and the end face of magnetic core 3 internal magnetic pole ring-band shapes is made as irregular ring-band shape in the lappingout grinding tool.
Equipment of the present utility model has simple in structure, does not need the system and the control of superhigh precision requirement, and the device fabrication cost is compared low.And, do not need to make special fine-grinding and polishing grinding tool, and at the optical element of certain scope processing and manufacturing different curvature radius face shape.Improve the efficient of processing and manufacturing, reduced the cost of device fabrication cost and processing and manufacturing optical element.Flexibility, plasticity and versatility processing have been realized.
Embodiment 10: general structure referring to Fig. 4, is the schematic diagram that the utility model is processed protruding spherical optics face with embodiment 5, and workpiece has been realized the processing and manufacturing of protruding spherical optics face below the imaginary axis of rocker.
Embodiment 11: general structure is with embodiment 5, and difference is to process the concavees lens surface, and workpiece has been realized the processing and manufacturing of concave spherical surface optical surface above the imaginary axis of rocker, see Fig. 5.
Embodiment 12: referring to Fig. 6, rocker 18 maintains static, and keeps the spinning motion axle of workpiece vertical with the ring-band shape end face of magnetic pole, and the control electromagnet moves back and forth in the horizontal direction, realized that radius of curvature is the processing of infinitely-great optical surface, i.e. the processing and manufacturing of plane optical surface.
Embodiment 13: the device structure that adopts embodiment 5, the lens of bore Φ 60mm have been processed, the one side radius of curvature is the sphere of 100mm, then, the another side radius of curvature is infinitely-great plane, with machining of embodiment 12, realized that need not to change grinding tool just can carry out fine-grinding and polishing processing to the workpiece of different curvature or different profiles, optical element certain scope processing and manufacturing different curvature radius face shape, and do not need the precision mechanical system and the digital control optical element of making of superhigh precision, have versatility, the working (machining) efficiency height is easy to operate and control;
Embodiment 14: adopt optical element fine grinding polishing machine of the present utility model, the lens of bore Φ 60mm have been processed, the one side radius of curvature is the sphere of 100mm, the another side radius of curvature is infinitely-great plane, face shape parameter before the processing, the Pt value of sphere face shape is 3.6653 μ m, the Ra value is 0.3656 μ m, the Pt value of plane surface shape is 3.9532 μ m, the Ra value is 0.3415 μ m, the face shape parameter after the processing, and the Pt value of sphere face shape is 0.0835 μ m, the Ra value is 0.0012 μ m, the Pt value of plane surface shape is 0.0692 μ m, and the Ra value is 0.0019 μ m, every about 60 minutes of average process time, measurement device is the FormTalysurf Series 2 contact synthesis measuring profilometers of Taylor Hobson company, has realized the ultra-smooth processing of roughness less than the optical surface of several nanometers.
The utility model magnetic rheologic flexible, fine grinding finishing method and equipment have solved need in a hurry in the production reality efficient, low cost, easy-operating flexible microstoning problem.
Claims (4)
1. optical element fine grinding polishing machine, mainly constitute by support, workpiece spindle device and lappingout grinding tool, workpiece spindle device and lappingout grinding tool are connected with support respectively, workpiece to be machined is clamped on the main shaft of workpiece spindle device, it is characterized in that: the lappingout grinding tool is the flexible, fine grinding polishing abrasive tool of ring-band shape; The lappingout grinding tool mainly is made up of non magnetic work nest (2), magnetic core (3), solenoid (4), up-down adjustment device (5), feed liquid pipeline (6), liquid circulating apparatus (7), recovery channel (8), Magnetorheologicai polishing liquid (9), wherein magnetic core (3) and solenoid (4) constitute electromagnet, the end face of magnetic core (3) internal magnetic pole is a ring-band shape, whole electromagnet and up-down adjustment device (5) are fixed together, the bottom of non magnetic work nest (2) has the magnetic pole hole, the internal magnetic pole of magnetic core (3) passes this hole, exceeds base plane and magnetic pole hole and bonds together and seal; Also have the hole on the internal magnetic pole of electromagnet, be liquid flow path, the via hole that passes up-down adjustment device (5) is connected with feed liquid pipeline (6), feed liquid pipeline (6) other end is received liquid circulating apparatus (7), liquid circulating apparatus (7) also is connected with liquids recovery pipeline (8), the other end of recovery channel (8) is connected on the liquid pores of non magnetic work nest (2) bottom, form liquid circulation loop, during solenoid (4) energising work, the internal magnetic pole end face forms gradient magnetic to the outer magnetic pole end face, the internal magnetic pole end face of magnetic core (3) and near the Magnetorheologicai polishing liquid (9) in space by magnetic field magnetisation, produce the solid-state shape object of Ben-Hur plasticity (26) of ring-band shape, form the flexible, fine grinding polishing abrasive tool of ring-band shape.
2. optical element fine grinding polishing machine according to claim 1, it is characterized in that: said workpiece spindle device be move, the three-dimensional motion main shaft device of rotation and swing, mainly by swing mechanism, slide up and down mechanism and the speed change rotating mechanism is formed, support (23) upwards is connected with rocker (18) by connecting axle, and the connecting axle center line promptly polishes the imaginary axis (24) of machining control; Collar bush (12), rocker (18), bracing frame (22) are formed swing mechanism, bracing frame (22) and rocker (18) are fixed together, sliding up and down mechanism is cylinder control spline spindle mechanism, is installed on the rocker (18) by cylinder (16), and the speed change rotating mechanism is the belt transmission gear; The speed change rotating mechanism also is fixedly connected on the bracing frame (22), is enclosed within the collar bush (12) that slides up and down in the mechanism, also is connected on the bracing frame (22) simultaneously; Support also is equipped with oscillating control device on (23).
3. optical element fine grinding polishing machine according to claim 1 and 2 is characterized in that: described liquid circulating apparatus is provided with liquid storage tank, liquid circulation pump, cooling system, stirring system in (7); Liquid circulation pump enters in the non magnetic work nest (2) Magnetorheologicai polishing liquid (9) liquid flow path through the internal magnetic pole centre of infusion channel (6) and magnetic core (3) from liquid storage tank, and the Magnetorheologicai polishing liquid (9) of non magnetic work nest (2) is carried out supply.
4. optical element fine grinding polishing machine according to claim 3 is characterized in that: the end face of said magnetic core (3) internal magnetic pole ring-band shape is the annulus band shape.
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2006
- 2006-06-30 CN CN 200620079302 patent/CN200981191Y/en not_active Expired - Lifetime
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