CN1989418B - Acoustic wave sensor - Google Patents

Acoustic wave sensor Download PDF

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Publication number
CN1989418B
CN1989418B CN2005800252603A CN200580025260A CN1989418B CN 1989418 B CN1989418 B CN 1989418B CN 2005800252603 A CN2005800252603 A CN 2005800252603A CN 200580025260 A CN200580025260 A CN 200580025260A CN 1989418 B CN1989418 B CN 1989418B
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China
Prior art keywords
ripple
sound wave
wave
receiving equipment
transmitter
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CN2005800252603A
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Chinese (zh)
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CN1989418A (en
Inventor
山中浩
渡部祥文
本多由明
北田耕作
河田裕志
大塚伦生
泽田和男
后藤弘通
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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Publication of CN1989418A publication Critical patent/CN1989418A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/80Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using ultrasonic, sonic or infrasonic waves
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S3/00Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received
    • G01S3/80Direction-finders for determining the direction from which infrasonic, sonic, ultrasonic, or electromagnetic waves, or particle emission, not having a directional significance, are being received using ultrasonic, sonic or infrasonic waves
    • G01S3/802Systems for determining direction or deviation from predetermined direction
    • G01S3/808Systems for determining direction or deviation from predetermined direction using transducers spaced apart and measuring phase or time difference between signals therefrom, i.e. path-difference systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/523Details of pulse systems
    • G01S7/524Transmitters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/523Details of pulse systems
    • G01S7/526Receivers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

In an acoustic wave sensor for detecting a distance to an object and an orientation where the object is located with using acoustic waves, an acoustic wave generating device generating an acoustic wave by applying thermal impact to the air with no mechanical vibration is used as a wave transmitting device, and an electric capacitance microphone converting variation of pressure due to acoustic wave to variation of an electric signal is used as each wave receiving device. Therefore, dead zone caused by reverberation component included in the acoustic wave transmitted from the wave transmitting device and dead zone caused by reverberation component included in wave receiving signals outputted from the wave receiving devices can be shortened and angular sensitivity of the acoustic wave sensor cam be increased, in comparison with a conventional acoustic wave sensor using piezoelectric devices as the wave transmitting device and the wave receiving devices.

Description

Acoustic detector
Technical field
The present invention relates to a kind of distance and/or this object that utilizes sound wave to detect object and place the acoustic detector in orientation.
Background technology
With regard to the acoustic detector of this class, for example, disclosed a kind of acoustic detector of reflection wave rule in the Japanese kokai publication hei 2002-156451 communique.In the acoustic detector of reflection wave rule, wave of compression, for example ultrasound wave intermittently is transmitted into media by the wave launcher with ripple transmitter, and the reflection wave that is reflected by object is received by the ripple receiver with ripple receiving equipment.To the placement orientation of the distance of object and this object, can detect for the basis according to the mistiming between the reception of the emission of wave of compression and reflection wave.
For example, in addition, disclosed a kind of acoustic detector of ground wave rule in the Japanese kokai publication hei 2003-279640 communique.In the acoustic detector of ground wave rule, wave of compression intermittently is transmitted into media by the wave launcher with ripple transmitter, and can detect for the basis according to the emission of wave of compression and the time difference between the ripple receiver reception wave of compression to the distance of wave launcher and the placement orientation of wave launcher.
With regard to the application of acoustic detector, ultrasonic level gage, vehicle interior retreat the example that sound locator or the like all is a propagate ultrasound waves in air.In addition, underwater sound wave orientator, fish finder or the like can be as the examples of propagate ultrasound waves under water.In addition, ultrasound wave flaw detector, ultrasound wave CT or the like is the example of propagate ultrasound waves in material.
In above-mentioned acoustic detector, the ripple receiver has a plurality of ripple receiving equipments, and this receiving equipment is placed on the same plane that is used for receiving by the wave launcher emitting sound wave.Arrangement when the ripple receiving equipment, place with object that the direction of arrival of the corresponding sound wave in orientation is capable to have become one specific angle (except right angle and parallel situation), when the interval that the ripple receiving equipment is arranged owing to the ripple receiving equipment receives sound wave respectively with default angle, just produced the time difference.Therefore, just might be by surveying when two adjacent ripple receiving equipments receive sound wave, two phase difference between signals of output are surveyed the direction of arrival of sound wave, just the placement orientation of object.
In traditional acoustic detector, the acoustic signals that piezoelectric device is widely used as the ripple transmitter of emission sound wave in air and is used for receiving converts the ripple receiving equipment of the ripple received signal of electric signal to.In using the acoustic detector of piezoelectric device as ripple transmitter and ripple receiving equipment, usually be set to value near the resonance frequency of ripple transmitter and ripple receiving equipment by the frequency of ripple transmitter emitting sound wave, purpose is to strengthen the acoustic pressure of the sound wave that is launched and the sensitivity that each receiving equipment is experienced sound wave.
, in using the acoustic detector of piezoelectric device as the ripple transmitter, the reverberation component that produces owing to the resonance of ripple transmitter has been included in by in the ripple transmitter emitting sound wave.In addition, the reverberation component that produces owing to the resonance of ripple receiving equipment is included in by in the ripple received signal of using piezoelectric device as each the ripple receiving equipment output in the acoustic detector of ripple receiving equipment.In using the acoustic detector of piezoelectric device, comprised the reverberation component that the resonance owing to two equipment produces as ripple transmitter and ripple receiving equipment.
The resonance-characteristic factor Q (mechanical quality factor Qm) of piezoelectric device usually greater than 100. therefore, when intermittently driving the ripple transmitter of piezoelectric device, the sound wave that produces by the ripple transmitter just becomes vibration wave as shown in figure 20. and the value of resonance-characteristic factor Q is big more, it is just long more that the vibration wave amplitude reaches the required period T of maximal value 1, and it is just long more that required period of time T 2 (reverberation period) is vibrated in the convergence reverberation.
Therefore, for example, at the acoustic detector of the distance that is used for detecting an object, be difficult to survey jobbie with respect at distance ripple receiving equipment one preset distance with the distance between the interior object.Therefore, usefulness symbol " t " (℃) representation temperature, the velocity of sound of sound wave " c " (m/s) can be calculated by formula c=331.5+0.6t.For example, when assumed temperature was 14 degrees centigrade, the velocity of sound was 340 (m/s).Like this, the every 1ms of the sound wave 34cm that only advances.When hypothesis is 2ms by the reverberation period T2 of the vibrational waveform of ripple transmitter emitting sound wave, so just be difficult to measure the distance of the object in the distance ripple transmitter 34cm.
As mentioned above, in using the acoustic detector of piezoelectric device as the ripple transmitter, owing to the dead band that is caused by the reverberation component that is included in from the wave launcher emitting sound wave is long, just can not be detected to the distance near the object of ripple receiver relatively so.
In addition, suppose that two objects are placed on distance and use on the relative nearer position of acoustic detector of piezoelectric device as ripple transmitter and ripple receiving equipment.May arrive the ripple receiving equipment of acoustic detector and received by the ripple receiving equipment by the reflection wave of one of them object reflection by the reflection wave of another one object reflection.Like this, just being difficult to the ripple received signal by the output of ripple receiving equipment is that the basis is distinguished from two reflected by objects ripples.
In other words, it is long by the dead band that is included in the reverberation component from the wave launcher emitting sound wave and is caused by the reverberation component in the ripple received signal that is included in the output of ripple receiving equipment to use piezoelectric device to have as the acoustic detector of ripple transmitter and ripple receiving equipment.Therefore, even the distance of object and/or orientation are to be detected in the zone by acoustic detector,, can not detect to the distance of object when very little to the distance difference each object from acoustic detector.Therefore, urgent hope can strengthen the angular resolution of acoustic detector.In addition, the ripple transmitter and the ripple receiving equipment that use in the acoustic detector have this feature, and promptly in the time of the angular resolution step-down, it is big that the value of resonance-characteristic factor Q becomes.
In addition, can utilize above-mentioned acoustic detector to construct a location detection system and survey the positional information that each wants the object that is detected.For example, comprise according to the above-mentioned described location detection system of Japanese kokai publication hei 2003-279640 communique, be arranged at the ultrasonic transmitter on a plurality of mobile objects respectively, at least three ultrasonic receivers that are arranged at presumptive area on the buildings ceiling respectively, and, obtain moving object position information processing device according to the cycle that receives from the ultrasonic transmitter ultrasonic waves transmitted to ultrasonic receiver the ultrasound wave.
In such location detection system, in each presumptive area on the ultrasonic receiver ceiling that is placed on buildings side by side, therefore just be necessary to obtain the positional information of the object (mobile object) that is detected in the processor at least three local installation ultrasonic receivers.In addition, the positional information of object can obtain in the overlapping receptive field of three ultrasonic receivers, and therefore, the deployment of ultrasonic receiver is very difficult.
Summary of the invention
The object of the present invention is to provide and a kind ofly compare with the acoustic detector of ripple receiving equipment as the ripple transmitter with utilizing piezoelectric device, by being included in the dead band that causes by the reverberation component in the ripple transmitter emitting sound wave and can shortening the acoustic detector that the angular resolution of sound wave improves by at least one that is included in the dead band that causes by the reverberation component in the ripple received signal of ripple receiving equipment output.
Acoustic detector according to an aspect of the present invention comprises: a wave launcher, this wave launcher have one and can launch the ripple transmitter of sound wave and be used to drive the driving circuit of this ripple transmitter; With a ripple receiver, this ripple receiver has direct reception by described wave launcher institute emitting sound wave, or receive by described wave launcher and launched and through an object reflected sound wave, and the sound wave that receives is converted to the ripple receiving equipment of the ripple received signal of electric signal, whereby, at least one in the two can be detected out to the distance of described wave launcher or described object and described wave launcher or described object orientation of living in. and described ripple transmitter is to constitute by air being applied the sonic generator that thermal shock produces sound wave by one.
Like this, when when applying sonic generator that thermal shock produces sound wave to air, in wave generating apparatus, seldom produce mechanical vibration as wave generating apparatus.Therefore, the resonance-characteristic factor Q of ripple transmitter just is far smaller than the resonance-characteristic factor Q of piezoelectric device.Therefore, compare as traditional acoustic detector of ripple transmitter and ripple receiving equipment with utilizing piezoelectric device, shorten by being included in the dead band that is caused by the reverberation component in the ripple transmitter emitting sound wave, angular resolution improves.
Acoustic detector according to a further aspect of the invention comprises: a wave launcher, this wave launcher have one can launch the ripple transmitter of sound wave and the driving circuit of this ripple transmitter of driving; With a ripple receiver, this ripple receiver has direct reception by described wave launcher institute emitting sound wave, or receive by described wave launcher and launched and through an object reflected sound wave, and the sound wave that receives is converted to the ripple receiving equipment of the ripple received signal of electric signal, whereby, at least one in the two can be detected out to the distance of described wave launcher or described object and described wave launcher or described object orientation of living in.Each ripple receiving equipment is constituted by the condenser microphone that the pressure of sound wave acoustic pressure is changed the variation that is converted to electric signal by one.
Like this, when condenser microphone was used as the ripple receiving equipment, the resonance-characteristic factor Q of each ripple receiving equipment counted Q less than the resonance-characteristic of piezoelectric device.Therefore, compare as traditional acoustic detector of ripple transmitter and ripple receiving equipment with utilizing piezoelectric device, shorten by being included in the dead band that is caused by the reverberation component in the sound wave of each ripple receiving equipment output, angular resolution improves.
In addition, when by will applying sonic generator that thermal shock produces sound wave as wave generating apparatus to air, condenser microphone is during as the ripple receiving equipment, and the resonance-characteristic factor Q of ripple transmitter and ripple receiving equipment is less than the resonance-characteristic factor Q of piezoelectric device.Therefore, with utilize piezoelectric device and compare as traditional acoustic detector of ripple transmitter and ripple receiving equipment, by being included in dead band that is caused by the reverberation component in the ripple transmitter emitting sound wave and the dead band shortening that is caused by the reverberation component that is included in the ripple received signal of being exported by the ripple receiving equipment, the angular resolution of sound wave improves.
Description of drawings
Fig. 1 is the structured flowchart according to the acoustic detector of the first embodiment of the present invention;
Fig. 2 is that the object that the above-mentioned acoustic detector of demonstration can detect is placed the schematic diagram in orientation;
Fig. 3 A shows when two objects are placed on regional that acoustic detector can detect the synoptic diagram of the arrival situation of the sound wave from each object to the ripple receiver;
Fig. 3 B shows the concept map of placing combination time delay of the corresponding ripple receiving equipment in orientation with object;
The oscillogram of the ripple received signal group of the ripple receiving equipment output of the time delay among Fig. 3 C has been display delay Fig. 3 B;
Fig. 3 D is the oscillogram of stack output waveform of the ripple received signal group of Fig. 3 C;
Fig. 3 E shows the concept map of placing another combination time delay of the corresponding ripple receiving equipment in orientation with object;
The oscillogram of the ripple received signal group of the ripple receiving equipment output of the time delay among Fig. 3 F has been display delay Fig. 3 E;
Fig. 3 G is the oscillogram of output waveform of the stack result of the ripple received signal group among Fig. 3 F;
Fig. 4 is the cut-open view of the ripple transmitter structure in the above-mentioned acoustic detector;
Fig. 5 A is the oscillogram that shows an example of the drive input signal that is input to ripple transmitter shown in Figure 4;
Fig. 5 B is when the input of the driving shown in Fig. 5 A waveform is input to the ripple transmitter, by the acoustic waveform curve map of ripple transmitter output;
Fig. 6 is in the first embodiment of the present invention, is used for driving the exemplary circuit figure that the driving circuit of ripple transmitter constitutes;
Fig. 7 A is among first embodiment, the part section view of ripple receiving equipment structure;
Fig. 7 B is the cut-open view of the ripple receiving equipment shown in Fig. 7 A;
Fig. 8 is the synoptic diagram that concerns of the resonance-characteristic factor Q of acoustic detector and angular resolution;
Fig. 9 be according to a second embodiment of the present invention acoustic detector medium wave transmitter and the circuit diagram of driving circuit structure;
Figure 10 A is the structural representation of the location detection system of a fourth embodiment in accordance with the invention;
Figure 10 B is the structure skeleton view that is applied in the ripple receiving equipment in the above-mentioned location detection system;
Figure 11 is applied in above-mentioned location detection system medium wave transmitter unit and ripple receiving element structured flowchart;
Figure 12 is the schematic diagram that shows the object placement orientation that can detect by the acoustic detector that is applied in the above-mentioned location detection system;
Figure 13 A to Figure 13 C shows respectively when driving voltage is applied to the ripple transmitter, the oscillogram of the ripple received signal of the ripple receiving equipment output among Figure 12;
Figure 14 is in the location detection system in the 4th embodiment, and sound wave arrives the situation synoptic diagram of ripple receiving equipments from two orientation;
Figure 15 A is a waveform synoptic diagram by the ripple receiving equipment output wave received signal among Figure 14 to Figure 15 C;
Figure 16 A to Figure 16 C is the waveform synoptic diagram that trigger pip ST and ripple receiving equipment receive the relation of the ripple received signal of exporting at first after the trigger pip;
Figure 17 is another situation synoptic diagram that step is arranged on the floor in the buildings in the location detection system in the 4th embodiment;
Figure 18 A has shown the synoptic diagram of forming the identifying information signal respectively to Figure 18 D, and this identifying information signal is made up of the pulse train of the different identifying information that is used as each mobile object;
Figure 19 A to Figure 19 C makes and uses up or electric wave when surveying sound wave regional as identification signal when a mobile object is placed on the ripple receiver, shows the oscillogram that concerns by between the identification signal of identifying information receiver output and the ripple received signal by the output of ripple receiving equipment respectively;
Figure 20 is when intermittently driving piezoelectric device, the oscillogram of the vibrational waveform of the sound wave that is produced by piezoelectric device.
Embodiment
First embodiment
Below in conjunction with the acoustic detector of accompanying drawing description according to the first embodiment of the present invention.In order to distinguish the three-dimensional position of object, first embodiment relates to a kind of acoustic detector that detects the distance and the placement orientation of object simultaneously.
As shown in Figure 1, the acoustic detector of first embodiment comprises: be used for the wave launcher 1 of air discontinuous ground emission sound wave (wave of compression), receive by the ripple receiver 3 of the reflection wave of object 2 reflections and handle ripple receiver 3 output signal signal processing circuit 5. acoustic detectors according to time of pinger 1 emission sound wave to by the reflection wave of object 2 reflections by the cycle the time of ripple receiver 3 receptions, detect the distance of object 2 and the placement orientation of object 2.
Wave launcher 1 comprises: can launch the ripple transmitter 10 of (output) sound wave, be used for driving the driving circuit 20 that ripple transmitter 10 is intermittently launched sound wave.Driving circuit 20 has one and is used for controlling the timing controller of intermittently being launched the sound wave time by ripple transmitter 10.
Ripple receiver 3 have a plurality of be used for receiving by 10 emissions of ripple transmitter and by the ripple receiving equipment 30 of object 2 reflected sound wave, and each ripple receiving equipment acoustic signals of being used for receiving converts the ripple received signal of electric signal to.In the acoustic detector of first embodiment, a plurality of (for example, 10) ripple receiving equipment 30 is placed on the same level of single circuit board, so that can not only measure the distance of object 2, and the placement orientation of energy measurement object 2.Especially, five ripple receiving equipments 30 are placed on the direction parallel with one side of circuit board according to predetermined interval, other five ripple receiving equipments 30 with the vertical direction on above-mentioned limit on place with predetermined interval.
In order to simplify description, 5 ripple receiving equipments 30 that are placed on one of them direction in Fig. 2, have only been shown.Suppose that sound wave becomes the orientation at θ angle to arrive on the plane that ripple receiving equipment 30 arranges (in other words from the vertical line on the plane of arranging with ripple receiving equipment 30, object 2 is placed on ripple receiver 3 to have on the direction of azimuth angle theta, and the wavefront orientation angles of sound wave is θ).Therefore, the velocity of sound is represented with symbol " c ", when sound wave arrives ripple receiving equipment 30B, arrive distance (delay distance) between the central authorities of the acoustic wavefront of ripple receiving equipment 30A and adjacent ripple receiving equipment 30B with symbol " d " representative, adjacent ripple receiving equipment 30A and the distance between the 30B centre (above-mentioned specific interval) are with symbol " L " representative.The time difference Δ t that acoustic wavefront arrives ripple receiving equipment 30A calculates by formula Δ t=d/c=Lsin θ/c.Therefore, can measure if the wavefront of sound wave arrives the time difference Δ t of two adjacent ripple receiving equipments, the azimuth angle theta of object 2 placements can treated program obtain so.In addition, above-mentioned predetermined interval L be set to by ripple transmitter 10 emitting sound wave wavelength half be desirable.
Signal processing circuit 5 comprises: have the signal amplification unit 51 of a plurality of amplifier 51a, and each amplifier 51a is used for amplifying the ripple received signal by 30 outputs of each ripple receiving equipment; Be used for the A/D converter 52 that will convert the digital wave received signal to and export the digital wave received signal by the analog receiving signal that each amplifier 51a amplifies; Be used for storing storer 53 by A/D converter 52 output results, processing unit 54, wherein processing unit 54 comprises the microprocessor of calculating in the placement orientation of the distance of utilizing the ripple received signal data that are stored in the storer 53 to proceed to object 2 and object 2.Although the ripple received signal is in the state by 30 outputs of each ripple receiving equipment all the time, after through a predetermined receiving cycle, have only when processing unit 54 and received behind the timing signal that control signal is exported, this control signal is used for controlling the sound wave emissions timing of the timing controller of the driving circuit 20 that comes from wave launcher 1, and signal processing unit 54 makes A/D converter 52 work.Therefore, may can extract and detect by object 2 reflected sound wave.
Processing unit 54 has the orientation detection function apart from computing function and detecting object placement orientation of the distance that calculates object 2. receive (being the timing of the acoustic emission equipment 10 emission sound waves) time to digital wave reception signal storage to memory 53 time of above-mentioned timing signal apart from computing function (namely in the time can ignoring the time delay of signal processing circuit 5 according to signal processing unit 54; The time of ripple receiving equipment 30 reception sound waves) time difference between (in other words; Receive cycle time of the sound wave that is reflected by object 2 to ripple receiver 3 from time of wave launcher 1 emission sound wave) calculate the distance of object 2. the ripple that the orientation detection function is stored in the ripple receiving equipment 30 the memory 53 by utilization receives the placement orientation that signal comes detecting object (that is the sound wave that, is reflected by object 2 institute from direction). the phase difference that processing unit 54 receives take the ripple by 30 outputs of ripple receiving equipment between the arrangement of signal and ripple receiving equipment 30 is surveyed the orientation that sound wave arrives ripple receiver 3 as the basis. processing unit 54 can be by the suitable program realization of execution in microprocessor apart from computing function and orientation detection function.
But the ultimate range of the acoustic detector energy measurement in hypothesis first embodiment, for example, 5 meters, sound wave can advance 10 meters at most in air.When arriving object 2 by ripple transmitter 10 emitting sound wave, to be reflected by object 2, when arriving ripple receiver 3, sound wave will be owing to such as divergence loss (scope weakenings), absorption loss, propagation loss such as reflection loss or similar loss and weakening.Thereby, become the small voltage of 100 to 800 μ V scopes by the ripple received signal of each ripple receiving equipment 30 outputs.The gain amplifier of each amplifier 51a (voltage gain) is set to 40 to 60dB, therefore can stop the reduction of S/N.In addition, in the air in 10 meters distance the required cycle of conduct acoustic waves be the scope of 30ms, therefore above-mentioned ripple receiving cycle should be set as the 30ms scope.
At the ripple reception period, be stored in the storer 53 from the ripple received signal of each ripple receiving equipment 30.Especially, the data volume by [quantity of ripple receiving equipment 30] * [being received the quantity of data by the ripple of each ripple receiving equipment 30 output] representative all is stored in the storer 53.For example, the quantity of supposing the ripple receiving equipment is 10, and the ripple receiving cycle is 30ms, the sampling period of A/D converter 52 be 1 μ s (sample frequency is 1MHZ) and, each data is 16.The memory capacity that storer 53 needs is: (10) * (30 * 10-3)/(1 * 10-6) * 16}=4,800,000bits=600Kbytes.Therefore, preferably use capacity greater than the SRAM of 600Kbytes as storer 53.
Under the situation in the placement orientation of surveying object 2, processing unit 54 has the delay feature by the ripple received signal that postpones to be stored in each the ripple receiving equipment 30 in the storer 53 time delay, this time delay is relevant with spread pattern (arranging the position of medium wave receiving equipment), the ripple received signal of packetization delay and the ripple received signal of output delay.Processing unit 54 also has the overlaying function of the ripple received signal group of stack delay, and, the relatively peak value of Die Jia output waveform and preset critical, when peak value during greater than critical value, will with the arbitration functions that makes up the placement orientation (direction of arrival of sound wave) that corresponding orientation is judged as object 2 time delay.
Next, describe when two objects and be placed on the detectable zone of acoustic detector (target area) and sound wave when arriving each ripple receiving equipment 30, the detection in object placement orientation in two orientation.As shown in Figure 3A, suppose that two objects 21 and 22 are placed on the detectable zone of acoustic detector (target area).But among Fig. 3 A,, 4 ripple receiving equipments 30 that are placed on the conplane line have only been shown in order to simplify description.
Fig. 3 B shown with combination time delay of the corresponding ripple receiving equipment 30 in placement orientation of object 22 and with the example of the overall length of corresponding each the rectangle horizontal edge of overall length of each time delay of ripple receiving equipment 30.The ripple received signal group of ripple receiving equipment 30 outputs of the time delay among Fig. 3 C has been display delay Fig. 3 B.Owing to arrive each ripple receiving equipment 30 by object 21 reflected sound wave with by object 22 reflected sound wave, therefore two ripple received signals are respectively from each ripple receiving equipment 30 output.Owing to above-mentioned time delay, do not exist from just there being the phase differential of essence between the ripple received signal in the left side that ripple receiving equipment 30 is exported.This is the ripple received signal that causes by by object 22 reflected sound wave.In addition, by the phase differential of the ripple received signal on the right side of ripple receiving equipment 30 output owing to enlarge time delay.These are the ripple received signals that cause by by object 21 reflected sound wave.Fig. 3 D is the oscillogram of stack output waveform of the ripple received signal group of Fig. 3 C.Like this, by stack ripple received signal group, the amplitude of the ripple received signal of the less phase differential that is caused and had by object 22 reflected sound wave is extended, therefore, just might distinguish these ripple receiving equipments and the ripple receiving equipment that is caused by object 21 reflected sound wave.
Similar, Fig. 3 E shown with combination time delay of corresponding each the ripple receiving equipment 30 of the placement location of object 2 and with the example of the overall length of corresponding each the rectangle horizontal edge of overall length of each time delay of ripple receiving equipment 30. the ripple received signal group of ripple receiving equipment 30 outputs of the time delay among Fig. 3 F has been display delay Fig. 3 E. because above-mentioned time delay, from just there not being the phase differential of essence to exist between the ripple received signal on the right side that ripple receiving equipment 30 is exported. these are the ripple received signals that cause by by object 21 reflected sound wave. in addition, by the phase differential of the ripple received signal in the left side of ripple receiving equipment 30 output owing to enlarge time delay. this is the ripple received signal that causes by by object 22 reflected sound wave. Fig. 3 G is the oscillogram of stack output waveform of the ripple received signal group of Fig. 3 F. like this, by stack ripple received signal group, the amplitude of the ripple received signal of the less phase differential that is caused and had by object 22 reflected sound wave is extended, therefore, just might distinguish these ripple receiving equipments and the ripple receiving equipment that is caused by object 22 reflected sound wave.
As mentioned above, by the output with the corresponding ripple receiving equipment 30 in object placement orientation is provided with different time delay, when even a plurality of objects are placed on the observable zone of acoustic detector (target area), also might distinguish ripple received signal by each object reflected sound wave.Therefore, the placement orientation of object just may detect.
Therefore, the same when long when being included in ripple transmitter emitting sound wave by the reverberation time in ripple transmitter 10 emitting sound wave and the piezoelectric device of traditional acoustic detector, the generating period of the overlaid waveforms of ripple received signal group (waveform in Fig. 3 D left side and the waveform on Fig. 3 G right side) will be elongated.Therefore, the differentiation between object 21 and the object 22 may become difficult.
In first embodiment, by thermal shock being put on the thermoinduction sonic generator that air produces sound wave, as the ripple transmitter of using as sound source 10.As described later, produce sound wave because the thermoinduction sonic generator is converted to the expansion of vehicular air and shrinks by the temperature variation with metallic film, so seldom produce mechanical vibration in the itself.Thereby the resonance-characteristic factor Q of thermoinduction sonic generator is than little many of the factor Q of piezoelectricity equipment.Therefore, having the sound wave of shorter reverberation time can be by the emission of thermoinduction sonic generator.In addition, have than the less resonance-characteristic factor Q of the resonance-characteristic factor Q of piezoelectricity equipment and have be included in the shorter reverberation component in the ripple received signal condenser microphone as ripple receiving equipment 30.
As shown in Figure 4, ripple transmitter 10 is a thermoinduction sonic generator that is included in the sonic generator, this thermoinduction sonic generator comprises the substrate 11 that monocrystalline P type silicon plate is made, the heat insulation course of making by the porous silicon layer of the surface that is formed at substrate 11 (upper surface of Fig. 4) (thermal insulation layer) 12, make and be formed at heat conduction layer 13 on the heat insulation course 12 by metallic film, be electrically connected to a pair of leg 14 of heat conduction layer 13 or the like.The flat shape of substrate 11 is rectangles, and the flat shape of the flat shape of heat insulation course 12 and heat conduction layer 13 equally also is a rectangle.In addition, heat conduction layer 13 should be formed at least one surface of substrate 11.
As above the ripple transmitter 10 of structure when passing to electric current between the leg 14 of heat conduction layer 13 both sides, can produce unexpected temperature variation on the heat conduction layer 13, so that the air that contacts with heat conduction layer 13 produces unexpected temperature variation (thermal shock).In other words, thermal shock acts on and heat conduction layer 13 contacted air.The air that contacts with heat conduction layer 13 expands when the temperature of heat conduction layer 13 raises, and shrinks when the temperature of heat conduction layer 13 reduces.Therefore, the sound wave of propagating in air can produce by the energising of suitable control heat conduction layer 13.
As mentioned above, the thermoinduction sonic generator of composition ripple transmitter 10 convert the expansion of media (air) to and shrink by the unexpected temperature variation on the heat conduction layer 13 that will be corresponding with energising and be created in the sound wave of propagating in the air.In first embodiment, heat conduction layer 13 is as heat conductor, but the thermoinduction sonic generator should have the heat conductor of at least one thin sheet form.For example, the aluminum thin plate can be used as heat conductor.
For example, P type silicon plate is as substrate 11, and thermal insulation layer 12 is formed by the porous silicon layer with 60%-70% in ripple transmitter 10.As the porous silicon layer of thermal insulation layer 12 usefulness, by in the electrolytic solution of forming by the potpourri of hydrogen fluoride hydrolyzate and ethanol, forming to carrying out anodization as the part of the silicon plate of substrate 11.
The porous silicon layer that is formed by anodization comprises the microcrystal silicon (milli crystal silicon) of a lot of millimicrons grain size number. in addition, poriness increase the time, the pyroconductivity of porous silicon layer and thermal capacity will diminish. therefore, pyroconductivity by making thermal insulation layer 12 and thermal capacity are less than the pyroconductivity and the thermal capacity of substrate 11, and the thermal capacity of product that makes thermal insulation layer 12 can effectively transmit the temperature variation of heat conduction layer 13 less than the thermal capacity of substrate 11 to air.
If between heat conduction layer 13 and air, can produce effective heat interchange, and beginning, substrate 11 can effectively receive the heat from thermal insulation layer 12, therefore, heat from thermal insulation layer 12 can be blazed abroad effectively, so just might stop heat accumulation from heat conduction layer 13 to thermal insulation layer 12.As everyone knows, by to having 148W/ (mk) pyroconductivity and 1.63 * 10 6J/ (m 3K) anodization of the monocrystalline silicon plate of thermal capacity and form have a porous porous silicon layer of 60%, have the pyroconductivity and 0.7 * 10 of 1W/ (mk) 6J/ (m 3K) thermal capacity.In first embodiment, thermal insulation layer 12 is by having 70% poriness, the pyroconductivity and 0.5 * 10 of 0.12W/ (mk) 6J/ (m 3K) porous silicon layer of thermal capacity and forming.
With regard to the material of heat conduction layer 13, can use as tungsten, tantalum, molybdenum, iridium, aluminium or other high-melting point metal.In addition,, can adopt the semiconductor material of the porous infiltration of making by anodization with regard to the material of substrate 11, as Si, Ge, SiC, GaP, GaAs, InP etc.
For ripple transmitter 10, the thickness of substrate is 300-700 μ m, and the thickness of thermal insulation layer 12 is 1-10 μ m, and the thickness of heat conduction layer 13 is 20-100nm, and the thickness of leg 14 is 0.5 μ m.In addition, heat conduction layer 13 is arranged to have the broadside of a 12mm, the narrow limit of a 10mm.In addition, these sizes are example, are not limited in this.
In ripple transmitter 10, heat conduction layer 13 is by the energy heating through leg 14, and sound wave produces by the temperature variation of heat conduction layer 13.When the driving incoming wave that is applied to heat conduction layer 13 (driving voltage waveform or drive current waveform), after the sine wave that for example has a frequency f 1 forms, result from the f2 of the temperature crystal oscillator frequency in the heat conduction layer 13 desirable will be the twice that drives incoming wave frequency f 1.Therefore, just might produce a sound wave by ripple transmitter 10 with the frequency that drives incoming wave frequency f 1 twice.In other words, because ripple transmitter 10 has level and smooth frequency characteristic, just might be by changing the frequency that the frequency f 1 that drives the input waveform changes the sound wave of generation widely.
In addition, when single sine wave with semiperiod was used as drive input signal between leg, approximately the sound wave with less reverberation of one-period can result from ripple transmitter 10.Optionally, for example, when the voltage wave with the Gaussian waveform shown in Fig. 5 A was applied between the leg 14 as driving input waveform, the sound wave with Gaussian waveform shown in Fig. 5 B can produce from ripple transmitter 10.In order to produce the sound wave with about one-period, the sound wave with one-period that will produce is configured to have the ultrasound wave of 50-70kHz frequency.In addition, these numerals are not limited thereto.In addition, in order to produce a sound wave with Gaussian waveform, the cycle that will produce sound wave is arranged to have the one-period of the sound wave of 50-70kHz frequency.
In order to produce the sound wave with the Gaussian waveform shown in Fig. 5 B from ripple transmitter 10, for example, the circuit shown in Fig. 6 is used as driving circuit 20.Driving circuit 20 disposes direct supply E, is connected the electric capacity at direct supply two ends by switch SW, is connected the thyristor Th at capacitor C two ends, and an inductance L, the series circuit of resistance R 1 and protective resistance R2.Ripple transmitter 10 is connected the two ends of protective resistance R2.Driving circuit 20 also has the timing controller (not shown) of a control by the timing of ripple transmitter 10 emitting sound wave, therefore, not only the closure of switch/disconnect but also the timing controling signal that is applied to thyristor Th all can be controlled by timing controller.
In the structure of as shown in Figure 6 driving circuit 20, when switch SW is in closed state, electric charge accumulates to capacitor C from direct supply E, therefore capacitor C is recharged. because timing controller is surveyed the voltage at capacitor C two ends, when the voltage at capacitor C two ends surpasses predetermined critical, the timing controller cut-off switch also applies control signal to the door of thyristor Th. when thyristor Th has used control signal by timing controller output, thyristor Th conducting, voltage is the two ends that are added to the leg 14 of ripple transmitter 10. then, produce with the corresponding sound wave of the temperature variation of heat conductor. by setting the inductance value of suitable inductance L, and the resistance value of resistance R 1, have leg 14 two ends that the driving voltage waveform with Gaussian waveform shown in Fig. 5 A can be applied to ripple transmitter 10.
Next, the condenser microphone of forming ripple receiving equipment 30 is described.This condenser microphone is used micro-processing technology and is made.For instance, shown in Fig. 7 A and Fig. 7 B, this condenser microphone comprises a rectangular frame 31 and is arranged on a lip-deep cantilever pressure receiving unit 32 of this rectangular frame 31.This framework 31 is to form by offering an opening 31a who penetrates this silicon chip in thickness orientation, a silicon chip upper edge.This pressure receiving unit 32 is formed on the both sides that described framework 31 opposes mutually.
On the surface of described framework 31, be coated with thermal oxide film 35, on this thermal oxide film 35, be covered with silicon oxide film 36, on this silicon oxide film 36, be covered with silicon nitride film 37.The stiff end of this pressure receiving unit 32 is supported on the described framework 31 via described silicon nitride film 37, the free end of this pressure receiving unit 32 faces this silicon nitride film 37, and between the free end and this silicon nitride film 37 of this pressure receiving unit 32, one spacing is arranged along above-mentioned silicon chip thickness direction.
By metallic film, such as chromium thin film, the fixed electorde 33a that makes is formed on the described silicon nitride film 37 over against described pressure receiving unit 32 free-ended parts.And by metallic film, such as chromium thin film, the movable electrode 33b that makes is formed on the surface of described dorsad silicon nitride film 37 of described pressure receiving unit 32.
In addition, a silicon nitride film 38 is formed on another surface of described framework 31.Described pressure receiving unit 32 is made of a silicon nitride film, and the production process of this silicon nitride film is different from above-mentioned silicon nitride film 37 and 38.
In the ripple receiving equipment 30 of condenser microphone shown in Figure 7, form a capacitor as electrode by utilizing described fixed electorde 33a and described movable electrode 33b.When described pressure receiving unit 32 receives the pressure of sound wave, this pressure receiving unit 32 moves, therefore, the distance between described fixed electorde 33a and described movable electrode 33b changes, and the electric capacity between described fixed electorde 33a and described movable electrode 33b also changes.When applying a direct current bias voltage between the leg (not shown) on described fixed electorde 33a and described movable electrode 33b, with consistent by the acoustic pressure that sound wave drew, trickle variation can take place in the voltage between described leg, and therefore, sound wave energy is converted into electric signal.
Condenser microphone as the ripple receiving equipment is not limited to the represented structure of Fig. 7 A and 7B.Can handle a silicon chip by utilizing micro-processing technology, it is opposed and have the fixed head of many vent ports and a distance piece that is used to limit spacing between described vibrating membrane and the fixed head when described vibrating membrane is not received sound wave with this vibrating membrane to form a vibrating membrane that receives sound wave, one.One movable electrode is arranged on the described vibrating membrane, and a fixed electorde is arranged on the described fixed head.
Simultaneously, the resonance-characteristic factor Q of thermoinduction sonic generator shown in Figure 4 is approximately 1, and the resonance-characteristic factor Q of condenser microphone shown in Fig. 7 A and the 7B is between 3 to 4.These two quality factor are much smaller than the quality factor of piezoelectric device.Therefore, in first embodiment, when described thermoinduction sonic generator as described ripple transmitter 10 and described condenser microphone during as described ripple receiving equipment 30, compare as traditional acoustic detector of ripple transmitter and ripple receiving equipment with utilizing piezoelectric device, can increase the angular resolution of acoustic detector widely.Fig. 8 has represented the resonance-characteristic factor Q of this device and the relation between the angular resolution.As can be seen from Figure 8, utilize the angular resolution of the ripple transmitter 10 of thermoinduction sonic generator to be approximately 5 degree, utilize the angular resolution of the ripple receiving equipment 30 of described condenser microphone to be in 9 and spend between 10 degree.
To use simultaneously as the condenser microphone of ripple receiving equipment 30 and thermoinduction sonic generator even there is no need as ripple transmitter 10. only the thermoinduction sonic generator as ripple transmitter 10, and as traditional acoustic detector piezoelectric device when the ripple receiving equipment 30, or only condenser microphone is used as ripple receiving equipment 30, and as traditional acoustic detector, piezoelectric device is used as ripple transmitter 10, compare as traditional acoustic detector of ripple transmitter and ripple receiving equipment with using piezoelectric device, also can increase the angular resolution of described acoustic detector.
As mentioned above, described acoustic detector in first specific embodiment, use one by air being applied sound wave generation equipment that thermal shock produces sound wave, make the resonance-characteristic factor Q of this ripple transmitter 10 be significantly smaller than the resonance-characteristic factor Q of described piezoelectric device as ripple transmitter 10.Like this, compare with the situation of utilizing piezoelectric device to be used as the ripple transmitter as traditional acoustic detector, the reverberation time that is included in from described ripple transmitter 10 emitting sound wave can be shortened.In other words, and compare during the traditional reverberation component, occur in reverberation component in 10 emitting sound wave of ripple transmitter during can be shortened.
In addition, the condenser microphone that the acoustic pressure with sound wave is converted to changes in capacitance makes the resonance-characteristic factor Q of each ripple receiving equipment 30 be significantly smaller than the resonance-characteristic factor Q of described piezoelectric device as ripple receiving equipment 30.Like this, compare as the situation of ripple receiving equipment with utilize piezoelectric device as traditional acoustic detector, the reverberation time that is included in from the ripple received signal of each ripple receiving equipment 30 outputs can shorten.In other words, compare, be included in can shorten during reverberation component took place from the ripple received signal of each ripple receiving equipment 30 output with traditional situation.
Therefore, according to the acoustic detector described in first specific embodiment, with use piezoelectric device as ripple transmitter and ripple receiving equipment and can detect the distance of an object and traditional acoustic detector in this object orientation of living in is compared, not only can shorten by be included in 10 emitting sound wave of described ripple transmitter the caused dead band of reverberation component and by the dead band that reverberation component causes in the ripple received signal that is included in 30 outputs of described ripple receiving equipment, and can improve the angular resolution of described acoustic detector.
When the quality factor of the resonance characteristic of described ripple transmitter 10 and described ripple receiving equipment 30 were equal to or less than 10, described acoustic detector can provide enough performances.When their resonance-characteristic factor Q is equal to or less than 5, be preferably.Also can detect object 2 residing orientation although can detect the distance of object 2 in the configuration of the acoustic detector described in first specific embodiment, but, can dispose the distance that this acoustic detector is used for only detecting object 2, perhaps only survey object 2 residing orientation.
Second embodiment
Next, an acoustic detector that is described with reference to the drawings is consistent with the second embodiment of the present invention.The acoustic detector that second embodiment relates to, the distance that can detect an object can detect this object orientation of living in again, so that distinguish the three-dimensional position of this object.The basic structure of the acoustic detector of second embodiment is identical in fact with the basic structure of the described acoustic detector of first embodiment, and just ripple transmitter 10 is different with the structure of the driving circuit 20 of forming wave launcher 1, as shown in Figure 9.So, only the difference of the two to be illustrated, the explanation and the description of other structures are omitted.
Ripple transmitter 10 in a second embodiment is the thermoinduction sonic generators by thermal shock generation sound wave, and the electrode 19 with a pair of mutual opposition, has one at interval between this is to electrode 19.When producing spark discharge when applying predetermined voltage between the electrode 19 at described ripple transmitter 10, thermal shock acts on air, makes sound wave produce.The resonance-characteristic factor Q of this ripple transmitter 10 is approximately 2.Therefore, have between short emergence period and the sound wave of short reverberation time, can be by described ripple transmitter 10 emissions of second embodiment.
The driving circuit 20 that is used to drive this ripple transmitter 10 is configured by certain way, make capacitor C1 be connected between the two ends of direct supply E1 via a charge switch SW1 who is used for this capacitor C1 charging, and this ripple transmitter 10 is used to make the discharge switch SW2 of capacitor C1 discharge to be connected between the two ends of capacitor C1 via one. in addition, this driving circuit 20 has a timing controller (not shown), be used for controlling from the launch time of the sound wave of ripple transmitter 10, be similar to the situation among first embodiment, make that conducting/disconnection each time of charge switch SW1 and discharge switch SW2 is controlled by this timing controller. in this driving circuit 20, charge switch SW1 and discharge switch SW2 be conducting simultaneously never.
When charge switch SW1 conducting, capacitor C1 charging.Because described timing controller is surveyed the voltage between the capacitor C1, when the voltage between the pole plate of described capacitor C1 surpass a predetermined critical (such as, the sparking voltage of one flashing discharge between the electrode 19 of described ripple transmitter 10) time, this timing controller cuts off charge switch SW1, subsequently, this timing controller conducting discharge switch SW2.
In driving circuit shown in Figure 9 20, accumulate on the capacitor C1 from the electric charge of direct supply E1.When the voltage between capacitor C1 two-plate surpasses predetermined critical, be applied on the discharge switch SW2 from the control signal of described timing controller, make discharge switch SW2 conducting.Like this, the voltage that is added between two electrodes 19 of described ripple transmitter 10 is equal to or greater than described sparking voltage, and spark discharge takes place.By the spark discharge between described electrode 19, thermal shock acts on electrode 19 ambient airs, makes described air produce sound wave by expanding and shrinking.By perpendicular to the spark discharge on the plane of described electrode 19 directions respect to one another, can produce omnibearing sound wave.In addition, the described sound wave that produces by spark discharge comprises the frequency component of relative wider bandwidth.
The 3rd embodiment
Next, an acoustic detector of description is consistent with the third embodiment of the present invention.The acoustic detector that the 3rd embodiment relates to, the distance that can detect an object can detect the residing orientation of this object again, so that distinguish the three-dimensional position of this object.The basic structure of the acoustic detector of the 3rd embodiment, identical in fact with the basic structure of the described acoustic detector of first embodiment, just the structure of the driving circuit of ripple transmitter 10 and composition wave launcher 1 is different.Therefore, only the difference of the two is illustrated.
In the wave launcher 1 of the 3rd embodiment, the thermoinduction sonic generator that is used as ripple transmitter 10 comprises: a heating part, and this heating part has low heat capacity and low heat conductivity; One laser aid, such as, the semiconductor laser instrument is used for heating this heating part (because of apparent, so do not illustrate in the drawings) by the radiation of laser beam.Driving circuit 20 is being controlled the driving of this laser aid, so that heat this heating part, makes by producing sound wave to applying thermal shock with the contacted air of this heating part.According to the described acoustic detector of the 3rd embodiment, have between the short emergence period and the sound wave of short reverberation time, can be by described ripple transmitter 10 emissions.
The 4th embodiment
Next, with reference to the accompanying drawings, the location detection system of use one acoustic detector of description is consistent with the fourth embodiment of the present invention.In the location detection system shown in Figure 10 A, a mobile object 4, the shopping cart such as moving on the floor in a buildings 100 is assumed to the object that will survey.Such location detection system can detect the position of most mobile objects 4 simultaneously, and therefore, each mobile object 4 all has its intrinsic identifying information.
On described mobile object 4, a ripple transmitter unit 110 is installed, this ripple transmitter unit 110 comprises a wave launcher 1 and one drive circuit 20; This wave launcher 1 has one can launch sound wave, as the ripple transmitter 10 of sound source, this driving circuit 20 is used for intermittently driving this ripple transmitter 10.On the other hand, precalculated position on the ceiling 200 of described buildings is equipped with a ripple receiving element 120, and this ripple receiving element 120 comprises that one has and a plurality ofly is used to receive by the described wave launcher 1 ripple receiver 3 of the ripple receiving equipment 30 of emitting sound wave intermittently.
The described location detection system of the 4th embodiment is one to move freely measuring system, in order to follow the tracks of moving of described mobile object 4, this moves freely measuring system and requires to be used for measuring as the relative position of described mobile object 4 with respect to the relative position of described ripple receiver 3 with described wave launcher 1 to move freely. with regard to ripple transmitter 10, this location detection system utilized a thermoinduction sonic generator (such as, applied in first embodiment), and one drive circuit 20, yet the structure of this driving circuit 20 is the same in fact with structure in first embodiment., be not limited to these examples, also can adopt in the ripple transmitter 10 described in the second and the 3rd embodiment and the structure of driving circuit 20.
As shown in figure 11, ripple transmitter unit 110 comprises: a trigger pip transmitter 63 is used to make and uses up or the radio wave transmission trigger pip; One drive circuit 64 is used to drive this trigger pip transmitter 63; One identifying information signal projector 65, be used to make use up, radiowave or the intrinsic identifying information signal of sound wave emissions; One drive circuit 66 is used to drive identifying information signal projector 65; One control module 67 is used to control described driving circuit 20,64 and 66; And top ripple transmitter of mentioning 10 and the driving circuit 20 that is used to drive this ripple transmitter 10.
The timing of timing that the timing that sound wave begins to launch from described wave launcher 1, trigger pip begin to launch from described trigger pip transmitter 63 and described identifying information signal projector 65 emission identifying information signals is controlled by described control module 67.Described control module 67 mainly is made up of a microcomputer, and each function of above-described this control module 67 is to realize by the proper procedure of carrying out in this microcomputer.
Described ripple receiving element 120 comprises: ripple receiver 3; One trigger pip receiver 73 is used for that output one triggers received signal when the trigger pip received from 63 emissions of described trigger pip transmitter; One identification signal receiver 75 is used to receive the identifying information signal that identifying information signal projector 65 is launched; One position calculator 72, be used for according to from the ripple received signal of described ripple receiver 3 outputs with from the trigger received signal of described trigger pip receiver 73 outputs, calculate with the described wave launcher 1 of output with respect to the relative position of described ripple receiver 3 (described wave launcher 1 orientation of living in and to the distance of this wave launcher 1); One timer 76 is used for exporting the time (hereinafter to be referred as triggering time of reception) when receiving the triggering received signal that comes from described trigger pip receiver 73; One storer 74 is used to store result of calculation from described position calculator 72 outputs (described wave launcher 1 orientation of living in and to the distance of described wave launcher 1), and the triggering time of reception that this result of calculation is exported by time sequence and described timer 76 is corresponding.
Be stored in the triggering time of reception in the storer 74, (that is to say with the distance that reaches described wave launcher 1 in the described wave launcher of each triggering time of reception 1 orientation of living in, with be installed in wave launcher 1 relative position on each mobile object 4 by the relevant data of time sequence variation), be converted to the data set of the data transmission format of output unit 78 by control module 77, so that output to a management equipment, such as the outer computer of this output unit 78 of connection.For example, with regard to this output unit 78, can use a serial transmission interface as TIA/EIA-232-E or USB, perhaps can use a parallel transmission interface as the scsi interface.The above-mentioned functions of control module 77 realizes by carry out a proper procedure in microcomputer.
For instance, when using up as described trigger pip, a light emitting diode is used as described trigger pip transmitter 63.Additionally, for instance, when using radiowave as described trigger pip, a wireless transmitter is used as described trigger pip transmitter 63.Because light and radio wave propagation velocity far faster than the speed of sound wave, arrive in the time range of described ripple receiving element 120 from described ripple transmitter unit 110 at sound wave, are considered as zero during light or the radiowave arrival.
For instance, when using up as described identifying information signal, a light emitting diode is used as described identifying information signal projector 65.Additionally, for instance, when with radiowave during as described identifying information signal, a wireless transmitter is used as described identifying information signal projector 65.In addition, for instance, when with sound wave during as described identifying information signal, with described thermoinduction sonic generator as described identifying information signal projector 65.
Shown in Figure 10 B, the ripple receiver 3 of described ripple receiving element has a plurality of ripple receiving equipments 30 (as one for example, four ripple receiving equipments shown in the figure), each ripple receiving equipment is used for receiving from ripple transmitter 10 emitting sound wave, and the sound wave that is received being converted to the sound wave received signal of electric signal. each ripple receiving equipment 30 is arranged on the same substrate 39 according to the mode of two dimension. with the distance L between the center of described ripple receiving equipment 30 (spacing of layout), the size that is set to a wavelength of the sound wave that described ripple transmitter 10 produces be desirable (for example, 0.5 to 5 times of wavelength to described sound wave) if. the distance between the center of described ripple receiving equipment 30 is less than half of described wave length of sound, the mistiming that described sound wave arrives two ripple receiving equipments 30 of adjacency becomes too short and can not detect this mistiming. for instance, with regard to ripple receiving equipment 30, can adopt the condenser microphone described in first embodiment. because the quality factor that described condenser microphone had are much smaller than the quality factor of described piezoelectric device, so might obtain a frequency range that can receive sound wave.
For instance, when light as from the trigger pip of described trigger pip transmitter 63 emissions the time, a photodiode is used as described trigger pip receiver 73.Additionally, for instance, when using radiowave as described trigger pip, a radiowave receiving antenna is used as described trigger pip receiver 73.With regard to described trigger pip receiver 73, can use one can receive described trigger pip, this trigger pip is converted to the device that an electric signal (triggering received signal) is also exported this electric signal.For instance, when light was used as the identifying information signal of being launched by described identifying information signal projector 65, a photodiode was used as described identifying information signal receiver 75.
Additionally, for instance, when with radiowave during as described identifying information signal, a radiowave receiving antenna is used as described identifying information signal receiver 75.In addition, for instance, when with sound wave during as described identifying information signal, a condenser microphone is used as described identifying information signal receiver 75.With regard to described identifying information signal receiver 75, can use one can receive described identifying information signal, be the device that the identifying information electric signal is also exported this electric signal with this identifying information conversion of signals.The phase differential between the sound wave that described position calculator 72 is received according to the ripple receiving equipment 30 of described ripple receiver 3 and the layout of described ripple receiving equipment 30 obtain a position angle, and this position angle shows that described wave launcher 1 is with respect to described ripple receiver 3 present positions (described sound wave from direction).
Next, described position calculator 72 is described.In order to simplify description, the ripple receiving equipment 30 of described ripple receiver 3 arranges at grade according to the mode of one dimension, as shown in figure 12.In addition, Figure 12 is identical in fact with Fig. 2, just the number difference of ripple receiving equipment 30.
When a driving voltage with waveform of sinusoidal wave half period, when being added on the heat conductor layer 13 of the thermoinduction sonic generator of forming ripple transmitter 10, the ripple received signal of ripple receiving equipment 30 shown in Figure 12 is illustrated in Figure 13 A respectively in 13C.Figure 13 A has showed the waveform of the ripple received signal that the ripple receiving equipment 30 that is configured in extreme higher position among Figure 12 is exported, and Figure 13 B has showed the waveform of the ripple received signal that the ripple receiving equipment 30 that is configured in centre position among Figure 12 is exported.Figure 13 C has showed the waveform of the ripple received signal that the ripple receiving equipment 30 that is configured in extreme lower position among Figure 12 is exported.
Described position calculator 72 comprises a signal processor 72c, the phase differential of the sound wave that this signal processor 72c can be received according to the ripple receiving equipment 30 of described ripple receiver 3 and the layout of described ripple receiving equipment 30 are measured described wave launcher 1 with respect to described ripple receiver 3 residing positions (described sound wave from direction).
Described signal processor 72c comprises: a delay feature, be used for according to the arrangement of described ripple receiving equipment 30 corresponding predetermined time delay, the ripple received signal that delay is exported from the ripple receiving equipment 30 of described ripple receiver 3 (this ripple received signal is an electric signal), and the ripple received signal that will postpone is as one group of output; One accumulation function is used for every group of ripple received signal that postpones superposeed; One arbitration functions, be used for comparing, and corresponding to orientation time delay that sets will surpass described critical value with peak value the time is judged as wave launcher 1 residing orientation (sound wave from direction) through the peak value of the output waveform of stack and the ripple received signal that postpones and the quantitative relation between the predetermined critical.
Described position calculator 72 comprises: A/D converter 72a, be used for the analog wave received signal from each ripple receiving equipment 30 output is converted to the digital wave received signal, and with this digital wave received signal output; One data-carrier store 72b is used for the pre-standing wave reception period that begins according to the input from the triggering received signal that comes from described trigger pip receiver 73, and storage is from the result of described A/D converter 72a output; And, described signal processor 72c.
Described signal processor 72c, a ripple reception period is set when described triggering received signal data memory input 72b, and only drive described A/D converter 72a at this ripple reception period, be used for obtaining wave launcher 1 residing orientation by the data that are stored in the ripple received signal of data-carrier store 72b at this ripple reception period.Described signal processor 72c waits according to a microcomputer and is configured.In addition, [quantity of ripple receiving equipment 30] x[is from the data of the signal of the reception of each ripple receiving equipment] data be kept among the described data-carrier store 72b.
In the described location detection system of the 4th embodiment, a thermoinduction sonic generator is used as the ripple transmitter 10 of described wave launcher 1.Therefore, suppose that the sound wave from both direction arrives described ripple receiver 3, as shown in figure 14, and the acoustic ratio that comes from the direction with azimuth angle theta 1 early arrives from the sound wave of the direction with azimuth angle theta 2.To shown in the 15C, two groups of ripple received signals seldom overlap each other as Figure 15 A.Therefore, can access the wave launcher 1 residing azimuth angle theta 1 that is installed on the described mobile object 4 and θ 2 (sound wave from direction).
Figure 15 A has showed the waveform of two ripple received signals of the ripple receiving equipment 30A that is in the extreme higher position in Figure 14.Figure 15 B has showed the waveform of two ripple received signals of the ripple receiving equipment 30B that mediates in Figure 14.Figure 15 C has showed the waveform of two ripple received signals of the ripple receiving equipment 30C that is in upper/lower positions in Figure 14.In every width of cloth figure of 15C, the waveform that is in the left side is corresponding with the sound wave that arrives from the direction with azimuth angle theta 1 at Figure 15 A, and the waveform that is in the right is corresponding with the sound wave that arrives from the direction with azimuth angle theta 2.
When sound wave arrives ripple receiving equipment 30C, when arriving distance (delay distance) between the center of the wavefront of sound wave of ripple receiving equipment 30B and adjacent another ripple receiving equipment 30C and being flagged as symbol " d1 " (referring to Figure 14), the wavefront of described sound wave arrives the required time difference Δ t1 of ripple receiving equipment 30B (referring to Figure 15 A to 15C), calculates according to formula Δ t1=d1/c=Lsin θ 1/c.On the other hand, when sound wave arrives ripple receiving equipment 30A, when arriving distance (delay distance) between the center of the wavefront of sound wave of ripple receiving equipment 30B and adjacent another ripple receiving equipment 30A and being flagged as symbol " d2 " (referring to Figure 14), the wavefront of described sound wave arrives the required mistiming Δ t2 of ripple receiving equipment 30B (referring to Figure 15 A to 15C), calculates according to formula Δ t2=d2/c=Lsin θ 2/c.
The signal processor 72c of described position calculator 72 comprises a distance calculation function, be used for receiving relation between the time of trigger pip and time that ripple receiving equipment 30 is received sound wave, calculate the distance of described ripple receiver 3 to described wave launcher 1 according to trigger pip receiver 73.Since adopt as light or radiowave far faster than the signal of sound wave as trigger pip, 120 is shorter during required from described ripple transmitter unit 110 emission trigger pips to described ripple receiving element, levels off to zero.Described signal processor 72 utilizes mistiming T and acoustic velocity to calculate distance between ripple receiver 3 and the wave launcher 1.This mistiming T is for from receiving the time of described trigger pip ST, to receiving the poor of time of receiving ripple received signal SP behind this trigger pip ST the first time, as Figure 16 A to shown in the 16C.The distance calculation function of described signal processor 72c can realize by utilizing a microcomputer of forming described signal processor 72c to carry out proper procedure.
In the location detection system of the 4th embodiment above-mentioned, ripple receiving element 120 is installed on the ceiling 200, mobile object 4 is in ripple receiver 3 detectable area on every side of this ripple receiving element 120, and the wave launcher 1 residing orientation that is installed on this mobile object 4 can be detected.With a plurality of acoustic receivers (ripple receiver) are compared by the traditional location detection system that preset distance is installed on the ceiling, the application's location detection system becomes simpler, and the layout of ripple receiver 3 becomes easier.
In the acoustic detector of the location detection system of the 4th embodiment, produce sound wave by air being applied thermal shock, resonance-characteristic factor Q produces equipment much smaller than the sound wave of the resonance-characteristic factor Q of piezoelectric device, is used as described ripple transmitter 10; And, resonance-characteristic factor Q is used as ripple receiving equipment 30. like this much smaller than the condenser microphone of the resonance-characteristic factor Q of piezoelectric device, with utilize described piezoelectric device and compare with the situation of ripple receiving equipment as the ripple transmitter, not only can shorten by the caused dead band of reverberation component and the caused dead band of reverberation component that is included in from the ripple received signal of described ripple receiving equipment 30 outputs that are included in from described ripple transmitter 10 emitting sound wave, and can improve the angular resolution of acoustic detector.
In the building that the described location detection system of the 4th embodiment is suitable for, when floor 100 is smooth, 100 constant to the height of ceiling 200 from the floor, and, the size constancy of mobile object 4 (that is to say, 100 height to the end face of this mobile object 4 are constants from the floor) time, comprise ripple receiver 3 and be parallel to the plane of described ceiling 200, and comprise wave launcher 1 and be parallel to distance between the plane of described ceiling 200, be constant, with the location independent of described mobile object 4 on floor 100.Thereby, when such one constant distance, as known distance information (elevation information), when pre-depositing in the storer of microcomputer, can obtain the distance between described ripple receiver 3 and the described wave launcher 1 according to this range information and the residing orientation of described wave launcher.
On the other hand, even a step 100b is arranged on described floor 100, also can receive relation between the time of trigger pip and time that described ripple receiving equipment 30 is received sound wave according to trigger pip receiver 73, by described signal processor 72c, obtain the distance between the wave launcher 1 of the ripple receiver 3 of described ripple receiving element 120 and described ripple transmitter unit 110 exactly.
Described control module 77 has an identification of sound source function, is used for according to the identifying information of exporting and be stored in described storer 74 from described identifying information signal receiver 75, and identification is installed in the wave launcher 1 on each mobile object 4 respectively.Like this, even when having most mobile objects 4 to be positioned at described ripple receiver 3 can to receive the detectable area of sound wave, also can access the relative position of described wave launcher 1, the relative position of just described mobile object 4 with respect to described ripple receiver 3.
For instance, when defining four mobile objects 4, can utilize the identifying information signal that comprises different pulse trains respectively, as Figure 18 A to shown in the 18D, the identifying information signal of being launched as the identifying information signal projector 65 of the ripple transmitter unit 110 of described mobile object 4.In this case, resulting result of calculation of signal processor 72c and the identifying information by described position calculator 72 is stored in the described storer 74 together.In control module 77, the distance between wave launcher 1 orientation of living in that obtains by position calculator 72 (sound wave from direction) and ripple receiver 3 and the wave launcher 1, which ripple transmitter unit 110 can distinguish out is.
In addition, when supposition use up or radiowave as the identifying information signal, and when only having a ripple transmitter unit 110 to be in ripple receiver 3 can to receive in the detectable area of sound wave, from the identifying information of described identifying information signal receiver 75 outputs with from the relation between the ripple received signal of ripple receiving equipment 30 outputs of described ripple receiving element 120, be illustrated in Figure 19 A in 19C.Figure 19 A has showed the waveform of the ripple received signal of the ripple receiving equipment 30 that is in the extreme higher position in Figure 12.Figure 19 B has showed the waveform of the ripple received signal of the ripple receiving equipment 30 that mediates in Figure 12.Figure 19 C has showed the waveform of the ripple received signal of the ripple receiving equipment 30 that is in extreme lower position in Figure 12.In this case, described identifying information signal projector 65 can use as above-described trigger pip transmitter 63, and described identifying information signal SI can be used as trigger pip.In addition, can be in described position calculator 72 with above-mentioned identification of sound source function setting.
In the described location detection system of the 4th embodiment, trigger pip transmitter 63 is arranged on the described ripple transmitter unit 110, trigger pip receiver 73 is arranged on the described ripple receiving element 120, but, the structure of described location detection system is not limited thereto. and opposite with above description, described trigger pip transmitter 63 can be arranged on the ripple receiving element 120, and described trigger pip receiver 73 is arranged on the ripple transmitter unit 110. in this case, the described driving circuit 20 of control module 67 controls of described ripple transmitter unit 110, so that output according to described trigger pip receiver 73, from ripple transmitter 10 emission sound waves, and, the signal processor 72c of described position calculator 72, according to the relation between time of trigger pip transmitter 63 emission trigger pips and time that ripple receiving equipment 30 is received sound wave, obtain the distance of described wave launcher 1. in addition, can construct the control module 67 of described ripple transmitter unit 110, make it one receive from the triggering received signal of trigger pip receiver 73 output, perhaps, drive described driving circuit 20. triggering received signal through after during predetermined from receiving
In addition, in above-mentioned location detection system, wave launcher 1 is installed on the mobile object 4, and ripple receiver 3 is arranged on one on the fixed surface of described ceiling 200.
Yet, described wave launcher 1 can be arranged on the fixed surface, and, described ripple receiver 3 is installed on the mobile object 4.
The Japanese patent application 2004-219330 of this application to propose in Japan, 2004-219331,2005-5639,2005-5640 and 2005-86787 are the basis, therefore with reference to having absorbed related content wherein.
Describe although by way of example and in conjunction with the accompanying drawings the present invention has been done fully,, be understood that easily variations and modifications are apparent to one skilled in the art.Therefore, as long as these variations and revise and not break away from protection scope of the present invention, all should regard them as to be included among protection scope of the present invention.

Claims (5)

1. acoustic detector comprises:
One wave launcher, this wave launcher have one and can launch the ripple transmitter of sound wave and be used to drive the driving circuit of this ripple transmitter; With
One ripple receiver, this ripple receiver has direct reception by described wave launcher institute emitting sound wave, or receives by described wave launcher and launched and through an object reflected sound wave, and the sound wave that receives is converted to the ripple receiving equipment of the ripple received signal of electric signal, it is characterized in that
A plurality of described ripple receiving equipments are according to predetermined being disposed on the direction, a plurality of described ripple receiving equipment in addition is arranged on the same level of single circuit board and is arranged on another direction vertical with a described direction with described predetermined space, so that not only detect the distance of described object but also survey the residing orientation of described object;
Each described ripple receiving equipment all is made up of condenser microphone, and the multiple pressure that described condenser microphone will cause owing to the acoustic pressure of sound wave is converted to multiple electric signal; With
For the output with the corresponding ripple receiving equipment of the residing direction of described object is provided with different time delay, so that distinguish the ripple received signal that produces by through each object reflected sound wave.
2. acoustic detector according to claim 1, wherein,
Described ripple transmitter is that sound wave produces equipment, and described sound wave generation equipment comprises a film heat conductor, and since with the temperature variation that described heat conductor is excited corresponding described heat conductor, and air is applied thermal shock to produce sound wave.
3. acoustic detector according to claim 2, wherein,
Described sound wave generation equipment comprises: a substrate; The heat conductor layer of heat conductor is gone up, is used as on one at least one surface that is formed on this substrate; One is arranged on the heat heat insulation layer between this substrate and this heat conductor layer.
4. acoustic detector according to claim 1, wherein,
Described sound wave produces equipment, have a pair of in air electrode respect to one another, by between this is to electrode, applying a predetermined voltage, between this is to electrode, produce spark discharge, thermal shock acts on air and produces sound wave.
5. acoustic detector according to claim 1, wherein,
Described ripple receiver has a function, is used for the layout according to phase differential and those ripple receiving equipments of the ripple received signal of being exported from those ripple receiving equipments, survey the sound wave that arrives described ripple receiver from the orientation.
CN2005800252603A 2004-07-27 2005-07-27 Acoustic wave sensor Expired - Fee Related CN1989418B (en)

Applications Claiming Priority (11)

Application Number Priority Date Filing Date Title
JP219331/2004 2004-07-27
JP2004219330 2004-07-27
JP219330/2004 2004-07-27
JP2004219331 2004-07-27
JP2005005639 2005-01-12
JP005640/2005 2005-01-12
JP2005005640 2005-01-12
JP005639/2005 2005-01-12
JP086787/2005 2005-03-24
JP2005086787A JP2006220636A (en) 2004-07-27 2005-03-24 Sonic wave sensor
PCT/JP2005/014164 WO2006011650A2 (en) 2004-07-27 2005-07-27 Acoustic wave sensor

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