CN1988125A - 半导体制造用自动化物料运输系统 - Google Patents
半导体制造用自动化物料运输系统 Download PDFInfo
- Publication number
- CN1988125A CN1988125A CN 200510111678 CN200510111678A CN1988125A CN 1988125 A CN1988125 A CN 1988125A CN 200510111678 CN200510111678 CN 200510111678 CN 200510111678 A CN200510111678 A CN 200510111678A CN 1988125 A CN1988125 A CN 1988125A
- Authority
- CN
- China
- Prior art keywords
- storing box
- material storing
- transport system
- roof
- automatic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims abstract description 126
- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000000725 suspension Substances 0.000 claims description 9
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Images
Landscapes
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101116788A CN100435310C (zh) | 2005-12-19 | 2005-12-19 | 半导体制造用自动化物料运输系统 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101116788A CN100435310C (zh) | 2005-12-19 | 2005-12-19 | 半导体制造用自动化物料运输系统 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1988125A true CN1988125A (zh) | 2007-06-27 |
| CN100435310C CN100435310C (zh) | 2008-11-19 |
Family
ID=38184855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101116788A Expired - Fee Related CN100435310C (zh) | 2005-12-19 | 2005-12-19 | 半导体制造用自动化物料运输系统 |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100435310C (un) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100520706C (zh) * | 2002-06-19 | 2009-07-29 | 布鲁克斯自动技术公司 | 半导体制造用竖直传送带与空中升降机组合式自动物料搬运系统 |
| WO2004034438A2 (en) * | 2002-10-11 | 2004-04-22 | Brooks Automation, Inc. | Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
| CN1248933C (zh) * | 2002-10-28 | 2006-04-05 | 台湾积体电路制造股份有限公司 | 自动化晶圆盒传输系统及方法 |
| KR100541183B1 (ko) * | 2003-03-04 | 2006-01-11 | 삼성전자주식회사 | 스토커 및 이를 포함하는 반송 시스템 |
-
2005
- 2005-12-19 CN CNB2005101116788A patent/CN100435310C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100435310C (zh) | 2008-11-19 |
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| JP2008100801A (ja) | 基板保管庫 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20111108 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081119 Termination date: 20181219 |