CN1988125A - Automatic material transport system for semiconductor production - Google Patents
Automatic material transport system for semiconductor production Download PDFInfo
- Publication number
- CN1988125A CN1988125A CN 200510111678 CN200510111678A CN1988125A CN 1988125 A CN1988125 A CN 1988125A CN 200510111678 CN200510111678 CN 200510111678 CN 200510111678 A CN200510111678 A CN 200510111678A CN 1988125 A CN1988125 A CN 1988125A
- Authority
- CN
- China
- Prior art keywords
- storing box
- material storing
- transport system
- roof
- automatic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
This invention provides an automatic transportation system for materials producing semiconductors including: at least one storage box including at least one storage unit and a transportation unit with an air transportation car running on the track of the ceiling containing a mechanical arm picking up at least a set of materials from a selected storage unit and transporting them to a preset position, the height of the box is one third to one half of the distance from the floor to the ceiling, which saves cubic space in FAB.
Description
Technical field
The present invention relates to material transport equipment, particularly a kind of automatic material transport system (AMHS) that in semiconductor manufacturing shop (FAB), uses.
Background technology
Automatic material transport system is widely used in integrated circuit (IC) manufacture of microchips, and it uses the WIP memory cell in the product manufacturing environment and aerial elevating mechanism is deposited the WIP parts, and parts are transmitted between each station and process equipment.The typical manufacturing process of IC chip comprises a plurality of steps, comprising oxidation, photoetching, diffusion, deposit, cleaning, ion injection, etching etc.These technologies are carried out by different process equipments usually, for example chemical vapor deposition chamber, ion implantation chamber and etching device etc.Therefore, semiconductor wafer W IP is transmitted repeatedly between different stations and/or process equipment usually, makes each required processing step of IC chip to carry out.
Traditional AMHS that IC chip maker uses comprises a plurality of WIP material storing box (stocker) and one or more aerial lifting conveying vehicles that are used to deposit semiconductor wafer, is used on IC chip manufacturing place transfer wafers between each station and process equipment.Comprise storing a plurality of front openings, unified specification unit (FOUP) in the material storing box, be used to leave in the goods semiconductor wafer.Wafer is sent to below the elevator delivery car of advancing on the track that dangles subsequently, picks up the station and/or the equipment place that are transported to needs by the mechanical arm in the waggon and operates accordingly.Each material storing box has a plurality of movable I/O ports usually, and they combine with an internal mechanical hand (it has three or more axis of movements) so that with pack into material storing box or FOUP unloaded from material storing box of FOUP.FOUP is picked up and is placed into I/O port by lift from input port/delivery outlet.International application no be PCT/US2003/008528 U.S. Patent Publication a kind of semiconductor manufacturing with vertical carousels and the aerial box-like automatic material of elevator group transportation system, its allow aerial lift directly from be included in this system at goods (WIP) memory cell loading and unloading/unloading WIP parts.Though it improves the operating efficiency of AMHS, as existing AMHS, the volume of its material storing box is all bigger usually, and the mounting means of material storing box is gigantic.Fig. 1 is the scheme of installation of the material storing box of existing automatic material transport system, and as shown in Figure 1, track is equipped with at material storing box 2 tops, and track is fixed on the roof 1 of FAB, and the bottom of material storing box 2 is fixed on the floor 4 of FAB.The material storing box of An Zhuaning has occupied quite a few space in the FAB like this, make and seem crowded all the more in the FAB that has comprised a lot of equipment originally, not only the placing space of equipment is narrow and small, and gives mobile the caused obstacle of operating personnel between station, and moving of material storing box self is also very inconvenient.
Summary of the invention
Therefore, the purpose of this invention is to provide a kind of semiconductor manufacturing AMHS, it has the material storing box that can save space and conveniently moving, and material storing box of the prior art is bulky to take up space and awkward problem to solve.
For achieving the above object, the invention provides a kind of automatic material transport system for semiconductor production, comprise at least one material storing box, each material storing box comprises a storing unit at least; And conveying mechanism, it comprises an air transport car that moves at least described conveying mechanism on the track on roof, described air transport car comprises a mechanical arm at least, described mechanical arm picks up at least one group of material from the storing unit of selecting, and being transported to the precalculated position subsequently, the height of described material storing box is that the roof is to 1/3rd to 1/2nd of floor distance.
The top of described material storing box is connected in the roof by hitch, and the bottom of described material storing box is connected in the floor by elastic supporting mechanism.
Described hitch is a Motorized lift device.
Described Motorized lift device comprises drive disk assemblies such as motor and gear.
Described elastic supporting mechanism comprises sleeve, elastomeric element and connecting rod, and described sleeve is arranged at the floor, described elastomeric element place cover logical in, described connecting rod one end is connected in the bottom of material storing box, the other end inserts sleeve and also places on the elastomeric element.
Described elastomeric element is a spring.
The present invention also provides a kind of automatic material transport system for semiconductor production, comprises at least one material storing box, and each material storing box comprises a storing unit at least; And conveying mechanism, it comprises an air transport car that moves at least described conveying mechanism on the track on roof, described air transport car comprises a mechanical arm at least, described mechanical arm picks up at least one group of material from the storing unit of selecting, and be transported to the precalculated position subsequently, the height of described material storing box is that the roof is to 1/3rd to 1/2nd of floor distance, the top of described material storing box is connected in the roof by hitch, and the bottom of described material storing box is connected in the floor by elastic supporting mechanism.
Described hitch is the hook device.
Described hook device comprises hook and suspension ring, and described hook is connected with the suspension ring hook, and the top of material storing box is connected to the roof by described hook and suspension ring.
Described elastic supporting mechanism comprises sleeve, elastomeric element and connecting rod, and described sleeve is arranged at the floor, described elastomeric element place cover logical in, described connecting rod one end is connected in the bottom of material storing box, the other end inserts sleeve and also places on the elastomeric element.
Compared with prior art, the height of the material storing box of automatic material transport system for semiconductor production of the present invention only be original automatic material transport system the material storing box height 1/3rd to 1/2nd.Being installed as on the track that the top is installed on the FAB roof of the material storing box of original automatic material transport system, and the bottom is installed on the track on FAB floor, as seen is gigantic mounting means, has taken very big solid space.And the height of the material storing box of automatic material transport system for semiconductor production of the present invention only is 1/3rd to 1/2nd of original material storing box height, and its top is connected in the roof by hitch, and its bottom is connected in the floor by elastic supporting mechanism.Whole like this material storing box has only taken FAB roof half height to the floor.The material storing box of An Zhuaning has been saved the solid space in the FAB greatly like this, for putting of miscellaneous equipment provides the space, and has made things convenient for operating personnel's moving between station, and material storing box self also is convenient to move.
Description of drawings
Fig. 1 is the scheme of installation of the material storing box of existing automatic material transport system;
Fig. 2 is the schematic diagram of first embodiment of automatic material transport system material storing box of the present invention;
Fig. 3 is the end view of first embodiment of automatic material transport system material storing box of the present invention;
Fig. 4 is the schematic diagram of second embodiment of automatic material transport system material storing box of the present invention.
Fig. 5 is the structural representation of automatic material transport system elastic supporting mechanism of the present invention.
Among the figure:
1, roof
2, material storing box
3, storing unit
4, floor
5, elastic supporting mechanism
6, hook device
7, Motorized lift device
8, connecting rod
9, sleeve
10, spring
11, track
12, I/O window
Embodiment
The invention discloses a kind of automatic material transport system for semiconductor production, it can save the solid space in the FAB greatly.Automatic material transport system disclosed by the invention is arranged in the aerial lift of each material storing box top to be realized packing into and taking out to the material of material storing box in vertical carousels WIP memory cell by utilization.
Automatic material transport system of the present invention can be applied in the cleaning ambient that the product manufacturing environment for example is used for making the IC chip and deposit and carry the WIP parts automatically between each station and/or processing machine.Comprise WIP memory cell and aerial elevator delivery subsystem.Material storing box comprises a plurality of input and output windows, and box type container FOUP is positioned in the window.Aerial elevator delivery subsystem comprises suspended track and a plurality of aerial elevator delivery car that moves on suspended track.In typical mode of operation, the WIP parts are placed among the box type container FOUP and carry.Aerial elevator delivery car travels along suspended track, and is parked in and is suitable for that FOUP is unloaded to the position of input window or from pack into the position of another FOUP of the output window of material storing box.And other aerial elevator delivery car can be awaited orders on suspended track, finishes unloading or loading FOUP and shift out track up to above-mentioned aerial elevator delivery car.
In automatic material transport system of the present invention, FOUP is unloaded to input window from aerial lift, or by the lift of packing into from output window, is perhaps picked up in material storing box by manipulator, and manipulator can be provided with nearly 3 or more axis of movement.
Among the embodiment of automatic material of the present invention transportation system, AMHS comprises aerial elevator delivery subsystem, and at least one material storing box.Vertical carousels allows the aerial lift in the aerial elevator delivery subsystem directly to pick up the WIP parts from a conveyer belt material storing box of choosing.Fig. 2 is the schematic diagram of first embodiment of automatic material transport system material storing box of the present invention.As shown in Figure 2, automatic material of the present invention transportation system can be applied to make in the cleaning ambient of IC chip.IC chip manufacturing environment comprises roof 1 and floor 4.The height of material storing box 2 is 1/3rd to 1/2nd of roof 1 to floor 4 height, it comprises at least one storing unit F OUP3, soar by hitch and be installed on roof 1 in the top of material storing box 2, the bottom of material storing box 2 is connected on the floor 4 by elastic supporting mechanism 5.Hitch in the first embodiment of the invention is a Motorized lift device 7, and it comprises drive disk assemblies such as motor and gear, can drive material storing box 2 liftings, so that the mechanical arm of air transport car picks up material from material storing box.Fig. 3 is the end view of first embodiment of automatic material transport system material storing box of the present invention.As shown in Figure 3, material storing box 2 is connected on the roof 1 by Motorized lift device 7.Material storing box 2 comprises a plurality of input and output windows 12, and FOUP3 is positioned in the window 12.Aerial elevator delivery subsystem comprises suspended track 11 and a plurality of aerial elevator delivery car (not shown) of moving on suspended track.In typical mode of operation, the WIP parts are placed among the box type container FOUP and carry.Aerial elevator delivery car travels along suspended track 11, and is parked in and is suitable for that FOUP is unloaded to the position of input window or from pack into the position of another FOUP of the output window of material storing box.And other aerial elevator delivery car can be awaited orders on suspended track 11, finishes unloading or loading FOUP and shift out track 11 up to above-mentioned aerial elevator delivery car.
Fig. 5 is the structural representation of automatic material transport system elastic supporting mechanism of the present invention.As shown in Figure 5, the elastic supporting mechanism 5 that is connected with floor 4 comprises connecting rod 8, sleeve 9 and spring 10, and sleeve 9 is arranged on the floor 4, and spring 10 places in the sleeve 9, connecting rod 8 one ends are connected in the bottom of material storing box 2, and the other end inserts sleeve 9 and also places on the spring 10.Floor 4 is fixed in by elastic supporting mechanism 5 in the bottom of material storing box 2, has saved the solid space of FAB inside 50% at least.
Fig. 4 is the schematic diagram of second embodiment of automatic material transport system material storing box of the present invention.As shown in Figure 4, in the second embodiment of the present invention, the height of material storing box 2 is similarly 1/3rd to 1/2nd of roof 14 distances to the floor, and the top of material storing box 2 is connected in roof 1 by hitch, and the bottom of material storing box 2 is connected in floor 4 by elastic supporting mechanism 5.Different is that hitch is replaced with hook device 6.This hook device 6 comprises hook and suspension ring, and hook and suspension ring are connected to the top and the roof 1 of material storing box 2, and hook is connected with the suspension ring hook.The bottom of material storing box 2 is fixed on the floor 4 by elastic supporting mechanism shown in Figure 55, and the material storing box 2 of An Zhuaning has reached the purpose of saving space in the FAB equally like this.
More than disclosed be the specific embodiment of the present invention only, but the present invention is not limited thereto.Any those skilled in the art, should drop in protection scope of the present invention variation of the present invention and distortion according to above description.
Claims (11)
1, a kind of automatic material transport system for semiconductor production comprises:
At least one material storing box, each material storing box comprise a storing unit at least; And
Conveying mechanism, it comprises an air transport car that moves at least described conveying mechanism on the track on roof, described air transport car comprises a mechanical arm at least, described mechanical arm picks up at least one group of material from the storing unit of selecting, and be transported to the precalculated position subsequently, it is characterized in that: the height of described material storing box is that the roof is to 1/3rd to 1/2nd of floor distance.
2, automatic material transport system as claimed in claim 1 is characterized in that: the top of described material storing box is connected in the roof by hitch, and the bottom of described material storing box is connected in the floor by elastic supporting mechanism.
3, automatic material transport system as claimed in claim 2 is characterized in that: described hitch is a Motorized lift device.
4, automatic material transport system as claimed in claim 3 is characterized in that: described Motorized lift device comprises drive disk assemblies such as motor and gear.
5, automatic material transport system as claimed in claim 2, it is characterized in that: described elastic supporting mechanism comprises sleeve, elastomeric element and connecting rod, described sleeve is arranged at the floor, described elastomeric element place cover logical in, described connecting rod one end is connected in the bottom of material storing box, and the other end inserts sleeve and places on the elastomeric element.
6, automatic material transport system as claimed in claim 5 is characterized in that: described elastomeric element is a spring.
7, a kind of automatic material transport system for semiconductor production comprises:
At least one material storing box, each material storing box comprise a storing unit at least; And
Conveying mechanism, it comprises an air transport car that moves at least described conveying mechanism on the track on roof, described air transport car comprises a mechanical arm at least, described mechanical arm picks up at least one group of material from the storing unit of selecting, and be transported to the precalculated position subsequently, it is characterized in that: the height of described material storing box is that the roof is to 1/3rd to 1/2nd of floor distance, the top of described material storing box is connected in the roof by hitch, and the bottom of described material storing box is connected in the floor by elastic supporting mechanism.
8, automatic material transport system as claimed in claim 7 is characterized in that: described hitch is the hook device.
9, automatic material transport system as claimed in claim 8 is characterized in that: described hook device comprises hook and suspension ring, and described hook is connected with the suspension ring hook, and the top of material storing box is connected to the roof by described hook and suspension ring.
10, automatic material transport system as claimed in claim 7, it is characterized in that: described elastic supporting mechanism comprises sleeve, elastomeric element and connecting rod, described sleeve is arranged at the floor, described elastomeric element place cover logical in, described connecting rod one end is connected in the bottom of material storing box, and the other end inserts sleeve and places on the elastomeric element.
11, automatic material transport system as claimed in claim 10 is characterized in that: described elastomeric element is a spring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101116788A CN100435310C (en) | 2005-12-19 | 2005-12-19 | Automatic material transport system for semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101116788A CN100435310C (en) | 2005-12-19 | 2005-12-19 | Automatic material transport system for semiconductor production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1988125A true CN1988125A (en) | 2007-06-27 |
| CN100435310C CN100435310C (en) | 2008-11-19 |
Family
ID=38184855
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101116788A Expired - Fee Related CN100435310C (en) | 2005-12-19 | 2005-12-19 | Automatic material transport system for semiconductor production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100435310C (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI286989B (en) * | 2002-06-19 | 2007-09-21 | Brooks Automation Inc | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
| EP2615625B2 (en) * | 2002-10-11 | 2017-05-31 | Murata Machinery, Ltd. | Overhead vehicle for an automated material handling system |
| CN1248933C (en) * | 2002-10-28 | 2006-04-05 | 台湾积体电路制造股份有限公司 | Automatic material transfer system and method |
| KR100541183B1 (en) * | 2003-03-04 | 2006-01-11 | 삼성전자주식회사 | Stocker and transfer system having the same |
-
2005
- 2005-12-19 CN CNB2005101116788A patent/CN100435310C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100435310C (en) | 2008-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10141212B2 (en) | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists | |
| US9659801B2 (en) | High efficiency buffer stocker | |
| US7578650B2 (en) | Quick swap load port | |
| US9659802B2 (en) | Method for overhead cross-system transportation | |
| US20080240892A1 (en) | Storage buffer device for automated material handling systems | |
| US8292563B2 (en) | Nonproductive wafer buffer module for substrate processing apparatus | |
| CN101752284B (en) | Automatic material conveying system with portable storage device and method of operating same | |
| TWI385111B (en) | Stocker | |
| KR20140089517A (en) | Load port and efem | |
| CN100435310C (en) | Automatic material transport system for semiconductor production | |
| TW200521055A (en) | Wafer transportation system | |
| KR102656725B1 (en) | Interlayer transfer apparatus and physical distribution system including the same | |
| JP2008100801A (en) | Substrate storage warehouse |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20111108 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081119 Termination date: 20181219 |