CN1986156A - Ultraprecise grinder with two stages of feeding mechanism and its control method - Google Patents

Ultraprecise grinder with two stages of feeding mechanism and its control method Download PDF

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Publication number
CN1986156A
CN1986156A CN 200610147561 CN200610147561A CN1986156A CN 1986156 A CN1986156 A CN 1986156A CN 200610147561 CN200610147561 CN 200610147561 CN 200610147561 A CN200610147561 A CN 200610147561A CN 1986156 A CN1986156 A CN 1986156A
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feed
micro
grinding
ultra
system
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CN 200610147561
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Chinese (zh)
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李蓓智
杨建国
陈伟
潘阿毛
闫如忠
周复
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东华大学
上海第三机床厂
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Publication of CN1986156A publication Critical patent/CN1986156A/en

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Abstract

The present invention relates to ultra precise numerically controlled grinder with two stages of feeding mechanism and its control method. The grinder includes an ultra precise numerically controlled grinder; a micro feeding bench comprising a piezoelectric driver, a flexible hinge mechanism and a control system; a detection system comprising a position sensor and a size measurer; and an integrated interface system for transmitting the pulse signals to realize the integrated control of the grinder. The grinder has numerically controlling system, and increased micro feeding bench control system, monitoring system and integrated interface system. The present invention is for completing the coarse, semi-precise and precise grinding of high precision parts of optical glass, ceramic and other hard and fragile material.

Description

具有两级进给机构的超精密磨床及其控制方法 Ultra-precision grinding machine and the control method has two feeding mechanism

技术领域 FIELD

本发明属精密加工及其装备制造业范畴,涉及具有两级进给机构的超精密磨床结构及其控制方法。 The present invention is a precision machining equipment and manufacturing visible, ultra precision grinder relates to a control method and structure having two feed mechanism.

背景技术 Background technique

天线罩是一种大深度薄壳结构件,材料大多为石英陶瓷,又硬又脆、抗拉强度低,对其进行机械加工时,由于缺乏稳定可靠的工艺基准和选用不合适的磨削用量,其表面极易产生微裂纹。 The radome is a shell structure great depth, mostly silica ceramic material, hard and brittle, low tensile strength, when subjected to mechanical processing, the lack of reliable reference and selection process unsuitable grinding parameters , which is easy to produce a surface micro-cracks.

磨削光学玻璃、陶瓷天线罩等脆硬薄工件时,砂轮架进给量达到亚微米级可使磨屑成为切削塑性材料时的卷曲状,从而通过改善磨削条件,提高被磨削表面的精度和表面质量,如将光学玻璃加工成为光玻璃,即磨削成表面粗糙度数值为纳米级的透镜,使陶瓷天线罩的磨削表面不产生任何微裂纹等。 When grinding optical glass, ceramics and other brittle radome thin workpieces, wheelhead feed submicron curled can become wear debris during cutting of a plastic material, so that by improving the grinding conditions, to improve the surface to be ground accuracy and surface quality, as will be processed into an optical glass optical glass, i.e. grinding to a surface roughness value of nanoscale lens, the grinding surface of the ceramic radome does not produce any microcracks. 因此,微进给装置是磨削脆硬等特殊材料,实现精密和超精密加工精度的基本工艺装置。 Thus, the feeding means is a micro-grinding hard and brittle and other special materials, basic process means precision and ultra-precision machining accuracy.

然而,目前大多数精密磨床用于上述两种材料的磨削加工时,均存在以下几个主要问题:1、传统磨床的机械传动进给精度有限,目前,采用伺服电机、滚珠丝杠副直接驱动的磨床砂轮架最小进给分辨率为1-0.5μm,要进一步精确到0.2-0.1μm是很困难的,甚至是不可能的。 However, when most of the precision grinding machine for grinding the two materials, there are several major problems: 1, the conventional mechanical transmission feed grinder limited accuracy, current, servo motor, ball screw directly driven Grinding Machines minimum feed resolution 1-0.5μm, to be further refined to 0.2-0.1μm is very difficult, if not impossible.

2、动态补偿时的响应频率低,这是由于砂轮架及其移动部件质量很大、机械传动机构爬行等原因所致,目前,磨床性能指标都不涉及进给运动的响应频率。 2, the low frequency response of the dynamic compensation, which is due to the large mass of the wheel frame and the movable member, the mechanical linkage creep due to other reasons, at present, the performance metrics do not involve grinder feed motion frequency response.

3、直线电机进给装置虽然具有任意工作行程、9.8m/s2以上的进给加速度、系统结构简单等很多优点,但也存在成本高、发热严重、控制系统复杂、隔磁防磁效果尚不理想等主要缺点,影响了该进给系统的综合性能。 3, the linear motor feeding apparatus has any working stroke, more than 9.8m / s2 acceleration feed, and many other advantages of simple structure, but high cost, serious fever, complicated control system, magnetic flux barrier effect is not desirable and other major shortcomings affecting the feed system overall performance.

发明内容 SUMMARY

本发明的目的和要解决的技术问题在于,提供一种具有两级进给机构的超精密磨床及其控制方法,以0.1μm的最小进给量实现光学玻璃、陶瓷等脆硬材料的高精度磨削,实现对光学玻璃的镜面磨削,使陶瓷薄壁工件磨削后其表面不产生微细裂纹,由此完成高精度零件的粗-半精-精-精细磨削。 Object and technical problem to be solved by the present invention is to provide an ultra-precision grinding machine and a control method having two feeding mechanism to feed a minimum 0.1μm to achieve high-precision optical glass, ceramics and other brittle material, grinding, to achieve a mirror-finished optical glass, ceramic workpiece after grinding the surface of the thin wall does not produce micro-cracks, thereby completing the precision parts of coarse semi - Arg - Arg - fine grinding.

为了实现上述目的,本发明采用了如下技术方案:具有两级进给机构的超精密数控磨床,其实质性特点在于,它包括:普通精密数控磨床、微进给工作台、检测系统、集成接口系统;所述的微进给工作台包括柔性铰链机构、压电驱动器及其控制系统;所述的检测系统包括位置传感器、尺寸测量仪;其中,位置传感器用于监测基于微进给工作台的砂轮架部件二次进给实际工作位置,以作为微进给工作台控制系统的控制依据;尺寸测量仪用于检测磨削过程中工件已磨削表面的实际尺寸,以作为控制磨削过程及其相关工艺参数的依据;所述的集成接口系统,用于传递数控磨床、微进给工作台、尺寸测量仪的相关脉冲信号,以实现超精密数控磨床基本工艺操作的协同与集成控制。 To achieve the above object, the present invention employs the following technical solution: a feed mechanism having two ultra-precision CNC grinding machine, characterized in that its material, comprising: a common precision CNC grinding machines, micro-feed table, the detection system, the integrated interface systems; micro-feed according to the table includes a flexible hinge mechanism, a piezoelectric actuator and its control system; said detection system comprises a position sensor, a dimension measurement apparatus; wherein, based on a position sensor for monitoring fine feed table the secondary feed wheel frame member actual operating position, as a feed table for the micro-control based control system; the actual size of dimension measuring instrument for detecting the surface of the workpiece has been ground in the grinding process, grinding process and as a control based on the relevant parameters of the process; the integrated interface system for delivering a CNC grinding machine, the micro-feed table, the relevant dimensions of the meter pulse signal, in order to achieve ultra-precision CNC grinder basic operation of the process in conjunction with integrated control.

上述的具有两级进给机构的超精密数控磨床,其中,所述的微进给工作台与普通精密数控磨床的横拖板刚性连接,微进给工作台中的柔性铰链机构在压电陶瓷驱动器的作用下,通过形变实现砂轮架部件的超精密进给要求;砂轮架部件通过普通磨床上的导轨与横拖板相互连接,并在普通磨床的拉簧作用下,始终保持与微进给工作台的紧密接触。 The above-described feeding mechanism having two ultra-precision CNC grinder, wherein said micro-feed table and the carriage cross-precision CNC grinder common rigid connection, fine feed workbench flexible hinge mechanism piezoelectric actuator under the action of wheel frame member by a deformation ultra fine feed requirements; wheel frame members connected by cross rail carriage on each common grinder and under the action of the tension spring ordinary grinding, always maintain the micro-feed work close contact with Taiwan.

具有两级进给机构的超精密数控磨床的控制方法,其中,它是在普通磨床数控系统的基础上,增设独立于普通磨床数控系统的微进给工作台控制系统、监测系统、集成接口系统,使普通磨床数控系统通过数控程序、集成接口系统传递相关脉冲信号,从而实现与微进给工作台的通讯、基本工艺操作的协同与集成控制。 A control method for feeding two ultra-precision CNC grinder mechanism, wherein it is in general based on the grinding machine numerical control system, independent of the addition of ordinary grinding machine numerical control system micro-feed stage control system, monitoring system, the interface system integration the grinding machine numerical control system by ordinary NC program, the integrated interface system transfer correlation pulse signal, thereby achieving communication with the micro-feed table, in cooperation with the integrated process control basic operations.

上述的具有两级进给机构的超精密数控磨床的控制方法,其中,所述的微进给工作台包括控制子系统,该控制子系统包括微进给驱动部分、微进给检测部分;所述的微进给驱动部分包括驱动电源、人机接口、微进给位移-电压数据构造、驱动四个模块,以实现微进给工作台的数据输入和显示、包括十进制数转十六进制和数模转换的数据处理、驱动电压的放大;所述的微进给检测部分包括传感器、电压-位移数据构造、检测三个模块,以实现微进给工作台的位移检测和数据处理。 The control method of the ultra-precision CNC grinding machine having two feed mechanism, wherein said stage comprises a fine feed control subsystem, the control subsystem includes a micro-feed driving portion, micro-feed detecting section; the said micro-feed driving portion includes a driving power, human interface, fine feed displacement - voltage data structure, four driver modules, in order to achieve fine feed table data entry and display, including decimal number hexadecimal revolutions digital to analog conversion of the data processing, the driving voltage is amplified; fine feed to the detecting section includes a sensor, a voltage - displacement data structure, three detection modules for fine feed table displacement detection and data processing.

由于采用了上述的技术方案,本发明与现有技术相比,具有以下的优点和积极效果:1、利用微进给工作台使精密磨床砂轮架部件0.5-1μm的最小进给量精确到0.1μm的最小进给量,满足光学玻璃、陶瓷天线罩等脆硬薄工件的超精密磨削需求。 By adopting the technical solution of the present invention compared to the prior art, has the following advantages and beneficial effects: 1. use of micro-precision feed table that the grinding wheel carrier member of the minimum amount of feed to 0.1 0.5-1μm μm minimum feed amount, satisfying the optical glass, ceramics and other brittle thin radome ultra-precision grinding a workpiece needs.

2、具有两级进给机构的超精密磨床以普通精密磨床为基础,微进给工作台作为精密磨床的一个附属装置。 2, a slave device having two feeding mechanism ordinary ultra precision grinder precision grinder based, micro feed table as a precision grinding machines. 微进给工作台具有体积小、外型规范、可以灵活根据需要进行配置等特点,由于充分借鉴和利用了现有成熟精密磨床的技术优势,使超精密磨床的研发成功率提高、周期缩短和开销降低。 Micro-feed table has a small size, appearance specifications, features can be flexibly configured as required, due to the fully learn and use the existing mature technology advantages of precision grinding machines, the ultra-precision grinding of R & D success rate, cycle time and reduce overhead.

3、超精密磨床控制方法是以磨床数控系统为基础,通过增加微进给工作台压电驱动器控制系统和集成接口系统,使磨床数控系统通过数控程序、集成接口系统的相应脉冲信号实现与微进给工作台和尺寸测量仪的通讯与集成控制,使微进给工作台的选用和控制均与机床数控系统的品牌、种类及型号等无关。 3, ultra-precision grinding machine is a CNC grinding machine control method based system by increasing the micro-feed table and the piezoelectric actuator control system integrated interface system that allows the CNC grinding machine by numerical control program, a pulse signal corresponding to the integrated implementation of the micro interface system feed table and communicate with the integrated control meter dimensions, of the micro-feed table selection and control are independent of the brand of CNC machine tools, and other types and models.

附图说明 BRIEF DESCRIPTION

图1为本发明具有两级进给机构的超精密数控磨床的基本组成及其示意图;图2为本发明超精密磨床的两级进给机构示意图;图3为本发明具有两级进给机构的超精密数控磨床控制方法及其工作流程图;图4为本发明具有两级进给机构的超精密磨床的基本组成及其示意图;图5为本发明具有两级进给机构的开环式精密磨床的基本组成及其示意图;图6为本发明具有两级进给机构的超精密磨床控制方法及其工作流程图;图7为本发明具有两级进给机构的开环式精密磨床控制方法及其工作流程图;具体实施方式以下结合实施例及附图对本发明涉及的具有两级进给机构的超精密磨床及其控制方法作进一步详细的描述。 The basic structure and a schematic view of FIG. 1 two feed mechanism having an ultra-precision CNC grinder of the present invention; two ultra-precision grinding machine of the present invention, FIG 2 a schematic feeding mechanism; FIG. 3 having two feeding mechanism of the present invention ultra-precision CNC grinding machine and a flowchart of a control method; FIG. 4 is a schematic view of the basic components and ultra-precision grinding machine having two feeding mechanism of the present invention; FIG. 5 of the present invention, the feed mechanism having two open-loop its basic components of precision grinding machines schematic; ultra-precision grinding machine of FIG. 6 and a flowchart of a control method of the feeding mechanism having two of the present invention; FIG. 7 feeding mechanism having two open-loop control precision grinding machine of the present invention its operation flowchart; dETAILED dESCRIPTION the following embodiments in conjunction with the accompanying drawings and described in further detail on the ultra-precision grinding machine and a control method having two feeding mechanism according to the embodiment of the present invention.

参见图1,本发明涉及的具有两级进给机构的超精密磨床包括普通精密磨床、微进给工作台、检测系统及集成接口系统四大部分。 Referring to Figure 1, the present invention relates to a feed mechanism has two ultra-precision grinding machines including ordinary precision grinding machines, micro-feed table, the integrated interface detection system and four major systems. 普通精密磨床的进给机构实现一般精磨所需要的一级进给,并在此基础上,增加一级由压电陶瓷驱动器驱动的柔性铰链微进给工作台,依靠微进给工作台实现砂轮架部件的超精密进给,构成二级进给,由此完成高精度零件的粗-精-超精磨削。 Precision grinding ordinary feed mechanism needed to realize the general refining a feed, and on this basis, an increase driven by a piezoelectric actuator of flexible hinge micro feed table, feed table implemented relying micro ultra-precision grinding carriage member to form two feeding, thereby completing the precision parts of coarse - Arg - finishing sander. 最终实现超精密数控磨床砂轮架部件的亚微米级进给要求。 The final ultra-precision CNC grinder wheel frame member submicron feeding requirements.

其中:微进给工作台由柔性铰链机构、压电驱动器及其控制系统三大部分组成;检测系统分位置传感器部分和尺寸测量仪两部分,位置传感器用于监测砂轮架部件的实际工作位置,以作为压电驱动器的控制依据,尺寸测量仪用于检测磨削过程中已磨削工件表面的实际尺寸,以作为控制磨削过程及其工艺参数等的依据;集成接口系统的作用是,(1)实现微进给工作台控制系统与磨床数控系统的信息交互;(2)协调与控制两级进给机构的基本动作;(3)处理检测(尺寸测量仪)和监测(位置传感器)结果并控制砂轮架部件的运动及其精度。 Wherein: the micro-feed table consists of three main flexible hinge mechanism, a piezoelectric actuator and control system; location detection system of the sensor portion and two part dimension measurement apparatus, a position sensor for monitoring the actual operating position of the wheel frame member, as a basis to control the piezoelectric actuator, the size measuring instrument for detecting the actual size of the grinding process of the workpiece surface has been ground, as a basis for control of the grinding process and process parameters; the role of interface system is integrated, ( 1) micro-feed information interact stage control system of the grinding machine numerical control system; (2) coordination and control two basic operation of the feed mechanism; (3) the detection process (meter size) and monitoring (position sensor) results and controlling the movement of its precision grinding carriage member.

图2给出了具有两级进给机构的超精密磨床基本配置及其示意图,其中:横拖板7、导轨9、床身10、丝杠11、螺母12属于普通精密磨床的相关基础部件。 Figure 2 shows the ultra-precision grinding machine having two feeding mechanism and a schematic basic configuration, wherein: the horizontal carriage 7, rail 9, the bed 10, screw 11, nut 12 belonging to the relevant base member common precision grinding machines. 超精密磨床在此基础上,增加微进给工作台3,并在砂轮架部件底座6和横拖板7中增加第二层导轨8,以使砂轮架部件底座6、砂轮2及其相关支撑件等相对横拖板7进行最小进给量为0.1μm的精确进给。 Ultra-precision grinding machines based on this, to increase the micro-feed table 3, and add a second layer 8 in rail wheel frame 6 and the cross member of the base carriage 7, so that the base wheel frame member 6, the grinding wheel 2 and its associated support the carriage 7 relative to the cross member and the like for feeding the minimum amount of feed precision 0.1μm.

横拖板7通过第一层导轨9安装在床身10上,砂轮架底座6通过第二层导轨8安装在横拖板7上,砂轮2与砂轮架底座6刚性连接,通过相应的进给运动实现对工件1的磨削要求。 Transverse rail carriage 7 through the first layer 9 is mounted on the bed 10, the base wheel frame 6 through the second layer 8 is mounted on the transverse rail carriage 7, the grinding wheel 2 and the wheel frame base 6 rigidly connected, via respective feed movement of grinding the workpiece 1 implemented requirements. 微进给工作台3与横拖板7刚性连接,其中的柔性铰链机构在压电陶瓷驱动器的作用下,通过变形实现砂轮架部件的精确进给要求。 Micro-feed table 7 is rigidly connected to the transverse carriage 3, wherein the flexible hinge means under the action of the piezoelectric actuator, precise requirements wheelhead feed member by deformation. 砂轮架底座6在弹簧5和钢球4作用下,始终与微进给工作台3紧密接触。 The base wheel frame 6 by the spring 5 and the action of the ball 4 is always in close contact with the micro-3 feed table.

磨削工件时,丝杠11带动螺母12实现第一级进给系统的大行程进给运动,并根据尺寸检测仪对工件磨削表面的测量与数据处理结果,驱动微进给工作台实现第二级进给系统的超精密进给运动,直至进入无火花磨削状态并达到磨削要求。 When grinding the workpiece, the nut screw 11 driven by a first stage 12 to achieve a large stroke of the feed system feed motion, and the measurement processing result with the size of the data detector grinding surface of the workpiece, driving micro-feed table Implementation two ultra-precision feed system feed movement, until the state into the spark-out grinding and grinding to achieve the requirements.

本发明涉及的超精密磨床控制方法是以普通磨床数控系统为基础,增加微进给工作台压电驱动器控制系统和集成接口系统。 Ultra-precision grinding machine control method of the present invention is based on the ordinary grinding machine numerical control system, to increase the micro-feed table piezoelectric actuator control system and an integrated interface system. 磨床数控系统通过数控程序、集成接口系统的相应脉冲信号实现与微进给工作台和尺寸测量仪的通讯与集成控制。 CNC grinding machine numerical control system through the program, a pulse signal corresponding to the integrated implementation of the interface system communicates with the fine feed control table and the size of the integrated meter.

本发明涉及的超精密数控磨床的控制方法及其工作流程如图3所示,其采取的控制方法是:(1)根据数控程序进行精细磨预磨工步的基本操作,预磨工步包括粗磨、半精磨、精磨等基本操作,工步参数全部在数控程序中进行设置;(2)精细磨工步的进给量及其进给次数通过微进给工作台人机交互界面进行设置;(3)相关工步操作是否结束的依据取决两个方面,一是依据所设置的相关工步及其工艺参数;二是依据直接测量工件磨削表面的尺寸测量仪。 Ultra-precision CNC grinder of the present invention relates to a control method and a work flow shown in Figure 3, the control method is adopted: (1) the basic pre-grinding fine grinding operation according to the NC program process step, process step comprises a pre-grinding basic operation coarse, semi-fine grinding, fine grinding, process step all parameters set in the NC program; feed (2) fine grinding and feeding process step by the number of the micro-feed table interactive interface set; depending on whether the (3) process step related to the end of the operation depends on two aspects according to the relevant process step and the process parameters set; the second is based on a direct measurement of the size of the grinding surface of the workpiece measuring instrument. 尺寸测量仪可以根据需要和精度要求进行配置。 Dimension measuring instrument can be configured according to requirements and accuracy.

实施例1参见图1,高精度数控磨床MGK1320的工作台和砂轮架最小设定单位是0.5μm,外加如图1所示的检测系统II中的尺寸测量仪,可以获得的主要加工精度,如圆度1μm,圆柱度3μm。 Example 1 Referring to Figure 1 embodiment, high-precision CNC grinder MGK1320 wheelhead table and is a minimum unit of 0.5 m, the detection system shown in FIG. 1 II plus size measuring instrument, the main processing accuracy can be obtained, such as roundness 1μm, cylindricity 3μm. 在上述高精度数控磨床的配置基础上,增加图1中微进给工作台III和检测系统II中的位置传感器,可以使砂轮架的最小设定单位是0.1μm,并通过增加集成接口系统IV,先后协调和驱动两级进给机构的粗精进给,完成工件的精密磨削和精细磨削。 In the above configuration based on the high-precision CNC grinding machine, the position sensor 1 increases micro-feed table III and II in FIG detection system, the wheel frame can be made of minimum unit is 0.1 m, and by adding the integrated interface system IV , and the drive has two coordinate coarse feed mechanism to sophisticated, complete precision grinding and fine grinding of the workpiece. 在尺寸测量仪的配合下,可使工件加工精度及一批工件的尺寸一致性提高1倍或1倍以上。 In the meter with the size, allows a number of dimensions of the workpiece and the machining accuracy of the workpiece to improve the consistency of more than 1-fold or 1-fold.

实施例2参见图4、6,高精度磨床MG1320E砂轮架的最小设定单位是1μm,采用定程磨削,可以获得使被加工工件的直径一致性为10μm。 Example 2 Referring to FIGS. 4 and 6 embodiments, the minimum setting unit MG1320E high-precision grinding wheelhead is 1 m, using fixed grinding process, the consistency can be obtained so that the diameter of the workpiece is 10μm. 增加图4检测系统II中的尺寸测量仪,可以使被加工工件的直径一致性为4μm。 II of FIG. 4 increases the detection system meter in size, can be consistent workpiece diameter is 4μm. 在上述高精度磨床的配置基础上,增加图4中微进给工作台III和检测系统II中的位置传感器,可以使砂轮架的最小设定单位是0.1μm,并通过图4中的人机操作面板IV,人工协调和驱动两级进给机构的粗精进给,完成工件的精密磨削和精细磨削,其控制方法及其工作流程图如图6。 In the configuration on the basis of the above-described high-precision grinding, the increase in micro-feed table position sensor detection system II and III in FIG. 4, it can be minimized wheelhead setting unit is 0.1 m, and man-machine 4 in FIG. IV operation panel, manual coordination and coarse feed mechanism drive two sophisticated to complete the precision grinding and fine grinding the workpiece, the control method and a flowchart of FIG. 6. 在尺寸测量仪的配合下,可使工件加工精度及一批工件的尺寸一致性提高1倍或1倍以上。 In the meter with the size, allows a number of dimensions of the workpiece and the machining accuracy of the workpiece to improve the consistency of more than 1-fold or 1-fold.

实施例3参见图5、7,普通磨床M14320砂轮架的最小设定单位是5μm。 Example 3 Referring to Figures 5, 7, M14320 minimum unit of the plain grinding wheelhead is 5μm. 在上述普通磨床的基础上,增加图5中的微进给工作台II,并采用开环控制,可以使砂轮架的最小设定单位是0.5μm,并通过人机操作面板III,人工协调和驱动两级进给机构的粗精进给,完成工件的精密磨削和精细磨削,其控制方法及其工作流程图参见图7。 On the basis of the above-described conventional grinding machines, an increase in the fine feed to the table in FIG. 5 of II, and open-loop control unit can be minimized wheelhead is set of 0.5 m, and by a machine operation panel III, manual coordination and two driven feed mechanism crude sophisticated to complete the precision grinding and fine grinding the workpiece, the control method and a flowchart of Figure 7.

通过微进给工作台使超精密磨床以0.1μm的最小进给量进行光学玻璃、陶瓷等脆硬材料的高精度磨削,使光学玻璃达到镜面磨削精度和表面粗糙度,使陶瓷薄壁工件磨削后表面不产生微细裂纹等。 Through the micro-feed table so that ultra precision grinder 0.1μm minimum feed amount of the high-precision grinding optical glass, ceramics and other brittle material, the optical glass as a mirror grinding accuracy and surface roughness, the ceramic thin wall surface micro-cracks and the like is not generated after the grinding work. 超精密磨床以普通精密数控磨床为基础,增加的微进给工作台具有体积小、可灵活配置等优点,增加的微进给工作台控制系统和集成接口系统,使磨床数控系统通过数控程序、集成接口系统的相应脉冲信号实现与微进给工作台、尺寸测量仪的通讯、基本工艺操作的协同与集成控制,使微进给工作台和尺寸测量仪的选用、控制与机床数控系统的品牌、种类和型号等无关。 Ultra-precision grinding machines ordinary precision CNC grinder based micro increase feed table has a small size, flexible configuration, etc., to increase the micro-feed system and the stage control interface system integration, so that grinding machine numerical control system through the NC program, a pulse signal corresponding to the integrated interface system implementation and communication micro-feed table, the size of the measuring instrument, in conjunction with the integrated process control basic operations, feed table and of the micro-meter size selection, the brand CNC control system , irrespective of the type and model. 充分借鉴和利用了现有成熟精密磨床的技术优势,使超精密磨床的研发成功率提高、周期缩短和开销降低。 Fully learn and use the existing mature technology advantages of precision grinding machines, the ultra-precision grinding machines to improve the success rate of research and development, reduce cycle time and costs.

Claims (4)

1.具有两级进给机构的超精密数控磨床,其特征在于,它包括:普通精密数控磨床、微进给工作台、检测系统、集成接口系统;所述的微进给工作台包括柔性铰链机构、压电驱动器及其控制系统;所述的检测系统包括位置传感器、尺寸测量仪;其中,位置传感器用于监测基于微进给工作台的砂轮架部件二次进给实际工作位置,以作为微进给工作台控制系统的控制依据;尺寸测量仪用于检测磨削过程中工件已磨削表面的实际尺寸,以作为控制磨削过程及其相关工艺参数的依据;所述的集成接口系统,用于传递数控磨床、微进给工作台、尺寸测量仪的相关脉冲信号,以实现超精密数控磨床基本工艺操作的协同与集成控制。 1. The feeding mechanism having two ultra-precision CNC grinding machine, characterized in that it comprises: an ordinary precision CNC grinding machines, micro-feed table, the detection system, the interface system integration; fine feed according to the table includes a flexible hinge mechanism, the piezoelectric actuator and its control system; said detection system comprises a position sensor, a dimension measurement apparatus; wherein, based on a position sensor for monitoring the wheel frame member fine feed table to the actual operating position of the second feed, as fine feed control system based on the control table; size measuring instrument for detecting the actual size of the surface of the workpiece has been ground in the grinding process, to provide control of the grinding process and process parameters; said integrated interface system for passing CNC grinding machine, the micro-feed table, the relevant dimensions of the meter pulse signal, in order to achieve ultra-precision CNC grinder basic operation of the process in conjunction with integrated control.
2.根据权利要求1所述的具有两级进给机构的超精密数控磨床,其特征在于,所述的微进给工作台与普通精密数控磨床的横拖板刚性连接,微进给工作台中的柔性铰链机构在压电陶瓷驱动器的作用下,通过形变实现砂轮架部件的超精密进给要求;砂轮架部件通过普通磨床上的导轨与横拖板相互连接,并在普通磨床的拉簧作用下,始终保持与微进给工作台的紧密接触。 According to claim 1 having two said feed mechanism ultra-precision CNC grinding machine, characterized in that the feed table with micro-precision CNC grinder ordinary cross the carriage rigidly connected, fine feed workbench the flexible hinge means under the action of the piezoelectric actuator achieved by a deformation member wheelhead feed in claim ultraprecision; wheel frame members are interconnected by cross rail carriage on the plain grinding, grinding machines and the tension spring acting in common next, always keep in close contact with the micro-feed table.
3.一种具有两级进给机构的超精密数控磨床的控制方法,其特征在于,它是在普通磨床数控系统的基础上,增设独立于普通磨床数控系统的微进给工作台控制系统、监测系统、集成接口系统,使普通磨床数控系统通过数控程序、集成接口系统传递相关脉冲信号,从而实现与微进给工作台的通讯、基本工艺操作的协同与集成控制。 3. A method for controlling the feed mechanism of two ultra-precision CNC grinding machine having, characterized in that it is based on the common grinding machine numerical control system based on the addition to ordinary grinding machine numerical control system independent of the micro-feed stage control system, monitoring system, integrated interface system, so that ordinary grinding machine numerical control system related to the pulse signal transmitted by the NC program, the integrated interface system, enabling communication with the micro-feed table, in cooperation with the integrated process control basic operations.
4.根据权利要求3所述的具有两级进给机构的超精密数控磨床的控制方法,其特征在于,所述的微进给工作台包括控制子系统,该控制子系统包括微进给驱动部分、微进给检测部分;所述的微进给驱动部分包括驱动电源、人机接口、微进给位移—电压数据构造、驱动四个模块,以实现微进给工作台的数据输入和显示、包括十进制数转十六进制数、数模转换的数据处理、驱动电压的放大;所述的微进给检测部分包括传感器、电压—位移数据构造、检测三个模块,以实现微进给工作台的位移检测和数据处理。 The control method of ultra-precision CNC grinding machine having two feed mechanism according to claim 3, characterized in that the fine feed station includes a control subsystem, the control subsystem includes a micro-feed drive part, micro-feed detecting section; fine feed according to the driving portion includes a driving power, human interface, fine feed displacement - voltage data structure, four driver modules, in order to achieve fine feed table data entry and display , including decimal number hexadecimal rotation, digital-analog conversion of the data processing, the driving voltage of the amplified; fine feed to the detecting section includes a sensor, a voltage - displacement data structure, three detection modules for fine feed displacement detection and data processing table.
CN 200610147561 2006-12-20 2006-12-20 Ultraprecise grinder with two stages of feeding mechanism and its control method CN1986156A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101738981B (en) 2009-12-04 2011-06-15 清华大学 Machine learning-based robot grinding method
CN101478078B (en) 2009-02-17 2012-11-07 东华大学 Inner and outer shaped surface precise machining process for antenna cover
CN102794688A (en) * 2012-08-10 2012-11-28 上海交通大学 Reconstructing few-shaft ultra-precise large-size optical mirror grinding system
CN101559578B (en) 2009-06-02 2013-01-30 河南科技大学 Coreless abrasive machining measurement and control system and corresponding coreless abrasive machining method
CN103056776A (en) * 2012-11-29 2013-04-24 厦门大学 Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system
CN106378668A (en) * 2016-11-15 2017-02-08 佛山泰冈数控精密机床有限公司 Control method of five-axis double-end-surface grinding machine
CN109782690A (en) * 2019-03-25 2019-05-21 浙江大学宁波理工学院 Double drive electrichydraulic control formula accurate feeding system and its control method

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101478078B (en) 2009-02-17 2012-11-07 东华大学 Inner and outer shaped surface precise machining process for antenna cover
CN101559578B (en) 2009-06-02 2013-01-30 河南科技大学 Coreless abrasive machining measurement and control system and corresponding coreless abrasive machining method
CN101738981B (en) 2009-12-04 2011-06-15 清华大学 Machine learning-based robot grinding method
CN102794688A (en) * 2012-08-10 2012-11-28 上海交通大学 Reconstructing few-shaft ultra-precise large-size optical mirror grinding system
CN102794688B (en) * 2012-08-10 2014-10-22 上海交通大学 Reconstructing few-shaft ultra-precise large-size optical mirror grinding system
CN103056776A (en) * 2012-11-29 2013-04-24 厦门大学 Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system
CN103056776B (en) * 2012-11-29 2015-02-04 厦门大学 Data acquisition and transmission synchronization method for grinding machine processing environment monitoring system
CN106378668A (en) * 2016-11-15 2017-02-08 佛山泰冈数控精密机床有限公司 Control method of five-axis double-end-surface grinding machine
CN109782690A (en) * 2019-03-25 2019-05-21 浙江大学宁波理工学院 Double drive electrichydraulic control formula accurate feeding system and its control method

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