CN1967225A - Thermal interface materials detection device - Google Patents
Thermal interface materials detection device Download PDFInfo
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- CN1967225A CN1967225A CN 200510101504 CN200510101504A CN1967225A CN 1967225 A CN1967225 A CN 1967225A CN 200510101504 CN200510101504 CN 200510101504 CN 200510101504 A CN200510101504 A CN 200510101504A CN 1967225 A CN1967225 A CN 1967225A
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- interfacial material
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Abstract
The invention provides a thermal surface material measuring device, including: a first metal block, with a first ultra-precision machining surface and at least one measuring temperature hole; a second metal block, and corresponding to the first metal block, with a second ultra-precision machining surface matched to the first ultra-precision machining surface to clamp a measuring temperature surface material and at least a measuring temperature hole. The thermal interface material measuring device of the invention has high accurate measurement, and after measurement, no measuring temperature surface material crumbs left, to improve the accuracy of next measurement.
Description
[technical field]
The present invention relates to a kind of measurement mechanism, especially relate to a kind of thermal interface materials detection device.
[background technology]
In recent years, along with the fast development of semiconductor element integrated technique, the integrated degree of semiconductor element is more and more high, and that component size becomes is more and more little, and its heat radiation becomes a more and more important problem, and its requirement to heat radiation is also more and more high.For satisfying these needs, various radiating modes are used in a large number, as utilize fan to dispel the heat, modes such as water-cooled auxiliary heat dissipation and heat pipe heat radiation, and obtain certain radiating effect, but because the contact interface and the out-of-flatness of heating radiator and semiconductor integrated component, generally be in contact with one another only less than 2% area, there is not desirable contact interface, fundamentally greatly influenced semiconductor element and carried out the effect that heat is transmitted to heating radiator, therefore, between the contact interface of heating radiator and semiconductor element, increase the higher thermal interfacial material of a coefficient of heat conductivity and just seem very necessary with the exposure level that increases the interface.
In above-mentioned thermal interfacial material preparation process, be indispensable important step to the measurement of himself coefficient of heat conductivity.Thermal interfacial material self coefficient of heat conductivity is less, and then its heat conductivility is relatively poor; Thermal interfacial material self coefficient of heat conductivity is bigger, and then its heat conductivility is better.If it is self coefficient of heat conductivity is little, be that the relatively poor thermal interface material applications of heat conductivility is between a large amount of semiconductor elements and heating radiator that conduct heat of need, then this thermal interfacial material not only can not help to conduct heat between this semiconductor element and heating radiator, even reduces heat transfer property between this semiconductor element and heating radiator on the contrary.
The thermal conductivity measurement method of traditional hot boundary material is: in adiabatic environment, with two square metal pieces one thermal interfacial material is clamped by certain fastening power, to wherein derby use heating rod heating, another derby is used the cooling system cooling, until this measuring system thermal equilibrium.Pass through computing formula: Q=A * K * Δ T/L (wherein, Q is the total heat transfer of thermal interfacial material to be measured, A is the cross-sectional area of thermal interfacial material to be measured, K is the coefficient of heat conductivity of thermal interfacial material to be measured, Δ T is the temperature difference of above-mentioned two derbies and thermal interfacial material to be measured contact position, L is the thickness of thermal interfacial material to be measured), Q, A, Δ T and L are by direct measurement or calculate and all can know, thereby can calculate the coefficient of heat conductivity K of thermal interfacial material to be measured.
But, in the employed device of above-mentioned measuring method, the surface of contact of two square metal pieces and thermal interfacial material to be measured mostly is milling and plane lapping is processed and got, its surface average roughness is about 500～1000nm (nanometer), the groove that promptly these two derbies contact the surface with thermal interfacial material to be measured on, may have 500～1000nm degree of depth and width, thermal interfacial material to be measured fastens under the effect of power in aforementioned clamped, be filled into to more amount described groove and be difficult to and remove, treat calorimetric boundary material thickness L and produce considerable influence; In addition, because test rear section thermal interfacial material to be measured still is filled in the described groove, directly influence the test result of next thermal interfacial material sample to be measured.
In view of this, provide a kind of and have the thermal interface materials detection device of pin-point accuracy in fact for necessary.
[summary of the invention]
Below, will a kind of thermal interface materials detection device with pin-point accuracy be described with embodiment.
A kind of thermal interface materials detection device comprises: one first derby has one first ultraprecise machined surface and at least one thermometer hole; One second derby, relative with described first derby, have one and match with the second ultraprecise machined surface and at least one thermometer hole of clamping one thermal interfacial material to be measured with the described first ultraprecise machined surface.
Compared with prior art, described first and second derby contacts with thermal interfacial material to be measured by a ultraprecise machined surface respectively, because this ultraprecise machined surface roughness can reach below the 10nm, 500～1000nm roughness well below prior art, in thermal interface materials detection process to be measured, only minute quantity thermal interfacial material to be measured is absorbed in described ultraprecise machined surface, improves measurement accuracy; And can improve first and second derby and thermal interfacial material contact area to be measured, help timely between first or second derby and thermal interfacial material to be measured, the transmission rapidly of heat, further improve its measurement accuracy.In addition, measure and finish when taking out thermal interfacial material to be measured, can residual thermal interfacial material fines to be measured in the described two ultraprecise machined surfaces, can improve the accuracy of next time measuring.
[description of drawings]
Fig. 1 is the instrumentation plan of the thermal interfacial material measuring equipment of preferred embodiment of the present invention to thermal interfacial material.
[embodiment]
Usually, machining precision is called Precision Machining at 100～1000nm, machined surface roughness (Ra) in the processing of 20～100nm; Machining precision hanged down at 100nm, machined surface roughness (Ra) be called ultraprecise processing less than the processing of 10nm.
Below, in conjunction with the accompanying drawings the present invention is described in further detail.
See also Fig. 1, the thermal interface materials detection device 1 of preferred embodiment of the present invention comprises: cylindrical first derby 11, this derby 11 have one first ultraprecise machined surface 111, reach three thermometer holes 112; One cylindrical second derby 12, this second derby 12 is relative with this first derby 11, has one and matches with the first ultraprecise machined surface 111 of described derby 11 with the second ultraprecise face 121 of clamping one thermal interfacial material 2, and three thermometer holes 122.
The material of first derby 11 and second derby 12 can adopt heat transfer property excellent material such as copper or aluminium.In this enforcement, adopt copper billet.
Described ultraprecise machined surface 111 and 121 realizes that by ultraprecise processing modes such as diamond turning or minute surface millings its machining precision can reach 5～10nm.
In the present embodiment, described three thermometer holes 112 and three thermometer holes 122 axially equidistantly the arranging of first derby 11 and second derby 12, are used to insert occasionally thermometer of thermoelectricity respectively, determine the temperature of T1, T2, T3, T4, T5 and T6 each point.
When using 1 pair of thermal interfacial material 2 of above-mentioned thermal interface materials detection device to measure, specifically comprise the steps:
At first, thermal interfacial material 2 is placed on the first ultraprecise machined surface 111 of first derby 11, second derby 12 and first derby 11 are oppositely arranged, and the second ultraprecise machined surface, 121 pressures are put on thermal interfacial material 2, second derby 12 is applied a suitable fastening power, first ultraprecise machined surface 111 of first derby 11 and the second ultraprecise machined surface 121 of second derby 12 are fully contacted with thermal interfacial material 2 respectively.
Then, in the thermometer hole 112,122 on being set in qually spaced in first derby 11 and second derby 12, insert the thermopair that is used to measure T1, T2, T3, T4, T5 and T6 each point temperature respectively.
Then, first derby 11 is heated, make heat reach second derby 12 through thermal interfacial material 2, record T1, T2, T3, T4, T5 and T6 each point temperature from first derby 11.
According to T1, T2, T3, T4, T5 and T6, the first ultraprecise machined surface 111 that can derive first derby 11 and thermal interfacial material 2 contact temperature T 111, and the second ultraprecise machined surface 121 of second derby 12 and thermal interfacial material 2 contact temperature T 121, and calculate the temperature difference Δ T that produces in thermal interfacial material 2 heat transfer processes, Δ T=T111-T121.
Pass through computing formula: Q=A * K * Δ T/L can calculate the coefficient of heat conductivity K of thermal interfacial material 2.Wherein, Q is measurable total heat transfer, and A is the cross-sectional area of thermal interfacial material 2, and Δ T is derby 11 and 12 temperature difference between end face that contacts with thermal interfacial material 2, and L is the thickness of thermal interfacial material 2.
In addition, pass through computing formula: Δ T/Q=R can calculate the thermal resistance R of thermal interfacial material 2.Wherein, Q is measurable total heat transfer, and Δ T is derby 11 and 12 temperature difference between end face that contacts with thermal interfacial material 2.
At last, take out thermal interfacial material 2 by 12 of first derby 11 and second derbies, its ultraprecise machined surface 111,121 is carried out easy clean after, the measurement that can use this thermal interface materials detection device 1 to carry out next time.
Described ultraprecise machined surface 111 and 121 is through after the processing of ultraprecises such as diamond turning or minute surface milling, and its surface working precision can reach 5～10nm, promptly only has the groove of 5～10nm degree of depth and width on this ultraprecise machined surface 111 and 121.Even thermal interfacial material 2 is filled into this groove under the effect of aforementioned fastening power, because this groove is more tiny, thermal interfacial material 2 amounts that are filled into are less, can ignore to the influence that the thickness L of thermal interfacial material 2 produces, thereby not influence the measurement accuracy of 1 pair of thermal interfacial material 2 of this thermal interface materials detection device.
And, because the tiny groove that the described ultraprecise machined surface 111 of described derby 11 and 12 and 121 surfaces only exist 5～10nm degree of depth and width, the surface that may have the big groove of 500～1000nm degree of depth and width in the prior art, described derby 11 and 12 and the surface in contact of thermal interfacial material 2 is long-pending increases, help heat derby 11 or 12 and 2 of thermal interfacial materials in time, transmit rapidly, further improve its measurement accuracy.
In addition, only have the groove of 5～10nm degree of depth and width on this ultraprecise machined surface 111 and 121, promptly thermal interfacial material 2 is filled into this groove under the effect of aforementioned fastening power, forms the projection of 5～10nm degree of depth and width.Measurement is finished when taking out thermal interfacial material 2, because described convexity is more tiny, this projection can be broken away from by described groove with thermal interfacial material 2 under the Van der Waals force effect of thermal interfacial material 2 self.Thereby, fines that can residual heat boundary material 2 in the described groove, this thermal interface materials detection device 1 can directly be measured next time.
In addition, described thermometer hole 112,122 also can only be established one respectively, is positioned at its derby of living in and thermal interfacial material 2 touching positions.And measured temperature T 111 ' of the thermopairs that are provided with in the thermometer hole 112,122 and T121's ' is poor, is the derby 11 and 12 temperature difference Δ T between end face that contacts with thermal interfacial material 2.
In addition, those skilled in the art should understand that the above only is preferred embodiment of the present invention, from the claim that can not limit this case with this.All equivalences of doing according to the creation spirit of this case are modified or are changed, and all should be encompassed in this case claim.
Claims (10)
1. thermal interfacial material measuring equipment, it comprises:
One first derby has a first surface and at least one thermometer hole;
One second derby, relative with this first derby, have one and match with second surface and at least one thermometer hole of clamping one thermal interfacial material to be measured with described first surface, it is characterized in that: described first and second surface is the ultraprecise machined surface.
2. thermal interface materials detection device as claimed in claim 1 is characterized in that, described first and second surface, surface is diamond turning face or minute surface milling face.
3. thermal interface materials detection device as claimed in claim 1 is characterized in that, described at least one thermometer hole adopts one, and this thermometer hole is positioned at its derby of living in and thermal interfacial material touching position to be measured.
4. thermal interface materials detection device as claimed in claim 1 is characterized in that, described at least one thermometer hole adopts a plurality of, and these a plurality of thermometer holes are axially equidistantly arranged along its derby of living in.
5. thermal interface materials detection device as claimed in claim 1 is characterized in that, described first and second surperficial surfaceness is less than 10 nanometers.
6. thermal interface materials detection device as claimed in claim 1 is characterized in that, described first and second surperficial surfaceness is below 5 nanometers.
7. thermal interface materials detection device as claimed in claim 1 is characterized in that, described first derby and second derby are cylindrical.
8. thermal interface materials detection device as claimed in claim 1 is characterized in that, described first derby and second derby are the identical shape of shape of cross section.
9. thermal interface materials detection device as claimed in claim 8 is characterized in that, the shape of cross section of described first derby and second derby is circle, triangle, square, rectangle or polygon.
10. thermal interfacial material measuring equipment, it comprises:
One first derby has a first surface and at least one thermometer hole;
One second derby, relative with this first derby, have one and match with second surface and at least one thermometer hole of clamping one thermal interfacial material to be measured with described first surface, it is characterized in that: described first and second surperficial surfaceness is less than 10 nanometers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510101504A CN1967225B (en) | 2005-11-16 | 2005-11-16 | Thermal interface materials detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200510101504A CN1967225B (en) | 2005-11-16 | 2005-11-16 | Thermal interface materials detection device |
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| Publication Number | Publication Date |
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| CN1967225A true CN1967225A (en) | 2007-05-23 |
| CN1967225B CN1967225B (en) | 2010-05-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN200510101504A Expired - Fee Related CN1967225B (en) | 2005-11-16 | 2005-11-16 | Thermal interface materials detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110687159A (en) * | 2019-09-12 | 2020-01-14 | 无锡江南计算技术研究所 | Thermal resistance measuring device and method for thermal grease |
| CN111906358A (en) * | 2020-07-15 | 2020-11-10 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precision machining method for micro-scale surface microstructure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109974514B (en) * | 2017-12-28 | 2020-08-11 | 清华大学 | Thermal triode and thermal circuit |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3265362B2 (en) * | 1999-10-18 | 2002-03-11 | 独立行政法人産業技術総合研究所 | Interfacial thermal resistance measurement method |
| US6923570B2 (en) * | 2003-09-11 | 2005-08-02 | Hewlett-Packard Development Company, L.P. | Thermal interface material characterizing system |
| CN2695961Y (en) * | 2004-04-13 | 2005-04-27 | 鸿富锦精密工业（深圳）有限公司 | Device for investigating thermal surface material |
| CN2706760Y (en) * | 2004-05-28 | 2005-06-29 | 鸿富锦精密工业（深圳）有限公司 | Heat interface material testing platform |
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2005
- 2005-11-16 CN CN200510101504A patent/CN1967225B/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110687159A (en) * | 2019-09-12 | 2020-01-14 | 无锡江南计算技术研究所 | Thermal resistance measuring device and method for thermal grease |
| CN110687159B (en) * | 2019-09-12 | 2022-06-10 | 无锡江南计算技术研究所 | Thermal resistance measuring device and method for thermal grease |
| CN111906358A (en) * | 2020-07-15 | 2020-11-10 | 中国工程物理研究院机械制造工艺研究所 | Ultra-precision machining method for micro-scale surface microstructure |
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| CN1967225B (en) | 2010-05-05 |
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