CN1962018A - Apparatus and method for removing particle from water - Google Patents
Apparatus and method for removing particle from water Download PDFInfo
- Publication number
- CN1962018A CN1962018A CN 200510115880 CN200510115880A CN1962018A CN 1962018 A CN1962018 A CN 1962018A CN 200510115880 CN200510115880 CN 200510115880 CN 200510115880 A CN200510115880 A CN 200510115880A CN 1962018 A CN1962018 A CN 1962018A
- Authority
- CN
- China
- Prior art keywords
- film
- precipitation
- water
- groove
- membrane filtration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention relates to a method for removing the particles in water, wherein said device comprises a quick mixing groove, a slow mixing groove, and a deposit or film groove. The invention is characterized in that: said deposit or film groove comprises a deposit area, used to deposit the paste in the outlet water of slow mixing groove, and a film filter area for filtering the water passed through the deposit area, while said two areas are separated by baffle plate with open connects them; the film filter area is higher than the deposit or film groove bottom. The invention can be used to treat the waste water in chemical machine grind (CMP), etc.
Description
Technical field
The invention relates to the removal device and the method for particulate in a kind of water, particularly a kind for the treatment of apparatus and method that is applicable to wastewater form mechanic grinding or the former water of middle and high turbidity.
Background technology
Along with the lifting of environmental consciousness and the demand of water, it is important that the exploitation of water treatment/recovery technology more seems.Especially, the person directly uses traditional wastewater processing technology to containing the particulate in the water, and Chang Wufa effectively handles or reclaims.The processing mode and the difficulty of wastewater form mechanic grinding and the former water of middle and high turbidity below are described respectively.
In the manufacture of semiconductor industry, it is in order to improve the precision of semiconductor subassembly, must remove the concavo-convex and rugged part of assembly surface to carry out the making of follow-up high-resolution assembly pattern, and wherein employed key technology be " chemical mechanical milling method " (Chemical Mechanical Polishing, CMP)." chemical mechanical milling method " mainly is to utilize chemicals such as grinding milk and grinding pad, the action that cooperative mechanical is ground, dielectric film on the IC wafer or metallic film are polished, clean with a large amount of ultra-pure waters again, therefore nearly 40% water is used for the CMP processing procedure in the semiconductor industry, also produce a large amount of waste water, accounted for 15～25% of the total wastewater flow rate of processing procedure.Introduce to grind mother liquor (slurry) in the CMP processing procedure and grind in crystal column surface, grind and comprise approximately 5～10% in the mother liquor, the grinding whetstone grain of 30～100nm (comprising: SiO
2, Al
2O
3, CeO
2, ZrO
2Deng) and chemical assistant (comprising: pH buffer, oxidant, interfacial agent).
Main Ingredients and Appearance in the CMP abrasive waste water is the oxide fine particle that produces in the process of lapping and grinds chemical substance in the mother liquor, is chemical solvent and cleaning solution secondly.Suspended particulates particle size range in these waste water is about about 50～1000nm.Because the suspended particulates particle is too small, and contains dispersant in the waste water, make the poor effect handled with traditional coagulating sedimentation and must excessive dosing, finally cause a large amount of mud outputs and cause secondary pollution, also make water reclaim difficulty more.In addition, coagulating treatment efficient is not good often to make the subsequent thin film life-span short, increases the equipment running cost.
In addition, aspect middle and high turbidity Yuan Shui, because the short and small and rapid orographic condition in rivers and creeks, Taiwan with meet with typhoon, heavy rain, earthquake or the like natural factor often, cause heavy rain to carry a large amount of silts secretly and form high muddy water, make the raw water turbidity that enters the water purification field up to tens thousand of NTU, often cause water treatment plant to stop.The suspended solids that is difficult to sedimentation in these surface waters, its granular size is between between the 0.1nm to 0.1mm; Wherein to account for the major part of suspended solids be to cause the main source of turbidity in the water to colloid (colloid) particle, and size is approximately between 1nm to 1 μ m.These particle surfaces are electronegative because of organic matter, make suspension become a stable state, because of repulsive force is difficult for assembling, can't form bulky grain by gravity effect sedimentation between particle and particle.Under the situation of high muddy water, because water middle particle concentration height when the coagulation operating condition is not good, often causes sedimentation effect poor.
Summary of the invention
Because prior art is for handling waste water, especially the shortcoming of CMP waste water or the former water of middle and high turbidity, main purpose of the present invention provides the removal device of particulate in a kind of water, it can make waste water mix, mix slowly and handle through too fast earlier, make in the waste water and enter a precipitation or a film groove again behind the big glue plumage of microparticle agglutination one-tenth, and in precipitation or film groove, make glue plumage post precipitation pass through membrane filtration again than the waste water of clarification, can't normal operation to avoid film to block.
Another object of the present invention provides a kind of precipitation or film groove, by design by settling zone in this waste water treatment tank and membrane filtration district, make and enter that bigger particle precipitates prior to the settling zone in the precipitation or the waste water of film groove, waste water with post precipitation imports the filtration of membrane filtration district again, so can promote the service life of film service efficiency and prolongation film.
Another purpose of the present invention provides particulate removal method in a kind of water, mainly be to utilize described wastewater treatment equipment to handle, be preferably that to be applied to CMP waste water or turbidity about 100～10, the former water of middle and high turbidity of 000NTU can effectively promote waste water treatment efficiency and reduce the coefficient of losses of device.
For reaching above-mentioned purpose, the present invention provides the treating apparatus of particulate in a kind of water, comprises: a fast groove that mixes; One mixes groove slowly; Reach a precipitation or a film groove; Wherein: comprise in described precipitation or the film groove: a settling zone is used for making the described glue plumage precipitation that groove goes out flowing water of mixing slowly; And a membrane filtration district, this membrane filtration district comprises at least one film, in order to filter the water through described settling zone post precipitation; Described settling zone and membrane filtration district be by at least one baffle region every and two zones have opening and can be interconnected, wherein said membrane filtration district is arranged at respect to precipitation or film bottom land one higher place.
Preferably, the particulate removal device further comprises the group Pu of refluxing in the water of the present invention, in order to will precipitate or the film groove in the water in membrane filtration district extract to the described fast groove that mixes, make it enter wastewater treatment program next time, to obtain the more water of purification.
The present invention provides a kind of precipitation or film groove in addition, comprises: a settling zone is used for making the contamination precipitation of waste water; And a membrane filtration district, this membrane filtration district comprises at least one film, in order to filter the water through described settling zone post precipitation; Described settling zone and membrane filtration district be by at least one baffle region every and two zones have opening and can be interconnected, wherein said membrane filtration district is arranged at respect to precipitation or film bottom land one higher place.
Preferably, the aspect of described dividing plate can comprise single or a plurality of dividing plate.If during a plurality of dividing plate, the dividing plate that wherein is positioned at below, membrane filtration district is to be an inclined design, discharges with entering the settling zone so that the sediment of described membrane filtration district precipitation is discharged.If single when version, this dividing plate is skewed design with respect to the waste water treatment tank cell wall, so that the glue plumage of precipitation is discharged.
On the other hand, the invention provides the removal method of particulate in a kind of water, comprise the following step: (a) waste water is imported a fast groove that mixes, and add coagulant and adjust the pH value to remove particulate stability; (b) flowing water that goes out with described step (a) imports one and mixes groove slowly, can add or not add gelling agent and make particulate in the waste water form big glue plumage (be preferably 〉=2 μ m glue plumage); And (c) flowing water that goes out of described step (b) is imported a precipitation or a film groove, the settling zone of described glue plumage in precipitation or film groove carries out gravitational settling earlier, and can discharge behind the membrane filtration in the membrane filtration district of the waste water of clarifying than the upper strata in the cell body in precipitation or film groove.
In sum, the removal device of particulate and method are compared to prior art in the water of the present invention, technology of the present invention can make waste water will import precipitation or the film groove that the present invention develops than the waste water of clarification more in regular turn after mixing, mix slowly program soon, settling zone in groove makes the glue plumage carry out gravitational settling, enters the clean processing water of membrane filtration district filtration becoming afterwards again.So can effectively improve and have only deficiency and the drawback that independentization mixed, film is handled or ion-exchange is handled separately in the prior art, in addition, also can solve the shortcoming that the normal film that takes place of conventional films groove blocks.
Description of drawings
Fig. 1 is the structural representation of particulate removal device in the water of the present invention;
Fig. 2 (A) is that the present invention has the structural representation that one of the precipitation in precipitation/membrane filtration district or film groove implemented aspect;
Fig. 2 (B) figure be the present invention have the precipitation in precipitation/membrane filtration district or a film groove another implement the structural representation of aspect;
Fig. 3 is the water flux and the time relation figure of the embodiment of the invention one;
Fig. 4 is the saturating pressure and the time relation figure of the embodiment of the invention one;
Fig. 5 is heavy turbidity and the TOC concentration map that reaches after film is handled of mixing of the embodiment of the invention one.
[the primary clustering symbol is to as directed]
The 1 fast groove that mixes
2 mix groove slowly
3 precipitation or film grooves
31 settling zones
32 membrane filtration districts
33 films
34 dividing plates
35 openings
36 mud outlets
37 aeration tubes
38 overfalls
4 glue plumages
5 draw water helps the Pu
6 reflux helps the Pu
100 wastewater treatment equipments
The specific embodiment
The existing skill that the present invention continued to use is sincerely done quoting of emphasis formula at this, to help elaboration of the present invention.And drafting to scale of correlative type in the literary composition in following, its effect is only in performance architectural feature of the present invention.
Fig. 1 is particulate removal device 100 in the water of the present invention, comprises: a fast groove 1 that mixes; One mixes groove 2 slowly; Reach a precipitation or a film groove 3; Wherein: comprise in described precipitation or the film groove 3: a settling zone 31 is used for making described glue plumage 4 precipitations that groove 2 goes out flowing water of mixing slowly; And a membrane filtration district 32, this membrane filtration district 32 comprises at least one film 33, in order to filter the water through described settling zone 31 post precipitations; Described settling zone 31 and membrane filtration district 32 are separated and two zones have opening (as the opening 35 of Fig. 2 (A) or Fig. 2 (B)) and can be interconnected by at least one dividing plate 34, and wherein said membrane filtration district 32 is arranged at respect to precipitation or higher place, 3 end one of film groove.
Fig. 2 (A) is the detailed structure schematic diagram of a kind of concrete enforcement aspect of described precipitation or film groove 3, the dividing plate 34 that is positioned at 32 belows, membrane filtration district in a plurality of dividing plates 34 in this precipitation or the film groove 3 is to be an inclined design, with so that in the membrane filtration district 32 reppd glue plumages, discharge via the mud outlet 36 in this district again after discharging and enter settling zone 31 via opening 35.The quantity of described opening 35 and position can optionally be arranged at arbitrary place of dividing plate 34, are preferably dividing plate 34 places that are arranged at 32 belows, membrane filtration district, so that sediment is discharged.
Fig. 2 (B) is the another kind of concrete detailed structure schematic diagram of implementing aspect of described precipitation or film groove 3, and except every the design difference of version 34, all the other are all identical with Fig. 2 (A).In precipitation of the present invention or the film groove 3 every version 34 design, also can be shown in Fig. 2 (B), only use single inclination every version 34, separate out settling zone 31 and membrane filtration district 32.The present invention is not particularly limited every the arbitrarily conversion use of design of version, as long as can effectively separate settling zone 31 and membrane filtration district 32, and the glue plumage discharge of precipitation is got final product.
The film material that the present invention uses comprises, but is not limited to: the UF of adhesive-bonded fabric, pottery, PVDF or MF film, the visual actual conditions of this skill person are familiar with in selecting for use of film material, select the film of its suitable material for use.
Described precipitation or film groove 3 also can have the group Pu 5 of drawing water, and are to be connected in described film 33 in order to extract the water after film film 33 filters.Can be used as the influent stream water of secondary water or RO pure water system via the water after film 33 filtrations.
Preferably, the membrane filtration district in described precipitation or the film groove 3 can further comprise an aeration tube 37 as reducing the usefulness that impurity adheres to or be deposited on film surface, promotes film efficient and extends working time.Precipitation of the present invention or film groove 3 can further have an overfall 38, and the cell body limit that it is arranged at membrane filtration district 32 can make the too much water in this district discharge.
Again, the particulate removal device further can comprise a backflow group Pu 6 in the water of the present invention, extracts to fast mixed groove 1 in order to the water with described membrane filtration district 32, and the program that refluxes and purify more promotes the grade that draws flowing water.
Precipitation or the film groove 3 of described Fig. 2 (A), Fig. 2 (B) also can be used as a waste water treatment tank, the situation of its visual contaminated wastewater and use separately or with other existing wastewater treatment equipment collocation, in the hope of reaching best treatment effect.
On the other hand, the invention provides a kind of method of wastewater treatment, is to utilize particulate removal device in the described water of the present invention (with reference to figure 1).This method at first imports waste water the one fast groove 1 that mixes, and add coagulant and adjust pH value (preferable pH value is 3.0～7.5) to remove particulate stability, described coagulant comprises inorganic or organic coagulant, the wherein for example polynary aluminium chloride of inorganic coagulant (PACl), aluminum sulfate, ferric sulfate etc., organic coagulant such as polychlorostyrene hexadiene dimethyl amine; Afterwards the described fast flowing water that goes out that mixes groove 1 is imported one and mixes groove 2 slowly, can add or not add gelling agent and make useless water-borne glue plumage form big glue plumage, described gelling agent comprises, but is not limited to, and high molecular polymer for example is as polypropylene vinegar amine.Next, the described flowing water that goes out that mixes groove 1 is slowly imported a precipitation or a film groove 3, carry out gravitational settling earlier in the settling zone 31 of glue plumage described in this groove in precipitation or film groove 3, and flow into membrane filtration district 32 in precipitation or the film groove 3, the water discharge after film 33 filtrations that will distinguish via the group Pu 5 of drawing water that connects film 33 again than the waste water of upper strata clarification via the opening 35 of dividing plate 34 in the cell body.The water of discharging can be used as influent stream water or other purposes of secondary water or RO pure water system.
It is to have the knack of this operator can select allotment arbitrarily for use for the regulation and control of described pH value, coagulant or gelling agent, and is not particularly limited.
Preferably, method of the present invention can be further can be by by the group Pu 6 of refluxing, the water in described membrane filtration district 32 is extracted to the fast groove 1 that mixes, the program that refluxes and purify more promotes the grade that draws flowing water and increases follow-up using value.
Below be by by several embodiment and cooperate graphic explanation enforcement aspect of the present invention, but be not to be used to limit claim of the present invention.
Embodiment
Embodiment one, CMP composite waste are handled experiment
Use small-sized precipitation or film groove (21cm (L) * 21cm (W) * 60cm (H)) (the film water yield is set at 32mL/min) in order to handle the CMP composite waste.This turbidity of wastewater 220～270NTU, total organic carbon (total organic carbon, TOC) 30～37mg/L.The CMP composite waste is placed the 100L Plastic Drum, carry out earlier mixing soon handling, coagulant adopts PACl.The PACl of duration of test adds dose and becomes along with waste water, about 1000～2800mg/L.And then, change into and mix operation slowly mixer deceleration in the above-mentioned Plastic Drum.Precipitation or film groove are provided with fluid level controller and can inject waste water automatically.Employed adhesive-bonded fabric film is that flat (10cm * 10cm) is during operation, with 2.4m during test
3/ m
2Flux (the flux of/d (as Fig. 3), J represents with symbol) extract upper clear liquid behind the coagulating sedimentation by film, the saturating pressure (transmembrane pressure, TMP) along with the variation of time as shown in Figure 4, via the air backwash of set time, TMP falls between 100～500mmHg.Fig. 5 shows the turbidity and the TOC water quality data of experiment in continuous 7 days.When PACl adds dose control when not good, the upper clear liquid turbidity once reached 20NTU behind the coagulation, made the voltage rise height, but film handle water turbidity all can be less than 1NTU.
Embodiment two, the former water treatment experiment of high turbidity (not coagulation pre-treatment)
Present embodiment is to use precipitation or the film groove shown in Fig. 2 (A) to handle the not preceding former water of coagulation.The structure of this precipitation or film groove is to use the square groove of acryl system (21cm (L) * 21cm (W) * 57cm (H)), effective volume is 20L, aeration tube is installed in the thin film region bottom, reduces the chance that particulate adheres in film surface with aeration mode (air mass flow 6L/min).Film adopts the adhesive-bonded fabric filter material, and it is the network structure thing of opening hole, and the hole diameter size all between 30～50 μ m, is the hydrophily material, and the long 22cm of lamina membranacea external dimensions, wide 15cm, the area on two sides are 600m altogether
2Influent stream water is deployed into the former water of high turbidity to carry out evaluation test for utilizing the Shimen Dam bed mud.
Operating condition is for setting out streamflow 55mL/min, water flux density 1.2m
3/ m
2/ day, influent stream water turbidity 4,000～10 during the continued operation, 000NTU goes out the flowing water turbidity and reduces to average 50NTU, and the clearance of turbidity reaches more than 99%; Go out streamflow and still can keep more than the 51mL/min after 8 days, show pure adhesive-bonded fabric membrane filtration ultra, utilize this kind operation strategy can long-time operation in continued operation.
Embodiment three, the former water treatment experiment of high turbidity (coagulation pre-treatment)
Use small-sized precipitation/film treatment trough (the experimental provision specification is with embodiment two) to carry out middle turbidity water filtration Processing Test, it is the middle turbidity water that middle nectarine garden oil plant has added coagulant that desire is handled water, its turbidity 96NTU handles through the adhesive-bonded fabric film again, keeps water flux density 1.2m
3/ m
2During/day, go out the flowing water turbidity and on average can reduce to 1.3NTU, clearance average 99%.
By the foregoing description result as can be known, the particulate removal device can make the flowing water turbidity that of CMP composite waste on average reduce to below the 1NTU in the water of use the present invention exploitation, and the former water of middle and high turbidity is after this device is handled, go out flowing water turbidity the best and can reduce to 1.3NTU, particulate can be effectively removed, and the shortcoming that the normal film that takes place of conventional films groove blocks can be solved.
Other implements aspect
Implementation method of the present invention has been specified among the described embodiment, any those skilled in the art that scholar all can comply with explanation of the present invention, in not deviating from spirit of the present invention and scope, optionally change, modify the present invention, therefore, other enforcement aspect also is included in the claim of the present invention.
Claims (32)
1. particulate removal device in the water comprises:
The one fast groove that mixes;
One mixes groove slowly; And
One precipitation or film groove;
It is characterized in that: comprise in described precipitation or the film groove: a settling zone is used for making the described glue plumage precipitation that groove goes out flowing water of mixing slowly; And a membrane filtration district, this membrane filtration district comprises at least one film, in order to filter the water through described settling zone post precipitation; Described settling zone and membrane filtration district be by at least one baffle region every and two zones have opening and can be interconnected, wherein said membrane filtration district is arranged at respect to precipitation or film bottom land one higher place.
2. device as claimed in claim 1 is characterized in that: described precipitation or film groove further have a mud outlet, are used to make the glue plumage of precipitation to discharge.
3. device as claimed in claim 1 is characterized in that: described precipitation or film groove further have the group Pu of drawing water, and are to be connected in described film in order to extract the water through membrane filtration.
4. device as claimed in claim 1, it is characterized in that: described dividing plate is a plurality of, and the dividing plate that is positioned at film isolated area below in these a plurality of dividing plates is to be an inclined design, with so that discharge and enter the settling zone and discharge in the glue plumage of described film isolated area precipitation.
5. device as claimed in claim 1 is characterized in that: described dividing plate is single dividing plate, and this dividing plate is skewed design with respect to the waste water treatment tank cell wall, enters the settling zone so that the glue plumage of precipitation is discharged and discharges.
6. device as claimed in claim 1 is characterized in that: described precipitation or film groove further comprise an aeration tube, as reducing the usefulness that impurity adheres to or be deposited on film surface.
7. device as claimed in claim 1 is characterized in that: further comprise a backflow group Pu, extract to described fast mixed groove in order to the water with described film isolated area.
8. device as claimed in claim 1 is characterized in that: the material of described film comprises UF or the MF film of adhesive-bonded fabric, pottery, PVDF.
9. device as claimed in claim 1 is characterized in that: described waste water is to comprise: wastewater form mechanic grinding or turbidity 100～10, the former water of 000NTU.
10. one kind precipitates or the film groove, it is characterized in that, comprises:
One settling zone is used for making the contamination precipitation of waste water; And
One membrane filtration district, this membrane filtration district comprises at least one film, in order to filter the water through described settling zone post precipitation;
Described settling zone and membrane filtration district be by at least one baffle region every and two zones have opening and can be interconnected, wherein said membrane filtration district is arranged at respect to precipitation or film bottom land one higher place.
11. precipitation as claimed in claim 10 or film groove is characterized in that: further have a mud outlet, be used to make the sediment of precipitation to discharge.
12. precipitation as claimed in claim 10 or film groove is characterized in that: further having the group Pu of drawing water, is to be connected in described film, in order to extract the water through membrane filtration.
13. precipitation as claimed in claim 10 or film groove, it is characterized in that: described dividing plate is to be plural dividing plate, the dividing plate that is positioned at film isolated area below in this plural number dividing plate is to be an inclined design, discharges with entering the settling zone so that the sediment of described film isolated area precipitation is discharged.
14. precipitation as claimed in claim 10 or film groove is characterized in that: described dividing plate is single dividing plate, and this dividing plate is skewed design with respect to the waste water treatment tank cell wall, enters the settling zone so that the glue plumage of precipitation is discharged and discharges.
15. precipitation as claimed in claim 10 or film groove is characterized in that: further comprise an aeration tube, as reducing the usefulness that impurity adheres to or be deposited on film surface.
16. precipitation as claimed in claim 10 or film groove is characterized in that: the material of described film comprises UF or the MF film of adhesive-bonded fabric, pottery, PVDF.
17. the removal method of particulate is characterized in that in the water, comprises the following step:
(a) waste water is imported a fast groove that mixes, and add coagulant and adjust the pH value to remove particulate stability;
(b) flowing water that goes out with described step (a) imports a mixed slowly groove, makes particulate formation glue plumage in the waste water; And
(c) the outflow water with described step (b) imports a precipitation or a film groove, the settling zone of described glue plumage in precipitation or film groove carries out gravitational settling earlier, and can discharge behind the membrane filtration in the membrane filtration district of waste water in precipitation or film groove of upper strata clarification in the cell body.
18. method as claimed in claim 17 is characterized in that: can further increase by a backflow program, make the waste water in the membrane filtration district in the step (c) lead back the described fast groove that mixes again.
19. method as claimed in claim 17 is characterized in that: described step (c) is discharged goes out the influent stream water that flowing water can be used as secondary water or RO pure water system.
20. method as claimed in claim 17 is characterized in that: the glue plumage of described step (c) behind gravitational settling further discharged by the mud outlet of precipitation or film trench bottom.
21. method as claimed in claim 17 is characterized in that: described precipitation or film groove further have the group Pu of drawing water, and are to be connected in described film, in order to extract the water through membrane filtration.
22. method as claimed in claim 17 is characterized in that: described precipitation or film groove further comprise an aeration tube, as reducing the usefulness that impurity adheres to or be deposited on film surface.
23. method as claimed in claim 17 is characterized in that: the waste water that described step (a) is imported carries out earlier mixing soon and mixed slowly pre-treatment.
24. method as claimed in claim 17 is characterized in that: described waste water is to comprise: wastewater form mechanic grinding or turbidity 100～10, the former water of 000NTU.
25. method as claimed in claim 17 is characterized in that: described coagulant comprises inorganic coagulant or organic coagulant.
26. method as claimed in claim 25 is characterized in that: described inorganic coagulant comprises polynary aluminium chloride, aluminum sulfate, ferric sulfate or its combination.
27. method as claimed in claim 25 is characterized in that: described organic coagulant comprises polychlorostyrene hexadiene dimethyl amine.
28. method as claimed in claim 17 is characterized in that: described step (b) is further added gelling agent.
29. method as claimed in claim 28 is characterized in that: described gelling agent comprises high molecular polymer.
30. method as claimed in claim 28 is characterized in that: described gelling agent comprises polypropylene vinegar amine.
31. method as claimed in claim 17 is characterized in that: the pH value that described step (a) is adjusted is to be 3.0～7.5.
32. method as claimed in claim 17 is characterized in that: the glue plumage size of described step (b) is 〉=the glue plumage of 2 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101158808A CN100500255C (en) | 2005-11-10 | 2005-11-10 | Apparatus and method for removing particle from water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101158808A CN100500255C (en) | 2005-11-10 | 2005-11-10 | Apparatus and method for removing particle from water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1962018A true CN1962018A (en) | 2007-05-16 |
| CN100500255C CN100500255C (en) | 2009-06-17 |
Family
ID=38081349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101158808A Active CN100500255C (en) | 2005-11-10 | 2005-11-10 | Apparatus and method for removing particle from water |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100500255C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101921008A (en) * | 2010-09-25 | 2010-12-22 | 哈尔滨工业大学 | Water treatment device integrating functions of clarification, air flotation and ultrafiltration |
| CN102107942A (en) * | 2009-12-25 | 2011-06-29 | 安集微电子（上海）有限公司 | Processing method of chemical mechanical polishing (CMP) waste liquid |
| CN104402148A (en) * | 2014-12-16 | 2015-03-11 | 马鞍山太时芯光科技有限公司 | Secondary utilization device and secondary utilization method for cutting water |
| CN106110716A (en) * | 2016-07-13 | 2016-11-16 | 浙江省海洋水产研究所 | A kind of microzooplankton settling separation device and separation method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4408524B2 (en) * | 2000-03-29 | 2010-02-03 | 義公 渡辺 | Fresh water system |
| CN1316394A (en) * | 2000-04-06 | 2001-10-10 | 刘玉伶 | Process for reclaiming sewage |
| CN1137856C (en) * | 2000-11-30 | 2004-02-11 | 中国科学院生态环境研究中心 | Process for reclaiming waste generated by grinding bearings |
-
2005
- 2005-11-10 CN CNB2005101158808A patent/CN100500255C/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102107942A (en) * | 2009-12-25 | 2011-06-29 | 安集微电子（上海）有限公司 | Processing method of chemical mechanical polishing (CMP) waste liquid |
| CN102107942B (en) * | 2009-12-25 | 2014-09-24 | 安集微电子（上海）有限公司 | Processing method of chemical mechanical polishing (CMP) waste liquid |
| CN101921008A (en) * | 2010-09-25 | 2010-12-22 | 哈尔滨工业大学 | Water treatment device integrating functions of clarification, air flotation and ultrafiltration |
| CN104402148A (en) * | 2014-12-16 | 2015-03-11 | 马鞍山太时芯光科技有限公司 | Secondary utilization device and secondary utilization method for cutting water |
| CN106110716A (en) * | 2016-07-13 | 2016-11-16 | 浙江省海洋水产研究所 | A kind of microzooplankton settling separation device and separation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100500255C (en) | 2009-06-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1318312C (en) | Method and device for clarification of liquids, particularly water, loaded with material in suspension | |
| CN105836932A (en) | Method for treating wastewater containing sediment | |
| CN106348528A (en) | Sewage treatment system combining magnetic loading precipitation and biological aerated filter tank | |
| CN106219859B (en) | Gush water multistage purification processing system more than polluted bed mud processing in river lake | |
| CN100500255C (en) | Apparatus and method for removing particle from water | |
| CN107867744A (en) | One kind loading flocculation sewage water treatment method | |
| CN109721191A (en) | A kind of sandstone building stones production wastewater treatment system | |
| CN104003545A (en) | Centralized treatment process of oil field fracturing wastewater | |
| CN109179578A (en) | A kind of processing method of coal mine water and/or coal washing waste water | |
| CN206127066U (en) | Magnetism loading deposits compound sewage treatment system with bological aerated filter | |
| CN209442766U (en) | Defeated coal coal-contained wastewater processing transformation device | |
| CN110436596A (en) | A kind of processing of combined type backwashing water and reclaiming system | |
| CN105999776A (en) | Sludge layer filtering and settling pond and method thereof | |
| CN214060175U (en) | Comprehensive wastewater treatment system for steel industry | |
| CN207845318U (en) | A kind of ceramic sewage treatment device | |
| CN210825721U (en) | Multifunctional efficient flushing water treatment station | |
| CN113830952A (en) | Phosphorite mine water treatment system and treatment method | |
| CN112607901A (en) | Comprehensive wastewater treatment system and method for steel industry | |
| CN206437971U (en) | A kind of environment-friendly high-efficiency pickling waste waters processing system | |
| TWI298313B (en) | Apparatus and method for removal of particles in water | |
| KR100307975B1 (en) | Rapid Flocculation and Settling by the Floc Pelletization | |
| CN110510822A (en) | A kind of polycrystalline silicon industry wastewater treatment recovery method | |
| CN209481361U (en) | A kind of processing unit of biochemical precipitating water outlet | |
| JPWO2016020957A1 (en) | Filtration method and filtration device | |
| CN220579025U (en) | Efficient sedimentation tank |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |