CN1955332A - Evaporator device with container for containing being evaporated material - Google Patents
Evaporator device with container for containing being evaporated material Download PDFInfo
- Publication number
- CN1955332A CN1955332A CN 200610110081 CN200610110081A CN1955332A CN 1955332 A CN1955332 A CN 1955332A CN 200610110081 CN200610110081 CN 200610110081 CN 200610110081 A CN200610110081 A CN 200610110081A CN 1955332 A CN1955332 A CN 1955332A
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- China
- Prior art keywords
- evaporator unit
- container
- plate
- oil
- valve
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- 239000000463 material Substances 0.000 title claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 9
- 238000009835 boiling Methods 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052725 zinc Inorganic materials 0.000 abstract description 4
- 239000011701 zinc Substances 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000006200 vaporizer Substances 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 239000002828 fuel tank Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 235000015927 pasta Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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Abstract
The invention relates to an evaporator device with a receptacle for holding material to be evaporated. With this evaporator device an oil film can be applied onto specific sites of a sheet to be coated, this sheet being coated with aluminum or zinc in a further step. At the sites at which the oil film is located, no aluminum or zinc is deposited. With the aid of a rod valve, precise application of the oil onto the sheet is ensured. This rod valve is driven by a stepping motor, which can release percentage fractions of oil vapor.
Description
Technical field
The present invention relates to a kind of evaporator unit as described in the preamble according to claim 1.
Background technology
For example, need oil vaporizer to be used to produce electric capacity.Here, dielectric medium, for example synthetic sheet material have metal level.For fear of the negative consequences of electric capacity after insulation failure, on synthetic sheet material, be provided with some metal-free bands.Generate these metal-free bands, thereby the some appointed part on synthetic sheet material are coated oil film.Be coated in metallic vapor on this synthetic sheet material subsequently, be preferably aluminium steam can not those positions attached to the oil film place on.
A kind of evaporator unit that has ozzle is disclosed in JP 10008241.In the document, the material that evaporate evaporates in crucible, and wherein this material leaves by ozzle, and moves along the direction towards substrate, and this material is condensation in this substrate finally.By means of valve, can control the quantity of steam that leaves.Yet this device only is applicable to evaporated metal.
And, be used to produce under vacuum condition, be coated with, in the form of sheets width of cloth material form metal-free band, be known in particular for the device of producing electric capacity, this device comprises and is used to hold separating agent, the tubular vessel (DE 3922187A1) of oil for example.Be positioned with heating rod in the tubular vessel by the sealing of some ring discoids end, oil is trickling around this heating rod.And, in this container, being positioned with steam outlet pipe, a distal process of this steam outlet pipe goes out the pasta top, and is provided with the outlet ozzle at its other end.Here, this outlet ozzle is positioned at the below of oil reservoir.
And, known a kind of device that is used to evaporate oil, and oil is set in the container of similar pipe (JP2001 279425).This container has the some openings that are arranged to row, and steam can leave from these openings.
In another kind of device, oil level is (JP2004-214185) in elongated fuel tank.This fuel tank has some openings, and these aperture arrangement are embarked on journey, and is the form of ozzle bar.By means of this ozzle bar, can be coated with very large area.
Known a kind of vapourizing unit comprises container and tightness system and ejectisome (DE19848177 A1).In this device, container is connected to tightness system, and the sealing device is connected to ejectisome by supply line.
Method with the tripping device of being with vaporizer partially coated in the substrate of moving also is known (EP 1493836).This vaporizer comprises two chambers, and one is arranged in another top, and couples together by passage.The material of vaporizing is set at down in the chamber, and can enter the chamber by passage.By means of being subjected to voltage-controlled proportional valve, can control the quantity of steam that the unit time enters the chamber.
Summary of the invention
The invention solves the problem that is provided for evaporating oily evaporator unit, this evaporator unit comprises tightness system at the ozzle place.
Problem is resolved by the described feature of claim 1.
Therefore, the present invention relates to a kind of evaporator unit, this evaporator unit has the container that is used to keep the evaporated material of wanting.Utilize this evaporator unit, can coat oil film in the appointed part of the sheet material that will apply, in further step, this sheet material will be coated with aluminium or zinc.The position at oil film place is deposition of aluminum or zinc not.Under the help of rod valve, guaranteed oil accurately is coated on the sheet material.This rod valve is driven by step motor, and this valve can discharge oily vapour in precentagewise share ground.
By this evaporator unit, substrate, be preferably the solid-state or liquid form mixt that metallized synthetic film can be coated with stable hydrocarbon or unsaturated hydrocarbons.Yet, can also use full synthetic oil., under the some roller effects above the described evaporator unit, can guide synthetic sheet material here, as shown in the JP 2004-214185.
Use this evaporator unit owing to can measure oily vapour, thereby can be on synthetic sheet material coating metal layer or number of metal layer equably.The oil reservoir that utilizes this evaporator unit coating to have other material subsequently any problem can not occur yet.
Thereby, below the outlet ozzle, be provided with tightness system, can regulate the oil gas quantity that leaves.Guaranteed that oily vapour can not leave from device constantly, especially because tightness system can also be by complete closed.Therefore be that oily vapour no longer may leave.This has special advantage, if do not have substrate in the i.e. short period of time through the vaporizer top, does not then need to interrupt heat treated.
Another advantage is that the pollution of leaving that oily vapour caused has been dropped to minimum.
Reduced considerably by lasting loss of evaporating the oil that causes thereupon.
Description of drawings
Embodiments of the invention are described in the drawings, and will describe in further detail hereinafter.
In the accompanying drawings:
Fig. 1 is the decomposition diagram of evaporator unit;
Fig. 2 is by the sectional view according to the evaporator unit of Fig. 1;
Fig. 3 is by the longitdinal cross-section diagram according to the part of the evaporator unit of Fig. 1;
Fig. 4 is the vertical view according to the evaporator unit of Fig. 1.
Embodiment
Fig. 1 has shown the decomposition view according to evaporator unit of the present invention.This evaporator unit 1 comprises oil vessel 2, is positioned with heating rod 3 in this oil vessel 2.Above this oil vessel 2, be provided with valve plate 4 with three vertical holes 5,6,7.Vertically be positioned with heating rod 8,9 in the hole 5 and 7, and vertically be positioned with rod valve 10 in the hole 6. Heating rod 8,9 or rod valve 10 show the outside that is positioned at valve plate 4 in Fig. 1.Be positioned with ozzle plate 11 above this valve plate 4, stopping on this ozzle plate 11 has tuning plate 12.14 expression step motor, this step motor drives first runner 15, and this first runner 15 drives second runner 17 by connect elements 16 (for example chain or vee-belt).Here, preferred embodiment is a chain.Second runner 17 is connected with an end of rod valve 10, and under the help of step motor 14, rod valve 10 can be rotated around its longitudinal axis.
Be positioned with some openings in the top side of oil vessel 2, oily vapour can leave this oil vessel 2 by these openings.These openings are invisible in Fig. 1, have only sealing member 18-25 to surround these openings.Be provided with some through hole 26-34 in rod valve 10, the quantity of through hole is corresponding with the quantity of sealing member 18-25.If rod valve 10 is a hollow tube, so at the opposite side that can't see, this rod valve 10 also has some through holes.If rod valve 10 is solid, then through hole 26-34 extends through whole rod valve 10.
Can find the hole 35-47 of same quantity on vertical hole 6 in valve plate 4.Below this vertical hole 6, also be provided with the hole of respective numbers.But these holes are invisible in Fig. 1.
If by means of the oil in the heating rod 3 heated oil containers 2, then oil is by the opening in the oil vessel, and some opening (not shown in figure 1)s of passing on the downside of the valve plate 4 on the rod valve 10 that is positioned in vertical hole 6 are left.If these through holes 26-34 of rod valve 10 is directed vertically, then Zheng Fa material can and leave by the corresponding hole 35-47 by tuning plate 12 and ozzle plate 11 formed gaps by rod valve 10, and deposition is positioned in the substrate of this top, gap.
48-54 represents joint bolt, by these joint bolts 48-54, these separate parts of evaporator unit 1 is kept together.
Fig. 2 has shown the cross section by evaporator unit 1.Be positioned with heating rod 3 in the internal space 55 of oil vessel 2, this heating rod 3 is made of core 56 and housing 57.Core 56 can heat by means of voltage source.Heating rod 3 is surrounded by oil 58 fully.Oil vessel 2 has some openings at its end face, and one of them opening 59 as seen.Be positioned with among the lip ring 18-25 above this opening 59, for example sealing member 22.Adjacent openings 59 be hole 60 in the valve plate 4, the hole 30 in the rod valve 10 is led in this hole 60 again.One space 61 is arranged above rod valve, and this space 61 has last clearance opening 62.This clearance opening 62 is formed by ozzle plate 11 and tuning plate 12.Be provided with sealing member 63 between ozzle plate 11 and valve plate 4, as shown in Figure 1, sealing part 63 is placed around whole space 61.Vertically can see heating rod 8,9 once more in the hole 5,7.These heating rods 8,9 are heated to such temperature with valve plate 4, and under this temperature, the oil in the valve plate 4 can not condensation.
In the view of Fig. 2, rod valve 10 is opened, and promptly Zheng Fa material can pass through clearance opening 62, and arrives the substrate (not shown) that is positioned at these clearance opening 62 tops.
By rod valve 10 is rotated along clockwise direction or counterclockwise, can regulate the material steam that sends from oil vessel 2 more or less.Start from specified angle, yet at the latest after rotating 90 degree, material steam is completely sealed by rod valve 10.
Fig. 3 has shown the part of evaporator unit shown in Figure 11, and rod valve 10 is closed specifically.Here the oil vessel 2 with heating rod 3 is obvious visible.Here, through hole 32-34, the 82-84 in the rod valve 10 extends in the plane at accompanying drawing place, makes the opening 60, the 68-71 that are positioned at valve plate 4 downsides seal.Thereby oily vapour can not leave from oil vessel 2 by the hole in the space 61 59,78-81,85 or 60,68-71, and arrives substrate from these holes.Get around mouthfuls 60,68-71 is provided with lip ring 22,72-75.And, can see dog screw 76.By this dog screw 76, runner 17 is fastened on the axle of rod valve 10, this dog screw 76 for example can be a headless screw.And, be apparent that oil vessel 2 is sealed by plate 77.In addition, runner 17 in Fig. 3 as seen, can be with the preferred embodiment of connect elements 16, promptly chain is placed on this runner 17.
Fig. 4 has shown the vertical view of cutting open according to evaporator unit 1 part of Fig. 1.Here can see ozzle plate 11 and tuning plate 12, and heating rod 8,9 and rod valve 10.Runner 15 and 17, vee-belt 16 and step motor 14 are obvious visible.
Claims (12)
1. evaporator unit, it has container (2), and it is used to keep the material that will evaporate; Plate (11,12), it is located at this container (2) top, has opening (62), is used to export the material that will evaporate, it is characterized in that, container (2) has at least one open bore (60) at its end face, and this open bore (60) is oriented orthogonal to this end face, and at plate (11,12) and be provided with between the container (2) band through hole (30) cylinder-shaped body (10), this cylinder-shaped body (10) can rotate around axis.
2. evaporator unit as claimed in claim 1 wherein, is provided with several holes at the end face of described container (2), and described main body (10) is rod valve, and this rod valve has the as many through hole with container (2).
3. evaporator unit as claimed in claim 1, wherein, the described cylinder-shaped body (10) that can rotate is set in the valve plate (4).
4. evaporator unit as claimed in claim 3 wherein, is provided with some heating rods (8,9) in described valve plate (4).
5. evaporator unit as claimed in claim 3, wherein, described valve plate (4) rests the end face of described container (2), and described valve plate (4) has sealing member (22) at its downside, and sealing part (22) extends around the opening (59) of this container (2).
6. evaporator unit as claimed in claim 1, wherein, the described cylinder-shaped body (10) that can rotate can be rotated by motor (14).
7. evaporator unit as claimed in claim 6, wherein, described motor (14) is connected with first runner (15), and this first runner is connected with second runner (17) by connect elements (16).
8. evaporator unit as claimed in claim 7, wherein, described connect elements (16) is a chain.
9. evaporator unit as claimed in claim 1 wherein, is provided with at least one heating tube (3) in described container (2).
10. evaporator unit as claimed in claim 1, wherein, described opening (62) is formed by first plate (11) and second plate (12), and these plates (11,12) can move relative to each other.
11. evaporator unit as claimed in claim 9, wherein, described heating tube (3) is made of core (56) and housing (57).
12. evaporator unit as claimed in claim 4, wherein, described heating rod (8,9) remains on described valve plate to be higher than under the temperature of boiling point of oil (58).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP0502335.5 | 2005-10-26 | ||
| EP0502335 | 2005-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1955332A true CN1955332A (en) | 2007-05-02 |
Family
ID=38062876
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610110081 Pending CN1955332A (en) | 2005-10-26 | 2006-07-31 | Evaporator device with container for containing being evaporated material |
| CN 200610110077 Pending CN1955331A (en) | 2005-10-26 | 2006-07-31 | Device for gas phase sedimentation on substrate |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610110077 Pending CN1955331A (en) | 2005-10-26 | 2006-07-31 | Device for gas phase sedimentation on substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN1955332A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268645A (en) * | 2010-06-02 | 2011-12-07 | 本田技研工业株式会社 | Plasma film deposition method |
| CN108926868A (en) * | 2017-05-26 | 2018-12-04 | 环球展览公司 | The sublimation unit of time stability with output vapour pressure |
| EP3455385A4 (en) * | 2016-04-25 | 2020-02-26 | Innovative Advanced Materials, Inc. | Effusion cells, deposition systems including effusion cells, and related methods |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213077A (en) * | 2013-05-30 | 2014-12-17 | 海洋王照明科技股份有限公司 | Evaporation equipment used for organic electroluminescent device |
| KR102260572B1 (en) * | 2014-07-07 | 2021-06-07 | (주)선익시스템 | Thin Film Deposition Apparatus with Multiple Evaporation Source |
| CN106560007B (en) * | 2014-07-07 | 2018-12-14 | 铣益系统有限责任公司 | The film deposition apparatus for having multiple crucibles |
| CN108823535B (en) * | 2018-07-10 | 2020-04-14 | 京东方科技集团股份有限公司 | Evaporation plating equipment |
-
2006
- 2006-07-31 CN CN 200610110081 patent/CN1955332A/en active Pending
- 2006-07-31 CN CN 200610110077 patent/CN1955331A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102268645A (en) * | 2010-06-02 | 2011-12-07 | 本田技研工业株式会社 | Plasma film deposition method |
| US8673408B2 (en) | 2010-06-02 | 2014-03-18 | Honda Motor Co., Ltd. | Plasma film deposition method |
| EP3455385A4 (en) * | 2016-04-25 | 2020-02-26 | Innovative Advanced Materials, Inc. | Effusion cells, deposition systems including effusion cells, and related methods |
| TWI781929B (en) * | 2016-04-25 | 2022-11-01 | 美商創新先進材料股份有限公司 | Effusion cells, deposition systems including effusion cells, and related methods |
| CN108926868A (en) * | 2017-05-26 | 2018-12-04 | 环球展览公司 | The sublimation unit of time stability with output vapour pressure |
| CN108926868B (en) * | 2017-05-26 | 2022-11-29 | 环球展览公司 | Sublimation unit with temporal stability of output vapor pressure |
| US11946131B2 (en) | 2017-05-26 | 2024-04-02 | Universal Display Corporation | Sublimation cell with time stability of output vapor pressure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1955331A (en) | 2007-05-02 |
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| PB01 | Publication | ||
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |