CN1947947A - Method for mfg. abrasion wheel for flattening milling large dimension diamond diaphragm - Google Patents
Method for mfg. abrasion wheel for flattening milling large dimension diamond diaphragm Download PDFInfo
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- CN1947947A CN1947947A CN 200610134177 CN200610134177A CN1947947A CN 1947947 A CN1947947 A CN 1947947A CN 200610134177 CN200610134177 CN 200610134177 CN 200610134177 A CN200610134177 A CN 200610134177A CN 1947947 A CN1947947 A CN 1947947A
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Abstract
A process for preparing the abrasive wheel used to smooth and polishing the large-area diamond membrane includes such steps as choosing raw materials (Ti, Al, Cr, Nb, V and Si powder), proportional mixing, ball grinding in argon gas for alloying, die pressing to obtain an abrasive ring, sintering, heat treating, and welding it onto a basic disc.
Description
Technical field
The invention belongs to powder metallurgical technology.Relate to a kind of method for manufacturing grinding wheel that is used for flattening milling large dimension diamond diaphragm, specially refer to a kind of preparation method that is used for the titanium-aluminium alloy base grinding wheel of the efficient flattening milling processing in large scale CVD diamond film surface.
Background technology
Since the nineties, the technology of preparing of chemical vapour deposition diamond (CVD) film and performance characterization etc. have been obtained many breakthroughs, and with research preliminary phase ratio, sedimentation rate has improved nearly thousand times, and that preparation cost has been reduced to is original ten thousand/.But having limited the polishing planarization of extensive use, the especially Large Area CVD Diamond Films of diamond film, the follow-up polishing planarization of the diamond film that relatively lags behind become the bottleneck problem that diamond film is used in high-tech area.
Because diamond is the present known the highest and high chemically inert material of hardness, make the polishing planarization that in the ultraprecise manufacture field, extensively adopts to be difficult to be applicable to the CVD diamond film as traditional chemically mechanical polishing, electrobrightening etc.Though developed CVD diamond film planarization such as laser beam polishing, ion beam polishing at present, be primarily aimed at the diamond film of small size (φ≤1 inch); The thermo-chemical polishing technology is a kind of large dimension diamond diaphragm polishing planarization commonly used at present, its utilize molten carbon metals such as iron pan, nickel dish under uniform temperature and pressure with the diamond film relative motion, the carbon atom on diamond film surface is spread in metallic plate finish polishing, but temperature height during owing to polishing, the oxidation of medal polish dish, serious wear, and the polishing disk elevated temperature strength is low, and distortion is serious, therefore is difficult to the machining accuracy and the efficient of guarantee fund's diamond film.Titanium-aluminium alloy is except having good high-temperature intensity and wear resistance at elevated temperature, titanium elements that itself is contained and carbon have very strong compatibility, in the diamond film thermo-chemical polishing, have a good application prospect, but because the restriction of manufacture craft at present, its elevated temperature strength, non-oxidizability or cold plasticity can't satisfy the requirement of diamond film thermo-chemical polishing.
Summary of the invention
The purpose of this invention is to provide a kind of method for manufacturing grinding wheel that is used for flattening milling large dimension diamond diaphragm, specially refer to a kind of preparation method that is used for the titanium-aluminium alloy base grinding wheel of the efficient flattening milling processing in large scale CVD diamond film surface.
The present invention adopts following technical scheme to realize:
1. select materials: Ti, Al, Cr, Nb, V, the Si powder, purity＞99.5%, granularity＜150 μ m, 40～46% aluminium in molar ratio, 1～2% chromium, 1～2% niobium, 0～4% vanadium, 0～2% silicon, surplus is a titanium.
2. prealloy: material powder and stainless steel ball are packed in the vacuum ball grinder; ratio of grinding media to material 10～1 5: 1, and charge into argon gas in case the raw material oxidation, ball milling 20～50h on planetary gear ball mill or high energy ball mill; rotating speed is 280～500r/min, afterwards protective gas is changed to Ar+1%N
2, continuing ball milling 20～50h, rotating speed is 350～580r/min.
3. alloying: at Ar+5%volN
2Ball milling 50～90h in the atmosphere, rotating speed 500～580r/min.
4. sintering: the alloyed powder of screening particle diameter＜20 μ m, vacuum sintering furnace pressure sintering will be put into after the alloyed powder precompressed, 900～1200 ℃ of sintering temperatures, sintering time 15～60min, sintering pressure 0.2～10Mpa sinters the emery wheel ring plate into, ring plate external diameter φ 150～320mm, internal diameter φ 120～300mm, thickness 5～10mm.
5. the cup emery wheel dish is made and is handled: will be welded on after the emery wheel ring plate heat treatment behind the sintering on the aluminium base cup emery wheel basal disc outer rim of diameter 160～330mm, and repair with the cubic boron nitride conditioner discs and to make wheel face smooth.
Effect of the present invention and benefit are: the titanium-aluminium alloy base grinding wheel ring plate even tissue that adopts mechanical ball milling and vacuum pressed sintering to make, as shown in Figure 1, average grain size is less than 20 μ m, elevated temperature strength height (900 ℃ time yield strength greater than 600MPa), antioxygenic property good (2 hours mass change of oxidation are less than 0.0 5% under 900 ℃ of atmospheric environments), hardness height (HRC65～68), wear-resistant, be adapted under the atmospheric environment the grinding of large scale CVD diamond film high speed and dry, and at high temperature thermal chemical reaction takes place with the carbon atom on diamond film surface and reach the purpose of high speed planarization, be a kind of new tool at the processing of large scale CVD diamond film flattening milling.
Description of drawings
Fig. 1 is a titanium-aluminium alloy base grinding wheel light micrograph, and uniform crystal particles is tiny, and average-size is less than 20 μ m.
Fig. 2 is that titanium valve, aluminium powder and alloying element powder are through forming the SEM photo of alloying pellet in 150 hours behind the ball milling.
Fig. 3 is titanium valve, aluminium powder and alloying element powder through forming the SEM photo of alloying pellet in 150 hours behind the ball milling, and uniform particles is tiny, average-size 10 μ m.
Fig. 4 is the Al-alloy based emery wheel schematic diagram of making of special titanium, yield strength 650MPa during 99%, 900 ℃ of density, room temperature hardness HRC68.
The specific embodiment
Be described in detail the specific embodiment of the present invention below in conjunction with technical scheme and accompanying drawing.
Remove principle according to the diamond film heat chemistry, by optimizing alloying component proportioning and powder sintering process, make the strong carbophile titanium-aluminium alloy of high strength and high hardness base grinding wheel, a kind of technology of preparing of novel no abrasive material carbophile alloy-based emery wheel instrument is provided for the efficient flattening milling processing of large dimension diamond diaphragm.Preparation technology is as follows:
1) raw material: Ti, Al, Cr, the Nb powder, purity＞99.5%, granularity＜150 μ m, 50: 46: 2 in proportion: 2 (at%) took by weighing quality and are respectively 61.22g, 33.28 g, 2.66g, the titanium valve of 4.92g, aluminium powder, chromium powder and niobium powder also mix.
2) prealloy: material powder and stainless steel ball are packed in the vacuum ball grinder; ratio of grinding media to material 10: 1; and charge into argon gas in case the raw material oxidation; (or high energy ball mill) ball milling 50h on the planetary gear ball mill; rotating speed is 280～500r/min; afterwards protective gas is changed to Ar+1%volN2, continues ball milling 50h, rotating speed is 350～580r/min.
3) alloying: ball milling 50h in Ar+5%volN2 atmosphere, rotating speed 500～580r/min forms amorphous powdered alloy as shown in Figure 2.
4) sintering: as shown in Figure 3, the alloyed powder of screening particle diameter＜15 μ m, and take by weighing and put into vacuum sintering furnace pressure sintering, 1100 ℃ of sintering temperatures after this alloyed powder of 84g is pressed into the ring piece of external diameter 150mm, internal diameter 130mm in advance, sintering time 30min, sintering pressure 0.2MPa obtains the emery wheel ring plate behind the sintering, ring plate external diameter 150, internal diameter 130mm, thickness 5mm, density is 99%, Wei Shi hardness 960Hv.
5) the cup emery wheel dish is made and is handled: as shown in Figure 4, to be welded on uniformly after the emery wheel ring plate heat treatment behind the sintering on the aluminium base emery wheel basal disc periphery of diameter 160mm, and repair with the cubic boron nitride conditioner discs and to make the abrasive disc surfacing, emery wheel ring density 99%, yield strength 650MPa in the time of 900 ℃, room temperature hardness HRC68.
Claims (2)
1. a method for manufacturing grinding wheel that is used for flattening milling large dimension diamond diaphragm comprises that raw material is selected, proportioning components, prealloy, alloying, and sintering, cup emery wheel is made and treatment step, it is characterized in that:
Raw material is Ti, Al, and Cr, Nb, V, the Si powder, purity＞99.5%, granularity＜150 μ m, 40～46% aluminium in molar ratio, 1～2% chromium, 1～2% niobium, 0～4% vanadium, 0～2% silicon, surplus is that titanium carries out proportioning;
With material powder and the stainless steel ball ball milling alloying in the vacuum ball grinder of packing into; ratio of grinding media to material 10～15: 1, and charge into argon gas in case the raw material oxidation, at ball milling 20～50h on the planetary gear ball mill or on the high energy ball mill; rotating speed is 280～500r/min, afterwards protective gas is changed to Ar+1%vol N
2, continuing ball milling 30～50h, rotating speed is 350～580r/min, at last at Ar+5%volN
2Ball milling 50～90h in the atmosphere, rotating speed 500～580r/min;
The alloyed powder of screening particle diameter＜20 μ m with putting into vacuum sintering furnace pressure sintering after the alloyed powder precompressed, sinters the emery wheel ring plate into, ring plate external diameter 150～320mm, internal diameter 120～300mm, thickness 5～10mm.
2. a kind of method for manufacturing grinding wheel that is used for flattening milling large dimension diamond diaphragm according to claim 1, it is characterized in that: will be welded on after the emery wheel ring plate heat treatment behind the sintering on the cup emery wheel basal disc outer rim of diameter 160～330mm, and repair with the cubic boron nitride conditioner discs, make wheel face smooth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006101341776A CN100445034C (en) | 2006-11-02 | 2006-11-02 | Method for mfg. abrasion wheel for flattening milling large dimension diamond diaphragm |
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| CNB2006101341776A CN100445034C (en) | 2006-11-02 | 2006-11-02 | Method for mfg. abrasion wheel for flattening milling large dimension diamond diaphragm |
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| CN1947947A true CN1947947A (en) | 2007-04-18 |
| CN100445034C CN100445034C (en) | 2008-12-24 |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102225468A (en) * | 2011-06-03 | 2011-10-26 | 福建万龙金刚石工具有限公司 | Sintering mould and production process for diamond turbine bowl mill |
| CN102229097A (en) * | 2011-06-15 | 2011-11-02 | 河南中原吉凯恩气缸套有限公司 | Honing abrasive belt |
| CN103203453A (en) * | 2013-03-26 | 2013-07-17 | 大连理工大学 | Grinding wheel manufacturing method of edge-sharpening single crystal diamond tool |
| CN105773447A (en) * | 2016-05-24 | 2016-07-20 | 广东工业大学 | Novel dry type machining grinding tool and preparation method thereof |
| CN106077653A (en) * | 2016-07-20 | 2016-11-09 | 大连理工大学 | A kind of preparation method of novel W Mo Cr alloy polishing disk |
| CN115846651A (en) * | 2022-12-16 | 2023-03-28 | 广东工业大学 | Metal polishing disk and preparation method thereof |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3210977B2 (en) * | 1999-05-12 | 2001-09-25 | 経済産業省産業技術総合研究所長 | Whetstone for diamond polishing, diamond polishing method and diamond-polished body |
| DE60018634T2 (en) * | 1999-05-12 | 2005-08-04 | National Institute Of Advanced Industrial Science And Technology | Grinding and polishing tool for diamond, method for polishing diamond and polished diamond, and thus obtained single crystal diamond and sintered diamond press work piece |
| JP2003211361A (en) * | 2002-11-07 | 2003-07-29 | National Institute Of Advanced Industrial & Technology | Diamond polished body, single crystal diamond and diamond sintered body obtained by diamond polishing wheel |
| CN1810420A (en) * | 2005-01-27 | 2006-08-02 | 广东工业大学 | Making process of tool with single layer of super hard abrasive |
-
2006
- 2006-11-02 CN CNB2006101341776A patent/CN100445034C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102225468A (en) * | 2011-06-03 | 2011-10-26 | 福建万龙金刚石工具有限公司 | Sintering mould and production process for diamond turbine bowl mill |
| CN102229097A (en) * | 2011-06-15 | 2011-11-02 | 河南中原吉凯恩气缸套有限公司 | Honing abrasive belt |
| CN102229097B (en) * | 2011-06-15 | 2012-11-21 | 河南中原吉凯恩气缸套有限公司 | Honing abrasive belt |
| CN103203453A (en) * | 2013-03-26 | 2013-07-17 | 大连理工大学 | Grinding wheel manufacturing method of edge-sharpening single crystal diamond tool |
| CN105773447A (en) * | 2016-05-24 | 2016-07-20 | 广东工业大学 | Novel dry type machining grinding tool and preparation method thereof |
| CN106077653A (en) * | 2016-07-20 | 2016-11-09 | 大连理工大学 | A kind of preparation method of novel W Mo Cr alloy polishing disk |
| CN106077653B (en) * | 2016-07-20 | 2018-04-10 | 大连理工大学 | A kind of preparation method of new W Mo Cr alloy polishing disks |
| CN115846651A (en) * | 2022-12-16 | 2023-03-28 | 广东工业大学 | Metal polishing disk and preparation method thereof |
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| CN100445034C (en) | 2008-12-24 |
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