CN1947219A - Dielectric barrier discharge excimer light source - Google Patents
Dielectric barrier discharge excimer light source Download PDFInfo
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- CN1947219A CN1947219A CN 200580012116 CN200580012116A CN1947219A CN 1947219 A CN1947219 A CN 1947219A CN 200580012116 CN200580012116 CN 200580012116 CN 200580012116 A CN200580012116 A CN 200580012116A CN 1947219 A CN1947219 A CN 1947219A
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Abstract
An anode electrode (10) is composed of a long straight cylinder-shaped body, and the outer circumference of the cylinder-shaped body is covered with a dielectric (12). A cathode part (20) has a shape of straight half cylinder. A cathode (25) surrounds the anode, and the anode and the cathode are arranged parallel to one another in the lengthwise direction. The cathode is provided with a cathode wire group (16). In the cathode wire group, both edges of the wire are fixed at both edges (20D) of the half cylinder shaped body constituting the cathode part, in the lengthwise direction, so as to have the plurality of wires parallel to one another. On a surface (20S) of the cathode part on a side that faces the anode, a reflecting plane is formed for reflecting radiation in a vacuum ultraviolet region. Thus, high-intensity light having a wavelength in the vacuum ultraviolet region can be obtained, and an object to be irradiated can be efficiently irradiated with the light.
Description
Technical field
The present invention relates to the vacuum ultraviolet light source that a kind of high efficiency produces vacuum ultraviolet (VUV) field wavelength light.
Relate in particular to the dielectric barrier discharge excimer light source of a kind of high efficiency as vacuum ultraviolet light source (below be also referred to as the VUV light source), this light source can be used for utilizing in the microelectronic ultraviolet light to carry out material cleaning or utilize ultraviolet light to carry out material surface matter (surfacereformation: the surface is matter again) again.
Background technology
As the spontaneous radiation light source that can produce VUV wavestrip wavelength light (spontaneousradiation lamp), wherein utilize the B-X transition of inert gas and to produce the gas lamp of VUV wavestrip radiation well-known.The strong luminescence that quasi-molecule can produce to the transition of the accurate position of the energy level of ground state the time has been utilized the VUV spontaneous radiation light source of dielectric barrier discharge, is the representative light source of this gas lamp.
Dielectric barrier discharge is, utilizes the electric discharge device that dielectrics such as glass or pottery are set constitute and the discharge that realizes between electrode.By dielectric is set between electrode, can prevents to take place between the electrode arc discharge, thereby realize the stabilized illumination of quasi-molecule.
This operation principle of dielectric barrier discharge light source of utilizing is, produce plasma chemical reaction by the dielectric barrier discharge that flows in the gas, in the discharge gas plasma, generate so-called quasi-molecule, produce luminous by this quasi-molecule spontaneous radiation (spontaneous radiation).
The characteristics of quasi-molecule are only have stable molecule combination in excitation state, and ground state to be separable state.What determine various radiation thus can be with the territory.Wherein the B-X transition produces the strongest luminous.That is, produce quasi-molecule, and that this quasi-molecule produces when the ground state level radiation transistion is luminous by nonradiative transition.So the gas discharge radiated power that concentrates on the B-X transition is to reaching as high as 80% (The observational facts), therefore be expected to obtain efficiently luminous based on B-X transition luminous.
Since the radiation wavelength that above-mentioned B-X transition produces corresponding to meeting by the VUV field of most of optical material strong absorption, so the VUV light source of this invention is not provided with the output window of exporting VUV light.That is, will be arranged at simultaneously among the same gas medium (Ar, Kr, Xe) that use in order to obtain radiation with the sample (surface) of VUV wavestrip wavelength light irradiation and the electrode unit of light source.The VUV light source of this invention also can be provided with the material of the radiation that is produced when employing does not absorb above-mentioned B-X transition and the output window of the output VUV light made.
As the spontaneous radiation light source that sends above-mentioned VUV wavestrip wavelength light, utilize the VUV spontaneous radiation luminous light source of hydrogen (heavy hydrogen) to set forth (with reference to non-patent literature 1).In addition, utilize the radiating light source of resonant transition of the mist of hydrogen and low-pressure inert gas or this two kinds of gases and halogen also to set forth (with reference to non-patent literature 2).The high pressure noble gas discharge pipe of the radiation when obtaining the B-X transition of quasi-molecule is also set forth (with reference to non-patent literature 3,4 and 5).The light source of setting forth in the above-mentioned non-patent literature 3,4 and 5 has the characteristics of high brightness.
In addition, for the various methods that excite gases at high pressure, also study.For example, utilize electron beam method (with reference to patent documentation 1), utilize the method (with reference to patent documentation 2 and patent documentation 6) of corona discharge and utilize method (with reference to non-patent literature 4,5,7 and 8) of barrier discharge etc.When utilizing electron-beam excitation, must be with the device of the electrode isolation of airtight active gases i chamber and electron beam device.So complex structure of device.
As comparatively easy device for carrying out said,, be difficult to make corona discharge stable though the method for utilizing corona discharge is studied.In order to make the power loss of its stable necessary tolerance 50%.In addition, when having utilized the multiple spot discharge cavity with several discharge positions, it is suitable big that the power loss that is used for control group can become.In addition, for quasi-molecule being sealed within the field of corona discharge, must satisfy certain condition (with reference to patent documentation 2).
At first, exciting the single barrier layer discharge of Xe atom, the maximum radiation efficient that can realize quasi-molecule by utilization is that 60% situation is described (with reference to non-patent literature 7).(with reference to non-patent literature 8) by experiment is confirmed later on.
According to non-patent literature 7, be:, and select to realize the excitation mode of the energy loss minimum of parasitic oscillation process with most of Xe atomic excitation in order to realize one of efficient luminous necessary condition of Xe light source.In addition, must use the pulse power, thereby realize the discharge of homogeneous with short voltage rise time.The light source of setting forth in the non-patent literature 7 is: Xe gas is sealed, has bar-shaped metallic cathode and is melted quartz (Suprasil quartz-type: the sealing vitreous silica of peddling with the Suprasil trade name).Anode structure is the reticulate body that is arranged at the outer surface of fused quartz tube.
In the discharge tube of this light source, discharging current flows along the positive and negative electrode that is arranged in parallel, and produces radiation by the discharge plasma of gas.Utilize under the situation of light source of Ar gas/Kr gas (emission wavelength by the B-X transition is respectively 126nm and 146nm),, be not suitable for constituting light source with vitreous silica sealing Ar gas/Kr gas and electrode because vitreous silica absorbs the following light of 160nm wavelength.
The light source of setting forth in the non-patent literature 5 and 8 does not have the window with radiation output.That is the structure of light source vitreous silica sealing useless Ar gas/Kr gas and electrode.At be arranged parallel to each other along the longitudinal direction electrode that is connected and constitutes and contain between the dielectric tube of these electrodes and produce discharge of positive electrode and negative electrode.Compare with the light source of setting forth in the non-patent literature 7, the shortcoming of the light source of Gou Chenging is thus, along with voltage (breakdown voltage) increase of the minimizing discharge beginning that produces luminous gas air pressure.
[non-patent literature 1] A.N.Zaidel, E.Ya.Schreider, VUVspectroscopy, Moscow " Nauka ", 1967.
[non-patent literature 2] L.P.Schischatskaya, S.A.Yakovlev, G.A.Volkova, VUV lamps with a large emitting surface, Optical Journal, Vol.65, No.12, pp.93-95,1998.
[non-patent literature 3] Y.Tanaka, Continuous emission spectra ofrare gases in the vacuum ultraviolet region, J.Opt.Soc.Am.Vol.45, No.9, pp.710-713,1955.
[non-patent literature 4] G.A.Volkova, N.N.Kirillova, E.N.Pavlovskaya, I.V.Podmoschenskii, A.V.Yakovleva, VUV irradiationlamp.Bul.of Inventions, 1982, No.41 is p.179.
[non-patent literature 5] U.Kogelschatz, Silent-discharge drivenexcimer UV sources and their applications, Appl.Surf Sci, Vol.54, pp.410-423,1992.
[non-patent literature 6] M.Salvermoser, D.E.Murnick, Efficient, stable, corona discharge 172nm xenon excimer light source, J.Appl.Phys.Vol.94, No.6, pp.3722-3731,2003.
[non-patent literature 7] F.Vollkommer, L.Hitzschke, DielectricBarrier Discharge, The 8th International.Symposium on Science andTechnology of LIGHT SOURCES LS-8, Greifswald, Germany, pp.51-60,1998.
[non-patent literature 8] R.P.Mildren, RI J.Carman, Enhancedperformance of a dielectric barrier discharge lamp using short-pulsedexcitation, J.Phys.D:Appl.Phys.Vol.34, pp.L1-L6,2001.
[non-patent literature 9] H.Esrom and U.Kogelschatz, Appl.Surf.Sci.Vol.54, p.440,1992.
The 6th, 052, No. 401 specifications of [patent documentation 1] United States Patent (USP)
The 6th, 400, No. 089 specification of [patent documentation 2] United States Patent (USP)
Summary of the invention
[problem that invention will solve]
The objective of the invention is in order to provide a kind of VUV light source of high efficiency light-emitting, a kind of spontaneous radiation light source that can prevent the radiation absorption of discharge vessel wall and can access the VUV field wavelength light of high brightness.And provide the negative electrode and the anode construction that can make VUV field wavelength light high efficiency be radiated at irradiation object (irradiated object).
[solution]
First kind of dielectric barrier discharge excimer light source of this invention has, the anode that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes and contain the microscler negative electrode of this anode.Negative electrode has straight half cylindrical shell and is positioned at the line group of several electric wires formations that are parallel to each other fixing of this half cylindrical shell.In addition, anode and negative electrode are arranged in parallel at longitudinal direction.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
Second kind of dielectric barrier discharge excimer light source of this invention has, the anode that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes and contain the microscler negative electrode of this anode.Negative electrode has the line group that is made of three half straight long tube bodies that constitute and several fixing electric wires that are parallel to each other of being positioned at this semicanal body that profile perpendicular to longitudinal direction is a U-shaped.In addition, anode and negative electrode are arranged in parallel at longitudinal direction.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The following formation of the anode of the third dielectric barrier discharge excimer light source of this invention and negative electrode, the profile perpendicular to longitudinal direction that anode is covered by dielectric and this dielectric are that the straight long tube body anode electrode by the hollow that constitutes on four sides of rectangle constitutes; Negative electrode perpendicular to the profile of longitudinal direction be U-shaped by half straight long tube body of three hollows that constitute and be positioned at the line group that several fixing electric wires that are parallel to each other of this semicanal body constitute and constitute.Make negative electrode be positioned at the position of containing anode, and anode and negative electrode are arranged in parallel at longitudinal direction.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The 4th kind of dielectric barrier discharge excimer light source of this invention has following formation: the straight long cylindrical shell anode electrode of the hollow that anode covers by dielectric and by this dielectric constitutes; Several such anodes are arranged in parallel to be arranged at and constitute the anode group in the straight long tube body; Negative electrode is that the line group that the several fixing electric wires that are parallel to each other by being positioned at this semicanal body by three hollows that constitute of U-shaped constitute constitutes perpendicular to the profile of longitudinal direction.Make negative electrode be positioned at the position of containing the anode group, in addition, anode and negative electrode are arranged in parallel at longitudinal direction.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode group side.
The 5th kind of dielectric barrier discharge excimer light source of this invention has following formation: the profile that anode is covered by dielectric and this dielectric perpendicular to longitudinal direction be rectangle the hollow that constitutes by the four sides directly the anode electrode of long cylindrical shell constitute; Several such anodes are arranged in parallel to be arranged at and constitute the anode group in the straight long tube body; Negative electrode is the stretched that contains anode on longitudinal direction, and have profile perpendicular to longitudinal direction be U-shaped by the line group that constitutes by several fixing electric wires that are parallel to each other in the half straight long tube body of three hollows that constitute.In addition, anode and negative electrode are arranged in parallel at longitudinal direction.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The discharge electrode unit of the 6th kind of dielectric barrier discharge excimer light source of this invention is made of following anode and negative electrode: the straight long cylindrical shell anode electrode of the hollow that anode covers by dielectric and by this dielectric constitutes; Negative electrode is the stretched that contains anode on longitudinal direction, has half straight barrel and is positioned at the cathode line group of several electric wires that are parallel to each other fixing compositions of this half straight barrel.This discharge electrode unit is parallel to the longitudinal direction setting.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The discharge electrode unit of the 7th kind of dielectric barrier discharge excimer light source of this invention is made of following anode and negative electrode: the simplified anode electrode of straight length of the hollow that anode covers by dielectric and by this dielectric constitutes; Negative electrode is the stretched that contains anode on longitudinal direction, and have profile perpendicular to longitudinal direction be U-shaped by half straight long tube body of three hollows that constitute and be positioned at the cathode line group that several fixing electric wires that are parallel to each other of this half straight tube body are formed.This discharge electrode unit is parallel to the longitudinal direction setting.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The discharge electrode unit of the 8th kind of dielectric barrier discharge excimer light source of this invention is made of following anode and negative electrode: the profile perpendicular to longitudinal direction that anode is covered by dielectric and this dielectric is that the straight long tube body anode electrode by the hollow that constitutes on four sides of rectangle constitutes; Negative electrode is the stretched that contains anode on longitudinal direction, and have profile perpendicular to longitudinal direction be U-shaped by half straight long tube body of three hollows that constitute and be positioned at the cathode line group that several fixing electric wires that are parallel to each other of this half straight tube body are formed.This discharge electrode unit is parallel to the longitudinal direction setting and puts.In addition, can reflect the reflecting surface of VUV radiation in cathode surface formation towards anode-side.
The 9th kind of dielectric barrier discharge excimer light source of this invention has following characteristics: anode has has increased several shapes that are parallel to the longitudinal direction of half straight tube body and are positioned at conplane rod-shaped conductor.That is, between anode group and cathode line group, set up with negative electrode equipotentially, be parallel to the rod-shaped conductor of the longitudinal direction of half straight tube body.
The tenth kind of dielectric barrier discharge excimer light source of this invention has following characteristics: anode is got the semicircular cylinder shape, and the convex surface of semicircle cylindrical shell is towards the direction setting that is provided with the cathode line group, and the end shape along longitudinal direction of this half cylindrical shell is curved towards the interior side direction embayment of this half cylindrical shell.
The 11 kind of dielectric barrier discharge excimer light source of this invention has following characteristics: anode is got the semi-circle tubular shape, and the bottom surface of semicircle body is towards the direction setting that is provided with above-mentioned cathode line group, and the end shape along longitudinal direction of this semicanal body is curved towards the interior side direction embayment of this rectangle.
The 12 kind of dielectric barrier discharge excimer light source of this invention has: anode and spiral helicine metallicity negative electrode electric wire that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes.Under the central shaft of this cylindrical shell condition consistent with spirochetal central shaft, the setting that the negative electrode electric wire is configured to contain anode.
The 13 kind of dielectric barrier discharge excimer light source of this invention has: anode and spiral helicine metallicity negative electrode electric wire that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes.Under the central shaft of this cylindrical shell state consistent with spirochetal central shaft, the setting that the negative electrode electric wire is configured to contain anode.Anode and negative electrode electric wire are arranged at the inside of reflector.In addition, reflector is half straight long cylindrical shell, and should half directly the longitudinal direction of long cylindrical shell be set to the central shaft and the spirochetal central shaft of cylindrical shell parallel to each other.
The following formation of coaxial shape discharge electrode unit of the 14 kind of dielectric barrier discharge excimer light source of this invention: the anode that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes, with spiral helicine metallicity negative electrode electric wire, and under the central shaft of the cylindrical shell state consistent with spirochetal central shaft, the negative electrode electric wire is configured to contain the setting of anode, thereby constitutes coaxial shape discharge electrode unit.The central shaft of several this coaxial shape discharge electrode unit is arranged parallel to each other and is arranged at the inside of same reflector.The section that this reflector is served as reasons perpendicular to longitudinal direction is half a straight long tube body of three formations of U-shaped, and on longitudinal direction with the setting parallel to each other of the central shaft of above-mentioned cylindrical shell.
The following formation of coaxial shape discharge electrode unit of the 15 kind of dielectric barrier discharge excimer light source of this invention: the anode that the anode electrode of the straight long cylindrical shell of the hollow that covers by dielectric and by this dielectric constitutes; With spiral helicine metallicity negative electrode electric wire, and under the central shaft of the cylindrical shell state consistent, the negative electrode electric wire is configured to contain the setting of anode, thereby constitutes coaxial shape discharge electrode unit with spirochetal central shaft.Should be a bit identical with above-mentioned the 12 kind to the 14 kind dielectric barrier discharge excimer light source should inventing.Difference is, anode is a semi-cylindrical shaped, this semicircle cylindrical shell be curved along the longitudinal direction end shape towards the interior side direction embayment of this semicircle cylindrical shell.
The 16 kind of dielectric barrier discharge excimer light source of this invention has: anode and spiral helicine metallicity negative electrode electric wire that the straight long cylindrical shell anode electrode of the hollow that covers by dielectric and by this dielectric constitutes.Under the central shaft of this cylindrical shell state consistent with spirochetal central shaft, the setting that the negative electrode electric wire is configured to contain anode.In addition, anode and negative electrode are arranged in the pipe of utilization to the transparent dielectric substance manufacturing of emission wavelength, utilize the pipe to the transparent dielectric substance manufacturing of emission wavelength to seal anode and negative electrode.
In the first to the 16 kind of dielectric barrier discharge excimer light source in above-mentioned should the invention, the spacing of anode and negative electrode is suitable for constituting in the 0-2mm scope.
In the first to the 16 kind of dielectric barrier discharge excimer light source in above-mentioned should the invention, be suitable for making cooling fluid/gas to constitute in the anode frame body-internal-circulation.
The effect of invention
Of the present invention first to the third dielectric barrier discharge excimer light source, because negative electrode has the cathode line group, the electric field strength of the electric wire near zone that constitutes this line group is increased, so be the structure that is easy to generate dielectric barrier discharge.In addition, the stable discharging in the high-pressure discharge gas can be implemented in, luminous efficiency can be improved with respect to the input electric power of excimer light source.That is the vacuum ultraviolet light source of the vacuum ultraviolet (VUV) field wavelength light of high brightness, can be provided.
Because form the reflecting surface that reflects vacuum-ultraviolet light, so vacuum ultraviolet (VUV) field wavelength light is shone efficiently on the irradiated object of needs irradiation at cathode surface in the face of anode.
Of the present invention first the constituting to the third dielectric barrier discharge excimer light source, window is not set producing between above-mentioned vacuum ultraviolet (VUV) radiating light zone and the shone thing body region that this vacuum ultraviolet (VUV) radiating light of irradiation is set, so can not produce because the absorption of the vacuum ultraviolet (VUV) radiating light of formation window material.That is, light is not absorbed by window, shines on irradiated object so can obtain stronger vacuum ultraviolet (VUV) radiating light.
The formation of the of the present invention the 4th to the 8th kind of dielectric barrier discharge excimer light source adopts the anode group to replace the structure of single anode.Like this, because the increase of anode number can increase the dielectric gross area that covers anode electrode, so can enlarge the illuminated area of the energy of irradiated object.
In the 9th kind of dielectric barrier discharge excimer light source of the present invention, because anode set up and severally be parallel to the longitudinal direction of half straight tube body and in conplane rod-shaped conductor, so can reduce by input lead and constitute the self-induction that the electric wire of cathode line group causes.Therefore, can improve the efficient of input dielectric barrier discharge excimer light source electrical power, the result can realize efficient luminous vacuum ultraviolet light source.
In the of the present invention ten kind or the 11 kind of dielectric barrier discharge excimer light source, the formation of anode is set at, make the end shape of semicircle cylindrical shell or the end shape of rectangle semicanal body, along the crooked shape of longitudinal direction one-tenth towards the interior side direction of this semicircle cylindrical shell or this rectangle semicanal body.Therefore, can reduce interelectrode static capacity, the zone that can guarantee to produce plasma again is confined to the dielectric surface of the bottom surface side of the convex side of semicircle cylindrical shell or rectangle semicanal body, and the vacuum-ultraviolet light that the result can obtain making radiation shines light source on irradiated object with better efficient.
The 12 kind of dielectric barrier discharge excimer light source of this invention has, anode electrode and spiral helicine metallicity negative electrode electric wire that the straight long cylindrical shell that dielectric covers constitutes.Under the central shaft of this cylindrical shell state consistent, make the negative electrode helix contain anode with spirochetal central shaft.Like this, can increase the volume that there is the zone in discharge plasma, the radiation intensity of consequent vacuum ultraviolet (VUV) also can improve.
In the 13 kind of dielectric barrier discharge excimer light source of this invention, because be provided with reflector, so vacuum-ultraviolet light that can will the radiation owing to discharge gathers parallel direction basically and penetrates.Therefore, vacuum-ultraviolet light can be shone on the irradiated object with better efficient.
The 14 kind of dielectric barrier discharge excimer light source of the present invention adopts has the structure of several coaxial shape discharge electrode units.Like this, because covering the dielectric gross area of anode electrode, the increase of anode number also increases.Like this, increase as the existence zone of the discharge gas plasma of luminous component, the result can enlarge the illuminated area of energy of irradiated object.
In the 15 kind of dielectric barrier discharge excimer light source of the present invention, have with the anode electrode of the tenth kind of dielectric barrier discharge excimer light source same structure and cover dielectric electrode of this electrode because adopt, and has a spiral helicine metallic cathode electric wire of the 12 kind of dielectric barrier discharge excimer light source, so should invent identical with the 11 kind or the 12 kind of dielectric barrier discharge excimer light source, can reduce the static capacity between the electrode, and the zone that can guarantee to produce plasma only is stable at the dielectric surface of the bottom surface side of the convex side of semicircle cylindrical shell or semicircle body, and the vacuum-ultraviolet light that the result can obtain making radiation shines light source on irradiated object with better efficient.
In the first to the 16 kind of dielectric barrier discharge excimer light source of the present invention,, just can be reduced to the voltage of the high-voltage pulse power source of these dielectric barrier discharge excimer light source power supplies if make the interval of anode and negative electrode narrow between 0-2mm.The result can reduce the necessary voltage of driving power, thereby the making of high-voltage pulse power source can cheap.And, if make the interval of anode and negative electrode narrow between 0-2mm, just can make plasma be confined to dielectric near surface, so can prevent most effectively because the luminous efficiency that the temperature rising of plasma causes is low.
Description of drawings
The structure key diagram (1) of [Fig. 1] first kind of dielectric barrier discharge excimer light source
The structure key diagram (2) of [Fig. 2] first kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 3] second kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 4] the third dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 5] the 4th kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 6] the 5th kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 7] the 6th kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 8] the 7th kind of dielectric barrier discharge excimer light source
The structure key diagram of [Fig. 9] the 8th kind of dielectric barrier discharge excimer light source
The structure key diagram of [Figure 10] the 9th kind of dielectric barrier discharge excimer light source
[Figure 11] the of the present invention ten kind and the 11 kind utilizes the anode of plasma light source of dielectric barrier discharge and the summary profile of dielectric covering part thereof
The structure key diagram of [Figure 12] the 12 kind of dielectric barrier discharge excimer light source
The structure key diagram of [Figure 13] the 13 kind of dielectric barrier discharge excimer light source
The structure key diagram of [Figure 14] the 14 kind of dielectric barrier discharge excimer light source
The structure key diagram of [Figure 15] the 15 kind of dielectric barrier discharge excimer light source
The structure key diagram of [Figure 16] the 16 kind of dielectric barrier discharge excimer light source
[Figure 17] anode and negative electrode key diagram at interval
[Figure 18] has the equivalent circuit figure of high-voltage pulse out-put supply and dielectric barrier discharge plasma source
[Figure 19] puncture voltage and anode and negative electrode dependence schematic diagram at interval
[symbol description]
10,40,60,66,110,140,150,190,310: anode electrode
12,42,62,68,112,142,152,192,312: dielectric
15,45,115,145,155,195,315: anode
14,22: input lead
16,316: the cathode line group
18,300,330: high-voltage pulse power source
20,30,50: negative electrode partly
24: irradiated object
25,35,55: negative electrode
64,70: the anode group
80,82,84,86,88,90,92,94,96: discharge electrode unit
102,104: rod-shaped conductor
160,194: the negative electrode electric wire
170: reflector
182,184,186: coaxial shape discharge electrode unit
200: by the pipe of dielectric substance manufacturing
320: dielectric barrier discharge excimer light source
322: static capacity is the capacitor of Cd
324: resistance value is the variable resistor of Rgap
326: static capacity is the capacitor of Cg
Embodiment
Below, set forth embodiments of the invention with reference to accompanying drawing.These figure only can help to understand shape, size and the configuration relation of summarizing the elaboration parts on the degree of the present invention, and the present invention has more than the form that is confined to these embodiment.In addition, below used in the explanation special material with and condition etc., these materials with and condition only be suitable examples, be not to be confined to these examples.In addition, in each figure, represent identical inscape, omit repeat specification its function with identical numbering.
[first embodiment]
The structure and the operation principle of first kind of dielectric barrier discharge excimer light source of the present invention are described with reference to Fig. 1 and Fig. 2.Fig. 1 is that the summary drawing in side sectional elevation that obtains is dissectd perpendicular to the longitudinal direction of this anode in the edge of first kind of dielectric barrier discharge excimer light source.Fig. 2 is that the longitudinal direction that the edge of first kind of dielectric barrier discharge excimer light source is parallel to this anode dissects the summary sectional arrangement drawing that obtains.
When applying high-voltage pulse between anode electrode 10 and negative electrode 25, between two electrodes dielectric barrier discharge taking place, produces discharge plasma.This discharge plasma makes the discharge gas atomic excitation, forms instantaneous quasi-molecule.This quasi-molecule produces radiation (VUV wavestrip luminous) when original state of atom is ground state transition (B-X transition).That is, produce luminous (the spontaneous emission) of spontaneous radiation, thereby realize the spontaneous radiation light source.
First kind of dielectric barrier discharge excimer light source of the present invention illustrated in fig. 1 comprises that anode 15 contacts situation about being provided with cathode line group 16.In this case, work under can be at the voltage of the high-voltage pulse power source 18 of giving this light source power supply minimum state of this light source, the result can reduce the voltage supplied that light source needs.Therefore, can reduce the needed output voltage of driving power of light source, thereby the corresponding meeting of the design of power supply is easy.
In the following description, each embodiment has difform anode construction body and cathode structure, when between these electrodes, applying high-voltage pulse, between two electrodes of contact or separation setting, produce dielectric barrier discharge, thus instantaneous generation quasi-molecule.The luminous operation principle that the spontaneous radiation of this quasi-molecule produces is also general in the second to the 16 kind of dielectric barrier discharge excimer light source.
Be also referred to as VUV emission light below the emission light that produces by this radiation.It is luminous that the radiation that this quasi-molecule produces when original state of atom is ground state transition also can be called as quasi-molecule.The wavelength of this radiation is decided according to the kind of discharge gas.Because this radiation is that producing on every side of dielectric 12 is luminous at dielectric 12 that covers anode electrode 10 and the zone between the negative electrode 25.By covering anode electrode 10, can prevent that the discharge that has produced is converted into arc discharge, thereby it is luminous to keep lasting quasi-molecule with dielectric 12.
First characteristics of first kind of dielectric barrier discharge excimer light source of this invention are, produce the zone and are provided with between the zone that makes VUV emission rayed irradiated object in that above-mentioned VUV is radiative, are not provided with by the window that absorbs the manufacturing of VUV emission luminescent material.Like this, because VUV emission light is not configured the absorbed of window, so VUV emission light is shone on irradiated object 24 with good efficiency.
Luminous for what obtain continuing, desirable dielectric barrier discharge excimer light source need be realized the discharge that continues.Because the discharge current density of common arc discharge is low, can only continue several nanoseconds so produce the time of highdensity quasi-molecule, thereby it is luminous to can not get quasi-molecule basically.Here, adopt dielectric 12 to cover the electrode structure of anode electrode 10,, guarantee as possible to realize that the continuous discharge of simulating has high discharge current density again by producing dielectric barrier discharge.
Be loaded into the structure that constitutes minor diameter and Duo Gen fine rule of the cathode line group 16 of negative electrode 20 by employing, just can increase the electric field strength of this electric wire near zone.Therefore, can realize dielectric barrier discharge is easy to generate, can be implemented in the stable discharging in the high-pressure discharge gas again.By realizing the stable continuous discharge in the high-pressure discharge gas, can guarantee the quasi-molecule of high concentration, thereby can obtain high efficiency light-emitting with respect to the input electric power of excimer light source.That is the spontaneous radiation light source of high brightness VUV field wavelength light, can be provided.
As shown in Figure 1, for irradiates light (light of VUV spectrum wavestrip) is shone on the irradiated object with higher efficient, on the surface towards the cathode portion 20 of anode electrode 10 sides, formation can be reflected the field radiation of VUV spectrum and promptly be reflected the radiative reflecting surface 20S of VUV.Therefore, can make the light in VUV wavelength field shine irradiation object (irradiated object) with higher efficient.Can utilize the aluminum that for example reflects the field radiation of VUV spectrum to make negative electrode, make reflecting surface 20S by mirror ultrafinish again.In the embodiment of following explanation, all identical about the method for making of reflection VUV radiative reflecting surface etc. with this embodiment 1, about this point omission explanation.
On the other hand, cathode line group 16 and reflecting surface 20S keep also playing the function of mechanically protecting anode electrode 10 homogeneous except making the electric field strength between the anode electrode 10.
Each embodiment has following common ground in the later explanation of relevant embodiment shown below 2, and anode is connected with high-voltage pulse power source by input lead, and negative electrode passes through input lead ground connection; And anode, negative electrode and irradiated object all be arranged in the chamber that is full of discharge gas, so omit relevant explanation.In addition, except embodiment 6, make between the zone of vacuum ultraviolet (VUV) radiating light irradiation irradiated object 24, the isolation window is not set in zone that produces above-mentioned vacuum ultraviolet (VUV) radiating light and setting.
Wherein, the common ground of each embodiment also has: it is positive potential with respect to negative electrode that the pulse voltage of high-voltage pulse power source output makes the current potential of anode, so omit relevant explanation.
[second embodiment]
The structure of second kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 3.Fig. 3 is that the diagrammatic cross-sectional view that obtains is dissectd perpendicular to the longitudinal direction of this anode in the edge of second kind of dielectric barrier discharge excimer light source.Because the summary sectional arrangement drawing that gets along the longitudinal direction that is parallel to this anode is identical with Fig. 2, so omit.In the following description, only show the cross-sectional view in source, Mingguang City in principle, the longitudinal section identical with Fig. 2 is except the situation that special necessity is arranged is omitted without exception.
Second kind of dielectric barrier discharge excimer light source has following and above-mentioned first kind of characteristic that dielectric barrier discharge excimer light source is identical, promptly, have anode electrode 10 that the straight long cylindrical shell by the hollow that has covered dielectric 12 constitutes and the microscler cathode portion 30 that contains this anode electrode 10.But, the shape difference of cathode portion 30.Cathode portion 30 is, is the half straight tube body of three (30S-1,30S-2 and 30S-3) formation of U-shaped (being also referred to as the U font) by the cross sectional shape perpendicular to longitudinal direction.Cathode portion 30 contains anode electrode 10, and cathode portion 30 is arranged in parallel on longitudinal direction with anode electrode 10.
In addition, cathode portion 30 has the cathode line group 16 of the several electric wires formations that are parallel to each other fixing that are positioned at this half straight tube body.Anode and negative electrode are arranged in parallel on longitudinal direction.And, several electric wires of this cathode line group 16 are parallel to each other, the electric wire two ends are fixed in the half straight tube body that constitutes cathode portion 30 along on the two ends 30D of longitudinal direction.In addition, at the surperficial 30S-1 towards the cathode portion 30 of anode 10 sides, on 30S-2 and the 30S-3, formation can be reflected the reflecting surface of VUV radiation.
[the 3rd embodiment]
The structure of the third dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 4.Fig. 4 is that the edge of the third dielectric barrier discharge excimer light source is dissectd perpendicular to the longitudinal direction of this anode and the diagrammatic cross-sectional view that obtains.Because the summary sectional arrangement drawing that gets along the longitudinal direction that is parallel to this anode is identical with Fig. 2, so omit.
The third dielectric barrier discharge excimer light source has following and above-mentioned first kind of characteristic that dielectric barrier discharge excimer light source is identical, promptly, have by having covered anode electrode 40 that dielectric straight long cylindrical shell constitutes and the microscler cathode portion 30 that contains this anode electrode 40.But anode electrode 40 is different with the shape of cathode portion 30.Anode electrode 40 is coated with dielectric 42, is the straight tube body by four sides (40S-1,40S-2,40S-3 and 40S-4) formation of rectangle for the cross sectional shape perpendicular to longitudinal direction.Cathode portion 30 is, is the half straight tube body that is made of three (30S-1,30S-2 and 30S-3) of U-shaped (U font) perpendicular to the cross sectional shape of longitudinal direction.Cathode portion 35 has cathode portion 30 and is positioned at the cathode line group 16 of several electric wires compositions that are parallel to each other fixing of this half straight tube body.Negative electrode 35 contains anode electrode 40, and anode electrode 40 is arranged in parallel on longitudinal direction with cathode portion 30.In addition, at the surperficial 30S-1 towards the cathode portion 30 of anode 40 sides, on 30S-2 and the 30S-3, formation can be reflected the reflecting surface of VUV radiation.
[the 4th embodiment]
The structure of the 4th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 5.The difference of the 4th kind of dielectric barrier discharge excimer light source of the present invention and above-mentioned first to the 3rd embodiment is, with several by having covered the anode that dielectric straight long cylindrical shell forms, the anode group that is parallel to each other configuration and forms in straight long cylindrical shell replaces single anode.
This configuration example contains first, second and third anode.First anode 64a has, by straight long cylindrical shell anode electrode 60a that forms and the dielectric 62a that covers anode electrode 60a outside.Second plate 64b has, by straight long cylindrical shell anode electrode 60b that forms and the dielectric 62b that covers anode electrode 60b outside.Third anode 64c has, by straight long cylindrical shell anode electrode 60c that forms and the dielectric 62c that covers anode electrode 60c outside.This three anode 64a, 64b and 64c, along the longitudinal direction of this straight long tube body 50, several (being 3 herein) are set up in parallel formation in straight long tube body 50.Though show among Fig. 5 and understand to have the situation of three anodes, have more than and be confined to three situation, adopt two or three above arrangements to constitute too and be suitable for.
Cross sectional shape perpendicular to longitudinal direction is half straight tube body, the 50 formation cathode portion by three (50S-1,50S-2 and 50S-3) of U-shaped (U font).Negative electrode 55 is made up of half straight tube body 50 and the cathode line group 16 that the several fixing electric wires that are parallel to each other that are positioned at this semicanal body are formed.Negative electrode 55 contains anode group 64.In addition, at the cathode surface 50S-1 towards anode group 64 sides, on 50S-2 and the 50S-3, formation can be reflected the reflecting surface of VUV radiation.
[the 5th embodiment]
The structure of the 5th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 6.Fig. 6 is that the edge of the 5th kind of dielectric barrier discharge excimer light source of the present invention is dissectd perpendicular to the longitudinal direction of this anode and the diagrammatic cross-sectional view that obtains.Loaded down with trivial details for fear of drawing, omit shown in Fig. 1 to Fig. 5 high-voltage pulse power source 18, input lead 14 and input lead 22 and irradiated object 24.In the following stated, for illustrate embodiment 6 to embodiment 8 dielectric barrier discharge excimer light sources with reference to figure 7 to Fig. 9, omit the diagram of high-voltage pulse power source 18, input lead 14 and input lead 22 and irradiated object 24 equally.
The difference of the 5th kind of dielectric barrier discharge excimer light source and the 4th kind of dielectric barrier discharge excimer light source is, the anode cross sectional shape that constitutes anode group 70 is not circle but rectangle.
This configuration example contains first, second and third anode.First anode 70a has, by straight long cylindrical shell anode electrode 66a that forms and the dielectric 68a that covers anode electrode 66a outside.Second plate 70b has, by straight long cylindrical shell anode electrode 66b that forms and the dielectric 68b that covers anode electrode 66b outside.Third anode 70c has, by straight long cylindrical shell anode electrode 66c that forms and the dielectric 68c that covers anode electrode 66c outside.This three anode 70a, 70b and 70c, at the cross sectional shape perpendicular to longitudinal direction is three (50S-1 of U-shaped (U font), 50S-2 and 50S-3) in the half straight tube body 50 of the cathode portion that constitutes along the longitudinal directions of this half straight tube body 50, several (being 3 herein) are set up in parallel.Though show among Fig. 6 and understand to have the situation of three anodes, have more than and be confined to three situation, adopt two or three above arrangements to constitute too and be suitable for.
And anode group 70 is arranged in parallel on longitudinal direction with negative electrode 50.In addition, at the surperficial 50S-1 towards the cathode portion 50 of anode group 70 sides, on 50S-2 and the 50S-3, formation can be reflected the reflecting surface of VUV radiation.
[the 6th embodiment]
The structure of the 6th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 7.Fig. 7 is that the edge of the 6th kind of dielectric barrier discharge excimer light source of the present invention is dissectd perpendicular to the longitudinal direction of this anode and the diagrammatic cross-sectional view that obtains.
The 6th kind of dielectric barrier discharge excimer light source is made of several discharge electrode units.Though show among Fig. 7 and understand to have the dielectric barrier discharge excimer light source situation of three groups of discharge electrode units 80,82 and 84, have more than the situation that is confined to three groups of discharge electrode units, adopt the formation more than two or four to be suitable for too.
Being example with a discharge electrode unit describes the structure of discharge electrode unit 80.Discharge electrode unit 80 has anode 15a and negative electrode 25a.Anode 15a has the anode electrode 10a of straight long cylindrical shell and covers the dielectric 12a of this anode electrode outside.Negative electrode 25a has the cathode line group 16a that the cathode portion 20a that is made of straight length half cylindrical shell and the several fixing electric wires that are parallel to each other in half cylindrical shell 20a are formed.This negative electrode 25a contains anode 15a.In addition, at the surperficial 20S-1 towards the cathode portion 20a of anode 15a side, on 20S-2 and the 20S-3, formation can be reflected the reflecting surface of VUV radiation.
Among Fig. 7, have with the discharge electrode unit 82 of spline structure and discharge electrode unit 84 and be arranged in parallel along longitudinal direction.
[the 7th embodiment]
The structure of the 7th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 8.Fig. 8 is that the edge of the 7th kind of dielectric barrier discharge excimer light source of the present invention is dissectd perpendicular to the longitudinal direction of this anode and the diagrammatic cross-sectional view that obtains.
The 7th kind of dielectric barrier discharge excimer light source is made of several discharge electrode units.Though show among Fig. 8 and understand to have the dielectric barrier discharge excimer light source situation of three groups of discharge electrode units 86,88 and 90, have more than the situation that is confined to three groups of discharge electrode units, adopt the formation more than two or four to be suitable for too.
Being example with a discharge electrode unit describes the structure of discharge electrode unit 86.Discharge electrode unit 86 has anode 15a and negative electrode 35a.Anode 15a has the anode electrode 10a of straight long cylindrical shell and covers the dielectric 12a of this anode electrode outside.Cathode portion 30a is, is the half straight tube body 30a that is made of three (30S-1,30S-2 and 30S-3) of U-shaped (U font) perpendicular to the cross sectional shape of longitudinal direction.Negative electrode 35a has, the cathode line group 16a of this half straight tube body and the several electric wires compositions that are parallel to each other fixing that are positioned at this half straight tube body.This negative electrode 35a contains anode 15a.In addition, at the surperficial 30aS-1 towards the cathode portion 30a of anode 15a side, on 30aS-2 and the 30aS-3, formation can be reflected the reflecting surface of VUV radiation.
Among Fig. 8, have with the discharge electrode unit 88 of spline structure and discharge electrode unit 90 and be arranged in parallel along longitudinal direction.
[the 8th embodiment]
The structure of the 8th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Fig. 9.Fig. 9 is that the edge of the 8th kind of dielectric barrier discharge excimer light source of the present invention is dissectd perpendicular to the longitudinal direction of this anode and the diagrammatic cross-sectional view that obtains.
The 8th kind of dielectric barrier discharge excimer light source is made of several discharge electrode units.Though show among Fig. 9 and understand to have the dielectric barrier discharge excimer light source situation of three groups of discharge electrode units 92,94 and 96, have more than the situation that is confined to three groups of discharge electrode units, adopt the formation more than two or four to be suitable for too.
Being example with a discharge electrode unit describes the structure of discharge electrode unit 92.Discharge electrode unit 92 has anode 45a and negative electrode 35a.The cross sectional shape that anode 45a has perpendicular to longitudinal direction is the anode electrode 40a and the dielectric 42a that covers this body outside of the straight long tube body of rectangle.Cathode portion 30a is, is the half straight tube body that is made of three (30S-1,30S-2 and 30S-3) of U-shaped (U font) perpendicular to the cross sectional shape of longitudinal direction.Negative electrode 35a has, this half straight tube body and be positioned at the cathode line group 16a that is made up of several fixing electric wires that are parallel to each other of this half straight tube body.This negative electrode 35a contains anode 45a.In addition, at the surperficial 30aS-1 towards the cathode portion 30a of anode 45a side, on 30aS-2 and the 30aS-3, formation can be reflected the reflecting surface of VUV radiation.
Among Fig. 9, have with the discharge electrode unit 94 of spline structure and discharge electrode unit 96 and be arranged in parallel along longitudinal direction.
As mentioned above, in the of the present invention the 4th to the 8th kind of dielectric barrier discharge excimer light source, adopt the anode group to replace the structure of single anode.Like this, can increase the dielectric gross area that covers anode thereby increased the anode number, so can enlarge illuminated area for irradiated object 24.
[the 9th embodiment]
The structure of the 9th kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Figure 10.The difference of the 9th kind of dielectric barrier discharge excimer light source of the present invention and above-mentioned the 4th embodiment is set up the rod-shaped conductor 102 and 104 of the longitudinal direction that is parallel to half straight tube body, and two rod-shaped conductor to be positioned at the same plane that is parallel to cathode line group 16.And, rod-shaped conductor 102 and 104 and the negative electrode equipotential.
This rod-shaped conductor 102 between first anode 64a that is made of the anode electrode 60a that has covered dielectric 62a and the second plate 64b that is made of the anode electrode 60b that has covered dielectric 62b, and is parallel to anode 64a and 64b configuration.And, be disposed at the plane that is parallel to cathode line group 16 places, and be disposed at the position of more approaching the plane at cathode line group 16 places with respect to first anode 64a and second plate 64b.This rod-shaped conductor 104 between second plate 64b that is made of the anode electrode 60b that has covered dielectric 62b and the third anode 64c that is made of the anode electrode 60c that has covered dielectric 62c, and is parallel to anode 64b and 64c configuration.And, be disposed at the plane that is parallel to cathode line group 16 places, and equidistant, and be disposed at the position on the plane of more approaching cathode line group 16 places with second plate 64b and third anode 64c.
The anode number of the 9th kind of dielectric barrier discharge excimer light source of the present invention has more than three the situation that is confined to, and adopts the formation more than two or four to be suitable for too.Certainly, also must increase the rod-shaped conductor number of insertion along with the increase of anode number.Anode can be made of straight long cylindrical shell.
By disposing aforesaid rod-shaped conductor, can reduce owing to input lead 14 or 22 and constitute the electric induction that the electric wire of cathode line group 16 causes.Therefore, can reduce to be applied to the poor of voltage position and discharging current position phase between anode and the negative electrode, so can improve the electrical power efficiency of input dielectric barrier discharge excimer light source.That is, can realize the vacuum ultraviolet light source of high efficiency light-emitting.
[the tenth embodiment]
The structure of the anode 115 of the of the present invention ten kind of dielectric barrier discharge excimer light source is described with reference to Figure 11 (A).Anode 115 is made of the dielectric 112 of anode electrode 110 and covering.Figure 11 (A) is for dissecing the diagrammatic cross-sectional view that obtains along the longitudinal direction perpendicular to this anode electrode 110 and the dielectric 112 that covers thereof.Anode electrode 110 has, the two ends of semicircle cylindrical shell 110a and this semicircle cylindrical shell 110a along longitudinal direction, separately towards the bend 110b of the interior side direction bending of this semicircle cylindrical shell 110a, end 110D-1 and 110D-2 that these two bend 110b have being parallel to each other and separate.The convex surface 110S of this semicircle cylindrical shell 110a is towards the direction setting that the cathode line group is set, and is set at the inner face of the dielectric 112 of tubular and contacts.The cross section of semicircle cylindrical shell 110a is semicircle, and the cross section of sweep 110b gets final product so long as leave the crooked shape of the interior sidewall surface of dielectric 112.
[the 11 embodiment]
The structure of the anode 145 of the 11 kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Figure 11 (B).Anode 145 is made of the dielectric 142 of anode electrode 140 and covering.Figure 11 (B) is for dissecing the diagrammatic cross-sectional view that obtains along the longitudinal direction perpendicular to this anode electrode 140 and the dielectric 142 that covers thereof.Anode electrode 140 has, rectangle semicanal body 140a and from the two ends of this rectangle semicanal body 140a along longitudinal direction, separately towards the bend 140b of the interior side direction bending of this rectangle semicanal body 140a, end 140D-1 and 140D-2 that these two bend 140b have being parallel to each other and separate.Convex surface (bottom surface) 140S of this rectangle semicanal body 140a is towards the direction setting that is provided with the cathode line group, and its inner face with the dielectric 142 of rectangular tube is contacted.The cross section of rectangle semicanal body 140a is a semi-barrel shape, and the cross section of sweep 140b gets final product so long as leave the crooked shape of the interior sidewall surface of dielectric 142.
The anode that is provided with in the above-mentioned ten kind or the 11 kind of dielectric barrier discharge excimer light source, constitute towards the interior side direction embayment of inboard or this rectangle semicanal body 140a of this semicircle cylindrical shell 110a curvedly by shape, just can reduce between the anode electrode 110b of this bend and the dielectric 112 and the static capacity between anode electrode 140b and the dielectric 142 110b and 140b.Thus, the zone that can guarantee to produce plasma is confined to the dielectric surface of the bottom surface 140s of the convex surface 110s of semicircle cylindrical shell or half rectangle semicanal body.
Promptly, dielectric 112 for above-mentioned anode electrode 110 and covering thereof, by making the interior side direction bending of anode electrode 110 towards the semicircle cylindrical shell, because the outside at anode electrode 110 and the dielectric 112 of dielectric 112 separated part is not easy to form plasma, so even should the zone or not luminous or luminous its brightness also can reduce.In addition, dielectric 142 for above-mentioned anode electrode 140 and covering thereof, by making the interior side direction bending of anode electrode 140 towards rectangle semicanal body, because the outside at anode electrode 140 and the dielectric 112 of dielectric 142 separated part is not easy to form plasma, so even should the zone or not luminous or luminous its brightness also can reduce.That is, main emission side is in the bottom surface 140s side of the convex surface 110s or the rectangle semicanal body of above-mentioned semicircle cylindrical shell.
Therefore, if with the convex surface 110s of above-mentioned semicircle cylindrical shell or the bottom surface 140s of rectangle semicanal body, be set at towards the sample side is set, because vacuum-ultraviolet light mainly results from the dielectric lateral surface zone that is provided with irradiated object 24 (omitting diagram) side, so VUV luminous energy efficient is shone well on irradiated object 24.
[the 12 embodiment]
Reach (B) structure of explanation the 12 kind of dielectric barrier discharge excimer light source of the present invention with reference to Figure 12 (A).Figure 12 (A) is for dissecing the diagrammatic cross-sectional view of expression dielectric barrier discharge excimer light source along the longitudinal direction perpendicular to anode 155.Anode 155 has anode electrode 150 and covers the dielectric 152 of this anode electrode 150.Figure 12 (B) wherein expresses the cross section otch especially for dissecing the summary sectional arrangement drawing that gets along the longitudinal direction that is parallel to anode 155.
The 12 kind of dielectric barrier discharge excimer light source of this invention has by the anode electrode 150 of straight long cylindrical shell and covers anode 155 and the spiral helicine metallicity negative electrode electric wire 160 that the dielectric 152 of this anode electrode 150 constitutes.The maximum gauge of this metallic cathode electric wire 160 is no more than 2mm, is below the 2mm.Helicoid constitutes by electric wire is rolled into helical form.Metallic cathode electric wire 160 constitutes for containing anode 155.By adopting aforesaid structure, can enlarge the volume that there is the zone in discharge plasma, the radiation intensity of consequent vacuum ultraviolet (VUV) also can improve.
[the 13 embodiment]
The structure of the 13 kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Figure 13.The difference of the 13 kind of dielectric barrier discharge excimer light source of the present invention and above-mentioned the 12 kind of dielectric barrier discharge excimer light source is that anode 155 and spiral helicine negative electrode electric wire 160 are arranged at the inside of reflector 170.Reflector 170 is straight long cylindrical shell, and directly the central shaft of the cylindrical shell of the longitudinal direction of long cylindrical shell and formation anode 155 and the central shaft of helix heater electric wire 160 are arranged in parallel for these.
With reflector 170 towards anode 155 and helical metal negative electrode electric wire 160 side surface 170s, be processed as radiation with reflection VUV spectrum field, promptly reflect the surface of the function of VUV light.Therefore, the luminous energy efficient in VUV wavelength field is shone well on irradiation object (irradiated object).For example utilize the materials such as aluminium of the radiation (VUV launches light) that can reflect VUV spectrum field to constitute reflector 170, make surperficial 170s by mirror ultrafinish again.
Because surperficial 170s is semicylindrical concave shape,,, accumulates in parallel direction basically and penetrate so the radiative part of the VUV of radiation reflects at surperficial 170s owing to discharge by newly establishing reflector 170.Therefore, can there be more vacuum-ultraviolet light to shine on the irradiated object 24.
[the 14 embodiment]
The structure of the 14 kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Figure 14.Constitute coaxial shape discharge electrode unit by anode 155 that has covered dielectric 152 and negative electrode electric wire 160 in the 13 kind of dielectric barrier discharge excimer light source of the present invention.The 14 kind of dielectric barrier discharge excimer light source of the present invention has the characteristics of several this coaxial shape discharge electrode unit 182,184 and 186.The central shaft of this coaxial shape discharge electrode unit 182,184 and 186 is arranged parallel to each other, is arranged at the inside of same reflector.
This reflector 180 is the rectangle semicanal body that is made of three (180S-1,180S-2 and 180S-3) of U-shaped (U font) for the cross sectional shape perpendicular to longitudinal direction, and this rectangle semicanal body is arranged in parallel with the central shaft of above-mentioned body on longitudinal direction.In the 14 kind of dielectric barrier discharge excimer light source, utilize several coaxial shape discharge electrode units to constitute, also increase because the increase of anode number covers the dielectric gross area of anode electrode.Therefore, exist the zone to enlarge as the plasma of the discharge gas of luminous component, the radioactivity of integral body increases as a result, and the irradiated area of irradiated object 24 is also increased.
[the 15 embodiment],
Reach (B) structure of explanation the 15 kind of dielectric barrier discharge excimer light source of the present invention with reference to Figure 15 (A).Figure 15 (A) is the diagrammatic cross-sectional view of the 15 kind of dielectric barrier discharge excimer light source of the present invention.Figure 15 (B) is the summary sectional arrangement drawing, and expresses the cross section otch especially.The characteristics of the 15 kind of dielectric barrier discharge excimer light source of the present invention are, except having the electrode structure identical, also has the helical metal negative electrode electric wire 160 of the 12 kind of dielectric barrier discharge excimer light source with the anode 115 of the tenth kind of dielectric barrier discharge excimer light source and the dielectric that covers 112.Under the central shaft of the cylindrical shell state consistent, cathode line group 16 is configured to contain anode 115 with spirochetal central shaft.
By adopting this structure, identical with the of the present invention the tenth and the 11 kind of dielectric barrier discharge excimer light source, can guarantee the dielectric surface of the bottom surface 140S side of only stable convex surface 110S that results from the semicircle cylindrical shell of plasma or rectangle semicanal body, the radiating light that the result can obtain making radiation shines light source on irradiated object with better efficient.
[the 16 embodiment]
The structure of the 16 kind of dielectric barrier discharge excimer light source of the present invention is described with reference to Figure 16.Figure 16 is the summary longitudinal section of the 16 kind of dielectric barrier discharge excimer light source of the present invention, and expresses the cross section otch especially.Constitute anode electrode 190 and be covered in the anode 195 that dielectric 192 on this anode electrode constitutes the straight long cylindrical shell of hollow by the straight long cylindrical shell of hollow.The 16 kind of dielectric barrier discharge excimer light source of the present invention has this anode 195 and helical metal negative electrode electric wire 194.Under the central shaft of the cylindrical shell state consistent, negative electrode electric wire 194 is configured to contain the formation of anode 195 with spirochetal central shaft.In addition, negative electrode electric wire 194 and anode 195 are arranged at, in the pipe 200 that the transparent dielectric substance of emission wavelength is made.By the pipe 200 that the transparent dielectric substance of emission wavelength is made, sealing-in negative electrode electric wire 194 and anode 195.
That is, irradiated object 24 is arranged at the outside of the pipe 200 that utilizes the dielectric substance making, is shone by vacuum-ultraviolet light.So, between pipe 200 and irradiated object 24,, be necessary to fill the gas that nitrogen completely for example etc. does not absorb vacuum-ultraviolet light for fear of existing oxygen etc. to absorb the gas of vacuum-ultraviolet light.In Figure 16, irradiated object 24 is arranged on top of managing 200 or the lower position of managing 200.
In addition, adopt vitreous silica (for example vitreous silica of peddling with the Suprasil trade name) material to constitute if manage 200, for the vacuum ultraviolet (VUV) optical transparency of wavelength 172mm.If managing the discharge gas of 200 sealings is Xe gas, because the peak wavelength of the luminescent spectrum of quasi-molecule is 172mm, so the luminous of vacuum ultraviolet (VUV) field can be from managing 200 outside extractions., as the sealing gas in the pipe 200, can not utilize Xe gas inert gas in addition for example Ar gas or Kr gas (, being respectively 126nm and 146nm), because vitreous silica absorbs the following light of 160nm wavelength based on the emission wavelength of B-X transition.
And, the negative electrode electric wire in above-mentioned the 12 kind to the 16 kind dielectric barrier discharge excimer light source, diameter is no more than 2mm; If with longitudinal direction and the longitudinal direction of above-mentioned half straight barrel or the longitudinal direction angulation of semicanal body of this negative electrode electric wire, be set at vertical or with the upright position being no more than within 15 ° the scope, then preferably to the making of light source.
And above-mentioned first kind to the 16 kind dielectric barrier discharge excimer light source is suitable for making cooling with liquid or the gas structure in the framework inner loop of anode.By making cooling, can prevent that the temperature of electrode from raising, thereby can prevent that the discharge gas plasma efficient that causes reduces because temperature raises, so can realize lasting high efficiency light source with liquid or gas framework inner loop at anode.
In above-mentioned first kind to the 16 kind dielectric barrier discharge excimer light source, the electric wire of cathode structure, cathode structure (cathode line group), additional conductor and helicoid shape negative electrode electric wire are suitable for adopting stainless steel to make.And anode part and reflector are suitable for adopting aluminium to make.The dielectric that covers anode is suitable for adopting vitreous silica to make.
In addition, the dielectric thickness of covering anode is suitably for 1.5mm.It is 23mm that anode electrode is suitable for adopting a hem width of the rectangle of diameter or vertical cross-section, and the length of longitudinal direction is the formation of 200mm.One hem width of the diameter of anode electrode or the rectangle of vertical cross-section can be in 10mm to 40mm scope.And the length of the longitudinal direction of anode electrode can be in 50mm to 1m scope.Constitute the diameter of diameter, negative electrode electric wire of the electric wire of cathode line group and the diameter of additional conductor and be suitably for 1mm.
The wide of the diameter of the semicircle cylindrical shell of negative electrode or U-shaped is 80mm, and long is 200mm.The diameter of the semicircle cylindrical shell of negative electrode or U-shaped wide can be in 50mm to 100mm scope.The length of negative electrode can be in 50mm to 100mm scope.
High-voltage pulse between negative electrode and the anode is suitably for 4-6kV, and frequency is 20kHz.Frequency also can be set in the scope of 10-20kHz.The pressure of discharge gas is fit to be set at 120Torr (15.96kPa), also can be set in the scope of 80-760Torr (10.64-101.08kPa).
With reference to the relation of the interval between Figure 17-19 explanation anode and the negative electrode with puncture voltage.Anode when in detail as described later, puncture voltage is for the discharge beginning and the potential difference between the negative electrode.
Figure 17 is the location diagram between expression anode and the negative electrode.Figure 17 is, the model utility key diagram of electrode structure, power supply and relation thereof in first kind to the 16 kind dielectric barrier discharge excimer light source is to the electrode structure of specific example of the present invention diagram not.Make first kind of electrode structure of representing to each characteristic electrode structure of the 16 kind of dielectric barrier discharge excimer light source and this Figure 17 corresponding, only consider that the interval between anode and the negative electrode is come with reference to Figure 17.Represented among Figure 17, three anodes that constitute by anode electrode and dielectric with same configuration, with respect to the formation example that power supply 300 is arranged each other side by side, even for the light source that has only an anode to constitute, the interval of anode and negative electrode is also as giving a definition.
As shown in figure 17, the anode 315 that is made of anode electrode 310 and dielectric 312 is with the d at interval that is spaced apart of the negative electrode electric wire 316 that constitutes negative electrode.That is, time interval dielectric 312 surfaces of anode and negative electrode and the beeline between the negative electrode electric wire 316.
Figure 18 is the equivalent circuit figure that comprises power supply and dielectric barrier discharge excimer light source.Figure 18 represents power supply 330 provides how for dielectric barrier discharge excimer light source 320.Electrostatic capacitance is C
d Electric capacity 322 expression comprise dielectric 312 and the simulation static capacity of the electric capacity that constitutes.Below, the static capacity of dielectric 312 is also referred to as electrostatic capacitance C
dElectrostatic capacitance is C
g Electric capacity 326 expression comprise discharge gas between anode and negative electrode and the simulation static capacity of the electric capacity that constitutes.Below, the static capacity that this discharge gas produces is also referred to as electrostatic capacitance C
gResistance value is R
GapThe artifical resistance that produces by discharge gas between anode and negative electrode of variable resistor 324 expression.Below, the resistance value of the artifical resistance that produces owing to this discharge gas is simply with R
GapExpression.
In Figure 18, when dielectric barrier discharge excimer light source 320 is represented with equivalent circuit, adopt to comprise that electrostatic capacitance is C
dElectric capacity, electrostatic capacitance be C
gElectric capacity and resistance value be R
GapThe formation of resistance.That is, drive dielectric barrier discharge excimer light source 320 necessary voltages in order to discuss, as long as the circuit that is made of these electric capacity and resistance is discussed.
Along with the puncture of the insulation resistance of discharge gas between anode and negative electrode, electric current begins to flow, the discharge beginning.Along with the magnitude of voltage that is added on this insulation resistance slowly raises, can produce this resistance value R when arriving certain magnitude of voltage
GapSuddenly the phenomenon that diminishes, this phenomenon are the puncture of insulation resistance.Though discharge gas is the insulating properties material, along with alive rising, destroyed its resistance value of this insulating properties R
GapCan diminish suddenly, thereby produce the phenomenon that has electric current to flow in this discharge gas, promptly begin discharge.That is, begin luminous at this moment dielectric barrier discharge excimer light source.At this resistance value R
GapThe moment that diminishes, be added in this ohmically voltage and be called as puncture voltage.
As shown in the above description, reduce this puncture voltage, relation is arranged with the output voltage of the high-voltage pulse power source institute palpus that reduce to drive dielectric barrier discharge excimer light source of the present invention.That is, because as long as the output voltage values of this high-voltage pulse power source is greater than puncture voltage, so if puncture voltage reduces, the output voltage values of high-voltage pulse power source also can correspondingly reduce.
Employing Ar is discharge gas, and has the dielectric barrier discharge excimer light source of the electrode structure shown in Figure 17, and the result of study of puncture voltage V as shown in figure 19.In Figure 19, transverse axis is that the barometric millimeter of mercury is represented gas pressure intensity with atm, and the longitudinal axis represents that the maximum with puncture voltage V is the magnitude of voltage after 1 normalization.Here, the breakdown voltage value with 1 expression is about 2.8kV-2.9kV on the longitudinal axis.That is, 0.6 place is corresponding to 1.68kV-1.74kV, and 0.35 place is corresponding to 0.98kV-1.02kV.In addition, the interval d with anode and negative electrode is set at d=2mm and d=5mm, mensuration puncture voltage separately respectively.
The pressure of discharge gas is set at 0.5atm, 0.75atm and 1.0atm respectively, measures puncture voltage separately.Among Figure 19, the measurement result when representing d=5mm with curve A respectively, the measurement result when representing d=2mm with curve B.Based on Figure 19, the curve of being represented by B is positioned at the below of the curve of being represented by A, and the more little puncture voltage of interval d of hence one can see that anode and negative electrode is just low more.Therefore, if can obtain the interval d of anode and negative electrode is set at 0mm, then can obtain the conclusion of minimum break-down voltage.
As described above as can be known, contact with negative electrode, under the low state of the voltage of the high-voltage pulse power source of supplying with this light source, also can make this light source works by the anode that makes dielectric barrier discharge excimer light source.
In addition, by reducing the interval d of anode and negative electrode, plasma is confined near the surface of dielectric 312.Owing to can make the dielectric (quartz glass) of covered cathode remain on low temperature by the negative electrode water-cooled, so energy efficiency absorbs the heat that plasma sends well.That is, can prevent owing to the raise reduction of the luminous efficiency cause of temperature, so can realize high efficiency light-emitting.
Electrode material that more than illustrates and size, suitable example only, technical scope of the present invention, be not limited to above-mentioned material with and condition.
The possibility of industrialization
Based on above-mentioned first kind to the 16 kind dielectric barrier discharge excimer light source, can make true The luminous efficiency in empty ultraviolet field is shone well on irradiated object, can be used as the microelectronics neck Utilize ultraviolet light to carry out required vacuum ultraviolet light source in material cleaning or the surperficial again matter in the territory.
Implement to adopt following suitable formation when of the present invention.
(1) dielectric barrier discharge excimer light source has: the negative electrode containing is covered by dielectric Anode; Have the emitter that output window is not set, put so lowered in order to obtain VUV Penetrate required breakdown voltage; At least one side adopts maximum gauge to be no more than 2mm's in the above-mentioned negative electrode Electric wire is made, by or become perpendicular to above-mentioned anode shaft or with the vertical direction of above-mentioned anode shaft Several electric wire groups parallel to each other of low-angle (below 15 °) consist of; Above-mentioned anode electrode is added Upper polarity is positive monopolar high-voltage pulse, and minus earth; In order to increase the photograph of irradiated object Penetrating intensity uses the surface element of negative electrode as emitter.
(2) have several in the dielectric barrier discharge excimer light source of record in above-mentioned (1) The anode group that the above-mentioned anode that is covered by described dielectric is arranged in parallel and consists of, and by same the moon The utmost point contains.
(3) in the dielectric barrier discharge excimer light source of putting down in writing in above-mentioned (1), several tools The parts that the above-mentioned anode that has described negative electrode and described dielectric to cover consists of are arranged parallel to each other Arrange.
(4) arbitrary dielectric barrier discharge excimer light of record in above-mentioned (1) to (3) In the source, described negative electrode has rectangle or foursquare cross section.
(5) in the dielectric barrier discharge excimer light source of putting down in writing in above-mentioned (1) or (3), Adopt half side structure of described negative electrode.
(6) in the dielectric barrier discharge excimer light source of putting down in writing in above-mentioned (1) or (3), Described negative electrode consists of by having half cylindrical shell that prolongs the limit.
(7) dielectric barrier of record is put in above-mentioned (1), (2), (3) or (4) In the electricity excimer light source, it is in rectangle or the foursquare dielectric tube that described anode is arranged on the cross section.
(8) record in above-mentioned (1), (2), (3), (4), (5) or (6) Dielectric barrier discharge excimer light source in, it is columnar electricity that described anode is arranged on the cross section In the matter pipe.
(9) dielectric barrier discharge excimer of record in above-mentioned (1), (2) or (8) In the light source, set up in the plane between the dielectric tube of described negative electrode and the described anode of covering and lead Body.
(10) in the dielectric barrier discharge excimer light source of putting down in writing in above-mentioned (1) to (9), Employing by convex side towards the negative electrode electric wire and have half side structure of the described anode of circular edge.
(11) dielectric barrier discharge excimer light source has: the negative electrode containing is covered by dielectric Anode; Has the emitter structure that output window is not set, so lowered in order to obtain The breakdown voltage that the VUV radiation is required; Described negative electrode adopts diameter can not surpass the electric wire system of 2mm The curl structure; Positive unipolar pulse voltage is added on the internal electrode of anode, and negative electrode connects Ground.
(12) cloudy described in the dielectric barrier discharge excimer light source of record in above-mentioned (11) The utmost point and anode are arranged at emitter inside.
(13) arbitrary dielectric barrier discharge excimer of record in above-mentioned (11) to (12) Several are arranged in parallel in same emitter by the parts that described negative electrode and anode consist of in the light source Inner.
(14) arbitrary dielectric barrier of record is put in above-mentioned (11), (12) to (13) The electricity excimer light source in, described anode by half shell portion and this half cylindrical shell along two of longitudinal direction End consists of towards the bend of the inside bend of this half cylindrical shell respectively.
(15) in arbitrary dielectric barrier discharge excimer light source of putting down in writing in above-mentioned (11), Described negative electrode is inserted and can see through in the dielectric tube of operation wavelength, as ultraviolet light, vacuum purple The light source that does not need sealing-in that outer light and visible light are used.
(16) arbitrary dielectric barrier discharge excimer of record in above-mentioned (1) to (15) In the light source, in order to cool off described dielectric barrier discharge excimer light source, with cooling fluid or gas Inject the cavity of anode inner side.
Claims (28)
1. dielectric barrier discharge excimer light source is characterized in that: have the anode that the straight long cylindrical shell of the hollow that covers by dielectric and by this dielectric constitutes; Negative electrode is for containing the microscler negative electrode of this anode, and negative electrode has straight half cylindrical shell and is positioned at the line group of several electric wires formations that are parallel to each other fixing of this half cylindrical shell; Above-mentioned anode and above-mentioned negative electrode are arranged in parallel on longitudinal direction; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
2. according to the dielectric barrier discharge excimer light source described in the claim 1, it is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight half cylindrical shell; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight half cylindrical shell is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
3. dielectric barrier discharge excimer light source is characterized in that: have the anode that the straight long cylindrical shell of the hollow that covers by dielectric and by this dielectric constitutes; Negative electrode is for containing the microscler negative electrode of this anode, and negative electrode has the line group that is made of three half straight long tube bodies that constitute and several fixing electric wires that are parallel to each other of being positioned at this semicanal body that profile perpendicular to longitudinal direction is a U-shaped; Above-mentioned anode and above-mentioned negative electrode are arranged in parallel on longitudinal direction; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
4. according to the dielectric barrier discharge excimer light source described in the claim 3, it is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
5. dielectric barrier discharge excimer light source is characterized in that: anode is that the straight long tube body of the hollow that is made of the four sides of rectangle constitutes by dielectric and by the section perpendicular to longitudinal direction that this dielectric covers; Negative electrode is for containing the microscler negative electrode of this anode, and negative electrode has the line group that is made of three half straight long tube bodies that constitute and several fixing electric wires that are parallel to each other of being positioned at this semicanal body that profile perpendicular to longitudinal direction is a U-shaped; Above-mentioned anode and above-mentioned negative electrode are arranged in parallel on longitudinal direction; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
6. according to the dielectric barrier discharge excimer light source described in the claim 5, it is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
7. dielectric barrier discharge excimer light source is characterized in that: the straight long cylindrical shell anode electrode of the hollow that anode covers by dielectric with by this dielectric constitutes; Several anodes with this anode electrode are arranged in parallel to be arranged at and constitute the anode group in the straight long tube body; Negative electrode is for containing the microscler negative electrode of this anode group, and negative electrode has the line group that is made of several fixing electric wires that are parallel to each other in the profile perpendicular to longitudinal direction is the half straight long tube body that constitutes by three of U-shaped; Above-mentioned anode and above-mentioned negative electrode are arranged in parallel on longitudinal direction; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
8. according to the dielectric barrier discharge excimer light source described in the claim 7, it is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
9. dielectric barrier discharge excimer light source is characterized in that: anode is that the straight long tube body anode electrode of the hollow that is made of the four sides of rectangle constitutes by dielectric with by the section perpendicular to longitudinal direction that this dielectric covers; Several anodes with this anode electrode are arranged in parallel to be arranged at and constitute the anode group in the straight long tube body; Negative electrode is for containing the microscler negative electrode of this anode group, and negative electrode has the line group that is made of several fixing electric wires that are parallel to each other in the profile perpendicular to longitudinal direction is the half straight long tube body that constitutes by three of U-shaped; Above-mentioned anode and above-mentioned negative electrode are arranged in parallel on longitudinal direction; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
10. according to the dielectric barrier discharge excimer light source described in the claim 9, it is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
11. a dielectric barrier discharge excimer light source is characterized in that: the straight long cylindrical shell anode electrode of the hollow that anode covers by dielectric and by this dielectric constitutes; Negative electrode is for containing the microscler negative electrode of this anode, and negative electrode has straight half cylindrical shell and is positioned at the line group of several electric wires formations that are parallel to each other fixing of this half cylindrical shell; Several discharge electrode units that are made of above-mentioned anode and above-mentioned negative electrode are arranged in parallel at longitudinal direction and constitute the discharge electrode unit group; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
12. the dielectric barrier discharge excimer light source according to described in the claim 11 is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight half cylindrical shell; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight half cylindrical shell is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
13. a dielectric barrier discharge excimer light source is characterized in that: the straight long cylindrical shell anode electrode of the hollow that anode covers by dielectric and by this dielectric constitutes; Negative electrode is for containing the microscler negative electrode of this anode, negative electrode have profile perpendicular to longitudinal direction be U-shaped by three half straight tube bodies that constitute and be positioned at the cathode line group that several fixing electric wires that are parallel to each other of this semicanal body are formed; Several discharge electrode units that are made of above-mentioned anode and above-mentioned negative electrode are arranged in parallel at longitudinal direction and constitute the discharge electrode unit group; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
14. the dielectric barrier discharge excimer light source according to described in the claim 13 is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
15. a dielectric barrier discharge excimer light source is characterized in that: anode is that the straight long tube body by the hollow that constitutes of four sides of rectangle constitutes by dielectric and by the profile perpendicular to longitudinal direction that this dielectric covers; Negative electrode is for containing the microscler negative electrode of this anode, negative electrode have profile perpendicular to longitudinal direction be U-shaped by three half straight tube bodies that constitute and be positioned at the cathode line group that several fixing electric wires that are parallel to each other of this semicanal body are formed; Several discharge electrode units that are made of above-mentioned anode and above-mentioned negative electrode are arranged in parallel at longitudinal direction and constitute the discharge electrode unit group; At the reflecting surface that forms the radiation that to reflect the vacuum ultraviolet spectrometry field towards the above-mentioned cathode surface of above-mentioned anode-side.
16. the dielectric barrier discharge excimer light source according to described in the claim 15 is characterized in that: constitute several said wires of above-mentioned cathode line group, be connected across along longitudinal direction between the two ends of straight semicanal body; The maximum gauge that constitutes several said wires of above-mentioned cathode line group is no more than 2mm; The longitudinal direction angulation of the longitudinal direction of this electric wire and above-mentioned straight semicanal body is, perhaps vertical or to the upright position angle in less than 15 ° of scopes.
17. the dielectric barrier discharge excimer light source described in the claim 7-10 is characterized in that: between above-mentioned anode group and above-mentioned cathode line group, above-mentioned anode has been set up several and has been parallel to the longitudinal direction of above-mentioned semicanal body and is positioned at conplane rod-shaped conductor.
18. the dielectric barrier discharge excimer light source described in claim 1-4,7,8, the 11-14, it is characterized in that: above-mentioned anode is got the semicircular cylinder shape, and the direction setting that the convex surface of this semicircle cylindrical shell is provided with towards above-mentioned cathode line group, and the end shape along longitudinal direction of this half cylindrical shell is curved towards the interior side direction embayment of this half cylindrical shell.
19. the dielectric barrier discharge excimer light source described in the claim 5,6,9,10,15,16, it is characterized in that: above-mentioned anode is got the semicanal shape of rectangle, and the direction setting that the bottom surface of the semicanal body of this rectangle is provided with towards above-mentioned cathode line group, and the end shape along longitudinal direction of the semicanal body of this rectangle is the crooked shape towards the interior side direction of this rectangle.
20. a dielectric barrier discharge excimer light source is characterized in that: the anode electrode that anode has dielectric and the straight long cylindrical shell of the hollow that covered by this dielectric constitutes; Negative electrode is spiral helicine metallicity negative electrode electric wire; Under the central shaft of the above-mentioned cylindrical shell state consistent, make the negative electrode electric wire be configured to contain the setting of anode with above-mentioned spirochetal central shaft.
21. a dielectric barrier discharge excimer light source is characterized in that: the anode electrode that anode has dielectric and the straight long cylindrical shell of the hollow that covered by this dielectric constitutes; Negative electrode is spiral helicine metallicity negative electrode electric wire; Under the central shaft of the above-mentioned cylindrical shell state consistent, constitute coaxial shape discharge electrode unit thereby make the negative electrode electric wire contain anode, and be arranged at the inside of reflector with above-mentioned spirochetal central shaft; Reflector is half straight long cylindrical shell, and should half directly the longitudinal direction of long cylindrical shell be set to the central shaft and the above-mentioned spirochetal central shaft of above-mentioned cylindrical shell parallel to each other.
22. a dielectric barrier discharge excimer light source is characterized in that: the anode electrode that anode has dielectric and the straight long cylindrical shell of the hollow that covered by this dielectric constitutes; Negative electrode is spiral helicine metallicity negative electrode electric wire; Under the central shaft of the above-mentioned cylindrical shell state consistent with above-mentioned spirochetal central shaft, constitute coaxial shape discharge electrode unit thereby make the negative electrode electric wire contain anode, the central shaft of several this coaxial shape discharge electrode unit is arranged parallel to each other and is arranged at the inside of same reflector; Reflector for perpendicular to the profile of longitudinal direction be U-shaped by three half straight tube bodies that constitute.
23. the dielectric barrier discharge excimer light source according to described in the claim 20-22 is characterized in that: above-mentioned anode is a semi-cylindrical shaped, and the end shape of the one-tenth longitudinal direction of this semicircle cylindrical shell is the crooked shape towards the inboard of this semicircle cylindrical shell.
24. a dielectric barrier discharge excimer light source is characterized in that: anode has dielectric and the anode electrode of the straight long cylindrical shell of the hollow that covered by this dielectric; Negative electrode is spiral helicine metallicity negative electrode electric wire; Under the central shaft of the above-mentioned cylindrical shell state consistent, make this negative electrode electric wire be configured to contain this anode with above-mentioned spirochetal central shaft; Above-mentioned anode and above-mentioned negative electrode electric wire are arranged in the pipe of utilization to the transparent dielectric substance manufacturing of emission wavelength; Utilization seals anode and negative electrode electric wire to the pipe of the transparent dielectric substance manufacturing of emission wavelength.
25. aforesaid right requires the dielectric barrier discharge excimer light source described in the 1-24, it is characterized in that: constitute the structure of cooling fluid/gas in the anode frame body-internal-circulation.
26. aforesaid right requires the dielectric barrier discharge excimer light source described in the 20-25, it is characterized in that: the diameter of above-mentioned spiral helicine negative electrode electric wire is no more than 2mm.
27. aforesaid right requires the dielectric barrier discharge excimer light source described in the 1-26, it is characterized in that: the spacing of above-mentioned anode and above-mentioned negative electrode is 2mm.
28. aforesaid right requires the dielectric barrier discharge excimer light source described in the 1-26, it is characterized in that: above-mentioned anode contacts setting with above-mentioned negative electrode.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP114304/2004 | 2004-04-08 | ||
| JP2004114304 | 2004-04-08 | ||
| RU2004122213 | 2004-07-21 | ||
| JP062950/2005 | 2005-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1947219A true CN1947219A (en) | 2007-04-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580012116 Pending CN1947219A (en) | 2004-04-08 | 2005-04-06 | Dielectric barrier discharge excimer light source |
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| CN (1) | CN1947219A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103149195A (en) * | 2013-03-06 | 2013-06-12 | 河海大学 | Spectrum detection method and device for dielectric barrier discharge |
| CN103959431A (en) * | 2011-12-02 | 2014-07-30 | 优志旺电机株式会社 | Excimer lamp |
-
2005
- 2005-04-06 CN CN 200580012116 patent/CN1947219A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103959431A (en) * | 2011-12-02 | 2014-07-30 | 优志旺电机株式会社 | Excimer lamp |
| CN103959431B (en) * | 2011-12-02 | 2016-06-29 | 优志旺电机株式会社 | Excimer lamp |
| CN103149195A (en) * | 2013-03-06 | 2013-06-12 | 河海大学 | Spectrum detection method and device for dielectric barrier discharge |
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Open date: 20070411 |