CN1301533C - Electrod of short arc discharge lamp, producing method of the same electrode and short arc discharge lamp - Google Patents
Electrod of short arc discharge lamp, producing method of the same electrode and short arc discharge lamp Download PDFInfo
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- CN1301533C CN1301533C CNB031021034A CN03102103A CN1301533C CN 1301533 C CN1301533 C CN 1301533C CN B031021034 A CNB031021034 A CN B031021034A CN 03102103 A CN03102103 A CN 03102103A CN 1301533 C CN1301533 C CN 1301533C
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Abstract
The aim of the invention is to provide an electrode of a short arc electric discharge lamp capable of suppressing the consumption of the electrode even under high pressure and high temperature environments and also of suppressing the recrystallization of the electrode and has a superior rate of keeping the illuminance, and also to provide a method of manufacturing the same and to provide a short arc electric discharge lamp. The short arc type electric discharge lamp which is used with mercury and a noble gas sealed in a light emission tube is provided with the electrode consisting of a cathode and an anode which are disposed face to face in the light emission tube. The electrode is heat-treated in a vacuum at a temperature in a range of 2300 DEG C<=T<MP, where T is a heat treatment temperature in a vacuum when at least either the cathode or the anode is manufactured and MP is a melting point of a metal used for the cathode or the anode.
Description
Technical field
The present invention relates to a kind of electrode manufacturing method that is used on workpiece, forming the short arc discharge lamp of predetermined pattern by irradiation ultraviolet radiation.
Background technology
Generally, the ultraviolet ray by irradiation predetermined wavelength on as the wafer of workpiece and form predetermined pattern and make exposure sources use short arc discharge lamp that semiconductor integrated circuit (IC) waits as light source.
Use this short arc discharge lamp, even in ultraviolet ray, also can carry out i line (centre wavelength is 365nm) irradiation effectively to workpiece.And because the IC technological progress is very fast, thereby the equipment investment of IC manufacturing usefulness is very big, and price competition is very fierce.Therefore, manufacturing cost control is integral concerning IC manufacturer succeeds, and for for the short arc discharge lamp of the used running stores of IC manufacturing process, the requirement that reduces cost to increasing the service life is also very strong.
And at technical elements, along with the Highgrade integration of IC, the resolution requirement during to exposure also improves.And also there is heavy caliberization in a large amount of wafers that constitute workpiece, and exposure area also increases.Perhaps, require to increase ultra violet radiation amount from light source irradiation in view of the structure that is used to realize high-resolution optical system.
Therefore, the short arc discharge lamp and the electrode thereof of long various structures of irradiation light stability height and life-span have conventionally been proposed.In addition, for long-life and the high stability that realizes short arc discharge lamp,, control effectively so that can descend to the illumination sustainment rate by improving electrode shape and the electrode processing method reduces consumption of electrode.This is a kind of known technology.
For example, aspect the electrode shape of short arc discharge lamp, having disclosed with the decline of the temperature in the illumination (radiating effect improvement) in No. 11128/1964 Japanese patent unexamined communique is the heat sink structure (surface area increase) of target.And, in No. 2601435 patent gazette, disclosed a kind of method that is used for forming the porous layer that the mixture by ramet and tungsten constitutes, and in No. 2915368 patent gazette, disclosed a kind of method that is used to form graininess tungsten sinter layer etc. at electrode surface.
And, in JP-A-2001-135274, disclosed a kind of short arc discharge lamp, in this short arc discharge lamp, be volume ratio that 5%～40% low-molecular-weight rare gas mixes with the rare gas of HMW, as rare gas, and the pressure of handle when the normal temperature of these rare gas is set at 2 or above atmospheric pressure.
Above-mentioned short arc discharge lamp is compared less than two atmospheric short arc discharge lamps with enclosing the used pressure of rare gas, and the radiation briliancy is very high.This high radiation briliancy can significantly produce consumption, and its degree is equivalent to dig out the degree of anode tip portion.And,, also very remarkable by the caused consumption of the increase of lamp current along with the raising of the illumination utilance of lamp.Therefore, consider the gaseous exchange in the short arc discharge lamp, also adopt the electrode shape design of the Temperature Distribution optimization that makes electrode recently.
And, as the processing method when the manufacturing of the electrode of short arc discharge lamp, carrying out with the oxidation film layer of removing electrode surface is heat treatment (reduction) in the hydrogen of purpose, and perhaps also having with the gas of eliminating electrode interior is heat treatment in the high vacuum of purpose.Particularly, the heat treatment in the high vacuum has influenced the carrying out of the crystallization again (grain growth) of tungsten.Therefore, up to the present, temperature is set to 1600～2200 ℃ always.
Yet, improve leeway also existing aspect the electrode of conventional short arc discharge lamp and the short arc discharge lamp.That is to say that in conventional short arc discharge lamp and electrode thereof, the heat treatment temperature in high vacuum has influenced with carry out of tungsten as the crystallization again (grain growth) of the metal of principal component.Therefore, up to the present, temperature is set to 1600～2200 ℃ always.Yet, since particularly in arc zone the cathode point portion as the highest position of briliancy (bright spot) also reached about more than 2400～2700 ℃, thereby during fabrication, be under 1600～2200 ℃ the situation, to have promoted the consumption of electrode in heat treatment temperature.
And when the illumination of short arc discharge lamp, if negative electrode and anode reach about 2400～2700 ℃, then the crystallization again of negative electrode and anode obtains promoting.Like this, the impurity that exists between being present between the crystal etc. is emitted, and the melanism in the luminous tube obtains promoting.
For conventional short arc discharge lamp and electrode thereof, because the structure of anode tip portion forms even shape or protrude shape, thereby in the luminous tube of high pressure and high temperature, the collision of the electronics of emitting from negative electrode can make the consumption of anode become violent.
Summary of the invention
The present invention proposes in view of the above problems, the electrode manufacturing method that the purpose of this invention is to provide a kind of short arc discharge lamp, it is characterized in that, even under the high pressure and the condition of high temperature, also can control to the consumption of electrode, and this short arc discharge lamp can be controlled the crystallization again of electrode, and is doing well aspect the illumination sustainment rate.
In order to address the above problem, the electrode manufacturing method of short arc discharge lamp is constructed as follows: electrode is made of negative electrode and anode, and this negative electrode and anode adopt opposed mode to be arranged in mercury and the rare gas inclosure luminous tube and in the above-mentioned luminous tube in the short arc discharge lamp that is used; In at least one side at this negative electrode or anode, according to average metallic crystal particle diameter, the heat treatment temperature in the vacuum when making is set at T, and when the fusing point that is used for the metal of this negative electrode or anode is set at MP, in the temperature range of 2300 ℃≤T＜MP, heat-treat in a vacuum.
Adopt this formation, the electrode manufacturing method of short arc discharge lamp can be constituted: according to average metallic crystal particle diameter, in the temperature range of 2300 ℃≤T＜MP, in a vacuum to heat-treating as the metal of negative electrode and anode.Therefore, can eliminate the impurity that is included in as in the metal of negative electrode and anode during fabrication.
And, in the electrode manufacturing method of short arc discharge lamp, carry out the heat treatment of sufficient time, to form the predetermined average metallic crystal particle diameter in the above-mentioned metal.Adopt this formation, can make average metallic crystal particle diameter stable, and can prevent that negative electrode or anode from crystallization again taking place because of being heated, but also can minimum consumption carry out the light stable irradiation.
And, in the electrode manufacturing method of short arc discharge lamp, be volume ratio that 5%～40% low-molecular-weight rare gas mixes with the rare gas of HMW, as above-mentioned rare gas; Pressure during the normal temperature of these rare gas is set at 2 or above atmospheric pressure; Above-mentioned anode is provided with concave surface at the point towards above-mentioned negative electrode; Above-mentioned concave shape becomes the surfaces of revolution that forms around the center line that connects anode and negative electrode.
Adopt this formation, in short arc discharge lamp,, can improve illumination to volume ratio by being that 5%～40% low-molecular-weight rare gas mixes with the rare gas of HMW, its reason is, the rare gas height of the thermal conductivity ratio HMW of the rare gas of lower molecular weight.And when facing the electronics of the radiation from negative electrode towards the anode concave surface, short arc discharge lamp can suppress to consume.
In the electrode manufacturing method of short arc discharge lamp, what the rare gas of above-mentioned HMW was suitable is the mist of at least a or these gases in xenon, krypton and the argon, and above-mentioned low-molecular-weight rare gas suitable be the mist of at least a or these gases in helium and the neon.
And, in the electrode manufacturing method of above-mentioned short arc discharge lamp,, the electric field strength in the anode tip portion is set at E when the point of negative electrode is set at point charge Q, be interelectrode distance setting X, and dielectric constant is set at ε
0The time, with formula E=Q/ (4 π ε
0X
2) represent; The electric field strength E that the above-mentioned surfaces of revolution is formed in the concave surface that makes above-mentioned anode equates.
Adopt this formation, short arc discharge lamp can make reception approximate from the electric field strength of the anode concave surface each point of the electronics of negative electrode, and the current density of this concave surface is disperseed.
Description of drawings
Figure 1A is the end view that schematically shows according to the shape of short arc discharge lamp of the present invention, and Figure 1B is the partial exploded side view that schematically shows the electrode formation of short arc discharge lamp, and Fig. 1 C is the end view that the concave surface formation of anode is shown.
Fig. 2 is the figure that illustrates according to the relation of the average metallic crystal particle diameter of the electrode of short arc discharge lamp of the present invention and heat treatment temperature.
Fig. 3 is the figure that illustrates according to the relation of the average metallic crystal particle diameter of the electrode of short arc discharge lamp of the present invention and heat treatment temperature.
Fig. 4 is the figure that illustrates according to the relation of the average metallic crystal particle diameter of the electrode of short arc discharge lamp of the present invention and heat treatment temperature.
Fig. 5 is the figure that illustrates according to the relation of the average metallic crystal particle diameter of the electrode of short arc discharge lamp of the present invention and heat treatment temperature.
Fig. 6 is the figure that illustrates according to the relation of the illumination sustainment rate of short arc discharge lamp of the present invention and lighting hours.
Fig. 7 is the figure that illustrates according to the relation of the illumination sustainment rate of short arc discharge lamp of the present invention and lighting hours.
Fig. 8 is the figure that illustrates according to the relation of the illumination sustainment rate of short arc discharge lamp of the present invention and lighting hours.
Fig. 9 is the figure that illustrates according to the relation of the illumination sustainment rate of short arc discharge lamp of the present invention and lighting hours.
Embodiment
Hereinafter with reference to accompanying drawing, the preferred embodiments of the present invention are described.
Figure 1A is the end view that schematically shows the shape of short arc discharge lamp with form of fracture, and Figure 1B is the partial exploded side view that schematically shows the electrode formation of short arc discharge lamp, and Fig. 1 C is the end view that the concave surface formation of anode is shown.
As shown in Figure 1, short arc discharge lamp 20 comprises: negative electrode 2 and anode 3, and both are arranged in the luminous tube 1 of the such ultraviolet permeation member formation of employing such as quartz glass in opposed mode; Inner lead rod 4 and 5, it supports the each side in this negative electrode 2 and the anode 3; Metal forming 8 and 9, it is connected with 5 rear side with this inside lead rod 4; And outside lead rod 10 and 11, it is connected with 9 rear side with this metal forming 8; Wherein, inner lead rod 4 and 5, metal forming 8 and 9 and the position of outside lead rod 10 and 11 by the sealing 6 of luminous tube 1 and 7 and join the cap (not shown) and seal.
And for negative electrode 2 and anode 3, side in their materials or both sides can adopt tungsten simple substance to form, and also can adopt tungsten alloy to form.When at least one side in this negative electrode 2 and the anode 3 adopts tungsten alloy to form, can enumerate following example: carry out the material that sintering is made by the potassium powder of scheduled volume is added to tungsten powder; By being added to tungsten, the thorium powder of scheduled volume carries out the material that sintering is made; Perhaps, the potassium powder of scheduled volume and thorium powder carry out the material that sintering is made by being added to tungsten.
And the heat treatment temperature in vacuum when making is set at T, and when the fusing point of each metal was set at MP, in the temperature range of 2300 ℃≤T＜MP, at least one side in high vacuum in target 2 or the anode 3 heat-treated.At this, be example to be set at 2300～2900 ℃, preferably be set at 2400～2900 ℃.According to the formation of short arc discharge lamp 20, when the heat treatment temperature of negative electrode 2 or anode 3 surpasses 2300 ℃, perhaps when the time, can be in illumination crystallization again be suppressed to minimum above 2400 ℃.In addition, at this, vacuum state is from 133 * 10
-3(Pa)～133 * 10
-6(Pa) in the scope.
And, can make suitable selection and decision at the heat treatment time of at least one side in said temperature scope target 2 or the anode 3.In addition, heat treatment time preferably was set to from 5 minutes to 180 minutes.When heat treatment time during less than 5 minutes, even heat treatment temperature is 2300 ℃～2900 ℃, if connect short arc discharge lamp 20, the possibility that crystallization again (grain growth) takes place the then current metal that is used for negative electrode 2 or anode 3 is also very high.Include gas and can promote melanism in the luminous tube 1 what this was emitted during crystallization again.And when heat treatment time surpasses 180 minutes, and heat treatment temperature is in 2300 ℃～2900 ℃ scope the time, and the stability of average metallic crystal particle diameter and the removal that includes gas all are in saturation condition when this heat treatment temperature.
In short arc discharge lamp 20, according to average metallic crystal particle diameter, the said temperature scope (2300 ℃≤T＜MP) in, in a vacuum the metal that is elected to be negative electrode 2 and anode 3 is heat-treated.In addition, the grace time that is used to form predetermined average metallic crystal particle diameter is meant: when when the electrode that is made of used metal being heat-treated by selected predetermined temperatures such as preliminary experiments, and the time that the stable state that is difficult to crystallization again is maintained.
For example, can be in the said temperature scope at least one side's heat treatment time in target 2 or the anode 3 make suitable selection and decision, and can make suitable selection according to the metal species and metal (tungsten or its alloy) the initial stage particle diameter that constitute negative electrode 2 or anode 3.At this, heat treatment time is set to 5 minutes～180 minutes scope.When heat treatment time during less than 5 minutes, even heat treatment temperature is set to 2300 ℃～2900 ℃ scope, if connect short arc discharge lamp 20, the possibility that crystallization again (grain growth) takes place the then current metal that is used for negative electrode 2 or anode 3 is also very high.So that emits when this crystallization again includes gas and can promote melanism in the luminous tube 1.And when heat treatment time surpassed 180 minutes, the stability of average metallic crystal particle diameter all was in saturation condition with the removal that includes gas when this heat treatment temperature.
And, consider the preliminary date (reserve data) (preliminary experiment) of using the metal that constitutes negative electrode 2 to be processed or anode 3, can determine the heat treatment time of at least one side in negative electrode 2 or the anode 3.
As described below, this preliminary date should possess Fig. 2 or relevant formation negative electrode 2 or the metal of anode 3 and the information of the heat treatment temperature and the relation of average metallic crystal particle diameter shown in Figure 5.In addition, if the numerical value of known relevant heat treatment time then can constitute more suitably negative electrode 2 or anode 3.Utilize the preliminary date of this Fig. 2 or Fig. 5, can rely on the heat treatment temperature (but also can rely on heat treatment time) that average metallic crystal particle diameter is in stable state and constitute suitable negative electrode 2 or anode 3.
As Fig. 2 or shown in Figure 5, if the heat treatment temperature in the vacuum when making is higher, and heat treatment time is longer, and then the average metallic crystal particle diameter of negative electrode 2 or anode 3 is grown to stabilised in size.Simultaneously, when heat-treating, emit the gas that includes that contains in the material.Therefore, when the lamp connected as short arc discharge lamp 20, negative electrode 2 and anode 3 can not send the gas that includes that does not expect to have, thereby can realize scheduled time illumination, and can keep the illumination sustainment rate be scheduled to.
In addition, the material of negative electrode 2 and anode 3 is by enumerating tungsten (W) and potassium (K) doped in the tungsten formed material or thorium (Th) being doped in the tungsten formed material and potassium and thorium doped formed material is that example is described in the tungsten.Yet, certainly, also can in tungsten, dope other compositions and carry out sintering or cast and forge.And at least one side in high vacuum in target 2 or the anode 3 heat-treats, so that negative electrode 2 and anode 3 are in stable state.
And shown in Figure 1B and Fig. 1 C, in the luminous tube of short arc discharge lamp 20, the distance between negative electrode 2 and the anode 3 is set to for example 5.5mm, and forms concave surface 3A in the precalculated position towards the anode 3 of negative electrode 2.The current formation that is formed on the concave surface 3A in this anode 3 be for make with the distance at the tip of negative electrode 2 can be at the each point P in the curved surface of this concave surface 3A
0, P
1Be equidistant X
0, X
1
And, when the point of negative electrode 2 is set at point charge Q, the electric field strength in the point of anode 3 is set at E, be interelectrode distance setting X, and dielectric constant is set at ε
0The time, available formula E=Q/ (4 π ε
0X
2) represent.The curved surface of the concave surface 3A of anode 3 can form the surfaces of revolution, so that can make the electric field strength E approximately equal of each point in the concave surface of above-mentioned anode.The surfaces of revolution of this concave surface 3A can adopt the shape that becomes a circular part, and can adopt the shape that becomes an oval part, also can adopt the shape that becomes a parabola part.
Like this, in the concave surface 3A of anode 3, when from negative electrode 2 transmission electronics, because electric field strength E is equal or approximately equal, thereby the current density of concave surface 3A is equal, thereby can be suppressed to minimum to the consumption of anode 3.In addition, when making the electric field strength E approximately equal, the distance X of 3 concave surface 3A can be in equivalent state from negative electrode 2 to anode.
And, adopt this mode to mix rare gas, that is: adopt 5～40% volume ratio to mix with mercury with such as the rare gas of the such higher molecular weight of xenon, argon and krypton with such as the rare gas of the such lower molecular weight of neon or helium, and this mixing rare gas is included in the luminous tube 1 of short arc discharge lamp 20.Enclose this mixing rare gas at normal temperature with 2 or above atmospheric pressure then, thereby help to improve luminance and improve illumination stability.Table 1 shows an example of relevant this rare gas.
Table 1
| The inclosure pressure (atmospheric pressure) of full rare gas | The volume ratio of neon (Ne) or helium (He) | Enclose rare gas xenon (Xe) | Enclose rare gas krypton (Kr) | Enclose rare gas argon (Ar) | |||
| Illumination | Stability | Illumination | Stability | Illumination | Stability | ||
| 2.0 | Ne 40％ | 1.04 | 0.68 | 1.05 | 0.66 | 1.08 | 0.57 |
| 2.0 | | 1.04 | 0.82 | 1.04 | 0.76 | 1.07 | 0.74 |
| 2.0 | Ne 10％ | 1.04 | 0.97 | 1.03 | 0.96 | 1.06 | 0.76 |
| 2.0 | Ne 5％ | 1.03 | 1.09 | 1.03 | 0.97 | 1.06 | 0.77 |
| 2.0 | Do not have | 1.02 | 1.29 | 1.03 | 1.05 | 1.05 | 0.98 |
| 7.0 | Ne 10％ | 1.07 | 1.36 | 1.07 | 1.14 | 1.12 | 0.79 |
| 7.0 | Ne 5％ | 1.06 | 1.43 | 1.07 | 1.15 | 1.12 | 0.86 |
| 7.0 | Do not have | 1.06 | 1.70 | 1.06 | 1.38 | 1.12 | 1.13 |
| 2.0 | He 40％ | 1.05 | 0.66 | ||||
| 2.0 | He 5％ | 1.03 | 1.08 | ||||
| 7.0 | He 10％ | 1.07 | 1.34 | ||||
| 7.0 | He 5％ | 1.07 | 1.44 | ||||
And at this, short arc discharge lamp 20 adopts anode 3 that superincumbent mode is set and vertically is provided with, and connects as the lamp input electric power with 3500W.Certainly, particularly, the lighting arrangements mode and the lamp input electric power of short arc discharge lamp 20 are not limited thereto.
Below will describe embodiments of the invention.In addition, the invention is not restricted to present embodiment.And, as preliminary experiment,, prepared from sample 1 to sample 4 data at this as Fig. 2 or shown in Figure 5.
As the preliminary experiment method, (φ 20 * 30mm) cleans (methyl alcohol ultrasonic cleansing 15 minutes * 2 times), hydrogen handles (1000 ℃ * 30 minutes) and high-temperature vacuum is handled to sample 1 (tungsten), sample 2 (thorium of 2 mass percents is added to tungsten), sample 3 (potassium of 30ppm is added to tungsten) and sample 4 (potassium of the thorium of 2 mass percents and 30ppm is added to tungsten).High-temperature vacuum is handled and was carried out heating and continuous 15 minutes, 60 minutes and 180 minutes at 1600 ℃, 1900 ℃, 2200 ℃, 2500 ℃ and 2700 ℃ respectively.Firing rate is set to 20 ℃/minute.In addition, vacuum degree is set at 133 * 10
-3(Pa)～133 * 10
-6(Pa) in the scope.
And, as analytical equipment, digital microscope VH-6300 (KEYENCE system), scanning electron microscopy (SEM) DX-700 (TOPCON system), vacuum high temperature furnace (DIAVAC LIMITED system) and diamond cutter MC-122 (MARUTO INSTRUMENT system) have been used.
And,,, use SEM that the crystallization particle diameter in the cross section is observed and measured using diamond cutter from the cross section of the cutting 30mm of central authorities and the vertical section that diametric(al) is cut for each sample 1～4 after the high-temperature vacuum processing.In addition, adopt the mean value of optional five crystal grain in this cross section as average metallic crystal particle diameter.
Below will an example of above-mentioned preliminary date be described.As shown in Figure 2, under sample 1 situation, 0.125 or above and 0.185mm or following average metallic crystal particle diameter, perhaps minimum value is that 0.13mm or above average metallic crystal particle diameter are suitable.This 0.125mm or following average metallic crystal particle diameter are easy to be heated in illumination and crystallization again take place.This just can't carry out scheduled time illumination when keeping the predetermined luminous intensity sustainment rate.And even average metallic crystal particle diameter is greatly to surpassing 0.185mm, this average metallic crystal particle diameter also can be near saturation condition.In addition, when average metallic crystal particle diameter is 0.13mm or when above, heat treatment temperature be 2400 ℃ or more than, thereby form the state that crystallization more can not take place easily.
And, as shown in Figure 3, under sample 2 situations, average metallic crystal particle diameter be 0.035 (or 0.04) mm or above and 0.06mm or following be suitable.This 0.035mm or following average metallic crystal particle diameter are in and are heated in the illumination and the state of crystallization again takes place easily, thereby can't carry out scheduled time illumination when keeping the predetermined luminous intensity sustainment rate.And, when average metallic crystal particle diameter greatly when surpassing 0.06mm, this average metallic crystal particle diameter is stablized and is heated and near saturation condition.
And, as shown in Figure 4, under sample 3 situations, average metallic crystal particle diameter be 0.145mm or above and 0.18mm or following be suitable.This 0.145mm or following average metallic crystal particle diameter are in and are heated in the illumination and the state of crystallization again takes place easily, thereby can't carry out scheduled time illumination when keeping the predetermined luminous intensity sustainment rate.And, when average metallic crystal particle diameter greatly when surpassing 0.18mm, this average metallic crystal particle diameter is stablized and is heated and near saturation condition.
And, as shown in Figure 5, under sample 4 situations, average metallic crystal particle diameter be 0.09mm or above and 0.14mm or following be suitable.This 0.09mm or following average metallic crystal particle diameter are in and are heated in the illumination and the state of crystallization again takes place easily, thereby can't carry out scheduled time illumination when keeping the predetermined luminous intensity sustainment rate.And, when average metallic crystal particle diameter greatly when surpassing 0.14mm, this average metallic crystal particle diameter is stablized and is heated and near saturation condition.
It below is the experiment that the illumination sustainment rate of short arc discharge lamp is done.In addition, with regard to electrode, the illumination sustainment rate of at least one side in target and anode the two or negative electrode and the anode has been made mensuration.
And as first embodiment, short arc discharge lamp is by the mercury of 45mg/cc, constitutes as the Ar of the HMW of the rare gas of enclosing and the rare gas that mixes with this three of low-molecular-weight Ne that 40% volume ratio is enclosed.And the distance of negative electrode and anode is set to 5.5mm, and with the input power turn-on lamp of 3500W.In addition, negative electrode adopts sample 4 to constitute, and anode adopts sample 3 to constitute, and in the time of 2300 ℃, respectively this negative electrode and anode are heat-treated in a vacuum and (in sample 4, the potassium of the thorium of 2 mass percents and 30ppm is added to tungsten, in sample 3, the potassium of 30ppm is added to tungsten).And shown in Fig. 1 C, anode constitutes: the diameter of end face D1 is set at 8mm, the diameter of the diameter D2 of dome shape concave surface is set at 6mm, and the degree of depth of this concave surface is set at 1mm.
And, as shown in table 2, to the heat treatment temperature in the high vacuum (℃), the concave surface of anode tip portion, the volume ratio of enclosing kind, atmospheric pressure and the Ne of gas all made regulation, to constitute short arc discharge lamp.
And, as shown in Figure 6, illumination sustainment rate and lighting hours (750 hours) have been made mensuration.The metering system of illumination sustainment rate is: use the locational illuminance meter be arranged on as the exposure area of IC exposure sources, ultraviolet interim illumination and the illumination stability thereof just from the i line (centre wavelength is 365nm) of short arc discharge lamp is measured.In addition, with regard to illumination stability, we can say that the numerical value that approaches " 0 " is the high numerical value of stability.
Table 2
| Heat treatment temperature in the high vacuum (℃) | The concave surface of anode tip portion | Enclose gas pressure (atmospheric pressure) | The volume ratio of Ne | Relative illumination | Illumination stability (%) | |
| | 2100 | Do not have | Xe 1.0 | Do not have | 1.00 | 1.10 |
| Lamp A1 lamp | 2300 2300 2300 | Do not have | Ar 2.0 Ar 5.0 Ar 7.0 | 40％ 40％ 40％ | 1.10 1.15 1.17 | 0.51 0.60 0.82 |
| Lamp A4 lamp | 2300 2300 2300 | Have | Ar 2.0 Ar 5.0 Ar 7.0 | 40％ 40％ 40％ | 1.09 1.15 1.17 | 0.53 0.63 0.81 |
Evaluation result shows that A compares with standard lamp, is provided with the lamp A4～A6 of concave surface in anode tip portion and compares with the lamp A1～A3 that is not provided with concave surface in anode tip portion, and is identical with illumination stability in the illumination of enclosing on the gas pressure.And as shown in Figure 6, lamp A4～A6 compares with lamp A1～A3, and the illumination sustainment rate improves about 10%.
And in the standard lamp B of second embodiment, the heat treatment temperature of negative electrode and anode is set to 2100 ℃.And, in lamp B1～B6, the heat treatment temperature in the high vacuum being set at 2300 ℃, 2500 ℃ and 2700 ℃, the either party in target and the anode heat-treats, so that be formed in the short arc discharge lamp of not establishing concave surface in the anode.In addition, in lamp B1～B3, in high vacuum, when 2300 ℃, 2500 ℃ and 2700 ℃, only target is heat-treated, and in lamp B4～B6, and in high vacuum, when 2300 ℃, 2500 ℃ and 2700 ℃, only antianode is heat-treated.And other formations of the short arc discharge lamp that does not have in the table 3 (mercury enclosed volume etc.) are identical with above-mentioned formation.
Table 3
| Heat treatment temperature in the high vacuum (℃) | The concave surface of anode tip portion | Enclose gas pressure (atmospheric pressure) | The volume ratio of Ne | Relative illumination | Illumination stability (%) | |
| | 2100 | Do not have | Ar 5.0 | 40％ | 1.15 | 1.62 |
| Lamp B1 lamp | 2300 2500 2700 | Do not have | Ar 5.0 Ar 5.0 Ar 5.0 | 40％ 40％ 40％ | 1.16 1.15 1.15 | 0.61 0.58 0.64 |
| Lamp B4 lamp | 2300 2500 2700 | Do not have | Ar 5.0 Ar 5.0 Ar 5.0 | 40％ 40％ 40％ | 1.16 1.14 1.15 | 0.59 0.62 0.63 |
Evaluation result shows that lamp B1～B6 compares with standard lamp B, and illumination is identical with illumination stability.And as shown in Figure 7, lamp B1～B3 compares with standard lamp B, and the illumination sustainment rate improves about 3～5%.And as shown in Figure 8, lamp B4～B6 compares with standard lamp B, and the illumination sustainment rate improves about 2～3%.
As shown in Figure 9, be that result from first embodiment and second embodiment measures as the illumination sustainment rate of the lamp that constitutes shown in the table 4 of lamp C.In addition, other formations of the short arc discharge lamp that does not have in the table 4 (mercury enclosed volume etc.) are identical with above-mentioned formation.
Table 4
| Heat treatment temperature in the high vacuum (℃) | The concave surface of anode tip portion | Enclose gas pressure (atmospheric pressure) | The volume ratio of Ne | Relative illumination | Illumination stability (%) | |
| | 2100 | Do not have | Ar 5.0 | 40％ | 1.15 | 1.62 |
| | 2500 | Have | Ar 5.0 | 40％ | 1.15 | 0.60 |
As shown in Figure 9, B compares with standard lamp, confirms that the illumination sustainment rate improves about 16%.
In addition, although in the present embodiment, the heat treatment time of Fig. 6 or electrode shown in Figure 9 is confirmed as 60 minutes, yet this heat treatment time is not limited thereto.And sample 4 is used for negative electrode, and sample 3 is used for anode.Yet,, the scope of application can be expanded to and use other samples or other tungsten alloys as sample by getting all the preliminary date ready.
Adopt above-mentioned formation, can obtain following excellent results of the present invention.
(1) owing to can be in the electrode of short arc discharge lamp be heat-treated during fabrication the vacuum from 2300 ℃ or 2400 ℃ to the temperature range of the fusing point of used metal, therefore, when being used for short arc discharge lamp, even electrode is in the condition of high temperature when illumination, also can be suppressed to minimum to crystallization and consumption again, and can keep the predetermined luminous intensity sustainment rate in the given time.
(2) in the electrode of short arc discharge lamp, carry out the heat treatment of grace time in the vacuum during fabrication, to form the predetermined average metallic crystal particle diameter in the used metal.Therefore, can make a kind of short arc discharge lamp, the data that this short arc discharge lamp obtains by the preliminary experiment according to heat treatment temperature, average metallic crystal particle diameter and the metal ingredient of expression in the vacuum, can the height of short arc discharge lamp enclose in the environment of pressure the consumption of electrode and again crystallization be suppressed to minimum.
(3) in short arc discharge lamp, can be in from 2300 ℃ or 2400 ℃ to the temperature range of the fusing point of used metal during fabrication the vacuum either party in target or the anode heat-treat, and concave surface can be set, thereby can keep the illumination sustainment rate be scheduled in the given time in anode.In addition, heat-treat, can keep higher illumination sustainment rate by target in predetermined temperature range and anode.
(4) for the rare gas of enclosing under 2 or above atmospheric high-pressure state, short arc discharge lamp uses HMW and low-molecular-weight rare gas according to estimated rate.Therefore, luminous efficiency is improved, illumination is had good stability, and can improve the illumination sustainment rate.In addition, by concave surface is set, and make the electrolysis strength approximately equal that receives by this concave surface in anode, can control the consumption of electrode, and luminous tube efficient is further improved, illumination is had good stability, and can improve the illumination sustainment rate.
Claims (5)
1. the electrode manufacturing method of a short arc discharge lamp, this short arc discharge lamp is enclosed mercury and rare gas in the luminous tube and is used, and this electrode is made of the negative electrode and the anode that adopt opposed mode to be arranged in this luminous tube; It is characterized in that, in at least one side at this negative electrode or anode, according to average metallic crystal particle diameter, heat treatment temperature in the vacuum during manufacturing is set at T, and when the fusing point that is used for the metal of this negative electrode or anode is set at MP, in the temperature range of 2300 ℃≤T＜MP, heat-treat in a vacuum.
2. the electrode manufacturing method of short arc discharge lamp according to claim 1 is characterized in that, carries out the above-mentioned heat treatment of grace time, to form the predetermined average metallic crystal particle diameter in the above-mentioned metal.
3. the electrode manufacturing method of short arc discharge lamp according to claim 1 and 2, it is characterized in that, be volume ratio that 5%～40% low-molecular-weight rare gas mixes with the rare gas of HMW, as above-mentioned rare gas, the pressure during the normal temperature of these rare gas is set at 2 or above atmospheric pressure; Above-mentioned anode is provided with concave surface at the point relative with above-mentioned negative electrode, and this concave shape becomes the surfaces of revolution that forms around the center line that connects anode and negative electrode.
4. the electrode manufacturing method of short arc discharge lamp according to claim 3 is characterized in that, the rare gas of above-mentioned HMW is the mist of at least a or these gases in xenon, krypton and the argon; And above-mentioned low-molecular-weight rare gas is the mist of at least a or these gases in helium and the neon.
5. the electrode manufacturing method of short arc discharge lamp according to claim 3, it is characterized in that,, the electric field strength in the point of anode is set at E when the point of anode is set at point charge Q, is interelectrode distance setting X, and dielectric constant is set at ε
0The time, with formula E=Q/ (4 π ε
0X
2) represent; The electric field strength E that the above-mentioned surfaces of revolution is formed in the concave surface that makes above-mentioned anode equates.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002031350A JP4054198B2 (en) | 2002-02-07 | 2002-02-07 | Short arc type discharge lamp electrode and short arc type discharge lamp |
| JP031350/2002 | 2002-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1437216A CN1437216A (en) | 2003-08-20 |
| CN1301533C true CN1301533C (en) | 2007-02-21 |
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ID=27654778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031021034A Expired - Lifetime CN1301533C (en) | 2002-02-07 | 2003-01-30 | Electrod of short arc discharge lamp, producing method of the same electrode and short arc discharge lamp |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP4054198B2 (en) |
| CN (1) | CN1301533C (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005285676A (en) * | 2004-03-30 | 2005-10-13 | Nippon Tungsten Co Ltd | Electrode for discharge lamp |
| JP4758078B2 (en) * | 2004-07-09 | 2011-08-24 | 株式会社ユメックス | Impure gas removal device |
| JP4678059B2 (en) * | 2009-03-02 | 2011-04-27 | ウシオ電機株式会社 | Short arc type discharge lamp |
| JP2011014248A (en) * | 2009-06-30 | 2011-01-20 | Ushio Inc | Anode for short-arc discharge lamp and the short-arc type discharge lamp |
| DE102010044259B4 (en) | 2009-09-15 | 2012-11-15 | Ushio Denki K.K. | Short-arc discharge lamp |
| JP4715966B2 (en) * | 2009-09-15 | 2011-07-06 | ウシオ電機株式会社 | Short arc type discharge lamp |
| EP2866240B1 (en) * | 2012-06-22 | 2018-02-21 | Showa Denko K.K. | Anode body for solid electrolytic capacitor |
| JP5664602B2 (en) | 2012-07-10 | 2015-02-04 | ウシオ電機株式会社 | Short arc type mercury lamp |
| WO2014021154A1 (en) * | 2012-07-31 | 2014-02-06 | 東芝マテリアル株式会社 | Negative electrode for discharge lamp and method for manufacturing same |
| JP6971703B2 (en) * | 2017-08-10 | 2021-11-24 | 株式会社オーク製作所 | Manufacturing method of discharge lamp, electrode for discharge lamp and electrode for discharge lamp |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19845444A1 (en) * | 1997-10-03 | 1999-06-10 | Orc Mfg Co Ltd | High pressure discharge lamp cathode has a locally carbonized conical front end portion |
| CN1274473A (en) * | 1998-08-06 | 2000-11-22 | 电灯专利信托有限公司 | Ligh-life electrode for high pressure discharge lamp |
-
2002
- 2002-02-07 JP JP2002031350A patent/JP4054198B2/en not_active Expired - Fee Related
-
2003
- 2003-01-30 CN CNB031021034A patent/CN1301533C/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19845444A1 (en) * | 1997-10-03 | 1999-06-10 | Orc Mfg Co Ltd | High pressure discharge lamp cathode has a locally carbonized conical front end portion |
| CN1274473A (en) * | 1998-08-06 | 2000-11-22 | 电灯专利信托有限公司 | Ligh-life electrode for high pressure discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003234083A (en) | 2003-08-22 |
| JP4054198B2 (en) | 2008-02-27 |
| CN1437216A (en) | 2003-08-20 |
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