CN1946960A - Flow rate characteristic adjustment mechanism of solenoid proportional valve and flow rate characteristic adjustment method using the same - Google Patents
Flow rate characteristic adjustment mechanism of solenoid proportional valve and flow rate characteristic adjustment method using the same Download PDFInfo
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- CN1946960A CN1946960A CNA2005800125129A CN200580012512A CN1946960A CN 1946960 A CN1946960 A CN 1946960A CN A2005800125129 A CNA2005800125129 A CN A2005800125129A CN 200580012512 A CN200580012512 A CN 200580012512A CN 1946960 A CN1946960 A CN 1946960A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
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Abstract
A flow rate characteristic adjustment mechanism of a solenoid proportional valve capable of easily adjusting the flow rate characteristics of the solenoid proportional valve even after a product is assembled and a flow rate characteristic adjustment method using the mechanism. The solenoid proportional valve (1A) comprises a coil bobbin (16) around which a coil (17) is wrapped, a third core (15) fixedly fitted to the coil bobbin (16), a body (2) having an inlet flow passage (3) and an outlet flow passage (4), a valve seat (6) allowing the inlet flow passage (3) to communicate with the outlet flow passage (4), a valve seat (12) opening/closing the valve seat (6), a plunger (10) formed integrally with the valve seat (12), a plate spring (8) energizing the plunger (10) in the direction of the valve seat (6), a first core (9) interposed between the coil bobbin (16) and the body (2), and a bonnet (19) detachably put on the coil bobbin (16). The third core (15), the first core (9), and the bonnet (19) surround the periphery of the coil (17) to form a magnetic circuit. A fixed screw (22) is rotated to move the bonnet (19) in the axial direction so as to change the magnetic circuit.
Description
Technical field
The present invention relates to a kind of with offer coil to apply the attraction force that electric current produces proportional, the Flow characteristics regulating mechanism of the electromagnetic proportional valve of the flow of control control fluid and use the Flow characteristics adjusting method of this mechanism.
Background technique
In the past, for example in semiconductor manufacturing process, the micro machining development utilized electromagnetic proportional valve critically to control control fluids such as process gas.In semiconductor manufacturing process, for example, use the electromagnetic proportional valve of lobe formula in order to prevent the generation of particle.
Fig. 8 is the sectional view that adopts the electromagnetic proportional valve 100 of lobe formula.
Electromagnetic proportional valve 100 is formed with inlet stream 102 and outlet stream 103 on main body 101, at its connected part valve chamber 104 is set.Valve seat 105 is set on valve chamber 104, is communicated with inlet stream 102 and outlet stream 103 by valve seat 105.In addition, embed the holding member 106 that is made of magnetic material on main body 101, clamping has leaf spring 107 between main body 101 and holding member 106.Central part at leaf spring 107 is installed jam pot cover 109, and loading by the installation of leaf spring 107 is pressed in jam pot cover 109 on the valve seat 105.Leaf spring 107 and moving iron core (plunger) the 110 welding joint structure that becomes one.The outer edge of leaf spring 107 sandwiches between upper clapboard 117 and the lower clapboard 118, and moving relatively iron core 110 and valve seat 105 etc. carry out the position adjustment to leaf spring 107.
On the other hand, secured core 112 is supported on the holding member 106 by the setting-in parts 111 of the ring-type that is made of nonmagnetic body, is disposed on the axle identical with moving iron core 110.Secured core 112 fills in the bobbin 114 that is wound with coil 113, and when coil 113 supplying electric currents, excitation takes place for secured core 112, holding member 106, and the restoring force of opposing leaf spring 107 attracts moving iron core 110.Valve gap 115 is covered on the bobbin 114, and lower ending opening portion contacts with holding member 106, is fixed on the secured core 112 by set screw 116.
Like this in the electromagnetic proportional valve 100 of Gou Chenging, coil 113 is fixed iron core 112, holding member 106 and valve gap 115 around forming magnetic loop on every side, make a concerted effort (the sealing load) of the deadweight of the moving relatively iron core 110 of the attraction force that produces on secured core 112 and the pushing force of leaf spring 107 when reaching balance, moves.That is, electromagnetic proportional valve 100 is controlled the flow of control fluid pro rata with the attraction force that electric current produces that applies that offers coil 113.Act on the attraction force of the secured core 112 of moving iron core 110, by distance decision between moving iron core 110 and the secured core 112, thereby in electromagnetic proportional valve 100, by changing the distance between moving iron core 110 and the secured core 112, also promptly change the thickness of upper clapboard 117, adjust Flow characteristics.
Fig. 9 is the figure of expression Flow characteristics.Figure 10 is the figure that represents the attraction force characteristic of electromagnetic proportional valve 100 in the past.
Electromagnetic proportional valve 100, the Young's modulus that has regulation with leaf spring 107 is a prerequisite, be set at 0.15mm if will move the actuating length St of iron core 110, then obtain Flow characteristics A as shown in Figure 9, if St is set at 0.10mm with actuating length, then obtain Flow characteristics B shown in Figure 9,, then obtain Flow characteristics C shown in Figure 9 if actuating length St is set at 0.20mm.Under this condition, the adjustment of the Flow characteristics of electromagnetic proportional valve 100 is described.
Electromagnetic proportional valve 100 cooperates the reference level of leaf springs 107 and the sealing load guaranteeing to stipulate, adjusts the thickness of upper clapboard 117 and assembles, so that the distance between moving iron core 110 and the secured core 112 reaches specified value S.At this moment, leaf spring 107 has regulation shown in the spring performance line chart K of Figure 10 spring modulus, to coil 113 provide 400AT apply magnetic force the time, secured core 112 is described illustrated attraction force curve.Electromagnetic proportional valve 100, offer secured core 112 apply attraction force that electric current produces greater than the installation load of leaf spring 107 time (L1 point), moving iron core 110 moves, fluid begins outflow.This L1 is opened the valve initial position as what valve began to move.Thereafter, in F1 point balance, moving iron core 110 moves to L2 to electromagnetic proportional valve 100 in attraction force and the power on the moving iron core 110 of acting on.Therefore, the actuating length St of moving iron core 110 be from L1 to L2 apart from 0.15mm, electromagnetic proportional valve 100 is adjusted into Flow characteristics A.To be adjusted to the electromagnetic proportional valve 100 of Flow characteristics A as basic status.
In addition, when electromagnetic proportional valve 100 is adjusted to Flow characteristics B, thicken upper clapboard 117, make distance between iron core 110 and the secured core 112 greater than specified value S from basic status.At this moment, the attraction force curve when secured core 112 provides 400AT to apply magnetic force does not change as shown in figure 10, but leaf spring 107 change in location is set, thereby spring performance line chart K right-hand parallel moving in figure is set at spring performance line chart K1.Therefore, open valve initial position L1 and change to out valve initial position L3, the actuating length St of moving iron core 110 becomes 0.10mm, and electromagnetic proportional valve 100 is adjusted into Flow characteristics B.
In addition, when electromagnetic proportional valve 100 is adjusted to Flow characteristics C,, make distance between iron core 110 and the secured core 112 less than specified value S from basic status attenuate upper clapboard 117.At this moment, the attraction force curve when coil 112 provides 400AT does not change, but leaf spring 107 change in location is set, thereby spring performance line chart K left in figure moves, and is set at spring performance line chart K2.Therefore, open valve initial position L1 and change into out valve initial position L4, the actuating length St of moving iron core 110 becomes 0.20mm, and electromagnetic proportional valve 100 is adjusted into Flow characteristics C (for example with reference to patent documentation 1).
Patent documentation 1: the spy opens the 2002-357280 communique
Summary of the invention
Yet electromagnetic proportional valve 100 in the past for example moves to moving iron core 110 with the precision of counting μ m and adjusts and when carrying out flow control, must be difficult to adjust Flow characteristics with the distance between moving iron core 110 of the rank adjustment of tens of μ m and the secured core 112.
Promptly, electromagnetic proportional valve 100 relative main body 101 overlapping lower clapboards 118, leaf spring 107, upper clapboard 117, and then with in the holding member 106 embedding main bodys 101, obtain the precision of distance between moving iron core 110 and the secured core 112 thus utterly, the distance between moving iron core 110 and the secured core 112 is subjected to the influence of component tolerance, assembling tolerance and deviation occurs at each product easily.As a countermeasure eliminating deviation, consider to improve the dimensional accuracy of parts, but because need be with the distance between moving iron core 110 of the rank adjustment of tens of μ m and the secured core 112, thereby have boundary.Therefore, for electromagnetic proportional valve 110, measure the thickness of the component tolerance of each parts with decision upper clapboard 117, adjust the distance between moving iron core 110 and the secured core 112, the assembling of parts becomes many man-hour.And, behind completed knocked down products, know the Flow characteristics that can not obtain wishing, then must Knock-Down Component and adjust the thickness of upper clapboard 117 once more, the adjustment of Flow characteristics expends man-hour.
Relative therewith, claimant etc. are willing in 2002-355121 number that the spy propose technology as described below: the outer edge at leaf spring is provided with curved part, and the amount that is screwed into main body with holding member makes the curved part resiliently deformable accordingly, adjust the position that is provided with of leaf spring.According to this technology, owing to do not need to obtain utterly range accuracy between moving iron core and the secured core, thereby can reduce assembling man-hour.Yet, in the electromagnetic proportional valve that special hope is 2002-355121 number, can not adjust the problem of Flow characteristics after existence welding main body and holding member and the assembling.
The present invention proposes in order to address the above problem, the Flow characteristics adjusting method that its purpose is to provide a kind of Flow characteristics regulating mechanism of electromagnetic proportional valve and uses this mechanism is even also can easily adjust the Flow characteristics of electromagnetic proportional valve after the product assembling.
The Flow characteristics adjusting method of the Flow characteristics regulating mechanism of electromagnetic proportional valve of the present invention and this mechanism of use has following formation.
It is characterized in that (1) the Flow characteristics regulating mechanism is used for electromagnetic proportional valve as described below, described electromagnetic proportional valve has: the bobbin of cylinder hollow shape is wound with coil; Secured core is fixedly installed in the hollow hole of bobbin; Main body is formed with first stream and second stream; Valve seat is communicated with first stream and second stream; Valve body, relatively valve seat butt or leave; Movable core, integrated with valve body and be configured in secured core on the identical axle; Force application part, always to the valve seat direction to the movable core application of force; Intermediate connector is in the middle of bobbin and main body; And coating member, releasably be covered on the bobbin in the mode that contacts with intermediate connector, secured core, intermediate connector and coating member be enclosed in coil around form magnetic loop, with supply with to coil apply electric current accordingly, secured core is resisted force application part and is attracted movable core, carry out the flow adjustment thus, and have the coating member of making and axially move, change the shifter of magnetic loop.
In (1) described invention, it is characterized in that (2) shifter makes coating member pass through feed screw mechanism and axially moves.
In (1) or (2) described invention, it is characterized in that (3) shifter has and is configured in the elastic member between coating member and the secured core and passes coating member and set screw that secured core screws togather.
(4) in (1) or (2) described invention, it is characterized in that, shifter, secured core is divided into from main body side is fixed in first secured core the hollow hole of bobbin and rotatably fills in second secured core the hollow hole of bobbin from the opposition side of main body, and second secured core is screwed together on first secured core, and described shifter has and coating member is contacted and fixing fixed component with the second secured core face.
In (1) described invention, it is characterized in that (5) moving member is made of internal thread part that is arranged on the coating member side and the external thread part that is arranged on the bobbin side.
(6) be characterised in that, use the Flow characteristics regulating mechanism of any described electromagnetic proportional valve in (1) to (5), do not supplying with under the state that applies electric current to the first stream supply flow body to coil, supply with the electric current that applies of regulation to coil, utilize flow rate-measuring device to measure from the flow of the fluid of second stream output, by shifter coating member is axially moved and magnetic circuit is changed, be measured to specified value, carry out the flow adjustment until flow rate-measuring device.
The invention effect
Have the Flow characteristics regulating mechanism of electromagnetic proportional valve of above-mentioned formation and the Flow characteristics adjusting method of using this mechanism, have following action effect.
Electromagnetic proportional valve, not under the state of coil electricity, movable core, presses against valve body on the valve seat with the sealing load of stipulating to the valve seat side application of force by the force application part quilt.If supply with the electric current of stipulating that applies to coil, then around coil, form magnetic circuit, the regulation iron core is carried out excitation.Movable core is prescribed iron core and attracts, and moves to the attraction force of secured core and the position that applies equilibrium of forces of force application part, and valve body is left from valve seat.Thus, when fluid passes through valve seat from first stream, behind valve opening adjustment flow, export from second stream.
Described electromagnetic proportional valve, coil are fixed iron core, intermediate connector and coating member around forming magnetic loop on every side, when coil electricity, form magnetic circuit around coil.The Flow characteristics adjusting method of the Flow characteristics regulating mechanism of electromagnetic proportional valve and this mechanism of use when magnetic circuit changes, is conceived to the variation of the attraction force of secured core, changes to be formed at coil magnetic circuit on every side, adjusts the flow that applies electric current relatively.
In the electromagnetic proportional valve, coating member releasably is installed on the bobbin, even also can axially move by operating moving device after the product assembling.When coating member was axially mobile, the area of contact between coating member and the intermediate connector changed, and magnetic loop changes, and magnetic circuit broadens or narrows down.If magnetic circuit broadens, then owing to the magnetoimpedance on the magnetic loop reduces, thereby the increase of the attraction force of secured core, on the other hand, if magnetic circuit narrows down, then the magnetoimpedance on the magnetic loop increases, thereby the attraction force of secured core diminishes.Movable core is owing to the iron core that is fixed attracts to move, thereby changes amount of movement according to the variation of the attraction force of secured core, and valve body also changes from the valve opening that valve seat leaves.Therefore, in the electromagnetic proportional valve, coating member axially being moved and the attraction force of adjustment secured core, finally can adjust the ratio characteristic that applies electric current and flow, also is Flow characteristics.
Particularly, when adjusting the Flow characteristics of electromagnetic proportional valve, do not measure the component tolerance of each parts and assemble electromagnetic proportional valve, not under the state of coil electricity to the first stream supply flow body, fluid flow to valve seat and blocking-up from first stream.
Then, supply with the electric current of stipulating that applies, around coil, produce magnetic field, secured core is carried out excitation to coil.Movable core moves according to the attraction force of secured core, and valve body is left from valve seat.When fluid passes through valve seat from first stream, carry out the flow adjustment from the valve opening that valve seat leaves, export from second stream by valve body.Measure from the flow of the fluid of second stream output by flow rate-measuring device.
Then, while the measurement result operating moving device of observing flow rate-measuring device, coating member is axially moved and change area of contact between coating member and the intermediate connector, change the attraction force of secured core thus, make the measurement result of flow rate-measuring device consistent with specified value.At this, specified value be meant with lead to coil apply the relative target flow of electric current.Thus, electromagnetic proportional valve can be adjusted to the Flow characteristics of hope.
Therefore, according to the Flow characteristics adjusting method of the Flow characteristics regulating mechanism and the electromagnetic proportional valve of electromagnetic proportional valve of the present invention, even after the product assembling, also can easily adjust the Flow characteristics of electromagnetic proportional valve.
At this moment, if, then can finely tune the position of coating member according to the screw thread amount of feed by the axially mobile coating member of feed screw mechanism.
Between coating member and secured core, elastic member is set, with connect coating member set screw opposing elastic member elastic force pressure be screwed in the secured core, coating member is carried out the position adjustment, thereby the area of contact of coating member and intermediate connector changes, gap between coating member and the secured core also changes in addition, and magnetic circuit changes.Thus, according to the present invention, the area of contact of coating member and intermediate connector and coating member and middle relative variation the in gap of secured core, magnetic circuit changes, thereby the change of the variance ratio of the attraction force of secured core is big, can more critically carry out the adjustment of Flow characteristics.
In addition, secured core is divided into first secured core and second secured core, when being screwed together in second secured core on first secured core, between first secured core and second secured core gap is set.By catching second secured core to make its rotation, adjust the amount of being screwed into of relative first secured core, this gap changes.Coating member is covered on the bobbin in the mode that contacts with the second secured core face, contacts with intermediate connector.Therefore, coating member carries out position regulation according to the position of second secured core, and the area of contact of coating member and intermediate connector changes.
Therefore, according to the present invention, because the coating member and the area of contact of intermediate connector and the gap between first secured core and second secured core change relatively, magnetic circuit changes, thereby the change of the variance ratio of the attraction force of secured core is big, can more critically carry out the adjustment of Flow characteristics.
In addition, after being covered in coating member on the bobbin, make its rotation by catching coating member, the internal thread part of coating member side is screwed into the external thread part of bobbin side, then coating member axially moves.
Thus, according to the present invention, tool using and coating member is axially moved not, convenience is good.
Description of drawings
Fig. 1 is the sectional view of the electromagnetic proportional valve of first mode of execution of the present invention, the adjusted state of expression Flow characteristics.
Fig. 2 is the sectional view of the electromagnetic proportional valve of first mode of execution, the state before the expression Flow characteristics is adjusted.
Fig. 3 be first mode of execution expression to electromagnetic proportional valve provide regulation apply magnetic force the time the figure of attraction force characteristic, the attraction force characteristic of expression basic status, first state and second state.
Fig. 4 is the sectional view of the electromagnetic proportional valve of second mode of execution of the present invention.
Fig. 5 is the sectional view of the electromagnetic proportional valve of the 3rd mode of execution of the present invention.
Fig. 6 is the sectional view of the electromagnetic proportional valve of the 4th mode of execution of the present invention.
Fig. 7 is the variation of electromagnetic proportional valve of the present invention.
Fig. 8 is the sectional view of electromagnetic proportional valve in the past.
Fig. 9 is the figure of expression Flow characteristics.
Figure 10 represents the figure of the attraction force characteristic of electromagnetic proportional valve in the past.
Label declaration
The 1A electromagnetic proportional valve
The 1B electromagnetic proportional valve
The 1C electromagnetic proportional valve
The 1D electromagnetic proportional valve
The 1E electromagnetic proportional valve
2 main bodys
3 inlet streams
4 outlet streams
6 valve seats
8 leaf springs
9 first cores
10 moving iron cores
12 jam pot covers
14 second cores
15 the 3rd cores
16 bobbins
17 coils
18 packing rings
19 valve gaps
22 set screws
40 the 3rd cores
41 first secured cores
45 second secured cores
51 valve gaps
52 fixed components
61 the 3rd cores
62 first cores
63 valve gaps
71 helical springs
M1～M6 area of contact
G1～G3 gap
Embodiment
Then, to the Flow characteristics regulating mechanism of electromagnetic proportional valve of the present invention and use the mode of execution of the Flow characteristics adjusting method of this mechanism to describe with reference to accompanying drawing.
(first mode of execution)
At first, first mode of execution is described.Fig. 1 is the sectional view of electromagnetic proportional valve 1A, the adjusted state of expression Flow characteristics, and Fig. 2 is the sectional view of electromagnetic proportional valve 1A, the state before the expression Flow characteristics is adjusted.
Electromagnetic proportional valve 1A for example is used to control the process gas of semiconductor manufacturing process, attract pro rata to move iron core 10 (being equivalent to " movable core ") and move it with the electromagnetic attraction of coil 17, and jam pot cover (being equivalent to " valve body ") 12, separated from valve seat 6, control the flow control of fluid thus.
Electromagnetic proportional valve 1A connects main body 2 and bobbin 16 by first core (being equivalent to " intermediate connector ") 9, valve gap (being equivalent to " coating member ") 19 is covered on the bobbin 14, and contacts with first core 9, and outward appearance constitutes the substantial cylindrical shape thus.
Main body 2 is the bulk that is formed with inlet stream (being equivalent to " first stream ") 3 and outlet stream (being equivalent to " second stream ") 4.Valve chamber 5 is arranged on the axle identical with first stream 3, and first stream 3 and second stream 4 are communicated with, and around the opening portion of inlet stream 3 openings valve seat 6 is set annularly.Main body 2 is provided with stepped part 7 around valve seat 6, set the reference level of leaf spring 8.Leaf spring 8 external diameters are set the diameter roughly the same with the opening portion of main body 2 for, first core 9 are embedded in the main bodys 2 after being positioned on the stepped part 7 of main body 2, thus clamping outer edge between the main body 2 and first core 9.At the moving iron core 10 of the central part welding joint of leaf spring 8.Moving iron core 10 coincides with on the leaf spring 8 under the state that jam pot cover 12 is installed on the valve body accommodation section 11, by moving relatively iron core 10 spot welding engagement plate springs 8, makes leaf spring 8, moving iron core 10 and jam pot cover 12 structure that becomes one.Jam pot cover 12 is formed by the elastomer that rubber, PTFE (teflon), PTEE (poly-tetrafluoroethylene resin) etc. have thermoplasticity, and the sealing surface with valve seat 6 butts is carried out mirror finishing to improve sealability.
The 3rd core (being equivalent to " secured core ") 15 forms cylindrical shape with strong magnetic material, is pressed into first core 9 and welding or soldering by second core 14, keeps thus.Bobbin 16 forms the hollow cylinder shape with magnetic material, at main part coiling coil 17.Bobbin 16 and the 3rd core 15 are chimeric, and with first core 9 and second core, 14 butts.The 3rd core 15 pierces in the hollow hole of bobbin 16, only leaves the space of accommodating packing ring (being equivalent to " elastic member ") 18.Valve gap 19 is with the drum of magnetic material formation to side's opening.Valve gap 19 is fixed on the 3rd core 15 by connecting the set screw 22 that packing ring 18 is screwed into the screw 21 of the 3rd core 15 from through hole 20.
Yet the end portion of the 3rd core 15 is outstanding from second core 14, and is relative with the inner peripheral surface of first core 9 and be present in the valve chamber 5.Second core 14 is nonmagnetic bodies, and is relative therewith, and first core 9 and the 3rd core 15 are magnets, thereby between first core 9 and the 3rd core 15, forms leakage field space 25 annularly.In addition, on first core 9, the part of inserting main body 2 is as forming step-like with the sidewall of valve chamber 5 (cross section).And the position of the hollow portion of the end portion of the 3rd core 15 and moving iron core 10 relation, the end portion that is in the 3rd core 15 does not contact with the hollow portion of moving iron core 10 and the relation inserted.In addition, close the position of the lip portions 26 of the moving iron core 10 of step-like part of first core (sidewall of valve chamber 5) and ring-type, no matter moving iron core 10 move to either direction to, vertical lower to vertical direction, and the lip portions 26 of moving iron core 10 can not contact with the step-like portion (sidewall of valve chamber 5) of first core 9.
In the present embodiment, through hole 20, the screw 21 of the 3rd core 15, the packing ring 18 by set screw 22, valve gap 19 constitutes " shifter ".In addition, the screw 21 by set screw 22, the 3rd core 15 constitutes " feed screw mechanism ".
Electromagnetic proportional valve 1A with this formation is not supplying with when applying electric current to coil 17, jam pot cover 12 by moving iron core 10 deadweight and make a concerted effort (sealing is loaded) of the spring force of leaf spring 8 be pushed on valve seat 6, close valve seat 6.Even therefore supply with the control fluid, also by valve seat 6 blocking-up control fluids to inlet stream 3.
Thereafter, to coil 17 apply regulation apply electric current the time, around coil 17, produce magnetic field, first core 9, the 3rd core 15 excitations, opposing leaf spring 8 and attract moving iron core 10.Moving iron core 10 is mobile to fricton-tightly to vertical direction, when filling up the leakage field space 25 that is between the 3rd core 15, first core 9, stop in the attraction force of the 3rd core 15 and the fully open position of sealing balancing the load, jam pot cover 12 is opened valve seat 6 from valve seat 6 separation.That is, the proportional aperture of magnetic force that electric current produces that applies of coil 17 is only opened and put on to electromagnetic proportional valve.When valve seat 6 is opened, the control fluid from first stream when the valve seat 6, be controlled to jam pot cover 12 and valve seat 6 apart from after the corresponding flow, from 4 outputs of outlet stream.
Then, the Flow characteristics regulating mechanism of electromagnetic proportional valve 1A and the effect of the Flow characteristics adjusting method of using this mechanism are described.
The Flow characteristics adjusting method of the Flow characteristics regulating mechanism of electromagnetic proportional valve 1A and this mechanism of use, when magnetic circuit changes, be conceived to the variation of the attraction force of the 3rd core 15, make to be formed at coil 17 magnetic circuit variation on every side, adjust the flow relative with applying electric current.
The valve gap 19 of electromagnetic proportional valve 1A releasably is installed on the bobbin 16, even also can axially move (seeing figures.1.and.2) by making set screw 22 rotations after the product assembling.At this moment, valve gap 19 changes with the area of contact (with reference to the M1 of Fig. 1, the M2 of Fig. 2) that first core 9 contacts at circumferencial direction, and magnetic loop changes, and magnetic circuit broadens or narrows down.If magnetic circuit broadens, then owing to the magnetoimpedance on the magnetic loop diminishes, thereby the attraction force of the 3rd core 15 becomes big.On the other hand, if magnetic circuit narrows down, then because the magnetic resistance resistance on the magnetic loop is big, the attraction force of the 3rd core 15 diminishes.
In addition, between valve gap 19 and the 3rd core 15, by packing ring 18 gap (with reference to the G1 of Fig. 1, the G2 of Fig. 2) is set, when valve gap 19 was axially mobile, the gap changed.Because magnetic flows in the space, thereby the gap also constitutes the part of magnetic loop, because space change, magnetoimpedance changes.If it is big that the gap becomes, then because the magnetic resistance resistance on the magnetic loop is big, the attraction force of the 3rd core 15 diminishes.On the other hand, if gap smaller, then because the magnetoimpedance on the magnetic loop diminishes, it is big that the attraction force of the 3rd core becomes.
Moving iron core 10 moves pro rata with the attraction force of the 3rd core 15, thereby changes actuating length St, the change valve opening according to the variation of the attraction force of the 3rd core 15.Thus, electromagnetic proportional valve 1A changes the attraction force that magnetic loop (magnetoimpedance) is adjusted the 3rd core 15 by valve gap 19 is axially moved, and finally can adjust as the Flow characteristics that applies the ratio characteristic of electric current and flow.
At this moment, because the magnetoimpedance that the change of the area of contact of first core 9 and the 3rd core 15 and the change in the gap between the 3rd core 15 and the valve gap 19 cause changes compound action, it is big that the variance ratio of attraction force relative fixed screw 22 rotating amounts becomes, and can carry out small adjustment to Flow characteristics.
Particularly, electromagnetic proportional valve 1A adjustment Flow characteristics as described below.Fig. 3 be expression to electromagnetic proportional valve 1A apply regulation apply magnetic force the time the figure of attraction force characteristic, the attraction force characteristic of expression basic status, first state, second state.
The electromagnetic proportional valve 1A of present embodiment, the spring modulus that has regulation with leaf spring 8 is a prerequisite, with prior art similarly, when the actuating length St that moves iron core 10 is set at 0.15mm, obtain the Flow characteristics A (it is as " basic status ") of Fig. 9, when the actuating length St that moves iron core 10 is set at 0.10mm, obtain the Flow characteristics B (it is as " first state ") of Fig. 9, when the actuating length St that moves iron core 10 is set at 0.20mm, obtain the Flow characteristics C (it is as " second state ") of Fig. 9, with this understanding, the adjustment to the Flow characteristics of electromagnetic proportional valve 1A is specifically described.
Electromagnetic proportional valve 1A as shown in Figure 2, align with the reference level of leaf spring 8 and assemble, with the sealing guaranteeing to stipulate load, between the main body 2 and first core 9, between first core 9 and second core 14, weld respectively in case the fluid stopping body leaks between second core 14 and the 3rd core 15.
At this moment, electromagnetic proportional valve 1A is different with electromagnetic proportional valve 100 in the past, does not measure the component tolerance of each parts and thickness of adjusting upper clapboard etc. is assembled.Therefore, when product was assembled, for electromagnetic proportional valve 1A, the distance between moving iron core 10 and the 3rd core 15 produced deviation, and differing is adjusted to Flow characteristics A surely.But among the electromagnetic proportional valve 1A, leaf spring 8 is consistent with reference level, shown in the spring performance line chart K of Fig. 3, and the spring modulus with regulation.
Thus, on the outlet stream 4 of electromagnetic proportional valve 1A, connect not shown flowmeter (suitable), under the state of coil 17 energisings, do not supplying with fluids (for example air etc.) to the inlet stream 3 of electromagnetic proportional valve 1A with " flow rate-measuring device ".At this moment, because valve seat 6 closes, thereby fluid flow to valve seat 6 and is blocked from inlet stream 3.
Then, supply with the electric current that applies of regulation to coil 17, stipulate apply magnetic force (being 400AT) at this time, moving iron core 10 moves according to the attraction force of first core 9 and the 3rd core 15, makes jam pot cover 12 leave and open valve seat 6 from valve seat 6.Fluid is from inlet stream 3 during by valve seat 6, carries out the flow adjustment and from 4 outputs of outlet stream.
Then, utilize not shown flowmeter to measure, confirm that this measurement result is a specified value from the flow of the fluid of outlet stream 4 outputs.At this, so-called specified value be point to coil 17 supply with regulation apply electric current the time target flow.In the present embodiment, be the peak rate of flow of Flow characteristics A.When the flow of measuring is the peak rate of flow of Flow characteristics A, mean that the actuating length St of the moving iron core 10 of electromagnetic proportional valve 1A guarantees 0.15mm, guarantee the Flow characteristics of wishing.Therefore, electromagnetic proportional valve 1A does not make valve gap 19 axially move and directly stops to supply with to the energising and the fluid of coil 17, and not shown flowmeter is taken off from outlet stream 4, finishes the adjustment of Flow characteristics.
On the other hand, at the flow of measuring and specified value not simultaneously, mean that the actuating length St that moves iron core 10 does not guarantee 0.15mm, electromagnetic proportional valve 1A is not adjusted to Flow characteristics A.At this moment, valve gap 19 is axially moved, so that not shown flowmeter shows the peak rate of flow of Flow characteristics A.If valve gap 19 is moved relative to first core 9, then 1 increase and decrease of the clearance G between the area of contact M1 of the valve gap 19 and first core 9, valve gap 19 and the 3rd core 15, magnetic circuit changes, and attraction force changes.When therefore flowmeter showed the peak rate of flow of Flow characteristics A, attraction force was described attraction force curve X1 shown in Figure 3.At this moment, electromagnetic proportional valve 1A, when loading greater than the installation of leaf spring 8 (L1 point) by the attraction force that applies the electric current generation that puts on coil 17, moving iron core 10 actions, fluid begins to flow.This L1 is set at out valve initial position L1.Thereafter, among the electromagnetic proportional valve 1A, sealing load and attraction force are in F1 point balance, and moving iron core 10 arrives L2.Therefore, the actuating length St of moving iron core 10 be from L1 to L2 apart from 0.15mm, electromagnetic proportional valve 1A is adjusted to Flow characteristics A.
Electromagnetic proportional valve 1A is assembled into when changing to first state after the basic status, direction of flow electromagnetic proportional valve 1A, make set screw 22 to the direction rotation opposite with prescribed direction, elastic force pressure by this screw thread feeding and packing ring 18 moves axially valve gap 19 towards the opposition side of main body 2, so that the measurement result of flowmeter is specified value (being the peak rate of flow of Flow characteristics B at this).So, the area of contact M1 between the valve gap 19 and first core 9 begins to reduce from basic status, and the clearance G 1 between valve gap 19 and the 3rd core 15 begins to increase from basic status, and the attraction force of the 3rd core 15 begins to reduce from basic status.When the measurement result of flowmeter became the peak rate of flow of Flow characteristics B, as shown in Figure 3, the attraction force curve X1 of basic status was decreased to attraction force curve X2 among the electromagnetic proportional valve 1A.Electromagnetic proportional valve 1A because welding main body 2 grades and can not adjust the position that is provided with of leaf spring 8, thereby can not make spring performance line chart K skew and changes and open valve initial position L1.Yet the fully open position of moving iron core 10 has reduced the whole little amount to attraction force curve X2 of attraction force curve X1, and the actuating length St of moving iron core 10 is little of 0.10mm.Therefore, electromagnetic proportional valve 1A needn't Knock-Down Component after product assembling and can only by rotation set screw 22 Flow characteristics A shown in Figure 9 be changed to Flow characteristics B.
Electromagnetic proportional valve 1A is assembled into when changing to the third state after the basic status, direction of flow electromagnetic proportional valve 1A, set screw 22 is rotated to prescribed direction, by this screw thread feeding opposing packing ring 18 towards main body 2 side shafts to mobile valve gap 19, so that the measurement result of flowmeter is specified value (being the peak rate of flow of Flow characteristics C at this).So, the area of contact M1 between the valve gap 19 and first core 9 begins to increase from basic status, and the clearance G 1 between valve gap 19 and the 3rd core 15 begins to reduce from basic status, and it is big that the attraction force of the 3rd core 15 becomes.When the measurement result of flowmeter is the peak rate of flow of Flow characteristics C, among the electromagnetic proportional valve 1A as shown in Figure 3, the attraction force curve X1 of basic status becomes greatly to attraction force curve X3, and electromagnetic proportional valve 1A can not make the skew of spring performance line chart and change and open valve initial position L1.Yet it is whole greatly to the amount of attraction force curve X3 that the fully open position of moving iron core 10 has improved attraction force curve X1, and the actuating length St of moving iron core 10 becomes greatly to 0.20mm.Therefore, electromagnetic proportional valve 1A needn't Knock-Down Component after product assembling and can only by rotation set screw 22 Flow characteristics A shown in Figure 9 be changed to Flow characteristics C.
Electromagnetic proportional valve 1A comes mobile valve gap 19 by the screw thread feeding of set screw 22, but packing ring 18 is always to the direction jack-up valve gap 19 opposite with the 3rd core 15.Therefore, can keep valve gap 19 not loosely, electromagnetic proportional valve 1A can stably carry out the flow adjustment.
Therefore, the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1A of present embodiment is used for electromagnetic proportional valve as described below, and described electromagnetic proportional valve has: the bobbin 16 of cylinder hollow shape is wound with coil 17; The 3rd core 15 is fixed in the hollow hole of bobbin 16; Main body 2 is formed with inlet stream 3 and outlet stream 4; Valve seat 6 is communicated with inlet stream 3 and outlet stream 4; Jam pot cover 12, relatively valve seat 6 butts or leave; Moving iron core 10, integrated with jam pot cover 12 and be configured on the axle identical with the 3rd core 15; Leaf spring 8, always to valve seat 6 directions to moving iron core 10 application of forces; First core 9 is between bobbin 16 and main body 2; With valve gap 19, releasably be covered in bobbin 16 in the mode that contacts with first core 9, the 3rd core 15, first core 9 and valve gap 19 be centered around coil 17 around form magnetic loop, according to the electric current of supplying with to coil 17 that applies, the 3rd core 15 is resisted leaf springs 8 and is attracted moving iron core 10, thereby carry out the flow adjustment, because having the valve gap of making 19 axially moves, change " shifter " of magnetic loop, even thereby after the product assembling, also can easily adjust the Flow characteristics of electromagnetic proportional valve 1A.
Especially, owing to not needing the measurement component tolerance to assemble electromagnetic proportional valve 1A, thereby can cut down assembling man-hour significantly.In addition, even learn can not get the Flow characteristics expected after component-assembled, Knock-Down Component can only not carry out the flow adjustment by the outer sideway swivel set screw 22 from valve gap 19 yet, can be simply and carry out the flow adjustment with the short time.
In addition, according to the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1A of present embodiment,, thereby can finely tune the position of valve gap 19 by the amount of feed of screw thread feeding because " shifter " passes through " feed screw mechanism " axially mobile valve gap 19.
In addition, Flow characteristics regulating mechanism according to the electromagnetic proportional valve 1A of present embodiment, " shifter " has: be arranged on packing ring 18 between valve gap 19 and the 3rd core 15, run through the set screw 22 that valve gap 19 and the 3rd core 15 screw togather, and the clearance G 1 relative variation between the area of contact M1 of the valve gap 19 and first core 9 and valve gap 19 and the 3rd core 15 and change magnetic circuit, thereby the change of the variance ratio of the attraction force of the 3rd core 15 is big, can more critically carry out the adjustment of Flow characteristics.
And then, Flow characteristics adjusting method according to the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1A that uses present embodiment, do not supplying with under the state that applies electric current to inlet stream 3 supply fluids to coil 17, and supply with the electric current that applies of regulation to coil 17, measure from the flow of the fluid of outlet stream 4 outputs by not shown flowmeter, utilize " shifter " axially mobile valve gap 19 and change magnetic circuit, carry out the flow adjustment, record specified value until not shown flowmeter, even thereby after product assembling, also can easily adjust the Flow characteristics of electromagnetic proportional valve 1A.
(second mode of execution)
Then, to the Flow characteristics regulating mechanism of electromagnetic proportional valve of the present invention and use second mode of execution of the Flow characteristics adjusting method of this mechanism to describe.Fig. 4 is the sectional view of electromagnetic proportional valve 1B.
The electromagnetic proportional valve 1B of present embodiment changes the magnetic circuit this point in the amount that is screwed into first secured core 41 by second secured core 45, and to change first mode of execution of magnetic circuit different with adjusting that set screw 22 is screwed into the amount of the 3rd core 15.Therefore,, the point different with first mode of execution is elaborated,, component parts is marked with the label identical with first mode of execution, suitably omit explanation identical point at this.
Among the electromagnetic proportional valve 1B, in bobbin 16, first secured core 41 and second secured core 45 screw togather, and constitute the 3rd core 40.
First secured core 41 forms strong magnetic material cylindric and constitutes, and is fixed in the hollow hole of bobbin 16 from the filling of main body 2 sides.The end portion of first secured core 41 is outstanding from second core 14, and is relative with the inner peripheral surface of first core 9, between first secured core 41 and first core 9 leakage field space 25 is set.Outstanding coaxially in the upper-end surface of first secured core 41 projection 42 cylindraceous is set, this projection 42 is present in the hollow hole of bobbin 16.Projection 42 forms outside thread at outer circumferential face.First secured core 41 is formed with the screw 43 that is used for being connected and fixed coaxially from the end face of projection 42 screw 22.
Second secured core 45 forms strong magnetic material cylindric and constitutes, and rotatably inserts the hollow hole of bobbin 16 from the opposition side of main body 2.Second secured core 45 wears recess 46 on the end face of main body 2 sides, at the inner peripheral surface formation internal thread of recess 46.Second secured core, 45 its total lengths are set at, and when the internal thread of recess 46 was screwed into the outside thread of first secured core 41 fully, the upper-end surface was positioned at the height roughly the same with the end face of bobbin 16.Second secured core 45 is formed with the inserting hole 47 of inserting logical set screw 22 along the axle center.
In the present embodiment, " shifter " is made of projection (protuberance) 42, screw 43, the recess 46 of second secured core 45, inserting hole 47, the through hole 20 of valve gap 19, the set screw 22 of first secured core 41.In addition, " feed screw mechanism " is made of the screw 43 of the set screw 22 and first secured core 41.
Described electromagnetic proportional valve 1B is covered in valve gap 19 on the bobbin 16, make set screw 22 connect the through hole 20 of valve gap 19 and the inserting hole 47 of second secured core 45, the front end of set screw 22 is screwed in the screw 43 of first secured core 41, valve gap 19 releasably is installed thus.Valve gap 19 is owing to locating with second secured core, 45 butts, thus according to second secured core 45 from the outstanding amount of valve gap 19, the area of contact M3 variation that contact at circumferencial direction with first core 9.
In addition, second secured core 45 is owing to be screwed into first secured core 41, thereby according to this amount of being screwed into, the clearance G 3 that forms between first secured core 41 and second secured core 45 also changes.
Like this, the clearance G 3 that forms between the area of contact M3 between first core 9 and the valve gap 19 and first secured core 41 and second secured core 45 changes, and the formation of the magnetic loop that forms around the coil 17 changes thus, and magnetoimpedance changes.
When adjusting the Flow characteristics of electromagnetic proportional valve 1B, connection traffic meter on outlet stream 4, not under the state of coil electricity after inlet stream 3 is supplied with fluids, supply with the electric current that applies of regulation to coil 17, confirm whether the measurement result of flowmeter is specified value.
When not being the Flow characteristics of expectation, stop towards the energising of coil 17 and the supply of fluid.Take off set screw 22 and with valve gap 19 when bobbin 16 takes off, second secured core 45 exposes, thereby by rotation second secured core 45, the internal thread of adjusting second secured core 45 is screwed into the externally threaded amount of first secured core 41, adjusting play G3.Then, valve gap 19 is covered on the bobbin 16 and with second secured core, 45 butts, set screw 22 is run through the through hole 20 of valve gap 19 and the inserting hole 47 of second secured core 45, be screwed in the screw 43 of first secured core 41, valve gap 19 is fixed on first secured core 41.Valve gap 19 according to the amount that second secured core 45 is given prominence to from bobbin 16, is adjusted the area of contact M3 with first core 9.After the inlet stream 3 of electromagnetic proportional valve 1B is supplied with fluid, supply with the electric current that applies of regulation once more to coil 17, utilize flowmeter to measure from the flow of the fluid of outlet stream 4 outputs.When measurement result is specified value, finish the Flow characteristics adjustment, when being not specified value, carry out above-mentioned Flow characteristics adjustment repeatedly.
Therefore, Flow characteristics regulating mechanism according to the electromagnetic proportional valve 1B of present embodiment, " shifter " is divided into the 3rd core 40 from main body 2 sides and is fixed in first secured core 41 hollow hole of bobbin 16, rotatably be seated in second secured core 45 hollow hole of bobbin 16 with opposition side from main body 2, and second secured core 45 is screwed together on first secured core 41, and have and valve gap 19 is contacted and fixing set screw 22 with 45 of second secured cores, clearance G 3 relative variabilities between the area of contact M3 of the valve gap 19 and first core 9 and first secured core 41 and second secured core 45, magnetic circuit changes, thereby the change of the variance ratio of the attraction force of the 3rd core 40 is big, can more critically adjust Flow characteristics.
(the 3rd mode of execution)
Then, the Flow characteristics mechanism of electromagnetic proportional valve of the present invention and the 3rd mode of execution of the Flow characteristics adjusting method of using this mechanism are described.Fig. 5 is the sectional view of electromagnetic proportional valve 1C.
On the axially mobile this point, the electromagnetic proportional valve 1A of first mode of execution of axially mobile valve gap 51 is different with making set screw 22 rotations making valve gap 51 rotations for the electromagnetic proportional valve 1C of present embodiment.Therefore, the point different with first mode of execution is elaborated,, on accompanying drawing, is marked with the label identical and suitably omits explanation with first mode of execution for identical point.
Electromagnetic proportional valve 1C has strong magnetic material is formed columned fixed component 52, by inserting in the screw 21 that the set screw 22 that leads in the through hole 53 of fixed component 52 is tightened in the 3rd core 15, fixed component 52 is fixed on the 3rd core 15.The external diameter of fixed component 52 has the path length roughly the same with the external diameter of bobbin 16, forms outside thread at outer circumferential face.
In the present embodiment, " shifter " and " feed screw mechanism " is made of the internal thread of valve gap 51 and the outside thread of fixed component 52.
When adjusting the Flow characteristics of electromagnetic proportional valve 1C, be connected in flowmeter on the outlet stream 4 after, under the state of coil 17 energisings, do not supplying with fluids to inlet stream 3, supply with the electric current that applies of regulation thereafter to coil 17, utilize the flow measurement flow setting type.
When flow is not specified value, catch valve gap 51 to the sense of rotation application of force.So, screw 22 is fixed and is not rotated though fixed component 52 is fixed, and 52 rotations of valve gap 51 relative fixed parts are axially moved by the screw thread feeding.Therefore, the area of contact M4 of the valve gap 51 and first core 9 changes, and magnetic circuit changes, changes in flow rate.After flowmeter is measured specified value, stop the rotation of valve gap 51, finish the adjustment of Flow characteristics.
Therefore, according to the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1C of present embodiment and the Flow characteristics adjusting method of using this mechanism, " shifter " is made of internal thread that is arranged on valve gap 51 sides and the outside thread that is arranged on the fixed component 52 of bobbin 2 sides, thereby tool using and directly rotate valve gap 51 it is axially moved not, convenience is good.
(the 4th mode of execution)
Then, to the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1D of present embodiment and use the 4th mode of execution of the Flow characteristics adjusting method of this mechanism to describe.Fig. 6 is the sectional view of electromagnetic proportional valve 1D.
On the axially mobile this point, the electromagnetic proportional valve 1A of first mode of execution of axially mobile valve gap 19 is different with making set screw 22 rotations making 63 rotations for the electromagnetic proportional valve 1D of present embodiment.Therefore, the point different with first mode of execution is elaborated,, is marked with the label identical, suitably omit explanation with first mode of execution for identical point.
Among the electromagnetic proportional valve 1D, the 3rd core 61 forms strong magnetic material cylindric and constitutes, and is pressed into the 3rd core 61 by second core 14, keeps by soldering or soldering.The end portion of the 3rd core 61 is outstanding from second core 14, and is relative with the inner peripheral surface of first core 62.In addition, the upper end part of the 3rd core 61 is outstanding from bobbin 16.Valve gap 63 forms the drum of side's opening with magnetic material, is formed with through hole 64 at Closed End.Valve gap 63 forms internal thread at the opening portion inner peripheral surface, with the external thread spiro fastening on the outer circumferential face that is formed on first core 62.At this moment, valve gap 63, the inner peripheral surface of its through hole 64 and 61 sliding contacts of the 3rd core are moved by 61 guiding of the 3rd core.
In the present embodiment, " shifter " and " feed screw mechanism " is made of the internal thread of valve gap 63 and the outside thread of first core 62.
When the Flow characteristics of adjustment electromagnetic proportional valve 1D, behind connection traffic meter on the outlet stream 4, do not supplying with under the state that applies electric current to inlet stream 3 supply fluids, applying electric current and measuring flow thereafter to coil 17 supply regulations to coil 17.
When the measurement result of flowmeter is not specified value, catch valve gap 63 rotations.During valve gap 63 rotation, the externally threaded screw thread feeding of the internal thread and first core 62 by valve gap 63, valve gap 63 axially moves with a certain amount of at every turn.Therefore, the area of contact M6 of the area of contact M5 of the valve gap 63 and first core 62 and valve gap 63 and the 3rd core 61 relatively changes, and magnetoimpedance changes, changes in flow rate.When flow becomes specified value, stop the rotation of valve gap 63, finish the adjustment of Flow characteristics.
Therefore, according to the Flow characteristics regulating mechanism of the electromagnetic proportional valve 1D of present embodiment with use the Flow characteristics adjusting method of this mechanism, " shifter " is made of the outside thread that is arranged at the internal thread on the valve gap 63 and be arranged on first core 62 of bobbin 16 sides, thereby tool using and valve gap 63 is axially moved not, convenience is good.
In addition, though above embodiments of the present invention are illustrated, the present invention is not limited to above-mentioned mode of execution, and various application can be arranged.
(1) for example in the above-described first embodiment, use packing ring 18, but electromagnetic proportional valve 1E as shown in Figure 7, also can between the 3rd core 15 and valve gap 19, compress helical spring 71 is set as elastic member.
(2) for example in the above-described first embodiment, set screw 22 exposes, but also the plug of covering set screw 22 can be installed on the valve gap 19.
(3) for example outside above-mentioned mode of execution, can also change the thickness of valve gap 19, change set screw 22 length, material, change the magnetoimpedance of magnetic loop, carry out the flow adjustment.
(4) for example in the above-described embodiment, lobe formula electromagnetic proportional valve 1A, 1B, 1C, 1D, 1E are illustrated, but also can in the electromagnetic proportional valve of plunger-type etc., the Flow characteristics regulating mechanism be set.
(5) for example in the above-described embodiment, electromagnetic proportional valve is used for semiconductor-fabricating device, but does not limit purposes.
(6) for example in above-mentioned mode of execution electromagnetic proportional valve 1A～1E, 3 are the inlet stream, and 4 are the outlet stream, but also can make 3 to be the outlet stream, and 4 are the inlet stream.
Claims
(according to the modification of the 19th of treaty)
1. electromagnetic proportional valve, have: the bobbin of cylinder hollow shape is wound with coil; Secured core is fixedly installed in the hollow hole of described bobbin; Main body is formed with first stream and second stream; Valve seat is communicated with described first stream and described second stream; Valve body, described relatively valve seat butt or leave; Movable core, integrated with described valve body and be configured on identical with the described secured core axle; Leaf spring, always to described valve seat direction to the described movable core application of force; Intermediate connector is in the middle of described bobbin and described main body; Coating member, releasably be covered on the described bobbin in the mode that contacts with described intermediate connector, and shifter, described coating member is axially moved, described secured core, described intermediate connector and described coating member be enclosed in described coil around form magnetic loop, with the electric current that applies to described coil accordingly, described secured core is resisted described leaf spring and is attracted described movable core, carry out the flow adjustment thus, it is characterized in that
Described leaf spring and reference level are as one man assembled, to have the spring-load of regulation, afterwards, applying to described coil under the state of electric current, by described shifter described coating member is axially moved and change described magnetic loop, so that become target flow from the flow of described second stream output, change the attraction force characteristic of the stroke of the attraction force of described secured core and described movable core thus, adjust Flow characteristics as the ratio characteristic of electric current and flow.
2. according to the described electromagnetic proportional valve of claim 1, it is characterized in that described shifter makes described coating member axially move by feed screw mechanism.
3. according to claim 1 or 2 described electromagnetic proportional valves, it is characterized in that described shifter has and is configured in the elastic member between described coating member and the described secured core and passes described coating member and set screw that described secured core screws togather.
4. according to the described electromagnetic proportional valve of claim 1, it is characterized in that described moving member is made of internal thread part that is arranged on described coating member side and the external thread part that is arranged on described bobbin side.
5. the Flow characteristics adjusting method of an electromagnetic proportional valve is characterized in that,
Assemble electromagnetic proportional valve as described below, described electromagnetic proportional valve has: the bobbin of cylinder hollow shape is wound with coil; Secured core is fixedly installed in the hollow hole of described bobbin; Main body is formed with first stream and second stream; Valve seat is communicated with described first stream and described second stream; Valve body, described relatively valve seat butt or leave; Movable core, integrated with described valve body and be configured on identical with the described secured core axle; Leaf spring, always to described valve seat direction to the described movable core application of force; Intermediate connector is in the middle of described bobbin and described main body; Coating member releasably is covered on the described bobbin in the mode that contacts with described intermediate connector; And shifter, described coating member is axially moved, described secured core, described intermediate connector and described coating member be enclosed in described coil around form magnetic loop, with the electric current that applies to described coil accordingly, described secured core is resisted described leaf spring and is attracted described movable core, carry out the flow adjustment thus
Do not applying under the state of electric current to the described first stream supply flow body to the described coil of described electromagnetic proportional valve after the assembling,
Apply predetermined electric current to described coil, utilize flow rate-measuring device to measure from the flow of the fluid of described second stream output,
By described shifter described coating member axially being moved changes described magnetic loop, be measured to specified value until described flow rate-measuring device, make the attraction force characteristic variations of the stroke of the attraction force of described secured core and described movable core thus, adjust Flow characteristics as the electromagnetic proportional valve of the ratio characteristic of electric current and flow.
6. electromagnetic proportional valve, have: the bobbin of cylinder hollow shape is wound with coil; Secured core is fixedly installed in the hollow hole of described bobbin; Main body is formed with first stream and second stream; Valve seat is communicated with described first stream and described second stream; Valve body, described relatively valve seat butt or leave; Movable core, integrated with described valve body and be configured on identical with the described secured core axle; Force application part, always to described valve seat direction to the described movable core application of force; Intermediate connector is in the middle of described bobbin and described main body; And coating member, releasably be covered on the described bobbin in the mode that contacts with described intermediate connector, described secured core, described intermediate connector and described coating member be enclosed in described coil around form magnetic loop, with the electric current that applies to described coil accordingly, described secured core is resisted described force application part and is attracted described movable core, carry out the flow adjustment thus, it is characterized in that
Described coating member is axially moved, change the shifter of described magnetic loop, described secured core is divided into from described main body side is fixed in first secured core the hollow hole of described bobbin and rotatably fills in second secured core the hollow hole of described bobbin from the opposition side of described main body, and described second secured core is screwed together on described first secured core, and has and described coating member is contacted and fixing fixed component with the described second secured core face.
Claims (6)
1. the Flow characteristics regulating mechanism of an electromagnetic proportional valve is characterized in that, is used for electromagnetic proportional valve as described below, and described electromagnetic proportional valve has: the bobbin of cylinder hollow shape is wound with coil; Secured core is fixedly installed in the hollow hole of described bobbin; Main body is formed with first stream and second stream; Valve seat is communicated with described first stream and described second stream; Valve body, described relatively valve seat butt or leave; Movable core, integrated with described valve body and be configured on identical with the described secured core axle; Force application part, always to described valve seat direction to the described movable core application of force; Intermediate connector is in the middle of described bobbin and described main body; And coating member, releasably be covered on the described bobbin in the mode that contacts with described intermediate connector, described secured core, described intermediate connector and described coating member be enclosed in described coil around form magnetic loop, with supply with to described coil apply electric current accordingly, described secured core is resisted described force application part and is attracted described movable core, carry out the flow adjustment thus
And have described coating member is axially moved, change the shifter of described magnetic loop.
2. according to the Flow characteristics regulating mechanism of the described electromagnetic proportional valve of claim 1, it is characterized in that described shifter makes described coating member axially move by feed screw mechanism.
3. according to the Flow characteristics regulating mechanism of claim 1 or 2 described electromagnetic proportional valves, it is characterized in that described shifter has and is configured in the elastic member between described coating member and the described secured core and passes described coating member and set screw that described secured core screws togather.
4. according to the Flow characteristics regulating mechanism of claim 1 or 2 described electromagnetic proportional valves, it is characterized in that, described shifter, described secured core is divided into from described main body side is fixed in first secured core the hollow hole of described bobbin and rotatably fills in second secured core the hollow hole of described bobbin from the opposition side of described main body, and described second secured core is screwed together on described first secured core, and has and described coating member is contacted and fixing fixed component with the described second secured core face.
5. according to the Flow characteristics regulating mechanism of the described electromagnetic proportional valve of claim 1, it is characterized in that described moving member is made of internal thread part that is arranged on described coating member side and the external thread part that is arranged on described bobbin side.
6. a Flow characteristics adjusting method of using the Flow characteristics regulating mechanism of electromagnetic proportional valve is characterized in that,
Use the Flow characteristics regulating mechanism of any described electromagnetic proportional valve in the claim 1～5,
Do not supplying with under the state that applies electric current to the described first stream supply flow body to described coil,
Supply with the electric current of stipulating that applies to described coil, utilize flow rate-measuring device to measure from the flow of the fluid of described second stream output,
By described shifter described coating member is axially moved and magnetic circuit is changed, be measured to specified value, carry out the flow adjustment until described flow rate-measuring device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004128523A JP4414269B2 (en) | 2004-04-23 | 2004-04-23 | Flow rate characteristic adjustment mechanism of electromagnetic proportional valve and flow rate characteristic adjustment method using the same |
| JP128523/2004 | 2004-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1946960A true CN1946960A (en) | 2007-04-11 |
| CN100427818C CN100427818C (en) | 2008-10-22 |
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ID=35197059
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800125129A Active CN100427818C (en) | 2004-04-23 | 2005-04-18 | Flow rate characteristic adjustment mechanism of solenoid proportional valve and flow rate characteristic adjustment method using the same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4414269B2 (en) |
| CN (1) | CN100427818C (en) |
| WO (1) | WO2005103541A1 (en) |
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| CN101936420A (en) * | 2009-06-30 | 2011-01-05 | 喜开理株式会社 | Minitype electromagnetic valve |
| CN103185163A (en) * | 2011-12-30 | 2013-07-03 | 北京谊安医疗系统股份有限公司 | Flow control proportioning valve |
| CN104471505A (en) * | 2012-07-11 | 2015-03-25 | 伟创力有限责任公司 | Direct acting solenoid actuator |
| CN104879541A (en) * | 2014-02-28 | 2015-09-02 | 北京谊安医疗系统股份有限公司 | Proportioning valve |
| CN107091369A (en) * | 2017-05-10 | 2017-08-25 | 宁波兴茂电子科技有限公司 | A kind of pilot valve discharge characteristic test device and its application method |
| CN112065561A (en) * | 2020-09-04 | 2020-12-11 | 北京理工大学 | Engine cooling fan speed adjusting device |
| CN113091043A (en) * | 2021-03-02 | 2021-07-09 | 杭州华电半山发电有限公司 | Method for automatically controlling water level of steam drum of waste heat boiler in whole process |
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| CN112081981B (en) * | 2019-06-14 | 2022-02-01 | 宁波方太厨具有限公司 | Electromagnetic valve, proportional valve assembly and water heater |
| US11248715B1 (en) * | 2020-12-22 | 2022-02-15 | Mac Valves, Inc. | Proportional solenoid valve |
| KR102508363B1 (en) * | 2021-08-26 | 2023-03-09 | 전영산 | Solenoid valve |
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| JPS61186873U (en) * | 1985-05-14 | 1986-11-21 | ||
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| JP2584578Y2 (en) * | 1992-01-16 | 1998-11-05 | 株式会社ユニシアジェックス | Pressure control valve |
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| JPH07280123A (en) * | 1994-04-12 | 1995-10-27 | Riken Corp | Solenoid valve |
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- 2005-04-18 CN CNB2005800125129A patent/CN100427818C/en active Active
- 2005-04-18 WO PCT/JP2005/007399 patent/WO2005103541A1/en active Application Filing
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|---|---|---|---|---|
| CN101936420A (en) * | 2009-06-30 | 2011-01-05 | 喜开理株式会社 | Minitype electromagnetic valve |
| CN103185163A (en) * | 2011-12-30 | 2013-07-03 | 北京谊安医疗系统股份有限公司 | Flow control proportioning valve |
| CN104471505A (en) * | 2012-07-11 | 2015-03-25 | 伟创力有限责任公司 | Direct acting solenoid actuator |
| KR20150036559A (en) * | 2012-07-11 | 2015-04-07 | 플렉스트로닉스 에이피, 엘엘씨 | Direct acting solenoid actuator |
| CN104471505B (en) * | 2012-07-11 | 2018-06-29 | 伟创力有限责任公司 | Direct action type solenoid actuator |
| KR102113102B1 (en) | 2012-07-11 | 2020-05-21 | 플렉스트로닉스 에이피, 엘엘씨 | Direct acting solenoid actuator |
| CN104879541A (en) * | 2014-02-28 | 2015-09-02 | 北京谊安医疗系统股份有限公司 | Proportioning valve |
| CN104879541B (en) * | 2014-02-28 | 2018-11-13 | 北京谊安医疗系统股份有限公司 | Proportioning valve |
| CN107091369A (en) * | 2017-05-10 | 2017-08-25 | 宁波兴茂电子科技有限公司 | A kind of pilot valve discharge characteristic test device and its application method |
| CN112065561A (en) * | 2020-09-04 | 2020-12-11 | 北京理工大学 | Engine cooling fan speed adjusting device |
| CN113091043A (en) * | 2021-03-02 | 2021-07-09 | 杭州华电半山发电有限公司 | Method for automatically controlling water level of steam drum of waste heat boiler in whole process |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4414269B2 (en) | 2010-02-10 |
| WO2005103541A1 (en) | 2005-11-03 |
| CN100427818C (en) | 2008-10-22 |
| JP2005308159A (en) | 2005-11-04 |
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