CN1938904A - Anisotropic conductive film and manufacturing method thereof - Google Patents
Anisotropic conductive film and manufacturing method thereof Download PDFInfo
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- CN1938904A CN1938904A CN 200580010546 CN200580010546A CN1938904A CN 1938904 A CN1938904 A CN 1938904A CN 200580010546 CN200580010546 CN 200580010546 CN 200580010546 A CN200580010546 A CN 200580010546A CN 1938904 A CN1938904 A CN 1938904A
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Abstract
An anisotropic conductive film, which is applicable to a narrower pitch of an object to be connected, while maintaining connection reliability, is provided at a low cost compared with the conventional ones. A method for manufacturing such anisotropic conductive film is also provided. The anisotropic conductive film is provided with a porous film. The film has many hole parts which penetrate in the film thickness direction, being arranged in a honeycomb state with their inner wall surfaces bent in the external direction, and are formed of a polymer. The film is also provided with a conductive material applied in the holes of the porous film, and an adhesive layer covering the both sides of the porous film. The porous film is formed by a method wherein the polymer is melt in a volatile organic solvent which does not mix with water and a supporting board made by casting the polymer solution is permitted to exist under a high moisture condition.
Description
Technical field
The present invention relates to a kind of anisotropic conductive film and manufacture method thereof, in more detail, relate to a kind of anisotropic conductive film and manufacture method thereof that is suitable for having the electronic component of narrow conductor separation and the connection of substrate etc.
Background technology
In recent years, along with the high performance of electronic equipment, miniaturization etc., the necessity that is electrically connected between a plurality of conductors of arranging with thin space increases.The situation that produces this necessity for example has: in liquid crystal display (Liquid Crystal Display:LCD) field, situation that the electrode of the electrode of the TAB (Tape AutomatedBonding, tape is from being dynamically connected) that drives with IC and liquid crystal panel is connected will be installed in TCP (Tape Carrier Package) and on the glass substrate of liquid crystal panel, directly be connected (Chip On Glass:COG) driving situation etc. of IC.
In above-mentioned connection, be widely used in the anisotropic conductive film (Anisotropic Conductive Film:ACF) that film thickness direction shows conductivity and shows insulating properties in the face direction usually.Figure 16 shows structure and its catenation principle of representational ACF.
As Figure 16 (a) (b) shown in, the ACF100 that knows usually has the structure that is dispersed with electroconductive particle 102 in having formed membranaceous resin of binding property 101.When this ACF100 for example being placed when carrying out thermo-compressed between chip 103 and the substrate 104, resin 101 is flowed to be got rid of, and electroconductive particle 102 sandwiches between chip electrode 105 and the underlayer electrode 106 with the state of having crushed simultaneously.When resin 101 solidifies under the situation that keeps this state then, be electrically connected by 105,106 at 102 liang of electrodes of electroconductive particle.On the other hand, between the adjacent electrode 105 (106) by resin 101 electric insulations.In addition, by the curing of resin 101, chip 103 and substrate 104 mechanical connections.
At this, use the main purpose of electroconductive particle, for example can enumerate: (1) will insulation and the change of (3) absorption electrode height and the deflection of substrate etc. between circuit with electrical connection between electrode, (2).
In order to realize these purposes, for example, (military city unit is elegant at non-patent literature 1, " Iso side's property Guide Electricity Off イ Le system To I Ru Off リ Star プ チ ツ プ real Zhuan Ji Intraoperative ", Electricity material, worker industry Tone looks into meeting, May calendar year 2001 supplementary issue, p.130-p.133) in, the record of following aspect is arranged: use the resin plating particle that on the small resin particle about diameter 3～5 μ m, has carried out metal-plated such as Ni-Au as electroconductive particle with strain zone.
In addition, in same non-patent literature 1, the record of following aspect is arranged: using has the particle of insulating properties material as electroconductive particle in its surface applied.In addition, at this moment, at film thickness direction, because the insulating properties material of particle surface is destroyed because of crimp force, therefore, electroconductive particle and electrode are electrically connected.On the other hand, in the face direction,, therefore, also keep insulating properties even contact between the particle because the insulating properties material of particle surface does not destroy.
In addition, in patent documentation 1 (spy opens flat 8-273442 number), record be the ACF dissimilar with ACF shown in Figure 16, it is by the two sides at thermoplastic film water-solubility membrane to be set, the filled conductive material forms in the hole portion that film thickness direction runs through.
But, (political affairs of following village are succeeded at non-patent literature 2, " macromolecular material becomes と Machine to change from own Group Wovenization To I Ru Na ノ メ ゾ ホ one Le Agencies appearance "; Machine energy material, Co., Ltd.'s Star one エ system Star one is published in October, 2003, vol.23, No.10, p.18-p.26) and non-patent literature 3 (political affairs of following village are succeeded, and “ Zi Ji Group Wovenization To I Ru パ one Application forms と マ イ Network ロ Jia Gong Ji Intraoperative ヘ Zhan Open "; ま て り あ; civic organization Japan metallography meeting, 2003, the 42nd rolled up; No. 6; p.457-p.460), record be not ACF, but the perforated membrane that constitutes by macromolecule with alveolate texture of arranging regularly at the film thickness direction pore.
In addition, in patent documentation 2 (spy opens 2003-80538 number), putting down in writing is not ACF equally, but the perforated membrane that constitutes by the polyimides with alveolate texture of arranging regularly at the film thickness direction pore.
Because the miniaturization by electronic component etc., when the conductor spacing that is connected thing narrowed down, in order to ensure the insulating properties of face direction, in ACF shown in Figure 16, the size that is dispersed in the electroconductive particle in the resin of binding property must diminish.But, consider from the aspect of guaranteeing film thickness direction conduction, be difficult to more than the change that is connected the conductor height that thing has the electroconductive particle size decreases.
In addition, when with the electroconductive particle size decreases,, must improve the branch bulk density of electroconductive particle in order to ensure sufficient conduction.But, if improve the branch bulk density of electroconductive particle, just being difficult to guarantee the insulating properties of face direction, reliability reduces.
Therefore, utilize ACF shown in Figure 16, have the restriction naturally corresponding with the thin spaceization that is connected thing.Therefore, the problem that exists the conductor spacing (at present for about about 40 μ m) be difficult to be connected thing further to narrow down.
On the other hand, for non-patent literature 1 described ACF, think and even therefore improve the branch bulk density of electroconductive particle, also guarantee the insulating properties of face direction easily because the surface of electroconductive particle utilizes the insulating properties material to apply.But, even this ACF, according to above-mentioned same reason, also be difficult to more than the change that is connected the conductor height that thing has size decreases with electroconductive particle.Therefore, even utilize this ACF, also there be the naturally restriction corresponding with the thin spaceization that is connected thing.Certainly also exist in and apply insulating properties material itself on the small particle with regard to very difficult problem.
Relative therewith, patent documentation 1 described ACF thinks owing to be filled with conductive material in the hole portion that film thickness direction runs through, thus with resin in be dispersed with electroconductive particle ACF compare, easy correspondence is connected the thin spaceization of thing.But, in this ACF,, therefore, must use X ray or SR (synchrotron radiation) etc. owing to be provided with many small through holes at film thickness direction.Therefore, the problem of existence is that manufacturing cost increases, and the batch process of elongate objects also is short of.
In addition, in non-patent literature 2, non-patent literature 3, the record of following aspect is arranged: the perforated membrane that will constitute by macromolecule with alveolate texture of arranging regularly at the film thickness direction pore, be used for the base material of cultured cell etc., but be used for aspect the material of anisotropic conductive film, not open fully, do not mention yet.
The problem that the present invention wants to solve is, a kind of further thin spaceization that can corresponding be connected thing when keeping connection reliability is provided, in addition, and anisotropic conductive film that cost is lower and manufacture method thereof compared with the existing.
Summary of the invention
In order to solve above-mentioned problem, main points are that anisotropic conductive film of the present invention has: by the perforated membrane that macromolecule constitutes, this perforated membrane has in the many holes portion that film thickness direction runs through, hole portion is arranged in cellular, simultaneously the internal face direction bending laterally of hole portion; Conductive material, it is filled in the hole portion of perforated membrane; And tack coat, it covers the two sides of perforated membrane.
At this moment, the macromolecule that forms perforated membrane preferably constitutes by being selected from the macromolecule more than a kind or 2 kinds in polysulfones, polyether sulfone, polyphenylene sulfide, polyimides, polyamidoimide, silicone-modified polyimides, silicone-modified polyamidoimide, Polyetherimide and the polyether-ether-ketone etc.
At this, above-mentioned perforated membrane preferably is present in by making curtain coating (cast) the support substrate of Polymer Solution that form in the atmosphere of relative humidity more than 50% can, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials.
Perhaps, above-mentioned perforated membrane and conductive material preferably by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material.
When above-mentioned perforated membrane or above-mentioned perforated membrane and conductive material utilize these methods to form, as the macromolecule that dissolves in the above-mentioned organic solvent, can suitably use macromolecule more than a kind or 2 kinds that is selected from polysulfones, polyether sulfone, polyphenylene sulfide, silicone-modified polyimides, the silicone-modified polyamidoimide etc.
In addition, above-mentioned perforated membrane also can by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.
Perhaps, above-mentioned perforated membrane and conductive material also can by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, amphipathy macromolecule and conductive material.
When above-mentioned perforated membrane or above-mentioned perforated membrane and conductive material utilize these methods to form, as amphipathy macromolecule, can suitably use macromolecule and the polyion complex compound of cationic lipid, for example polyion complex compound of polyamic acid and cationic lipid etc. of on main chain and/or side chain, having introduced the hydrophily base.In addition, the polyion complex compound that uses polyamic acid and cationic lipid is during as amphipathy macromolecule, and preferred above-mentioned perforated membrane has carried out the imidizate processing after film forms.
In addition, in anisotropic conductive film of the present invention, the diameter of the hole portion of preferred above-mentioned perforated membrane is littler and interval hole portion is littler than the narrowest width of these conductors than the narrowest interval that is connected a plurality of conductors that thing has.
In addition, in anisotropic conductive film of the present invention, preferred above-mentioned conductive material is made of the group of electroconductive particle.Can suitably use metallic etc. as electroconductive particle.Can suitably use the metal as metallic such as metal more than a kind or 2 kinds of being selected among Ag, Au, Pt, Ni, Cu and the Pd.At this moment, the group of populated metallic can form one by adhere in the portion of hole.
In addition, in anisotropic conductive film of the present invention, preferred above-mentioned tack coat is the prepreg that thermosetting resin is in semi-cured state.At this moment, can suitably use epoxy resin etc. as thermosetting resin.
On the other hand, the main points of the manufacture method of anisotropic conductive film of the present invention are, comprise: form the operation of the perforated membrane that is made of macromolecule, described perforated membrane has in the many holes portion that film thickness direction runs through, hole portion is arranged in cellular, simultaneously the internal face direction bending laterally of hole portion; The operation of filled conductive material in the portion of the hole of perforated membrane; With operation at the two sides of perforated membrane lining tack coat.
At this, above-mentioned perforated membrane preferably by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials.
Perhaps, above-mentioned perforated membrane preferably by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.
In addition, the main points of another manufacture method of anisotropic conductive film of the present invention are, comprise: the operation that forms the perforated membrane that constitutes by macromolecule, described perforated membrane has in the many holes portion that film thickness direction runs through, hole portion is arranged in cellular, the internal face direction bending laterally of hole portion is filled with conductive material in the portion of hole simultaneously; With operation at the two sides of perforated membrane lining tack coat.
At this, the above-mentioned perforated membrane that in the portion of hole, is filled with conductive material, preferably by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material.
Perhaps, the above-mentioned perforated membrane that in the portion of hole, is filled with conductive material, preferably by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, amphipathy macromolecule and conductive material.
Anisotropic conductive film of the present invention comprises having the perforated membrane that is arranged in cellular many small hole portions, is filled with conductive material in the portion of the hole of this perforated membrane.
Therefore, even under the situation that the conductor spacing that is connected thing narrows down,, also can easily corresponding spacing narrow down if reduce to form the diameter that is arranged in cellular hole portion and at interval.In addition,, in these hole portions, be filled with conductive material, therefore can guarantee the conduction of film thickness direction and the insulating properties of face direction fully because each adjacent hole portion isolates mutually.Therefore, according to anisotropic conductive film of the present invention, compare with the anisotropic conductive film of the existing type that in resin, is dispersed with electroconductive particle, can be when keeping connection reliability and the corresponding further thin spaceization that is connected thing.
In addition, above-mentioned perforated membrane by make curtain coating the support substrate of Polymer Solution be present in method in the atmosphere of relative humidity more than 50% etc. and can form simply, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material, perhaps contain at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.
Therefore, although many small hole portions are set, there is no need to use expensive X ray and SR (synchrotron radiation) etc. fully at film thickness direction.Therefore, the advantage of anisotropic conductive film of the present invention is, can simply and at an easy rate make, and, the also easy production in a large number of elongate objects etc.
At this moment, at the macromolecule that forms perforated membrane when being selected from the macromolecule more than a kind or 2 kinds in polysulfones, polyether sulfone, polyphenylene sulfide, polyimides, polyamidoimide, silicone-modified polyimides, silicone-modified polyamidoimide, Polyetherimide and the polyether-ether-ketone and constituting, the excellent heat resistance of anisotropic conductive film.
In addition, at above-mentioned perforated membrane and conductive material by the made curtain coating support substrate of Polymer Solution when being present in method in the atmosphere of relative humidity more than 50% and forming, can be formed on the perforated membrane that in its hole portion, is filled with conductive material in the film forming process more simply, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material, perhaps contain at least: have hydrophobicity and volatile organic solvent, amphiphilic materials and conductive material.
Therefore, use the advantage of the anisotropic conductive film of this perforated membrane to be, owing to need in the portion of the hole of perforated membrane, not recharge conductive material, therefore can make simpler and at an easy rate, and produce etc. industrial also a large amount of easily.
In addition, when forming perforated membrane or perforated membrane and conductive material by said method, during as amphipathy macromolecule, can obtain having the anisotropic conductive film of the perforated membrane that constitutes by the macromolecule that is insoluble in hydrophobic organic solvent at the polyion complex compound of the polyion complex compound, for example polyamic acid and the cationic lipid that use the macromolecule on main chain and/or side chain, introduced the hydrophily base and cationic lipid etc.
In addition, when amphipathy macromolecule is the polyion complex compound of polyamic acid and cationic lipid, handle, can obtain having the anisotropic conductive film of the excellent heat resistance of the perforated membrane that constitutes by polyimides by carrying out imidizate after forming at film.
In addition, in anisotropic conductive film of the present invention, the interval of and hole portion littler than the narrowest interval that is connected a plurality of conductors that thing has at the hole of above-mentioned perforated membrane portion diameter is than the narrowest width of these conductors hour, and the insulating properties of face direction is reliable, can obtain high connection reliability.
In addition, in anisotropic conductive film of the present invention, at conductive material by the group of electroconductive particle when constituting since in the portion of hole filled conductive particle equably easily, so the conduction of film thickness direction is good.In addition, when electroconductive particle is metallic, can make its easy at low temperatures adhere by the fusing point that reduces to reduce metal of particle diameter.
When the group of the metallic of filling in the portion of hole formed one by adhere, the space between metallic tailed off, and contact resistance diminishes simultaneously, can reduce the resistance of film thickness direction.In addition, owing to can remove the organic substance that is present between metallic etc., therefore also can reduce the resistance of film thickness direction thus by adhere.
At this moment, the metal of metallic is when being selected from constituting more than a kind or 2 kinds among Ag, Au, Pt, Ni, Cu and the Pd, because excellent conductivity, so can obtain the conduction of film thickness direction easily.
In addition, in anisotropic conductive film of the present invention, at tack coat is that thermosetting resin is when being in the prepreg of semi-cured state, flow easily and get rid of being connected gap tack coat between the conductor that thing has, in addition, also improve with the adaptation that is connected portion, can guarantee high connection reliability.
At this moment, when thermosetting resin is epoxy resin, good with the adaptation that is connected portion.
On the other hand, manufacture method according to anisotropic conductive film of the present invention, compare with the anisotropic conductive film of the existing type that is dispersed with electroconductive particle in resin, it can be manufactured on the anisotropic conductive film that can corresponding be connected the further thin spaceization of thing when keeping connection reliability.
At this moment, by the made curtain coating support substrate of Polymer Solution when being present under the atmosphere of relative humidity more than 50% the formation perforated membrane, can form simply and have the perforated membrane that is arranged in cellular many hole portion, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials, perhaps contain at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.Therefore, can make anisotropic conductive film at an easy rate.
In addition, according to another anisotropic conductive film manufacture method of the present invention, compare with the anisotropic conductive film of the existing type that in resin, is dispersed with electroconductive particle, can be manufactured on the anisotropic conductive film that can corresponding be connected the further thin spaceization of thing when keeping connection reliability.
At this moment, by make curtain coating the support substrate of Polymer Solution be present in when being formed on the perforated membrane that is filled with conductive material in the portion of hole under the atmosphere of relative humidity more than 50%, owing to there is no need in the portion of the hole of perforated membrane, to recharge conductive material, so can make anisotropic conductive film more at an easy rate, wherein, described Polymer Solution contains at least: have hydrophobicity and volatile organic solvent, dissolve in the macromolecule of this organic solvent, amphiphilic materials and conductive material perhaps contain: have hydrophobicity and volatile organic solvent at least, amphipathy macromolecule and conductive material.
Description of drawings
Fig. 1 is a profile of schematically representing the structure of anisotropic conductive film of the present invention.
Fig. 2 is the figure that schematically represents the structure of the perforated membrane in the anisotropic conductive film of the present invention, (a) is the profile of perforated membrane, (b) is the plane graph of perforated membrane.
Fig. 3 is the figure that the hole portion that schematically is illustrated in perforated membrane shown in Figure 2 is filled with the state of conductive material.
Fig. 4 is the figure that schematically represents spontaneously to form the principle with the perforated membrane that is arranged in cellular many hole portion.
Fig. 5 is the figure that is used for schematically illustrating the using method of anisotropic conductive film of the present invention.
Fig. 6 is the electromicroscopic photograph of the perforated membrane that obtains when making the anisotropic conductive film of embodiment 1, be made of polysulfones.
Fig. 7 is an electromicroscopic photograph that obtain, be filled with the perforated membrane of Ag particle in the portion of hole when making the anisotropic conductive film of embodiment 1.
Fig. 8 is the electromicroscopic photograph of the perforated membrane that obtains when making the anisotropic conductive film of embodiment 2, be made of polysulfones.
Fig. 9 is an electromicroscopic photograph that obtain, be filled with the perforated membrane of Ag particle in the portion of hole when making the anisotropic conductive film of embodiment 2.
Figure 10 is the electromicroscopic photograph of the perforated membrane that obtains when making the anisotropic conductive film of embodiment 3, be made of silicone-modified polyimides.
Figure 11 is an electromicroscopic photograph that obtain, be filled with the perforated membrane of Ag particle in the portion of hole when making the anisotropic conductive film of embodiment 3.
Figure 12 is the electromicroscopic photograph of the perforated membrane that obtains when making the anisotropic conductive film of embodiment 4, be made of silicone-modified polyimides.
Figure 13 is an electromicroscopic photograph that obtain, be filled with the perforated membrane of Ag particle in the portion of hole when making the anisotropic conductive film of embodiment 4.
Figure 14 is the figure of the comb-type electrode that uses when schematically being illustrated in the evaluation of carrying out anisotropic conductive.
Figure 15 (a) is the figure of evaluation that is used for schematically illustrating the electric conductivity of film thickness direction, and Figure 15 (b) is the figure of evaluation that is used for schematically illustrating the insulation property of face direction.
Figure 16 represents the structure of representational anisotropic conductive film in the past and the figure of its catenation principle.
Embodiment
Below, the limit is described in detail embodiments of the present invention with reference to the accompanying drawing limit.Fig. 1 is a profile of schematically representing the structure of anisotropic conductive film of the present invention.In addition, Fig. 2 is the figure that schematically represents the structure of the perforated membrane in the anisotropic conductive film of the present invention.In addition, Fig. 3 is the figure that the hole portion that schematically is illustrated in perforated membrane shown in Figure 2 is filled with the state of conductive material.
At first, use Fig. 1～Fig. 3, the structure of anisotropic conductive film of the present invention (below, be called " this ACF ") is described.
As shown in Figure 1, this ACF10 has perforated membrane 12, conductive material 14 and tack coat 16 as basic structure.
In this ACF10, perforated membrane 12 is formed by macromolecule, and shown in Fig. 2 (a), it has in the many holes portion 18 that film thickness direction runs through.In addition, the internal face 22 of these hole portions 18 laterally direction bend to roughly dome shape.In addition, shown in Fig. 2 (b), these hole portions 18 are arranged in cellular, utilize next door 20 to separate between each adjacent hole portion 18.
At this, the hole portion diameter in the perforated membrane and at interval can consider to be connected thing (for example IC chip, flexible printed circuit board: the width of a plurality of conductors that FPC etc.) have (for example projected electrode, circuit pattern etc.) and wait at interval to determine.
In addition, consider that from the insulating properties of guaranteeing the face direction, the viewpoint that obtains high connecting reliability etc. the interval of the diameter of preferred above-mentioned hole portion and above-mentioned hole portion littler than the narrowest interval that is connected a plurality of conductors that thing has is littler than the narrowest width that is connected a plurality of conductors that thing has.
The interval that the diameter of preferred above-mentioned hole portion is set at below the 1/2 and above-mentioned hole portion at the narrowest interval that is connected a plurality of conductors that thing has is set at below 1/2 of the narrowest width that is connected a plurality of conductors that thing has.
In addition, shown in Fig. 2 (b), the diameter of what is called hole portion, be meant the value that the diameter R of the opening portion of the hole portion that is determined at film surface or back displays averages, the interval of so-called hole portion is meant the value that the distance L between the opening portion of the opening portion of the hole portion that is determined at film surface or back displays and adjacent hole portion averages.In addition, above-mentioned diameter R and distance L can be measured by the electron micrograph of porous film surface, optical microscope photograph etc.
In addition, the thickness of perforated membrane can consider that mechanical strength, the proof voltage of this ACF waits to determine.Can be preferably at 1～100 μ m, more preferably in the scope of 5～50 μ m.
In addition, the macromolecule concrete example that forms perforated membrane is if any fluororesin such as: polysulfones, polyether sulfone, polyphenylene sulfide, polyimides, polyamidoimide, silicone-modified polyimides, silicone-modified polyamidoimide, Polyetherimide, polyether-ether-ketone, polyester, polyamide, polytetrafluoroethylene etc., and these materials can use separately or mix more than 2 kinds and use.
Wherein, because the excellent heat resistance of polysulfones, polyether sulfone, polyphenylene sulfide, polyimides, polyamidoimide, silicone-modified polyimides, silicone-modified polyamidoimide, Polyetherimide, polyether-ether-ketone, so be fit to use.
In this ACF, as shown in Figure 3, conductive material 14 is filled in the hole portion 18 of perforated membrane 12 basically.At this moment, consider that from the viewpoint of the reliability of electrical connection that improves film thickness direction preferred conductive material 14 has the protuberance 24 outside the slight outstanding hole portion 18.
At this moment, the height of protuberance can consider that the change of the height of the conductor that the portion of being connected has is determined.Can be preferably at 0.1～10 μ m, more preferably in the scope of 1～5 μ m.
In addition, as conductive material, consider that from the viewpoint that is filled in the small hole portion easily equably, the conduction of film thickness direction is good etc. preferably the group by electroconductive particle constitutes.At this moment, the average diameter of electroconductive particle can wait to determine according to the aperture of perforated membrane.Be preferably about 1 μ m or littler.
Above-mentioned electroconductive particle concrete example is if any: metallic, resin plating particle, carbon particle etc., and these materials can use separately or mix more than 2 kinds and use.
In these electroconductive particles, can suitably use metallic.This is because its resistance is little, and, can reduce the fusing point of metal by the diameter that reduces particle, so adhere easily at low temperatures.
At this moment, the metallic concrete example if any: Ag particle, Au particle, Pt particle, Ni particle, Cu particle, Pd particle etc., these particles can be to mix more than a kind or 2 kinds.Because the excellent conductivity of these metallics is so obtain the conduction of film thickness direction easily.In these metallics, can preferably suitably use the Ag particle.
At this, as electroconductive particle, when using metallic and resin plating particle etc. particle surface comprises the particle of metal at least, preferably the group of these particles of filling in the portion of hole forms one by adhere in the portion of hole.Its reason is that these interparticle spaces tail off, and contact resistance diminishes the resistance decreasing of film thickness direction simultaneously.In addition, its reason is, is present in these interparticle organic substances etc. owing to can remove by adhere, therefore, and the resistance decreasing of film thickness direction thus.
In addition, in this ACF, can be in the whole hole portion that above-mentioned perforated membrane has the filled conductive material, also can partly have in the part of hole portion the not position of filled conductive material.That is the filled conductive material gets final product in the hole portion in the hole portion relative with being connected conductor that thing has more than at least 1.
In this ACF, as shown in Figure 1, tack coat 16 covers on the surface and the back side of the perforated membrane 12 that is filled with conductive material 14 in the hole portion 18.
The thickness of tack coat can consider to be connected the height of the conductor that thing has, the interval of conductor waits to determine.Can be preferably at 0.1～100 μ m, more preferably in the scope of 1～50 μ m.
At this,, can use the caking property that has and be connected thing, any material of insulating properties as bonding layer material.As one of suitable examples, concrete example is as enumerating: the thermosetting resin of epoxy resin, unsaturated polyester resin, bimaleimide resin, cyanate ester resin etc. is in the prepreg of semi-cured state etc.When tack coat was prepreg, advantage was, flowed easily and got rid of tack coat being connected gap between the conductor that thing has, in addition, also improved with the adaptation that is connected thing, can guarantee high reliability.
From considering, can suitably use epoxy resin as above-mentioned thermosetting resin with viewpoints such as the adaptation that is connected thing are good.
Below, the manufacture method of this ACF with said structure is described.The manufacture method of this ACF, basically comprise: form the operation of perforated membrane, in the portion of the hole of perforated membrane the filled conductive material operation and in the operation of the two sides of perforated membrane lining tack coat, perhaps comprise: be formed on the operation of the perforated membrane that is filled with conductive material in the portion of hole and in the operation of the two sides of perforated membrane lining tack coat.
(formation of perforated membrane)
The formation operation of the above-mentioned perforated membrane in the manufacture method of this ACF is fit to use following method basically.The summary and the principle of its method at first, are described with Fig. 4.Its method simply, is meant not mixing with water and have in volatile organic solvent to make macromolecule dissolution, make curtain coating the support substrate of this Polymer Solution be present in method under the high humidity.
By this method, spontaneously form according to following principle and to have the perforated membrane that is arranged in cellular many hole portion.That is, as shown in Figure 4,1) latent heat when volatilizing by organic solvent, airborne hydrone dewfall and become small water droplet 26 is compactly filled on the surface of Polymer Solution 28.2) further utilize convection current and the capillary force that in Polymer Solution 28, produces by latent heat, water droplet 26 is transported to the interface of Polymer Solution 28 and support substrate 30.3) retreatment by organic solvent is fixed on the support substrate 30 water droplet 26.4) further by water droplet 26 evaporation, be model, form and have the perforated membrane 12 that is arranged in cellular many hole portion 18 with the water droplet of arranging regularly 26.In addition, because water droplet 26 becomes model, so the internal face 22 of hole portion 18 becomes crooked laterally state.
Below, the manufacture method of this ACF is illustrated in greater detail.That is, can use contain at least have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials solution as above-mentioned Polymer Solution.
Has hydrophobicity and volatile organic solvent for example can be enumerated: halide such as chloroform, carrene; Aromatic hydrocarbons such as benzene,toluene,xylene; Ester such as ethyl acetate, butyl acetate class; Ketones such as butanone (MEK), acetone etc., these organic solvents can use separately or mix more than 2 kinds and use.
The macromolecule that dissolves in above-mentioned organic solvent for example can be enumerated: polysulfones, polyether sulfone, polyphenylene sulfide, silicone-modified polyimides, silicone-modified polyamidoimide etc., these macromolecules can use separately or mix more than 2 kinds and use.In addition, when using polyimides, polyamidoimide, be to improve its dissolubility in above-mentioned organic solvent by silicone-modified purpose.
At this, so-called above-mentioned amphiphilic materials is so-called interfacial agent, is meant the compound that has hydrophobic position and hydrophilic site simultaneously.This amphiphilic materials mainly is for the water droplet group stabilisation that produces on the surface of Polymer Solution etc. is added.In addition, the water droplet group is stabilisation why, and supposition is because hydrophobic portion and the hydrophobic organic solvent highly compatible of amphiphilic materials, maintenance moisture easily in the space segment of consequent reverse micelle.
This amphiphilic materials concrete example is as enumerating: with hydrophilic acrylamide polymer is main chain backbone, have dodecyl simultaneously as hydrophobic side chains, as the lactose base of hydrophilic side-chains or the polymer of carboxyl, the perhaps polyion complex compound of anionic property polysaccharide such as heparin and glucan sulfuric acid and long chain alkyl ammonium salt etc., these materials can use separately or mix more than 2 kinds and use.
At this moment, the polymer concentration that contains in the preferred above-mentioned Polymer Solution is in the scope of 0.1～50 weight %, preferred 0.1～10 weight %.
This is because if high molecular concentration in this scope, can obtain having the perforated membrane of abundant mechanical strength, in addition, can obtain sufficient alveolate texture.
In addition, with respect to above-mentioned macromolecule, the addition of the amphiphilic materials that contains in the preferred above-mentioned Polymer Solution is in the scope of 0.01～20 weight %, preferred 0.05～10 weight %.
This is because if amphiphilic materials is added, can obtain stable alveolate texture in this scope.
In the formation operation of the above-mentioned perforated membrane in the manufacture method of this ACF, replace the Polymer Solution of above-mentioned explanation, can use and contain Polymer Solution at least with hydrophobicity and volatile organic solvent and amphipathy macromolecule.
At this, so-called amphipathy macromolecule is meant the macromolecule that has hydrophobic position and hydrophilic site simultaneously.
This amphipathy macromolecule concrete example is as enumerating: main chain and or side chain on introduced-SO
3The H base ,-macromolecule of polyether-ether-ketones of hydrophily bases such as COOH base, polyimides, polyamidoimide, Polyetherimide etc. and the polyion complex compound of cationic lipid; The polyion complex compounds of polyamic acid and cationic lipid etc., these macromolecules can use separately or mix more than 2 kinds and use.
So-called polyamic acid in above-mentioned, being meant can be by the resin combination that tetracarboxylic dianhydride and diamine compound polymerization are obtained.
Above-mentioned polyamic acid for example can be enumerated: 3,3 ', 4, and 4 '-biphenyltetracarboxyacid acid, 3,3 ', 4,4 '-biphenyl ether tetrabasic carboxylic acid, 3,3 ', 4,4 '-biphenyl sulfone tetrabasic carboxylic acid, 3,3 ', 4,4 '-benzophenone tetrabasic carboxylic acid, 2,2-two (3,4-dicarboxyl phenyl) propane, 1,1,1,3,3,3-hexafluoro-2,2-two (3,4 dicarboxyl phenyl) propane, two (3,4-dicarboxyl phenyl) tetramethyl disiloxane etc. has the tetrabasic carboxylic acid of biphenyl structural and their dianhydride; Cyclobutane tetrabasic carboxylic acid, 1,2,3,4-pentamethylene tetrabasic carboxylic acid, 2,3,4,5-oxolane tetrabasic carboxylic acid, 1,2,4,5-cyclohexane tetrabasic carboxylic acid, 3,4-dicarboxyl-1-cyclohexyl butanedioic acid, 3,4-dicarboxyl-1,2,3,4-tetrahydrochysene-ester ring type tetrabasic carboxylic acid and their dianhydrides such as 1-naphthalene succinic; Pyromellitic acid, 2,3,6,7-naphthalene tetracarboxylic acid, 1,2,5,6-naphthalene tetracarboxylic acid, 1,4,5,8-naphthalene tetracarboxylic acid, 2,3,6,7-anthracene tetrabasic carboxylic acid, 1,2,5,6-anthracene tetrabasic carboxylic acid, 2,3,4,5-pyridine tetrabasic carboxylic acid, 2, aromatic tetracarboxylic acid and their dianhydrides such as 6-two (3,4-dicarboxyl phenyl) pyridine; ピ ロ メ サ one ト acid, trimellitic acid etc., these materials can use separately or mix more than 2 kinds and use.
In addition, above-mentioned diamine compound for example can be enumerated: p-phenylenediamine (PPD), m-phenylene diamine (MPD), 2, the 5-diaminotoluene, 2, the 6-diaminotoluene, 4, the 4-benzidine, 3,3 '-dimethyl-4,4 '-benzidine, 3,3 '-dimethoxy-4 ', 4 '-benzidine, MDA, diaminodiphenyl ether, 2,2 '-diaminourea diphenyl propane, two (3,5-dimethyl-4-aminophenyl) methane, diamino-diphenyl sulfone, diaminobenzophenone, diaminonaphthalene, 1,4-two (4-amino-benzene oxygen) benzene, 1,4-two (4-aminophenyl) benzene, 9,10-two (4-aminophenyl) anthracene, 1,3-two (4-amino-benzene oxygen) benzene, 4,4 '-two (4-amino-benzene oxygen) diphenyl sulphone (DPS), 2,2-two [4-(4-amino-benzene oxygen) phenyl] propane, 2,2 '-trifluoromethyl-4,4 '-benzidine, aromatic diamines such as 4,4 '-two (4-diamino phenoxy) octafluoro biphenyl; Ester ring type diamines such as two (4-aminocyclohexyl) methane, two (4-amino-3-methylcyclohexyl) methane; Aliphatic diamine such as tetra-methylenedimine, hexamethylene diamine; Diaminourea siloxanes etc., these can use separately or mix more than 2 kinds and use.
In addition, cationic lipid for example has: the aliphat ammonium salt compound of carbon number more than 4, ester ring type ammonium salt compound etc.
Concrete example is as enumerating: the salt of primary amine classes such as octylame, decyl amine, tetradecy lamine, cetylamine, octadecylamine, two lauryl amines, cyclohexylamine; The salt of secondary amine classes such as diamylamine, dihexylamine, dioctylamine, didecylamine, two (tetradecyl) amine, two (palmityl) amine, two (octadecyl) amine, two (docosyl) amine, N-methyl octylame, N-methyl n-Decylamine, the positive tetradecy lamine of N-methyl, the positive cetylamine of N-methyl, the positive octadecylamine of N-methyl, positive 20 amine of N-methyl, positive two lauryl amines of N-methyl, the positive cyclohexylamine of N-methyl; N, N-dimethyl octylame, N, N-dimethyl n decyl amine, N, N-dimethyl n tetradecy lamine, N, N-dimethyl n cetylamine, N, N-dimethyl n octadecylamine, N, N-dimethyl n 20 amine, N, N-dimethyl n two lauryl amines, N, the salt of tertiary amines such as N-dimethyl n cyclohexylamine; The salt of quaternary ammoniums such as dimethyl dioctylamine, dimethyl didecylamine, dimethyl two (tetradecyl) amine, dimethyl two (palmityl) amine, dimethyl two (octadecyl) amine, dimethyl two (20 base) amine, dimethyl two (22) amine, dimethyl dicyclohexyl amine, these can use separately or mix more than 2 kinds and use.
The polyion complex compound of above-mentioned polyamic acid and cationic lipid can obtain by the solution etc. that cooperates cationic lipid in containing useful alkali and in the solution of the material that obtains of polyamic acid or be engaged in the cationic lipid that the organic solvent of the polymerization that can be used for above-mentioned polyamic acid dissolves.
In addition, when using the polyion complex compound of polyamic acid and cationic lipid, preferably utilize known method with the film imidizate that forms.This is for thereby the polyamic acid closed loop being formed the perforated membrane that is made of polyimides.
In the formation operation of perforated membrane, use when containing the Polymer Solution with hydrophobicity and volatile organic solvent and amphipathy macromolecule at least, preferably the amphipathy macromolecule concentration that contains in this Polymer Solution is in the scope of 0.1～50 weight %, preferred 0.1～10 weight %.
This is because if the concentration of amphipathy macromolecule in this scope, can obtain having the perforated membrane of sufficient mechanical, in addition, can obtain sufficient alveolate texture.
In addition, have hydrophobicity and volatile organic solvent, since identical with above-mentioned organic solvent, the Therefore, omited explanation.
When forming above-mentioned perforated membrane,, for example can enumerate: inorganic material such as glass, metal, silicon chip as the material of the support substrate of the above-mentioned Polymer Solution of curtain coating; Macromolecular materials such as polypropylene, polyethylene, polyether-ketone, fluororesin; Water, white oil etc.
In addition, the curtain coating amount of Polymer Solution can suitably be regulated, so that the diameter of the hole portion of perforated membrane is littler than the narrowest interval that is connected a plurality of conductors that thing has and the interval of hole portion is littler etc. than the narrowest width that is connected a plurality of conductors that thing has.
Specifically, the curtain coating amount of Polymer Solution preferably makes applied thickness in the scope of 50～3500 μ m, preferred 150～2000 μ m.
In addition, preferred curtain coating the support substrate of Polymer Solution be present under the atmosphere of relative humidity 50%～95%.Its reason is that when relative humidity was lower than 50%, possible dewfall was insufficient, when it surpasses 95%, may be difficult to control environment.
In addition, in the formation operation of above-mentioned perforated membrane, can under the atmosphere of relative humidity 50%～95% the Polymer Solution curtain coating supported on the substrate that the support substrate that also curtain coating in advance can be crossed Polymer Solution is positioned under the atmosphere of relative humidity 50%～95%.In addition, the atmosphere of relative humidity 50%～95% also can be jetted in Polymer Solution.
In addition, in the formation operation of above-mentioned perforated membrane,, under the situation of the formation that does not influence perforated membrane, can heat for the evaporation that promotes organic solvent and the water droplet group's that is arranged in the Polymer Solution surface evaporation, drying etc.
(filling of conductive material)
Secondly, in the manufacture method of this ACF, the method for filled conductive material in the portion of the hole of perforated membrane can be considered that the kind of the conductive material that uses and proterties wait suitably to select.
The completion method of conductive material for example can be enumerated: make method that further contains conductive material in the above-mentioned Polymer Solution etc.That is, when also containing conductive material in the Polymer Solution that when making perforated membrane, is using, in the film forming process, spontaneously be formed on the perforated membrane that is filled with conductive material in its hole portion.Therefore, utilize the advantage of this method to be, owing to there is no need in the portion of the hole of perforated membrane, to recharge conductive material, so can be omitted in the operation of filled conductive material in the hole portion of perforated membrane.
The content of conductive material is in the scope of 1～52 weight %, preferred 1～10 weight % in the preferred Polymer Solution.In addition, preferably use average grain diameter for about 1 μ m or littler electroconductive particle as conductive material.
The completion method of other conductive material for example can be enumerated: by dispersed electro-conductive material in the insoluble solvent of macromolecule, and flood perforated membrane in this dispersion soln, conductive material is adsorbed in the portion of hole and than the hole portion inside method etc. in the outside a little.At this moment, above-mentioned solvent for example can be enumerated: alcohols solvents such as ethanol; Water, esters solvent, amide solvent, varsol, ketones solvent, ether solvent etc.
The content of conductive material is in the scope of 1～80 weight %, preferred 1～10 weight % in the preferred dispersion soln.Preferred use average grain diameter for about 1 μ m or littler electroconductive particle as conductive material.In addition, mention speed, dip time etc. when from dispersion soln, mentioning perforated membrane, can carry out various adjustment according to the content of conductive material in the aperture of perforated membrane, the dispersion soln etc.
In addition, for example can enumerate, when using metallic as electroconductive particle, by utilizing alkoxide with metallic metal of the same race to carry out on the glass substrate etc. of finishing, the placing porous film, be immersed in the dispersion soln, electroconductive particle optionally be adsorbed in the portion of hole and than the hole portion inside method etc. in the outside a little.
At this moment, the metal alkoxide of use for example can be enumerated: the alkoxide of Cu, Ni, Ti, Fe etc. etc.
Moreover, for example can enumerate, when using metallic as electroconductive particle, on a face of perforated membrane, stick metal film, with it is after electrode is implemented plating, utilize etching to remove metal film, metallic is optionally separated out in the portion of hole and than the hole portion inside method etc. in the outside a little.
(formation of tack coat)
Secondly, in the manufacture method of this ACF, be filled with the two sides lining tack coat of the perforated membrane of conductive material in the portion of hole, for example can enumerate, the method for known coating means coating such as use coating machine bonding layer materials and the membranaceous tack coat that will make in advance carry out the method for lamination etc.
Below, use Fig. 5 that the using method of this ACF is described.As shown in Figure 5, this ACF10 is for example placed between the substrate 32 and substrate 34, and when carrying out short time hot pressing under the temperature that tack coat 16 flows, tack coat 16 is flowed to be got rid of, simultaneously, between the electrode 38 of the electrode 36 of substrate 32 and substrate 34, sandwich conductive material 14.Then, under keeping the situation of this state during resin solidification, by 36,38 electrical connections of 14 liang of electrodes of conductive material.On the other hand, utilize tack coat 16 electric insulations between the adjacent electrode 36 (38).In addition, utilize the curing of tack coat 16, substrate 32 and substrate 34 mechanical connections.
The present invention is not subjected to any qualification of above-mentioned execution mode, can carry out various changes in the scope that does not depart from spirit of the present invention.
Embodiment
Below, explain the present invention with embodiment.
1. the making of the anisotropic conductive film of embodiment
(embodiment 1)
With polysulfones (ア Le De リ シ チ system, molecular weight Mw=56,000) with 0.1[wt%] concentration be dissolved in the solution that chloroform forms, interpolation is 10[wt% with respect to polysulfones] the dodecyl acrylamide and the copolymer of caproic acid as amphiphilic materials, be mixed with Polymer Solution.
Then, at the continuous tray φ 90[mm of the air of winding-up relative humidity 50%]) on, with coating thickness 780[μ m] this Polymer Solution of curtain coating, make the chloroform volatilization.Its result as shown in Figure 6, obtains the perforated membrane that is made of polysulfones: it has in the many holes portion that film thickness direction runs through, and hole portion is arranged in cellular, and the internal face of hole portion is crooked laterally simultaneously.In addition, the aperture of the hole portion of perforated membrane is about 5 μ m.
Then, be 3[wt% in concentration] Ag ethanol dispersion soln (Japanese ペ イ Application ト system, " Off ア イ Application ス Off イ ア SVE102 ", average grain diameter 50nm) in, flood above-mentioned perforated membrane, with 5[μ m/ second] speed mention.Its result as shown in Figure 7, obtains being filled with the perforated membrane of Ag particle in the portion of hole.In addition, the Ag particle of filling is by heating 5 minutes and adhere at 150 ℃.
Then, with bisphenol A type epoxy resin (ヅ ヤ パ Application エ Port キ シ レ ヅ Application system, " エ ピ コ one ト 1001 "), NBR (Japanese ゼ is Application system, " ニ Port one Le 1072J "), imidazole curing agent (four countries' system of changing into, " キ ユ ア ゾ one Le C11Z "), with bisphenol A type epoxy resin: NBR: the part by weight of imidazole curing agent=40: 50: 5, be dissolved in the mixed solvent of MEK/THF=50/50, make its solid constituent be [30wt%], make this solution 60 ℃ of dryings 10 minutes, make tack coat.
Then, in the portion of hole, be filled with this tack coat of two sides lamination of the perforated membrane of Ag particle, make the anisotropic conductive film of embodiment 1.
(embodiment 2)
In chloroform with 0.2[wt%] concentration dissolving polysulfones, will apply thickness and be set at 1560[μ m], in addition, all the other are operated similarly to Example 1, make the anisotropic conductive film of embodiment 2.The perforated membrane that constitutes by polysulfones that when making the anisotropic conductive film of embodiment 2, obtains, and in the portion of hole, be filled with the perforated membrane of Ag particle respectively as Fig. 8, shown in Figure 9.In addition, the aperture of the hole portion of perforated membrane is about 10 μ m.
(embodiment 3)
Replace polysulfones, in chloroform with 0.1[wt%] the siloxane modified polyimides of concentration dissolves silicon (space portion emerging produce, " R15 "), the speed setting of mentioning that will flood in Ag ethanol dispersion soln behind the perforated membrane is 7[μ m/ second], in addition, all the other are operated similarly to Example 1, make the anisotropic conductive film of embodiment 3.The perforated membrane that the polyimides by silicone-modified that obtains constitutes, and in the portion of hole, be filled with the perforated membrane of Ag particle respectively as Figure 10, shown in Figure 11 when making the anisotropic conductive film of embodiment 3.In addition, the aperture of the hole portion of perforated membrane is about 5 μ m.
(embodiment 4)
In chloroform with 0.2[wt%] the siloxane modified polyimides of concentration dissolves silicon, to apply thickness and be set at 1560[μ m], the speed setting of mentioning that will flood in Ag ethanol dispersion soln behind the perforated membrane is 5[μ m/ second], in addition, all the other are operated similarly to Example 3, make the anisotropic conductive film of embodiment 4.The perforated membrane that the polyimides by silicone-modified that obtains when making the anisotropic conductive film of embodiment 4 constitutes, and the perforated membrane that is filled with the Ag particle in the portion of hole respectively as shown in Figure 12 and Figure 13.In addition, the aperture of the hole portion of perforated membrane is about 13 μ m.
(embodiment 5)
In N-N-methyl-2-2-pyrrolidone N-(NMP) 278g, the polyamic acid that makes biphenyltetracarboxyacid acid acid anhydride (BPDA) 29.4g (0.1mol) and diaminodiphenyl ether (DDE) 20.0g (0.1mol) is mixed with polyamic acid solution 23 ℃ of reactions 24 hours.Then, this solution is put in the 2L ethyl acetate lentamente, made that it precipitates, filtration, drying again, obtain polyamic acid powder 35.0g.
Then, with this polyamic acid 100mg heating for dissolving in pH is 8 water.On the other hand, with ultrasonic wave 200mg dimethyl two (octadecyl) ammonium bromide is scattered in the 200mL water.Then, mix above-mentioned 2 kinds of solution, make temperature get back to room temperature and stir a whole night.Then, add chloroform, separate with separatory funnel and take out the chloroform phase.Then, concentrate chloroform, precipitate again with acetone with evaporator.Then, with 2600rpm centrifugation 30 minutes, make solvent seasoning (52.5mg) with centrifugal separator.Then, dilute this polyion complex solution, be mixed with concentration 0.5[wt%] Polymer Solution.
Then, in the continuous tray of the air of winding-up relative humidity 50% (φ 90[mm]) with coating thickness 780[μ m] this Polymer Solution of curtain coating, make the chloroform volatilization.Its result obtains being arranged in the precursor film that cellular polyimide precursor constitutes by the many holes portion of running through at film thickness direction.
Then, at benzene: acetic anhydride: this precursor film of dipping a whole night in the solution of pyridine=3: 1: 1, the polyion complex compound is carried out imidizate handle.Obtain the perforated membrane that is made of polyimides thus, it has in the many holes portion that film thickness direction runs through, and hole portion is arranged in cellular, simultaneously the internal face direction bending laterally of hole portion.At this moment, cationic lipid is by removing with alcohol flushing.In addition, the aperture of the hole portion of perforated membrane is about 4 μ m.
Then, be 3[wt% in concentration] Ag ethanol dispersion soln (Japanese ペ イ Application ト system, " Off ア イ Application ス Off イ ア SVE102 ", average grain diameter 50nm) in, flood above-mentioned perforated membrane, and with 5[μ m/ second] speed mention.Its result obtains being filled with in the portion of hole the perforated membrane of Ag particle.In addition, the Ag particle of filling is by heating 5 minutes and adhere at 150 ℃.
Then, with above-mentioned bisphenol A type epoxy resin, NBR, imidazole curing agent with bisphenol A type epoxy resin: NBR: the part by weight of imidazole curing agent=40: 50: 5, be dissolved in the mixed solvent of MEK/THF=50/50, making its solid constituent is 30[wt%], make this solution 60 ℃ of dryings 10 minutes, make tack coat.
Then, by this tack coat is laminated to the two sides that is filled with the perforated membrane of Ag particle in the portion of hole, obtain the anisotropic conductive film of embodiment 5.
(embodiment 6)
The polyion complex solution that obtains of dilution is mixed with concentration 0.7[wt%] Polymer Solution, will apply thickness and be set at 1560[μ m], in addition, operate similarly to Example 5, make the anisotropic conductive film of embodiment 6.The aperture of the hole portion of the perforated membrane that is made of polyimides that obtains during the anisotropic conductive film of making embodiment 6 is about 8 μ m.
2. the evaluation of anisotropic conductive
The evaluation of the electric conductivity of film thickness direction is following to be carried out.That is, with a face of the anisotropic conductive film of embodiment 1～6, be crimped on respectively on the comb-type electrode 40 (adjacent electrode 42,43 is by the comb poles of insulating substrate 44 mutually insulateds configuration) of spacing P as shown in figure 14 with regulation temporarily.Then, shown in Figure 15 (a), the anisotropic conductive film 10 of comb-type electrode 40 of respectively interim crimping being installed is so that another face contacts with copper coin 48 on being laminated to glass plate 46, to carry out real crimping in 170 ℃ * 20 seconds.
Then, the Sample A to obtaining thus
1～A
6(subscript of A is corresponding with the numbering of each embodiment) estimates its electric conductivity with tester 50.In addition, in this evaluation,, set the spacing P=30 μ m of comb-type electrode 40 to the anisotropic conductive film of embodiment 1, embodiment 3 and embodiment 5, to the anisotropic conductive film of embodiment 2, embodiment 4 and embodiment 6, set the spacing P=100 μ m of comb-type electrode.
The result of this evaluation has confirmed for Sample A
1～A
6, the resistance value between comb-type electrode all is 0[Ω].
(2) evaluation of the insulation property of face direction
The evaluation of the insulation property of face direction is following to be carried out.That is, with a face of the anisotropic conductive film of embodiment 1～6, be crimped on respectively temporarily with above-mentioned same comb-type electrode 40 on.Then, shown in Figure 15 (b), the anisotropic conductive film 10 of comb-type electrode 40 of respectively interim crimping being installed is so that another face contacts with glass plate 46, to carry out real crimping in 170 ℃ * 20 seconds.
Then, the sample B to obtaining thus
1～B
6(subscript of B is corresponding with the numbering of each embodiment) estimates its insulation property with tester 50.In addition, the spacing P of the comb-type electrode in this evaluation and above-mentioned same setting.
The result of this evaluation has confirmed for sample B
1～B
6, the resistance value between comb-type electrode all is 10
8More than [Ω].
According to these evaluation results, confirmed that the anisotropic conductive film of present embodiment has sufficient anisotropic conductive.
Claims (22)
1. anisotropic conductive film is characterized in that having:
By the perforated membrane that macromolecule constitutes, this film has in the many holes portion that film thickness direction runs through, and described hole portion is arranged in cellular, the internal face direction bending laterally of simultaneously described hole portion;
Conductive material, it is filled in the described hole portion of this perforated membrane; With
Tack coat, it is overlayed on the two sides of described perforated membrane.
2. anisotropic conductive film as claimed in claim 1, it is characterized in that described macromolecule is by being selected from constituting more than a kind or 2 kinds in polysulfones, polyether sulfone, polyphenylene sulfide, polyimides, polyamidoimide, silicone-modified polyimides, silicone-modified polyamidoimide, Polyetherimide and the polyether-ether-ketone.
3. anisotropic conductive film as claimed in claim 1, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials.
4. anisotropic conductive film as claimed in claim 1, it is characterized in that, described perforated membrane and described conductive material be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material.
5. as claim 3 or 4 described anisotropic conductive film, it is characterized in that, the described macromolecule that dissolves in the organic solvent be selected from polysulfones, polyether sulfone, polyphenylene sulfide, silicone-modified polyimides and the silicone-modified polyamidoimide more than a kind or 2 kinds.
6. anisotropic conductive film as claimed in claim 1, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.
7. anisotropic conductive film as claimed in claim 1, it is characterized in that, described perforated membrane and aforementioned conductive material be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, amphipathy macromolecule and conductive material.
8. as claim 6 or 7 described anisotropic conductive film, it is characterized in that described amphipathy macromolecule is to have introduced the macromolecule of hydrophily base and the polyion complex compound of cationic lipid on main chain and/or side chain.
9. as claim 6 or 7 described anisotropic conductive film, it is characterized in that described amphipathy macromolecule is the polyion complex compound of polyamic acid and cationic lipid, described perforated membrane has carried out the imidizate processing after film forms.
10. as each described anisotropic conductive film of claim 1～9, it is characterized in that the diameter of described hole portion is littler than the narrowest interval that is connected a plurality of conductors that thing has, and the interval of described hole portion is littler than the narrowest width of described conductor.
11., it is characterized in that described conductive material is made of the group of electroconductive particle as each described anisotropic conductive film of claim 1～10.
12. anisotropic conductive film as claimed in claim 11 is characterized in that, described electroconductive particle is a metallic.
13. anisotropic conductive film as claimed in claim 12 is characterized in that, described metal is by being selected from constituting more than a kind or 2 kinds among Ag, Au, Pt, Ni, Cu and the Pd.
14., it is characterized in that the group of the described metallic of filling in the portion of described hole forms one by adhere as claim 12 or 13 described anisotropic conductive film.
15., it is characterized in that described tack coat is the prepreg that thermosetting resin is in semi-cured state as each described anisotropic conductive film of claim 1～14.
16. anisotropic conductive film as claimed in claim 15 is characterized in that, described thermosetting resin is an epoxy resin.
17. an anisotropic conductive film manufacture method is characterized in that, comprises:
The operation of the perforated membrane that formation is made of macromolecule, described perforated membrane have in the many holes portion that film thickness direction runs through, and described hole portion is arranged in cellular, the internal face direction bending laterally of simultaneously described hole portion;
The operation of filled conductive material in the portion of the hole of described perforated membrane; With
Operation at the two sides of described perforated membrane lining tack coat.
18. anisotropic conductive film manufacture method as claimed in claim 17, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent and amphiphilic materials.
19. anisotropic conductive film manufacture method as claimed in claim 17, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent and amphipathy macromolecule.
20. an anisotropic conductive film manufacture method is characterized in that, comprises:
The operation of the perforated membrane that formation is made of macromolecule, described perforated membrane have in the many holes portion that film thickness direction runs through, and described hole portion is arranged in cellular, and the internal face direction bending laterally of simultaneously described hole portion is filled with conductive material in the portion of described hole; With
Operation at the two sides of aforementioned perforated membrane lining tack coat.
21. anisotropic conductive film manufacture method as claimed in claim 20, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, the macromolecule that dissolves in this organic solvent, amphiphilic materials and conductive material.
22. the manufacture method of anisotropic conductive film as claimed in claim 20, it is characterized in that, described perforated membrane be by make curtain coating the support substrate of Polymer Solution be present in the atmosphere of relative humidity more than 50% and form, wherein, described Polymer Solution comprises at least: have hydrophobicity and volatile organic solvent, amphipathy macromolecule and conductive material.
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| CN103811102A (en) * | 2014-02-19 | 2014-05-21 | 上海和辉光电有限公司 | Anisotropic conducting film and manufacturing method for same |
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