CN1937170A - Channel capacitor and memory unit mfg. method - Google Patents
Channel capacitor and memory unit mfg. method Download PDFInfo
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- CN1937170A CN1937170A CN 200510106940 CN200510106940A CN1937170A CN 1937170 A CN1937170 A CN 1937170A CN 200510106940 CN200510106940 CN 200510106940 CN 200510106940 A CN200510106940 A CN 200510106940A CN 1937170 A CN1937170 A CN 1937170A
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Abstract
The method includes steps: supplying a substrate; forming a grating typed isolation in shallow ridges as well as multiple active regions covered by hard mask layer on the substrate; using photomask primary stage considering along X direction only to define pattern needed by the invention on photoresist; using both of the hard mask layer and the isolation in shallow ridges being as a mask to etch out multiple deep trench downwards; then, carrying out subsequent procedure to accomplish preparation of trench capacitance and memory unit.
Description
Technical field
The present invention relates to a kind of manufacture method of channel capacitor, relate in particular to a kind of method of utilizing low order photomask (low grade mask) to make the deep trenches of channel capacitor and memory cell.
Background technology
Dynamic random access memory (dynamic random access memory, be designated hereinafter simply as DRAM) be the integrated circuit that is constituted by many memory cell (memory cell), it also is one of present topmost volatibility (volatile) memory simultaneously.Along with the trend of various electronic products towards the miniaturization development, the DRAM circuit elements design also must meet high integration, highdensity requirement, and channel capacitor DRAM component structure be industry one of the high density DRAM framework that extensively adopts, it is to etch deep trenches and make channel capacitor in semiconductor substrate in it, and make corresponding metal-oxide semiconductor (MOS) (MOS) transistor and be electrically connected, thereby can effectively dwindle the size of memory cell, properly utilize die space.
See also Fig. 1 to Fig. 3, Fig. 1 to Fig. 3 is existing generalized section of making channel capacitor, and Fig. 2 is along the generalized section of 2-2 ' tangent line among Fig. 1.Please consult Fig. 1 and Fig. 2 earlier, existing method of making channel capacitor 10, be to be provided with on the silicon substrate 100 of a hard mask (hard mask) layer 104 on a surface earlier, form the photoresist (not shown) of a patterning, be used for defining the position of a plurality of channel capacitors 10.Then carry out pattern transfering process,, utilize the opening 102 in these hard mask layers 104 again, in silicon substrate 100, etch a plurality of deep trenches in hard mask layer 104, to form the opening 102 of a plurality of definition channel capacitors 10.Form diffusion zone 106, capacitance dielectric layer 108 and capacitor lower electrode 110 then in regular turn in each irrigation canals and ditches, finish the making of channel capacitor 10, wherein, diffusion zone 106 is intended for the embedded electrode (buried plate) of channel capacitor 10.
Next, as shown in Figure 3, utilize technologies such as etching, deposition, chemico-mechanical polishing (CMP), ion injection, form shallow isolating trough (swallow trenchisolation in two 10 adjacent of channel capacitors in regular turn, STI) 202 and each grid 204, sidewall 206 and source/drain 208, last demand of looking product specification again, selectivity is carried out a metal silication (salicide) technology, and utilizes a plurality of contact plungers (contact plug) (not shown) and other elements and metal interconnecting to be electrically connected.
Yet, above-mentioned prior art is to utilize the photomask of the irrigation canals and ditches pattern with array earlier, in photoresist and hard mask, to define irrigation canals and ditches array as shown in Figure 1, and then etching forms each deep trenches in silicon substrate, need to utilize again a photomask with array STI pattern then again, between two adjacent channel capacitors, to form shallow isolating trough; In other words, this two photomask not only must have the directions X of high integration requirement and the aligning of Y direction is considered, influence yield so increase it in the possibility of steps such as exposure, development and etching failure, and when carrying out the technology of shallow isolating trough, diffusion zone and capacitor lower electrode also are very easy to be subjected to the destruction and the pollution of technologies such as etching, cleaning, chemico-mechanical polishing, and influence the electrical performance of channel capacitor.
Summary of the invention
Therefore, main purpose of the present invention provides the manufacture method of a channel capacitor and memory cell.
According to the method that provides of the present invention, a substrate at first is provided, and in this substrate, forms the shallow isolating trough of a palisade and the active region that covers by a hard mask layer earlier.Then on this substrate, form the photoresist of a patterning, to define each irrigation canals and ditches locations of structures.After removing this photoresist, utilize this hard mask layer and this shallow isolating trough as a mask, etch a plurality of deep trenches downwards, and in those deep trenches, form diffusion zone, capacitance dielectric layer in regular turn.Insert polysilicon afterwards as capacitor lower electrode, finish the making of channel capacitor.Remove this hard mask layer again, on those active regions, form a plurality of transistors and side walls thereof.On those bit lines, form a plurality of contact plungers at last, finish the making of DRAM.
It should be noted that since method provided by the present invention be with this hard mask layer and those shallow isolating trough as mask, so required for the present invention in order to define the photomask of this photoresist, be one not need to consider the photomask of Y direction.That is to say, only need to utilize again an elementary photomask, can define pattern required for the present invention.
In addition, along with the integration trend of semiconductor element, many chips tend to have concurrently simultaneously several different kinds designs.So according to method provided by the present invention, be easier to carry out exposure technology on the System on Chip/SoC, and more can lower when the optical mask pattern of high density arrangement carries out exposure technology the possibility of design transfer failure.
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, hereinafter especially exemplified by preferred implementation, and conjunction with figs., be described in detail below.Yet following preferred implementation and accompanying drawing are only for reference and explanation usefulness, are not to be used for the present invention is limited.
Description of drawings
Fig. 1 to Fig. 3 is existing generalized section of making channel capacitor;
Fig. 4 to Figure 13 is the schematic diagram that shows first preferred embodiment of making channel capacitor of the present invention;
Figure 14 to Figure 18 is the schematic diagram of second preferred embodiment of making channel capacitor of the present invention.
The main element symbol description
100 silicon substrates, 10 channel capacitors
102 openings, 104 hard mask layers
106 diffusion zones, 108 capacitance dielectric layers
110 capacitor lower electrodes, 204 grids
206 sidewalls, 208 source/drains
202 shallow isolating trough, 300 silicon substrates
302 shallow isolating trough, 303 active regions
304 hard mask layers, 400 photoresists
502 deep channel capacitors, 503 polysilicon layers
504 diffusion zones, 506 capacitance dielectric layers
508 capacitor lower electrodes, 700 grid oxic horizons
512 grids, 802 light dopes source electrode/drain electrode
803 sidewalls, 804 heavy doping source electrode/drain electrode
806 contact plungers, 808 interlayer dielectric layers
812,814 metal silicified layers, 522,523 deep channel capacitors
322 shallow isolating trough, 520 polysilicon layers
524 diffusion zones, 526 capacitance dielectric layers
528 capacitor lower electrodes, 525,527 grids
822,824,826,828 metal silicified layers
Embodiment
See also Fig. 4 to Figure 13, Fig. 4 to Figure 13 is the schematic diagram that shows first preferred embodiment of making channel capacitor of the present invention.Please consult Fig. 4 and Fig. 5 earlier, Fig. 5 is along the generalized section of 5-5 ' tangent line among Fig. 4.One substrate 300 at first is provided, the Semiconductor substrate (semiconductor substrate), silicon wafer (wafer) or silicon-coated insulated (the silicon on insulator that mix of a P type for example, SOI) substrate, shallow isolating trough (the shallow trench isolation that includes a palisade on it, STI) 302, and a plurality of by active region 303 that shallow isolating trough 302 defined and isolated.Wherein, each active region 303 surface is coated with one respectively by hard mask layers that material constituted 304 such as nitrogen silicon compounds, and each active region 303 is to form an arrayed closely along directions X and Y direction.In addition, each active region 303 is a long strip type zone, and its longer sides is along the directions X setting.
See also Fig. 6 and Fig. 7, Fig. 7 is along the generalized section of 7-7 ' tangent line among Fig. 6.Then, utilize photoresist coating, exposure, develop, solidify technologies such as (curing), form a plurality of strip photoresists 400 parallel to each other in substrate 300 surfaces, cover the shallow isolating trough 302 of part and the subregion of each hard mask layer 304 respectively, in each active region 303 of 400 of wantonly two adjacent photoresists, to define the position of a deep trenches respectively.
It should be noted that because the etching selectivity difference so in this preferred embodiment, contain the shallow isolating trough 302 of silicon oxide compound composition and the hard mask layer 304 that is made of the nitrogen silicon compound, all is intended for the etching mask of follow-up etch process.Therefore irrigation canals and ditches pattern of the present invention can be defined out by the photomask that an aligning that does not need to have directions X that high integration requires and Y direction is considered.In other words, the present invention only needs to utilize a directions X to aim at the elementary photomask of considering (low grademask), forming many parallel and long limits is the strip photoresists 400 that are provided with along the Y direction, and cooperate the shallow isolating trough 302 of palisade and each hard mask layer 304 that is arrayed, can utilize active region the mode of deep trenches autoregistration (active to trench self-align) to be defined the position of each irrigation canals and ditches required for the present invention.
Subsequently as shown in Figure 7, utilize photoresist 400 and shallow isolating trough 302 to carry out an etch process, in order to remove not the part of each hard mask layer 304 that is covered by photoresist 400 as etching mask.
After removing photoresist 400, see also Fig. 8 and Fig. 9, Fig. 9 is along the generalized section of 9-9 ' tangent line among Fig. 8.As Fig. 8 and shown in Figure 9, then utilize shallow isolating trough 302 and remaining hard mask layer 304 to come etch substrate 300, in each active region 303, to form a deep trenches 502 respectively as etching mask.
As shown in figure 10, utilize arsenic silex glass (arsenic silicate glass subsequently, ASG) doping processs such as diffusion technique, ion injection or angled ion injection, the N+ that carries out high concentration in the surperficial sidewall and the substrate of bottom portion 300 of irrigation canals and ditches 502 mixes, and forms a diffusion zone 504.Afterwards, utilize technologies such as deposition, thermal oxidation again, sidewall and lower surface in each irrigation canals and ditches 502 form a capacitance dielectric layer (capacitor dielectric layer) 506 respectively, silicon monoxide-silicon-nitride and silicon oxide (ONO) dielectric layer for example, but be not limited thereto.In deep trenches 502, fill up a polysilicon layer 503 then, utilize etch-back or chemico-mechanical polishing technologies such as (CMP) to remove the polysilicon layer 503 of part again, and make remaining polysilicon layer 503 a little less than hard mask layer 304 and shallow isolating trough 302, in each deep trenches 502, to form a capacitor lower electrode (capacitor bottom electrode) 508 respectively, finish the making of channel capacitor.
Then the present invention can look the demand of product design, process specification and electrical performance etc. again, carry out the transistorized technology of horizontal or vertical mos (MOS), be electrically connected with each channel capacitor to form corresponding MOS transistor and word line (word line), and then prepare required DRAM or even single-transistor static RAM (1-Transistor Static RandomAccess Memory, memory cell 1T-SRAM) (memory cell).For example after removing hard mask layer 304, carry out the logic process of standard again, with modes such as thermal oxidation or deposition in substrate 300 surfaces that expose and capacitor lower electrode 508 surfaces form gate dielectrics 700, as shown in figure 11.
See also Figure 12, on gate dielectric 700, form a polysilicon layer (not shown), and this polysilicon layer is defined grid structure 512, utilize grid structure 512 then, carry out a lightly doped drain 802 technologies as mask with photoetching and etch process (PEP).Next carry out the making of sidewall (spacer) 803, and utilize grid structure 512 and sidewall 803, carry out heavy doping source electrode/drain electrode 804 ion implantation technologies again as mask.Afterwards as shown in figure 13, utilize a self-aligned metal silicate barrier layer photomask (salicide-blocked, SAB mask) or diffused light mask (implant mask), carry out a self-aligned metal silicate technology (salicide), form metal silicide layer 812,814 to go up with source/drain 804 surfaces in grid structure 512.And can be identical mask in order to photomask among this self-aligned metal silicate barrier layer photomask or diffused light mask and Fig. 6 to photoresist 400 exposures.So far, finish the technology of the ditching type capacitance stores unit of single-transistor static RAM (1T-SRAM).Deposit an interlayer dielectric layer (ILD) 808 at last again, and form bit line connector 806, and then source electrode 804 and other circuit are electrically connected, and the disclosed step of Figure 12 and Figure 13 is well known to those skilled in the art, so do not add to give unnecessary details at this.
It should be noted that as previously mentioned method provided by the present invention is not only applicable to make the channel capacitor of dynamic random access memory, also in order to make the channel capacitor structure of single-transistor static RAM (1T-SRAM).Next, see also Figure 14 to Figure 18, Figure 14 to Figure 18 is the schematic diagram of second preferred embodiment of making channel capacitor of the present invention.The main difference part of first embodiment that the second embodiment of the present invention and Fig. 4 are extremely shown in Figure 13 is the structure that is Fig. 9 and subsequent channel capacitor, so that in its technology applicable to the two capacitance stores unit (2T-2C memorycell) of pair transistor.
For convenience of description, below narration only illustrates in detail at the technology after Fig. 9, and other element processing steps all are same as Fig. 4 to first embodiment shown in Figure 9, so do not add to give unnecessary details.As shown in figure 14, after removing photoresist 400, utilize shallow isolating trough 322 and remaining hard mask layer 304 to come etch substrate 300, in a pair of adjacent active region 303, to form a deep trenches 522 and 523 respectively as etching mask.Please note, in second preferred embodiment, the present invention is an etching parameter of adjusting this etch process, with the shallow isolating trough 322 and the substrate 300 of while etching part, make etching finish deep trenches at 522,523 o'clock, shallow isolating trough 322 also is etched to rough and positions substrate 300 surperficial equal heights.
Next see also Figure 15, utilize doping processs such as arsenic silex glass (ASG) diffusion technique, ion injection or angled ion injection, the N+ that carries out high concentration in the surperficial sidewall and the substrate of bottom portion 300 of deep trenches 522,523 mixes, and forms a diffusion zone 524., again utilize technologies such as deposition, thermal oxidation, form a capacitance dielectric layer 526, for example the dielectric layer of silica-silicon-nitride and silicon oxide (ONO) etc. in the sidewall and the bottom of hard mask layer 304 and deep trenches 522 thereafter.In deep trenches 522, fill up a polysilicon layer 520 afterwards, utilize etch-back or chemico-mechanical polishing technologies such as (CMP) to remove the polysilicon layer 520 of part again, and make remaining polysilicon layer 520 still cover shallow isolating trough 322, in deep trenches 522,523, forming a capacitor lower electrode that is connected 528, and be a structure that is connected along the capacitor lower electrode of each deep trenches that is provided with on the Y direction.After removing hard mask layer 304, then carry out the logic process of standard again, in modes such as thermal oxidation or depositions in substrate 300 surfaces that expose and capacitor lower electrode 528 surface formation one gate dielectrics 700, as shown in figure 16.
See also Figure 17, on grid oxic horizon 700, form a polysilicon layer (not shown), and this polysilicon layer is defined grid structure 525 and 527 with photoetching and etch process.With grid structure 525 and 527 is mask, carries out a lightly doped drain 802 technologies.Next carry out the making of sidewall 803, and utilize grid structure 525,527 and sidewall 803 as mask, carry out heavy doping source electrode/drain electrode 804 ion implantation technologies, and this ion implantation technology also puts on the capacitor lower electrode that is connected 528 surfaces that cover shallow isolating trough 322.
Subsequently as shown in figure 18, carry out a self-aligned metal silicate technology (salicide), partition capacitance bottom electrode 528 surfaces with on grid structure 525,527, source/drain 804 and shallow isolating trough 322 form metal silicide layer 822,824,826,828 respectively.So far, finish the technology of the two capacitance stores unit of pair transistor.Deposit an interlayer dielectric layer (ILD) 808 at last again, and form bit line connector 806, source electrode 804 and other circuit are electrically connected, and the disclosed step of Figure 17 and Figure 18 is well known to those skilled in the art, so also do not add to give unnecessary details at this.
Compared to prior art, deep trenches pattern of the present invention only needs to utilize a directions X to aim at the elementary photomask of considering, form the many strip photoresists parallel and long edge Y direction is provided with, and cooperate the shallow isolating trough of palisade and each hard mask layer that is arrayed, can utilize active region the mode of deep trenches autoregistration (active to trench self-align) to be defined the position of each deep trenches required for the present invention.Being different from needs one to have in the photomask of irrigation canals and ditches pattern of array and define the irrigation canals and ditches array in the prior art; Need again then to utilize another to have the photomask of array STI pattern again, to form shallow isolating trough.Twice photomask that way provided by the present invention can avoid using aligning with directions X that high integration requires and Y direction to consider, and can avoid increasing by twice photomask in the possibility of exposing and step of developing is failed, and then simplify technology and improve the technology yield.
The above only is the preferred embodiments of the present invention, and all equalizations of doing according to claim of the present invention change and modify, and all should belong to covering scope of the present invention.
Claims (14)
1. method of making channel capacitor may further comprise the steps:
One substrate is provided, have a palisade shallow isolating trough and a plurality of active region of isolating on this substrate, and those active region surfaces is coated with a hard mask layer respectively by this shallow isolating trough;
On this substrate, form many parallel photoresists, cover this shallow isolating trough and the subregion of this hard mask layer respectively, to define the position of irrigation canals and ditches in respectively this active region between wantonly two adjacent those photoresists respectively;
Utilize those photoresists and those shallow isolating trough to come those hard mask layers of etching as mask;
Remove those photoresists;
Utilize those shallow isolating trough and those hard mask layers to come this substrate of etching, with in respectively forming irrigation canals and ditches respectively in this active region as mask; And
In those irrigation canals and ditches, form diffusion zone, a dielectric layer and a capacitor lower electrode respectively.
2. the method for making channel capacitor as claimed in claim 1, wherein respectively this active region all is long strip type zones, and its longer sides is along a directions X setting.
3. the method for making channel capacitor as claimed in claim 2, wherein those photoresists are to define out by an elementary photomask of strip that only needs this directions X to consider, and those parallel photoresists are all the strip photoresist that a long edge one Y direction is provided with.
4. the method for making channel capacitor as claimed in claim 3, wherein this photomask is that a self-aligned metal silicate stops photomask or diffused light mask.
5. the method for making channel capacitor as claimed in claim 1, wherein this hard mask layer comprises a silicon nitride layer.
6. method of making memory cell may further comprise the steps:
One substrate is provided, have a palisade shallow isolating trough and a plurality of active region of isolating on this substrate, and respectively this active region surface is coated with a hard mask layer respectively by this shallow isolating trough;
On this substrate, form many parallel photoresists, cover those active regions of part, be used to define respectively in this active region respectively the position of irrigation canals and ditches;
Carry out an etch process, utilize those shallow isolating trough and this hard mask layer to come this substrate of etching as mask, forming irrigation canals and ditches respectively in this substrate of this active region respectively, and this shallow isolating trough is etched to the rough height identical with substrate surface simultaneously;
Form a diffusion zone in the sidewall of those deep trenches and this substrate of bottom;
One capacitance dielectric layer is formed on sidewall and bottom in those irrigation canals and ditches;
In those irrigation canals and ditches, form a capacitor lower electrode; And
On this substrate, form a plurality of transistors, and those transistors are electrically connected with those electric capacity respectively.
7. the method for making memory cell as claimed in claim 6, wherein this active region is to be long strip type, and formation is arranged in parallel closely.
8. the method for making memory cell as claimed in claim 6, wherein this hard mask layer comprises a silicon nitride layer.
9. the method for making memory cell as claimed in claim 6, wherein the photoresist of this patterning is to define out by an elementary photomask of strip that only has directions X to consider.
10. the method for making memory cell as claimed in claim 9, wherein this photomask is a self-aligned metal silicate barrier layer photomask or diffused light mask.
11. the method for making memory cell as claimed in claim 6, wherein this mask also comprises this photoresist.
12. the method for making memory cell as claimed in claim 6, wherein those memory cell comprise that a pair of adjacent this active region and is arranged in the shallow isolating trough of this adjacent active region.
13. the method for making memory cell as claimed in claim 12, when wherein forming this capacitor lower electrode in the irrigation canals and ditches of those memory cell, this capacitor lower electrode covers those shallow isolating trough, and forms a pair of continuous capacitor lower electrode.
14. the method for making memory cell as claimed in claim 13 also provides a heavy doping drain electrode technology, when forming those transistorized source/drains, puts on the part upper surface of this capacitor lower electrode that covers shallow isolating trough.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200510106940A CN100590785C (en) | 2005-09-22 | 2005-09-22 | Channel capacitor and memory unit manufacturing method |
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| CN200510106940A CN100590785C (en) | 2005-09-22 | 2005-09-22 | Channel capacitor and memory unit manufacturing method |
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| CN1937170A true CN1937170A (en) | 2007-03-28 |
| CN100590785C CN100590785C (en) | 2010-02-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579261A (en) * | 2012-07-24 | 2014-02-12 | 中芯国际集成电路制造(上海)有限公司 | CMOS image sensor and manufacturing method thereof |
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2005
- 2005-09-22 CN CN200510106940A patent/CN100590785C/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103579261A (en) * | 2012-07-24 | 2014-02-12 | 中芯国际集成电路制造(上海)有限公司 | CMOS image sensor and manufacturing method thereof |
| CN103579261B (en) * | 2012-07-24 | 2016-09-21 | 中芯国际集成电路制造(上海)有限公司 | A kind of cmos image sensor and preparation method thereof |
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| Publication number | Publication date |
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| CN100590785C (en) | 2010-02-17 |
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