CN1937056A - Manufacturing method of optical disk and its manufacturing apparatus - Google Patents
Manufacturing method of optical disk and its manufacturing apparatus Download PDFInfo
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- CN1937056A CN1937056A CN 200610144773 CN200610144773A CN1937056A CN 1937056 A CN1937056 A CN 1937056A CN 200610144773 CN200610144773 CN 200610144773 CN 200610144773 A CN200610144773 A CN 200610144773A CN 1937056 A CN1937056 A CN 1937056A
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Abstract
A manufacturing method of an optical disk in which information recording layers are formed onto a resin layer laminated on a substrate surface. The substrate surface is coated with the resin layer. The substrate and a stamper are arranged into a vacuum chamber so that the resin layer surface and the stamper surface with concave/convex portions face almost in parallel. The chamber is set into an almost vacuum state while holding the facing state of the substrate and the stamper. The chamber is changed from the almost vacuum state to an atmospheric pressure or higher. The substrate and the stamper are overlaid. The stamper is pressed by a differential pressure between the almost vacuum pressure and the atmospheric pressure or higher, thereby adhering the substrate and the stamper and transferring the concave/convex portions to the resin layer. The resin layer with the transferred concave/convex portions is hardened.
Description
Technical field
The present invention relates to optic disc producing mehtod and optical disk manufacturing device, more specifically, relate to and be applied to optic disc producing mehtod and the manufacturing installation thereof that tool for example comprises the multiplayer optical disk of two or more information recording layers.
Background technology
In recent years, in field of optical discs, need the CD of big recording capacity.In order to realize big recording capacity, it is desirable to adopt multiplayer optical disk (referring to Patent Document JP-A-2003-91868) with a plurality of information recording layers.Wherein, the CD that comprises two information recording layers may obtain practical application at first.In read-only optical disc, form the reflectance coating of making by silver, aluminium etc.In CD-R, form the recording film of making by for example phase-change recording film etc.In this manual, reflectance coating or recording film are referred to as information recording layer.
High density compact disc single-surface single-layer capacity is about 25 Gbyte, and perhaps the single-surface double-layer capacity is about 50Gbyte.In order to reduce to write down or reproduce the diameter of luminous point, for example the wavelength of light source is set to 405nm, and the numerical aperture NA of objective lens is set to bigger value 0.85.
Comprising two information recording layers and from the high density compact disc of CD one side sense information, incident direction from laser beam, in the degree of depth is that the position of 0.1mm (100 microns) forms as the L0 layer of information recording layer as with reference to layer, and is that the position of 75 μ m forms L1 layer as information recording layer as extra play in the degree of depth.
In the step of making the above-mentioned CD that comprises two information recording layers, at first, when substrate forms, on a principal plane of substrate, form the jog of L0 layer, on the L0 layer, form the middle layer of making, and on this middle layer, form the jog of L1 layer by uv-hardening resin.In read-only optical disc, form recessed/convex portion of being modulated according to information to be recorded.In CD-R, form according to the information that has write down earlier recessed/convex portion of being modulated such as address, spiral groove for example.
Recessed/the convex portion of L1 layer is by pushing pressing mold and forming at the pressed state irradiation ultraviolet radiation to the middle layer.In the middle of following introduction, uv-hardening resin is called as " UV resin ".
Formation method as the recessed/convex portion of L1 layer in the prior art has proposed, for example, and roller pressure bonding method, rotation bonding method, pad engage pressure-pressure degassing method, vacuum bonding method or the like.
Figure 10 A has represented the example of the formation method of the recessed/convex portion of L1 layer in the prior art to 10D.Figure 10 A has represented the printing transferring method according to the middle layer of roller pressure bonding method.In the roller pressure bonding method, at first, the surface of substrate 101a is coated with one deck UV resin 102a by using as dripping cloth method or silk screen print method.
Subsequently, pressing mold 103a is coated on the UV resin 102a.Use roll body 104 on substrate 101a, to push pressing mold 103a as press tool.Like this, the recessed/convex portion on the pressing mold 103a just is transferred on the UV resin 102a as the middle layer.Afterwards, use ultraviolet radiator (UV radiator) U to UV resin 102a irradiation, UV resin 102a hardening.
According to the roller pressure bonding method, if use low viscous resin, what keep film thickness evenly is very difficult.In addition, also often externally marginal position the resin burr appears.And in the situation of using high viscosity resins or PSA (presser sensor binder), owing to be easy to gather bubble, the pressure that therefore strengthens roll body is very necessary.
Figure 10 B represents to form according to the rotation bonding method method of the recessed/convex portion of L1 layer.Shown in Figure 10 B, according to this formation method, at first, liquid resin 102b is filled between pressing mold 103b and the substrate 101b.
When rotary substrate 101b, insert resin 102b.Insert after the resin 102b, use UV radiator U irradiation ultraviolet radiation so that resin 102b hardening.Like this, pressing mold 103b's recessed/convex portion just has been transferred on the middle layer.
According to the rotation bonding method, resin 102b can be filled better equably.But seepage of resin produces some burrs to the part of external margin, and more and more.In addition, the problem that also exists pressing mold 103b to be difficult to peel off.
Figure 10 C represents to fill up engage pressure-pressure degassing method (pad pressure bonding-pressuredegassing method).According to pad engage pressure-pressure degassing method, at first, the surface of substrate 101c is coated with last layer PSA 102c in advance.Pressing mold 103c is coated on the substrate 101c.Pressing mold 103c is exerted pressure as press tool by pressure pad 106.In addition, by the pressure among the chamber P that exerts pressure the transfer printing performance is further improved, pressing mold 103c's recessed/convex portion is transferred on the PSA 102c thus.
Pad engage pressure-pressure degassing method has such advantage, and by exerting pressure, the bubble of generation is small.But according to pad engage pressure-pressure degassing method, small bubble is diffused in the UV resin 102d gradually.If under atmospheric pressure use such CD, because small air bubble expansion, the problem that recording film etc. causes CD quality to descend will appear for example corroding.
Figure 10 D represents the vacuum bonding method.According to the vacuum bonding method, by the pressure pad 107 among the vacuum chamber T that is found time as shown by arrow D, pressing mold 103d is bonded to substrate 101d and goes up on the flat UV resin 102d that is coated with.Therefore, pressing mold 103d's recessed/convex portion just is transferred on the UV resin 102d.Afterwards, use the ultraviolet ray irradiation UV resin 102d of UV radiator U, resin 102d hardening.
According to the vacuum bonding method, by pushing pressing mold 103d in a vacuum on the UV resin 102d that is coated with on the substrate 101d, recessed/convex portion of pressing mold 103d just has been transferred, and therefore, can reduce the bubble of formation.But, following problem is arranged.
Figure 11 A has represented the detailed process of vacuum bonding method to 11F.Shown in Figure 11 A, in the substrate forming step, on the principal plane of substrate 101d, form recessed/convex portion by injection moulding.
Subsequently, on substrate, form reflectance coating or recording film as information recording layer.In the film formed step of information recording layer, shown in Figure 11 B, in vacuum chamber T, on the recessed/convex portion of substrate, form the information recording layer 111 of form membrane by for example sputtering method.In the drawings, S represents the incident direction of sputter atom.
Subsequently, in the step of coating UV resin, shown in Figure 11 C, be coated with flat UV resin 102d by spin-coating method.At this moment, for the thickness of the membrane coat on the homogenizing CD radial direction, when using IR lamp I the edge is to outside edge illumination infrared ray internally, carry out the coating process.
Subsequently, in the transfer step of recessed/convex portion, as shown in Figure 11 D, transparent resin pressing mold 103d is configured in the face of under the state of UV resin 102d in vacuum chamber T, and by exerting pressure from last direction pressing mold 103d, pressing mold 103d bonds to UV resin 102d.
Subsequently, shown in Figure 11 E, pressing mold 103d keeps by bonding state, uses the top irradiation UV resin 102d of UV radiator U ultraviolet ray from substrate 101d, so UV resin 102d sclerosis.Afterwards, as shown by arrows, pressing mold 103d peels off from substrate 101d.So, as shown in Figure 11 F, the recessed/convex portion of pressing mold just is needed on the UV resin 102d as the middle layer.
After placing pressing mold 103d and substrate 101d as mentioned above, for example push pressing mold 103d as press tool with center sleeve 121.Two rank centring pin 122 moves down.Pressing mold 103d is pressed to UV resin 102d.Recessed/convex portion of pressing mold 103d just is transferred to UV resin 102d and has gone up.
According to aforesaid vacuum adhering method, the number of bubbles that forms during transfer printing can reduce.But, when pressing mold 103d is bonded on the substrate 101d,, therefore be difficult to guarantee to stop the formation of bubble because according to the relative deformation form of pressing mold 103d with respect to the shape of substrate 101d, there are various access methods in bubble.
For example, as shown in FIG. 13A, if device is in such state, that is, internally the marginal portion with almost be simultaneously from outer edge portion to the bonding progress of center section, form power in the direction shown in the arrow 140a among the figure.Therefore, will form bubble 141a at the center section of CD 131a, shown in Figure 13 B.
If be simultaneously by bonding on the surface of the surface of pressing mold 103d and UV resin 102d, shown in Figure 14 A, the direction shown in arrow 140b forms power.That is to say that power is in directive effect arbitrarily.Therefore, as shown in Figure 14B, bubble 141b just forms at random in CD 131b and assembles.The state of bubble 141b is the similar netted state of bubble 142.
Furtherly, shown in Figure 15 A, bubble 141c also is because the distortion of pressing mold 103d produces.In this case, because air is easy to enter from the external margin of CD, so bubble 141c will form on whole CD 131c, shown in Figure 15 B.
In addition on the one hand, a kind of situation is arranged, couple so can act on the direction shown in the arrow 140d among Figure 16 A, and bubble only forms at outermost one lateral margin of CD 131d, and the formation of bubble can be suppressed, shown in Figure 16 B.In this case, because the center section of UV resin 102d is crooked, so pressing mold 103d contacts with the surface of UV resin 102d, and almost be simultaneously to the bonding of inner marginal portion with from the centre part to bonding the carrying out of outer edge portion from the centre part.
Yet, in the vacuum bonding method, be accidental the appearance for the operation that can suppress the pressing mold shown in Figure 16 A that bubble produces, lack repeatability, stably provide high-quality CD with regard to being difficult to guarantee to suppress the generation of bubble so.
Summary of the invention
Therefore, need provide a kind of optic disc producing mehtod and manufacturing installation, stably provide high-quality CD by using this method and apparatus can guarantee to suppress the generation of bubble.
According to one embodiment of present invention, provide a kind of optic disc producing mehtod, stacked one deck resin bed on the surface of substrate forms information recording layer on this layer in the method, and it may further comprise the steps:
Surface coated resin bed at substrate;
Substrate and pressing mold are placed in the chamber, make that a surface that is formed with recessed/convex portion on its of surface of resin bed and pressing mold is almost relative abreast;
Keep the state of substrate face, this chamber is set at the almost state of vacuum to pressing mold;
This chamber is transformed into from vacuum state equals atmospheric pressure or be higher than atmospheric state, stacked substrate and pressing mold, utilize the pressure reduction between the described pressure that is greater than or equal under atmospheric pressure and the vacuum state, push described pressing mold, thereby bonding substrate and pressing mold also are transferred to resin bed with recessed/convex portion; And
The resin bed sclerosis of the recessed/convex portion that makes transfer printing.
According to another embodiment of the invention, provide a kind of optical disk manufacturing device, having comprised:
Bracing or strutting arrangement, the substrate and the pressing mold of resin bed that be used in a chamber having kept a surface coated makes that a surface that has formed recessed/convex portion on its of resin bed and pressing mold is relative; And
Under the relative status that keeps substrate and pressing mold, control device is set at the almost state of vacuum with this chamber, and this chamber is changed into from vacuum state equal atmospheric pressure or be higher than atmospheric state,
Wherein, cancel the hold mode of pressing mold and substrate simultaneously by changing atmospheric pressure, make substrate and pressing mold stacked, and by the pressure under the vacuum state almost and equal or the pressure reduction that is higher than between the atmospheric pressure is pushed pressing mold, substrate and pressing mold are bonded together and recessed/convex portion is transferred to resin bed.
According to embodiments of the invention, when pressing mold recessed/when convex portion is transferred to the middle layer, can guarantee to be suppressed bubble.
Additional features of the present invention and advantage manifest in following description and accompanying drawing, and wherein, identical in the accompanying drawings reference marker is represented identical or similar parts.
Description of drawings
Fig. 1 is a sectional view, has represented the example of a kind of compact disk structure according to an embodiment of the invention;
Fig. 2 A is the synoptic diagram that summary illustrates optic disc producing mehtod according to an embodiment of the invention to 2L;
Fig. 3 A is the synoptic diagram that summary illustrates the transfer process of pressure reduction laminating to 3C;
Fig. 4 A is the synoptic diagram that summary illustrates a more detailed example of pressure reduction laminater and recessed/convex portion formation step to 4B;
Fig. 5 A is that summary illustrates pressure reduction laminater and the synoptic diagram of a more detailed example of this recessed/convex portion formation step to 5B;
Fig. 6 illustrates the synoptic diagram of the operation of device when pressing mold is peeled off for summary;
Fig. 7 A is that summary illustrates the synoptic diagram that uses crooked pressing mold to carry out transfer printing to 7B;
Fig. 8 A is a synoptic diagram to 8B, is used for explaining forcing the pressure reduction laminating that increases;
Fig. 9 is a sectional view, and expression is according to the example of another CD of the embodiment of the invention;
Figure 10 A to 10D be summary illustrate L1 layer in the prior art recessed/synoptic diagram of an example of convex portion formation method;
Figure 11 A is a synoptic diagram to 11F, and summary illustrates the detailed process in the vacuum bonding method;
Figure 12 is a synoptic diagram, and pressing mold is by the layout before bonding in recessed/convex portion transfer step that summary is illustrated in;
Figure 13 A and 13B are synoptic diagram, are used for explaining the example that bubble forms;
Figure 14 A and 14B are synoptic diagram, are used for explaining the another one example that bubble forms;
Figure 15 A and 15B are synoptic diagram, are used for further explaining the another one example that bubble forms;
Figure 16 A and 16B are synoptic diagram, are used for explaining the example that does not have bubble to form.
Embodiment
Describe one embodiment of the present of invention hereinafter with reference to the accompanying drawings.Describe a kind of high density compact disc with reference to accompanying drawing 1, this CD adopts manufacture method manufacturing according to an embodiment of the invention.
In this CD, by writing down and generating information and signal to information recording layer from protective seam 15 1 side illuminating laser beams.For example, the wavelength of this laser beam be 400nm to 410nm, be that 0.84 to 0.86 object lens 16 converge at a bit by numerical aperture, and from L0 layer or the L1 layer of protective seam 15 1 sides irradiation as information recording layer, thus record or generating information and signal.
This high density compact disc has such structure, that is, L0 layer, middle layer 12, L1 layer and protective seam 15 sequentially are stacked on the substrate 11.Protective seam 15 for example is that the adhesive linkage 13 of 15 μ m and thickness form for for example polycarbonate sheet 14 of 60 μ m (hereinafter, being abbreviated as PC) by thickness.
The material of making as substrate 11 can use resin material, for example polycarbonate resin, polyolefin resin, acryl resin etc. or glass.Consider that from viewpoints such as costs it is very suitable using resin material.As resinous material, can use for example cyclenes condensate (" ZEONOR ", registered trademark) or PC.
The not special restriction of the forming method of substrate 11 is as long as can obtain the substrate that has desirable shape and have the flat surface of suitable optical property by this method.For example, can use injection moulding (injection) or utilize photoresist (2P method) method of ultraviolet hardening resin.
Each information recording layer of L0 layer and L1 layer all be one deck be formed at on-chip recessed/reflectance coating or the recording film of convex portion.If CD is a read-only optical disc, for example, this reflectance coating is made up of gold (Au), silver (Ag), silver alloy, aluminium (A1), aluminium alloy etc.If CD is the CD of a writable disposable, form recording film by the stacked for example reflectance coating of order with by the recording layer that organic color material is made.If CD is repeatedly a writing optical disk, for example, layer insulating forms a recording film on the insulation course by an order stacked reflectance coating, a lower floor, the phase change recording layers and.
Use adhesive linkage and PC sheet, UV resin or UV resin and PC sheet as protective seam 15.The thickness of protective seam 15 is for example about 75 μ m.For example, protective seam 15 is that the PC sheet 14 that 15 microns adhesive linkage 13 and thickness are 60 μ m is made by thickness.
To optic disc producing mehtod be described according to embodiments of the invention now.Fig. 2 A has represented to make the high density compact disc manufacture method according to the embodiment of the invention to the 2L synoptic diagram.At first, shown in Fig. 2 A, when substrate 1 was rotated, liquid UV resin 2 dropped onto near the center of the L0 layer that forms on the principal plane of substrate 1 part by UV feeder 4.
By splashing into UV resin 2 when the rotary substrate 1, UV resin 2 is subjected to centrifugal action.UV resin 2 scatters to outer edge portion from the centre part on substrate equably, and like this, the surface of substrate 1 is just by the flat one deck UV resin 2 that has been coated with.
In this case, shown in Fig. 2 B, by using for example ultraviolet radiator (UV radiator) U, ultraviolet luminous point can shine outermost edge and partly locate.By light spot outermost edge part, the flowability of UV resin 2 can be raised, and so just can stop outermost edge part thickening, and can guarantee the even of thickness.
The method of coating UV resin 2 not only is confined to spin-coating method, can also use additive method.Definite says, for example, can use roll-in coating, mold pressing coating, dip coated, splash coating, cast methods such as (casting).
Subsequently, as shown in Fig. 2 C, when operating means with IR (infrared ray) lamp I internally the edge when external margin moves, infrared radiation UV resin 2.By above-mentioned infrared radiation, the Temperature Distribution of optical disc surface and UV resin changes, so temperature raises to external margin at the edge internally, and viscosity can be controlled, makes the homogeneity of thickness of UV resin 2 to get a promotion.
Subsequently, shown in Fig. 2 D, use the ultraviolet ray irradiation UV resin 2 of UV radiator U.In this case, regulate ultraviolet irradiation intensity and irradiation time, make UV resin 2 be in the unhardened state of UV resin 2 micropetrosises.
Subsequently, shown in Fig. 2 E, under semi-harden state, pressing mold 5 is pressed against on the UV resin 2.Pressing mold 5 is for example by the molded transparent resin pressing mold that forms of the transparent resin with light transmission features (as ZEONOR (registered trademark)), and has been formed for the recessed/convex portion of transfer printing on the pressing mold principal plane.
By pushing pressing mold 5 under the semi-harden state on UV resin 2, the recessed/convex portion of pressing mold 5 is transferred on the UV resin 2, and forms recessed/convex portion on the principal plane of UV resin 2.In this embodiment, by using vacuum state almost and being equal to, or greater than the method (hereinafter, being called the pressure reduction laminating) of the pressure reduction between the atmospheric state, pressing mold 5 is pressed against on the UV resin 2, and transfer printing recessed/the convex portion pattern.
According to the pressure reduction laminating, shown in Fig. 2 E, air to be extracted out as shown by arrow D among the vacuum chamber T that forms by the use vacuum pump, pressing mold 5 keeps semi-harden states and relative with UV resin 2.Vacuum chamber T inside is set as vacuum, and pressing mold 5 also is set to vacuum with UV resin 2 relative interval enclosure spaces, for example 50Pa (Pascal).
Subsequently, because vacuum state is destroyed, and make atmospheric pressure be applied to pressing mold 5 from as shown by arrow A upper position.Pressing mold 5 is pressed against on the UV resin 2 and by UV resin 2 and substrate 1 and bonds together.Therefore, pressing mold 5 recessed/convex portion is transferred on the UV resin 2 as the middle layer.Because standard atmospheric pressure equals 101325Pa, the air pressure of 101275Pa (=101325Pa-50Pa) be applied to downwards on the pressing mold 5 as shown by arrow A.Push pressing mold 5 with about 2000 times pressure.In atmospheric scope, pressure changed in certain leading time in vacuum.
Subsequently, shown in Fig. 2 F, when pressing mold 5 is bonded to state on the UV resin 2, with the ultraviolet ray irradiation UV resin 2 of UV radiator U.Like this, the UV resin 2 that is formed with recessed/convex portion has just hardened fully.Afterwards, shown in Fig. 2 G, pressing mold 5 is peeled off from UV resin 2.Therefore just on UV resin 2, formed recessed/convex portion, shown in Fig. 2 H.As mentioned above, on UV resin bed 2, formed recessed/convex portion by the pressure reduction laminating as the middle layer.
Subsequently, shown in Fig. 2 I, in vacuum chamber T, on recessed/convex portion, form recording film, reflectance coating etc. by for example sputtering method.Arrow S among the figure has represented the incident direction of sputter atom.But according to reproduction pattern CD, WORM or can write type CD, the recording film that on recessed/convex portion, forms, reflectance coating etc. repeatedly.Each CD has different membrane structures.
Subsequently, shown in Fig. 2 J, the recording film of formation or the surface of reflectance coating are coated with last layer nurse tree fat 3 as protective seam by UV resin feeding device 4.Use spin-coating method to be used for coating.As mentioned above, form protective seam by bonding PC sheet 14.
Subsequently, shown in Fig. 2 K, when substrate 1 rotation, when the edge moves to external margin internally with IR radiator I,, protect the flatness of resin 3 to be improved thus with the infrared radiation protection resin 3 of IR radiator I.
Subsequently, shown in Fig. 2 L, by using the ultraviolet light irradiation protection resin 3 of UV radiator U, protection resin 3 has just hardened fully.Produce high density compact disc thus according to the embodiment of the invention.
To 3C aforesaid pressure reduction laminating be described according to Fig. 3 A now.As shown in Figure 3A, the middle opening that forms the transparent resin pressing mold 5 of recessed/convex portion on a main plane is coupled to the minor radius part of front end of the centring pin of the supporting mechanism 22 that constitutes the internal edge side.The external margin of pressing mold 5 is supported by the supporting mechanism 23 of external margin side.Centring pin passes the central opening place of the flat substrate 1 that has been coated with UV resin 2 and protruding upward.Substrate 1 is placed on the fixed station and (does not express among the figure).Pressing mold 5 is supported by the supporting mechanism 23 of the supporting mechanism 22 of internal edge side and external margin side, thus pressing mold 5 apart from substrate 1 preset distance, and a principal plane of pressing mold 5 is almost parallel relative with a principal plane of substrate 1.
When the relative state that keeps pressing mold 5 and substrate 1, they for example are set in the vacuum chamber (not shown), and afterwards, vacuum chamber is evacuated by vacuum pump.Vacuum chamber for example is pumped down to and 5 arrives 500Pa, and preferably is 5 to 200Pa.Internal vacuum chamber, substrate 1 all is set to vacuum state with pressing mold 5 intervals respect to one another.
Subsequently, shown in Fig. 3 B, the destroyed and vacuum chamber of the vacuum in vacuum chamber is released to atmospheric pressure following time, exerts pressure by the enclosure space that the pressure reduction between vacuum and the atmospheric pressure forms between substrate 1 and pressing mold 5.When pressing mold 5 produced deformation, pressing mold 5 was pressed against on the UV resin 2.Shown in Fig. 3 c, substrate 1 and pressing mold 5 bond together by UV resin 2.
When vacuum is destroyed, and be released under the atmospheric pressure side by side, keep the supporting mechanism of spacing between pressing mold 5 and the substrate 1 no longer to support.Because supporting mechanism no longer supports and be released to synchronous atmospheric pressure under, pressing mold 5 center sections are bonded on the substrate 1 with being bent downwardly.When the center section of pressing mold 5 was bent downwardly, substrate 1 can side by side be carried out the support on both direction, that is to say bonding and bonding can the execution simultaneously from the centre part to outer edge portion of part from the centre part to internal edge.Therefore, gathering of bubble can be stoped, and seldom bonding of burr that outer edge portion forms can be obtained.
By the bonding agency 22 of control pressing mold 5 internal edge sides and the supporting mechanism 23 of external margin side, supporting mechanism is no longer supported.For example, the control supporting mechanism makes and is released under the atmospheric pressure synchronously at a predetermined velocity (for example 2mm/sec) bonding agency 22 of (direction shown in arrow 24a) mobile internal edge part and bonding agency 23 of outer edge portion downwards simultaneously.The bonding agency 22 of internal edge part is pressed downward by centring pin pressing mechanism 26.The bonding agency 23 of outer edge portion is pressed downward by external margin pressure rings pressing mechanism 27.
By control as mentioned above, the center section of pressing mold 5 is bent downwardly and contacts with UV resin 2.Afterwards, pressing mold 5 is bonding with substrate 1.State and the bonding substrate 1 and the pressing mold 5 of the center section bending by forming pressing mold 5, the middle edge side part and the external margin side part while of substrate 1 are bonding, and can reduce the generation of bubble.
Can realize the little adhering state of burr that the CD outer edge portion produces.Furtherly, if sneak into bubble, because gas is sneaked into bubbles volume so and just reduced by vacuum as shown in arrow 25 and the compression of the pressure reduction between the atmospheric pressure.Therefore, can apply under the dysgenic situation, make high density compact disc in efficient not to the recoding/reproduction signal.
For example, because atmospheric pressure equals 101325Pa,, can offer the about 2000 times pressure of pressing mold 5 by for example approximately vacuum pressure of 50Pa and the pressure reduction between the atmospheric pressure.Therefore, even bubble is mixed between pressing mold 5 and the substrate 1,, the recording of signal there is not harmful effect because bubbles volume reduces to original 1/2000.
What will particularly point out here is, for example, if there is the bubble of diameter 30 μ m to enter in the gap between pressing mold 5 and the substrate 1, its diameter is because differential pressure action is reduced to 2.5 μ m.Therefore, can apply under the dysgenic situation, make high density compact disc in efficient not to the recoding/reproduction signal.
In an embodiment of the present invention, vacuum chamber is atmospheric state from the state-transition of vacuum almost.Furtherly, the invention is not restricted to atmospheric pressure, vacuum chamber can be forced to be pressurized to atmospheric pressure or higher pressure.In this case, owing to produced bigger pressure, the bubbles volume that enters just can reduce more.
Fig. 4 A and 4B, 5A and 5B and 6 have represented that pressure reduction laminater and recessed/convex portion form the more detailed topology example of the mode of operation of step.Reference numeral 30 has been represented the substrate of CD, and Reference numeral 40 has been represented transparent resin moulding-die.Pressure reduction laminater is by constituting with lower member: be used for the air vent 31 that vacuum-evacuate and air pass in and out this device; Liftable centring pin pressing mechanism 32; Liftable external margin pressure rings pressing mechanism 33; Prop up the external margin ring 34 of the outer edge portion of bulging dies 40; Prop up the centring pin 35 of the core of bulging dies 40; Seal the O annular 36 of this vacuum chamber; Push the external margin pressure rings 38 of the external margin of pressing mold 40.
At first, Fig. 4 A represented the surface of coating UV resin of substrate 30 of CD and pressing mold 40 formation the surface of recessed/convex portion be arranged to that the two is relative and begin step that vacuum chamber is found time.The center pit of pressing mold 40 is coupled to the step portion of small diameter portion of the front end of centring pin 35.The applied compact disc substrate 30 of going up the UV resin is placed on the brace table of CD shape, and centring pin 35 passes the central opening of compact disc substrate 30.Come the centre of location and relative distance is set by the centring pin 35 that has step portion.For can be more easily bonding and peel off pressing mold 40 and compact disc substrate 30, the outer dia of pressing mold 40 be configured to more slightly bigger than compact disc substrate 30.In order to bleed, make the inside of vacuum chamber become vacuum from bent hole 31 suction airs by the direction shown in arrow 37a.
Subsequently, shown in Fig. 4 B, by moving down centring pin pressing mechanism 32 and external margin pressure rings pressing mechanism 33 presses down centring pin 35 and external margin ring 34.By so downward operation, pressing mold 40 is moved to the centre position more lower slightly than initial position.Afterwards, air is by injecting vacuum chamber in the bent hole 31, thereby begins to be released under the atmospheric pressure.
Subsequently, shown in Fig. 5 A, when air when the direction of hole 31 shown in arrow 37b of bending is passed to vacuum chamber, vacuum chamber is released under the atmospheric pressure and has just finished, the pressure in the vacuum chamber has just become atmospheric pressure.Produce the power of pushing pressing mold 40 by the pressure reduction between vacuum and the atmospheric pressure.Pressing mold 40 just bonds on the substrate 30, and recessed/convex portion is transferred on the UV resin of coating on the substrate 30 as the middle layer.
Subsequently, shown in Fig. 5 B, the bottom of device is moved downward, and takes out substrate 30 and the pressing mold 40 that is bonded together by vacuum from vacuum chamber.Afterwards, by pressing mold 40 irradiation ultraviolet radiations, the UV resin hardens fully, and pressing mold 40 is peeled off from substrate 30, and is for example shown in Figure 6.
Fig. 6 has represented the operation of the device when pressing mold is stripped from.Fig. 6 is that pressing mold 40 and substrate 30 are by the partial enlarged drawing of the pressure reduction laminater that obtains after bonding.As shown in Figure 6, the outer dia partial design of pressing mold 40 becomes projection to exceed external margin ring 34.By the mobile external margin ring 34 of direction as shown in arrow 41 (direction that makes progress), pressing mold 40 is peeled off from substrate 30.Thus, can on middle layer stacked on the substrate 30, form recessed/convex portion.
Although what use in above example is the pressing mold that has an even surface, for example recessed/convex portion also can be by crooked pressing mold transfer printing.Fig. 7 A and 7B have represented to use the transfer printing of crooked pressing mold.
Shown in Fig. 7 A and 7B, when using 40 ' time of curved stamp, pressure direction as shown in arrow 52 push pressing mold 40 ', so pressing mold 40 ' and the substrate 30 that scribbles UV resin 50 just be bonded in together.
Like this, can control this device, only make that externally the marginal portion produces bubble 53, and can produce high density compact disc 10 with good record and reproducing characteristic.Curved stamp 40 ' can make by the mold condition of controlling when injection-molded.
According to use crooked pressing mold 40 ' formations recessed/step of convex portion, when carrying out the pressure reduction lamination, pressing mold and substrate can be easy to be designed to locate in position suppressing the generation of bubble, so can simplified structure.
That is to say, marginal portion externally, because at the pressing mold 40 of bending ' and the similar O shape ring of UV resin 50 effects of the part that contacts with each other of substrate 30, therefore only centring pin 35 by two-stage is provided and closed center pit in all carrying out surely to pressing mold and substrate the time, pressing mold and substrate can only be positioned at the suitable position that suppresses the bubble generation.
By be released to the pressure reduction lamination that causes under the atmospheric pressure centring pin 35 that moves down synchronously as shown in arrow 51, curved stamp 40 ' with substrate 30 bonds together and does not produce bubble, can not apply harmful effect on record and reproducing characteristic thus.
Be released under the atmospheric pressure although carried out from vacuum state according to pressure reduction laminating mentioned above, also can force to be forced into to be equal to or greater than atmospheric pressure, be released under the atmospheric pressure with replacement with pressurized air (also can use other gas that is different from air) introducing vacuum chamber and by air pressure.As pressure gas, can use in the air pressure system that factory etc. uses approximately in isobaric air (10 to 3kg/cm
2) or low-pressure air (3kg/cm
2Perhaps lower).Pressurized air produces by compressor, is collected in jar or the similar containers, and offers pressure reduction laminater by devices such as pipeline, operation valves.
Also can realize by the pressure reduction laminating that realizes more than or equal to atmospheric air pressure by multistep, and with above-mentioned to be released to the used device of pressure reduction laminating under the atmospheric pressure similar.With reference to the pressure reduction laminater shown in Fig. 8 A and the 8B pressurization pressure reduction laminating is described.In the device shown in Fig. 8 A and the 8B, be similar to those at Fig. 4 A, 4B, 5A points out with identical Reference numeral with the 5B ingredient.
In Fig. 8 A and 8B, vacuum chamber has the air vent 31a that is used for bleeding, the air vent 31b that pressure is exerted pressure and valve 45a and the 45b that is used for opening and closing this air vent.For vacuum suction and exerting pressure, also can a shared air vent, and by controlling the outside valve conversion vacuum suction step and the step of exerting pressure.
At first, compact disc substrate 30 has by the flat L0 layer that has been coated with the UV resin, and shown in Fig. 8 A, is designed to recessed/convex portion formation face relative of resin-coated of the UV of compact disc substrate 30 and pressing mold 40.The center pit of pressing mold 40 is coupled to the step portion of small diameter portion of the front end of centring pin 35.The compact disc substrate 30 of applied UV resin is placed on the brace table of CD shape, and centring pin 35 passes the center pit of compact disc substrate 30.
The outer dia of pressing mold 40 is set to than compact disc substrate 30 and gets a little greatly.Recessed/convex portion is pre-formed on pressing mold, make recessed/convex portion the formation surface down.Pressing mold 40 is placed in the vacuum chamber and through vacuum suction.Vacuum suction is by opening valve 45a, shut-off valve 45b, realizing from air vent 31a exhaust from the direction shown in arrow 37a.
Subsequently, by moving down centring pin pressing mechanism 32 and external margin pressure rings pressing mechanism 33 is pushed centring pin 35 and external margin ring 34.By so downward pressing operation, pressing mold 40 is moved to the centre position more lower slightly than initial position.The pressing mold 40 of as shown in Figure 7A and 7B use bending ' situation in, crooked pressing mold 40 ' be moved up to pressing mold 40 ' the outer edge portion and the outer edge portion of compact disc substrate 30 contact with each other by the UV resin and be in the same place.
Subsequently, shown in Fig. 8 B, valve 45a is closed and valve 45b is opened, therefore destroyed the vacuum of vacuum chamber and also make pressurized air on as the direction of arrow 37c by air vent 31b inflow vacuum chamber.Pressing mold 40 and compact disc substrate 30 are forced to exert pressure to bond together by pressurized air.Use crooked pressing mold 40 ' situation in, crooked pressing mold 40 ' and compact disc substrate 30 between the enclosure space that forms between exerting pressure by vacuum and pressure pressure reduction and pressurized, this crooked pressing mold 40 ' distortion and by bonding.Be synchronized with the operation of exerting pressure, the supporting mechanism that props up bulging dies 40 and compact disc substrate 30 with suitable spacing is released.That is to say that centring pin 35 moves down at a predetermined velocity.
In this case, shown in Fig. 8 B, the reclinate state of the center section of pressing mold 40 is by the mechanism controls of the mechanism of the mechanism of the internal edge part of bulging dies 40, bulging dies 40 outer edge portion and mobile pressing mold 40.When the center section of pressing mold 40 was bent downwardly, compact disc substrate 30 was implemented on the both direction simultaneously bonding, that is to say, can carry out marginal portion internally simultaneously to the bonding of center section direction and bonding from the centre part to outer edge portion.Therefore, gathering of bubble can be prevented from, and can realize little bonding of burr that outer edge portion produces.Recessed/convex portion is transferred to as the middle layer and is coated on the UV resin on the substrate 30.Carry out compressed-air actuated exerting pressure at short notice.After pressing mold 40 and substrate 30 were bonded together fully, vacuum chamber was by air vent 31a or air vent 31b are released to atmosphere at least.
Subsequently, the bottom of device moves down, and takes away from vacuum chamber by vacuum bonding substrate 30 and pressing mold 40.Afterwards, by pressing mold 40 irradiation ultraviolet radiations, the UV resin is hardened fully.Subsequently, pressing mold 40 is peeled off from substrate 30.
Can after bonding, not be released to atmospheric pressure yet but under the state that keeps exerting pressure irradiation ultraviolet radiation.
As mentioned above,, can use the pressure of 6000 times 300000Pa of the pressure of 50Pa from the state of vacuum (for example 50Pa) almost if use pressurized air, so just can be so that the bubble of sneaking into can reduce to 1/6000.Can provide very big pressure rapidly in the ruined initial period of vacuum.Compare with being released to atmosphere, can stop bonding badly like this, can carry out bonding firm and preferablyly.
Although embodiments of the invention have been described about comprising that order is coated on the high density compact disc of on-chip L0 layer, middle layer, L1 layer and protective seam, the present invention is not limited to such example.For example, as shown in Figure 9, this invention also can provide a kind of like this compact disk structure, that is, order is coated with first substrate 61, L1 layer, middle layer 62, L0 layer and second substrate 63.Each makes first substrate 61 and second substrate 63 by for example PC.Middle layer 62 is made by for example UV resin of 50 μ m thickness.
CD as shown in Figure 9, the record of information signal and reproducing by for example by carrying out to the information recording layer illuminating laser beam from second substrate 63.For example, by assembled wavelength by the object lens 64 of 0.64 to 0.66 numerical aperture be 650 to 665nm laser beam and shine record and the reproduction that realizes information signal as the L0 layer and the L1 layer of information recording layer from second substrate, 63 1 sides.
Although embodiments of the invention have carried out detailed description above, the present invention is not limited in embodiments of the invention mentioned above, but may have many correction and distortion that do not break away from inventive concept of the present invention.For example, the present invention also can provide such a case, and pressing mold is made of metal for example nickel.If information recording layer is a recording film, since light tight, be exactly very necessary with hardening resin therefore by the transparent stamper irradiation ultraviolet radiation.But,, because printing opacity slightly only, therefore can be used for the ultraviolet ray of hardening resin from the irradiation of substrate one side if information recording layer is a reflectance coating.In this case, pressing mold just needn't have light transmission.
Although the description of embodiments of the invention is relevant with the CD of two information recording layers, the present invention also can be applied to the CD of the information recording layer of three or more.Use method of the present invention also may not having on substrate, to form transfer printing layer under the situation of signal, and form the CD that has only one deck information recording layer.Though and by method of the present invention also may have comprise signal recessed/layer of convex portion do not have to form transfer printing layer under the situation of reflection horizon and recording film on transparent substrate, and forms the CD that has only one deck information recording layer.The CD that for example, can have one deck information recording layer by manufacturings such as the substrate that recycles defective signal transfer printing performance, remaining substrates.
It will be understood by those skilled in the art that because the various modifications that design needs or other factors are done, combination, sub-combination and change all drop in the protection domain of claims of the present invention or equivalent.
The application statement enjoy on August 30th, 2006 JP2005-249379 number application of day local exchange application and on May 24th, 2006 right of priority in JP2006-143766 number application of day local exchange application, at this in full as a reference with it.
Claims (12)
1. optic disc producing mehtod, this CD has the information recording layer that is formed on the resin bed that is laminated on the substrate surface, and this method may further comprise the steps:
The described resin bed of coating on described substrate surface;
Described substrate and pressing mold are positioned in the chamber, make that a surface that is formed with recessed/convex portion of surface of described resin bed and pressing mold is almost relative abreast;
Keeping under the described substrate state relative described chamber being set at the almost state of vacuum with described pressing mold;
Described chamber is changed over the atmospheric state that is equal to, or greater than from the state of described almost vacuum, stacked described substrate and described pressing mold, and utilize be greater than or equal to atmospheric pressure and almost the pressure reduction between the pressure under the vacuum state push described pressing mold, bonding thus described substrate and described pressing mold, and with described recessed/convex portion is transferred to described resin bed; And
The sclerosis transfer printing has the resin bed of recessed/convex portion.
2. method according to claim 1, wherein, the recessed/convex portion on the described information recording layer is pre-formed on described substrate surface.
3. method according to claim 1, wherein, described resin bed is a ultraviolet hardening resin, the described resin bed under described pressing mold and the unhardened state is stacked, and by to described resin bed irradiation ultraviolet radiation, makes described resin bed sclerosis.
4. as method as described in the claim 3, wherein, described pressing mold has light transmission, and sees through the ultraviolet ray that described pressing mold irradiation comes and make the resin bed sclerosis.
5. as method as described in the claim 3, wherein, described substrate has light transmission, and sees through the ultraviolet ray that described substrate irradiation comes and make the resin bed sclerosis.
6. optical disk manufacturing device comprises:
Bracing or strutting arrangement, it has the substrate of resin bed and pressing mold to remain in the chamber surface coated, makes one of described resin bed and pressing mold to be formed with the surperficial relative of recessed/convex portion;
Control device under the described substrate of the maintenance state relative with described pressing mold, is set at the almost state of vacuum with described pressing mold, and the pressure of described chamber is changed into the atmospheric state that is equal to, or greater than from the state of described almost vacuum,
Wherein, no longer keep simultaneously the state that keeps described pressing mold and described substrate by changing air pressure, make described substrate and described pressing mold stacked, and utilize described be greater than or equal to atmospheric pressure and almost the pressure reduction between the pressure under the vacuum state push described pressing mold, described substrate and described pressing mold are bonded together and with described recessed/convex portion is transferred on the described resin bed.
7. device as claimed in claim 6, wherein, the recessed/convex portion of information recording layer is pre-formed on the surface of described substrate.
8. device as claimed in claim 6, wherein, described resin bed is a ultraviolet hardening resin, described pressing mold is laminated in the described resin bed under the unhardened state, shines described resin bed by ultraviolet ray, makes described resin bed sclerosis.
9. device as claimed in claim 8, wherein, described pressing mold has light transmission, and the ultraviolet ray of coming through described pressing mold irradiation makes the resin bed sclerosis.
10. device as claimed in claim 8, wherein, described substrate has light transmission, and the ultraviolet ray of coming through described substrate irradiation makes the resin bed sclerosis.
11. as device as described in the claim 6, wherein, described pressing mold has crooked shape.
12. an optical disk manufacturing device comprises:
One support unit, it supports substrate and the pressing mold that is coated with resin bed on the surface in chamber, thereby makes one of described resin bed and described pressing mold to be formed with the surperficial relative of recessed/convex portion;
One control device under the described substrate of the maintenance state relative with described pressing mold, is set at the almost state of vacuum with described chamber, and described chamber is changed into the atmospheric state that is equal to, or greater than from the state of described almost vacuum,
Wherein, no longer keep simultaneously the state that keeps described pressing mold and described substrate by changing air pressure, make described substrate and described pressing mold stacked, and utilize described be greater than or equal to atmospheric pressure and almost the pressure reduction between the pressure under the vacuum state push described pressing mold, described substrate and described pressing mold are bonded together and with described recessed/convex portion is transferred to described resin bed.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005249379 | 2005-08-30 | ||
| JP249379/05 | 2005-08-30 | ||
| JP143766/06 | 2006-05-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1937056A true CN1937056A (en) | 2007-03-28 |
| CN100592397C CN100592397C (en) | 2010-02-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200610144773A Expired - Fee Related CN100592397C (en) | 2005-08-30 | 2006-08-30 | Manufacturing method of optical disk and its manufacturing apparatus |
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| Country | Link |
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| CN (1) | CN100592397C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101494067B (en) * | 2008-01-23 | 2011-05-25 | 东莞宏威数码机械有限公司 | Apparatus for adding optical disc information layer |
| CN102176315A (en) * | 2011-02-12 | 2011-09-07 | 苏州新海博数码科技有限公司 | Manufacturing method and device of blue-ray disc reading layer |
| CN102442095A (en) * | 2010-10-15 | 2012-05-09 | 陈法胜 | Heat transfer printing method |
| CN113953168A (en) * | 2021-10-20 | 2022-01-21 | 常州华威新材料有限公司 | Surface micro-crosslinking process suitable for preparing deep texture film |
-
2006
- 2006-08-30 CN CN200610144773A patent/CN100592397C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101494067B (en) * | 2008-01-23 | 2011-05-25 | 东莞宏威数码机械有限公司 | Apparatus for adding optical disc information layer |
| CN102442095A (en) * | 2010-10-15 | 2012-05-09 | 陈法胜 | Heat transfer printing method |
| CN102442095B (en) * | 2010-10-15 | 2014-07-09 | 陈法胜 | Heat transfer printing method |
| CN102176315A (en) * | 2011-02-12 | 2011-09-07 | 苏州新海博数码科技有限公司 | Manufacturing method and device of blue-ray disc reading layer |
| CN113953168A (en) * | 2021-10-20 | 2022-01-21 | 常州华威新材料有限公司 | Surface micro-crosslinking process suitable for preparing deep texture film |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100592397C (en) | 2010-02-24 |
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