CN1902467A - Coriolis mass flow sensor - Google Patents
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Abstract
A Coriolis mass flow sensor includes a flow tube, a light source, and a light pipe having a light inlet situated to receive light from the light source and a light outlet for emitting light received from the light source. A light detector receives light from the light pipe light outlet, and a drive device vibrates the flow tube such that the flow tube moves through a light path between the light outlet of the light pipe and the light detector. In certain embodiments, the light pipe defines a generally square cross section. A sensing aperture having a predetermined shape is situated between the light outlet of the light pipe and the light detector. The sensing aperture passes a portion of the light emitted from the light outlet of the light to the light detector, such that the light entering the light detector has the predetermined shape.
Description
The cross reference of related application
The application is the formal application of U.S. Provisional Patent Application No.60/481852 and No.60/521223 (applying date is respectively on January 2nd, 2004 and on March 15th, 2004), and they here are incorporated herein by reference.
Technical field
The present invention relates generally to the measurement and the control of mass rate, particularly relate to mass flow measurement and control device based on coriolis force effect.
Background technology
Mass flow measurement based on coriolis force effect is realized as follows.Coriolis force causes such effect, that is, a quality is moved along set direction, is forced to change direction then, has a vector component vertical with this set flow direction in the direction that changes.This can represent by following equation:
F
C＝2 M× ω
Wherein, F
C(Coriolis force vector) is the cross product of M (momentum vector of flow mass) and ω (angular velocity vector of rotating coordinate system).
In rotation system, angular velocity vector is along pivot center.Utilize " right hand rule ", four refer to determine rotation direction, and the thumb that stretches out is determined the direction of angular velocity vector.In common Coriolis force flow sensor, make the pipe that has fluid to flow through vibrate.Usually, this pipe is the shape of one or more rings.Being shaped as like this of this ring, that is, in the different piece of this ring, the direction of mass flow vector is towards opposite direction.Each ring of this pipe for example can be " U " shape, rectangle, triangle or " Δ (delta) " shape or spirally.Two angular velocity vectors are arranged in the special circumstances of straight tube simultaneously, and when mass flow vector during along single direction, the point of fixity of these two angular velocity vectors and pipe coincides.
Because rotation direction changes in vibrational system, so angular velocity vector changes direction.The result is, at given time, when mass flow vector or angular velocity vector direction were opposite, Coriolis force was along opposite directive effect.Because angular velocity vector constantly changes owing to vibrational system, so Coriolis force also constantly changes.The result is in the pipe vibratory movement that the dynamics torsional motion has been added in.For giving fixed angular speed, twist angle is directly proportional with mass rate.
The measurement of mass rate realizes that by the distortion that causes owing to Coriolis force in the survey sensor pipe this Coriolis force produces by fluid flows through sensor pipe.Common known devices is used and is comprised that magnet and the right pickoff sensor of coil, this pickoff sensor are positioned at the stream pipe and go up the position that Coriolis force causes maximum displacement.Coil is installed on the relative structure with magnet, and for example, magnet is installed on the pipe, and coil is installed on the fixing enclosure wall.Coil passes the magnetic field of magnet, thereby induction produces electric current in coil.This electric current is directly proportional with the speed of magnet with respect to coil.
But, in low discharge is used, manage less relatively.This makes to be difficult to maybe detection hardware to be installed in and manages on one's body oneself.The existing scheme that is used for the detector tube vibration is also very unsatisfactory.The invention solves the disadvantages associated of prior art.
Summary of the invention
According to aspects of the present invention, a kind of Coriolis mass flow sensor comprises: stream pipe, light source and photoconductive tube, this photoconductive tube has light import and light exit, and this light import is configured to receive the light from light source, and this light exit is used to launch the light that receives from light source.Photodetector receives the light from the light exit of photoconductive tube, and drive unit makes and makes the stream pipe block in the light exit of photoconductive tube and the light path between the photodetector by the stream tube vibration.In certain embodiments, photoconductive tube has determined to be essentially square or other polygonal xsect, so that upset the light that (scramble) or " mixing " receives from light source, thereby obtains more uniform spatial intensity distribution at stream pipe place.
Detection hole with reservation shape is arranged between the light exit and photodetector of photoconductive tube.Detect the hole and make a part of light of launching from light exit lead to photodetector, make the light that enters photodetector have this reservation shape.In example embodiment, detect the triangle that is shaped as in hole, the light that therefore arrives photodetector is triangle.
Various parts can be arranged in one or more optics module bodies, can determine to hold the opening of these parts in these optics module bodies.In order to obtain required package dimension, these openings can be oriented different directions, and catoptron and lens can be used for direct light as required.
Description of drawings
By readding this following detailed description and with reference to the accompanying drawings, will clearer additional objects and advantages of the present invention, in the accompanying drawing:
Fig. 1 and 2 is the block scheme that schematically shows Coriolis mass and flow controller of the present invention and sensor.
Fig. 3 is the block scheme of the part Coriolis mass and flow device of overall expression light pick-up sensor used according to the invention.
Fig. 4 A and 4B are to use the flow detection front elevational view and the sectional side view partly of the Coriolis mass and flow controller of light pick-up sensor respectively.
Fig. 5 is the skeleton view of Coriolis mass flow sensor according to a further aspect of the invention.
Fig. 6 is the skeleton view that is used for the optics module bodies of Coriolis mass flow sensor according to other aspects of the invention.
Fig. 7 is the skeleton view of the Coriolis mass flow sensor shown in Fig. 5, has wherein removed an optics module bodies.
Fig. 8 is the exploded view of an optical module shown in Fig. 5.
Fig. 9 is the cut-open view of an optical module shown in Fig. 5.
Figure 10 has schematically illustrated the detection hole of the Coriolis mass flow sensor shown in Fig. 5.
Figure 11 is the curve map of expression response curve, has represented for example to flow the linear response regions of pipe.
Figure 12 is the curve map of slope of a curve shown in expression Figure 11.
Although the present invention has various variations and replacement form, its specific embodiment for example in the accompanying drawings shown in and describe in detail in this article.But should know, explanation to specific embodiment is not in order to limit the invention to described special shape herein, but it is opposite, the present invention drops on all changes, equivalent and optional replacement in the spirit and scope of the present invention with covering, and the spirit and scope of the present invention are determined by accessory claim.
Embodiment
Introduce illustrated embodiment of the present invention below.For the sake of clarity, do not introduce whole features of actual embodiment in this manual.Certainly should be known in the development of any practical embodiments, must make various specific implementations can realize developer's specific objective, for example adapt to the restriction of related system and relative commercial, these restrictions will change according to different embodiments.And should be known in that these development works may be complicated and time taking, but for only being routine from the benefited those of ordinary skills of this instructions.
Fig. 1 has represented according to the mass flow sensor of the Coriolis of the embodiment of the invention and controller.It comprises two independently operational systems substantially: Coriolis sensor is picked up with drive system A and is applied and control system B.Coriolis sensor is picked up with drive system and is connected with Coriolis sensor 1.Apply with control system B and provide the interface for user 5, co-current flow amount control device for example valve 6 provides control signal.
The purpose that sensor picks up with drive system A is control and the motion that detects Coriolis sensor 1, so that measure as the correlated quality flow of the function of Coriolis force and as the relevant density of the function of resonance frequency.
The sensor of example picks up with drive system A and provides three data values to applying with control system B:
1. the Δ T--mistiming, this mistiming is relevant with respect to the phase lag of opposite side with sensor tube one side, with expression correlated quality flow.
2. frequency--the resonance frequency of sensor tube, this resonance frequency is relevant with the relevant density of measured material.
3. temperature--detect so that determine the temperature of sensor tube by resistance temperature detector (RTD).
Apply with control system B and utilize Δ T and provide required mass rate to user 5 in conjunction with calibration constants.It also utilizes this frequency and provides required density and/or volume flow value in conjunction with calibration constants to user 5.This temperature is used for the calculated value of compensation quality flow and density.Apply with control system B and use mass flow value or the volume flow value exported to compare, so that operation valve 6 becomes required setting value with flow regulation with user's set point of being imported.
Fig. 2 is the block scheme that schematically shows the each several part of Coriolis mass flow sensor described here.Coriolis mass flow sensor 1 comprises flow sensor tube 2, and this drive unit 3 is positioned to make pipe 2 vibrations with respect to sensor tube 2.Pickoff sensor 4 is positioned to measure the distortion that causes owing to Coriolis force with respect to pipe 2 in pipe 2.
The measurement of mass rate realizes that by the distortion that causes owing to Coriolis force in the survey sensor pipe this Coriolis force produces by fluid flows through sensor pipe.For example, in known Coriolis mass flow sensor, right pickoff sensor is usually located at the position that the last Coriolis force of stream pipe causes maximum displacement to comprise magnet and coil.Coil is installed on the relative structure with magnet, and for example, magnet is installed on the pipe, and coil is installed on the fixing enclosure wall.The magnetic field of coil turnover magnet, thus induction produces electric current in coil.This electric current is directly proportional with the speed of magnet with respect to coil.Because this is a velocity measurement, therefore when the stream pipe passes through its equilibrium point (zero passage), this speed will be maximal value (so signal also will be maximal value).The distortion that Coriolis force causes causes the phase shift of rate signal, and this phase shift detects by the difference between the zero-crossing timing of measuring two speed pickups.In fact, this makes time measuring circuit need very high accuracy.The final sensitivity of mass flow measurement that this has made this technical limitation.
The U.S. Patent No. 5555190 that transfers the application's assignee discloses and has been used for determining the frequency of vibrating sensing organ pipe (for example described pipe that links to each other with Coriolis mass and flow pick-up unit disclosed herein) and the digital signal processing method and the device of phase relation.The whole instructions of U.S. Patent No. 5555190 here is incorporated herein by reference.
Fig. 3 has represented to adopt the example Coriolis mass and flow pick-up unit of design disclosed herein.Shown Coriolis mass and flow pick-up unit 500 is comprising stream pipe 502, and coil 513 is positioned near the magnet 514, so that make pipe 502 vibrations.Light source 510 is positioned at sidepiece, and near the top of stream pipe 502 or above stream pipe 502 (estimate at this place displacement with maximum).Like this, photodiode or other photodetector 512 can be arranged in a pipe relative side of 502 and facing to light source 510.Photodetector 512 is connected with sensor electronics, and this sensor electronics is handled the signal that receives from photodetector 512.Sensor electronics can be used digital signal processing device, disclosed signal processing method in U.S. Patent No. 5555190 for example is perhaps at the lock-in amplifier device described in the U.S. Patent application No.09/641698 (document here is incorporated herein by reference).Other embodiment can consider to use mode to detect or the sinusoidal curve coupling, and wherein, received signal for example utilizes least squares phase determination to come to compare with a reference value.
In a specific embodiment, light source 510 and photodetector 512 are provided in a side of the part that light detects the optical detection circuit on the printed circuit board (PCB) (PCB).Light source 510 and photodetector 512 comprise infrared LED and photodiode, so that the motion of detecting sensor pipe 502.As shown in Figure 3, there be 512, one groups on two groups of LED510 and photodiode to be used for a side of detecting sensor pipe 502.In other embodiments, can adopt the light source and the detecting device of other type, thereby in fact use the light of any wavelength.
Fig. 4 A and 4B have represented to make the Coriolis mass flow sensor 600 with the light pickoff sensor.Flow detection part 600 comprises flow sensor tube 602, and magnet 604 is installed on this flow sensor tube 602.Infrared LED 606 detects PCB610 with photodiode 608 and light and is connected, and is positioned on flow sensor tube 602 both sides.Flow sensor tube 602, magnet 604, LED606, photodiode 608 and PCB610 are positioned at housing 612, and lid 614 is installed on this housing 612.The inductor of 1mH plays the effect of coil 616, so that drive this pipe.Coil 616 is positioned at housing 612 outsides.
Also can select, sensor tube 602, drive unit 604,616 and pickoff sensor 606,608 can be packed in the housing 612, perhaps selected parts except coil 616 or replace the selected parts of coil 616 can be positioned at housing 612 outsides.For example, some embodiment can adopt the housing 612 that wherein defines window.This makes light source 606 and/or photodetector 608 can be arranged in housing 612 outsides.In another embodiment, sensor electronics for example uses fiber optic cables away from housing 612.This is desirable when the Coriolis mass and flow pick-up unit is used for hazardous environment for example.
As mentioned above, light source 606 and detecting device 608 can comprise the infrared LED that mates with infrared photodiode.The size of photodiode effective surface near and less times greater than the diameter of sensor tube 602.When pipe 602 vibrations, it passes the path between LED and the photodiode, thereby blocks the light from LED.Pipe 602 can be arranged to like this, that is, when pipe is in the equilibrium position with the light path of part blocking between LED and detecting device.When pipe moves in this equilibrium position on every side with mode of vibration, the light that arrives detecting device will alternately be in minimum or maximum, thereby provide sinusoidal output by detecting device.Can measure relevant output, so that obtain the phase differential that produces owing to flow effect that Coriolis causes from the pipe both sides.
LED produces the light with specific intensity distribution.This distribution is called Gaussian distribution, that is, when the radial distance from light source center increased, light intensity reduced.In other words, light source is the brightest in the center, and towards the peripheral deepening of light source.Therefore, the light intensity that arrives photodiode not only passes this light path along with vibrating tube and changes, and changes with respect to the position of light path based on this pipe.In Fig. 3 and simple LED/ photoelectric diode device shown in Figure 4, the adjusting of pipe is very important for the distortion of accurate measurement flow sensor tube, because the peak-to-peak voltage between two sensors must mate.
Because should response not be linear, so this coupling of peak-to-peak voltage be difficult to realize.The specified point place in light path only, two legs of pipe just produce the peak-to-peak voltage of coupling.The needs that pipe is accurately regulated can reduce manufacturing throughput rate and increase manufacturing time and cost.But, when response was linearity, two legs of pipe can be positioned at the optional position of the range of linearity, and peak-to-peak voltage all will mate.
Make other embodiment that uses up detection will make system optimization become to obtain the linear light response.Wherein, the light by the LED emission is adjusted to the generation average power distribution.The stream pipe image (shade) that stops the light that some are sent by LED is through a series of lens and hole.Fig. 5 has represented to have the exemplary Coriolis mass flow sensor 700 of this smooth pickoff sensor.Mass flow sensor 700 comprises base component 720, and stream pipe 702 is installed on this base component 720.Drive unit (not shown among Fig. 5) for example is coil shown in Fig. 4 A and the 4B and magnet structure, and it is used to make pipe 702 vibrations.The light pickoff sensor is arranged in first and second optics module bodies 730.In optional embodiment shown in Figure 6, two optical bodies 730 are combined into single optical bodies 731.Fig. 7 has represented flow sensor 700, and one of them optical module 730 is removed, so that represent some parts better, for example the stream pipe 702.
The exploded view of having represented an optical module 730 among Fig. 8, and Fig. 9 is the cut-open view of module 730, has represented the parts of module 730 inside.Light source for example LED706 is arranged in first opening 732 in the module 730.Photoconductive tube 734 is positioned at opening 732, so that receive the light from LED706.In the second roughly vertical opening 740, be furnished with lens 738 with opening 732.Catoptron 742 is positioned between second opening 740 and the 3rd opening 744, and the 3rd opening 744 is roughly parallel to first opening 732.The 3rd opening 744 has determined that circle stops hole 746, and has lens 748, pipe 750 and coil 752, and this dish 752 has determined to be positioned at detection hole 754 wherein.Photodetector for example photodiode 708 is also packed in the 3rd opening 744.
In the embodiment shown, it is triangular shaped detecting hole 754.Therefore, the light that enters photodiode is triangular shaped.Catoptron and lens are arranged to form the image of pipe, and this triangle detection hole 754 is positioned at the image place of tube edges.Stop hole 746 for circular, so that the light that provides the heart far away to distribute comes irradiating and detecting hole 754 and detecting device 708
Pipe 702 is arranged to like this, that is, and and when it vibrates, it passes the light path that is formed by the light that sends from photoconductive tube 734, pipe 702 shades 770 that are created in the triangular image, like this, light pattern at detecting device 708 places is the shielded image of light source, roughly as shown in Figure 10.That detects hole 754 triangular shapedly makes it possible to the power that simple computation enters photodiode 708.Percent of pass (T) is not managed 706 power that block and is entered the ratio of the general power of photodiode 708, and it is simplified to the detection hole area (A that is not stopped by pipe
Nb) and the triangle total area (A
Tot) ratio:
T＝A
nb/A
tot
When pipe 702 when a direction is moved, percent of pass increases, and when it moves in opposite directions, the percent of pass reduction.This motion produces the sine wave with peak-to-peak voltage, and it must mate with each leg of pipe.This peak-to-peak voltage is directly relevant with the slope of T, this T in Figure 11 as the function of y.Because this is linear according to definition, so slope is constant.Therefore, have only two legs of pipe be arranged so that the scope of y value be from the pipe diameter to triangle height, peak-to-peak voltage just can mate.
Figure 11 has represented two response curves: curve 801 be for external diameter be 0.3mm 100 the gram pipe hourly, and curve 802 be for external diameter be 0.8mm 3000 the gram pipe hourly, wherein tri-angle-holed 754 height is 1.5mm.Figure 12 has represented the slope of response curve 801,802.Shown in Figure 11 and 12, the slope of curve 801,802 is constant in the linear response regions 811,812 of curve.Therefore, two legs of pipe must not be positioned at the y value place of peak-to-peak voltage coupling just.Two legs of pipe only need be positioned in the above-mentioned linear response regions.For 100 gram pipes hourly (curve 801), a leg of pipe is positioned at and allows in the zone, and another relative leg can be positioned at any position from pipe diameter (0.3mm) to triangle height (1.5mm) in the light path.Therefore, the manufacturing scope of permission is 1.5-0.3=1.2mm.
Also can consider other detection architecture.For example, can adopt square to detect the hole.Two photodetectors can use side by side, and wherein, the light that arrives each detecting device will change along with the motion of pipe.
Catoptron and lens make parts can be assembled in the suitable package dimension.Fig. 9 has roughly represented the light path by module body 730.Enter the light import 734a of photoconductive tube 734 from the light of LED706.As mentioned above, the side of photoconductive tube 734 is mixed light, so that obtain the pattern of square, uniform strength.In the embodiment shown, light exit 734b becomes angle and polishing, makes it be used as catoptron and changes direction of light.For example as shown in Figure 7, rotate catoptron 772 and be arranged between first and second openings 732,740, so that light is introduced second opening 740.Pipe 702 is at light exit 734b and rotate between the catoptron 772, the light path that the light that makes pipe 702 pass to be sent by photoconductive tube 734 forms.In the embodiment shown in fig. 6, rotating catoptron 772 is integrated in the module body 731.
LED706 can be connected with the electronic component outside the module body 730 with photodiode 708, thereby electronic component can be positioned at apart from optical devices a distance.This helps using in the environment that may be harmful to electronic component.In other embodiments, LED706 and photodiode 708 also are arranged to away from module body 730, and with optical fiber they and the passive optical components that is arranged in module body 730 are coupled together.This for example can be used in the high temperature application.
Specific embodiment recited above is just schematic, because the present invention can change in different but equivalent mode and implement, the those skilled in the art that benefit from the instruction here will know these modes different but equivalence.And the present invention is not limited to detailed structure described here or design, unless illustrate in the claim of back.Therefore, specific embodiment recited above can change and change, and all these variations all will be in scope and spirit of the present invention.Therefore, protection domain is set by following claim.
Claims (24)
1. Coriolis mass flow sensor comprises:
The stream pipe;
The pipe position transducer comprises
Light source;
Photoconductive tube, this photoconductive tube has light import and light exit, and this light import is configured to receive the light from light source, and this light exit is used to launch the light that receives from light source;
Photodetector is used to receive the light from the light exit of photoconductive tube;
Drive unit is used to make the stream tube vibration, makes the stream pipe be passed in the light exit of photoconductive tube and the light path between the photodetector.
2. Coriolis mass flow sensor according to claim 1, wherein: photoconductive tube has been determined the polygon xsect.
3. Coriolis mass flow sensor according to claim 2, wherein: photoconductive tube has been determined foursquare basically xsect.
4. Coriolis mass flow sensor according to claim 1, also comprise detection hole with reservation shape, this detection hole is arranged between the light exit and photodetector of photoconductive tube, detecting the hole makes a part of light of launching from light exit lead to photodetector, like this, the light that enters photodetector has described reservation shape.
5. Coriolis mass flow sensor according to claim 4, wherein: described reservation shape is optimized to the linearity that improves described position transducer.
6. Coriolis mass flow sensor according to claim 4, wherein: described reservation shape is a triangle.
7. Coriolis mass flow sensor according to claim 1, wherein: described light exit becomes the angle, so that will be from the light exit guiding light emitted to required direction.
8. Coriolis mass flow sensor according to claim 1 also comprises optics module bodies, and wherein, described photoconductive tube is loaded in first opening of determining in this optics module bodies.
9. Coriolis mass flow sensor according to claim 8, wherein: described optics module bodies has been determined second opening, the axis direction of this second opening is substantially perpendicular to the axis of first opening, have lens in second opening, these lens receive the light from the light exit of photoconductive tube.
10. Coriolis mass flow sensor according to claim 9, wherein: described optics module bodies has been determined the 3rd opening, the axis direction of the 3rd opening is arranged essentially parallel to the axis of first opening, has photodetector in the 3rd opening and detects the hole.
11. Coriolis mass flow sensor according to claim 10 also comprises the catoptron near the second and the 3rd opening, so that light is introduced the 3rd opening from second opening.
12. Coriolis mass flow sensor according to claim 10 also comprises the hole that stops that is arranged in the 3rd opening, this stops that the hole stops from a part of light of the light exit emission of photoconductive tube.
13. Coriolis mass flow sensor according to claim 10 also comprises the lens that are arranged in the 3rd opening.
14. Coriolis mass flow sensor according to claim 9 also comprises the catoptron near first and second openings, so that light is introduced second opening from the light exit of photoconductive tube.
15. Coriolis mass flow sensor according to claim 14, wherein: the light exit of photoconductive tube is in the relative substantially both sides of flowing pipe with this catoptron.
16. Coriolis mass flow sensor according to claim 1 also comprises:
Secondary light source;
Second photoconductive tube, this second photoconductive tube has light import and light exit, and this light import is configured to receive the light from secondary light source, and this light exit is used to launch the light that receives from secondary light source;
Second photodetector is used to receive the light from the light exit of second photoconductive tube;
17. a Coriolis mass flow sensor comprises:
The stream pipe;
The pipe position transducer comprises
Light source;
Photodetector is used for receiving light from light source;
Detection part has been determined the detection hole in this detection part, this detection hole is arranged between light source and the photodetector, and this detection part has stopped a part of light that is received by photodetector, makes the light that enters photodetector have reservation shape; And
Drive unit is used for making making the stream pipe be passed in the light path between light source and the photodetector by the stream tube vibration.
18. Coriolis mass flow sensor according to claim 17, wherein: the shape that detects the hole can be optimized the linearity of described pipe position transducer.
19. Coriolis mass flow sensor according to claim 17, wherein: the triangle that is shaped as that detects the hole.
20. Coriolis mass flow sensor according to claim 17 also comprises the photoconductive tube with light import and light exit, this light import is configured to receive the light from light source, and this light exit is used to launch the light that receives from light source.
21. Coriolis mass flow sensor according to claim 20, wherein: photoconductive tube has been determined foursquare polygon xsect.
22. Coriolis mass flow sensor according to claim 20, wherein: photoconductive tube has been determined foursquare basically xsect.
23. a Coriolis mass flow sensor comprises:
The stream pipe;
Light source;
First device receives from the light of light source, so that light is transformed into even distribute power from Gauss's distribute power;
Photodetector is used to receive the light that comes from first device;
Drive unit is used for making making the stream pipe be passed in the output terminal of first device and the light path between the photodetector by the stream tube vibration.
24. Coriolis mass flow sensor according to claim 23 also comprises second device, is used to make the light that arrives photodetector to form required shape.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48185204P | 2004-01-02 | 2004-01-02 | |
| US60/481,852 | 2004-01-02 | ||
| US60/521,223 | 2004-03-15 | ||
| US10/711,708 | 2004-09-30 |
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| Publication Number | Publication Date |
|---|---|
| CN1902467A true CN1902467A (en) | 2007-01-24 |
| CN100442025C CN100442025C (en) | 2008-12-10 |
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| CNB2004800397294A Active CN100442025C (en) | 2004-01-02 | 2004-12-31 | Coriolis mass flow sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2720414C (en) * | 2000-08-18 | 2013-12-10 | Emerson Electric Co. | Coriolis mass flow controller |
| CA2354783A1 (en) * | 2001-08-07 | 2003-02-07 | Institut National D'optique | Convex polygon-shaped all-glass multi-clad optical fiber and method of fabrication thereof |
| JP2003121664A (en) * | 2001-10-17 | 2003-04-23 | Hikari System Kenkyusho:Kk | Plastic optical fiber with rectangular cross section |
| US6776053B2 (en) * | 2001-11-26 | 2004-08-17 | Emerson Electric, Inc. | Flowmeter for the precision measurement of an ultra-pure material flow |
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