CN1888941A - Plate type metal heterogeneous structural nano optical wave guide device - Google Patents

Plate type metal heterogeneous structural nano optical wave guide device Download PDF

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Publication number
CN1888941A
CN1888941A CN 200610019673 CN200610019673A CN1888941A CN 1888941 A CN1888941 A CN 1888941A CN 200610019673 CN200610019673 CN 200610019673 CN 200610019673 A CN200610019673 A CN 200610019673A CN 1888941 A CN1888941 A CN 1888941A
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metal
plate type
guide device
wave guide
optical wave
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Chinese (zh)
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汪国平
王兵
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Wuhan University WHU
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Wuhan University WHU
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Abstract

A flat type metal heterogeneity structure nanometer optical waveguide parts, the main point is: consists of two metals with different constants transmitting by the SPP (solar photometry probe), the metal with high constant enchases in the metal with low constant. The advantage of the invention is that can transmit the light beam that the diameter breaches the nanometer size of the diffracting high-point, thereby repots the traditional technology and structure of the flat integration optical waveguide to the nanometer photon integration loop.

Description

Plate type metal heterogeneous structural nano optical wave guide device
Technical field
The present invention relates to a kind of plate type metal heterogeneous structural nano optical wave guide device, in particular for realizing the plate type metal heterogeneous structural nano optical wave guide device of nano-photon integrated network.
Background technology
The planar light waveguide device is the basis of present integrated optics.Be subjected to the restriction of diffraction effect, the diameter of optical waveguide generally can only be in the magnitude of the wavelength size that is not less than the transmission light wave, and this is a restriction greatly to the integrated level that improves integrated optical circuit.For reducing waveguide diameter, the most representative method is at present, converts metal surface excited surface plasmon ripple (SPP) to by transmitting light wave, realizes the nanometer waveguide of beam diameter about 100 nanometers.As, the metal nanometer line waveguide [1], the metal nanoparticle Waveguide array [2], the metal narrow slit wave-guide [3], and V-type trench metal waveguide [4]Deng.What wherein optical energy transmission efficiency was higher mainly is back two class waveguides.Their basic functional principle is the characteristics of utilizing the latent dead electricity magnetic signature of SPP and trending towards propagating in low phase velocity district.Because in the more little interval of the cross-sectional dimension of metal construction, the propagation phase velocity of SPP is more little.Therefore, SPP will trend towards at the less interval propagation of cross-sectional dimension, thereby the waveguide scope that energy of electromagnetic field can be limited in nanoscale is propagated.Here it is above-mentioned metal narrow slit wave-guide [3]With metal V-type plough groove waveguide [4]On the other hand, because the SPP propagation characteristic is not only relevant with the geometrical property of metal construction, prior also relevant with the dielectric property of metal material itself and adjacent dielectric substance thereof.Thus, 2004, the researchist proposed a kind of 3-dimensional metal heterogeneous structural nano narrow slit wave-guide of realizing nano-focusing [5]But above-mentioned various waveguide all is that three-dimensional structure is (referring to Fig. 1~Fig. 3), be not easy to realize dull and stereotyped integrated functionality.List of references:
[1]J.Takahara?et?al,Opt.Lett.22,475(1997).
[2]S.A.Maier?et?al,Nature?Mater.2,229(2003).
[3]K.Tanaka?et?al,Appl.Phys.Lett.82,1158(2003).
[4]P.F.D.Pile?et?al,Opt.Lett.,29,1069(2004);D.K.Gramotnev?etal,Appl.Phys.Lett.85,6323(2004);S.I.Bozhevolnyi?et?al,Phys.Rev.Lett.95.046802(2005).
[5]B.Wang?and?G.P.Wang,Appl.Phys.Lett.,85,3599(2004).
Summary of the invention
The object of the present invention is to provide a kind of plate type metal heterogeneous structural nano optical wave guide device, it can make the transmitting beam diameter propagate at the nanoscale of breaking through diffraction limit, thereby, be transplanted to the nano-photon integrated circuit with technology and the structure in traditional dull and stereotyped integrated light guide.
Technical scheme of the present invention is: a kind of plate type metal heterogeneous structural nano optical wave guide device, and its distinctive feature is: the two kind metal materials different by the SPP propagation constant constitute, and the high damascene of propagation constant is in the low metal of propagation constant.
And, the rectangular strip of the metal that the SPP propagation constant is high.
And described metal is gold, silver, aluminium, wherein, gold or the metal of silver for embedding, aluminium is the metal that is embedded into.
And the width of the rectangular strip metal of described embedding is not more than 150nm.
Because the propagation phase velocity difference of SPP is big more, then the light wave diameter of section can be more little.Therefore, the present invention utilizes SPP to have the characteristics of bigger propagation phase velocity difference simultaneously on different waveguide cross sectional dimensions, different dielectric cladding material and thickness and different metal surface (as gold, silver, aluminium etc.), and realization has the plate nano optical wave guide of the beam cross section of nanoscale.Based on this imagination, we prove by digital simulation, embed the identical but metal silverskin of width w=130nm of thickness in aluminium film, and then at aluminium film and silverskin surface coverage one deck thickness h=100nm, (specific inductive capacity is ε in refractive index n=1.5 1=n 2) dielectric film (structure such as Fig. 3), when lambda1-wavelength λ=539nm, can obtain the beam cross section size and be 150nm * 37nm (0.28 λ * 0.069 λ), the nanometer waveguide of the about 2 μ m of transmission range (1.8 μ m).Compare based on the nanometer guide technology of SPP with existing, this structure is specially adapted to technology and structure in traditional dull and stereotyped integrated light guide are transplanted to the nano-photon integrated circuit.
Major technique means and effect: (1) utilizes SPP can be confined to the characteristics of very little space scale scope by light wave being converted to the SPP that metal-dielectric surface is propagated, and overcomes the shortcoming that conventional light conducting waveguide is subjected to the restriction of Rayleigh diffraction limit.When (2) utilizing the SPP transmission, have the advantages that to trend towards in the propagation of low phase velocity district, optimal design makes the transmitting beam diameter propagate at the nanoscale of breaking through diffraction limit by the nano-heterogeneous structure waveguide with different waveguide cross sectional dimensions and different dielectric cladding materials and thickness that different metal (as gold, silver, aluminium etc.) constitutes.
Description of drawings
Fig. 1 is the stereographic map of signal V-type trench metal of the prior art waveguide.
Fig. 2 is the existing 3-dimensional metal heterogeneous structural nano narrow slit wave-guide stereographic map of signal.
Fig. 3 is the existing three-dimensional homogeneity metal construction nano slit waveguide stereographic map of signal.
Fig. 4 is the stereographic map that signal the present invention constitutes.
Embodiment
Referring to Fig. 1~Fig. 4, wherein: Fig. 1: h is the degree of depth of V-type groove, and θ is the subtended angle of V-type groove, and arrow is represented the incident direction of light.Fig. 2: aluminium 1, silver 2, medium 3, W is a slit width, L represents waveguide length.Fig. 3: metal 4, w 1And w 2Be respectively different interval slit widths, h is the height of guided wave district, center slit, and L is a waveguide length.Fig. 4: dielectric 5, aluminium 6, silver or gold 7, aluminium 8, ε 1, ε 2, ε 3Be respectively the relative dielectric constant of dielectric, metallic aluminium, silver (or gold), h is the thickness of dielectric layer, and d is the thickness of metal film, and w is for embedding the width of the silver-colored waveguide in the aluminium waveguide.
The present invention record be a kind of plate type metal heterogeneous structural nano optical wave guide device, the two kind metal materials different by the SPP propagation constant constitute, the high damascene of propagation constant is in the low metal of propagation constant.
Further technical scheme can be: the rectangular strip of the metal that the SPP propagation constant is high.
Further technical scheme can also be: described metal is gold 7, silver 7, aluminium 6,8, wherein, and gold 7 or the metal of silver 7, the metal of aluminium 6,8 for being embedded into for embedding.
For realizing the transmission of nanoscale optical waveguide, the width of the rectangular strip metal of described embedding generally is not more than 150nm.
By light wave being converted to the SPP that metal-dielectric surface is propagated, utilize SPP can be confined to the characteristics of very little space scale scope, overcome the shortcoming that conventional light conducting waveguide is subjected to the restriction of Rayleigh diffraction limit.Simultaneously, utilize SPP on different geometries, different dielectric 5 cladding materials, different metal surface, to have different propagation phase velocities, and trend towards propagating in low phase velocity district, and SPP phase velocity difference is big more, the beam cross section diameter can be more little characteristics, realize the propagation of light wave in plate type metal heterogeneous structural nano optical wave guide.In existing metal material, the propagation constant of SPP in silver 7, gold 7, aluminium 6,8 waveguides successively decreased successively, increases progressively successively thereby propagate phase velocity.Therefore, the present invention is based on existing metal material, the nano heterogeneous waveguiding structure of design plate type metal, silver 7 or golden 7 films are embedded in aluminium 6, (see figure 4) in the middle of 8 films, optimize the geometric parameter of waveguiding structure, improve the propagation phase velocity difference of SPP, make incident light wave energy unattended station be limited to SPP and propagate the less zone of phase velocity (silver or golden film surface) in zones of different.For example, when argent 7 films of w=130nm are embedded in aluminium 6, in 8 films, overlayer (dielectric 5) thickness h=100nm, refractive index n=1.5, during lambda1-wavelength λ=539nm, the beam cross section size be can obtain and 150nm * 37nm (0.28 λ * 0.069 λ), the nanometer guide properties of the about 2 μ m of transmission range (1.8 μ m) are.Use this structure, can the dull and stereotyped nanometer light of easier realization integrated.
Main application of the present invention: nanometer photo-coupler, high density data storage, nano-photon integrated (nano optical wave guide device), near field optic (preparation of nano-probe etc.), biology, chemical sensitisation, nanometer quantized system (quantum dot, quantum line etc.) control, light tweezer (capture of particles).

Claims (5)

1. plate type metal heterogeneous structural nano optical wave guide device, it is characterized in that: the two kind metal materials different by the SPP propagation constant constitute, and the high damascene of propagation constant is in the low metal of propagation constant.
2. plate type metal heterogeneous structural nano optical wave guide device according to claim 1 is characterized in that: the rectangular strip of the metal that the SPP propagation constant is high.
3. plate type metal heterogeneous structural nano optical wave guide device according to claim 1 and 2 is characterized in that: described metal is gold, silver, aluminium, wherein, gold or the metal of silver for embedding, aluminium is the metal that is embedded into.
4. plate type metal heterogeneous structural nano optical wave guide device according to claim 2 is characterized in that: the width of the rectangular strip metal of described embedding is not more than 150nm.
5. plate type metal heterogeneous structural nano optical wave guide device according to claim 3 is characterized in that: the width of the rectangular strip metal of described embedding is not more than 150nm.
CN 200610019673 2006-07-20 2006-07-20 Plate type metal heterogeneous structural nano optical wave guide device Pending CN1888941A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445732A (en) * 2012-01-05 2012-05-09 浙江大学 Multi-beam optical tweezers based on planar optical waveguide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445732A (en) * 2012-01-05 2012-05-09 浙江大学 Multi-beam optical tweezers based on planar optical waveguide

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