CN1888426A - Multi-stage type vacuum pumping device and vacuum pumping method thereof - Google Patents
Multi-stage type vacuum pumping device and vacuum pumping method thereof Download PDFInfo
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- CN1888426A CN1888426A CN 200510081114 CN200510081114A CN1888426A CN 1888426 A CN1888426 A CN 1888426A CN 200510081114 CN200510081114 CN 200510081114 CN 200510081114 A CN200510081114 A CN 200510081114A CN 1888426 A CN1888426 A CN 1888426A
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Abstract
The present invention relates to a multistage evacuation device and its evacuation method. It is used for quickly reducing pressure in a container. Said evacuation device includes several cavity bodies, an evacuation unit for evacuating gas from every cavity body and reducing pressure in every cavity body interior, a control valve unit which is connected with every cavity body and is used for controlling inlet and outlet of every cavity body and a pipeline unit which is communicated with said control valve unit and evacuation unit.
Description
[technical field]
The present invention relates to a kind of vacuum pumping device and vacuum pumping method thereof, particularly relate to a kind of multistage vacuum pumping device and vacuum pumping method thereof.
[background technique]
As shown in Figure 1, existing vacuum oxygen decarburization (Vacuum OxygenDecarburization, VOD) technology can be carried out double refining (SecondaryRefining) to steel, utilize vacuum technique, can make the molten steel of fusion remove the impurity element that it includes, as hydrogen (H), nitrogen (N), sulphur (S), carbon (C) ... also can carry out degasification Deng element and impurity, to obtain the higher alloyed steel of degree of purity.The VOD processing procedure can be divided into three phases haply: the phase I, oxygen blast (Oxygen blowing), its environmental requirement are that pressure is 1～2 * 10
4(N/m2, Pa) between and kept 30～60 minutes.Second stage, degasification (Degassing), its environmental requirement are that pressure is between 100～500Pa and kept about 10 minutes.Phase III, reduction (Reduction), its environmental requirement is between pressure 100～500Pa and kept about 40 minutes.
General VOD equipment comprises valve member unit 13 that a smelting furnace 1, seasoning molten steel 11, the air cylinder 12, that is communicated with this smelting furnace 1 in this smelting furnace 1 be used to control these air cylinder 12 output gases, and one is used to make this smelting furnace 1 vacuum vacuum system 10.This vacuum system 10 comprise one can be vaporific steam boiler 14, the pipe-line cell 15, that is communicated with steam boiler 14 be communicated with the filter 17 that this smelting furnace 1 and the connecting tube 16, of pipe-line cell 15 are located at these pipe-line cell 15 gas outlets, and a cooler 18 between this connecting tube 16 and filter 17.Utilize the sustained combustion fuel oil to heat this steam boiler 14, make the liquid of holding in the stove reach boiling, to produce a large amount of steams, when these steams flow through this pipe-line cell 15 fast, can produce a suction to this smelting furnace 1, gas in this smelting furnace 1 can be drawn out of and be a nearly vacuum state, be able to this molten steel 11 is carried out refinery process.In the process, for keeping certain degree of vacuum and keeping a period of time, need constantly heat this steam boiler 14, to produce enough steams.Steam by this pipe-line cell 15 can have the impurity in the gas in this smelting furnace 1, and can utilize this cooler 18 to be condensed into liquid earlier this moment, and liquid is filtered out impurities by this filter 17.After finishing these molten steel 11 refinery process, this valve member unit 13 of may command is in the smelting furnace 1 of nearly vacuum state the gas input in this air cylinder 12, makes its pressure recovery to one barometric pressure, so that open this smelting furnace 1.
As seen from the above description, existing vacuum system 10 has following several shortcomings in practical operation:
1. pumping speed is slow: because this vacuum system 10 is to utilize steam that this steam boiler 14 produced fast by this pipe-line cell 15, and form a low-pressure state that is lower than this smelting furnace 1 pressure relatively, in order to extract the gas in this smelting furnace 1 out.Yet, this low-pressure state is the restriction that is subjected to steam flow speed, when the pressure of this smelting furnace 1 during slowly near this low-pressure state, the speed that this smelting furnace 1 internal gas is taken away can be slack-off many, therefore, often need to wait for for a long time that it reaches the degree of vacuum that can operate, another flexible way then is to purchase the identical equipment of array again with the use of rotating, save the time of wait, increase many manufacture costs.
2. expend a large amount of energy: because this vacuum system 10 is the steams that utilize this steam boiler 14 to be produced, as described in the 1st.Accelerate pumping speed when needs, certainly will will strengthen firepower, provide more heat to increase vapor flow rate, the degree of vacuum of adding each stage of processing procedure requires not necessarily identical, if will keep the degree of vacuum that is suitable for, then must keep enough vapor flow rates, more than all need a large amount of consumes energy.
3. the doubt on the safety is arranged: owing to be the liquid that utilizes in this steam boiler 14 of boiling, to produce the steam of High Temperature High Pressure, and in this pipe-line cell 15, flow fast, and VOD equipment usually is long use, when this steam boiler 14 uses accidentally or these pipe-line cell 15 somewheres are blocked, with regard to easily because of overpressure set off an explosion, on fire, the life and the property safety that are threatening operator.
4. befouling environment: because this steam boiler 14 is by a large amount of heavy oil of burning or rock gas, heat and produce a large amount of steams, must have combustion gas befouling environment air in the process, especially at this steam boiler 14 at the beginning when black furnace heats, waste gas produces many especially, has a strong impact on air quality.
[summary of the invention]
The objective of the invention is for a kind of multistage vacuum pumping device and vacuum pumping method thereof are provided, can bleed with reduction pressure fast, reduce energy consumption, avoid befouling environment, and can guarantee operator's safety.
In order to achieve the above object, the invention provides a kind of multistage vacuum pumping device, be applicable to the pressure that reduces a room, it is characterized in that:
This vacuum pumping device comprises several cavitys, bleed unit, a control valve unit, reach the pipe-line cell of this control valve unit of connection and the unit of bleeding, this unit of bleeding is used to extract the gas in each cavity, to reduce the pressure of each cavity, this control valve unit connects each cavity, pass in and out each cavity in order to control gaseous, utilize this unit of bleeding to extract the gas in each cavity in advance and be nearly vacuum state, control this control valve unit again, each cavity is connected with this room respectively.
Described multistage vacuum pumping device is characterized in that: this unit of bleeding is made up of several vacuum pumps.
Described multistage vacuum pumping device is characterized in that: this control valve unit is made up of several control valves, and each control valve is to see through the control that the mode of circuit design opens and closes.
The present invention also provides a kind of multistage vacuum pumping device, is applicable to the pressure that reduces a room and has the function of gas feedback, it is characterized in that:
This multistage vacuum pumping device comprises several cavitys, one is used to draw gas in each cavity with the pressure that reduces each cavity unit of bleeding, several first control valves, one first pipe-line cell, several second control valves, and one second pipe-line cell, each first control valve connects an end of each cavity respectively, pass in and out each cavity in order to control gaseous, this first pipe-line cell, be communicated with each first control valve and this unit of bleeding, each second control valve, the other end that connects each cavity respectively, be used for control gaseous and pass in and out each cavity, this second pipe-line cell, be communicated with each second control valve and this room
Control each first and second control valve, make this unit of bleeding extract the interior gas of each cavity out earlier, then, make each cavity communicate with this room respectively again and reach pressure balance, the pressure of this room is reduced one by one, at last, control each second control valve again, make each cavity communicate with this room respectively and reach pressure balance in contrast to said sequence.
Described multistage vacuum pumping device is characterized in that: this unit of bleeding is made up of several vacuum pumps.
Described multistage vacuum pumping device is characterized in that: this multistage vacuum pumping device also comprises a filter that is arranged on this second pipe-line cell.
Described multistage vacuum pumping device is characterized in that: this unit of bleeding has a relief opening that the gas of suction is discharged, and this multistage vacuum pumping device also comprises a filter that is connected the relief opening of this unit of bleeding.
Described multistage vacuum pumping device, it is characterized in that: this multistage vacuum pumping device also comprises the 3rd pipe-line cell of this first and second pipe-line cell of connection, and a bypass flow-limiting valve of being located on the 3rd pipe-line cell, this bypass flow-limiting valve can be used for controlling the flow that circulates in gas in the 3rd pipe-line cell.
The present invention also provides a kind of multistage vacuum pumping method, is used to reduce the pressure of a room, it is characterized in that:
This multistage vacuum pumping method comprises a pump step and a depressurization steps, this pump step is to open each first control valve and close each second control valve, utilize the unit of bleeding again, gas in each cavity is extracted out, this depressurization steps is to close each first control valve and control each second control valve again, each cavity is communicated with this room respectively in regular turn and reaches pressure balance.
Described multistage vacuum pumping method is characterized in that: this multistage vacuum pumping device also comprises a back pressure step, by each second control valve of control, each cavity is communicated respectively with this room in contrast to the order of this depressurization steps.
The present invention also provides a kind of multistage vacuum pumping device, is applicable to the pressure that reduces a room, it is characterized in that:
This multistage vacuum pumping device comprises several cavitys, one unit of bleeding, several first control valves, one second control valve, an and pipe-line cell, this unit of bleeding is used to draw the gas in each cavity, to reduce the pressure of each cavity, each first control valve connects each cavity and this room respectively, be used for control gaseous and pass in and out each cavity, this second control valve connects this room and is used for control gaseous and passes in and out this room, this pipe-line cell is communicated with each first control valve, this second control valve and this unit of bleeding
Control this second control valve and each first control valve, make this unit of bleeding extract the interior gas of each cavity out earlier, each cavity is communicated with this room respectively and reach pressure balance, the pressure of this room is reduced one by one, at last, control each first control valve again, make each cavity communicate with this room respectively and reach pressure balance in contrast to said sequence.
Described multistage vacuum pumping device is characterized in that: this unit of bleeding is made up of several vacuum pumps.
Described multistage vacuum pumping device is characterized in that: this multistage vacuum pumping device also comprises a filter that is arranged on this pipe-line cell.
Described multistage vacuum pumping device is characterized in that: this unit of bleeding has a relief opening that the gas of suction is discharged, and this vacuum system also comprises a filter that is connected the relief opening of this unit of bleeding.
Described multistage vacuum pumping device is characterized in that: this second control valve is the circulate gas flow of this pipe-line cell of may command also.
In sum, multistage vacuum pumping device of the present invention and vacuum pumping method thereof, be applicable to the pressure of quick reduction by one room, this multistage vacuum pumping device comprises several cavitys, and is used to extract gas in each cavity and connects the control valve unit that each cavity and control gaseous pass in and out each cavity with the unit of bleeding, of the pressure that reduces each cavity, and a pipe-line cell that is communicated with this control valve unit and the unit of bleeding.
Utilize this unit of bleeding to extract the gas of interior each cavity in advance and be nearly vacuum state, control this control valve unit again, each cavity is connected with this room respectively,, reduce the pressure of this room whereby fast to draw the gas in this room.
Multistage vacuum pumping method of the present invention, be applicable to the pressure of quick reduction by one room, and comprise a pump step and a depressurization steps, this pump step is to open each first control valve and close each second control valve, utilize the unit of bleeding to extract gas in each cavity out, make each cavity be nearly vacuum state, this depressurization steps is to close each first control valve and control each second control valve again, each cavity is communicated with this room respectively, the pressure of this room is reduced one by one.
The present invention is communicated with this room respectively and reaches pressure balance by the cavity of a plurality of nearly vacuum states, can reduce the pressure of this room fast.Owing to be not to adopt the steam flow of High Temperature High Pressure through this pipe-line cell, this room is formed the vacuum mode of a suction, come heating liquid to obtain steam so need not expend a large amount of energy.In addition, because this room cavity after being communicated with, still possess the degree of vacuum of certain degree, carrying out the bleeding during operation of each cavity next time, also can shorten time of bleeding and save expending of the energy.Similarly,, take place, can ensure operator's safety really so do not have the situation of blast because be not to adopt the operation of bleeding of the gas of high pressure-temperature.
Comprehensively above-mentioned, multistage vacuum pumping device of the present invention and vacuum pumping method thereof have following advantage really in practical operation:
1. pumping speed is quick, reaches quick step-down: utilize a plurality of cavitys that vacuumized to be connected with this room respectively, and can be apace the gas in this room be extracted out, than existing utilize steam fast through and vacuum method is many fast.Moreover, for the operation of bleeding of carrying out each cavity next time, more can finish fast, because each cavity has all had the degree of vacuum of certain degree, can less time, reach the degree of vacuum that sets.Simultaneously, also need not purchase the identical equipment of array again, reduce manufacture cost with the use of rotating.
2. the saving energy: since be not adopt high temperature steam flow through this room to extract the mode that vacuumizes of internal gas, need not expend a large amount of energy and come heating liquid to obtain steam.Simultaneously,, reduce the service time of using this unit of bleeding, reduce the consumption of the energy because each cavity has all had the degree of vacuum of certain degree.
3. guarantee personal security: because of the mode of bleeding is not to adopt the gas of high pressure-temperature to carry out operation, need not combustion of liquid with the reservoir vessel of depositing the high pressure-temperature steam is set, reduces potential hazards, therefore, than the safety that can ensure operator.
4. avoid environmental pollution: because air suction mode of the present invention is to adopt vacuum pump to bleed, need combustion fuel to produce the mode that steam is bled, do not have the problem of the useless cigarette of discharging, therefore, do not pollute the environment but not adopt.
[description of drawings]
Below by preferred embodiment and accompanying drawing multistage vacuum pumping device of the present invention and vacuum pumping method thereof are elaborated, in the accompanying drawing:
Fig. 1 is a partial cutaway schematic, illustrates that existing vacuum system connects a smelting furnace, in order to extract the gas in this smelting furnace.
Fig. 2 is a partial cutaway schematic, illustrates that one first preferred embodiment of vacuum pumping device of the present invention connects this smelting furnace, in order to extract the gas in this smelting furnace.
Fig. 3 is a flow chart, and a preferred embodiment of vacuum pumping method of the present invention is described.
Fig. 4 is a partial cutaway schematic, illustrates that one second preferred embodiment of vacuum pumping device of the present invention connects this smelting furnace, in order to extract the gas in this smelting furnace.
[embodiment]
Before the present invention is described in detail, be noted that in the following description similar elements is to represent with identical numbering.
As shown in Figure 2, one first preferred embodiment of multistage vacuum pumping device of the present invention, can be applicable on the VOD refining equipment, this refining equipment comprises a smelting furnace 21, one vacuum system 22, that is communicated with this smelting furnace 21 connects the air cylinder 23 of this smelting furnace 21, reach one and be used to control the valve member unit 24 that this air cylinder 23 is exported gases, wherein, this smelting furnace 21 has a room 211 and is used for the container that seasoning one fills molten steel 212.
This vacuum system 22 is used to extract the gas in the room 211 of this smelting furnace 21 and comprises several cavitys 31～34, one bleed unit 4, several first control valves 51～54, several second control valves 55～58, a bypass flow-limiting valve 59, one first pipe-line cell 61, one second pipe-line cell 62, one the 3rd pipe-line cell 63 and a filter 64.In the present embodiment, the volume of each cavity 31～34 equates, but also can decide on demand, and the volume settings of each cavity 31～34 is become unequal.
This unit 4 of bleeding is used to extract out the gas in each cavity 31～34, and with so that each cavity 31～34 is nearly vacuum state, this unit 4 of bleeding has the relief opening 42 that can discharge gas.In the present embodiment, this unit 4 of bleeding is made up of several vacuum pumps 41, is used in each time when bleeding, and starts quantity and decide by demand, can all start, also wherein several of startup only.Common vacuum pump 41 accessible pressure are for being about 10
-2Pa, even can be lower.
Described first and second control valve 51～58 connects two places (being presented at the two ends of each cavity among the figure) of each cavity 31～34 accordingly respectively, passes in and out each cavity 31～34 in order to control gaseous.In the present embodiment, each first and second control valve 51～58th sees through the control that circuit design opens and closes, but also can utilize the effect of air pressure or hydraulic pressure, controls the action of above-mentioned control valve.
This first pipe-line cell 61 is communicated with each first control valve 51～54 and this unit 4 of bleeding.This second pipe-line cell 62 is communicated with each second control valve 55～58 and this room 211.The 3rd pipe-line cell 63 is communicated with this first and second pipe-line cell 61,62.
59 of this bypass flow-limiting valves are located on the 3rd pipe-line cell 63, can be used for controlling the flow that circulates in gas in the 3rd pipe-line cell 63, make this room 211 be kept appropriate vacuum, need to utilize for processing procedure.On reality is used, can start one or several described vacuum pumps 41 on demand, and control this bypass flow-limiting valve 59, except the degree of vacuum of the room 211 that can keep this smelting furnace 21, the consumption that also can save the energy.This filter 64 can be in order to the impurity in the filtering gas.In the present embodiment, this filter 64 is arranged on this second pipe-line cell 62, but also this filter 64 can be arranged on the relief opening 42 of this unit 4 of bleeding, to obtain clean gas.
Below how the explanation present embodiment reaches the effect of bleeding fast.For convenience of description, the spy is divided into first, second, third and fourth group with described cavity 31～34 with first and second control valve 51～58, as among Fig. 2 from the order shown in the right side, a left side, make each group first and second control valve 51～58 of one cavity 31～34 all being arranged and connecting this cavity 31～34.Several hypothesis were arranged before explanation:
1. this smelting furnace 21 is to operate under normal pressure, and just the pressure of this room 211 is a barometric pressure, is equivalent to 1.013 * 10
5Pa.
2. the volume of each cavity 31～34 is 3 times of room 211 volumes of this smelting furnace 21.
Since the volume of this first, second and third pipe-line cell 61～63 much smaller than the volume of this room 211 and each cavity 31～34, so can ignore its influence.
At first, make described first control valve 51～54 open and described second control valve 55～58 is closed, make this unit 4 of bleeding extract the gas in each cavity 31～34 out and be nearly vacuum state, just the pressure of each cavity 31～34 all can reach 10
-2Pa.
Then, close all first control valves 51～54.When second control valve 55 of only opening first group, because of the pressure (1.013 * 10 of this room 211
5Pa) greater than the pressure (10 of this cavity 31
-2Pa), so the gases in this room 211 can flow in this cavity of first group 31 apace, equate that with the pressure of this cavity of first group 31 just the pressure of this room 211 is from 1.013 * 10 up to this room 211
5Pa reduces to 2.5 * 10 fast
4Pa.And the pressure of this cavity of first group 31 is from 10
-2Pa increases to 2.5 * 10
4Pa.
Close first group second control valve 55 again, and open second group second control valve 56, at this moment, the pressure of this room 211 can be from 2.5 * 10
4Pa reduces to 6.3 * 10 fast
3Pa.And the pressure of this cavity of second group 32 is from 10
-2Pa increases to 6.3 * 10
3Pa.
Similar above-mentioned situation is closed second group second control valve 56 earlier, opens the 3rd group second control valve 57 again, and the pressure of this room 211 can be again from 6.33 * 10
3Pa reduces to 1.58 * 10 fast
3Pa.The pressure of the 3rd group cavity 33 is then from 10
-2Pa increases to 1.58 * 10
3Pa.
Similarly, when closing the 3rd group second control valve 57 and opening the 4th group second control valve 58, the pressure of this room 211 can be again from 1.58 * 10
3Pa reduces to 395Pa fast.The pressure of the 4th group cavity 34 is then from 10
-2Pa increases to 395Pa, reaches the effect of classification step-down whereby.At this moment, the pressure that the pressure of this room 211 just meets second and third stage of VOD processing procedure require (100～500Pa), be able to this molten steel 212 is removed impurity element.
When the degree of vacuum of this room 211 does not satisfy process requirement gradually, can make this unit 4 starts of bleeding, and see through this bypass flow-limiting valve 59 in order to control the flow that it is bled, keep the required degree of vacuum of this room 211.
When needs are opened this smelting furnace 21, need make this smelting furnace 21 recovery pressure earlier, need the reverse operating said sequence this moment.When second control valve 57 of only opening the 3rd group, because the pressure (1.58 * 10 in the 3rd group the cavity 33
3Pa) greater than the pressure (395Pa) of this room 211, therefore, gas in the 3rd group the cavity 33 can flow in this room 211 apace, equates that with the pressure of this cavity of first group 31 just the pressure of this room 211 increases to 1.28 * 10 from 395Pa up to this room 211
3Pa.And the pressure of the 3rd group cavity 33 is from 1.58 * 10
3Pa drops to 1.28 * 10
3Pa.
When opening this second control valve 56 of second group when closing the 3rd group second control valve 57, the pressure of this room 211 is from 1.28 * 10
3Pa increases to 5.06 * 10
3Pa.And the pressure of this cavity of second group 32 is from 6.3 * 10
3Pa drops to 5.06 * 10
3Pa.
Same reason, when opening this second control valve 55 of first group when closing this second control valve 56 of second group, the pressure of this room 211 is from 5.06 * 10
3Pa increases to 2.0 * 10
4Pa.And the pressure of this cavity of first group 31 is from 2.5 * 10
4Pa drops to 2.0 * 10
4Pa.
The pressure of this room 211 approximately can be replied half (about 0.5 barometric pressure), therefore, only need utilize this valve member unit 24 again, make these air reservoir 23 output gases to this smelting furnace 21, to supply pressure to one barometric pressure, just can open this smelting furnace 21, also can save the gas use amount of this air reservoir 23, reduce the expenditure of cost.
When desiring to carry out the VOD processing procedure of next stove,, be respectively 2.0 * 10 as the pressure of this cavity of the first～four group 31～34 because each cavity 31～34 is still possessed the degree of vacuum of certain degree
4Pa, 5.06 * 10
3Pa, 1.28 * 10
3Pa, and 395Pa.Therefore, each cavity 31～34 is pumped into pressure again is 10 to desire
-2During Pa, finish the time of bleeding except shortening, and can save the consumption of the energy.
As shown in Figure 3, cooperate Fig. 2 again, a preferred embodiment of multistage vacuum pumping method of the present invention is used for reducing fast the pressure of this room 211, and this multistage vacuum pumping method comprises a pump step 101, a depressurization steps 102, and a back pressure step 103.
This pump step 101 is to close each second control valve 55～58 and open each first control valve 51～54, utilizes this unit 4 of bleeding to extract gas in each cavity 31～34 out.
This depressurization steps 102 is closed each first control valve 51～54 and is controlled each second control valve 55～58 again, makes each cavity 31～34 according to communicating with this room 211 respectively in proper order and reaching pressure balance, and the pressure of this room 211 is reduced apace.
This back pressure step 103 is each second control valve 55～58 of control, make each cavity 31～34 communicate with this room 211 respectively and reach pressure balance in contrast to the order of this depressurization steps 102, and with the gas feedback in this room 211, and allow the pressure of this room 211 reply one by one.
As shown in Figure 4, one second preferred embodiment of multistage vacuum pumping device of the present invention can be applicable in the VOD refining equipment equally, and the element that this refining equipment is formed is identical with this first preferred embodiment, is not described in detail at this.This multistage vacuum pumping device comprises several cavitys 71～74, one bleed unit 8, several first control valves 91～94, a pipe-line cell 95, a filter 96, and one second control valve 97.
This unit 8 of bleeding can be used for extracting the gas in each cavity 71～74 and has the relief opening 82 that can discharge gas.In the present embodiment, this unit of bleeding is made up of several vacuum pumps 81, and the accessible pressure of common vacuum pump is for being about 10
-2Pa, even can be lower.
Described first control valve 91～94 connects each cavity 71～74 and this unit 8 of bleeding respectively, is used for control gaseous and passes in and out each cavity 71～74.
This filter 96 can be in order to the impurity in the filtering gas.In the present embodiment, this filter 96 is arranged on this pipe-line cell 95 and between this smelting furnace 21 and this cavity 71, still also can be arranged on the relief opening 82 of this unit 8 of bleeding.
This second control valve 97 is located at this pipe-line cell 95 and between this smelting furnace 21 and this filter 96, is can be used for controlling the flow that circulates in gas in this pipe-line cell 95, makes this room be kept appropriate vacuum.
Control this second control valve 97 and each first control valve 91～94, make this unit 8 of bleeding extract the gas in each cavity 71～74 out and be nearly vacuum state earlier, make each cavity 71～74 according to communicating with this room 211 respectively in proper order and reaching pressure balance again, the pressure of this room 211 is reduced one by one.At last, control each first control valve 91～94 again, make each cavity 71～74 communicate with this room 211 respectively and reach pressure balance in contrast to said sequence, and with the gas feedback in this room 211, and allow the pressure of this room 211 reply one by one.
Conclude above-mentionedly, multistage vacuum pumping device of the present invention and vacuum pumping method thereof can reach effect purpose of the present invention really.
Claims (15)
1. a multistage vacuum pumping device is applicable to the pressure that reduces a room, it is characterized in that:
This vacuum pumping device comprises several cavitys, bleed unit, a control valve unit, reach the pipe-line cell of this control valve unit of connection and the unit of bleeding, this unit of bleeding is used to extract the gas in each cavity, to reduce the pressure of each cavity, this control valve unit connects each cavity, pass in and out each cavity in order to control gaseous, utilize this unit of bleeding to extract the gas in each cavity in advance and be nearly vacuum state, control this control valve unit again, each cavity is connected with this room respectively.
2. multistage vacuum pumping device as claimed in claim 1 is characterized in that: this unit of bleeding is made up of several vacuum pumps.
3. multistage vacuum pumping device as claimed in claim 1 is characterized in that: this control valve unit is made up of several control valves, and each control valve is to see through the control that the mode of circuit design opens and closes.
4. a multistage vacuum pumping device is applicable to the pressure that reduces a room and has the function of gas feedback, it is characterized in that:
This multistage vacuum pumping device comprises several cavitys, one is used to draw gas in each cavity with the pressure that reduces each cavity unit of bleeding, several first control valves, one first pipe-line cell, several second control valves, and one second pipe-line cell, each first control valve connects an end of each cavity respectively, pass in and out each cavity in order to control gaseous, this first pipe-line cell, be communicated with each first control valve and this unit of bleeding, each second control valve, the other end that connects each cavity respectively, be used for control gaseous and pass in and out each cavity, this second pipe-line cell, be communicated with each second control valve and this room
Control each first and second control valve, make this unit of bleeding extract the interior gas of each cavity out earlier, then, make each cavity communicate with this room respectively again and reach pressure balance, the pressure of this room is reduced one by one, at last, control each second control valve again, make each cavity communicate with this room respectively and reach pressure balance in contrast to said sequence.
5. multistage vacuum pumping device as claimed in claim 4 is characterized in that: this unit of bleeding is made up of several vacuum pumps.
6. multistage vacuum pumping device as claimed in claim 4 is characterized in that: this multistage vacuum pumping device also comprises a filter that is arranged on this second pipe-line cell.
7. multistage vacuum pumping device as claimed in claim 4 is characterized in that: this unit of bleeding has a relief opening that the gas of suction is discharged, and this multistage vacuum pumping device also comprises a filter that is connected the relief opening of this unit of bleeding.
8. multistage vacuum pumping device as claimed in claim 4, it is characterized in that: this multistage vacuum pumping device also comprises the 3rd pipe-line cell of this first and second pipe-line cell of connection, and a bypass flow-limiting valve of being located on the 3rd pipe-line cell, this bypass flow-limiting valve can be used for controlling the flow that circulates in gas in the 3rd pipe-line cell.
9. multistage vacuum pumping method is used to reduce the pressure of a room, it is characterized in that:
This multistage vacuum pumping method comprises a pump step and a depressurization steps, this pump step is to open each first control valve and close each second control valve, utilize the unit of bleeding again, gas in each cavity is extracted out, this depressurization steps is to close each first control valve and control each second control valve again, each cavity is communicated with this room respectively in regular turn and reaches pressure balance.
10. multistage vacuum pumping method as claimed in claim 9 is characterized in that: this multistage vacuum pumping device also comprises a back pressure step, by each second control valve of control, each cavity is communicated respectively with this room in contrast to the order of this depressurization steps.
11. a multistage vacuum pumping device is applicable to the pressure that reduces a room, it is characterized in that:
This multistage vacuum pumping device comprises several cavitys, one unit of bleeding, several first control valves, one second control valve, an and pipe-line cell, this unit of bleeding is used to draw the gas in each cavity, to reduce the pressure of each cavity, each first control valve connects each cavity and this room respectively, be used for control gaseous and pass in and out each cavity, this second control valve connects this room and is used for control gaseous and passes in and out this room, this pipe-line cell is communicated with each first control valve, this second control valve and this unit of bleeding
Control this second control valve and each first control valve, make this unit of bleeding extract the interior gas of each cavity out earlier, each cavity is communicated with this room respectively and reach pressure balance, the pressure of this room is reduced one by one, at last, control each first control valve again, make each cavity communicate with this room respectively and reach pressure balance in contrast to said sequence.
12. multistage vacuum pumping device as claimed in claim 11 is characterized in that: this unit of bleeding is made up of several vacuum pumps.
13. multistage vacuum pumping device as claimed in claim 11 is characterized in that: this multistage vacuum pumping device also comprises a filter that is arranged on this pipe-line cell.
14. multistage vacuum pumping device as claimed in claim 11 is characterized in that: this unit of bleeding has a relief opening that the gas of suction is discharged, and this vacuum system also comprises a filter that is connected the relief opening of this unit of bleeding.
15. multistage vacuum pumping device as claimed in claim 11 is characterized in that: this second control valve is the circulate gas flow of this pipe-line cell of may command also.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100811144A CN100491721C (en) | 2005-06-27 | 2005-06-27 | Multi-stage type vacuum pumping device and vacuum pumping method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100811144A CN100491721C (en) | 2005-06-27 | 2005-06-27 | Multi-stage type vacuum pumping device and vacuum pumping method thereof |
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| CN1888426A true CN1888426A (en) | 2007-01-03 |
| CN100491721C CN100491721C (en) | 2009-05-27 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
| CN103228914A (en) * | 2010-12-22 | 2013-07-31 | 株式会社爱发科 | Evacuation device, vacuum processing device, and evacuation method |
| CN108424996A (en) * | 2018-04-04 | 2018-08-21 | 中冶南方工程技术有限公司 | The emulation mode of dry type oil-sealed rotary pump pumping process for RH vacuum refinings |
| CN108636270A (en) * | 2018-05-21 | 2018-10-12 | 河北银隆新能源有限公司 | A kind of control method and battery production mixing plant of equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101982658B (en) * | 2010-09-01 | 2012-02-15 | 中国科学院广州地球化学研究所 | Small scale/minitype ultrahigh vacuum device |
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2005
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
| CN102713287B (en) * | 2009-12-28 | 2015-04-15 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
| TWI503481B (en) * | 2009-12-28 | 2015-10-11 | Ulvac Inc | A vacuum venting device and a vacuum venting method, and a substrate processing device |
| CN103228914A (en) * | 2010-12-22 | 2013-07-31 | 株式会社爱发科 | Evacuation device, vacuum processing device, and evacuation method |
| CN103228914B (en) * | 2010-12-22 | 2015-09-30 | 株式会社爱发科 | Vacuum pumping hardware and vacuum treatment installation and evacuation method |
| CN108424996A (en) * | 2018-04-04 | 2018-08-21 | 中冶南方工程技术有限公司 | The emulation mode of dry type oil-sealed rotary pump pumping process for RH vacuum refinings |
| CN108424996B (en) * | 2018-04-04 | 2021-01-05 | 中冶南方工程技术有限公司 | Simulation method for air pumping process of full-dry mechanical vacuum pump for RH vacuum refining |
| CN108636270A (en) * | 2018-05-21 | 2018-10-12 | 河北银隆新能源有限公司 | A kind of control method and battery production mixing plant of equipment |
| CN108636270B (en) * | 2018-05-21 | 2020-12-04 | 河北银隆新能源有限公司 | Control method of equipment and stirring equipment for battery production |
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| CN100491721C (en) | 2009-05-27 |
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