CN1885757A - High-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface - Google Patents

High-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface Download PDF

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Publication number
CN1885757A
CN1885757A CN 200610088241 CN200610088241A CN1885757A CN 1885757 A CN1885757 A CN 1885757A CN 200610088241 CN200610088241 CN 200610088241 CN 200610088241 A CN200610088241 A CN 200610088241A CN 1885757 A CN1885757 A CN 1885757A
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China
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resonant cavity
lightwave circuit
transmission interface
cavity filter
optical path
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CN 200610088241
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Chinese (zh)
Inventor
孙小菡
蔡纯
肖金标
刘旭
柏宁丰
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Southeast University
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Southeast University
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Priority to CN 200610088241 priority Critical patent/CN1885757A/en
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The disclosed multi-way transmission interface high-performance plane light-wave light path resonant cavity fiber comprises: an up/down-path light-wave path connected to input/output end of light signal, and a resonant cavity, wherein the up path couples selected light signal by multimode interference coupling effect to send to the down path. This invention can improve device performance and fit to wide application.

Description

High-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface
One, technical field
The invention belongs to the integrated opto-electronic field, relate to a kind of novel passive integrated optical device, specifically a kind of high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface.
Two, background technology
The multichannel light filter is one of core devices of dense wave division multipurpose (DWDM) optical communication system, optical computer system, biomedical photon detection system etc., and its performance has determined the performance of whole system.The plane optical wave optical path resonant cavity mode filter easily and device monolithics such as lightwave circuit modulator/switch, heterogeneous semiconductor PN junction laser PN integrated, be convenient to constitute following all kinds of miniaturization photonic system.The plane optical wave optical path resonant cavity mode filter that has occurred at present can only be by a certain direction transmission filtering signal, has limited with other optical devices arrangement degree of freedom when integrated and the transmission of light signal, and desire improves device performance need pay the size cost.
Three, summary of the invention
The purpose of this invention is to provide a kind of high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface, this filter has overcome in the prior art can only can transmit filtered optical signal along a plurality of directions by a kind of shortcoming of direction transmission filtered optical signal.
The objective of the invention is to be achieved through the following technical solutions:
A kind of high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface is characterized in that: it comprises the lightwave circuit of setting out on a journey, resonant cavity and following road lightwave circuit, and the described lightwave circuit of setting out on a journey is connected with the light signal input; Following road lightwave circuit is connected with light signal output end; Set out on a journey between lightwave circuit and one group of resonant cavity by will being coupled and passing to road lightwave circuit under a group again by the light signal of frequency-selecting after the multiple-mode interfence coupling, by the light signal output of road lightwave circuit under a group after frequency-selecting.
Among the present invention, described resonant cavity is any one in garden dish-type, circular ring type and the square type.
Road lightwave circuit and corresponding resonant cavity are tangent and be arbitrarily angled inclination under described one group.The angle of inclination can require according to the outbound course of light signal to set.
Disturb for avoiding between two adjacent resonators and producing between lightwave circuit and the lightwave circuit, two adjacent resonant cavitys are the 1-4 micron apart.Two adjacent following road lightwave circuits are the 5-10 micron apart.
Among the present invention, see accompanying drawing 1, accompanying drawing 1 is a multidirectional transmission interface optical wave optical path resonant cavity filter structural representation.Light signal is from the left end input of the lightwave circuit of setting out on a journey, light signal is coupled into the garden dish-type of ground floor by the multiple-mode interfence coupling between lightwave circuit and the resonant cavity, in the main resonance cavities such as circular ring type and square type, resonant cavity plays both filtering of resonant selecting frequency, be coupled in two resonant cavitys of both sides symmetry through multiple-mode interfence again by the light signal of frequency-selecting, the resonant cavity of two symmetries is several microns distance apart, the left side of the resonant cavity of on the left side place one with resonant cavity tangent be the following road lightwave circuit (also being to be coupled) that tilts to the right at any angle with multiple-mode interfence, then form the filtering signal that tilts to the right and export; Similarly, on the right the right side of resonant cavity place with resonant cavity tangent be inclination following road lightwave circuit left, then form the filtering signal output of tilting left.Coupling among the present invention between lightwave circuit and the resonant cavity all adopts the mode of multiple-mode interfence coupling, to strengthen the energy of I/O coupling optical signal.
Beneficial effect of the present invention is as follows:
The present invention adopts the multiple-mode interfence coupling, at grade can be along a plurality of direction output filtered optical signal, be convenient to realize effective combination of all kinds of resonant cavitys, improve device performance, being connected and row portion when being convenient to other optical device formation integrated optical device module, and integrated with other optical devices such as LASER Light Source, optical modulator/optical switch etc.Accompanying drawing 1 is a structural representation of the present invention; As special case, accompanying drawing 2 has provided that the edge of plane optical wave optical path resonant cavity filter of the multidirectional transmission interface that is made of the garden ring shape resonator is vertical, the propagation The simulation experiment result of the light wave electromagnetic field of horizontal output, by the light wave in the accompanying drawing 2 visible lightwave circuits by the single mode mode propagation.
Four, description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the light wave transmissions field pattern of multidirectional transmission interface optical wave optical path resonant cavity filter;
Fig. 3 is the process chart with pattern mask fabrication techniques plane resonantor filter;
Fig. 4 (a) is the schematic diagram of 6 rectangular cavities standing wave type filter that constitutes in parallel;
Fig. 4 (b) is the filter electromicroscopic photograph figure of 6 rectangular cavities standing wave type filter that constitutes in parallel;
Fig. 4 (c) is the filtering characteristic figure of 6 rectangular cavities standing wave type filter that constitutes in parallel;
Fig. 5 (a) is the group delay figure of rectangular cavity filter in parallel;
Fig. 5 (b) is the chromatic dispersion figure of rectangular cavity filter in parallel;
Fig. 5 (c) is the differential group delay figure of rectangular cavity filter in parallel;
Fig. 5 (d) is the Polarization Dependent Loss dependence test curve chart of rectangular cavity filter in parallel;
Fig. 6 (a) is the schematic diagram of racetrack resonant cavity filter in parallel
Fig. 6 (b) is the stereoscan photograph of racetrack resonant cavity filter in parallel;
Fig. 6 (c) is the filtering characteristic figure of racetrack resonant cavity filter in parallel;
Fig. 6 (d) is the device local pictures of racetrack resonant cavity filter in parallel;
Fig. 7 (a) is the schematic diagram of rectangle-annulus filter;
Fig. 7 (b) is the stereoscan photograph of rectangle-annulus filter;
Fig. 7 (c) is the filtering characteristic figure of rectangle-annulus filter;
Fig. 8 (a) is the group delay figure of the rectangle-resonant cavity filter that goes in ring;
Fig. 8 (b) is the chromatic dispersion figure of the rectangle-resonant cavity filter that goes in ring;
Fig. 8 (c) is the differential group delay figure of the rectangle-resonant cavity filter that goes in ring;
Fig. 8 (d) is the Polarization Dependent Loss figure of the rectangle-resonant cavity filter that goes in ring.
Five, embodiment
A kind of high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface comprises the lightwave circuit 1 of setting out on a journey, resonant cavity 2 and following road lightwave circuit 3, and the lightwave circuit 1 of setting out on a journey is connected with the light signal input; Following road lightwave circuit 3 is connected with light signal output end; Set out on a journey 2 of lightwave circuit 1 and one group of 3 resonant cavitys by being coupled and passing to one group 2 following road lightwave circuits 3 again by the light signal of frequency-selecting after the multiple-mode interfence coupling, the light signal after the frequency-selecting is exported by 2 following road lightwave circuits 3.
Because the media plane optical wave optical path resonant cavity is generally three types of both circular ring type, collar plate shape and rectangles, so this three classes resonant cavity is arranged by tangent in twos mode and carry out optical coupling with road lightwave circuit up and down by the form of multiple-mode interfence coupling, then all can constitute the planar lightwave circuit filter with multidirectional transmission structure as shown in Figure 1.Disturb for avoiding between two symmetric resonators and producing between lightwave circuit and the lightwave circuit, two resonant cavitys should separate the distance of 3-6 micron, separate between the lightwave circuit about 5-10 μ m.The making of media plane lightwave circuit device is all by means of microelectronic technique and technology, and Fig. 3 is for adopting the process chart of the multidirectional transport plane optical wave optical path resonant cavity filter of pattern mask fabrication techniques.
With InP/InGaAsP-MQW is waveguide material, on the basis of three-dimensional FDTD analogue simulation, the growth of based semiconductor material, pattern mask and photoetching process, having made resonant cavity filter is runway shape in parallel, rectangle in parallel and rectangle-belt resonant cavity type filter chip that mixes 3 types of shapes, and nude film is tested.Except that the power spectrum chart of having tested the corresponding port of filter with the 86142B spectroanalysis instrument (OSA) of Agilent company, also adopt PDL, GD, DGD and CD parameter that the 81910A photon population parameter tester of Agilent has been tested device.
A kind of rectangle type resonant cavity filter in parallel of the present invention.
Fig. 4 is 6 rectangular cavities standing wave type filters that constitute in parallel, rectangular cavity is of a size of 10 * 10 μ m, spacing between the resonant cavity is 1.5 μ m, the filter length overall is 3000 μ m, waveguide port has increased by one section trapezoidal SSC changeover portion, as seen in the wave-length coverage of ripple 1520-1538nm 8 filtering crests and more obvious is arranged by Fig. 4 (c), and FSR is about 3nm, maximum FWHM is about 3nm, and F is about 1.0.
Provided the group delay (GD) of rectangular cavity filter in parallel by Fig. 5 (a)-(c); (b) chromatic dispersion (CD); (c) differential group delay (DGD); (d) Polarization Dependent Loss (PDL) dependence test curve.As seen, in the scope of the about 10nm of 1537.5-1547.5nm, group delay changes violent, at other wave band place is a constant value, this shows at this wave band InP/InGaAsP-MQW material stronger material dispersion, can estimate the minimum bandwidth of device approximately near 0.2Tb/s in conjunction with the chromatic dispersion of Fig. 5 (b).Fig. 5 (d) has provided the Polarization Dependent Loss of rectangular cavity filter in parallel, and at the 1544nm place, about 0.15dB is 1dB at the 1550nm place.
Another kind of racetrack resonant cavity filter in parallel of the present invention.
Fig. 6 (a) and (b), (d) are respectively structural representation, stereoscan photograph and the local electromicroscopic photograph of racetrack resonant cavity filter in parallel.Rectangular block in the photo is an electrode.Fig. 6 (c) is corresponding filtering spectrogram, and 17 filtering crests are arranged as seen from the figure approximately, and FSR is about 1.5nm, and FWHM is about 1nm, and F is about 1.5, and the filtering crest is more obvious in the scope of 1520-1535nm.
Another square of the present invention-annulus hybrid resonant cavity filter.
Fig. 7 (a) and (b) and the schematic diagram that (c) is respectively rectangle-annulus resonant cavity filter, stereoscan photograph and corresponding filtering characteristic test curve.FWHM is about 20nm.Fig. 8 has provided GD, CD, DGD and the PDL of the rectangle-resonant cavity filter that goes in ring, and minimum bandwidth is about 0.2Tb/s, and Polarization Dependent Loss at about 1542-1554nm place is≤1.25dB.

Claims (5)

1, a kind of high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface is characterized in that: it comprises the lightwave circuit of setting out on a journey (1), resonant cavity (2) and following road lightwave circuit (3), and the described lightwave circuit of setting out on a journey (1) is connected with the light signal input; Following road lightwave circuit (3) is connected with light signal output end; Set out on a journey between lightwave circuit (1) and one group of resonant cavity (2) by will being coupled and passing to road lightwave circuit (3) under a group again by the light signal of frequency-selecting after the multiple-mode interfence coupling, the light signal after the frequency-selecting is exported by road lightwave circuit (3) under a group.
2, high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface according to claim 1 is characterized in that: described resonant cavity (2) is any one or a few the mixing in garden dish-type, circular ring type and the square type.
3, high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface according to claim 1 is characterized in that: road lightwave circuit (3) and corresponding resonant cavity (2) are tangent and be arbitrarily angled inclination under described one group.
4, high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface according to claim 1 is characterized in that: two adjacent resonant cavitys (2) are at a distance of being the 1-4 micron.
5, high-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface according to claim 1 is characterized in that: two adjacent following road lightwave circuits (3) are at a distance of being the 5-10 micron.
CN 200610088241 2006-07-05 2006-07-05 High-performance plane optical wave optical path resonant cavity filter with multidirectional transmission interface Pending CN1885757A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108536929A (en) * 2018-03-23 2018-09-14 电子科技大学 A method of solving waveguiding structure dispersion characteristics using ARPACK

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108536929A (en) * 2018-03-23 2018-09-14 电子科技大学 A method of solving waveguiding structure dispersion characteristics using ARPACK

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