CN1883890A - Multiwire cutting loading control method - Google Patents

Abstract

The invention relates to cutting control technology field, in particular a method for multiple-wire cutting load control, characterized in that load pressure of workpiece suffered from the cutting wire is measured by means of sensing device, employing the mode of adjusting feeding speed and wire speed of cutting by using load pressure as a parameter in the whole cutting process or part of the process, value of the load pressure can be set in advance, or to be changed according to certain mode during the cutting process. Angularity and the generation of saw-line can be well controlled by this cutting mode, and requirement for other cutting essential is depressed. Fluctuation in controlled range of the cutting result can be assured in certain scope, and good repeatability is provided.

Description

Multiwire cutting loading control method

Technical field

The present invention relates to cut the control technology field, particularly a kind of multiwire cutting loading control method.

Technical background

(its operation principle is: use superfine steel wire to be widely used in the multi-line cutting machine of electron trade at present, be wrapped in repeatedly on 2 to 4 cylinders, form hundreds of roads steel wire, steel wire motion then, be aided with the cutting oil-bound distemper, workpiece to be machined cuts near steel wire, and semi-conducting material and various optical crystal glass such as quartz, silicon materials, GaAs are generally arranged).

Main cutting parameter: 1, the workpiece feed speed speed of table just; 2, the line of motion speed of steel wire; Present employed cutting control mode is generally at the uniform velocity cutting, just the relative approaching feed speed of cutting steel wire of She Dinging and workpiece is constant, or carry out the variation of speed according to the shape of workpiece, on the cut surface of cutting products, produce rough saw line during these two kinds cutting control model cuttings easily, bring very big difficulty for road, back manufacturing procedure, in process, cause being cut the breakage of workpiece easily; Be easy to generate bigger angularity warp after the cutting simultaneously, especially to thin semiconductor wafer, and this class wafer to the requirement of angularity also than higher, bigger if the angularity that cutting produces departs from requirement, the repair coverage that exceeds later process will cause product rejection.Adopt in addition these two kinds cutting control modes to reach cutting effect preferably each key element in the cutting process is required very tight because several factors is difficult to control and expects, cutting repeated relatively poor.

Summary of the invention

The present invention is a kind of new multi-thread cutting control mode, characteristics are them by the suffered load pressure from the cutting steel wire of sensor measurement workpiece (in cutting mode at the uniform velocity, it is constantly to change), in cutting overall process or part process, use the mode of adjusting cutting feed speed, steel wire speed with load pressure as parameter, the value of load pressure can preestablish, and perhaps changes according to certain mode in cutting process.This cutting mode can be controlled the generation of angularity and saw line preferably, and the requirement to other cutting key element simultaneously reduces, and can guarantee all that within the specific limits cutting the result fluctuates in controllable scope, has better repeatability.

A kind of control method of multi-thread cutting uses the load pressure that is born with workpiece to be major parameter in whole cutting process or cutting part process, regulates cutting feed speed and steel wire movement velocity.

The control method of described multi-thread cutting, load pressure can be predefined fixedly changing pattern, also can automatically set according to certain mode after according to certain function calculation and change according to the load pressure in measuring, the mode of control satisfies predefined load pressure requirement for adjusting cutting feed speed and steel wire speed simultaneously, also can adjust some parameters separately and satisfy predefined load pressure requirement.

Description of drawings

Fig. 1 is a multiwire cutting loading control system block diagram of the present invention.

Fig. 2 is a multiwire cutting loading control method flow chart of the present invention.

The specific embodiment

In the multiwire cutting loading control system of Fig. 1, the load pressure value that draws after load pressure that the detected load pressure value of cutting parameter control system is set together or the calculating compares, send instruction according to deviation and regulate cutting parameter, be sent to diced system afterwards, be sent to the load pressure sensor by diced system again and detect load pressure parameter in the cutting, be sent to the cutting parameter control system afterwards.

The multiwire cutting loading control method flow chart of Fig. 2, its step is as follows:

Step S1: when adopting load controlled method to cut control, sensor detects the load value of cutting loading pressure and sends to cutting control system;

Step S2: cutting control system compares with the value of the load pressure numerical value that receives and setting or according to the result after certain functional operation, and provide comparing result, if comparing result satisfies certain when requiring then continue to carry out present cutting parameter, if comparing result does not satisfy certain when requiring then send instruction, adjust cutting feed speed and steel wire speed simultaneously or adjust some parameters separately and satisfy requirement comparing result;

Step S3: diced system is carried out the cutting control system instruction, and the variation of cutting parameter will cause that new load pressure changes, and process turns back to step S1.

Claims (3)

1, a kind of control method of multi-thread cutting is characterized in that, uses the load pressure that is born with workpiece to be major parameter in whole cutting process or cutting part process, regulates cutting feed speed and steel wire movement velocity.

2, according to the control method of the multi-thread cutting of claim 1, it is characterized in that, load pressure can be predefined fixedly changing pattern, also can automatically set according to certain mode after according to certain function calculation and change according to the load pressure in measuring, the mode of control satisfies predefined load pressure requirement for adjusting cutting feed speed and steel wire speed simultaneously, also can adjust some parameters separately and satisfy predefined load pressure requirement.

3. according to the control method of the multi-thread cutting of claim 1, it is characterized in that its step is as follows:

Step S1: when adopting load controlled method to cut control, sensor detects the load value of cutting loading pressure and sends to cutting control system;

Step S2: cutting control system compares with the value of the load pressure numerical value that receives and setting or according to the result after certain functional operation, and provide comparing result, if comparing result satisfies certain when requiring then continue to carry out present cutting parameter, if comparing result does not satisfy certain when requiring then send instruction, adjust cutting feed speed and steel wire speed simultaneously or adjust some parameters separately and satisfy requirement comparing result;

Step S3: diced system is carried out the cutting control system instruction, and the variation of cutting parameter will cause that new load pressure changes, and process turns back to step S1.

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