CN1882031B - Method and equipment for forming multi-focusing images - Google Patents

Abstract

The present invention provides a method for producing targeted multiple focus pile images, which comprises the steps of utilizing relative scanning movement between targeted and photodetector arrays, receiving repeatedly the image information of the scanning lines, transforming the relative focusing between the targeted and arrays, thus obtaining each images in the pile.

Description

Form the method and apparatus of multi-focusing images

Technical field

The present invention relates to form the method and apparatus of multi-focusing images.

Background technology

In some market segments such as medical application, utilize microexamination sample and utilization to be attached to microscopical two-dimensional digital camera generating digital image.The observed sample that digital camera is caught is restricted at area.For the object lens of 40x, typical area only is that 0.7mm is wide.Be given as in 64 * 24mm situation at the effective area on the slide, possible sample area only is very little area.A kind of way to this is stepping and repetition on whole sample area, and it also is called grand shake.Preferred processing is to utilize to be similar at US6, disclosed line scanning parts in 711,283, the rectangular data that wherein can collect 0.7 * 64mm.Thereby band that then can scanning neighbor can engage image or be stitched together, as explanation among the patent GB 2206011.

Such as US6, to mention in 711,283 like that, a problem of rectangular scanning is to keep focusing in whole sweep length.As an example, be that 0.65 40x lens depth of focus is about 1 micron for numerical aperture.Typical slide is by keeping the manufacturing of such tolerance limit, and may be because installation method or crooked above 1 micron under gravity when installing.And the sample itself of wanting imaging is uneven until 1 micron.At US6, address this problem by setting up focused view and dynamically adjust to focus on to cooperate with this focused view in scan period in sweep length individually in 711,283.Regrettably, be consuming time for each Sample Establishing focused view.Typical focus method is that then the same zone of scanning utilizes the evaluation algorithm to determine optimum focusing under different focusing levels.Have some evaluation algorithms that used, an example is the quadratic sum of getting the difference between adjacent image point.This evaluation algorithm produces as shown in Figure 1 function of example, and wherein peak value (indicating with arrow) is regarded focus as.

The another kind of method that is used for addressing this problem is to obtain the different scanning of a plurality of focusing levels.This is called to focus on piles or Z heap and shown in Figure 2.Its thought is, at any time in the focusing scanning image and later can make up Z image stack 400 to provide single focusedimage at least.Can obtain from some suppliers the software of combination image.The problem of the method, for the little depth of focus in the sample focus variations scope, many image layers need to cover complete focusing range and this can be consuming time.The optimum focusing line is shown on 401.Image in 402 heaps of different positions only provides useful information seldom.

Thereby need to solve these shortcomings.

Summary of the invention

We provide a kind of method that produces the multi-focusing images of target according to a first aspect of the present invention, and this heap image comprises a plurality of images of this target, and each image has corresponding focus or position, and the method comprises:

Cause the relative scanning motion between target and the photodetector array, this array is used for repeatedly receiving image information in the form scan period with scan line from this target; And

Scan period is being caused the relative focusing that changes between this target and this array between the described focus of each image or the position, thereby the image in obtaining piling, wherein each image is to be formed by the image information that obtains from each focus or position in scan period.

Thereby the present invention quite is different from art methods.Pile in the conventional method image and be by in succession picture frame and obtain, and obtain image by scan line in the present invention.Importantly, scan line is repeatedly to obtain in the situation of exchange between the different focal positions of image (fixing or in a scope) scan period, and then utilizes these scan lines to form the image of the difference focusing in this heap when the end of scan.It is focusing level or focus layer that these images can be thought of as.When scanning is discussed, should understand the output that under having more than the array of the detector of delegation this term comprises some detector line.But the quantity of the detector on the scan line is in the smallest number (approximately less than 16) of the order of magnitude greater than this array.

Thereby the present invention obviously is better than prior art in the situation that can use relatively cheap equipment.It needing also to avoid the Multiple-Scan target, and Multiple-Scan can throw into question in the information that record obtains.Do not need in addition for the auxiliary equipment that produces in advance focused view.It need at short notice and not also to allow in the later scanning situation very local zone to be obtained the different image informations that focus on.This helps to guarantee not change in any intervention stage optical equipment or sample and can be to the online change of focusing level is provided with the obvious target of configuration in the scanning.

Typically some areas of target are repeated the method and obtain multi-focusing images in the single sweep operation to target.Best, behind the scan line that obtains image information for certain specific image in the heap from target, revise relatively focusing on, thereby obtaining this scan line at least one other image before for described specific image obtains other scan line (image information) again.Thereby in the scan period focusing that can between image, circulate, to make up these images from each bar scan line.Can be for every width of cloth image obtain the public area of target or the image information of part, and can suspend relative motion in scan period and reach this point.Alternatively, scanning motion can be continuous substantially, thereby the image information that then can interpolation every width of cloth image be obtained forms the correspondence image with different focal positions or scope in this heap.

This array can be the one-dimensional array that defines first direction, and the relative scanning motion is on the direction that is approximately perpendicular to this first direction.Focal position or scope can evenly or unevenly separate on focusing on each other.Focusing range comprises the focal zone between two exterior focusing positions that are in this scope of restriction.When using focusing range, can be overlapping or not overlapping for the different images focusing range in the heap.When using focusing range, revise and focus on when scanning when proceeding every width of cloth image to be obtained in succession scan line thereby the method can be included in image information that scan period is used to the self-scanning row.Can use the focusing Assessment Curves as the function of focal position for this reason, thereby and the party's rule also can comprise the image control in the heap focused on given zone is covered " desirable " focal position.Can be arranged in the image of the bosom in the heap (group) corresponding with the ideal focusing position in these districts.

Can utilize each image in the heap to produce output image, these output images have according to the focusing range of the image that makes up it or the depth of focus of position.

This array can comprise a plurality of pixels that roughly are arranged in along the scanning direction in the subarray.They can roughly be that separate along the scanning direction and light each subarray adaptation reception corresponding color.

Obtain image information from adjacent district in some instances.When " m " individual integer subarray was provided, preferably the spacing of subarray was by seeing as mn-1 from array that to distinguish wide unit wherein n is the non-zero integer, typically make different constantly never the image information that obtains of same district interweave.

According to the dimension of array and the speed of the definite relative motion in location.

We provide a kind of equipment that is used for producing the multi-focusing images of target according to a second aspect of the present invention, and this heap image comprises a plurality of images of this target, and a plurality of images have corresponding focus or position, and this equipment comprises:

Photodetector array is used for form with scan line and receives image information from image;

Scanning means is used for providing the relative motion between this array and the target;

Focusing arrangement is used for the relative focusing between this array of control and the target, and

Control system is used for this scanning means of operation to cause the relative scanning motion between target and the photodetector array; Be used for adapting to this array is controlled repeatedly receive the image information from target in scan period; And be used for this focusing arrangement of operation between the described focus of each image or position, to cause the change of the relative focusing between target and this array in scan period, thereby each image in obtaining piling, wherein each image be by scan period each focus or the image information that obtains of position form.

This array can comprise one-dimensional array or a plurality of subarray that is arranged on the direction that is approximately perpendicular to the scanning direction.The quantity of pixel can be large, for example is about 5000.The quantity " m " of subarray can be provided, roughly separate along the integer section on the scanning direction in image thereby subarray is the correspondence image information that obtains from each section that separates.This separating can be that actual physics separates or be that optics separates equivalently, for example provides by the subarray that uses beam splitter and physics to separate.

For coloured image, thereby preferably subarray comprises that respectively filter receives the light corresponding with some particular colors.Focusing block can or be worked as it by mobile this array or target and be comprised that imaging len passes through the part realization focusing of mobile imaging lens or imaging len.When focusing block comprised folded mirror, focusing block was realized focusing on by mobile folded mirror.Also can use the controlled window of optical thickness, for example the active quartz window of photoelectricity or with the rotatable window as the variable light thickness of the function of angle of rotation for this reason.

This equipment and method can be used in some imaging applications, but have found that typically quite effectively it is beneficial to especially in the microscope at visual field and field depth.

Description of drawings

Referring now to description of drawings some examples according to method and apparatus of the present invention, in the accompanying drawing:

Fig. 1 illustrates technical known focusing Assessment Curves;

Fig. 2 illustrates prior art heap image and ideal focusing;

Fig. 3 is the perspective illustration of array scanning;

Fig. 4 illustrates the arrangement of scan line in the scanning;

Fig. 5 illustrates with three of " stopping-starting " scanning and focuses on accumulation;

Fig. 5 a illustrates a kind of specific three and focuses on the heap scheme;

Fig. 6 illustrates with three of smooth scan and focuses on heap;

Fig. 7 illustrates image unevenly spaced in the heap;

Fig. 8 illustrates the nonplanar image in the heap;

Fig. 9 illustrates the inhomogeneous spacing between the scan period image;

Figure 10 a illustrates the intersection of hypograph;

Figure 10 b illustrates the intersection of upper and lower focusing heap image;

Figure 11 illustrates during the focus tracking in focus Assessment Curves;

Figure 12 illustrates the edge that focuses on Assessment Curves during the focus tracking;

Figure 13 illustrates and follows the tracks of the image stack that focuses on;

Figure 13 a illustrates the heap to this sample;

Figure 14 illustrates the variation under extreme of the focus of this heap image;

Figure 15 illustrates on two positions of Figure 14 and focuses on Assessment Curves;

Three Wai Dui picture positions under Figure 16 illustrates in focus;

Figure 17 illustrates three positions, wherein two on the edge that focuses on;

Figure 18 illustrates the multi-row detector array;

Figure 19 a illustrates three adjacent capable detectors that focus on heap and smooth scan with three;

Figure 19 b illustrates four adjacent capable detectors that focus on heap and smooth scan with three;

Figure 19 c illustrates two adjacent capable detectors that focus on heap and smooth scan with three;

Figure 20 illustrates three capable detector arrays that separate;

Figure 21 a illustrates 3 row detectors with 2 line spaces;

Figure 21 b illustrates 3 row detectors with 5 line spaces;

Figure 21 c illustrates 3 row detectors with 8 line spaces.

Figure 22 a illustrates the 3 row detectors that focus on heap and smooth scanning with 2 line spaces, three;

Figure 22 b illustrates the 3 row detectors that focus on heap and smooth scanning with 5 line spaces, three; And 3 focal positions are shown;

Figure 22 c illustrates the 4 row detectors that focus on heap and smooth scanning with 3 line spaces, three;

Figure 23 illustrates the non-conterminous row detector with the constriction line;

Figure 24 illustrates the RGB with switches light scanning, and 3 row detectors with 2 line spaces and 3 focal positions are shown;

Figure 25 a illustrates a plurality of detectors that are arranged in the color group;

Figure 25 b illustrates a plurality of detectors that are arranged in the color list;

Figure 26 a illustrates the equipment that contains two beam splitters and three arrays;

Figure 26 b illustrates two arrays, two mirror structures;

Figure 26 c illustrates three arrays, two mirror structures;

The movement of Figure 27 a explanation detector head;

The movement of Figure 27 b explanation imaging len;

Figure 27 c illustrates the use of removable folded Shu Jing;

The movement of Figure 27 d explanation sample;

Moving member in Figure 27 e explanation imaging len;

Figure 27 f illustrates the example of tunable optical thickness;

Figure 27 g adopts the rotation window of variable light thickness; And

Figure 28 illustrates the distribution of variable light thickness.

Embodiment

The standard line scanning relates to single file x cell array, and each pixel is typically to a detector in should array.For colour, provide single row (for example RGB) to every kind of color in three colors.Follow traversing this single row on the direction perpendicular to the detector array row.This transverse moving speed is set to the distance that makes detector traversing pixel on the scanning direction behind once " line time " of detector, thereby next line time produces the pixel rows of a previous row of adjacency.This is shown in Figure 3, the scanning direction 1 dimension array of following the arrow among the figure.

Fig. 4 be from 1 the dimension array tail see 1 the dimension array scanning the perspective layout.Sideslip direction represents with arrow, the first scan line one token wherein, and the second row is with " 2 " mark, and the like.The simplest embodiment is scanning and focusing is adjusted on the different focusing heap positions moving between the next departure date.Fig. 5 illustrates the situation that obtains three such heaps.This relates to and stop-starts traversing scanning, but does not need the interpolation of the scan line in the same image.Can find out that the focus direction of indicating with vertical arrows among Fig. 5 is roughly in this case perpendicular to traversing (scanning) direction.Fig. 5 a illustrates in greater detail this scheme, and wherein linear array 1 has the direction on the plane that enters this figure.Utilize lens to reach focus variations.Sample with variable thickness is shown at 15 places, and this sample is positioned on the slide glass that serves as supporting.Represent the position of scan line with arrow X, and the scanning direction illustrates with Y.In this embodiment traversing " stopping-starting " action that has in traversing, this does not always wish, may cause being shown as the site error of beating because stop and starting transverse-moving mechanism in image.

Can be traversing being arranged to level and smooth (fixing sweep speed) in another embodiment, but its than Fig. 4 slow three times and produce the image shown in Fig. 6.Then interpolating method can be used if necessary in order to utilize adjacent image to renovate each Z heap image.Although these embodiment illustrate three and focus on the heap image, preferably can produce from 2 multi-focusing images to any actual quantity.Also needn't make these focus on heap image spaced at equal intervals, thereby for example may have 5 heap images, comprising three central authorities' heaps and two peripheral focus heaps.This is shown in Figure 7, wherein row 1 and 5 and more separate near the row 2,3 and 4 at interval largelyr.

Do not need to remain in the fixed pan focusing on heap.This illustrates in Fig. 8.Can follow predetermined on-plane surface projection in scan period or scan period such situation occurs by determining that repeatedly thereby best focus position is followed in the heap image-taking system of the non-planar surfaces in the sample.Such as explanation among Fig. 9 like that, in the ranks spacing needs not to be fixing in the interior adjacent image of heap.For example in Fig. 9, the unfixed spacing of upper and lower image shows in this heap, and three center image row have fixing spacing in scanning.

In some cases, as shown in Figure 10 a, the 10b, focus on heap and can be arranged in intersected with each other.In Figure 10 a, minimum image in this heap intersected in scan period and time low image, and in Figure 10 b, upper and lower image and adjacent image layers intersect, and the order during the scanning beginning is 1,2,3,4,5 and become 2,1,3,5,4 when the order of the end of scan.

Once get a plurality of focusing heaps and adjust a concrete advantage that focuses in scan period and be, might follow the tracks of bulk non-planar, the for example focusing on the surface of tissue samples or rock specimens, if two exterior focusing positional alignment on the slope of focusing curve, thereby might predict best focus position and adjust focal position the central focus position is put on best focus position.This can reach by the focusing Assessment Curves shown in Figure 11 by utilizing three focal position C, D, E.Under this mode, might whether in focus to monitor scanner all three locational relative evaluation values by checking detector.Move if focus on from focal position, then it can change relative focus value as shown in Figure 12.

Relatively Figure 11 and 12 can find out, the relative evaluation value of exterior focusing position (C and E) changes but central focus position (D) needn't change.If scan period monitors this, then when occurring, this can adjust focusing focal position (for example D) is brought back to the central authorities of focusing range.This can reduce the quantity of the focusing heap that needs scanning, do not focus on the zone that heap is kept off the figure image focu because do not exist as shown in Figure 13, heap image 300 shown in Figure 13 is followed the optimum focusing line in scanning during 301, and its large advantage is only to have seldom that the heap image of useful information saves time owing to needn't scan more wherein many images.Adjust specified focusing following sample by scan period, thereby can once only provide less different focus value.This is in more detail shown in Figure 13 a.

The measure that separable adjustment focuses on can make scanner when good focus value scope changes the exterior focusing level be put on focus edge.This is shown in Figure 14 and 15, and wherein Figure 15 illustrates in the scanning of Figure 14 the Assessment Curves on two position A, the B.For example occur this variable focus range state in the scanning of cellular layer, cell piles up other above cell and the quantity of cellular layer changes in scanning in multilayer in some embodiment of cellular layer scanning.The thought that changes spacing between the image in heap shown in Figure 10 and 14 provides many advantages.Many existing schemes can not provide this function.

Another embodiment is arranged in the exterior focusing image on the edge of focusing range but in fact not in the outside of focus.Then monitor and focus on evaluation to guarantee that all detectors are not outside focus.In case an external detector shows the evaluation value that reaches outside the focus, adjusts focusing so that all detectors are got back in focus.Figure 16 illustrates three focal position C, D, E (all focusing on), although and Figure 17 illustrates the position that is positioned at focus edge but still focuses on.This can make the user whether check scanned samples under than the large depth of focus of the focusing range of scanner by focusing.Can also utilize software by an equipment the synthetic image of these image sets to be improved depth of focus.

Although we only illustrate and use 1 dimension array so far, can use a plurality of detectors in the situation of boosting productivity, to finish this task.As shown in Figure 18, an embodiment adopts 3 cell arrays of taking advantage of x.By like that mobile focusing under serration type of front, but transverse moving speed wants large n doubly, and wherein n is the quantity of row detector array.Figure 19 a, 19b and 19c illustrate a plurality of adjacent lines detectors of being with respectively the multi-focus position that is useful on 3,4 and 2 capable arrays.

And do not require that these a plurality of row detectors have row adjacent one another are.Thereby can set up as shown in Figure 20 the scanning process that has the gap between detector.The existence restriction is fastened in line space pass at detector under this state.For the integer scanning line spacing, the spacing between 1 dimension detector array is necessary for mn-1, and wherein m is the quantity of 1 dimension detector array, and n is not equal to zero integer (zero situation is identical with the adjacent lines situation).Then must be set to m to sweep speed.This provides Figure 21 a to 21c and Figure 22 a to the scan pattern shown in the 22c.The numeral of listing in Figure 21 a is the line number of 1 dimension detector array, thereby line number is 3 in the case, and their spacing is 2 (m=3, n=1).For Figure 21 b, line number=3, spacing=5 (m=3, n=2).For Figure 21 c, line number=3, spacing=8 (m=3, n=3).In Figure 22 a, line number=3, spacing=2 (m=3, n=1), and have three focal positions.In Figure 22 b, line number=3, spacing=5 (m=3, n=2), and have three focal positions.In Figure 22 c, line number=4, spacing=4 (m=4, n=1), and three focal positions are arranged.Always require to have between detector the integer line space and even wish that as shown in Figure 23 also there are three focal positions line number in Figure 23=3, spacing=2.5, scanning line spacing=2 with line scanning overlapping or " constriction " although may not be.

In order to produce coloured image or multichannel image, can be based on the color that changes line by line illumination and traversing as factor slows down take port number.For example should require 1/3rd transverse moving speed into monochromatic speed for redgreenblue scanning as shown in Figure 24, in Figure 24, utilize the scanning of switches light generation RGB, line number among the figure=3, spacing=2 (m=3, n=1) also have three focal positions.

The another kind of method that produces the red, green, blue colour information is to place the red, green, blue filter at each row of detector.This combination can comprise as shown in Figure 25 a to be combined the identical row of all colours or as shown in Figure 25 b colour sequential is combined.Importantly be noted that if do not require respectively with look capable overlapping or constriction, then use like that the spacing restriction of " same color capable-same color is capable " with monochromatic line space.

In the situation of all focal plane quantity less than the quantity of employed 1 dimension array, the time that requires detector to detect light is shorter than and moves to the required time of next Position Number to prevent fog.For example, for the four lines detector with single focal plane, light should be shorter than 1/4th of run duration detection time.Needn't have Figure 18,20 and 25a, 25b shown in single detector system.

Can be at the routine as shown in Figure 3 detector of single file of various smooth method of superposition combination shown in Figure 26 a to 26c, so that detector all is positioned on the identical focal plane.Figure 26 a illustrates to use and contains two beam splitters 4,5 and three arrays 1,2,3 equipment.Array 1,3 virtual image are shown in respectively 1 ', 3 '.Optical axis is illustrated in 6 places.The spacing of detector array is two scan lines (m=3, n=1).Figure 26 b illustrates two arrays under the line space 2 (m=3, n=1) and bimirror 7,8 schemes.Array 1 and 2 and principal ray respectively 1 " and 2 " locate to illustrate.Figure 26 c illustrates three arrays 1 under the line space 8 (m=3, n=3), 2,3 and bimirror 7,8 systems.

If layout is not set to detector is placed in the same plane, then when scan period need to be carried out any adjustment to the phase focusing plane, then detector must move relative to each other and cause and be difficult to realize that variable inhomogeneous focal plane separates, and perhaps a large amount of inhomogeneous focusing heaps can need a large amount of detectors in order to scan simultaneously each focal plane.The method of other combination detector comprises fiber bundle, physically detector is close together and is arranged in micro prism array on the imaging len.

Have some possible methods that focus in the scan period adjustment, some of them are shown in Figure 27 a to 27g.Figure 27 a illustrates the movement that comprises with the detector head 9 of the two beam splitter system of 3 arrays.10 the focusing moving range is shown.Figure 27 b illustrates a kind of alternative example, wherein utilizes the movement of the middle imaging len 11 of sample and detector.Figure 27 c illustrates and utilizes movably the folded mirror 12,13,14 of light beam to reach focusing.Figure 27 d illustrates how to reach the focusing modulation by mobile sample 15.Figure 27 e illustrates by the element 16 in the mobile imaging lens 11 and reaches the focusing change.Figure 27 f illustrates alternate device, wherein in the sample side the adjustable window of thickness 17 is set, for example the active quartz window of photoelectricity.Cause focus movement by the optical thickness that changes window.Figure 27 g uses the rotation window 18 of variable light thickness.Wherein cause focus movement by the optical thickness that changes window.This window has the distribution that changes optical thickness and/or change optical thickness along the radius vector direction for function (namely along circumference) around its axle rotation.This illustrates in greater detail in Figure 28.

The scheme of this paper explanation is quite different with prior art, utilizes in the prior art a plurality of detectors to catch image by each detector at different focal positions.On the contrary, we can use single detector in many cases to utilize the present invention, for example as shown in Figure 3.We then change focusing to form a plurality of focus value on basis line by line.This is shown in Fig. 5 to 10.We for example adopt a plurality of detectors among Figure 18 to 25 like that, but these detectors of any moment are in identical focal position.

In general, thus provide a kind of line scanning method in order to once produce multi-focusing images.1 dimension (typically) detector array is traversing and usually be in the plane of detector surface on the direction perpendicular to the axle of this array.To the focusing between each the Image Adjusting scan line that focuses on the heap image.When transverse-moving mechanism moves to the next scan line of the first focusing heap image, repeat circularly this process, focus on heap images until form all.

Detector array typically on perpendicular to the direction of the axle of this array (relatively) traversing and usually in the detector surface plane, transverse moving speed is taken as and makes next row group be the capable integral multiple of m on the image.These row of sensitizing range as detector needn't be measure-alike.Can be that the factor reduces the transverse moving speed with respect to row by the quantity of color channel (if arrange), and each change focus on before or during to each channel change illuminating color of image.

Scan period can be adjusted the focusing level valuably in order to follow the tracks of the focal zone.Can utilize these focusing levels to determine focusing range by the relation of checking on the both sides, focal zone the focusing evaluation function under at least two levels, wherein these levels are put on the edge of this focal zone, for example keep the in focus fixed relationship between the plane and focal plane edge.

In specific embodiment, can utilize near beam splitter/mirror/micro prism (imaging len) and array to produce a plurality of confocal line 1 dimension arrays.

Claims (38)

1. method that produces the multi-focusing images of target, this heap image comprises a plurality of images in the same at least district of this target, described a plurality of images have different focal positions, described focal position be fix or in a scope, the method comprises:

Cause relative scanning motion between target and the photodetector array, this array to be used for repeatedly receiving image information in the scan period with the form of scan line from this target by scanning means; And

Cause the change of the relative focusing between this target between the described focal position of scan period at each image and this array by focusing arrangement, thereby obtain the image in this heap,

Wherein each image is by forming as the image information that scan line obtains at each focal position in scan period.

2. according to a plurality of areas repetition the method that the process of claim 1 wherein to this target.

3. in the single sweep operation to target, obtain this multi-focusing images according to the process of claim 1 wherein.

4. according to the method for claim 1, wherein after obtaining the one scan row for the specific image in this heap from this target, change relatively focusing, thereby before obtaining another scan line for described specific image, obtain the one scan row at least another image in this heap.

5. according to the method for claim 4, wherein in scan period, thereby sequentially obtain scan line repeatedly circulation focusing between image for each image.

6. according to the method for claim 5, wherein suspend relative motion in each cycle period.

7. according to the process of claim 1 wherein that scanning motion is continuous.

8. according to the method for claim 7, thereby comprise that also interpolation is that image information that each image obtains forms the correspondence image with different focal positions in this heap.

9. according to the process of claim 1 wherein that this array is the one-dimensional array that defines first direction.

10. according to the method for claim 9, wherein this relative scanning motion vertical is in this first direction.

11. according to the process of claim 1 wherein the each other even interval of focus of focal position.

12. according to the process of claim 1 wherein each other focus interval unevenly of focal position.

13. according to the method for claim 12, when wherein focal position was in a scope, the scope of each focal position was not overlapping.

14. according to the method for claim 12, when wherein focal position was in a scope, the scope of each focal position was overlapping.

15. the method according to claim 1 also comprises, when focal position was in a scope, scan period utilized image information revising focus, in order to obtain in succession image information for each district of each image.

16. according to the method for claim 15, also comprise the Assessment Curves that obtains as the function of focal position.

17. according to the method for claim 16, thereby also comprise each image control focusing in the heap given zone covering ideal focusing position.

18. according to the method for claim 17, the focus of wherein piling the image of centre is set to the ideal focusing position corresponding to these districts.

19. according to the method for claim 1, thereby comprise that also the image in the combined stack produces output image, this output image has the depth of focus according to the focal position of each image that makes up it.

20. according to the process of claim 1 wherein that this array comprises a plurality of subarrays, each subarray is arranged on the direction perpendicular to the scanning direction.

21. according to the method for claim 20, wherein these subarrays separate along the scanning direction.

22. according to the method for claim 21, wherein each subarray is suitable for receiving the light of corresponding color.

23. according to the method for claim 22, wherein

Each image is obtained image information from the adjacent district of described target,

Described array comprises m one dimension subarray, and

To distinguish the wide subarray spacing of seeing as unit from this array as mn-1, wherein n is nonzero integer, thus the different time that interweaves obtain from the image information of same district not.

24. according to the process of claim 1 wherein the speed of determining relative motion according to dimension and the location of this array.

25. the equipment for generation of the multi-focusing images of target, this heap image comprises a plurality of images in the same at least district of this target, and described image has different focal positions, described focal position be fix or in a scope, this equipment comprises:

Photodetector array is used for form with scan line and receives image information from target;

Scanning means is used for providing the relative motion between this array and the target;

Focusing arrangement is used for the relative focusing between this array of control and the target, and

Control system is used for this scanning means of operation to cause the relative scanning motion between target and the photodetector array; Also be adapted to this array is controlled repeatedly receive the image information from target in scan period; And be used for this focusing arrangement of operation with in the change that causes the relative focusing between target and this array between the described focal position of scan period at each image, thereby each image in obtaining piling, wherein each image be by scan period the image information that obtains of each focal position form.

26. according to the equipment of claim 25, wherein this array comprises one-dimensional array.

27. according to the equipment of claim 25, wherein this array comprises a plurality of subarrays, each subarray is arranged on the direction perpendicular to the scanning direction.

28. according to the equipment of claim 27, wherein

Each image is obtained image information from the adjacent district of described target,

Described array comprises m one dimension subarray, and

To distinguish the wide subarray spacing of seeing as unit from this array as mn-1, wherein n is nonzero integer, thus the different time that interweaves obtain from the image information of same district not.

29. according to the equipment of claim 27, thereby wherein subarray comprises that separately filter receives and light corresponding to particular color.

30. according to the equipment of claim 28, thereby comprise that also beam splitter provides the physics of subarray to separate and the empty interval of subarray.

31. according to the equipment of claim 25, wherein this focusing arrangement focuses on by mobile realization of array.

32. according to the equipment of claim 25, also comprise imaging len and wherein this focusing arrangement focus on by mobile realization this imaging len or the imaging len member.

33. according to the equipment of claim 25, also comprise folded mirror and wherein mobile realize of this focusing arrangement by folded mirror focus on.

34. according to the equipment of claim 25, wherein this focusing arrangement focuses on by mobile realization of target.

35. according to the equipment of claim 25, also comprise the window that optical thickness is controlled, wherein this focusing arrangement is realized focusing on by this window of operation.

36. according to the equipment of claim 35, wherein this window is made of photoelectric material.

37. according to the equipment of claim 36, wherein this window is rotatable and have the variable light thickness of the function that is angle of rotation.

38. according to the equipment of claim 25, wherein this equipment is configured for the part to the microscopic system of micro-target imaging.

Images