CN1877510A - Multifunctional device and its making method, tactile information system and information input device - Google Patents

Abstract

The invention provides the complex function device, preparing method, tactility information system and message input device. The device adopts ferroelectric material or pyroelectrics which can induce temperature and pressure, and uses a tactility information element to get many information of temperature and pressure. The ferroelectric material or pyroelectrics are made as hollow structure of cantilever beam or double strut beams, putting electric power from outer electrical source, check the tactility information, and the one part or all of the tactility information is changed into physical quantities to reappearance.

Description

Multifunctional device, its manufacture method, tactile information system and message input device

Patented claim of the present invention be that August 26, application number in 2003 are 200510096525.0 the applying date, denomination of invention divides an application for the application for a patent for invention of " multifunctional device, its manufacture method, tactile information system and message input device ".

(it is right of priority that the application requires following three parts of Japanese patent applications formerly: 1) No.2002-245299, denomination of invention is " A Complex Functional Device and aTactile Information System ", August 26 2002 applying date, 2) No.2002-261533, denomination of invention is " A Complex Functional Apparatus and aMethod Thereof ", September 6 2002 applying date, 3) No.2002-314743, denomination of invention is " An Information Input Apparatus ", on October 29 2002 applying date, the whole contents of quoting them herein as a reference.)

Technical field

The present invention relates to detect at the same time or separately the multifunctional device and the manufacture method thereof of temperature and pressure, particularly relate to is being the touch-screen of the information machine of representative with the recording medium differentiation of various printers and duplicating machine, LBP etc. or personal computer, PDA, pocket telephone, or food is with in robot, medical robot, various industrial robot or the various security system, can to concavo-convex, friction, pressure and these tactile datas of temperature each separately or multifunctional device and manufacture method thereof that its combination is detected.

Background technology

The so-called device that is associated with sense of touch, majority is that pressure information is transformed to electric signal, is the device that utilizes the detection electric capacity of pressure sensitive conductive elastic body etc. and detect resistance variations as its representational device.Such as, open in the flat 5-81977 communique the spy and to propose a kind ofly electrode to be set the elastomeric side of pressure sensitive conductive, and have the contact shoe of contact with protuberance in the opposing party configuration, utilize at this and touch when exerting pressure on the son, the touch sensor that the elastomeric resistance of pressure sensitive conductive changes.

In addition, open in the flat 5-215625 communique (corresponding to USP5225959) the spy and to propose a kind of capacitor principle of utilizing, between electrode, dispose elastic body, can detect the touch sensor of the capacitance variations that elastic body distortion under pressure causes.Open a kind of touch sensor that utilizes piezoelectrics to detect temperature and 3 axial pressure of proposition in the flat 9-203671 communique the spy.

In addition, open the sense of touch input-output unit of having recorded and narrated a kind of treatment temperature simultaneously and pressure in the flat 5-216568 communique the spy.This is that pressure transducer, pressure actuator and temperature sensor are become needle-like shape, the one group is made that an element carries out that high density is arranged and as the interface (interface) of computing machine.

But, Te Kaiping 5-81977 communique and the special touch sensor of opening in the flat 5-215625 communique can detect one dimension side and upward pressure, but can not detect the pressure on the three-dimensional, in addition, Te Kaiping 9-203671 communique can detect the pressure on temperature and the three-dimensional, but signal that detects and the pressure information of selecting in advance can not be showed.In addition, open the invention of flat 9-203671 communique according to the spy, owing to use different materials in order to detect temperature and pressure, in the manufacturing of device, just must will detect the different materials that temperature and pressure uses and on same substrate, form, also just there is the manufacture process complicated problems that becomes.

In addition, opening in the flat 5-216568 communique the spy, be simultaneously processing pressure and temperature information, but owing to use spicule, also there is problem permanance and reliability aspect.In other words, any one of 3 kinds of needle-like sensors and actuator be, with the resolution of people's sense of touch, such as, finger tip, general 300 μ m compare the device of wanting little, and a spicule is superfine.Therefore, its physical strength is very low.So though can detect information from the outside, even owing to find out way aspect material, physical strength is also very little, damaged danger is very high.Particularly, in order to transmit the signal that relevant people has non-displacement and size thereof (be transmitted in wait the state of the leading section of the material push needle-like to descend to point have or not displacement and size thereof) with finger, must apply very big voltage, the problem of this generator tool breakage under the effect of the power of itself of device exists always.In addition, it is damaged that the past also exists any one device to take place, as the function of sense of touch device also with regard to forfeit problem.

Summary of the invention

The present invention finishes just in view of the above problems, it is characterized in that providing a kind of, in the broad purposes of the different field of the surface state of various convex-concave patterns, paper etc., the entering apparatus of information machine etc., can under the situation of cheaply and not damaging device, make the information processing of the sense of touch that comparison has near the people become possible composite function device and tactile information system at various tactile datas such as temperature and pressure.

A detecting element breakage in addition, the invention is characterized in, even also can be simplified manufacture process when guaranteeing the function of other elements.

Multifunctional device of the present invention, possesses tactile data element with corresponding each tactile data portion of multiple tactile data, above-mentioned each tactile data portion comprises first function that detects corresponding above-mentioned tactile data and reproduces part or all second function of the above-mentioned tactile data that detects.

In a kind of embodiment of multifunctional device of the present invention, above-mentioned each tactile data portion, have a plurality of electrode pairs respectively, above-mentioned first function, it is the detecting signal that obtains above-mentioned tactile data through above-mentioned electrode pair, above-mentioned second function by feeding electric power from external power source through above-mentioned electrode, is transformed to the physical quantity identical with above-mentioned detecting signal or different physical quantitys with part or all of the above-mentioned tactile data that detects and reproduces.

In addition, multifunctional device of the present invention is characterised in that, by metal oxide being divided into a plurality of parts and utilizing the electrode that is arranged on the various piece, detects different a plurality of information.

In addition, the manufacture method of multifunctional device of the present invention, it is characterized in that: metal oxide layer is divided into a plurality of parts, the electrode that utilization is provided with on each several part, detect different a plurality of information, and independent supply with the raw metal that constitutes metal oxide layer and oxygen raw material and form metal oxide layer to substrate.

In addition, information input/output unit of the present invention, this device is controlled above-mentioned subject machine according to user's identification result of the user of relevant operand machine, it is characterized in that having: be used for a plurality of menu items of operating above-mentioned subject machine are had a guide look of the menu prompt unit of prompting; Among a plurality of menu items that utilize the prompting of above-mentioned menu prompt unit, obtain the unit according to the tactile data that above-mentioned user obtains above-mentioned user's tactile data with the menu item destination locations of finger contact; And user's discriminating unit of carrying out above-mentioned user's discriminating according to the tactile data unit that utilizes above-mentioned tactile data to obtain to obtain the unit.

Other characteristics of the present invention and advantage can from reference to below accompanying drawing description and understand, same or similar parts are given same label in the accompanying drawing.

Description of drawings

Be included in the instructions and constitute its a part of accompanying drawing, the specific embodiment of the present invention is shown, and is used for principle of the present invention is illustrated with instructions.

Fig. 1 is the summary section of the tactile data element in the multifunctional device (device) that embodiments of the present invention 1 are shown.

Fig. 2 is the summary section of second example of the tactile data element in the multifunctional device (device) that embodiments of the present invention 2 are shown.

Fig. 3 is for illustrating the general view of the tactile data element in the multifunctional device of the present invention (device).

Fig. 4 illustrates the tactile data element is carried out the general view that one dimension is arranged the appearance that constitutes line sensor.

Fig. 5 illustrates the tactile data element is carried out the general view that one dimension is arranged the appearance that constitutes dimension sensor.

Fig. 6 is the mode chart that the measurement data of multifunctional device of the present invention is shown.

Fig. 7 is the sectional view along the A-A ' of Fig. 6.

Fig. 8 illustrates the performance plot that the pressure that adopts multifunctional device of the present invention detects example.

Fig. 9 is the block diagram that a configuration example of the tactile information system that comprises multifunctional device of the present invention is shown.

Figure 10 A to 10H is the summary section that the making step of multifunctional device of the present invention is shown.

Figure 11 A to 11I is the summary section that the making step of multifunctional device of the present invention is shown.

Figure 12 is the diagrammatic sketch of formation that the multifunctional device of embodiments of the present invention 3 is shown.

Figure 13 illustrates detecting element is arranged the complex function sensor part that constitutes with two-dimensional approach diagrammatic sketch.

Figure 14 A and 14B are the diagrammatic sketch of formation that the multifunctional device of embodiments of the present invention 4 is shown.

Figure 15 is the diagrammatic sketch of formation that the multifunctional device of embodiments of the present invention 5 is shown.

Figure 16 is the planimetric map of substrate figure that the characteristic of the multifunctional device that is used for verifying one embodiment of the present invention is shown.

Figure 17 is the sectional view of substrate figure that the characteristic of the multifunctional device that is used for verifying one embodiment of the present invention is shown.

Figure 18 is the diagrammatic sketch of characteristic that the pressure detecting portion (pressure detecting element) of the multifunctional device that is used for verifying embodiments of the present invention is shown.

Figure 19 A to 19G is the process flow diagram of method for making that the multifunctional device of embodiments of the present invention is shown.

Figure 20 is the process flow diagram that detects processing that temperature and pressure information are shown.

Figure 21 is the diagrammatic sketch of the activation principle of the unstrpped gas used when being illustrated in the metal oxide film that generates embodiments of the present invention.

Figure 22 is the formation pattern list diagrammatic sketch of the embodiment 1 of information input/output unit of the present invention.

Figure 23 is used for the diagrammatic sketch that the function of descriptive information input-output unit constitutes.

Figure 24 is the diagrammatic sketch that the configuration example of the sense of touch display element that constitutes the double input part of machine demonstration is shown.

Figure 25 is the formation pattern list diagrammatic sketch of the embodiment 2 of information input/output unit of the present invention.

Figure 26 is the function constitution map of function that is used for illustrating the embodiment 3 of information input/output unit of the present invention.

Figure 27 is the block diagram of configuration example that the computer system of the function that can utilize the computer realization information input/output unit is shown.

Embodiment

At first, multifunctional device is illustrated that the information input/output unit to its composition is illustrated afterwards.

＜multifunctional device 〉

A. embodiment

(1) embodiment 1

Utilize Fig. 1 that present embodiment is illustrated below.

In the tactile data element shown in Figure 1, the 5th, substrate is silicon, glass, metal, plastic or other material.The 4th, elastic body is silicon, glass, metal, plastic or other material.4 and 5 or 2 and 4 also can use same material.The 3rd, metal oxide is so long as no matter strong dielectric medium or pyroelectrics are which kind of composition all can.1, the 2nd, electrode, for simplicity, 1 is called top electrode, and 2 are called bottom electrode.In Fig. 1, the tactile data portion of the tactile data portion of left part, the tactile data portion of central portion and right part detects the pressure of vertical direction, the pressure and the temperature of horizontal direction respectively, and has the function of reproducing these tactile datas.

When metal oxide materials is given an example as the occasion of the so strong dielectric medium of lead zirconate titanate (below be called PZT), if PZT is used for making c axle alignment films, utilize the piezoelectric property d that has at the PZT that locates by the left part of electrode 1,2 clampings with common thin film technique ₃₃, can detect the pressure that puts on PZT in vertical direction with electrode 1,2.In addition, at middle body.By utilizing the piezoelectric property d of PZT ₃₁, d ₁₅, d ₂₄Deng, may detect applied pressure in the horizontal direction with the electrode pair of imbedding among the PZT.In the right part,, can rely on the voltage detecting temperature that takes place between the electrode 1,2 by the pyroelectricity of utilizing PZT to have.

In Fig. 1, metal oxide 3 and bottom electrode 2 separately become 3, but also only some separation.In addition, when conductive materials such as elastic body 4 use metals, between bottom electrode 2 and elastic body 4, it is self-evident that insulator also can be set.In addition, the thickness of elastic body, substrate, metal oxide, electrode and area can be selected suitable size according to purposes.Such as, jobbie with 0.4 to 1.0kg/cm ²Pressure contact composite function device of the present invention, in the time will measuring room temperature to about ± 30 ° temperature, the thickness that the laminated body of electrode and metal oxide is whole is generally about 0.001 to 3.0mm.

In addition, the length from the stiff end of the semi-girder portion of Fig. 1 left part to front end, without limits, when reproducing pressure information, the displacement on the above-below direction is felt by people when 10 μ m are above easily when pressure detection.In order to obtain this displacement, when PZT was used as metal oxide, general length from the stiff end to the front end can be about 100 μ m.

Below, Figure 10 A-H illustrates the method for making of the composite function device of present embodiment.Wherein, utilize the silicon chip of the heat oxide film (monox) that on top electrode 1, has 2 μ m thickness.This oxide film (omitting in Figure 10 A-H) is used as elastic body.At first, be to form Pt/Ti (Pt:500nm, Ti:8nm are thick) as bottom electrode, afterwards as metal oxide (Pb, La) (Zr, Ti) O with the PF sputtering method ₃(following PLZT slightly) forms (Figure 10 A, B) with the RF sputtering method.

In the present embodiment, control is formed, and becomes Pb/La=95/5 atom %, and Zr/Ti=30/70 atom %, thickness are 4 μ m.Utilize resist (such as AZ4620 etc.), can carry out graphical as Figure 10 C with the mixed aqueous solution of hydrofluorite and nitric acid.To the degree of depth of the etching of PLZT, be 500 μ m.Utilizing after oxygen plasma removes resist, form top electrode (Figure 10 D).Top electrode adopts and the same material of bottom electrode, and thickness is also identical.

Afterwards, be as the criterion with electrode and metal oxide and carry out graphical (Figure 10 E, Figure 10 F).Graphical condition is that electrode utilizes the Ar plasma to carry out dry etching, and PLZT utilizes the mixed aqueous solution of hydrofluorite and nitric acid to carry out wet etching.Carry out etching (Figure 10 H) to silicon substrate this moment after removing the resist of use.The mask of this moment is the silicon nitride film that utilizes LPCVD to form, utilize resist (such as AZ4620 etc.) graphical after, with CF ₄Plasma carries out etching., with potassium hydroxide aqueous solution remove silicon substrate, apply resist, will remove by dry etching as the electrode of semi-girder part thereafter.

In above-mentioned method for making, the material of upper/lower electrode is identical, and thickness is identical, but the invention is not restricted to this.Even upper/lower electrode uses different materials also without any problem.As electrode, except metal also can adopt, such as, conductive oxide and conducting polymer or the like.With regard to semi-girder, the total thickness or the Young modulus of essential bottom electrode and elastomeric laminated body are different with top electrode, or the area of bottom electrode or elastic body and top electrode is different, but the material of elastic body and bottom electrode identical inequality can.

As metal oxide, so long as strong dielectric medium or pyroelectrics, what uses can.Such as, PZT, PLZT, barium titanate, lithium niobate, lithium tantalate, bismuth titanates reach the material that adds metallic element among these, and these mixed crystal thing is (such as Pb (Mg _1/3Nb _2/3) O ₃-PbTiO ₃, 0.7Pb (Ni _1/3Nb _2/3) O ₃-PbTiO ₃, 0.7Pb (Co _1/3Nb _2/3) O ₃-Pb (Zr, Ti) O ₃Deng.

This tactile data element 8 as Fig. 4 or shown in Figure 5, by one dimension or two-dimensional arrangements, can constitute and detects temperature and pressure simultaneously, promptly with people's five senses in, such as, the composite function device of the one dimension of the information (tactile data) that sense of touch is suitable or two dimension.

In specific words, shown in the configuration example of the tactile information system of Fig. 9, when tactile data element 8 being arranged as m * n (m 〉=0, n 〉=0 and m and n are not 0 simultaneously), when the composite function device of being made up of these tactile data elements 8 20 touches an object, the output of each tactile data element 8 sends signal to input control circuit 22 by address control unit 21, after through the necessary information processing of amplification, noise processed or the like, in storer/arithmetic processing circuit 23, carry out desired information processing.Output from each element that passes through information processing is stored in the storer, as required, can utilize telecommunication circuit 24, such as, send to computing machine or the like through the Internet.On the other hand, when taking-up has been stored in the information in the storer or utilize telecommunication circuit 24 to send the information that is stored in the storer through the Internet or the like, utilize output control circuit 25 to give composite function device 20 with signal through address control units 21.If tactile data also electronization is stored in the storer, then video information and Word message can be handled equally.In other words, because in causing the five sense communications of gazing at recently, can handle tactile data, be useful.

Thus, because pressure detects part, as piezoelectric element, mechanical displacement taking place, by the surface of contact devices, can feel preservation information.At this moment, the temperature checkout part branch, by between upper/lower electrode, applying voltage, can be as the display part of pressure information.

So, such as, certain object contact is arranged on certain part 9 among a plurality of tactile data elements 8 of two-dimensional arrangements, afterwards, when this object moves according to the various directions shown in the arrow, from address control unit 21 output of each tactile data element 8 is read in by the input control circuit order, just can detect moving direction and temperature, pressure information.The arrangement pitch of tactile data element 8 can determine according to purposes, such as, in fingerprint that detects the people or the like, probably can be about 50 μ m.In addition, when using as the touch-screen of information terminal machines such as PDA, can only take out pressure information, element spacing is just passable about 0.1 to 10mm.The number of tactile data element 8 can be decided according to purpose, does not have what restriction.

When showing pressure, by on desired tactile data element 8, applying voltage through address control unit by output control circuit between the electrode 1 and 2 of left part, make the laminated body of electrode/metal oxide/electrode that distortion up and down take place, change the voltage application method, can be with pressure information with vibration or sound performance.Pressure applications is in the horizontal direction utilized pair of electrodes 1 and electrode 2, also the displacement or the vibration of above-below direction can be showed with sound.In addition, in the occasion of performance pressure information, such as, also mechanism and this composite function device that this mechanical shift is strengthened can be made up.

About temperature detection, the occasion of the absolute value of measuring temperature is arranged and measure the occasion of the relative variation of temperature, in Fig. 1, in principle, what illustrate is the principle of element section structure of the occasion of mensuration relative temperature.In other words, utilizing the temperature of pyroelectrics to detect, is in order to detect relative temperature.Measuring the occasion of absolute temperature, around detecting element, be provided as the thermistor and the thermopair equitemperature sensor of standard, or it is also passable in advance standard value to be input to arithmetic processing circuit when measuring.In addition, the reproduction of temperature, utilization detects the part of the pressure of horizontal direction.In pressure detection, be to utilize a pair of top electrode 1, be on top electrode and bottom electrode, to apply pulse voltage and produce heat when temperature is reproduced.As metal oxide is the voltage that applies that can not destroy insulation, then to applying voltage without limits.

(2) embodiment 2

Fig. 2 is the schematic diagram that the cross-section structure of complex function element of the present invention is shown.In the present embodiment, metal oxide 3 clips electrode 2 and is assemblied on the elastic body 4.This elastic body can be identical with the material of electrode, also can be different.No matter elastomeric material how, the thickness of the elastomeric laminated body of bottom electrode is different with area and top electrode, or its Young modulus difference, and it is also passable with external power source semi-girder to be out of shape on above-below direction.

The planar structure of the tactile data element of Fig. 2 is shown in Fig. 3.

In this Fig. 3,64 laminated body that are illustrated in the electrode/metal oxide/electrode that assembles on 90 ° the semi-girder of reporting to the leadship after accomplishing a task mutually constitute an element, but so long as can be assemblied in the electric signal that electrode/metal oxide/electrode/elastomeric laminated body is sent on each semi-girder handle be transformed to must dimension the necessary number of spatial information get final product, might not be equivalent to 4, promptly also can be that 3 semi-girders are disposed on object 3 times, promptly be in 120 ° of subtend configurations, or 2 semi-girders dispose 2 times on 2 objects.In Fig. 3, the central portion of semi-girder is arranged at hollow bulb, otherwise can be self-evident from central authorities with radial configuration with semi-girder also.

In addition, 7 is the laminated body that are made of electrode/metal oxide/electrode among the figure, is used for detecting temperature.In this figure, be to be arranged at a position, but be not limited to a position.Also can the part configuration that detects temperature not shown with the corresponding optical system of infrared ray will be from the infrared ray of outside optically focused expeditiously.In addition, when detecting the relative temperature variation, the output of the electrode/metal oxide/electrode that forms on comfortable a plurality of semi-girders in the future compares, and 7 also can omit.In addition, what describe in Fig. 2 is that the relative substrate of semi-girder is to be horizontally disposed with, if but utilize the relative substrate of interfacial stress of substrate, elastic body, electrode and metal oxide make progress lateral bending bent be provided with also no problem.

Thickness for each layer of electrode/metal oxide/electrode/elastomeric laminated body has no particular limits, generally electrode/laminated body=about below 0.5 preferably.Detecting little pressure or in the occasion with the large amplitude displacement, the longer the better for the beam that stretches out in hollow structure portion, determining when also detecting sensitivity, essential displacement or the like by essential physical strength, signal according to purposes.When using PZT as the material of metal oxide, can make mechanical displacement is below about 10 μ m, and the thickness of PZT probably is about 3 μ m-3mm, and the length of semi-girder is about 100 μ m-1mm.In addition, at the front end of semi-girder, assembling a bar-shaped object, to be used for the sense mechanism displacement also passable, and the enlarging function that also can add the mechanical shift of using this principle is self-evident.

The tactile data portion of detected temperatures information is to form on the top of elastic body 4 in Fig. 2, but in the occasion of measuring or measuring repeatedly at a high speed, also substrate can be become hollow structure to reduce to detect the thermal capacity of part.

Method for making to the composite function device of present embodiment is illustrated below.Figure 11 A-I illustrates the making flow process.

At first, on substrate Si, form elastic body.Elastic body is a monox, utilizes the RF sputtering method to form (Figure 11 A).As bottom electrode is to utilize the RF sputtering method that Pt/Ti is reduced the film that sputter forms, and the thickness of Ti is 6nm, and the thickness of Pt is 300nm.

Afterwards, form metal oxide materials.Can adopt any in the common film formation method as the formation method, as vacuum vapour deposition, various sputtering method, MO-CVD method, sol-gal process, ion beam vapour deposition method, gas jet method or the like, be to use sol-gal process to form 0.7Pb (Mg herein _1/3Nb _2/3) O ₃-0.3PbTiO ₃At this moment, because primary coating is the thickness that forms about 100nm, need apply repeatedly, dry obtaining at last after the thickness of 4 μ m, in the oxygen atmosphere, under 650 °, carry out 5 hours thermal treatment and become metal oxide materials (Figure 11 C).Top electrode adopts Pt/Ti, and Ti is 5nm, and Pt is 200nm, all forms with sputtering method.Utilize the positive resist of novolaks system graphical, Pt is utilized argon plasma, Ti is utilized SF ₆Plasma carries out dry etching (Figure 11 E).

Afterwards, with the mixed aqueous solution of hydrofluorite and nitric acid to metal oxide 0.7Pb (Mg _1/3Nb _2/3) O ₃-0.3PbTiO ₃Carry out etching (Figure 11 F).Form silicon nitride as mask in low pressure chemical vapor deposition, the resist of employing AZ1500 etc. is at CF ₄After carry out mask graphization in the plasma, substrate Si is carried out anisotropic etching (Figure 11 H) with potassium hydroxide aqueous solution.At last, utilize the mixed aqueous solution of hydrofluorite and nitric acid that elastomeric monox is carried out etching formation hollow structure (Figure 11 I).

The tactile data element of the Fig. 2 of Zhi Zuoing can be arranged or the two-dimensional arrangements use by one dimension like this, can be used to detect/reproduce the pressure and temp information that is associated with sense of touch with one dimension or two-dimensional approach.Detecting of temperature, pressure signal as shown in Figure 9, is through carrying out signal and amplify and the input control circuit 22 of noise reduction and carry out essential signal Processing and preserve afterwards storer/arithmetic processing circuit 23 from address control unit 21.The reproduction of signal is that the signal that will be stored in the storer is carried out through address control unit 21 driving composite function devices 20 by output control circuit 25.6 of Fig. 3 can carry out displacement up and down according to the voltage from output control circuit 25 respectively independently, can reproduce the pressure information on the vertical/horizontal direction thus.In addition, the information of reproduction does not need the contact impression, such as, control also can be reproduced sound from the frequency of the output of output control circuit 25.

The composite function device of present embodiment might not be configured as flat shape, is configured as curve form and also is fine certainly.In addition, if the material that uses in this composite function device for the transparency of visible light when high, also can just can repeat show image and tactile data with the such video display of liquid crystal display is stacked.Such as, substrate, elastic body are to be made by fotoceram, upper/lower electrode all is to be made by transparent materials such as ITO, when metal oxide 3 is common strong dielectric mediums, can becomes whole transmissivity and can reach about device more than 50%.In structure shown in Figure 2,, can see the image of video display more brightly owing to beyond the semi-girder part, be hollow space.

Above composite function device is being pushed with the object of paper, cloth, skin, plastics, metal or these processed goods or the like or rubbed, just can investigate the surface state of contact object.Certainly, also can be as touch-screen and hand input device or the fingerprint sensor and the infrared sensor of various signal conditioning packages.In addition, at the temperature checkout part branch, when not contacting, also can be used as the thermometer that the temperature around it is carried out instrumentation with object.In addition, when only dividing the temperature sensor that is used as one dimension or two dimension, also can measure the Temperature Distribution of contact object with temperature checkout part.

Multifunctional device according to embodiment 1 or 2, has the function of reproducing these information when detecting various visual information such as temperature and pressure at the same time, therefore, can in the widespread use in the different field such as entering apparatus of the surface state of various convex-concave patterns, paper etc., information machine, carry out more information processing near the sense of touch that the people had.

(3) embodiment 3

At first, utilize Figure 12 that the formation of the multifunctional device of embodiments of the present invention 3 is illustrated.Figure 12 illustrates the diagrammatic sketch that the summary of the multifunctional device of embodiments of the present invention 3 constitutes.

The 100th, substrate is silicon, glass, metal, plastic or other material.But, in the occasion of conductive materials such as metal, semiconductor, and the electrode 130,150 that joins of substrate 100 and metal oxide materials 120 between insulator preferably is set.In addition, in this figure, electrode 130,150 separates each other, also is fine but in the electrode pair either party is shared.

In addition, though the B part is arranged, do not describe in Figure 12, when electrode 130,150 was graphical, electrode material is residual also to have no problem even have in this section.But, must separate by electricity with electrode 140 at the residual electrode material of B part.The 120th, the metal oxide materials of strong dielectric medium or demonstration pyroelectricity.In the present invention, need not limit metal oxide materials, the material that is strong dielectric medium or demonstration pyroelectricity is just passable, representational material is barium titanate, bismuth titanates, lithium niobate, lithium tantalate, lead zirconate titanate, lanthanumdoped lead zirconate-lead titanate and the material that adds metallic element among these, and these mixed crystal thing is (such as Pb (Mg _1/3Nb _2/3) O ₃-PbTiO ₃, 0.7Pb (Ni _1/3Nb _2/3) O ₃-PbTiO ₃, 0.7Pb (Co _1/3Nb _2/3) O ₃-Pb (Zr, Ti) O ₃Deng.

The thickness of above-mentioned metal oxide materials and size can be set arbitrarily according to purposes.Such as, in the predetermined occasion that moves with information machine that is loaded into, the pressure contact about object is with 0.4 to 1.0kg/cm, and when measuring temperature about room temperature ± 20 °, the thickness of metal oxide materials can be about 0.1 μ m to 1.0mm.3,4,5 is respectively the electrode of pressure, the pressure on the horizontal direction and temperature that is used for measuring the thickness direction of metal oxide materials 2.This electrode material is a conductive material, can be formed by substrate 110, metal oxide materials 120, as long as and have the just passable of practical bond strength.

In Figure 12, metal oxide materials is that the occasion with the so strong dielectric medium of lanthanumdoped lead zirconate-lead titanate (below be called PLZT) is an example, the part of electrode 130 and metal oxide materials PLZ120 lamination (below be called part A), the piezoelectric property d that can utilize PLZT120 to have ₃₃, detect the pressure that puts on the vertical direction of PLZT120.In addition, the part of clamping PLZT120 (below be called part B) is utilized the piezoelectric property d of PLZT120 in electrode 140 ₃₁, d ₁₅, d ₂₄Deng detecting in the face of the film of PLZT120 applied pressure on the direction.Electrode 150 and PLZT120 laminate portion (below be called portion C), the same with the structure of part A, this part, but the pyroelectricity detected temperatures of utilizing PLZT120 to have.In this portion C, for the high-sensitivity detection temperature, also can be on electrode 150 in this part the formation temperature absorber, and also can set the wavelength filter of inferring wavelength that detects that is used for.

A part (E of Figure 19 A or F) of utilizing Figure 19 is below illustrated the manufacture method of the multifunctional device of present embodiment.Substrate uses the silicon chip of the heat oxide film (monox) of the insulator with 2 μ m thickness.(in Figure 19 A-G, that silicon and monox is not described separately) is to form Pt/Ti (Pt:500nm, Ti:8nm are thick) (Figure 19 A) with the RF sputtering method as bottom electrode 330, afterwards as metal oxide (Pb, La) (Zr, Ti) O at first ₃(following PLZT120 slightly) forms (Figure 19 B) with the RF sputtering method.In the present embodiment, control consists of Pb/La=95/5 atom %, and Zr/Ti=30/70 atom %, thickness are 4 μ m.Afterwards, utilize resist (such as AZ4620 etc.), can carry out graphical as Figure 19 C with the mixed aqueous solution of hydrofluorite and nitric acid.To the degree of depth of the etching of PLZT120, be 500 μ m.Utilizing after oxygen plasma removes resist, form top electrode 340 (Figure 19 D).Top electrode 340 adopts the material same with bottom electrode 330, and thickness is also identical.Afterwards, top electrode 340 is carried out graphically, after removing resist, just can produce 110 elements (Figure 19 E) of the multifunctional device of present embodiment as shown in figure 12.In addition, by top electrode 340, PLZT120 (metal oxide film) and bottom electrode 330 are carried out graphically successively, it is self-evident just can obtaining the structure shown in Figure 19 composite function device.

In addition, in Figure 12, bottom electrode is an isolating construction, and is identical with it in order to make structure, can add the bottom electrode that the manufacturing process that utilizes Figure 19 A is formed and carry out patterned operation.

Generally, in the occasion of strong dielectric medium, piezoelectric property changes with crystal orientation, and its difference can reach several times.This point means that the detection sensitivity with the horizontal direction upward pressure is different in vertical direction owing to the crystalline orientation of strong dielectric medium.For the delicate concavo-convex sensation on the surface that can detect paper and cloth or the like, the sensitivity on preferably vertical, the horizontal direction is identical, but when detecting bigger concavo-convex or fingerprint or the like on the vertical direction to detect sensitivity a lot of in even more important.So, be out of question according to this sensitivity difference of purposes, but in the present invention, also metal oxide materials can be manufactured in vertical direction with horizontal direction on piezoelectric property be uniform.

At this moment, the manufacturing process shown in Figure 19 B carries out in the following way.Make the metal that constitutes metal oxide (such as, in the occasion of PLZT120, Pb, La, four kinds of metallic elements of Zr, Ti) from independently evaporation source evaporation.Such as, RF sputtering method in this way, just supply is comprised the target that respectively constitutes metal (such as, metal, metal oxide, organometallics and metal halide etc.) and the oxygen source that comprises the material of oxygen element such as oxygen, ozone, nitrogen oxide be arranged in the same film formation device, make its self contained function.

Film forming is material (metal ingredient) the reaching interactive substrate that makes the material (oxygen composition) that comprises oxygen element and comprise metallic element, and makes the crystal plane be made up of metal-oxygen and piled up on substrate by the crystal plane exchange that oxygen is formed.In the occasion of PLZT, the ratio of components of Pb, La, Zi, four kinds of metals of Ti be controlled to be desired value (such as, Pb/La=95/5 atom %, Zr/Ti=30/70 atom %).For control method without limits.Such as, slit and flashboard are set between target and substrate, the width by this slit can make component pile up alternately on the face of being made up of oxygen with the keying of flashboard.Like this, by making the metal oxide film forming, in the occasion of PLZT120, substrate vertical-growth 210 crystal planes relatively just.This no matter be the pressure which direction of vertical-horizontal is come, can illustrate piezoelectric property much at one thus corresponding to 45 ° of the relative substrate tiltings of polarised direction of strong dielectric medium.

This film build method is not limited to the RF sputtering method, mocvd method in this way, and each unstrpped gas can independently be supplied with.Generally, in the occasion of mocvd method, because use organometallics in raw material, it is a problem that metal ingredient separates with organic principle.Therefore, in the present embodiment, when each unstrpped gas is injected into film container, with the unstrpped gas ionization, decompose and can quicken by electrode as required by heating, make the metal ingredient activation that arrives on the substrate through the metal ingredient of the unstrpped gas handled like this.

By the activation that this ionization, heating, acceleration cause, the metal ingredient that the material of arrival substrate has mainly is positively charged.Its result, because decomposing the organic components that produces sneaks into seldom, and, since utilize activation condition (such as, accelerating potential) metal ingredient of control kinetic energy, have the necessary suitable energy of crystalline growth, the metal oxide materials film-forming temperature that obtains is step-down also, and also can crystallization control and orientation.In addition, also make its activation by heating, ionization and plasma for oxygen, but the film-forming temperature low temperatureization of the metal oxide that obtains, can crystallization control/orientation.

With the element of making like this carry out separately, one dimension, two dimension or three-dimensional arrangement, just can detect so-called tactile datas such as temperature, pressure.Herein, the occasion of two-dimensional arrangements shown in Figure 13 is described.In addition, 160 are equivalent to the position of the A of Figure 12, and 170 are equivalent to the position of Figure 12 B, and 180 are equivalent to the position of the C of Figure 12.

Certain object contact is arranged on certain part 210 of a plurality of elements 200 of two-dimensional arrangements, afterwards, when this object moved according to the various directions shown in the arrow, the output by order reads each element just can detect contact area, moving direction and temperature, pressure information.In other words, as shown in figure 20, from of the output (step S91) of each element with m * multifunctional device that the n mode is arranged, through address control unit (step S92), after amplify in input control circuit and noise processed etc. handled (step S93), in essential signal Processing and preservations (step S94) such as storer/arithmetic processing circuit compress.The data of preserving are carried out various processing by not shown computing machine etc. again, can utilize means of communication such as the Internet and floppy disk or the like medium to be sent to other computing machines.

In Figure 13, size of component 190 can be determined according to purposes.Such as, when detecting people's fingerprint by pressure, the width that detects the part of pressure probably is just passable about 50 μ m.In addition, when the surface state of investigation contact material, size of component 190 can be about 0.1 μ m to 10mm.

(4) embodiment 4

Figure 14 is the schematic diagram that the multifunctional device cross-section structure of embodiments of the present invention 4 is shown.In the present embodiment, metal oxide 120 is assemblied on the elastic body 220 through electrode.This elastic body can be identical with the material of electrode 130,140,150 or substrate 110, also can be different.When the material of elastic body 220 and electrode 130,150 is identical, any one electrode in the counter electrode (130,150) do thick can.When identical, as long as remove thickness essential when forming hollow structure with substrate 110 materials.This elastic body, when improving the physical strength of each several part, for the pressure on the vertical direction, the effect that has as oscillating plate can improve the function that detects sensitivity, at the temperature checkout part branch, has as the function that prevents the effect of the heat sink that heat is accumulated.So long as be fit to the material of this purposes, elastic body is not the restriction of insulator, semiconductor, monocrystalline, polycrystalline, noncrystalline etc., to organic material and inorganic material without limits yet.

In Figure 14 A, the part of detected temperatures and pressure all is to be assemblied on the elastic body of hollow structure, but not necessarily whole parts must be become hollow structure, can form hollow structure in arbitrary portion.Such as, as shown in Figure 14B, the pressure detection part B of horizontal direction in the occasion of considering physical strength, also can not make hollow structure.Can select arbitrarily according to purposes.

The electrode of the part that detection of vertical side upwards pressure (the thickness sums of two lateral electrodes) and the thickness of metal oxide stack body integral body and the ratio of elastomeric thickness, generally preferably electrode/laminated body approximately=more than 0.5.The thickness of the electrode of both sides does not need to equate.Because hollow structure one side is 0 big in the quantitative change of uniform pressure bottom offset when detecting little pressure, detecting sensitivity can improve.Detect the part of temperature,, the thermal capacity that detects part is diminished and can carry out high speed mensuration as hollow structure because be easy to accumulate heat in the element.

Figure 19 A to G illustrates the manufacture method of the multifunctional device of example 3.The manufacture method of the multifunctional device of embodiment 4, basic identical with said method till Figure 19 E, the metal oxide 120 of Figure 19 B is to utilize the manufacturing of MOCVD method herein.The principle of the activation of the unstrpped gas of using in the present embodiment shown in Figure 21.

The 290th, vacuum tank, keeping inside in not shown vacuum pumping hardware is decompression state.The 330th, the substrate pallet can have not shown circuit to rotate, heat as required.The 260th, the raw material metal container of formation metal oxide 2.The 270th, the pipeline of flowing through from 260 unstrpped gases that flow out.The activation of unstrpped gas is carried out in such a way.The 280th, well heater has and makes 270 the unstrpped gas of flowing through carry out the effect of thermal decomposition.280, be not only well heater, such as, also can be plasma source or ionization source, at this moment, between the leading section of accelerating electrode 300 and unstrpped gas pipeline 270, plasma source and ionization source are set.The 300th, accelerating electrode, substrate is a positive potential relatively.The 320th, power supply.

In Figure 21,260 of material containers illustrate a kind of, and usually, this container is provided with a plurality of according to metal ingredient.Because in this occasion, for each metal ingredient being carried out the optimum activation, accelerating potential preferably can independently be controlled, the substrate pallet is made earth potential.Certainly, it also can be self-evident all making contrary current potential.Each metal ingredient, separate constituent preferably, but metal oxide 2, it is much to constitute a lot of this situations of metal.At this moment, consider crystal structure, be positioned at the composition of same crystallization position and similar composition of heat decomposition temperature of unstrpped gas or the like and also can mix.

Unstrpped gas, usually, cyclopentadienyl complex compound of two dipivaloylmethane (bisdipivaloyl-methanate) lead of employing, 4-tert-butoxy zirconium, tetraisopropoxy titanium, lanthanum or the like organometallics, other material also can be self-evident.Importing 260 in the never illustrated container of such carriers such as prepared using argon gas is entered in the vacuum tank.At this moment, such as, utilize well heater 280, with the unstrpped gas thermal decomposition, utilize accelerating potential 300 to quicken at the chemical species that comprises metal that will decompose generation.Thus, the chemical species that has positive charge that comprises metal that generates through thermal decomposition is endowed kinetic energy and can arrives substrate.

In the present embodiment, Pb, Zr, Ti, La metal ingredient are all inserted independently in the material container 260, and to the accelerating potential of accelerating electrode 300, the heating-up temperature of well heater 280 can independently be controlled.Accelerating potential is generally about 0-10kV, and the heating-up temperature of well heater 280 is generally 100-1000 ℃.In addition, oxygen source imports to 270 of Figure 21 by oxygen pump with oxygen, utilizes well heater 280 to be heated to 500 ℃, also can use ozone, nitrogenize oxygen or the like.Film forming, such as, oxygen source continuously, Pb, La, Zi, Ti unstrpped gas imports in the vacuum tank by not shown solenoid valve periodically.At this moment, the composition of the importing time control metal oxide by metal ingredient just can form on the substrate that is assemblied on the substrate pallet 310 and has crystallization oxygen face and metal-oxygen mutual stacked structural metal oxide material of delivering personally.This structure, in the occasion of PLZT120, (111) crystal plane is the equal of the crystal plane with the parallel growth of substrate.

The operation that Figure 19 E is following, be to peel off at the resist that will in the operation of Figure 19 E, use, after will being used for making metal oxide 120 patterned resist coatings, utilize the dry etching order to top electrode 340, metal oxide 120 and bottom electrode 330 graphical (Figure 19 F).Graphical condition is that top electrode 340 and bottom electrode 330 utilize the Ar plasma to carry out dry etching, and PLZT120 utilizes the mixed aqueous solution of hydrofluorite and nitric acid to carry out wet etching.

Carry out etching (Figure 19 G) to silicon substrate 100 this moment after removing the resist of use.Mask as this moment is the silicon nitride film that utilizes LPCVD to form, utilize resist (AZ1500) graphical after, with CF ₄Plasma carries out etching.With potassium hydroxide aqueous solution remove silicon substrate thereafter.Utilize mask graph, the structure of device can be selected any one among Figure 14 A or Figure 14 B.So, be example with the element of making, as shown in figure 13,, just make the multifunctional device of present embodiment by being arranged as m * n matrix.On device surface,, also can form diaphragm for improving permanance to wearing and tearing etc.

Utilize above multifunctional device, as shown in figure 20, constitute the mensuration system by address control unit, input control circuit, storer/arithmetic processing circuit.Under this state, multifunctional device is being pushed with the object of paper, cloth, skin, plastics, metal or these processed goods or the like or rubbed, just can investigate the surface state of contact object.Certainly, also can be used as touch-screen and hand input device.In addition, at the temperature checkout part branch, when not contacting, also can be used as the thermometer that the temperature around it is carried out instrumentation with object.In addition, when only dividing the temperature sensor that is used as two dimension, also can measure the Temperature Distribution of contact object with temperature checkout part.

(5) embodiment 5

Figure 15 is the diagrammatic sketch of formation that the multifunctional device of embodiments of the present invention 5 is shown.

The 230th, be used for the display device of show image information.This device, use with the device that shows animation display such as various still images headed by silver halide photography and the advertisement poster, CRT, organic EL, inorganic EL, various liquid crystal devices is any can.In addition, section shape not necessarily must adopt the flat shape shown in Figure 15, also can have the hemispherical curve form of Denging.

The 240th, detect the complex function sensor part of temperature, pressure information.240 cross-section structure can be that Figure 12 or any of shown in Figure 14 and these distressed structures can.Such as, the video display 230 is the occasion of colour liquid crystal display device, representational 1 Pixel Dimensions is 330 μ m * 330 μ m.Substrate 100 is transparent materials such as glass, and electrode is the transparency electrode of ITO and ZnO etc., and metal oxide is transparent strong dielectric medium, pyroelectricss such as PZT and barium titanate.

The complex function sensor part is stacked and placed on the image display surface of video display, and image display surface is carried out image according to the information of utilizing the complex function sensor part to detect and shown.

Electrode utilizes common film formation method manufacturings such as sputtering method, and it is patterned into desired figure.Such as, metal oxide is divided into 3 parts, the size of 1 one pixels according to 13 is carried out three and is cut apart, with the size of temperature, the pressure detection part 110 μ m * 330 μ m as each several part.Each several part, but on the detection of vertical direction and horizontal direction on pressure and temperature.Certainly, according to purposes, the test section of temperature, pressure can certainly be divided into size in addition.

Utilize this structure, such as, temperature detection part utilized, as the people near the time can detect its body temperature, the switch of video display is inserted, by make be shown in video display on the identical object contact pressure test section of object, can detect this object surfaces information.

B. concrete example

Concrete example to the respective embodiments described above is illustrated below.In addition, be to describe to embodiment 4 and embodiment 5 for the occasion that metal oxide 2 is divided into 3 parts, still, such as, can certainly be divided into 2 or 4 parts.In addition,, be not limited to the means of following explanation, select to get final product according to the material that constitutes device for device making method.

(1) concrete example 1

In being shown in the tactile data element of Fig. 1, the 4, the 5th, same material all is a monocrystalline silicon, 100 the silicon chip that wherein will cut out processes as shown in the figure section shape by anisotropic etching.The 3rd, metal oxide adopts (Pb, La) (Zr, Ti) O ₃(following PLZT slightly).In the present invention, adjustment consists of Pb/La=95/5 atom %, Zr/Ti=30/70 atom %.1, the 2nd, electrode all is the laminate electrode of titanium/platinum.

The making step of tactile data element as shown in figure 10, at first utilizes thermal oxide to form monox on silicon (100) monocrystalline 5, as elastic body.Afterwards, make titanium 20nm, platinum 100nm as electrode 2 with sputtering method continuously.On this electrode, make the PLZT of 5 μ m thickness with sputtering method.Make PLZT and electrode 2 graphical by dry etching, forming the degree of depth again on the part of detection level directional pressure is the groove of 1 μ m.As shown in Figure 1, utilize common photoetching technique to form electrode 1.At last, by anisotropic etching, substrate 5 is carried out etching form hollow structure, utilize not shown wiring to be connected and make element with not shown external circuit from the back side.

In order to confirm the function of this composite function device, 300 tactile data elements are carried out one dimension according to Fig. 4 arrange the formation line sensor.Herein, the size of 3 parts, the width of the Sensor section of the composite function device of arranging with the width 50 μ m that make, one dimension that length 300 μ m make is 45mm.

To this Sensor section, utilize silicon chip shown in Figure 6 is carried out etching, form width a=300 μ m, height 4 μ m, b=1mm at interval, the device of the straight line bar like pattern of θ=45 ° (A-A ' sectional view as shown in Figure 7) is with pressure 0.5kg/cm ²Pressure contact.At this moment, Sensor section is moved with the speed of the 50 μ m/ seconds direction of arrow along Fig. 6.Reading of signal utilizes the input control circuit 22 of Fig. 9 to carry out.At this moment, the variation of the output of the pressure detection part on the vertical direction of the tactile data element that is disposed at left end as shown in Figure 8, affirmation can obtain the proportional output of area that contacts with the tactile data element with bar like pattern.

In addition, the output of sending from the tactile data element corresponding to moving of Sensor section, sequentially, changes to right-hand member from the left end of Sensor section.Afterwards, utilize the output control circuit 25 of Fig. 9, on the semi-girder part, apply voltage on one side, on one side with the finger touch sensor, vibration about can feeling, and, when the left end from the tactile data element moves to right-hand member, can confirm up-down vibration, can reproduce from the time of the output of each element and change.

(2) concrete example 2

Fig. 2 illustrates the cross-section structure schematic diagram of tactile data element, and Figure 11 A-I illustrates making step.

In this Fig. 2, substrate 5 is fotocerames, and elastic body 4 and 5 adopts same material.1, the 2nd, electrode, the 2nd, Cr/Ti/Pt, the electrode 1 that clips metal oxide 3 is made of Ti/Pt.These electrodes, each all utilizes the PF sputtering method to form.In this example, metal oxide is 0.7Pb (Mg _1/3Nb _2/3) O ₃-0.3PbTiO ₃, form with sol-gal process.4 thickness is 5 μ m, and the thickness of metal oxide 3 is 6 μ m.The common wet etching of graphical employing of substrate 5 and elastic body 4, and the common dry etching of graphical employing of electrode 1,2 and metal oxide 3.The length of the semi-girder part of assembling electrode 1/ metal oxide 3/ electrode 2 is 300 μ m, and width is 80 μ m.This semi-girder is 4 and becomes 90 ° of configurations mutually.

In order to study the performance of this tactile data element, with element in length and breadth each 100 assortment form dimension sensors.In addition, from the surperficial 0.1mm of distance dimension sensor the polymkeric substance diaphragm being set covers whole sensor.Electrode 1,2 as shown in Figure 9, utilizes not shown wiring, is connected with input control circuit, storer/arithmetic processing circuit, telecommunication circuit through address control unit 21.

Make commercially available copy paper FB75 (FoxRiverBond system) and Xx90 (Xerox system) with 0.8kg/m ₂ About pressure contact 5 seconds of this routine composite function device.Afterwards, it was being moved on directions X of Fig. 5 between 10 seconds with 0.5s/m.At this moment, measure from detecting the output of the part of passing through the contact pressure in vertical direction between 5 seconds, in the occasion of FB75, the change of output is 32.2% to the maximum.

Relative therewith, the maximal phase that is output as the output change from the part that detects the pressure on the horizontal direction is about 25% to amplitude of fluctuation.On the other hand, the relative variability amplitude of the output of observed Xx90 is about 15% in vertical direction, and the pressure on the horizontal direction is 10% change.In addition, observing from the mobile temperature rise estimation that causes owing on directions X of temperature checkout part branch output is that FB75 is 3.5 ℃ of temperature rises to the maximum.Be 1.2 ℃ temperature rise to the maximum in the occasion of Xx90.The result who utilizes laser microscope that the surface of this copy paper is observed is that FB75 probably has the concavo-convex of 9.3 μ m, can be observed the fluctuating of several 10～100 μ m, and the concavo-convex of Xx90 is about 8.9 μ m, and spacing is below about tens of micron.This point, consistent with the measurement result of this routine composite function device, the surface of FB75 is compared with Xx90, demonstrates whole the concavo-convex big of paper of using.

Each tactile data element when contacting 5 seconds in vertical direction detect voltage, from external power source the laminated body that forms at semi-girder is applied the voltage that sends from output control circuit, make semi-girder upward to bending.Under this state, when sensor surface was described, concave-convex sense whole on FB75 was strong with finger, and Xx90 is more smooth.This at interval with clip both concavo-convex interval class when rubbing with the hands mutually with finger seemingly.

(3) concrete example 3

Figure 12 illustrates the cross-section structure schematic diagram of 1 element of embodiments of the present invention 3.In this figure, the 110th, silicon chip (substrate), what use is its silicon chip of 100 that cuts out herein.The 120th, metal oxide adopts (Pb, La) (Zr, Ti) O ₃In the present embodiment, adjustment consists of Pb/La=95/5 atom %, Zr/Ti=30/70 atom %.

About manufacture method, shown in Figure 19 A to E.At first utilize thermal oxide to form silicon oxide film and make titanium 15nm, platinum 150nm as laminate electrode with sputtering method afterwards silicon chip surface.Afterwards, utilize common semiconductor processing technology to carry out graphically, a feasible part that only stays electrode 130,150.

Afterwards, utilize the MOVCD method to form the PLZT film of 3 μ m.The unstrpped gas of each metal ingredient, the cyclopentadienyl complex compound of two dipivaloylmethane (bisdipivaloyl-methanate) lead of employing, 4-tert-butoxy zirconium, tetraisopropoxy titanium, lanthanum.The material container of Figure 21 is prepared 4, the above-mentioned organic metal of indivedual respectively fillings.

For Ti, Zr composition, adopt well heater 300 ℃ of heating as 280.For Pb, La composition, 280 are set at 400 ℃.Accelerating potential for Pb, La composition, is 2kV, for Zr, Ti composition, is 3kV.The flow that imports to the argon gas in 260 by control is controlled the metal composition.If underlayer temperature is 600 ℃, when per minute changes 10 commentaries on classics, form metal oxide film (plzt film) 120.The metal oxide film of Sheng Chenging (plzt film) 120 utilizes the X-ray diffraction microscope to confirm crystal plane and substrate vertical-growth (111 alignment films) like this.On the other hand, in the occasion that whole metal ingredients is not applied accelerating potential, the relative substrate of 001 crystal plane vertical orientated (001 alignment films).

Afterwards, to the part of the electrode 140 that forms 111 alignment films, utilize fluorine nitric acid to carry out wet etching, etching depth is 2.5 μ m., utilize RF sputtering method comprehensively form the top electrode that by above-mentioned titanium and platinum constitute,, each electrode 130,140,150 is separated by graphical to top electrode thereafter.So, with each electrode 130,140,150, as shown in Figure 9, utilize not shown wiring, change with address control unit, input control circuit and be connected with storer/arithmetic processing circuit and make the multifunctional device of present embodiment.It is self-evident that the diaphragm that forms insulativity on the whole surface of element does not matter yet.In addition, in the present embodiment, the size of 3 parts, width is that 50 μ m, length are 300 μ m, 300 of this elements is carried out one dimension arrange.So the width of the Sensor section of the composite function device that makes is 45mm.

To this Sensor section, utilize Figure 16, silicon chip shown in Figure 17 are carried out etching, form width a=300 μ m, height 5 μ m, b=1mm at interval, the device of the straight-line pattern of θ=45 ° is with pressure 0.9kg/cm ²Pressure contact.At this moment, Sensor section is moved with the speed of the 50 μ m/ seconds direction of arrow along Figure 16.At this moment, the variation of the output of the pressure detection part (pressure detecting element) on the vertical direction that is disposed at left end as shown in figure 18, affirmation can obtain with straight line pattern with detect vertical direction on the proportional output of the area that contacts of part of pressure.On the other hand, the output voltage that the pressure on the horizontal direction detects part is that the pressure of vertical direction detects the about 80% of part, its relatively output the tendency identical with Figure 18 is shown.In addition, little even push the pressure of silicon chip to 0.1kg/cm ², can detecting signal on the vertical and horizontal direction.

For comparison purpose, also utilize the method the same to make device, carry out same experiment with 111 alignment films for 001 alignment films.The relative output of vertical direction, horizontal direction is identical with Figure 18's, but the output voltage of horizontal direction be vertical direction output voltage 1/3, when the pressure of pushing silicon chip less than 0.3kg/cm ²The time, can not detect the pressure of horizontal direction.

As mentioned above, confirm, irrelevant with the orientation of PLZT, utilize the multifunctional device of present embodiment, can detect pressure vertical, horizontal direction, and, can revise the detection limit of pressure by orientation is controlled.

(4) concrete example 4

Figure 14 illustrates the cross-section structure schematic diagram of the multifunctional device of embodiments of the present invention 4.In this figure, substrate 110 is fotocerames, the 220th, and fotoceram adopts same material with substrate 110 herein.130, the 140, the 150th, electrode, the part that contacts with 220 is Cr/Ti/Pt, the opposition side of sandwich metal oxide 120 is made of Ti/Pt.Each of these electrodes all utilizes the PF sputtering method to form.

In addition, metal oxide is 0.7Pb (Mg _1/3Nb _2/3) O ₃-0.3PbTiO ₃, form with sol-gal process.220 thickness is 5 μ m, and the thickness of metal oxide 120 is 5 μ m.The common wet etching of graphical employing of substrate 110 and elastic body 220, and the common dry etching of graphical employing of electrode and metal oxide.A size of component is width 180 μ m, and length 500 μ m carry out three with it according to Figure 14 and cut apart, and A partly detects the pressure of vertical direction, and B partly detects the pressure of horizontal direction, and the C part then is the part that detects temperature.This element arrangements is become in length and breadth each 200, wholely cover with the polymkeric substance diaphragm.Electrode 130,140,150 forms structure as shown in figure 20 with not shown wiring and makes the multifunctional device of present embodiment.

Make commercially available copy paper FB75 (FoxRiverBond system) and Xx90 (Xerox system) with 0.8kg/m ₂About the multifunctional device of pressure contact present embodiment, afterwards, it was being moved on directions X of Figure 13 between 10 seconds with 0.5s/m.In the occasion of FB75, be 15.8% to the maximum from the relative output of the part that detects pressure in vertical direction.Relative therewith, be about 30% from the maximal phase of the output of the part that detects the pressure on the horizontal direction to amplitude of fluctuation.

On the other hand, the relative variability amplitude of the output of observed Xx90 is about 8.95%.So the occasion that moves on the Y of Figure 13 direction does not detect both difference.In addition, observing from the mobile temperature rise estimation that causes owing on directions X of temperature checkout part branch output is that FB75 is 2.5 ℃ of temperature rises to the maximum.Be 1.4 ℃ temperature rise to the maximum in the occasion of Xx90.The result who utilizes laser microscope that the surface of this copy paper is observed is that FB75 probably has the concavo-convex of 9.3 μ m, can be observed the fluctuating of several 10～100 μ m, and the concavo-convex of Xx90 is about 8.9 μ m, and the amplitude of fluctuating is below about tens of micron.This point, consistent with the measurement result of this routine composite function device, the surface of FB75 is compared with Xx90, demonstrates whole the concavo-convex big of paper of using.

(5) concrete example 5

Figure 15 illustrates the sectional structure chart of the multifunctional device of embodiments of the present invention 5.The 230th, be used for the display device of show image information, the 240th, can detect the complex function sensor part of temperature, pressure information simultaneously, the cross-section structure principal diagram of an element of this part is in Figure 14.The 230th, utilize the video display spare of the organic material of liquid crystal or organic EL etc., so long as can show the image information display of common CRT etc. any can, also can of lamination.Shape not necessarily must be a rectangular section shape shown in Figure 15 also, and lamination also can.What adopt for show image information in the present embodiment, is that 1 Pixel Dimensions is the colour liquid crystal display device of 330 μ m * 330 μ m.The size of picture is 12 inches.

In Figure 14,110 fotocerames, 120 adopt metal oxide (Pb, La) (Zr, Ti) O ₃In the present embodiment, adjustment becomes Pb/La=95/5 atom %, Zr/Ti=30/70 atom %.The 220th, the fotoceram identical with 110.In addition, electrode material 130,140,150 is any all to be to adopt the material that adds 3% gallium in zinc paste, and the 150nm that utilizes the RF sputtering method to form is thick.

Afterwards, with above-mentioned metal oxide 120, when utilizing electron beam evaporation plating, will blow to substrate 110 simultaneously through the oxygen of Ion Beam Treatment and film forming independently with each metal ingredient evaporation.The composition control of metal ingredient can be undertaken by the irradiation time that changes electron beam.Thickness is 10 μ m.Utilize ion milling (etching) to metal oxide and bottom electrode graphically make its size become 100 μ ms * 300 μ ms thereafter.

In addition, on the part that detects the pressure on the horizontal direction, utilizing ion milling to form the degree of depth is the groove of 5 μ m.This groove forms on Width in Figure 14, also can but form in the longitudinal direction.In the present embodiment, the position from the edge 15 μ m of metal oxide on Width forms 2 grooves, and the size of groove is 10 μ m * 230 μ m.Afterwards, utilize the PF sputtering method to form as top electrode with the zinc-oxide film that gallium mixes comprehensively, by top electrode, metal oxide 120 and bottom electrode being carried out in proper order graphically can form the pressure that detects vertical direction, the pressure of horizontal direction and the part of temperature respectively.

At last, utilize wet etching that the inboard of the substrate 110 of temperature, pressure test section is removed and the formation hollow structure.At this moment, because 1 one of fotoceram use as elastic body, electrode 130,150 can not expose.Be shown in Figure 14 be used for detect the sensor part of pressure and temp and handle not shown IC circuit from the signal of sensor, utilize the zinc paste wiring with the same interpolation gallium of electrode 130,140,150, the image display part of video display not superposed part connect.In addition, in Figure 15, the complex function sensor part 240 of colour liquid crystal display device 13 and detected temperatures pressure is overlapping with bonding each element that makes of bonding agent.

When utilizing paintbrush to describe to draw a picture setting-out, handle by the detecting signal to each several part the temperature, pressure test section 200 of the present embodiment of Zhi Zaoing like this, can detect the moving direction of a pressure and live width and pen according to the pressure and the action that are added on the arm.Because the part of a pressure, to give birth to heat big because of friction, detects by the combination to the pressure and temp on the vertical direction, can detect more delicate pen and press variation.So, also this information can be shown on display 230.

Utilize the multifunctional device of the embodiments of the present invention of above explanation can detect temperature and pressure simultaneously.The multifunctional device of the extensive use of the surface state that is applied to various concavo-convex patterns, paper etc., the entering apparatus of information machine or the like different field can be provided thus.

In addition, the multifunctional device of embodiments of the present invention is to utilize by it being divided into a plurality of parts, can to handle the device of essential information in various piece to temperature and any one strong dielectric medium or the pyroelectrics that can respond of pressure.In addition, constitute on one deck by the detecting element that will be used for detecting temperature, pressure, and each detecting element is detected the occasion that material detects with other compare, the manufacture process of device can be simplified significantly.

In addition, by controlling the crystalline orientation manufacturing device of strong dielectric medium or pyroelectrics, just can eliminate problem from the deviation of the sensitivity of the pressure of different directions.In addition, because strong dielectric medium or pyroelectrics are generally approaching transparent to visible light, can overlap processing to temperature, pressure this point tactile data and image information.

In addition, in the above description, the multifunctional device of present embodiment is that the situation at temperature that can detect target object and pressure describes, but utilizes the characteristic of strong dielectric medium or pyroelectrics can detect the acceleration of target object and angular velocity or the like, is self-evident.

In addition, according to present embodiment, because be metal oxide is divided into a plurality of parts, by the structure that electrode can detect different a plurality of information is set on various piece, even so detecting element breakage also can be guaranteed the function of other detecting element, because each detecting element group utilizes same material to constitute, manufacture process is simplified simultaneously.

＜possess the information input/output unit of multifunctional device 〉

The information input/output unit of the multifunctional device of explanation is described in detail to utilizing so far below.Exactly above-mentioned multifunctional device is assembled into the occasion of information input/output unit as the fingerprint detector.

In recent years, along with the development of communication network society, the fusion of communication network and connected signal conditioning package makes progress day by day.Such as, the more and more necessary of the security function that the user's that uses signal conditioning package individual is differentiated etc. increases.

As carrying out the mode that this individual differentiates, have all identification methods, but noticeable especially be the discriminating that utilizes the tactile data of fingerprint etc.According to the discriminating of this tactile data (Biont information), the feature that has is impossible take place to be replaced pretending to be discriminating or the possibility that individual physical mediums such as recording of information medium are lost discerned in records such as key or IC-card by other people.

Utilizing fingerprint to carry out in individual's discriminating, read the mode in the fingerprint, such as shown in " Thermal Type Fingerprint Sensor Having Arrayed HeaterElements " (sensor, fine machine and application system meeting report summary collection), have from the mode of utilizing the image understanding that the photography of optical system adversary fingering row obtains, utilize sensor to the mode of carrying out instrumentation from physical quantitys such as the heat of finger and power and according to mode of the distribution understanding fingerprint of these measured quantities or the like.

In addition, such as, as in No. 3258632 communique of Jap.P., recording and narrating, differentiate fingerprint and be known the technology that identification result is applied to security function.In above-mentioned technology, structurally on the power switch of e-machine or step switch, the fingerprint reading part is set, carry out fingerprint when the e-machine energized or when starting and read, will according to the livings body of finger print information differentiate and the startup of e-machine move correct carry out related successfully.

So the result who differentiates with the fingerprint of above-mentioned fingerprint reading part is not the occasion of the validated user logined the user who differentiates the operation e-machine in advance, in order to get rid of the use of this illegal user to e-machine, the startup that e-machine can inhibition itself.

Like this, suppress the startup of e-machine itself, compare with having separately, can think that security is improved based on the discriminating machine of biological information and according to the occasion that the identification result of this discriminating machine limits the function of above-mentioned e-machine.

In addition, as differentiating fingerprint and being applied to other examples of security function, such as, open in the 2000-293253 communique the spy and to propose a kind of fingerprint that utilizes the indication of coordinate indicatory device that reads and read fingerprint on the coordinate, according to the result that the above-mentioned fingerprint that reads and the finger print information of login are in advance compared, the technology of control e-machine.

Open in the e-machine shown in the 2000-293253 communique this spy, in coordinate that the indication fingerprint is read and the information that obtains from the fingerprint identification result, in the time of independent or compound use, just can judge the action that user (operator) is whether legal and draw oneself up.

In other words, in the intention (user to the operation indication of e-machine) of the indication coordinate understanding user who reads by fingerprint to e-machine, differentiate to determine the user by fingerprint, and the action of the e-machine that will connect with the user's of above-mentioned definite user-dependent information and above-mentioned cognition intention is controlled.

As the object lesson of this discrimination method, such as, read the occasion of coordinate at the stamp hurdle middle finger first finger line of typing, have to press down down and admit the method for printing with the user of the identification result that obtains is corresponding.

In addition, utilize discriminating individuals' such as finger print information result's application examples, be not only limited to safe correlation technique.Such as, this individual differentiates, the information of identification result with individual's entertaining tendency is being associated, judgement also can be applied among the kind of the information on services that individual subscriber provides and content or the like.

But, in the e-machine that possesses the fingerprint identification function shown in No. 3258632 communique of above-mentioned Jap.P. (the fingerprint reading part is set carries out the e-machine that the individual differentiates management), there is the problem that the following describes on the power switch of e-machine or step switch.

In other words, in the above-mentioned existing e-machine that possesses the fingerprint identification function.Owing to pay the utmost attention to security, on the power switch of e-machine or step switch, the fingerprint reading part is set.Its result has just had the Switch for the use of user's possible operation, all must be provided with above-mentioned fingerprint reading part can not problem.

In addition, with the safety inspection occasion of the common service of purpose providing to the user, the power supply of e-machine must be connected or start frequently.Therefore, such as, in the common occasion of using above-mentioned e-machine of a plurality of users, the user must go to carry out the fingerprint discriminating to the specific place that switch is set can not.So, utilize user's the operability of e-machine bad, there is the problem of miscellaneous operation being forced at the user.

In addition, opening record and narrate in the 2000-293253 communique the sort of above-mentioned spy utilizes fingerprint to read coordinate to read fingerprint, according to its result of comparing of finger print information with login in advance being moved in the existing e-machine of control, there is the problem that the following describes.

In other words, because above-mentioned existing e-machine, reading coordinate indicating member and fingerprint reading unit etc. by display unit, fingerprint constitutes, the fingerprint that to point on the contact e-machine the user reads coordinate time, the contact position coordinate of a plurality of fingers of user can only utilize the visual information shown in the e-machine to user prompt.

In addition, the result of the intention of the user when user's finger contacts with e-machine (user is to the operation of e-machine indication) and relevant user discriminating is only limited to the occasion of e-machine regular event, and the user is pointed out.

Therefore, the user can not directly confirm own whether the operation of e-machine have been carried out reliably, can only be with the action normal termination of e-machine side whether as judgment standard, and the operation of indirect acknowledgment oneself is sent to e-machine really.

Like this, situation is, can judge that e-machine do not finish and as it is till the end, the operation that the user does not understand oneself indicates whether to send to really e-machine fully by action of the purpose of end user or action until can confirm certain release information sent from the e-machine side or action continuation information.

So, in this information input/output unit, be intended to solve such problem.The embodiment that can solve this kind problem is as described below.

The embodiment of＜information input/output unit 〉

Embodiment to information input/output unit is illustrated with reference to the accompanying drawings.

(1) embodiment 1

(formation of information input and output machine 100)

Figure 22 is the diagrammatic sketch of formation that is used for illustrating the information input and output machine 400 of embodiment 1, the 410th, and machine shows the input part, the 420th of holding concurrently, the pseudo-button, the 430th that may select is used for showing that the display area, 440 of the content of above-mentioned pseudo-button 420 provides the loudspeaker of acoustic information.

Wherein, the machine input part 410 of show holding concurrently is to be used for when detecting user fingerprints, and whether the machine side is familiar with the part that the information of the operation that the user carries out provides to the user.The configuration that constitutes the tactile data element of the double input part 410 of machine demonstration is illustrated in Figure 24.

As shown in figure 24, the 510th, tactile data efferent, 520,530, the 540th, tactile data input part.The machine input part 410 of show holding concurrently is combined into a unit with efferent (tactile data efferent 510) and input part (tactile data input part 520～540), and this element is configured as rectangular and formation.

In addition, as shown in figure 24, the tactile element that in tactile data efferent 510 and tactile data input part 520～540, comprises respectively, not necessarily equally big or small.Can constitute with suitable size respectively according to the function of tactile data efferent 510 and tactile data input part 520～540 for detecting the necessary resolution of user fingerprints as long as can guarantee.

Particularly, in the time will detecting spacing that fingerprint carries out the sense of touch display element (tactile data input part 520～540) at the input position that the user differentiates and compare with the spacing of the sense of touch display element (tactile data efferent 510) of exporting the position, even the spacing at the output position of tactile data is greater than the spacing at input position, the occasion that can fully reach its function is also a lot.

Its reason is, the spacing at input position, and in order to prevent the flase drop of fingerprint, must be fully little.Relative therewith, the output position is because be to be used for pointing out information that whether operation of confirming the user be sent to the machine side really, as long as guarantee the necessary spacing of information indicating.

Return the explanation of Figure 22.Pseudo-button 420 is the selector buttons of being pointed out to the user by information input and output machine 400, to information input and output machine 400, transmits user's operation intention.

Display part 430 is occasions of pressing pseudo-button 420 the user, and the movement content concise representation that information input and output machine 400 is carried out is on each pseudo-button 420.

Loudspeaker 440 is to be used for providing to the user sound machine of aural information (information of Operating Guideline etc.).

Utilize the function formation block diagram shown in Figure 23 that the function of information input and output machine 400 is illustrated below.

Central processing department 450 is responsible for the control of the molar behavior of information input and output machine 400.Central processing department 450 if supply with users' authentication information and supply with users' intent information from input information control part 490 from fingerprint discriminating portion 470, is just controlled sound handling part 500 and is provided tutorial message etc. to the user.In addition, central processing department 450 outputs to tactile data display control unit 460 with user's identification result etc.

Tactile data display control unit 460 makes from central processing department 450 output user identification results etc. by action control to show at the information input and output machine shown in above-mentioned Figure 22 400.

Fingerprint discriminating portion 470, whether judgement is consistent with the fingerprint of having logined from the user's of input information control part 490 outputs fingerprint.

Finger print data login portion 480 logins and record regular user's fingerprint in order to make fingerprint discriminating portion 470 can carry out the fingerprint judgement.

Input information control part 490, user fingerprints that will obtain from information input and output machine 400 and user's intention (user is to the operation indication of machine) output to fingerprint discriminating portion 470, central processing department 450 and tactile data display control unit 460.

Information input and output machine 400, the tactile element of forming by tactile data efferent 510 shown in above-mentioned Figure 23 and tactile data input part 520～540.

Acoustic processing portion 500 is the processing that are used for carrying out from the tutorial message of loudspeaker 440 output regulations.In addition, information input and output machine 400, the processing that the result who is used for carrying out whether being familiar with user's operation passes on through loudspeaker 440 usefulness sound.

(action of information input and output machine 400)

Below the action at the information input and output machine 400 of user when subject machine is indicated desired operation is illustrated.

At first, Operating Guideline choice menus project from the menu guide look that subject machine shows of sending according to the loudspeaker 440 of information input and output machine 400 of user.

Afterwards, the user utilizes the sense of touch understanding display part 430 of the pseudo-button 420 of demonstration on information input and output machine 400 once more corresponding to the menu item of oneself selecting, and presses the pseudo-button 420 of target.In addition, the content that on display part 430, shows pseudo-button 420.By this user's action, information input and output machine 400 carries out user's discriminating in understanding user's intention.

Show that about machine the input part of holding concurrently also will describe in detail.Picture is the display screen that shows the content of the operation that carry out.The structure of pseudo-button 420 is that to understand by contact be the pseudo-button (not being real pushbutton switch) of button, and contacts the surface of this button in addition and the display part 430 understood.

In Figure 22,, be the 3rd button, or the content of " 3 " also show as tactile data because 3 circles (zero) are arranged on pseudo-button 420.Utilize this three circles, content displayed is corresponding with the content of pseudo-button 420.

As mentioned above, the information input and output machine 400 of present embodiment, be to constitute by the functional block diagram shown in Figure 23, as differentiate and handle beginning, at first, and the user between, be used for the information of carrying out (action indication information and finger print information or the like) from central processing department 450 to the output of each formation portion and receive and dispatch necessary directive command.

Herein, information input and output machine 400 is in the occasion of only carrying out with the simple formation of user's information input/output function, in central processing department 450, except above-mentioned functions, also be provided with and the function of the connecting interface of the device of information input and output machine 400 outsides etc.

In the present embodiment, by the action control of central processing department 450, acoustic processing portion 500 implements its function, provides the purpose of operation and selection branch (menu item) in step and menu guide look with sound to the user through loudspeaker 440.

In addition, the user also be there is no need to provide the Operating Guideline of the acoustic information that utilizes acoustic processing portion 500 and information input and output machine 400, also can adopt such structure, promptly the user carries out operation to subject machine according at least one the information in tactile data described later or the visual information.

As mentioned above, consider the purpose of the machine operation that is provided by loudspeaker 440, the user judges suitable selection branch.On the other hand,, utilize the tactile data input and output portion 410 of tactile data display control unit 460 controls, make pseudo-button 420 and display part 430 become the purpose of concavo-convex state representation machine operation in the subject machine side.

Secondly, the user by be shown in the jog of the display part 430 on the pseudo-button 420 on the double input part 400 of machine demonstration with finger touch, presses the pseudo-button 420 that will select being familiar with pseudo-button 420 by sense of touch when.

The user is by pressing and the corresponding pseudo-button 420 of desirable machine operation, and user's intention is sent to subject machine as the operation indication.Central processing department 450 according to above-mentioned indication, when confirming user's intention, carries out user's discriminating according to the user's that can detect from the finger of pressing pseudo-button 420 fingerprint simultaneously.

The affirmation of the user view of utilizing information input and output machine 400 and the concrete steps that the user differentiates are shown below.

Input information control part 490 according to from the input information that rectangular tactile data input part 520～540 obtains that is configured as shown in Figure 23, carries out the action control to the analysis of user profile (to the operation indication information and the finger print information of machine),

At first, input information control part 490 is when the position of sense of touch display element from the input contact information detects selection operation, from the substep understanding user's of the sense of touch display element of input contact information finger print information.

Herein, input information control part 490, for detecting of carrying out that the user selects, such as, can judge whether the position that the input signal of the sense of touch display element of tactile data input part 520～540 is concentrated is the position that the user presses.In addition, in order to be familiar with user's finger print information, also can, such as, analyze the distribution of the input signal of sense of touch display element and judge the fingerprint shape.

Input information control part 490 sends to central processing department 450 and tactile data display control unit 460 with the positional information of recognizing the pseudo-button 420 of user's finger contacts.At this moment, in central processing department 450, in the cutting of the action that subject machine is carried out, use above-mentioned information.In addition, in tactile data display control unit 460, the selection branch (pseudo-button 420) that the user is pressed is shown in the subject machine side as tactile data, and will recognize that the operation this point of having carried out conveys to the user.In other words, originally as pseudo-button 420, if button is arranged, a contact can be understood, and demonstrates and different on every side tactile datas (different, existence stimulation (electro photoluminescence or the like) that convex sense, resistance (flesh touches) have).

In specific words, such as, when the user pressed with the pseudo-button 420 shown in the convex attitude, input information control part 490 made above-mentioned pseudo-button 420 be transformed to the concavity attitude.Utilize the variation of the tactile data that the variation of this concavo-convex state causes, the user can confirm that the operation indication of oneself recognizes for subject machine.

In addition, input information control part 490 sends to fingerprint discriminating portion 470 with the finger print information of recognizing.In fingerprint discriminating portion 470, with reference to the data that sign in to finger print data login portion 480, determine to carry out the user of aforesaid operations, and this result is sent to central processing department 450.

Central processing department 450, if the position (contact position) of the pseudo-button 420 that the supply user selects and the identification result of the individual subscriber that fingerprint discriminating portion 470 carries out, just operation of desirable subject machine being carried out according to the user and user's personal information, the action of decision objects machine.In other words, according to user's identification result, be the proper user who has logined if judge above-mentioned user, central processing department 450 is just controlled the action of the content of the button that makes this subject machine carry out user's selection.

According to present embodiment, if the user selects optional menu item from the menu guide look that provides in order to make the subject machine action, because whether judge above-mentioned user simultaneously is user's discriminating of proper user for subject machine, so according to the above-mentioned intention of once selecting to obtain simultaneously the user with to user's identification (determining), the operability in the time of just can increasing substantially user's operand machine.

In addition, because the menu guide look of the purpose of operand machine and step and selection branch etc. also can utilize acoustic information and tactile data to provide to the user, can be familiar with by a plurality of menu items of finger contact the user under the state of the information content and point out tactile data, with reference to tut information and tactile data, can the operand machine, the user also not necessarily will rely on visual information, can be by the understanding of the sensation naturally action button that had originally.

(2) embodiment 2

Below with reference to Figure 25 the embodiment 2 of this information input/output unit is illustrated.

Shown in Figure 25 550 is the pseudo-operation buttons that are different from the prompting tactile data of the pseudo-button 420 shown in above-mentioned Figure 22.In addition, the 440th, loudspeaker.

In addition, because the function of the information input and output machine 400 of the function of the information input and output machine of present embodiment and the embodiment shown in Figure 23 1 is basic identical, it describes omission in detail.

In addition, utilize sound to the purpose of instruction manual machine operation and step and select branch, identical to can the give and accept pseudo-button this point of tactile data of user prompt with above-mentioned embodiment 1.

Relatively the difference of present embodiment and embodiment 1 is that the prompting of 460 pairs of pseudo-buttons of tactile data display control unit is not to utilize concaveconvex shape, but utilizes other tactile datas to user prompt.Such as, tactile data display control unit 460, point out through the tactile data that 550 couples of users' of pseudo-button finger gives electro photoluminescence or gives temperature difference.

Its result, user can utilize the haptic stimulus that changes the variation of sense of touch in addition based on this physical form of concaveconvex shape, the difference in understanding zone (position of pseudo-button 550).

In addition, central processing department 450, providing in the operation whether subject machine recognize the user to user side with tactile data, for the pseudo-button 550 of the haptic stimulus of giving electro photoluminescence or thermostimulation etc., after pressing the button, the user also can not give haptic stimuluses such as above-mentioned electro photoluminescence and thermostimulation.

So according to present embodiment, the user utilizes the pseudo-button 550 that has above-mentioned this haptic stimulus, can indicate the operation that subject machine suits.

In addition, because the operation of subject machine for the user can be indicated whether correctly to be familiar with, be the result whether subject machine recognizes user's intention, and the user's who judges from finger print information an identification result feedback user, so that the information of user and subject machine is passed on is rapid and simple and easy.Therefore, even utilize the menu of pseudo-operation button to select, the user can know that also institute arranges and can operate, and can improve user's operability significantly.

(3) embodiment 3

Embodiment 3 to this information input/output unit is illustrated below.

In the present embodiment, when the user carries out desirable action in order to make subject machine, among the menu guide look during choice menus project, with the tactile data shown in embodiment 1 or the embodiment 2, simultaneously to user prompt visual information.

Figure 26 is the function constitution map that the information input and output machine 400 ' of present embodiment is shown.In Figure 26, the 450th, central processing department, the 460th, tactile data display control unit, the 470th, fingerprint discriminating portion, the 480th, fingerprint data entry portion, the 490th, input information control part, the 410th, the tactile data display element, the 560th, visual information display element 560, and 570 are visual information display control units.

The formation and the formation in the embodiment 1 of the information input and output machine 400 ' of present embodiment are basic identical, but in the present embodiment, dispose the visual information display element 560 that provides visual information to use to the user in the behind of 410 groups of tactile data display elements.In addition, in the present embodiment, have visual information display control unit 570.

In addition, constituting tactile data display element 410 group times with transparent material, the user can be familiar with Word message that is arranged at tactile data display element 410 visual information display element 560 demonstrations behind and the information (user's intention and user's identification result) that image information causes utilized.

In addition, present embodiment, parallel tactile data and the visual information used can provide suitable information to the user.But, as mentioned above, visual information display element 560 is not limited to be arranged at the behind of tactile data display element 410.

Such as, also can adopt following structure, be about to the behind that tactile data display element 410 is arranged at visual information display element 560, the user can obtain tactile data (because stimulation, electro photoluminescence or thermostimulation etc. that the change of shape of concavo-convex grade causes) from tactile data display element 410 when visual information display element 560 is obtained visual information.

In addition, in the present embodiment, be operation purpose etc. to be made Word message be shown in and describe on operating machines, Figure 26 is not included in Figure 22 and acoustic processing portion 500 illustrated in fig. 23 and loudspeaker 440, can possess yet and utilizes sound that the user is described.

At this moment, carry out Operating Guideline for the user being utilized sound, such as, the acoustic processing portion 500 and the loudspeaker 440 that have with the same function of explanation in embodiment 1 in structure, will be comprised.The action of acoustic processing portion 500, loudspeaker 440 and the central processing department 450 etc. of this moment is identical with the low-resistance of explanation in the embodiment 1.

According to present embodiment, for the user, the actions menu guide look of pointing out when using subject machine can provide visual information with tactile data and acoustic information.Therefore, the position of the pseudo-button of the selection branch of user's direct control and content also can Word message and image information represent.The user is familiar with easily to the formation of the input part (tactile data display element) 410 of holding concurrently as the machine demonstration of operation screen.

In addition, during in the result the who whether operation of subject machine indication (pressing pseudo-button 420) correctly has been familiar with by the subject machine side for the user to the user prompt subject machine and according to the user's of finger print information recognition result,, can carry out effectively more really also with tactile data and visual information by simultaneously.

Like this, in the present embodiment, can realize and more effectively to carry out information indicating by also using visual information always simultaneously, can provide abundant information to the user.

In addition, by effectively utilizing tactile data, can provide the operation feeling that can not feel under the weather to the user very naturally.

In addition, this information input/output unit, record is realized the recording medium feed system or the device of software program of the function of the main frame of embodiment 1～3 and terminal, the computing machine of this system or device (or CPU and MPU) is read and is carried out and finish by the program code that will deposit in the recording medium, and this is self-evident.

At this moment, the program code of reading from recording medium itself can be realized the function of present embodiment, and the recording medium and the program code that write down this program code constitute the present invention.

As the recording medium that is used for supplying with program code, can use ROM, floppy disk, hard disk, CD, magneto-optic disk, CD-ROM, CD-R, tape, Nonvolatile memory card or the like.

In addition, the program code of reading by object computer, not only can realize the function of the information input/output unit of embodiment 1～3, and according to the indication of this program code, the OS that moves on computer system etc. can carry out part or all of actual treatment, realizes that according to this processing the occasion of the function of present embodiment is self-evident within also comprising.

Figure 27 illustrates aforementioned calculation machine system 650.

Aforementioned calculation machine system 650, as above-mentioned shown in Figure 27, comprise: the keyboard controller (KBC) 655 of CPU651, ROM652, RAM532, keyboard (KB) 659, as the Magnetic Disk Controller (DKC) 657 of CRT controller (CRTC) 656, hard disk (HD) 661 and the floppy disk (FD) 662 of the CRT monitor (CRT) 660 of display part, be used for the network interface controller (NIC) 665 that is connected with network 670, but said apparatus is interconnected into mutual communication by system bus 654.

CPU651 constitutes portion by carrying out the software that writes down among ROM652 or the HD661 or can unifying to control each that be connected with system bus 654 by the software that FD662 supplies with.

In other words, CPU651 controls, and can read and carry out from ROM652 or HD661 or FD662 by the handling procedure according to the predetermined process order, and realize the action of above-mentioned present embodiment.

RAM653 has as the main memory of CPU651 or the function of workspace.

Input from control indications such as KBC655, KB659 and not shown fixed-point apparatus.

The demonstration of CRTC356 control CRT660.

DKC657, control is to the HD661 of the predetermined process program of record start-up routine, various application program, editing files, user file, network supervisor and present embodiment etc. and the visit of FD662.

NIC658 is used for carrying out bidirectional data exchange between device on the network 670 or system.

Be appreciated that this information input/output unit from the above description, be mounted with above-mentioned multifunctional device, the information that the contact of pointing by the user obtains can positively be carried out above-mentioned user and differentiate, is the good device of operability.

More specifically, differentiate, all determine this user at every turn when the user operates e-machine in order positively to carry out the e-machine user.

In addition,, can follow the menu guide look of colorful tactile data herein, when the user contacts the optional menu item of menu guide look of above-mentioned prompting, carry out the user and differentiate it also is feature to user prompt.

In addition, utilize this information input/output unit, in order to carry out the input and output of user's operability good information, the user with finger contact from the menu guide look of e-machine during the choice menus project, give the stimulation of touch feeling to the user, can also hold optional menu item destination locations according to this haptic stimulus.

In addition, utilize this message input device, the user can confirm whether robot calculator is correctly recognized the content of user's operation indication.

In addition, utilize this message input device, can give the user imagination sensation when the user utilizes pseudo-button that e-machine is carried out practical operation.

As mentioned above, because according to this information input/output unit, when the guide look prompting is used for a plurality of menu items of operand machine, when the user contacts optional menu item with finger, desirable user's finger print information, carry out user's discriminating, thus can when the user is intended to the operand machine at every turn, can determine this user be who and carry out reliable user and differentiate.In addition, when can preventing the wrong identification third party, can not need the input of password etc., the user is fed up with, the operability in the time of can improving user's operand machine significantly.

The invention is not restricted to above-mentioned embodiment, within the spirit and scope of the present invention various changes and distortion can be arranged.Therefore, in order to allow the public understand protection scope of the present invention, the claim below having proposed.

Claims (3)

1. computer program, this program are used for carrying out the information I/O method of above-mentioned subject machine being controlled according to user's identification result of the user of relevant operand machine, it is characterized in that having:

Be used for a plurality of menu items of operating above-mentioned subject machine are had a guide look of the menu prompt operation of prompting;

Among a plurality of menu items that utilize above-mentioned menu prompt operation prompting, obtain operation according to the tactile data that above-mentioned user obtains above-mentioned user's tactile data with the menu item destination locations of finger contact; And

The user who carries out above-mentioned user's discriminating according to the tactile data unit that utilizes above-mentioned tactile data to obtain to obtain the unit differentiates operation.

2. computer program, this program is used for carrying out when the user is exported the tactile data of regulation, and the information I/O method in the information input/output unit of the customer responsiveness that input is carried out the tactile data of above-mentioned output is characterized in that having:

By above-mentioned user a plurality of menu items that are used for the operand machine are pointed contact and the tactile data that the information content is pointed out as the tactile data of the state that can be familiar with is exported operation;

In a plurality of menu items that utilize above-mentioned tactile data output unit output, obtain the above-mentioned tactile data input operation of above-mentioned user's fingerprint according to the menu item destination locations of above-mentioned user's contact; And

Fingerprint according to the user who utilizes above-mentioned tactile data input operation to obtain is obtained above-mentioned user view, and carries out the user profile treatment process of above-mentioned user's discriminating.

3. a computer-readable recording medium is characterized in that having write down the program described in the claim 1.

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