CN1866737A - Piezoelectric vibrator and its fabricating method, piezoelectric oscillator, electronic apparatus and radio wave timepiece - Google Patents

Piezoelectric vibrator and its fabricating method, piezoelectric oscillator, electronic apparatus and radio wave timepiece Download PDF

Info

Publication number
CN1866737A
CN1866737A CN 200610091645 CN200610091645A CN1866737A CN 1866737 A CN1866737 A CN 1866737A CN 200610091645 CN200610091645 CN 200610091645 CN 200610091645 A CN200610091645 A CN 200610091645A CN 1866737 A CN1866737 A CN 1866737A
Authority
CN
China
Prior art keywords
inner lead
lead
piezoelectric vibrator
piezoelectric
welding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 200610091645
Other languages
Chinese (zh)
Inventor
佐藤正行
福地盛吾
富崎淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Publication of CN1866737A publication Critical patent/CN1866737A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

To provide a method of fabricating a piezoelectric vibrator capable of excellently bonding a lead terminal and a piezoelectric vibrating piece despite being small-sized for ensuring an accuracy of a frequency and various properties and reliability of the piezoelectric vibrator, there is provided a method of fabricating a piezoelectric vibrator including an airtight terminal having a lead terminal and a piezoelectric vibrating piece comprising a piezoelectric member and formed with an exciting electrode and a mount electrode at a surface thereof, in which an inner lead of the lead terminal and the mount electrode are bonded, wherein when the inner lead and the mount electrode are bonded, a plasma arc is discharged to a portion of bonding the inner lead and the mount electrode in argon gas to bond the inner lead and the mount electrode by a solder, thereby, a controlled heat amount is locally supplied and therefore, solid bonding can be carried out and the piezoelectric vibrator having high reliability can be provided.

Description

Piezoelectric vibrator and manufacture method thereof, piezoelectric oscillator, electronic installation and radio wave timepiece
Technical field
The present invention relates on lead terminal, be welded with the piezoelectric vibrator and the manufacture method thereof of piezoelectric type vibrating reed, piezoelectric oscillator, electronic installation, and radio wave timepiece.
Background technology
Piezoelectric vibrator be a kind of manufacturing such as the time count oscillator, electronic installation or the similar requisite electronic component of industrial products, and as time source, timing source, or signal criterion source.As the encapsulation of piezoelectric vibrator, use columniform column type encapsulation usually.Hereinafter with reference to accompanying drawing, the structure of the piezoelectric vibrator of the column type of explaining encapsulation.
Figure 13 shows the decomposition diagram of internal structure of the piezoelectric vibrator of column type encapsulation, and Figure 14 is the manufacturing flow chart that schematically shows the manufacturing of piezoelectric vibrator.
As shown in figure 13, the piezoelectric vibrator 6 of column type encapsulation is made of such structure, wherein piezoelectric type vibrating reed 4 is welded to the inner lead 2 on base 8 inboards, and this base 8 constitutes the becket of the airtight terminal 1 that comprises two metal lead wire terminals.This piezoelectric type vibrating reed 4 comprises piezoelectric type materials such as quartz, and forms the shape of tuning fork with photoetching technique.On two shaker arms surface partly of this tuning-fork-type piezoelectric type vibrating reed 4, form exciting electrode 4a.The base terminal of this piezoelectric type vibrating reed 4 is made of the installing electrodes 7 that is connected with exciting electrode 4a.
Piezoelectric type vibrating reed 4 and inner lead 2 are connect by installing electrodes 7.Inner lead 2 passes the inside that airtight glass enters base 8, and its part that is installed on the circuit board is called outside lead (indicating with mark 3).Inner lead 2 and outside lead 3 are commonly referred to lead terminal.The outer cause of base 8 with metal cylindrical cylinder at the bottom of the sealed tube of member cover (not shown) so that cover tuning-fork-type piezoelectric type vibrating reed 4, thereby make the gas-tight seal of its vacuum.
Piezoelectric vibrator according to the column type encapsulation that constitutes as mentioned above, when predetermined voltage being imposed on two outside leads 3 as driving voltage, electric current goes between internally by installing electrodes 7 and 2 flows to exciting electrode 4a, thereby with predetermined this piezoelectric type vibrating reed 4 of hunting of frequency.
As shown in figure 14, the manufacturing step of piezoelectric vibrator 6 comprises the step of welding inner lead 2 and piezoelectric type vibrating reed 4, reach frequency trim step from the preset frequency of piezoelectric type vibrating reed 4, and the sealing step that the sealed tube of member at the bottom of the metal cylinder is sealed to the base 8 of airtight terminal 1, in the middle of these steps, comprise the step in heating steps and the vacuum.In corresponding manufacturing step, frame support bracket is as the device of settling piezoelectric vibrator 6, thus manufacturing piezoelectric vibrator 6.
Figure 15 shows the frame support bracket of the piezoelectric vibrator that is used for background technology and is placed in the outline perspective view of the piezoelectric vibrator of this frame support bracket.In corresponding manufacturing step, shown in the top-right zoomed-in view of Figure 15, according to the airtight terminal 1 that comprises lead terminal, the fixing spring 19 that an end of outside lead 3 uses the frame support bracket 18 with piezoelectric vibrator 6 to weld together fixes.In the steps such as step in carrying out heating steps, vacuum such as welding operation, frequency trim operation, seal operation, the frame support bracket 18 of the piezoelectric vibrator 6 of fixed outer lead-in wire 3 is installed on the manufacturing installation.In the step of welding inner lead 2 and piezoelectric type vibrating reed 4, piezoelectric type vibrating reed 4 is aimed at the straight line calibration clamp (not illustrating) that constitutes calibrating installation, and the frame support bracket 18 of fixed outer lead-in wire 3 is arranged on this straight line calibration clamp.Thus, on frame support bracket 18, settle inner lead 2 and piezoelectric type vibrating reed 4.
By applying hot blast such as nitrogen, and rightly from be placed in each other together piezoelectric type vibrating reed 4 and the top heating of the end portion of inner lead 2, the method for welding inner lead 2 and piezoelectric type vibrating reed 4 is well-known.In order to promote the wettability of scolder, the excitation active specy (activespecies) of discharge gas is added to such as the method in the hot blast of nitrogen, also be well-known.
According to these methods, with the hot blast fusing inner lead 2 previous scolders of electroplating, thus welding inner lead 2 and piezoelectric type vibrating reed 4.In addition, as the coat of metal that has scolder, use such method usually, in the manufacturing step of airtight terminal, form hundreds and thousands of airtight terminals by electrolysis bucket electro-plating method, and form the thick scolder of about 10 to 15 μ m on the surface of lead terminal and the peripheral edge portion of base.
In the soft soldering welding, scaling powder usually is used for such purpose, by remove the oxide-film that forms naturally on the substrate material surface in air, promotes the wettability of scolder.Yet, under the situation of piezoelectric type member, there is such situation, wherein the electrode of piezoelectric type component surface is subjected to the residue of scaling powder or the corrosion of splashing, thereby makes its mis-behave, and adopts the no scaling powder method of not using scaling powder thus.
Therefore, oxide-film or dirt can not be removed from the surface of base material fully, therefore depend on the state that this is surperficial, and significant variation can take place the wettability of scolder, thereby have the situation that causes soft soldering welding failure.The acceptability of inner lead 2 and piezoelectric type vibrating reed 4 welding performances has caused remarkable influence at various characteristics on the reliability of frequency accuracy and piezoelectric vibrator 6.
The soft soldering welding failure that causes for fear of the low moisture adsorbability owing to scolder, having rough segmentation is the method for two classes: the method for countermeasures such as rising heating-up temperature and will encourage active specy to mix method in the hot blast.Below will provide description about the corresponding problem of these two kinds of game methods.
(problem under the rising heating-up temperature situation)
According to the heating means by hot blasts such as nitrogen, when the piezoelectric type vibrating reed comprised quartz, hot blast blowed to quartz, thereby the excessive temperature of vibrating reed ground itself raises.In this case, consider winding strain that in quartz crystal, generates etc., worsened widely such as character such as crystal impedance value, temperatures coefficient.Especially, the miniaturization of current piezoelectric type vibrating reed and airtight terminal makes progress rapidly, should be noted that the thermal capacity of the member that will synthesize makes it be unlikely the member that damages in these steps.
At length be described, at first, apply the hot blast of heating from the top of the end portion of piezoelectric type vibrating reed 4 and inner lead 2, with the solder fusing of inner lead 2 so that weld together with it, yet, there is this situation, can not satisfies the necessary thermal capacity of this scolder of fusing, and can not realize fabulous welding by melting solder.
That is to say that according to the method for heating hot blast, the area of the thermal capacity that institute's heating part receives and the air quantity of hot blast and heating part is proportional, thereby temperature raises from the position with large tracts of land heating part.The diameter of inner lead 2 that is coated with scolder is less, and heating surface (area) (HS is also less, so its temperature rises also less.
Need a large amount of hot blasts so that the necessary hot blast heat of scolder of fusing inner lead 2 is provided.Must make hot blast facilitate penetration of the surrounding environment of the part that it heats.Yet, when hot blast is blocked to live by the part anchor clamps, can also heat other parts except that welding portion so that make its fusing.As a result, on vibrating reed, cause adverse influence as mentioned above.When installing, when for example heat-resisting scolder is electroplated, especially can cause consequent problem with scolder with high melting point.The shape that depends on surrounding environment that hot blast passes also may be brought opposite situation, and wherein the air quantity of hot blast is restricted, and can not obtain to be used to melt the necessary thermal capacity of scolder of inner lead 2, and therefore unfused welding occurs.
In addition, in welding step,, on frame support bracket 18, in advance a plurality of airtight terminals and vibrating reed are placed in together each other in order successfully to weld a plurality of airtight terminals.Under the nozzle of hot blast with the long side direction of invariable speed at carriage on mobile support carriage 18.Thus, one after the other on frame support bracket, weld a plurality of inner leads 2 and piezoelectric type vibrating reed 4.Yet, the method that hot blast is blowed to moving target suffers the slight shift owing to nozzle angle, the air quantity difference that airwaves produces easily, and have such situation, because the unsteadiness of the heat that provides can not realize fabulous welding by melting solder.
Like this, by the heating means of hot blast at providing heat and will provide in the control of object and produced problem.
(utilizing the problem of the method for excitation active specy)
In correlation technique, to carry out the method for installation steps be well-known by encouraging active specy to mix hot blast.For example, in order to generate the excitation active specy, select CF 4As discharge gas, and the heating hot blast of the excitation active specy of the fluorine that will generate in discharge tube and nitrogen mixes, and injects the appropriate section that will install.Thus, on the welding coating of the surface of inner lead and the electrode surface that will install, form thin fluoride layer thereon, meanwhile melt this welding coating, thereby can realize the welding that wettability is splendid.
Yet, selected CF as discharge gas 4Gas is a kind of gas that shows greenhouse effect, and is preferably to avoid a kind of gas of using in manufacturing step.In addition, installation steps are often to repeat to provide and the step of the carriage that taking-up is aimed at piezoelectric type vibrating reed 4 and airtight terminal 1, and preferably device this as the device open to air.In this, excitation active specy CF 4The use of gas causes the pollution to ambient atmosphere, and this is not preferable.In addition, because above-mentioned purpose, using hot blast on its basis, is relatively poor only providing the hot blast of necessary amount and the controllability on the excitation active specy to the necessary part of the piezoelectric type vibrating reed 4 of miniaturization and airtight terminal 1.Therefore in addition, in the process of operating this device over a long time, also peripherad device and anchor clamps provide the excitation active specy, must stop these devices frequently so that dismounting and clean these anchor clamps, thereby cause the problem of effective production aspect.
Next, the description of other problems in the installation steps will be given in.The mechanical arrangement accuracy of inner lead 2 and piezoelectric type vibrating reed 4 is except welding performance, also at heterogeneity, cause remarkable influence on the reliability of frequency accuracy and piezoelectric vibrator 6, and the performance of piezoelectric vibrator 6 is classified as most important grade.
By frame support bracket 18 is arranged on the straight line calibration clamp of piezoelectric type vibrating reed 4, carry out the arrangement of inner lead 2 and piezoelectric type vibrating reed 4.Yet an end of outside lead 3 fixes with the fixing spring 19 that is installed on the frame support bracket 18, therefore has such situation, can not reach to settle inner lead 2 and piezoelectric type vibrating reed 4 necessary setting accuracies.Just in time the tip of the shaker arm of vibrating reed 4 touches the inwall of sealed tube 5 by chance.Vibration is because this contact becomes unstable.And this contact has produced from the inwall of sealed tube 5 and has peeled off, such as the particulate of quartz or electric conducting material.When these particulates adhere on the vibrating reed 4, slight frequency shift (FS) can take place, unstable thereby vibration becomes.
Summary of the invention
One object of the present invention is to provide a kind of piezoelectric vibrator and manufacture method thereof, address the above problem, set up a kind of fabulous welding method of locating with the electrode on the piezoelectric type component surface and the necessary pinpoint accuracy of inner lead and controllability, improve the machinery and the electric reliability of coupling part greatly, and guarantee frequency accuracy, with the various character of piezoelectric vibrator, with and reliability.
To achieve these goals, the present invention adopts following solution.
According to a first aspect of the invention, a kind of method of making piezoelectric vibrator is provided, this piezoelectric vibrator comprises the airtight terminal that has lead terminal, with the piezoelectric type vibrating reed that comprises the piezoelectric type member, and be formed with exciting electrode and installing electrodes in its surface, the inner lead and the installing electrodes of lead terminal have wherein been welded, wherein when this inner lead of welding and installing electrodes, plasma arc welds the partial discharge of this inner lead and installing electrodes in argon gas, so that weld this inner lead and installing electrodes by scolder.
Method according to the manufacturing piezoelectric vibrator of first aspect present invention, the present invention is made of such method, provide fusing coating necessary heat partly, this coating discharges by article on plasma arc in short-term to be provided, this method method with prior art in essence is different, in the prior art by with hot blast heating or add the excitation active specy surface of reforming, thereby promote wettability.Provide heat to constitute by the plasma arc discharge by such method, when even this method is subjected to oxidation and forms oxide-film when the surface of coating, also can provide the heat that is enough to the melting bed of material,, also have fabulous controllability simultaneously so that flow and the wetting surface that is connected.In addition, by welding portion is placed argon atmosphere, by cutting off airborne oxygen, the surface of having avoided being connected is subjected to oxidation, thereby has realized fabulous welding.
In addition, although according to hot-air system, be difficult to limit partly the object (will apply the object of heat) that will be subjected to wind, discharge according to plasma arc, because the character that it only produces at the electrode front end of close electrode, need not shield the piezoelectric type member electrode outside the welding portion, heat melts scolder with the plasma arc discharge that only partly produces in wire bonds, and can partly not impact, and always can only connect this welding portion admirably at the piezoelectric type electrode except that welding portion.In addition, only piezoelectric type member and lead portion be need in argon shield atmosphere, arrange, and Special Equipment or devices such as extensive vacuum plant do not needed.Can not be created in when using the excitation active specy to have problems the surrounding environment pollution problems, need not decompose continually and cleaning clamp, and can suppress the reduction of production efficiency.
Especially, utilization according to plasma arc discharge of the present invention is such method, this method even can be used for the material that liquidus temperature exceeds 400 ℃, and the method for prior art is by electroplating the welding of the heat-resisting scolder of high-melting-point, and perhaps using in the welding according to the unleaded plating outline of unleaded form research is a difficult problem.
According to a second aspect of the invention, a kind of method of making piezoelectric vibrator is provided, this method is by partly being connected to the outside lead of lead terminal the power output terminal of plasma arc, and between near the plasma arc electrode of arranging the welding portion of the inner lead of inner lead and first aspect present invention and installing electrodes, apply voltage, thereby carry out Connection Step by using plasma arc to discharge.
According to the method for the manufacturing piezoelectric vibrator of second aspect present invention, in the small hermetic terminal, can freely select to be arranged in parallel so which close mutually group inner lead is formed the object that is used to produce the plasma arc discharge.Therefore, even further make progress when the miniaturization form of the composition of airtight terminal, and the distance between the lead-in wire is when further shortening, and the lead-in wire that constitutes plasma arc discharge object also can be discerned flat.In addition, need not shield installing electrodes except that welding portion.Thus, can only select wherein outside lead to be connected to the lead-in wire of plasma arc power supply, and can always finish this connection admirably by the plasma arc discharge heat that only produces at the welding portion of inner lead.In addition; in argon shield atmosphere, arrange installing electrodes and inner lead; by cutting off airborne oxygen; can avoid the surface of institute's melting solder to be subjected to oxidation; and can make connect with scolder necessary; weld the piezoelectric vibrator of two component surface admirably, and the wettability with the scolder that connects the surface is worsened.In addition, by fabulous welding, can make the piezoelectric vibrator of the frequency accuracy of the stability of guaranteeing various character and reliability and piezoelectric vibrator.
According to a third aspect of the invention we, a kind of method of making piezoelectric vibrator is provided, wherein weld inner lead and installing electrodes, clamp the outside lead of lead terminal by the positioner that forms with notch portion, and with inner lead be arranged to of the present invention first or second aspect on the installing electrodes of the piezoelectric type vibrating reed aimed at the straight line calibrating installation.
According to the method for the manufacturing piezoelectric vibrator of third aspect present invention, clamp outside lead by the positioner that forms with notch portion, constraint and clamping airtight terminal be not so that can break away from from frame support bracket.By two parts at least of rectangular thin plate are joined for a pair of, the interval of notch portion is calibrated to width greater than piezoelectric vibrator, the difference of the outside lead anglec of rotation can be tied to very for a short time, and can satisfy and settle the necessary setting accuracy of clamping inner lead.
That is to say, in view of the position radius of outside lead very little, outside lead is subjected to the plastic deformation of very little load, and this position is difficult to be subjected to the constraint of direct external strength, in greater than the notch portion of this piezoelectric vibrator width, carry out constraint, the anglec of rotation can be retrained by position, and the necessary setting accuracy of this inner lead can be satisfied with this width with respect to the outside lead of this piezoelectric vibrator profile.The setting accuracy of the notch portion of the rectangular thin plate that will be inserted by outside lead can easily be formed by the general fine finishining machine that reaches some microns machining accuracy, dicer for example, the necessary setting accuracy in the location that utilizes this notch portion can be satisfied, and the piezoelectric vibrator that improves the anglec of rotation and setting accuracy can be made.
In addition, the inner lead that this rectangular thin plate can gather with a kind of motion positions easily, and be applicable to the automation that processing is stable.In addition, the piezoelectric vibrator of the frequency accuracy by correct location and improved face of weld being provided, can making the stability of guaranteeing various character and reliability and piezoelectric vibrator.
According to a forth aspect of the invention, a kind of method of making piezoelectric vibrator is provided, wherein weld inner lead and installing electrodes, by in first aspect present invention to the third aspect in the either side, utilize the elastic force of the outside lead of lead terminal, when inner lead is pressed into installing electrodes, welding inner lead and installing electrodes.
Method according to the manufacturing piezoelectric vibrator of fourth aspect present invention, the elastic force of the outside lead that obtains by curved outer lead-in wire, inner lead is pressed on the piezoelectric type vibrating reed, and inner lead is not crooked, thereby alleviated internal stress, and on the center position of the sealed tube of cylindrical member at the bottom of the metal cylinder, arrange the fore-end of piezoelectric type vibrating reed.By on the center position of sealed tube, arranging the fore-end of piezoelectric type vibrating reed, can make the fore-end of avoiding the piezoelectric type vibrating reed and the contacted piezoelectric vibrator of inwall of sealed tube.
According to a fifth aspect of the invention, provide a kind of and make the piezoelectric vibrator that the method for piezoelectric vibrator is made by first aspect present invention either side to the fourth aspect.
According to a fifth aspect of the invention, piezoelectric vibrator is provided, comprise airtight terminal with lead terminal, with the piezoelectric type vibrating reed that comprises the piezoelectric type member, and be formed with exciting electrode and installing electrodes in its surface, wherein welded the inner lead and the installing electrodes of lead terminal, and this welding discharges with high mechanical positioning precision with by plasma arc and realize, thereby can realize sufficient solid bond.Therefore, this piezoelectric vibrator is being splendid aspect the impedance of the vibration of external strengths such as opposing whereabouts collision, thereby has suppressed frequency change and oscillatory instability significantly, and pinpoint accuracy can be kept one very long period thus.
According to a sixth aspect of the invention, provide a kind of piezoelectric oscillator, wherein piezoelectric vibrator is connected to integrated circuit as oscillator plate.
According to a seventh aspect of the invention, provide a kind of piezoelectric type device, wherein, use this piezoelectric vibrator by being connected to segment count.
According to an eighth aspect of the invention, provide a kind of radio wave timepiece, wherein, use this piezoelectric vibrator by being connected to filter segment.
According to a sixth aspect of the invention to eight aspect, comprise the setting accuracy of mounting portion of piezoelectric vibrator with above-described the same high, and this piezoelectric type vibrating reed securely links to each other with inner lead, thereby this piezoelectric vibrator is being splendid aspect the impedance of external strengths such as the opposing vibration or the collision of falling.Thereby blanketing frequency changes and oscillatory instability significantly.Thus, device etc. can be kept the pinpoint accuracy in one very long period.
As mentioned above,, provide a kind of and locate, the fabulous welding method in welding and the necessary heat supply of control supply object with electrode on the piezoelectric type component surface and the necessary pinpoint accuracy of inner lead according to the present invention.Therefore, this piezoelectric vibrator can improve the machinery and the electric reliability of institute coupling part, and guarantees the various character and the reliability of frequency accuracy and piezoelectric vibrator, with and manufacture method.
Description of drawings
Fig. 1 shows the outline perspective view of the piezoelectric vibrator of an embodiment;
Fig. 2 is used to explain the outline perspective view of carriage of the piezoelectric vibrator of realizing present embodiment;
Fig. 3 is used at length explaining the outline perspective view of carriage of the piezoelectric oscillator of realizing Fig. 2;
Fig. 4 is the profile enlarged perspective by the airtight terminal of the rectangular tab clamping of frame support bracket of present embodiment;
Fig. 5 is the profile overall perspective view by the airtight terminal of the frame support bracket clamping of present embodiment;
Fig. 6 is used to explain the outline perspective view of location of the frame support bracket of present embodiment and piezoelectric type vibrating reed straight line calibration clamp;
Fig. 7 A and 7B are the key diagrams by the lead-in wire of PLASMA ARC WELDING airtight terminal and piezoelectric type vibrating reed, and Fig. 7 A is that general outline constitutes view, and Fig. 7 B shows the outline perspective view of welding portion;
Fig. 8 A is by comparing the differential section with different welding methods with 8B, the microscope enlarged photograph that shows the welding portion state, Fig. 8 A shows the photo by the welded condition example of the method for article on plasma arc discharge in argon gas, and Fig. 8 B shows the photo of the welded condition example of the hot-air system by using nitrogen;
Fig. 9 is used to explain the tilt profile key diagram of welding of elastic force according to the piezoelectric type vibrating reed of present embodiment and inner lead;
Figure 10 shows the profile schematic diagram according to the formation of the tuning-fork-type quartz crystal vibrator of second embodiment of the invention;
Figure 11 shows the profile view according to the portable information terminal device block diagram of third embodiment of the invention;
Figure 12 is the block diagram according to the radio wave timepiece of fourth embodiment of the invention;
Figure 13 is used to explain the outline perspective view of piezoelectric vibrator;
Figure 14 is the flow chart that shows the step of the piezoelectric vibrator of making Figure 13 simply; With
Figure 15 is the outline perspective view of carriage that is used to support the piezoelectric vibrator of background technology.
Embodiment
With reference to following accompanying drawing, the embodiments of the invention of explaining.
(embodiment 1)
Fig. 1 shows the profile decomposition diagram according to the piezoelectric vibrator structure of first embodiment.
As shown in Figure 1, piezoelectric vibrator 6 is by airtight terminal 1, comprises that the sealed tube 5 of member constitutes at the bottom of the piezoelectric type vibrating reed 4 of piezoelectric type material such as quartz and the metal cylindrical cylinder.In addition, airtight terminal 1 comprises the annular base 8 that comprises metal material, and two lead terminals that pass this base 8.The short of two lead terminals that is soldered to piezoelectric type vibrating reed 4 and be contained within the sealed tube 5 held formation inner lead 2, and it is protruded into the outside long formation outside lead 3 of holding.The surface of lead terminal and the outer rim of base 8 are electroplated.
The piezoelectric type vibrating reed 4 of present embodiment is a tuning-fork-type vibrating reed, a pair of shaker arm that has base part and give prominence to from this base part.The base part surface of piezoelectric type vibrating reed 4 is formed together with a pair of installing electrodes 7.In addition, this of this piezoelectric type vibrating reed 4 is formed together with the exciting electrode 4a that links to each other with installing electrodes 7 respective surfaces of shaker arm.By forming electrode by this way, when the outside lead 3 to airtight terminal 1 applies predetermined driving voltage, electric current flows on exciting electrode 4a via inner lead 2 and installing electrodes 7, thereby the shaker arm of bending piezo-electricity type vibrating reed 4 is so that with predetermined frequency vibration.
The overall dimension example of airtight terminal 1 and the simple description of examples of materials will be provided here.According to the small-sized piezoelectric formula vibrator that is used for such as the midget plant of mancarried device, the diameter of the base 8 of the airtight terminal 1 that its outer rim is electroplated approximately is 0.95mm.In addition, the diameter of the base material of lead terminal approximately is 0.15mm, and its diameter approximately is 0.18mm after electroplating.Normally, form the coating that thickness is approximately 10 μ m to 15 μ m thereon.As the material of lead terminal base material, use Kovar alloy (teleoseal) usually, and, use heat-resisting welding coating (leypewter, its weight ratio are 1: 9), gun-metal (SnCu), Sillim's alloy (AnSn) etc. as plated material.In addition, it is identical with the coating material that offers lead terminal to offer the coating material of base 8 outer rims.This has just constituted such structure, wherein by inserting its coating, makes the outer rim of base 8 and the inner edge of sealed tube 5 stand cold welding, thereby makes the inside of sealed tube 5 be subjected to the gas-tight seal of vacuum state.
As the overall dimension example of the small-sized piezoelectric formula vibrating reed 4 that is soldered to airtight terminal 1, its width is approximately 0.5mm to 0.6mm, and its total length is approximately 2.0mm to 3.2mm.The installing electrodes 7 of piezoelectric type vibrating reed 4 is made of the double-layer structure film of chromium (Cr) and gold (Au), after formation has the chromium layer that is attached to as the excellent performance on the quartz of matrix, provides very thin one deck gold in its surface.In addition, as other structures of installing electrodes 7, the surface of the three-decker film of chromium and nickel (NiCr) can also be deposited with very thin one deck gold.Equally in this case, constitute matrix with chromium.
Next, explain the with reference to the accompanying drawings example of the method for making piezoelectric vibrator.Fig. 2 and Fig. 3 are used to explain the outline perspective view of supporting according to the carriage of the piezoelectric vibrator of present embodiment, Fig. 4 is by the profile enlarged perspective according to the airtight terminal of the rectangular thin plate clamping of the frame support bracket of present embodiment, Fig. 5 is by the total perspective view of profile according to the airtight terminal of the frame support bracket clamping of present embodiment, Fig. 6 is used to explain the outline perspective view of location of piezoelectric type vibrating reed straight line calibration clamp and frame support bracket, Fig. 7 A and 7B are the plasma arcs by present embodiment, the key diagram of the lead terminal of welding airtight terminal and the step of piezoelectric type vibrating reed, Fig. 7 A is that general outline constitutes view, and Fig. 7 B shows the local enlarged perspective of welding portion.
At first, will provide the positioner that constitutes location inner lead 2 and piezoelectric type vibrating reed 4, be used to support detailed explanation according to the carriage of the piezoelectric vibrator of present embodiment.
As shown in Figure 2, the carriage 10 according to the supporting piezoelectric vibrator of present embodiment comprises a plurality of notch portion 11 in the long limit of the frame support bracket 10 with a rectangular thin plate shape side.As shown in Figure 3, by with its at least two parts match alignment cuts part 11.In addition, the width A of notch portion 11 is substantially equal to the width B of outside lead 3, and makes this to the interval C of the notch portion 11 outer dia D greater than airtight terminal 1.
By for example reaching some μ m machining accuracies, dicer as general fine finishining machine, frame support bracket 10 is formed with a plurality of notch portion 11 in a side of frame support bracket 10, outside lead 3 is clipped between the notch portion 11, and the profile of the necessary carriage 10 of the step of making present embodiment, and the position of a plurality of notch portion 11 and outside lead 3, so that constitute with pinpoint accuracy.
As shown in Figure 4, clamp and clamping outside lead 3, littler slightly by the width that makes a plurality of notch portion 11 thus, thus outside lead 3 is press-fit to wherein, perhaps make this width bigger slightly, and outside lead 3 is carried out joint filling, adhere to or the like.
According to the example of present embodiment, the profile accuracy of frame support bracket 10, the width accuracy of notch portion 11, the cumulative pitch accuracy of notch portion 11 is formed in the 5 μ m.The width A size of notch portion 11 shown in Figure 3 is made of 0.16mm, and it is substantially equal to the diameter B0.18mm of outside lead 3.By making this interval C be of a size of 1.5mm to notch portion 11, the overall diameter D of airtight terminal 1 is of a size of 1.1mm, the interval E of inner lead 2 is 0.3mm, make this to the interval C size of notch portion 11 overall diameter D size greater than airtight terminal 1, and be inner lead 5 times of E at interval of 0.3mm, thus the anglec of rotation accuracy of inner lead 2 is limited outside lead 3 spin angular position 1/5.
Thus,, guarantee the outside lead 3 of airtight terminal 1 and the setting accuracy of the inner lead 2 on airtight terminal 1 inboard, thereby the machining accuracy by the fine finishining machine realizes the pinpoint accuracy grade with pinpoint accuracy in the inside of frame support bracket 10.
The material of frame support bracket 10 comprises ceramic material, and can keep electric insulation between a plurality of notch portion 11 by keeping the setting accuracy of a plurality of notch portion 11.Therefore, the frame support bracket 10 electric each other independences of inner lead 2 that are used for making according to the formation welding object of present embodiment preferably.In addition, frame support bracket 10 preferably being used for reach predetermined frequency by apply driving voltage to piezoelectric type vibrating reed 4 in measuring process.
In addition, as shown in Figure 5, frame support bracket 10 can gather with a kind of motion easily, realizes moving each airtight terminal 1 of 20 clampings.Frame support bracket 10 is made of the simple profile of rectangular thin plate, therefore can easily realize being attached on the conveyer of conveyer belt etc., and separate from the conveyer of conveyer belt etc., as mentioning after a while, the location of can be easily and stably realizing it and piezoelectric type vibrating reed 4, this is applicable to the automation of processing according to the welding base of present embodiment.
Next, as shown in Figure 6,20 piezoelectric type vibrating reeds 4 are aimed at the straight line calibration clamp 12 of the device that is configured for aiming at piezoelectric type vibrating reed 4.The frame support bracket 10 of the setting accuracy of the inner lead 2 by will guaranteeing to have airtight terminal 1 is arranged on the straight line calibration clamp 12 of piezoelectric type vibrating reed 4, realizes the location of piezoelectric type vibrating reed 4 and inner lead 2.Although according to present embodiment, inner lead 2 is arranged to piezoelectric type vibrating reed 4, in contrast, also piezoelectric type vibrating reed 4 can be arranged on the inner lead 2.
Shown in Fig. 7 A, settle inner lead 2 as mentioned above, and inner lead 2 is contacted with piezoelectric type vibrating reed 4 by the airtight terminal 1 of frame support bracket 10 clampings.A terminal (terminal of representing with thick line comes out from the top of plasma arc power supply 16 in the figure) that is used for plasma arc power supply 16 in pair of output is connected to plasma arc electrode 13.Another of lead-out terminal is connected to an end of the outside lead 3 of the lead terminal that produces plasma arc.To describe this connection in detail after a while.The surrounding environment of plasma arc electrode 13 is remained in argon gas 14 protective atmospheres, and make the welding portion of plasma arc electrode 13 near the installing electrodes 7 of inner lead 2 and piezoelectric type vibrating reed 4.
In order to produce plasma arc 15, between plasma arc 13 and outside lead 3, apply voltage by plasma arc power supply 16, and and the inner lead 2 of outside lead 3 conductings and plasma arc electrode 13 between produce the plasma arc discharge.
The plain conductor of tungsten or tungsten alloy is used for plasma arc electrode 13.Tungsten alloy can comprise that for example lanthana perhaps can comprise yittrium oxide, cerium oxide etc.In addition, plasma arc electrode 13 also nonessentially is made of plain conductor, but can be made of the metal electrode with sharp-pointed front end that replaces plain conductor.
In addition, will be in Fig. 7 B the detailed explanation welding step.Although in Fig. 7 B, drawn inner lead 2 and installing electrodes 7 separated from one anotherly, this is in order to represent the structure of synthetic welding portion expediently.As mentioned above, under the actual welding situation, this inner lead 2a to one of inner lead 2 is contacted with this installing electrodes 7a to installing electrodes 7, and another root inner lead 2b is contacted with another installing electrodes 7b, thereby make them corresponding separately from each other so that locate thus.
A corresponding end that is two inner leads 2 produces the plasma arc discharge.At first, for instance, when constituting object, will be connected on the lead-out terminal of plasma arc power supply 16 corresponding to a part of (not shown) of the outside lead 3 of this inner lead 2a by an inner lead 2a.Next, make plasma arc electrode 13 (not shown),, between plasma arc electrode 13 and inner lead 2a, apply predetermined voltage from plasma arc power supply 16 as mentioning after a while near this inner lead 2a.Meanwhile, argon gas 14 is flow near plasma arc electrode 13 and the inner lead 2a the surrounding environment.Between plasma arc electrode 13 and inner lead 2a, in extremely short period, produce the discharge that is attended by the discharge heat.By this discharge heat, be adsorbed onto the water etc. on the installing electrodes 7a surface of inner lead 2a coating surface and piezoelectric type vibrating reed 4, at flash evapn.One after the other, by applying enough discharge heats, even when oxide layer etc. occurs in its surface, also can provide for the welding coating 17 that forms on the inner lead 2a surface is enough to heat that oxide layer is broken.Therefore, welding coating 17 all fusings in very short period.That is to say, according to the hot blast method of correlation technique wherein temperature to rise be not enough, the part that is made of the shade of inner lead 2a also can melt fully.In addition, the welding coating 17 of inner lead 2a flows on the installing electrodes 7a that its surface forms by thin Au layer etc., so that realize fastening welding.The surrounding environment of welding portion appears in the protective atmosphere of argon gas 14, so this surrounding environment is made of such structure, by blocking from airborne oxygen, avoids face of weld to be subjected to oxidation.
Under this occasion, make adjacency with it and inner lead 2b in parallel reach floating potential, this is because corresponding outside lead 3 parts are not connected to plasma arc power supply 16 with it.Therefore, between inner lead 2b and plasma arc electrode 13, do not produce discharge.In addition, on piezoelectric type vibrating reed 4, be arranged as other installing electrodes 7b that is spaced from tens μ m distances and also reach floating potential, and therefore between inner lead 2b and plasma arc electrode 13, do not produce discharge.In addition, the base 8 of airtight terminal 1 insulate to inner lead 2 each other with this.Like this, all electric conducting materials near inner lead 2a all remain on the floating potential.Therefore, even when producing the plasma arc discharge, constitute object, also can produce discharge by only inner lead 2a being connected to plasma arc power supply 16.Like this, even spatially arrange and also can specify the discharge object in the structure of electric conducting material, and therefore can stably control the object that heat is provided near it.
After the welding of inner lead 2a and installing electrodes 7a is finished, take the lead that is connected to outside lead 3 and the corresponding part of inner lead 2a apart, so that switch to outer lead 3 and the corresponding part of another inner lead 2b.As mentioned above, when to inner lead 2a and installing electrodes 7a repetitive operation, can connect inner lead 2b and installing electrodes 7b thereafter.Under this occasion, impact between inner lead 2a that discharge afterwards can formerly not welded and the installing electrodes 7a.That is to say,, spatially limited the influence of discharge heat terrifically even when producing the discharge that is attended by the discharge heat at close position.
In addition, the lead that links to each other according to the part with outside lead 3 is by using electronic switch mechanism such as relay, the conversion of automation lead easily.
One after the other, the description of heat control will be provided.In the present embodiment under the situation of the combination of airtight terminal 1 of Shi Yonging (its coating is finished by heat-resisting welding coating) and plasma arc power supply 16, preferably make the arc current value that between inner lead 2 and plasma arc electrode 13, flows be in such number range, be equal to or higher than 0.2A (ampere), and be equal to or less than 1.0A.That is to say, by being equal to or higher than 0.2A, and be equal to or less than the arc current value of 1.0A, can provide molten solder coating 17 necessary heats, and can not destroy piezoelectric type vibrating reed 4, and be in such state, the melted surface that can avoid welding coating 17 is subjected to oxidation.
When arc current value during less than 0.2A, it is not enough that heat will become, thus molten solder coating 17 fully, so that can not realize fabulous welding.In addition, when surpassing 1.0A, it is found that variation has taken place the crystal structure of piezoelectric type vibrating reed 4, perhaps piezoelectric type vibrating reed 4 begins to break so that self-destruction.In addition, be equal to or higher than 0.2A and be equal to or less than in the intermediate range of 1.0A, can fully melt the welding coating 17 of inner lead with fabulous reproducibility, thereby realize fastening connection in the arc current value.In addition, because the control range of preferred current value is enough wide, therefore in most of actual production process, can stably realize this step condition with fabulous reproducibility.
Further be described in detail, the type that applies arc current is preferably with pulse shape repeat conduction and dielectric type of waveform.Application system with pulse shape repeat conduction and dielectric type of waveform can promote solder wettable, and can not destroy the treatment surface that will weld.When the electric current of the waveform that uses pulse shape, there are the temperature upward period that causes by plasma arc of conduction and non-conductive cooling period, thereby heat conduction period is provided, the fast temperature of the treatment surface that inhibition simultaneously will be welded raises, the temperature of the welding portion that therefore can little by little raise.For example, the upper limit by current value is set to 1A, by conduction period that constitutes 0.5ms and the non-conductive period that 0.5ms is set, repeat conduction and non-conductive.Under its situation of 10 times of surpassing, repeat and the crack owing to produce 2 times, so that can not realize molten solder at piezoelectric type vibrating reed 4 places.Therefore, be set under the condition of 1A, preferably select the conduction period of 0.5ms for use, non-conductive period of 0.5ms and from 3 times to 10 times conduction number of times scope in the upper limit of arc current.
Although having described with welding coating 17 to pipe box 8 coating of lead terminal and airtight terminal 1 is the conductivity of testing under the relevant situation of heat-resisting welding coating, but by carrying out appropriate adjustment according to the inner lead 2 of airtight terminal 1 and the thermal capacity of welding coating 17 materials, relative set condition and conducting system that can the using electric arc current value range.Below will provide explaining of unleaded electro-plating situation, wherein as an example, the material of welding coating 17 is tin copper (SnCu) alloys.
Material at welding coating 17 is under the situation of SnCu, owing to do not comprise lead in its content, studies the potential substitute of this alloy as unleaded plating.About copper content is set to 10% so that when improving thermal endurance, in the phasor of general SnCu alloy, liquidus curve is risen, and extremely is difficult to melt this coating.For example, when the concentration of copper was 5%, liquidus temperature was approximately 360 ℃, and when the concentration of copper was 10%, it is very high that liquidus temperature becomes, up to about 433 ℃.In contrast, under the situation of heat-resisting welding coating, the temperature of liquidus curve is approximately 313 ℃ when lead is 90%, and is approximately 322 ℃ when lead is 95%.Therefore, compare, be difficult to melt the coating of SuCu more with heat-resisting welding coating.In addition, the concentration of copper depends on the production lot of coating in the SuCu welding coating, and maximum is arranged is approximately ± 2% variation, therefore for corresponding production lot, consider that fusion temperature is from about 50 ℃ to 60 ℃ differences to some extent.
In order to realize stable welding by molten solder coating 17 fully in this case, must select the arc current value rightly, and adopt conducting system.
Now, compared with prior art, the embodiment according to welding process of the present invention is described.Fig. 8 A is by comparing the difference part with different welding methods, showing the microscope enlarged photograph of welding portion state with 8B.Fig. 8 A shows the photo by the welded condition example of the method for article on plasma arc discharge in argon gas, and Fig. 8 B shows the photo of the welded condition example of the hot-air system by using nitrogen.In Fig. 8 A and Fig. 8 B, the SnCu coating that all will have 9% copper concentration is used for the inner lead 2 of airtight terminal and the welding coating 17 of base 8.In addition, in both cases, the size of inner lead 2 all is 180 μ m after electroplating, and piezoelectric type vibrating reed 4 all is the tuning-fork-type quartz crystal vibrator, the width of base part is about 0.55mm all, and comprising prong all is about 3.2mm at interior total length.Installing electrodes 7 is by making matrix with chromium (Cr) layer, being coated with the film of the double-layer structure of gold (Au) layer.
Shown in Fig. 8 A, although the temperature of liquidus curve is approximately 421 ℃ when copper concentration is 9%, yet when welding by the method for article on plasma arc discharge in argon gas, the coating of the part of inner lead 2 is able to sufficient fusing, and wetting on installing electrodes 7 well, thereby welding coating 17 extends on the whole surface of installing electrodes 7.Welding coating 17 on the inner lead 2 has gloss, and its surface is solidified, and can not be subjected to oxidation in molten state.In addition, only constitute heating part, and other parts of base 8 etc. can not be subjected to any influence of electric arc by inner lead 2.
In contrast, shown in Fig. 8 B, when the hot-air system by prior art welded, the coating of the part of inner lead 2 is fusing slightly only, and wetting area on installing electrodes 7 is very little, thereby can see nearly all surface of installing electrodes 7 as it is.
When piezoelectric vibrator covers respectively on the sealed tube 5, and when after taking pictures, carrying out the whereabouts crash tests, although according to the piezoelectric oscillator shown in Fig. 8 A with fabulous welded condition, vibration characteristics is not unusual at all, but the not good piezoelectric vibrator of welded condition shown in Fig. 8 B does not vibrate.When decomposing non-oscillating piezoelectric vibrator, peel off the welding portion of inner lead 2 and installing electrodes 7.
Like this, although have the airtight terminal of the SuCu coating of 9% copper concentration according to use as welding coating 17 materials, welding method by hot-air system, can not realize high quality welding, as mentioned above, according to welding method, can reach enough weld strengths according to article on plasma arc discharge in argon gas of the present invention.
The material of welding coating 17 is not limited to SnCu coating, but also is applicable to tin bismuth (SnBi) coating or tin silver (SnAg) coating.Especially, under the situation of SuAg coating, by the concentration that the increases Ag liquidus curve that raises, similar with SnCu coating, fusing is difficult in correlation technique.Equally in this case, similar with SnCu coating, by selecting arc discharge condition rightly, can realize high quality welding.
Fig. 9 is used to explain the tilt profile key diagram of welding of elastic force according to the piezoelectric type vibrating reed 4 of present embodiment and inner lead 2.Under the welded condition of angled exterior lead-in wire 3, inner lead 2 is contacted with piezoelectric type vibrating reed 4.Elastic force by curved outer lead-in wire 3 outside leads that produce 3 inner lead 2 is pressed on the piezoelectric type vibrating reed 4, and inner lead 2 is not crooked, thereby has been alleviated internal stress.In addition, the center of the sealed tube 5 of cylindrical member at the bottom of metal cylinder, the fore-end of layout piezoelectric type vibrating reed 4.By fore-end, can avoid the fore-end of piezoelectric type vibrating reed 4 to contact with the inwall of tolerance with sealed tube 5 at the center arrangement piezoelectric type vibrating reed 4 of sealed tube 5.
By angle tilt 1 degree of the outside lead 3 that will indicate with mark θ among this figure or more than 1 degree, below 4 degree or 4 are spent, inner lead 2 is arranged in the core of sealed tube 5 at the bottom of the metal cylindrical cylinder, thereby can make piezoelectric vibrator 6, and the fore-end of piezoelectric type vibrating reed 4 is contacted with the inwall of sealed tube 5.Can avoid vibration to become unstable, and can avoid producing aforesaid particulate in sealing official 5 inboard owing to contact.
As mentioned above, according to according to the inner lead of present embodiment and the welding method of installing electrodes, in order to ensure various character, the reliability of frequency accuracy and piezoelectric vibrator, such piezoelectric vibrator and manufacture method thereof can be provided, can reach the setting accuracy of on the necessary solder wettable of this piezoelectric type vibrating reed, realizing fabulous welding, and can arrange the piezoelectric type vibrating reed corresponding to small-sized piezoelectric formula vibrator.
In addition, although in above-mentioned explaining, the gas that is used to emit electric arc is made of independent a kind of element argon, also depleted gas can be joined in the argon gas.
In addition, although above-mentioned explaining shows such situation, be melted in the welding coating 17 that forms on the surface of inner lead 2 so that be connected to piezoelectric type vibrating reed 4, but the present invention is not limited to this, but welding coating 17 can form on the installing electrodes 7 of piezoelectric type vibrating reed 4.That is to say, reach the piezoelectric vibrator of the fabulous welding of installing electrodes 7 and inner lead 2, can before be plated in the scolder that installing electrodes 7 is connected with inner lead 2 on the one side at least arbitrarily on surface and constitute by melting by scolder.In addition, replace welding coating, the soldered ball that is arranged on the installing electrodes 7 also is applicable to ionarc process.
In addition, although according to this welding method, usually installing electrodes 7 is electrically connected to the exciting electrode 4a of piezoelectric type vibrating reed 4, the present invention is not limited to this use, and the present invention can be used for mechanical connection lead terminal and piezoelectric type vibrating reed 4 simply.
In addition, although according to this embodiment, provided explaining of this situation, wherein exist 2 installing electrodes and airtight terminal to comprise 2 lead-in wires, but the present invention is not limited to this, and the present invention is equally applicable to welding in this case, wherein arranges 3 or more installing electrodes on the piezoelectric type vibrating reed, and corresponding with it, on airtight terminal, there are 3 or more wires terminal.
(embodiment 2)
Figure 10 shows the profile schematic diagram according to the formation of tuning-fork-type quartz oscillator of the present invention, and be the tuning-fork-type quartz crystal vibrator that utilizes the inner lead have by the welding method welding explained among the embodiment 1 and installing electrodes, the plane graph of surface mounting piezoelectric oscillator.
In Figure 10, tuning-fork-type quartz crystal vibrator 51 is set to the precalculated position of circuit board 52, and is being close to the oscillator integrated circuit that the installation of quartz crystal vibrator place is indicated with mark 53.In addition, electronic unit 54 such as capacitor also is installed.Each parts are electrically connected by wiring diagram, and are not shown.By the piezoelectric property that provides in the quartz, the mechanical oscillation of the piezoelectric type vibrating reed of tuning-fork-type quartz crystal vibrator 51 are converted to the signal of telecommunication, so that input to integrated circuit 53.In the inside of integrated circuit 53, carry out the signal processing of oscillates device effect, so that output frequency signal.Corresponding constituent part comes mold by resin, and is not shown.By selecting integrated circuit 53 rightly, provide a kind of operation date of this device or external device (ED) and function of time controlled, so that except the simple function of oscillator, provide time or calendar information to the user as time meter.
By using the piezoelectric vibrator of making by manufacture method of the present invention, even when the piezoelectric type vibrating reed becomes small-sized, vibrating reed also can securely be connected to airtight terminal, thereby suppressed relative vibration or the frequency change of the external strength of the collision of falling, and peeled off vibrating reed from face of weld and also minimized with fault of the failure of oscillations or the like.Thus, be small-sized even work as oscillator, also stable vibration can be kept one very long period.In addition, can stable miniaturization have the vibrator of the part of a large amount of formation oscillators, also have fabulous productivity ratio simultaneously, therefore, further miniaturization comprises the overall dimension of the oscillator of vibrator.
(embodiment 3)
Next, explaining of the example of use by the electronic installation of the piezoelectric vibrator of manufacture method manufacturing of the present invention will be provided.To provide the detailed explanation of the preferred embodiment of the portable information apparatus of representing by portable phone herein.
At first, as prerequisite, constitute by development and the wrist-watch that improves correlation technique according to the portable information apparatus of present embodiment.The outer appearnce of its outward appearance and wrist-watch is seemingly arranged LCD on its part corresponding to dial, thereby can show the current time etc. on its screen.When as communicator, take this device from wrist, loud speaker and microphone by being contained in belt part inside can be similar to the communication of the portable phone of correlation technique.Yet, to compare with the portable phone of correlation technique, this device is small-sized and lightweight significantly.
Next, with reference to the accompanying drawings, provide explaining that function according to the portable information apparatus of the embodiment of the invention constitutes.Figure 11 is the block diagram that shows on function according to the formation of the portable information apparatus of present embodiment.
In Figure 11, mark 101 has been indicated the power supply unit that is used for providing to function corresponding portion power supply, will mention that after a while it is realized by lithium-ions battery particularly.Power supply unit 101 and the control part 102 that will mention after a while, timing portion 103, Department of Communication Force 104, voltage detection department 105 and display part 107 parallel connections, and provide power supply to function corresponding portion from power supply unit 101.
The corresponding functional block that control part 102 will be mentioned after a while by control, the operation of control whole system, for example transmission of voice data and reception, the measurement of current time and demonstration etc.By being pre-written into ROM, CPU reads control part 102 and executive program and RAM etc. realize as the program in the CPU working region particularly.
Timing portion 103 is by comprising oscillating circuit, register circuit, and counter circuit, interface circuits etc. constitute at interior integrated circuit and tuning-fork-type quartz crystal vibrator shown in Figure 1.By the piezoelectric property that in quartz, provides, the mechanical oscillation of tuning-fork-type quartz crystal vibrator are converted to the signal of telecommunication, and input to the oscillating circuit that forms by transistor and capacitor.The output of binarization oscillating circuit, and count by register circuit sum counter circuit.Carry out the transmission and the reception of signal by interface circuit by control part, and on display part 107, show current time or current date or calendar information.
Department of Communication Force 104 is equipped with the function of the portable phone that is similar to correlation technique, and by the 104a of radio transmitting portion, audio treatment part 104b, enlarging section 104c, the audio frequency I/O 104d of portion, ring back tone generating unit 104e, switching part 104f calls out control store 104g of portion and telephone number input part 104h and constitutes.
The 104a of wireless radio transmission portion is by means of antenna, to/send and receive various data such as voice data from the base station.Audio treatment part 104b coding/decoding is from the audio signal of the 104a of wireless radio transmission portion that will mention after a while or enlarging section 104c input.Enlarging section 104c will be amplified to predetermine level from the signal of the audio treatment part 104b that will mention after a while or the audio frequency I/O 104d of portion input.The audio frequency I/O 104d of portion is loud speaker and microphone specifically, the speech sound that is used to produce ring back tone or is received, or the sound of collection loud speaker.
In addition, ring back tone generating unit 104e produces ring back tone according to the calling from the base station.Only when receiving signal, the enlarging section 104c that switching part 104f will be connected to audio treatment part 104b switches to ring back tone generating unit 104e, thereby exports the ring back tone that is generated to the audio frequency I/O 104d of portion by enlarging section 104c.
In addition, call out the relevant program of control of the control store 104g of portion storage and transmission and received communication calling.In addition, telephone number input part 104h specifically by from 0 to 9 digital keys and other buttons that are used to import the other side's telephone number etc. constitute.
When the voltage that applies to each function portion that starts from control part 102 when power supply unit 101 became lower than a predetermined value, voltage detection department 105 detected voltage drops, so that notice control part 102.Scheduled voltage is to set in advance to be operation communication portion 104 necessary minimum voltage values stably, for example the about voltage of 3V.Notified the control part 102 of voltage drop to forbid the 104a of wireless radio transmission portion from voltage detection department 105 to it, audio treatment part 104b, the operation of switching part 104f and ring back tone generating unit 104e.Especially, the wireless radio transmission portion 104a of shut-down operation with power consumption is absolutely necessary.Meanwhile, the dump energy deficiency that display part 107 shows owing to battery, Department of Communication Force 104 can not use.
By the operation of voltage detection department 105 and control part 102, forbid the operation of Department of Communication Force 104, and show on display part 107 it be possible for this to forbid.
According to present embodiment, by being equipped with dump portion 106, this dump portion 106 can optionally cut off the power supply of the part relevant with the Department of Communication Force function, can stop the function of Department of Communication Force in mode more completely.
In addition, although can realize to use the demonstration of Department of Communication Force 104, also can realize this demonstration by on the phone icon on the display part 107, adding more intuitively * method of number (failure) by character information.
By in portable information apparatus, using the small-sized piezoelectric formula vibrator of making by manufacture method of the present invention, further miniaturization portable electron device.According to this vibrator,,, therefore improved impedance, thereby stable vibration can have been continued one very long period the external strength of the vibration or the collision of falling owing to securely realize and the welding of airtight terminal even when the vibrating reed miniaturization.Therefore, can in one very long period, make the portable electron device that comprises this vibrator keep stable.
(embodiment 4)
Next, as the fourth embodiment of the present invention,, provide the explaining of wireless electrochronograph 200 that the described quartz crystal vibrator of present embodiment is electrically connected to filtering portion with reference to Figure 12.
Figure 12 shows the block diagram of the function formation of wireless electrochronograph 200.
Meter when wireless electrochronograph 200 is such has and receives the standard radio wave that comprises temporal information, and should the time automatic time correction counted be the function of correct time.In Japan, be useful in the transmission position (sending station) of Fukushima (Fukushima) county (40KHz) and Saga (Saga) county (60KHz) transmission standard radio wave, so that send standard radio wave respectively.Long wave such as 40KHz or 60KHz not only has the character of propagating on the ground, also have the propagation property that reflects simultaneously on ground and ionosphere, so spread scope is very wide, sends the position with two and has just covered whole Japan.
Hereinafter with reference to Figure 12, the function of the radio wave timepiece 200 of explaining constitutes.
Antenna 201 receives the standard radio wave of 40KHz or 60KHz long wave.The 40KHz of the temporal information of the standard radio wave of this long wave by will being called time code or 60KHz carrier wave carry out the AM modulation and form.
The standard radio wave of the long wave that is received is amplified by amplifier 202, and carries out filtering and tuning by the filter circuit with quartz crystal vibrator (filtering portion) 203.Quartz crystal vibrator according to present embodiment comprises quartz crystal oscillating component 204,205, has frequency of oscillation 40KHz identical with carrier frequency and 60KHz.
In addition, the filtering signal of detection and 206 pairs of preset frequencies of rectification circuit detects and decodes.One after the other, by means of waveform shaping circuit 207 output time codes, and count with CPU208.CPU208 read when the year before last, and on the date of being calculated, week is several, time or the like.The information that will read reflects to RTC (real-time clock) 209, and shows precise time information.
Carrier wave is made of 40KHz or 60KHz, therefore has the above-mentioned tuning-fork-type structural vibrations device quartz crystal oscillating component 204,205 that is used for preferably.Adopt the example of 60KHz,, might constitute this tuning-fork-type vibrating reed, approximately the total length of 2.8mm, the approximately width dimensions of the base part of 0.5mm with such size as the size example of tuning-fork-type vibrating reed.
Although the example by means of Japan shows above-mentioned explaining, the frequency of the standard radio wave of long wave is different abroad.For example, in Germany, use the standard radio wave of 77.5KHz.Therefore, when being embedded in the mancarried device, need have quartz crystal vibrator to the radio wave timepiece that also can handle abroad with Japanese different frequency.
By in radio wave timepiece, using the small-sized piezoelectric formula vibrator of making by manufacture method of the present invention, radio wave timepiece can have the fabulous impedance to external strengths such as the vibration or the collisions of falling, and can stably keep accuracy in one very long period.

Claims (8)

1. method of making piezoelectric vibrator, this piezoelectric vibrator comprises airtight terminal and the piezoelectric type vibrating reed that has lead terminal, comprising:
The piezoelectric type member, and be formed with exciting electrode and installing electrodes in its surface, wherein welded the inner lead and the installing electrodes of lead terminal,
Wherein when this inner lead of welding and installing electrodes, plasma arc welds the partial discharge of this inner lead and installing electrodes in argon gas, so that weld this inner lead and installing electrodes by scolder.
2. according to the method for the manufacturing piezoelectric vibrator of claim 1,
Wherein by the outside lead of lead terminal partly being connected to the power output terminal of plasma arc, and apply voltage at inner lead and between near the plasma arc electrode of arranging the welding portion of inner lead and installing electrodes, thereby produce the plasma arc discharge.
3. according to the method for the manufacturing piezoelectric vibrator of claim 1 or claim 2,
Wherein weld inner lead and installing electrodes, clamp the outside lead of lead terminal by the positioner that forms with notch portion, and inner lead is arranged on the installing electrodes of the piezoelectric type vibrating reed of aiming at the straight line calibrating installation.
4. according to the method for claim 1 any one manufacturing piezoelectric vibrator to the claim 3,
Wherein weld inner lead and installing electrodes, the elastic force of the outside lead by utilizing lead terminal, when inner lead is pressed into installing electrodes, welding inner lead and installing electrodes.
5. piezoelectric vibrator of making according to the method for claim 1 any one manufacturing piezoelectric vibrator to the claim 4.
6. a piezoelectric vibrator wherein by being connected to the integrated circuit as oscillator plate, uses the piezoelectric vibrator according to claim 5.
7. an electronic installation wherein by being connected to segment count, uses the piezoelectric vibrator according to claim 5.
8. a radio wave timepiece wherein by being connected to the filtering part, uses the piezoelectric vibrator according to claim 5.
CN 200610091645 2005-04-25 2006-04-25 Piezoelectric vibrator and its fabricating method, piezoelectric oscillator, electronic apparatus and radio wave timepiece Pending CN1866737A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005126706 2005-04-25
JP2005126706 2005-04-25
JP2006114222 2006-04-18

Publications (1)

Publication Number Publication Date
CN1866737A true CN1866737A (en) 2006-11-22

Family

ID=37425636

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200610091645 Pending CN1866737A (en) 2005-04-25 2006-04-25 Piezoelectric vibrator and its fabricating method, piezoelectric oscillator, electronic apparatus and radio wave timepiece

Country Status (1)

Country Link
CN (1) CN1866737A (en)

Similar Documents

Publication Publication Date Title
JP4845478B2 (en) Piezoelectric vibrator, method for manufacturing piezoelectric vibrator, oscillator, electronic device, and radio timepiece
CN1574623A (en) Piezoelectric oscillator, manufacturing method therefor, mobile phone apparatus and electronic apparatus
JP5185650B2 (en) Method for manufacturing piezoelectric vibrating piece and wafer
CN1848674B (en) Airtight terminal, a piezoelectric vibrator, an oscillator, an electronic unit and a wave timepiece
JP2011049665A (en) Piezoelectric vibrator, method of manufacturing the same, oscillator, electronic apparatus, and radio-controlled timepiece
CN1822497A (en) Piezoelectric vibrator, surface-mounting type piezoelectric vibrator, oscillator, electronic apparatus and wave clock
JP4634170B2 (en) Method for manufacturing piezoelectric vibrator
JP2006262456A (en) Piezoelectric oscillating piece and its manufacturing method, piezoelectric vibrator, oscillator, electronic instrument and radio wave time-piece
CN1925320A (en) Surface mount type piezoelectric vibrator and its fabricating method, oscillator, electronic apparatus and radio wave timepiece
US7719171B2 (en) Method of fabricating hermetic terminal and hermetic terminal, method of fabricating piezoelectric oscillator and piezoelectric oscillator, oscillator, electronic appliance, and radio clock
JP4588479B2 (en) Method for manufacturing piezoelectric vibrator
JP2009194629A (en) Method of manufacturing piezoelectric vibration piece, piezoelectric vibration piece, wafer, piezoelectric vibrator, oscillator, electronic equipment, and radio clock
CN101964639A (en) The manufacture method of voltage fluctuation device, piezoelectric vibrator, oscillator, electronic equipment and radio wave clock
CN1866737A (en) Piezoelectric vibrator and its fabricating method, piezoelectric oscillator, electronic apparatus and radio wave timepiece
US7804373B2 (en) Method of fabricating hermetic terminal and hermetic terminal, method of fabricating piezoelectric oscillator and piezoelectric oscillator, oscillator, electronic appliance, and radio clock
TW201223140A (en) Pattern forming method, pattern forming apparatus, piezoelectric vibrator, method of manufacturing piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled clock
JP2009005036A (en) Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic equipment, and radio-controlled clock
JP4937020B2 (en) Piezoelectric vibrator manufacturing method, piezoelectric vibrator, oscillator, electronic device, and radio timepiece
JP4838622B2 (en) Method for manufacturing piezoelectric vibrator
JP4865746B2 (en) Airtight terminal and method for manufacturing piezoelectric vibrator, hermetic terminal, piezoelectric vibrator, oscillator, electronic device, and radio timepiece
JP4498195B2 (en) Airtight terminal, piezoelectric vibrating piece, piezoelectric vibrator, oscillator, and electronic device
JP2009206592A (en) Piezoelectric vibrator, oscillator, electronic equipment, wave clock and method for manufacturing piezoelectric vibrator
JP4959302B2 (en) Method for manufacturing piezoelectric vibrator
JP2009206147A (en) Method for manufacturing airtight terminal and piezoelectric resonator, airtight terminal, piezoelectric resonator, oscillator, electronic apparatus and radio wave timepiece
JP2011193289A (en) Method of manufacturing package, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Open date: 20061122