CN1858642A - Laser pulse width control method and device - Google Patents
Laser pulse width control method and device Download PDFInfo
- Publication number
- CN1858642A CN1858642A CN 200610027139 CN200610027139A CN1858642A CN 1858642 A CN1858642 A CN 1858642A CN 200610027139 CN200610027139 CN 200610027139 CN 200610027139 A CN200610027139 A CN 200610027139A CN 1858642 A CN1858642 A CN 1858642A
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- laser
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- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000003079 width control Methods 0.000 title claims description 19
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000010949 copper Substances 0.000 claims abstract description 15
- 229910052802 copper Inorganic materials 0.000 claims abstract description 15
- 239000007787 solid Substances 0.000 claims abstract description 12
- 238000005086 pumping Methods 0.000 claims description 33
- 230000003111 delayed effect Effects 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 claims description 8
- 229910000906 Bronze Inorganic materials 0.000 claims description 3
- 239000010974 bronze Substances 0.000 claims description 3
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 claims description 3
- 230000003068 static effect Effects 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 16
- 239000013078 crystal Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 3
- 239000005304 optical glass Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
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Abstract
A method and device for controlling the pulse width of laser features that the pump laser beams output by the solid frequency-doubling laser are focused to generate plasma on air and copper target, and the pulse width of the frequency-doubled laser beam is controlled. The whole device consists of a solid frequency doubling laser, a light splitting filter, a light path retarder, a first lens, a copper target placed in the air and a second lens. The focus of the frequency doubling laser after focusing is overlapped with the focus area of the pump laser, and the time for generating plasma by focusing is changed by adjusting the optical path of the pump laser, so that the problems of controlling the pulse width of the frequency doubling laser and the stability of controlling the pulse width of the laser are solved. The invention solves the problem of continuously adjustable visible, especially ultraviolet laser pulse width.
Description
Technical field
The present invention relates to laser pulse width control, particularly a kind of laser pulse width control device, it utilizes the plasma that produces the later on remaining pumping laser focusing of double-frequency laser generation as switch, the control laser pulse width, and can regulate continuously pulsewidth with interior in certain limit.
Background technology
The existing proven technique that realizes laser pulse width control is to utilize some crystal under the effect of extra electric field, changes the polarization direction by laser, synchronously or change the time that extra electric field and laser arrive crystal, and the laser pulse width that passes through with control.The main difficult point of this method is:
1, the rising edge of extra electric field pulse on the crystal is required very high, the time must reach and less than the rising edge of laser pulse width;
2, the synchro control stability of nanosecond order is very difficult;
3, the crystal that can use in ultraviolet band laser is few, and optical loss is bigger.
Summary of the invention
The object of the present invention is to provide a kind of laser pulse width control method and device, with the stability of solution laser pulse width control and the control problem of Ultra-Violet Laser pulsewidth.
Technical solution of the present invention is as follows:
A kind of laser pulse width control method, this method is when utilizing solid frequency double laser output double-frequency laser, also include remaining pumping laser, with light splitting piece pumping laser is separated with double-frequency laser, isolated pumping laser changes light path with the light path delayer, use lens focus then, make on the air that is in this lens focus zone and the copper target and produce plasma, another lens focus of isolated double-frequency laser, the focusing focus area of its focus and pumping laser overlaps, described pumping laser and double-frequency laser are in described public focus orthogonal transmission, when the plasma density that produces when pumping laser reaches the shielding action of double-frequency laser, double-frequency laser just can not pass through this plasma, utilize optical path delayed device that the pump light light path is changed, make the time of pump light generation plasma and the time in double-frequency laser arrival plasma zone that certain delay be arranged, by adjusting this time delay, with the pulsewidth of control double-frequency laser.
A kind of laser pulse width control device, comprise the solid frequency double laser, it is characterized in that one light splitting piece being set along 45 ° of ground of working direction of described solid frequency double laser output beam, pumping laser direction in this light splitting piece transmission has an optical path delayed device and the 5th catoptron, reflected light direction at the 5th catoptron is first lens, one bronze medal target places rear and close this focus of the focus area of first lens, double-frequency laser direction in the reflection of described light splitting piece has the 6th catoptron, reflected light direction at the 6th catoptron has second lens, focus at second lens overlaps with first lens focus, and described pumping laser and double-frequency laser converge in described public focus orthogonal transmission and focusing.
Described optical path delayed device is formed a Ω light path by first catoptron, second catoptron, the 3rd catoptron and the 4th catoptron successively, wherein first catoptron and the 4th catoptron maintain static, second catoptron and the 3rd catoptron can be whole along the optical axis translation, to change the light path of pump beam.
During 45 ° of placements of described light splitting piece and light path, can allow pump light see through more than 90%, double-frequency laser reflects more than 99%.
Described copper target places the position after the focus area of pumping laser slightly leans on, so that the air in laser spot zone and copper target produce plasma simultaneously.
The focal length of second lens that described double-frequency laser focuses on is greater than first focal length of lens of the focusing of pumping laser.
Advantage of the present invention is:
1. can be used for frequency double laser, the 532nm or the 355nm Ultra-Violet Laser of 12ns pulsewidth carried out pulse-width controlled, range of control 2.5-10ns.
2. compare with existing crystal switch technology, easy to use flexible.
3. control laser and Be Controlled laser result from same device, no stability of synchronization problem.
Description of drawings
Fig. 1 is a laser pulse width control device structural representation of the present invention.
Embodiment
The invention will be further described below in conjunction with embodiment and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 1 earlier, Fig. 1 is a laser pulse width control device structural representation of the present invention.The embodiment of the invention is to utilize the control device of 1064nm pumping laser control 532nm or 355nm double-frequency laser pulsewidth.
A kind of laser pulse width control method, when utilizing solid frequency double laser 1 output 532nm or 355nm double-frequency laser, in with a branch of laser beam, also include remaining 1064nm pumping laser, separate pumping laser and double-frequency laser with 2 of beam split, isolated pumping laser 3 usefulness light path delayers 4 change light path, focus on first lens 6 then, on air that is in focus area and copper target 7, produce plasma 8, isolated 532nm or 355nm double-frequency laser 9 use second lens 11 to focus on, 90 ° of angles of the focusing focus area of its focus and 1064nm pumping laser overlap, when the plasma density that produces when pumping laser 3 reached the shielding action of double-frequency laser 9, double-frequency laser 9 just can not pass through this plasma 8.Utilize 4 pairs of pump light light paths of optical path delayed device to change, make the time of pump light 3 generation plasmas 8 and the time in double-frequency laser 9 arrival plasmas 8 zones that certain delay be arranged, by adjusting this time delay, the pulsewidth of control 532nm or 355nm wavelength double-frequency laser.
As seen from the figure, laser pulse width control device of the present invention, comprise solid frequency double laser 1, it is characterized in that one light splitting piece 2 being set along 45 ° of ground of working direction of described solid frequency double laser 1 output beam, pumping laser direction in these light splitting piece 2 transmissions has an optical path delayed device 4 and the 5th catoptron 5, reflected light direction at the 5th catoptron 5 is first lens 6, one bronze medal target 7 places rear and close this focus of the focus area of first lens 6, double-frequency laser direction in the reflection of described light splitting piece 2 has the 6th catoptron 10, reflected light direction at the 6th catoptron 10 has second lens 11, focus at second lens 11 overlaps with first lens, 6 focuses, and described pumping laser and double-frequency laser converge in described public focus orthogonal transmission and focusing.
Described optical path delayed device 4 is formed a Ω light path by first catoptron 41, second catoptron 42, the 3rd catoptron 43, the 4th catoptron 44 successively, wherein first catoptron 41 and the 4th catoptron 44 maintain static, second catoptron 42 and the 3rd catoptron 43 can be whole along the optical axis translation, to change the light path of pump beam 3.Described optical path delayed device is made up of 4 1064nm45 ° of angle completely reflecting mirrors, make of K9 optical glass, diameter must be greater than 1.5 times of lasing beam diameter, and two catoptrons wherein can same moved further, to change the light path by these 4 specularly reflected jiong 1064nm pump lights.
Described light splitting piece 2 usefulness K9 optical glass are made, diameter is more preferably greater than 1.5 times of lasing beam diameter, this light splitting piece is in face of 45 ° of dual wavelength deielectric-coating of one side plating of laser, 1064nm laser is high saturating, transmitance is greater than 90%, 532nm or 355nm double-frequency laser are high anti-, and reflectivity is greater than 99%, and another side plates 45 ° of anti-reflection films of 1064nm laser.When described light splitting piece 2 is placed with 45 ° of light paths, can allow the 1064nm pump light see through more than 90%, 532nm or the reflection of 355nm double-frequency laser are more than 99%.
Position after the focus area that described copper target 7 is placed on pumping laser slightly leans on is so that the air in laser spot zone and copper target produce plasma simultaneously.The size of described copper target should be slightly larger than the diameter of laser spot, and will be convenient to install.The material of copper target can be a fine copper, also can be brass.
See also shown in Figure 1, the present invention is by a branch of laser beam that comprises frequency doubled light and residual pump light of solid frequency double laser 1 output, after light splitting piece 2 optical filterings of this laser beam through 45 ° of placements, the pump light 3 of 1064nm transmits forward through light splitting piece 2 and enters optical path delayed device 4.Adjust the light path of pump beam 3.The pump beam 3 of adjusting light path is focused on by first lens 6 through 5 reflections of the 5th catoptron.Copper target 7 is placed on the rear of first condenser lens, 6 focus areas, and pump beam 3 produces plasma 8 in this zone.The frequency doubled light 9 that light splitting piece 2 reflects is focused on through second lens 11 by 10 reflections of the 6th catoptron, and the focal position overlaps with plasma 8.Seeing through plasma 8 later double-frequency lasers 9 is exported by the 3rd lens 12 collimations.
Claims (6)
1, a kind of laser pulse width control method, be characterised in that this method is when utilizing solid frequency double laser output double-frequency laser, also include remaining pumping laser, with light splitting piece pumping laser is separated with double-frequency laser, isolated pumping laser changes light path with the light path delayer, use lens focus then, make on the air that is in this lens focus zone and the copper target and produce plasma, another lens focus of isolated double-frequency laser, the focusing focus area of its focus and pumping laser overlaps, described pumping laser and double-frequency laser are in described public focus orthogonal transmission, when the plasma density that produces when pumping laser reaches the shielding action of double-frequency laser, double-frequency laser just can not pass through this plasma, utilize optical path delayed device that the pump light light path is changed, make the time of pump light generation plasma and the time in double-frequency laser arrival plasma zone that certain delay be arranged, by adjusting this time delay, with the pulsewidth of control double-frequency laser.
2, a kind of laser pulse width control device of implementing the described method of claim 1, comprise solid frequency double laser (1), it is characterized in that one light splitting piece (2) being set along 45 ° of ground of working direction of described solid frequency double laser (1) output beam, pumping laser direction in this light splitting piece (2) transmission has an optical path delayed device (4) and the 5th catoptron (5), reflected light direction at the 5th catoptron (5) is first lens (6), one bronze medal target (7) places rear and close this focus of the focus area of first lens (6), double-frequency laser direction in the reflection of described light splitting piece (2) has the 6th catoptron (10), reflected light direction at the 6th catoptron (10) has second lens (11), focus at second lens (11) overlaps with first lens (6) focus, and described pumping laser and double-frequency laser converge in described public focus orthogonal transmission and focusing.
3, laser pulse width control device according to claim 2, it is characterized in that described optical path delayed device (4) forms a Q light path by first catoptron (41), second catoptron (42), the 3rd catoptron (43), the 4th catoptron (44) successively, wherein first catoptron (41) and the 4th catoptron (44) maintain static, second catoptron (42) and the 3rd catoptron (43) can be whole along the optical axis translation, to change the light path of pump beam (3).
4, laser pulse width control device according to claim 2 when it is characterized in that 45 ° of described light splitting piece (2) and light paths are placed, can allow the 1064nm pump light see through more than 90%, and 532nm or the reflection of 355nm double-frequency laser are more than 99%.
5, laser pulse width control device according to claim 2 is characterized in that the position after focus area that described copper target (7) is placed on pumping laser slightly leans on, so that the air in laser spot zone and copper target produce plasma simultaneously.
6, laser pulse width control device according to claim 2 is characterized in that first lens (6) focal length of the focal length of second lens (11) that described double-frequency laser focuses on greater than the focusing of pumping laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100271390A CN100383656C (en) | 2006-05-31 | 2006-05-31 | Laser pulse width control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100271390A CN100383656C (en) | 2006-05-31 | 2006-05-31 | Laser pulse width control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1858642A true CN1858642A (en) | 2006-11-08 |
| CN100383656C CN100383656C (en) | 2008-04-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2006100271390A Expired - Fee Related CN100383656C (en) | 2006-05-31 | 2006-05-31 | Laser pulse width control device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217870A (en) * | 2013-04-19 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Droplet target control system guided by laser beam |
| CN108155541A (en) * | 2017-12-29 | 2018-06-12 | 中国科学院电子学研究所 | Transversely excited CO based on plasma shutter2Laser burst pulse generation device |
| CN109217085A (en) * | 2018-09-06 | 2019-01-15 | 上海理工大学 | A kind of partially ultrafast fiber laser system of all risk insurance of passive full phototiming |
| CN109590618A (en) * | 2017-09-28 | 2019-04-09 | 上海微电子装备（集团）股份有限公司 | A kind of laser cutting system and method |
| CN111900609A (en) * | 2020-07-31 | 2020-11-06 | 浙江富春江环保科技研究有限公司 | Pulse delay controllable double-beam laser system and control method thereof |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0374888A (en) * | 1989-08-15 | 1991-03-29 | Hamamatsu Photonics Kk | Device for varying pulse width of laser |
| JP4693972B2 (en) * | 2000-09-29 | 2011-06-01 | オリンパス株式会社 | Laser microscope |
| CN1123102C (en) * | 2000-12-08 | 2003-10-01 | 中国科学院上海光学精密机械研究所 | Double-pulse laser device capable of synchronously outputting ten-watt-level different pulse widths |
-
2006
- 2006-05-31 CN CNB2006100271390A patent/CN100383656C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217870A (en) * | 2013-04-19 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Droplet target control system guided by laser beam |
| CN103217870B (en) * | 2013-04-19 | 2014-08-13 | 中国科学院上海光学精密机械研究所 | Droplet target control system guided by laser beam |
| CN109590618A (en) * | 2017-09-28 | 2019-04-09 | 上海微电子装备（集团）股份有限公司 | A kind of laser cutting system and method |
| CN108155541A (en) * | 2017-12-29 | 2018-06-12 | 中国科学院电子学研究所 | Transversely excited CO based on plasma shutter2Laser burst pulse generation device |
| CN109217085A (en) * | 2018-09-06 | 2019-01-15 | 上海理工大学 | A kind of partially ultrafast fiber laser system of all risk insurance of passive full phototiming |
| CN111900609A (en) * | 2020-07-31 | 2020-11-06 | 浙江富春江环保科技研究有限公司 | Pulse delay controllable double-beam laser system and control method thereof |
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| Publication number | Publication date |
|---|---|
| CN100383656C (en) | 2008-04-23 |
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Granted publication date: 20080423 Termination date: 20120531 |