CN1851585A - Method for treating semiconductor processing data - Google Patents
Method for treating semiconductor processing data Download PDFInfo
- Publication number
- CN1851585A CN1851585A CNA2005101263715A CN200510126371A CN1851585A CN 1851585 A CN1851585 A CN 1851585A CN A2005101263715 A CNA2005101263715 A CN A2005101263715A CN 200510126371 A CN200510126371 A CN 200510126371A CN 1851585 A CN1851585 A CN 1851585A
- Authority
- CN
- China
- Prior art keywords
- data
- ctc
- tmc
- module controller
- pmc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- General Factory Administration (AREA)
Abstract
Said method includes 1, dividing semiconductor processing into real time recording data and state monitoring data.2, actively transmitting real time recording data and PMC and /or TMC to CTC at stated time intervals in technology treating processes, or actively querying to PMC and /or TMC at definite-time by CTC. 3, to technology data only meaning equipment momentary state and used for CTC judging setting system working, CTC querying to PMC and/or TMC as in need. When CTC is in no request, PMC or TMC do not transmit these data information to CTC, the network transmission data quantity is greatly reduced, thereby reducing network transmission load and raising network transmission rate.
Description
Technical field
The present invention relates to the semiconductor machining disposal route, particularly the disposal route of semiconductor cluster device process data.
Background technology
Give in the semiconductor standard (SEMI) cluster device (Cluster Tool) under definition be: by physically linking together, can be used for handling the integrated manufacturing system of different process module and transport module.Each technical module and transport module are all controlled by corresponding controller, and these module controllers connect into an organic whole by interface module.
Semiconductor cluster device Control Software System comprises three big modules: cluster device controller (CTC, Cluster Tool Controller), technical module controller (PMC, ProcessModule Controller), transport module controller (TMC, Transport ModuleController), link together by the corresponding interface module again between this three big module.Its general structure as shown in Figure 1.
Technical module controller (PMC) and transport module controller (TMC) are in charge of and are coordinated to cluster device controller (CTC), and its major function is to carry out process task (Job), and the maintenance operating process relevant with task.A task (Job) is exactly that material is sent into one or more technological reaction chambers from source film magazine (Source Cassette), through PROCESS FOR TREATMENT, is sent to the process of purpose film magazine (Destination Cassette) again.
Technical module controller (PMC) mainly is responsible for the associative operation of CONTROL PROCESS module.
Transport module controller (TMC) mainly is responsible for the operation of control transmission module and correlation module thereof.
Technical module controller (PMC) all passes through the control of I/O passage realization to the controlled device that links to each other with transport module controller (TMC).
In existing systems, at present, be " passive type " fully for the processing mode of semiconductor process data, as shown in Figure 2.So-called " passive type " is meant that the mode of cluster device controller reception semiconductor process data is passive, that is to say, in the process task implementation, initiatively send the technology related data information by technical module controller and transport module controller according to certain time interval to the cluster device controller, then passive these information of reception of cluster device controller, when the cluster device controller needs wherein some data, read these data, and carry out respective handling.
On the processing mode of CTC to data, data in the technological process can be divided into two big classes: the one, need to show in real time the also process data of real time record (finishing the usefulness of back data analysis in order to technology), this part data needs PMC or TMC to gather according to certain sampling period, and to the CTC transmission, CTC carries out respective handling after receiving; Some data need not gathered according to certain sampling period, do not need record yet, the instantaneous state of these process data indication equipments, and CTC only makes corresponding judgment according to these states, to continue technological process.
And for present complete " passive type " processing mode, no matter be which kind of process data, PMC and TMC initiatively send to CTC every certain time interval, this just will inevitably cause the transmitted data on network amount bigger, offered load is bigger, and transfer rate is lower, and data redudancy is bigger simultaneously.
Summary of the invention
The technical matters that solves
Because there are the problems referred to above in " passive type " data processing, the present invention proposes " active " data processing method." active " is meant that the mode of cluster device controller reception semiconductor process data is initiatively, that is to say, in the process task implementation, the cluster device controller is according to the needs active request technology related data information of oneself, after technical module controller or transport module controller receive request, just send corresponding process data information to the cluster device controller.The method that the purpose of this invention is to provide a kind of semiconductor processing equipment deal with data based on " passive type combines with active ", effectively improve the efficient of semiconductor processing equipment deal with data, thereby further improve the throughput rate of whole semiconductor processing and manufacturing.
Technical scheme
In the semiconductor fabrication process process, for the processing of semiconductor process data, if adopt " active ", or " passive type " and " active " mode of combining, just can solve the problem of existing " passive type " data processing method existence.The concrete scheme of this data processing is as follows:
A kind of disposal route of semiconductor process data may further comprise the steps:
1) semiconductor process data is divided into two kinds of real-time recorded data and condition monitoring data.
2) in process treatment process, for being real-time recorded data, technical module controller and/or transport module controller initiatively send to the cluster device controller every certain time interval, are perhaps initiatively inquired about to technical module controller and/or transport module controller every certain time interval by the cluster device controller.
3) for the condition monitoring data, be to be used for the data that the cluster device controller is judged Adjustment System work, inquire about to technical module controller and/or transport module controller when needed by the cluster device controller.
Wherein, real-time recorded data comprises parameters such as reaction chamber state related data, transfer chamber state related data, gas circuit state related data, end point determination related data such as chamber pressure, reaction chamber temperature, gas flow.Real-time recorded data is to need to show that in real time also real time record is prepared against the process data that technology finishes the usefulness of back data analysis.
The condition monitoring data, it is the process data of the instantaneous state of indication equipment, comprise all process datas that need to carry out judgment processing or Adjustment System work in the process, open load port (Load Port) operation related data, pass sheet operation related data as reaction chamber initialization related data, transfer chamber initialization related data, reaction chamber state monitoring related data, transfer chamber condition monitoring related data, sheet cabin.
Beneficial effect
As can be seen, for this part data message of condition monitoring data, the cluster device controller is not when asking, technical module controller or transport module controller do not send these data messages to the cluster device controller, the data volume of Network Transmission significantly reduces, thereby alleviated the Network Transmission load, improved network transmission speed, reduced data redundancy, further, this can improve the efficient of semiconductor processing equipment deal with data to a great extent, and then improves the throughput rate of whole semiconductor processing and manufacturing.
Based on the basic concept of " passive type combines with active ", effectively improve the efficient of semiconductor processing equipment deal with data, thereby further improve the throughput rate of whole semiconductor processing and manufacturing.
Description of drawings
Fig. 1 is a semiconductor cluster device Control Software System module map
Fig. 2 is existing semiconductor process data processing flow chart
Fig. 3 is a semiconductor process data processing flow chart of the present invention
Fig. 4 is a condition monitoring flow chart of data processing of embodiment of the invention figure
Embodiment
Following examples are used to illustrate the present invention; but be not used for limiting the scope of the invention; the those of ordinary skill in relevant technologies field; under the situation that does not break away from the spirit and scope of the present invention; can also make various variations and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be limited by every claim.
For realizing data processing method of the present invention, in CTC, increase data demand module, in PMC and TMC, respectively increase a request receiver module, be used for CTC and initiatively send data to PMC and/or TMC request msg, PMC and/or the request of TMC response cluster device controller to it, its functional structure as shown in Figure 3.
System at real-time recorded data with the condition monitoring data setting different tupes:
PMC and/or TMC initiatively need demonstration in real time and real time record to prepare against the process data that technology finishes the usefulness of back data analysis to the CTC transmission every certain time interval, and CTC receives laggard line item of data and demonstration.
CTC inquires about the process data of the instantaneous state of indication equipment to PMC and/or TMC when needed, and promptly the condition monitoring data are used for control and Adjustment System processing step or parameter.
With process that wafer is got on the mechanical arm (Robot) from wafer case (Cassette) is example, such data are arranged in the technology---equipment state variable StateHandler, when the value of StateHandler was 4, expression TCR operation completed successfully, and wafer is on mechanical arm.With reference to figure 4, CTC is as follows to the treatment scheme of these data:
Technology is in front finished, and mechanical arm will be when wafer case be got wafer, and CTC sends to TMC wafer is got (TCR) instruction on the mechanical arm from wafer case.
CTC reads the StateHandler value to the TMC request.
CTC judges whether the StateHandler value read from TMC is 4, if not, returns previous step after then waiting for 3 seconds and asks to read the StateHandler value to TMC once more, and be 4 up to the StateHandler value that reads.
If CTC judges that the StateHandler value that reads from TMC is 4, then continue later technological process.
Comprise all process datas that need to carry out judgment processing or Adjustment System work in the process.
From above treatment scheme to the StateHandler value as can be seen, under " passive type " processing mode, TMC need be in certain time interval, as 1 second, and 100 milliseconds, even 10 milliseconds, will send the StateHandler value one time to CTC, but in the present embodiment, when having only CTC need judge the StateHandler value, just request is read, and has significantly reduced data quantity transmitted on the networking.
Claims (4)
1, a kind of disposal route of semiconductor process data is characterized in that:
1) semiconductor process data is divided into two kinds of real-time recorded data and condition monitoring data;
2) for being real-time recorded data, technical module controller and/or transport module controller send to the cluster device controller every certain time interval, are perhaps initiatively inquired about to technical module controller and/or transport module controller every certain time interval by the cluster device controller;
3), inquire about to technical module controller and/or transport module controller when needed by the cluster device controller for the condition monitoring data.
2, the disposal route of semiconductor process data as claimed in claim 1 is characterized in that, described real-time recorded data is to need to show in real time the also process data of real time record.
3, the disposal route of semiconductor process data as claimed in claim 1 is characterized in that, described real-time recorded data comprises reaction chamber state related data, transfer chamber state related data, gas circuit state related data and end point determination related data.
4, the disposal route of semiconductor process data as claimed in claim 1 is characterized in that, described condition monitoring data comprise all process datas that need to carry out judgment processing or Adjustment System work in the process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101263715A CN100444596C (en) | 2005-12-08 | 2005-12-08 | Method for treating semiconductor processing data |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101263715A CN100444596C (en) | 2005-12-08 | 2005-12-08 | Method for treating semiconductor processing data |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1851585A true CN1851585A (en) | 2006-10-25 |
| CN100444596C CN100444596C (en) | 2008-12-17 |
Family
ID=37133065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101263715A Active CN100444596C (en) | 2005-12-08 | 2005-12-08 | Method for treating semiconductor processing data |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100444596C (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101211168B (en) * | 2006-12-28 | 2010-06-16 | 财团法人工业技术研究院 | Real time failure diagnosis and classification system applied to semiconductor preparation method |
| CN102468907A (en) * | 2010-11-05 | 2012-05-23 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transmission method of process data, apparatus thereof and system thereof |
| CN102540983A (en) * | 2010-12-10 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Acquiring method and acquiring device for process data and equipment control system |
| CN102569009A (en) * | 2010-12-07 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process data acquisition method, device and system |
| CN104103552A (en) * | 2013-04-12 | 2014-10-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process task configuration processing system and method of semiconductor manufacturing equipment |
| CN104298194A (en) * | 2014-09-12 | 2015-01-21 | 快意电梯股份有限公司 | Method for compressing acquisition and transmission data in elevator remote monitoring system |
| CN106444934A (en) * | 2016-11-14 | 2017-02-22 | 北京七星华创电子股份有限公司 | Device and method for scheduling technological control system based on state management |
| CN107229259A (en) * | 2016-03-24 | 2017-10-03 | 发那科株式会社 | Control device and control system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1221981A (en) * | 1997-12-30 | 1999-07-07 | 国际商业机器公司 | Method and sysetm for semiconductor waper fabrication process real-time in-situ supervision |
| JP3998372B2 (en) * | 1999-06-30 | 2007-10-24 | 株式会社東芝 | Semiconductor processing process control system, semiconductor processing process control method, and recording medium recording process for the same |
| JPWO2002027769A1 (en) * | 2000-09-28 | 2004-02-05 | 株式会社東芝 | Manufacturing apparatus, method for controlling manufacturing apparatus, control system for manufacturing apparatus, computer-readable recording medium storing control program for manufacturing apparatus, and control program for manufacturing apparatus |
| JP4982772B2 (en) * | 2003-11-07 | 2012-07-25 | アルトブリッジ・リミテッド | Container tracking |
| JP2007527676A (en) * | 2004-03-05 | 2007-09-27 | ネクストネット ワイアレス インコーポレイテッド | Method and apparatus for isochronous datagram delivery over a contention-based data link |
-
2005
- 2005-12-08 CN CNB2005101263715A patent/CN100444596C/en active Active
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101211168B (en) * | 2006-12-28 | 2010-06-16 | 财团法人工业技术研究院 | Real time failure diagnosis and classification system applied to semiconductor preparation method |
| CN102468907A (en) * | 2010-11-05 | 2012-05-23 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transmission method of process data, apparatus thereof and system thereof |
| CN102468907B (en) * | 2010-11-05 | 2015-07-08 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transmission method of process data, apparatus thereof and system thereof |
| CN102569009B (en) * | 2010-12-07 | 2015-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process data acquisition method, device and system |
| CN102569009A (en) * | 2010-12-07 | 2012-07-11 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process data acquisition method, device and system |
| CN102540983A (en) * | 2010-12-10 | 2012-07-04 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Acquiring method and acquiring device for process data and equipment control system |
| CN102540983B (en) * | 2010-12-10 | 2014-05-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Acquiring method and acquiring device for process data and equipment control system |
| CN104103552B (en) * | 2013-04-12 | 2016-12-28 | 北京北方微电子基地设备工艺研究中心有限责任公司 | The process task configuration processing system of semiconductor manufacturing facility and method |
| CN104103552A (en) * | 2013-04-12 | 2014-10-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Process task configuration processing system and method of semiconductor manufacturing equipment |
| CN104298194A (en) * | 2014-09-12 | 2015-01-21 | 快意电梯股份有限公司 | Method for compressing acquisition and transmission data in elevator remote monitoring system |
| CN107229259A (en) * | 2016-03-24 | 2017-10-03 | 发那科株式会社 | Control device and control system |
| US10289635B2 (en) | 2016-03-24 | 2019-05-14 | Fanuc Corporation | Control apparatus and control system aggregating working data of manufacturing cells |
| CN107229259B (en) * | 2016-03-24 | 2019-06-04 | 发那科株式会社 | Control device and control system |
| CN106444934A (en) * | 2016-11-14 | 2017-02-22 | 北京七星华创电子股份有限公司 | Device and method for scheduling technological control system based on state management |
| CN106444934B (en) * | 2016-11-14 | 2019-02-19 | 北京北方华创微电子装备有限公司 | A kind of process control system dispatching device and method based on condition managing |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100444596C (en) | 2008-12-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1851585A (en) | Method for treating semiconductor processing data | |
| CN1578935A (en) | A device and method for communicating data in a process control system | |
| CN116192907B (en) | Industrial Internet of things monitoring method and system based on service sub-platform | |
| EP0740241A3 (en) | Control system for semiconductor spray process tools | |
| US20070021847A1 (en) | Distributed control system | |
| CN109895137A (en) | Robot application monitoring of tools and forecast analysis | |
| CN101421082B (en) | Multi-input control of an industrial robot system | |
| CN101615025B (en) | Maintenance control method and system used for semiconductor processing equipment | |
| JP5253517B2 (en) | Data collection system for vacuum processing equipment | |
| CN101046785A (en) | Method and device for limitting command of base plate management controller | |
| US7218981B1 (en) | Dispatch integration system and method based on semiconductor manufacturing | |
| CN1916796A (en) | System and method for controlling batches in layers of reaction chamber | |
| CN100337170C (en) | Network separated industrial controller on spot and realizing method thereof | |
| CN104103553A (en) | Data transmission processing method for semiconductor production equipment and system thereof | |
| CN1920717A (en) | Method for sharing semiconductive machine and manufacture system using same | |
| CN115280729A (en) | Establishing time sensitive communication between an industrial terminal device and an ethernet network | |
| US20080259953A1 (en) | Method, system, and storage medium for providing continuous communication between process equipment and an automated material handling system | |
| CN109522004A (en) | A kind of method that ETL process is run in distributed structure/architecture | |
| CN1851586A (en) | Automatic treating device and method for semiconductor manufacture process event | |
| CN109828521B (en) | Plate warehouse-in/out congestion processing method and system and storage medium | |
| CN113751339B (en) | Multi-robot task allocation method based on intelligent sorting assembly line | |
| CN112859744B (en) | Method for collecting and processing real-time data of glass production line | |
| US11899429B2 (en) | Controlling apparatus for controlling operation of substrate processing apparatus | |
| CN1163945C (en) | Apparatus and method for processing a bulk of semiconductor crystal chips | |
| CN116252025B (en) | Data transmission system and method based on intelligent robot welding workstation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100176 8 Wenchang Avenue, Beijing economic and Technological Development Zone, Beijing Patentee after: Beijing North China microelectronics equipment Co Ltd Address before: 100016 Jiuxianqiao East Road, Chaoyang District, Chaoyang District, Beijing Patentee before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
|
| CP03 | Change of name, title or address |