CN1849215A - Liquid jetting device, liquid jetting method, and method of forming wiring pattern on circuit board - Google Patents
Liquid jetting device, liquid jetting method, and method of forming wiring pattern on circuit board Download PDFInfo
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- CN1849215A CN1849215A CN 200480025744 CN200480025744A CN1849215A CN 1849215 A CN1849215 A CN 1849215A CN 200480025744 CN200480025744 CN 200480025744 CN 200480025744 A CN200480025744 A CN 200480025744A CN 1849215 A CN1849215 A CN 1849215A
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Abstract
A liquid jetting device, comprising a liquid jetting head (56) having a nozzle (51) jetting the charged droplets of a solution from the tip part thereof, a jetting electrode (58) fitted to the liquid jetting head and to which a voltage generating a filed for jetting the droplets is applied, a voltage application means (35) applying voltage to the jetting electrode, a base material (K) formed of an insulating material receiving the jetting of the droplets, and a jetting atmosphere control means (70) maintaining an atmosphere for jetting the droplets from the liquid jetting head at a dew point temperature of 9 degrees (9 C) or higher and less than the saturated temperature of water.
Description
Technical field
The present invention relates at liquid injection device, the liquid jet method of atomizing of liquids on the carrier and be used on circuit board, forming the method for wiring pattern.
Background technology
The known electrostatic attraction type ink-jet printer that has a kind of as description in the patent disclosure 1.Such ink-jet printer comprises the black conduit of a plurality of projectioies, and each conduit faces toward each most advanced and sophisticated comparative electrode that is provided with and is grounded of ink-jet conduit from the tip portion ink-jet, and the jetelectrode that is used for the China ink of each black conduit is applied injection electric.In addition, prepared the black conduit of two kinds of projectioies, each conduit has the width of the different groove that is used for directs ink, and by selecting to use these conduits to make the black conduit of projection can spray the ink droplet of two kinds of sizes.
The ink-jet printer of this routine applies pulse voltage spraying ink droplet to jetelectrode, and by the electric field leading ink droplet that between jetelectrode and comparative electrode, produces towards the comparative electrode side.
Charged and make in the ink-jet printer of China ink ejection at the above-mentioned China ink that makes by means of the electrostatic attraction of electric field, be injected at China ink under the situation on the carrier of the image receiving layer of making by synthetic silica, be not released by the electric charge that carries attached to the former ink droplet that is ejected on the carrier with insulation.Produce repulsion between ink droplet that this electric charge formerly adheres to and the new ink droplet that sprays, ink droplet is disperseed around.Therefore, ink droplet can not reach preposition.This causes that for example definition reduces and the bespatter phenomenon, and the China ink of dispersion makes surrounding environment dirty.
In order to address these problems, disclosed a kind of prior art (for example seeing patent document 2), wherein by reducing the sheet resistance of carrier, the electric charge that is carried by ink droplet is released in step-like mode, disperseed by electric field with the ink droplet that suppresses to arrive continuously, wherein use carrier or supporting member with black receiving layer, described carrier or supporting member contain the conductive agent of four ammonium salt types, and have 9 * 10 under 20 ℃ and 30%RH
11Ω/cm
2Or littler sheet resistance.
Also disclosed a kind of prior art (for example seeing patent document 3), wherein the electric charge that is carried by ink droplet is discharged by the conductive layer from supporting member in step-like mode, disperseed by electric field with the ink droplet that suppresses to arrive continuously, wherein use the supporting member of being made by the sheet of resin sheet or resin-coating, this supporting member has respectively upper surface current-carrying part, lower surface current-carrying part and the side surface current-carrying part on surface, lower surface and the side thereon.Wherein top surface conductive layers has image receiving layer, and each conductive layer has 1 * 10
10Ω/cm
2Or the thickness of littler intrinsic sheet resistance and 0.1-20 μ m.
Also known a kind of use is as patent document 4,5, the ink-jet printer of the routine of 6 and 7 described electrostatic attractions.Each of these printers has the jetelectrode that is used for ink-jet in head, with the comparative electrode that is set at the ground connection of the position relative with printhead with preset distance.Recording medium for example paper is transported in the space between comparative electrode and the head.By jetelectrode is applied voltage, make China ink charged and spray towards comparative electrode from the head.
Patent document 1:JP H11-277747A (Fig. 2 and Fig. 3)
Patent document 2:JP S58-177390A;
Patent document 3:JP 2000-242024A;
Patent document 4:JP H08-238774A;
Patent document 5:JP 2000-127410A;
Patent document 6:JP H11-198383A;
Patent document 7:JP H10-278274A.
Summary of the invention
The problem to be solved in the present invention:
Yet in above-mentioned prior art, under the small situation of the ink droplet that makes injection, because electric field is subjected to the influence of the surface condition of carrier, for example the size of ink droplet is unsettled, has therefore produced stably to keep the problem of normal ink-jet.
That is, in above-mentioned patent document 1 described ink-jet printer, when ink-jet on the carrier of insulation, because the repulsion of the charge generation of the ink droplet that had before adhered to, produced such problem: the positional precision of deposition is reduced, the size instability of ink droplet.
In carrier described in the patent document 2 and patent document 3 described supporting members, the resistance on the surface that ink droplet is attached thereto is reduced, but, for the small ink droplet that is subject to electric field influence especially, it is not enough that this effect seems, therefore next ink droplet is subjected to the influence of the previous ink droplet that arrives and around being dispersed in, this has caused the problem that the precision of drippage position reduces.
In addition, the moisture content of the black receiving layer of carrier or the conductive layer of supporting member is owing to the change of the environment when spraying changes, and this causes the change of the conductance of supporting member.This causes because the change of environment makes the problem of the precision that can not stably keep dripping the position.
The low precision of drippage position not only reduces the quality of the image of printing, but also causes serious problem, for example, and especially when using conductive ink to draw the wiring pattern of circuit according to ink-jet technology.That is, the feasible wiring that can not draw required width of low positional precision, even cause sometimes opening circuit or short circuit of circuit.
In addition, because because the influence of the previous ink droplet that arrives makes the discharge rate of next ink droplet change and is unstable that it is unstable that the size of the diameter of the point of formation also becomes.
In addition, in the ink-jet printer that discloses in patent document 4-7, because comparative electrode and head relatively are provided with, electric field is subjected to the thickness of recording medium and/or the influence of material type, thereby the discharge rate of China ink is inhomogeneous sometimes, so the diameter of ink dot changes in several position sometimes.In order to address this problem, the recording medium that can use conduction is as comparative electrode, and but, this is not suitable for the recording medium of insulation.
Therefore, about each described invention, an one purpose is to make stably sprays the ink droplet of constant basis, even particularly under the situation of spraying small ink droplet.
The measure of dealing with problems:
Described problem solves by a kind of liquid injection device, and described equipment comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage; Be used for described jetelectrode is applied the voltage applying unit of voltage; The carrier that comprises the insulating materials of the droplet that is used to receive injection; And spray the atmosphere regulon, being used to keep from the atmosphere that jet head liquid sprays is 9 ℃ or higher and less than the dew point of water saturation temperature.
In addition, the problems referred to above solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; Said method comprising the steps of: be retained as 9 ℃ or higher and less than the atmosphere of the dew point of water saturation temperature in towards the carrier droplet ejection that comprises insulating materials.
The electric field of carrier surface is influential to electric-field intensity, described electric-field intensity concentrate on nozzle the tip so that droplet fly out.The change of the electric-field intensity between nozzle and carrier causes the change that is used to overcome at the capillary electrostatic force of the solution surface of nozzle tip, and this causes the change of emitted dose and critical voltage.At carrier is that critical voltage changes according to absolute humidity under the situation of insulation.Wherein, absolute humidity be the quality of steam to removing the ratio of the gas (dry air) outside the steam, be also referred to as mixing ratio.
Thereby, make absolute humidity become 0.007kg/kg or above (preferably 0.01kg/kg or more than), that is, under atmospheric pressure making dew point is 9 ℃ or above (preferably 14 ℃ or more than), can accelerated charge from carrier surface to the releasing of air, thereby suppress the electric field effects of carrier surface.
Simultaneously, " dew point " is a temperature, and under this temperature, the moisture in the gas reaches capacity state and condenses into dew.
" carrier " is the object of drippage that is used to receive the solution droplet of injection.For example, when the technology of sprayed solution was used for ink-jet printer, recording medium for example paper or sheet just was equivalent to carrier, was utilizing conductive paste to form under the situation of circuit, just was equivalent to carrier as the plate that will form circuit thereon of substrate.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; And comprise insulating materials, have 10 in the zone of the droplet that is used to receive injection at least
9Ω/cm
2Or the carrier of littler sheet resistance.
In addition, the problems referred to above also solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; Said method comprising the steps of: towards comprise insulating materials, have 10 in the zone of the droplet that is used to receive injection at least
9Ω/cm
2Or the carrier droplet ejection of littler sheet resistance.
That is be 10, by the sheet resistance that makes carrier
9Ω/cm
2Or littler, quicken to leak, so that inhibition is from the electric field effects of carrier surface from the electric charge of carrier surface to air.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; And the carrier that comprises insulating materials, it is 10 that described carrier has the sheet resistance that makes at least in the zone of the droplet that is used to receive injection
9Ω/cm
2Or littler surface-treated layer.
In addition, the problems referred to above also solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; Said method comprising the steps of: towards the carrier droplet ejection that comprises insulating materials, it is 10 that this carrier has the sheet resistance that makes at least in the zone of the droplet that is used to receive injection
9Ω/cm
2Or littler surface-treated layer.
That is,, make sheet resistance become 10 by the carrier with surface-treated layer is provided
9Ω/cm
2Or littler, accelerated charge is from the leakage of carrier surface, thus inhibition is from the electric field effects of carrier surface.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Be used for described jetelectrode is applied the voltage applying unit of voltage; And the carrier that comprises insulating materials, described carrier has the surface-treated layer that forms by the coating surface activating agent in the zone of the droplet that is used to receive injection at least.
In addition, the problems referred to above also solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; And the voltage applying unit that is used for described jetelectrode is applied voltage; Said method comprising the steps of: towards the carrier droplet ejection that comprises insulating materials, this carrier has the surface-treated layer that forms by the coating surface activating agent in the zone of the droplet that is used to receive injection at least.
That is, form surface-treated layer by coating surface activating agent on carrier, make it possible to reduce sheet resistance, this electric charge that quickens carrier surface leaks, and suppresses the electric field effects of carrier surface.
In addition, described problem can solve by a kind of liquid jet method, said method comprising the steps of: by forming surface-treated layer at least on the regional coating surface activating agent of the droplet that is used to receive injection is comprising the carrier of insulating materials; By the solution in the nozzle being applied injection electric with tip droplet ejection on the surface-treated layer of carrier from nozzle; And, remove the surface-treated layer outside the part that is attached with droplet in the droplet drying of spraying with after solidifying.
That is, sheet resistance is reduced, and the electric charge of carrier surface leaks and is accelerated, and suppresses the electric field effects of carrier surface.In addition, remove outside the part of droplet landing, surface-treated layer is removed, thereby stops the generation of the electric leakage that reduces to cause of the sheet resistance that causes owing to surfactant.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; And the voltage applying unit that is used for jetelectrode is applied a kind of voltage of signal waveform, the magnitude of voltage of described signal waveform satisfies the Vs (V) in the following expression (A) at least in part, wherein the maximum V of the surface potential of the insulating carrier of the droplet of reception injection
Max(V) expression, its minimum of a value V
Min(V) expression.
In addition, the problems referred to above can solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; And the voltage applying unit that is used for jetelectrode is applied voltage, said method comprising the steps of: the voltage that jetelectrode is applied a kind of signal waveform, the magnitude of voltage of described signal waveform satisfies the Vs (V) in the following expression (A) at least in part, wherein the maximum V of the surface potential of the insulating carrier of the droplet of reception injection
Max(V) expression, its minimum of a value V
Min(V) expression.
Above-mentioned liquid jet method preferably includes the step of measuring the surface potential of insulating carrier before jetelectrode is applied voltage; And acquisition maximum V
Max(V) and minimum of a value V
Min(V) step.
[formula 1]
V
s≤V
mid-V
|max-min|，V
mid+V
|max-min|≤V
s (A)
V wherein
| max-min|(V) determine V by following formula (B)
Mid(V) determine by following formula (C).
V
|max-min|＝|V
max-V
min| (B)
V
mid＝(V
max+V
min)/2 (C)
As mentioned above, when the voltage of the signal waveform that outputs to jetelectrode satisfies Vs at least in part, make in the influence of the surface potential of the lip-deep optional position of insulating carrier forr a short time, this makes that the electric field that is used to spray almost is uniform.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Detecting unit is used to detect the surface potential of the insulating carrier that receives the droplet that sprays; And the voltage applying unit that is used to apply a kind of voltage of signal waveform, the magnitude of voltage of described signal waveform satisfies the Vs (V) in the aforesaid expression formula (A) at least in part, wherein the maximum V of the surface potential of the insulating carrier that is detected by detecting unit
Max(V) expression, its minimum of a value V
Min(V) expression.
In above-mentioned liquid injection device, detecting unit detects the surface potential of insulating carrier, and detects acquisition maximum V from this
Max(V) and minimum of a value V
Min(V).According to these values, voltage applying unit applies the voltage of signal waveform, and magnitude of voltage satisfies the Vs (V) of the expression formula (A) that provides above at least in part.
This makes in the influence of the surface potential of the lip-deep optional position of insulating carrier littler, makes that the electric field that is used to spray almost is uniform.
In addition, can apply the voltage of signal waveform of the maintenance constant potential of the Vs that satisfies above-mentioned expression formula (A) to jetelectrode.
Even at the voltage that imposes on jetelectrode is when keeping the signal waveform of constant potential, also can be so that less in the influence of the surface potential of the lip-deep optional position of insulating carrier, this makes that the electric field that is used to spray almost is uniform.
Wherein, the absolute value of constant voltage V preferably
| max-min|5 times or bigger, more preferably be 10 times or bigger.
In addition, can apply the voltage of signal waveform of the pulse voltage of the Vs that satisfies above-mentioned expression formula (A) to jetelectrode.
In this case, preferably put on the maximum of pulse voltage of jetelectrode greater than V
Mid, the minimum of a value of pulse voltage is less than V
Mid
Under above-mentioned situation, preferably can satisfy such condition, that is, and within several differences, at the maximum and the V of pulse voltage
MidBetween difference and at V
MidAnd in the difference between the minimum of a value of pulse voltage, one greater than another.
Even when the voltage that puts on jetelectrode is the signal waveform of pulse voltage, also can be so that the influence of the surface potential of the lip-deep optional position of insulating carrier is less, this makes that the electric field that is used to spray almost is uniform.
Wherein, preferably, the peaked absolute value of pulse voltage or the absolute value of minimum of a value are V
| max-min|5 times or bigger, more preferably be 10 times or bigger.
In addition, the problems referred to above can solve by a kind of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Voltage applying unit is used for jetelectrode is applied voltage; And and the Xelminator that is oppositely arranged of the insulating carrier of the droplet that receive to spray, be used to make the insulating carrier discharge.
In addition, the problems referred to above can solve by a kind of liquid jet method of liquid injection device, and described liquid injection device comprises: have the jet head liquid of nozzle, be used for spraying from tip portion the droplet of charged solution; Be provided at the jetelectrode on the described jet head liquid, it applied voltage spray described droplet to produce electric field; Voltage applying unit is used for jetelectrode is applied voltage; Said method comprising the steps of: make the insulating carrier discharge before the droplet ejection by jetelectrode is applied injection electric.
By making the surface-discharge of insulating carrier, make that the surface potential of insulating carrier is less, can make that also the change of surface potential of insulating carrier is uniform.
As Xelminator, can use and receive the sparking electrode that the insulating carrier of the droplet of injection relatively is provided with, and this sparking electrode is applied in alternating voltage.In addition, this sparking electrode can be shared with jetelectrode.
By the sparking electrode relative with insulating carrier applied alternating voltage, can make the surface-discharge of insulating carrier, this makes that the surface potential of insulating carrier is less, can make that also the change of surface potential of insulating carrier is uniform.
About Xelminator, can use the Xelminator of corona discharge type, perhaps use wherein Xelminator to the insulating carrier irradiates light.
Wherein do not have specific restriction,, but, preferably use grenz ray, ultraviolet rays or alpha ray as long as the irradiation of light can cause discharge for the light wavelength of in Xelminator, using.
Preferably 20 microns or littler of the internal diameters of the nozzle in jet head liquid.Like this, the distribution narrow of electric-field intensity makes electric field to be concentrated.As a result, the droplet of formation is small and its dimensionally stable.Droplet is quickened by the electrostatic force between electric field and the electric charge after by the nozzle ejection immediately.When droplet flew away from nozzle, electric field sharply descended, because the resistance of air reduces the speed of droplet.But, when the small droplet with concentrated electric field during near carrier, it is by the charge attraction at the opposite polarity of carrier side induction.Even this makes that droplet also can drop on the carrier under droplet is small situation.
On the other hand, droplet is become small can cause concentrating of electric field, but under the situation of the non-uniform electric on the surface of carrier, when droplet becomes small the time, it is easy to be subjected to the electric field effects that the surface condition according to carrier changes.
But, according to above-mentioned different invention,,, can improve the stable injection of droplet more effective and more significantly when droplet when being small because uneven electric field effects is suppressed.
Preferably 8 microns or littler of the internal diameters of nozzle.By the diameter that nozzle is set is 8 microns or littler, can make electric field more concentrated, makes droplet more small, and can reduce the influence to electric-field intensity distribution that produces owing to the change to the distance of comparative electrode during flying.Thereby the positional precision of comparative electrode, the characteristic of carrier or thickness can be reduced the influence of droplet shape and landing precision.
In addition, by adding concentrating of highfield, can reduce the influence that the electric field string is scratched, it is to cause a problem occurring under the spray nozzle density condition with higher in a plurality of structure of nozzle that the electric field string is scratched, thereby can realize higher spray nozzle density.
In addition, nozzle inside diameter is set is 4 microns or the significant electric field of littler permission and concentrate, can access higher maximum field intensity, make droplet have stable shape and extremely small, and accelerate the initial injection speed of droplet.This makes it possible to improve the stability of flight, thereby further improves the landing precision and spray response.
In addition, concentrate by strengthening electric field, the electric field string is scratched influences nearly unavailable, and it is to cause a problem occurring under the spray nozzle density condition with higher in a plurality of structure of nozzle that the electric field string is scratched, thereby can realize higher spray nozzle density.
In above-mentioned structure, preferably 0.2 micron or bigger of the internal diameter of nozzle.By nozzle inside diameter is set is 0.2 micron or bigger, can improve the charged efficient of droplet, thereby can improve the jetting stability of droplet.
In explanation after this, " internal diameter of nozzle " is also referred to as " nozzle diameter ", refers to the internal diameter at the tip portion nozzle of droplet ejection.The cross section that the liquid of nozzle sprays opening is not limited to circle.For example, when the cross section that liquid sprays opening was polygon, star or other shape, " internal diameter " referred to the external diameter of a circle of described cross sectional shape.About " nozzle diameter ", " internal diameter of the tip portion of nozzle " or under the situation of the numerical limits with other, it has similar implication." spout radius " refers to 1/2 length of nozzle diameter (internal diameter of the tip portion of nozzle).
In addition, about above-mentioned liquid injection device:
(1) preferably, nozzle is made by insulating materials, and injection electric applies electrode and is inserted into nozzle interior, perhaps at the nozzle interior metal lining as described electrode.
(2) in the structure described in aforesaid each invention, perhaps in the structure of aforesaid (1), preferably, nozzle is made by insulating materials, described electrode be inserted into nozzle interior or at the nozzle interior metal lining as described electrode, and the electrode that is used to spray also is provided at the outside of nozzle.
About the electrode that is used to spray in the nozzle outside, for example its circumference along the nozzle tip part edge is set up, and is arranged on the whole side of nozzle tip part, perhaps partly is arranged on the side of nozzle tip part.
(3) in the structure described in aforesaid each invention, perhaps in the structure of aforesaid (1) or (2), preferably, the voltage V that is used to drive that puts on nozzle is in the scope that is expressed from the next:
Wherein γ is the surface tension (N/m) of solution, ε
0Be the dielectric constant (F/m) of vacuum, d is nozzle diameter (m), and h is the distance (m) between nozzle and the carrier, and k is the proportionality constant (1.5＜k＜8.5) relevant with nozzle form.
(4) in the structure described in aforesaid each invention, perhaps in aforesaid (1), in the structure of (2) or (3), the arbitrary signal waveform of the voltage that applies is 1000V or following preferably.
By the higher limit of injection electric is set as mentioned above, can improve precision by the durability of improving equipment, and can easily implement safety measure so that spraying control is easier to.
(5) in the structure described in aforesaid each invention, perhaps in aforesaid (1), (2), in the structure of (3) or (4), preferably, the injection electric that applies is 500V or littler.
By the higher limit of injection electric is set as mentioned above, can further improve precision by the durability of further improvement equipment, and can easily implement safety measure so that spraying control is easier to.
(6) in the structure described in aforesaid each invention, perhaps arrive in (5) any one structure in aforesaid (1), preferably, the distance between nozzle and the carrier is 500 microns or littler, obtains high landing precision to utilize small nozzle diameter.
(7) in the structure described in aforesaid each invention, perhaps arrive in (6) any one structure, preferably, the solution of nozzle interior is exerted pressure in aforesaid (1).
(8) in the structure described in aforesaid each invention, perhaps arrive in (7) any one structure in aforesaid (1), under the situation of being sprayed by individual pulse, preferably, the pulse width Δ t of the pulse that applies is not less than the timeconstant of being determined by following formula.
τ＝ε/σ (2)
Wherein ε is the dielectric constant (F/m) of solution, and σ is the conductance (S/m) of solution.
In addition, can use above-mentioned any liquid jet method to form the wiring pattern of circuit board by means of metal injection cream.
In this case, preferably after forming wiring pattern, remove surfactant.This has stoped and has reduced to cause short circuit owing to the sheet resistance of surfactant.
Effect of the present invention:
When the atmosphere that is used for droplet ejection is retained as 9 ℃ or higher and during less than the dew point of saturation temperature, absolute humidity becomes 0.007kg/kg or higher.Even when carrier is insulation, this atmosphere is also quickened the leakage of the electric charge of carrier surface effectively, thereby the electric field effects of inhibition carrier surface, therefore improved the positional precision of the droplet that lands, and also suppressed the change of the diameter of the size of the droplet that sprays and the point that lands, thereby realized stability.
In addition, keep described atmosphere to stop the formation of the dew on injector head and carrier less than saturation temperature.
Have 10 to being less than the zone that receives the droplet that sprays
9Ω/cm
2Or under the situation of lower sheet resistance, having sheet resistance in the zone that receives the droplet that sprays at least at carrier surface is 10
9Ω/cm
2Or under the situation of lower surface-treated layer, perhaps have under the situation of the surface-treated layer that forms by the coating surface activating agent to being less than the zone that receives the droplet that sprays at carrier surface, can realize the leakage of the electric charge of carrier surface effectively, improve the positional precision of landing droplet, and the change of the diameter of the size of the droplet that can suppress to spray and the point that lands, thereby realize stability.
Utilized in advance in the liquid jet method of surfactant-coated carrier surface before receiving the droplet that sprays, the sheet resistance of carrier is reduced, and quickens the leakage of the electric charge of carrier, therefore suppresses the electric field effects of carrier surface.
During surface-treated layer when removing the part of landing, can stop the generation of the leakage that the minimizing of the sheet resistance that causes owing to surfactant causes except droplet.Processing afterwards of the carrier that can also avoid being attached with surfactant or the trouble that runs into when using.
Specifically, when the liquid jet method that uses said structure is used to form the wiring pattern of circuit board, droplet along required wiring pattern plated metal cream, after forming wiring pattern, remove surfactant then, thereby the part of removing outside the wiring pattern has high insulating properties, makes can form thin high density wiring pattern and can not be short-circuited or similar phenomenon.
When the voltage of the signal waveform of the Vs that satisfies above-mentioned expression formula (A) (V) is applied in jetelectrode, the surface potential of insulating carrier influences the value of the electric field that is used to spray hardly, even this makes when the carrier that receives the droplet that sprays is insulating carrier, can make that also from the amount of spraying the liquid that opening sprays be uniform.
Can be by being discharged in the surface of insulating carrier so that the surface potential of insulating carrier is uniformly, even therefore when the carrier that receives the droplet that sprays is insulating carrier, can make that also from the amount of spraying the liquid that opening sprays be uniform.
In this case, by means of using jetelectrode, can simplify the structure of liquid injection device also as sparking electrode.
Small by the nozzle diameter of jet head liquid is manufactured, can be so that electric-field intensity distribution be narrower, thereby make electric field to be concentrated.As a result, the droplet that can make formation is small, and the shape of droplet can be stabilized, and the total voltage that can reduce to apply.
Though small droplet is easy to be subjected to the influence of the uneven surfaces current potential of carrier side, each above-mentioned structure can suppress this influence.Thereby, for small droplet, can realize stable injection.
Description of drawings
Figure 1A represents that working as nozzle diameter is 0.2 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Figure 1B represents that working as nozzle diameter is 0.2 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 2 A represents that working as nozzle diameter is 0.4 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Fig. 2 B represents that working as nozzle diameter is 0.4 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 3 A represents that working as nozzle diameter is 1 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Fig. 3 B represents that working as nozzle diameter is 1 micron of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 4 A represents that working as nozzle diameter is 8 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Fig. 4 B represents that working as nozzle diameter is 8 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 5 A represents that working as nozzle diameter is 20 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Fig. 5 B represents that working as nozzle diameter is 20 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 6 A represents that working as nozzle diameter is 50 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 2000 microns;
Fig. 6 B represents that working as nozzle diameter is 50 microns of , the electric-field intensity distribution the when distance between nozzle and the comparative electrode is set to 100 microns;
Fig. 7 is the chart that is illustrated in Figure 1A maximum field intensity under each condition of Fig. 6 B;
Fig. 8 is illustrated in the nozzle diameter of the curved liquid portion nozzle in the nozzle and the relation between the maximum field intensity;
Fig. 9 represents the relation of the ratio of the Rayleigh edge voltage of droplet of injection beginning voltage that the nozzle diameter of nozzle and the droplet that partly will be penetrated at curved liquid begin to fly out, initial injection and injection beginning voltage in the nozzle and sharpened edge voltage;
Figure 10 A is illustrated in nozzle diameter and the relation between the strong electric field region of the tip portion of nozzle;
Figure 10 B is the curve of expression corresponding to the amplification in the zone of the small nozzle diameter among Figure 10 A;
Figure 11 is the block diagram of structure of the signal of express liquid spraying equipment;
Figure 12 is the sectional view of the liquid jet mechanism got along nozzle;
Figure 13 A represents and puts on the relation of the voltage of solution, represents non-spray regime;
Figure 13 B represents and puts on the relation of the voltage of solution, the expression spray regime;
Figure 14 A is the sectional view of partial cut, another example of the shape of the fluid passage of expression nozzle interior, and this path is circular in solution cavity one side;
Figure 14 B is the sectional view of partial cut, another example of the shape of the fluid passage of expression nozzle interior, and the inwall of this path has the periphery of taper;
Figure 14 C is the sectional view of partial cut, another example of the shape of the fluid passage of expression nozzle interior, and this path has the combination of the periphery and the linear fluid path of taper;
Figure 15 is illustrated in the relation between absolute humidity and the dew point;
Figure 16 is the chart that is illustrated in the relation between absolute humidity and the dew point;
Figure 17 is the curve that is illustrated in the relation between relative humidity and the dew point;
Figure 18 is the sectional view of partial cut, and expression is according to the liquid jet mechanism of the second embodiment of the present invention;
Figure 19 A represents the waveform of steady state voltage;
Figure 19 B represents the waveform of another steady state voltage;
Figure 20 is the sectional view of partial cut, and expression is according to the liquid jet mechanism of the third embodiment of the present invention;
Figure 21 A is the figure of the waveform of indicating impulse voltage;
Figure 21 B is the figure of the waveform of another pulse voltage of expression;
Figure 22 A is the figure of the waveform of indicating impulse voltage;
Figure 22 B is the figure of the waveform of another pulse voltage of expression;
Figure 23 A is the figure of the waveform of indicating impulse voltage;
Figure 23 B is the figure of the waveform of another pulse voltage of expression;
Figure 24 is the sectional view of partial cut, and expression is according to the liquid jet mechanism of the fourth embodiment of the present invention;
Figure 25 is the sectional view of partial cut, and expression is according to the liquid jet mechanism of the fifth embodiment of the present invention;
Figure 26 is the sectional view of partial cut, and expression is according to the liquid jet mechanism of the sixth embodiment of the present invention;
Figure 27 is the chart that is illustrated in the relation between the deviation ratio of dispersion phenomenon of diameter of droplet of the sheet resistance of carrier and deposition;
Figure 28 is the chart of the relation between the deviation ratio of dispersion phenomenon of diameter of droplet of surface potential distribution, injection electric and deposition of expression dew point and carrier;
Figure 29 is the chart of the relation between the diameter of the droplet of bias voltage and pulse voltage and deposition under the dew point environment that is illustrated in;
Figure 30 is the schematic diagram that is used to illustrate according to the calculating of the electric-field intensity of embodiments of the invention;
Figure 31 is the sectional view of an example of expression liquid jet mechanism of the present invention; And
Figure 32 is the liquid injection device that is used for illustrating according to one embodiment of the present of invention, based on the figure of the injection conditions of distance-voltage relationship.
The specific embodiment
Explanation is used to implement the preferred embodiments of the present invention with reference to the accompanying drawings.On the following examples possess skills is preferred all restrictions for implementing the present invention, but scope of the present invention is not limited to the accompanying drawing of the following examples and example.
Preferably 25 microns or littler of the nozzle diameters (internal diameter) of the liquid injection device among each embodiment that will illustrate below, be more preferably less than 20 microns, further preferably 10 microns or littler, preferably 8 microns or littler again, especially preferred is 4 microns or littler.Nozzle diameter is more preferably greater than 0.2 micron.Below with reference to Figure 1A-relation of 6B explanation between nozzle diameter and electric-field intensity.Figure 1A-6B represents corresponding to the nozzle diameter that uses to be 0.2,0.4,1.8,20 and 50 microns electric-field intensity distribution respectively in the reference of routine.
In each figure, the liquid that the nozzle center position is illustrated in nozzle sprays the center in the liquid ejection surface of opening.Figure 1A, 2A, 3A, 4A, 5A and 6A represent the electric-field intensity distribution when the distance between nozzle and the comparative electrode is set to 2000 microns, Figure 1B, 2B, 3B, 4B, 5B and 6B represent the distribution when described distance is set to 100 microns.Wherein under every kind of condition, the voltage that applies is retained as the constant voltage of 200V.Distributing line in each figure represents that scope is 1 * 10
6-1 * 10
7The electric-field intensity of V/m.
Fig. 7 is the chart that is illustrated in the maximum field intensity under each condition.
By Figure 1A-6B as can be seen, when nozzle diameter be set to 20 microns (Fig. 5 A, 5B) or when bigger, field intensity be distributed in expansion in the width range.It can also be seen that the distance affects electric-field intensity between nozzle and the comparative electrode by Fig. 7.
True as seen by these, (Fig. 4 A, 4B) or more hour, electric field is concentrated, and very little to the influence of electric-field intensity distribution with the change of the distance of comparative electrode when nozzle diameter is 8 microns.Thereby, when nozzle diameter is set to 8 microns or more hour, can obtain stable injection, and not be subjected to the influence of the change of the material behavior of the change of comparative electrode branch positional precision and carrier and thickness.
Then, Fig. 8 represents to suppose the relation between the nozzle diameter and maximum field intensity when liquid surface is in the tip location of nozzle.
As seen from Figure 8, when nozzle diameter be 4 microns of or more hour, electric field is concentrated and become greatly, and can be so that maximum field strength is higher.This makes that the initial injection speed of solution can be very fast, so that the flying speed of droplet increases, because increase in nozzle tip Partial charge translational speed, so can improve the injection response speed.
The following describes the maximum amount of charge that the droplet of injection can charge to.Consider the Rayleigh division (Rayleigh edge (margin)) of droplet, the chargeable maximum amount of charge extremely of droplet is represented by following formula (3):
q＝8×п×(ε
0×γ×d
3 0/8)
2 (3)
Wherein q is the quantity of electric charge (C), and it provides Rayleigh edge, ε
0Be the dielectric constant (F/m) of vacuum, γ is the surface tension (N/m) of solution, d
0It is the diameter (m) of droplet.
Because the quantity of electric charge q that is provided by formula (3) approaches the Rayleigh edge, even under identical electric-field intensity, electrostatic force is also stronger, and improved jetting stability, but, on the contrary, as quantity of electric charge q during too near the Rayleigh edge, solution may spray opening part to be disperseed at the liquid of nozzle, causes unsettled injection.
Fig. 9 is illustrated in nozzle diameter, make injection beginning voltage that the droplet of wanting injected begins to fly from the tip portion of nozzle, the relation the Rayleigh edge voltage of the droplet of initial injection and the nozzle between the ratio of injection beginning voltage and sharpened edge voltage.
By the curve of Fig. 9 as can be seen, when nozzle diameter is in the scope of 0.2-4 micron, injection beginning voltage surpasses 0.6 to the ratio of sharpened edge voltage, even under low injection electric, also can give droplet many relatively electric charges, in described scope, produce good droplet charge efficiency and stable injection.
For example, Figure 10 A, 10B are the curves that is illustrated in nozzle diameter and the relation between the strong electric field region of the point office of nozzle, and described zone is by the distance expression to the center of nozzle.These curves show that along with nozzle diameter becomes 0.2 micron or littler, the zone that electric field is concentrated becomes extremely narrow.This means that the droplet of injection can not receive enough energy and be used for quickening, and flight stability reduces.Therefore, nozzle diameter preferably is set greater than 0.2 micron.
[first embodiment]
(overall structure of liquid injection device)
Below with reference to the liquid injection device 10 of Figure 11-14C explanation as one embodiment of the present of invention.Figure 11 is the block diagram of the structure of express liquid spraying equipment 10 schematically.
The following describes each part.
(solution)
As the example of the solution that is sprayed by liquid injection device 10, what relevant inorganic liquid can be mentioned has: water, COCl
2, HBr, HNO
3, H
2SO
4, SOCl
2, SO
2Cl
2, FSO
3H and analog thereof.About organic liquid, that can mention has: alcohols is methyl alcohol for example, normal propyl alcohol, isopropyl alcohol, n-butanol, 2-methyl isophthalic acid-propyl alcohol, the tert-butyl alcohol, 4-methyl-2-amylalcohol, phenmethylol, the α terpinol, ethylene glycol, glycerine, diethylene glycol (DEG), triethylene glycol, phenols is phenol for example, o-cresol, a toluene distributes, p-cresol, ethers is diox for example, furfural, glycol dimethyl ether, methyl cellosolve, ethyl cellosolve, butyl cellosolve, ethyl carbitol, BC, acetate of butyl carbitol, chloropropylene oxide, ketone is acetone for example, MEK, hexone, acetophenone, aliphatic acid is formic acid for example, the acetate dichloroacetic acid, trichloroacetic acid, the ester class is methyl formate for example, Ethyl formate, methyl acetate, ethyl acetate, butyl acetate, isobutyl acetate, acrylic acid 3-methoxyl group ester, the acrylic acid n-pentyl ester, ethyl propionate, ethyl lactate, methyl benzoate, diethyl malonate, repefral, the phthalic acid oxalic acid, diethyl carbonate, ethylene carbonate, propylene carbonate, cellosolve acetate, acetate of butyl carbitol, ethyl acetoacetate, methyl cyanoacetate, ethyl cyanoacetate, nitrogenous compound is nitromethane for example, nitrobenzene, acetonitrile, propionitrile, succinonitrile, valeronitrile, benzonitrile, ethamine, diethylamine, diaminoethanes, aniline, aminomethyl phenyl amine, N, accelerine, ortho-aminotoluene, para-totuidine, piperidine, pyrimidine, α-Jia Jibiding, 2,6-dimethyl pyridine, quinoline, propylene diamine, formamide, the N-NMF, dimethyl methyl hydramine, N, the N-dimethylacetylamide, acetamide, methylamino dimethylacetal, 2-hydroxyl isobutanol, 1,1,3,3-tetramethylurea, N-methyl pyrrolidone, the mixture of sulfur-bearing is methyl-sulfoxide for example, sulfolane, and hydrocarbon is benzene for example, p-cymene hydrocarbon, naphthalene, cyclohexylbenzene, cyclohexene, halogenated hydrocarbon for example 1, the 1-dichloroethanes, 1,2-dichloroethanes, 1,1,1-trichloroethanes, 1,1,1,2-tetrachloroethanes, 1,1,2,2-tetrachloroethanes, pentachloroethane, 1,2-dihydro ethene (cis), tetrachloro-ethylene, chloro-chung butane, 1-chloro-2-methylpropane, 2-chloro-2-methylpropane, bromomethane, bromoform, positive propyl bromo, with and analog.In addition, at least two kinds in the above-mentioned liquid can be by mixed and be used as described solution.
In addition, contain under the situation that the conductive paste of a large amount of material (for example silver powder) of high conductivity sprays in use, the object material that maybe will be dispersed in the above-mentioned solution that will be dissolved is unrestricted, as long as this object material is not the coarse particle that causes nozzle blockage.About fluorescent material, PDP for example, CRT, FED etc. can use conventional known materials and without limits.For example, as red fluorescence material, that can mention has: (Y, Gd) BO
3: Eu, YO
3: Eu etc., as green fluorescent material, that can mention has: Zn
2SiO
4: Mn, BaAl
12O
19: Mn, (Ba, Sr, Mg) O α-AL
2O
3: Mn etc., as blue fluorescent material, that can mention has: BaMgAL
14O
23: Eu, BaMgAl
10O
17: Eu etc.For above-mentioned object material securely attached on the recording medium, preferably add various binders.About used binder, that for example can mention has: cellulose and derivative thereof, for example ethyl cellulose, methylcellulose, celluloid, cellulose acetate, hydroxyethylcellulose and analog thereof; (methyl) acrylic resin, alkyd resins for example, polymethylacrylic acid, polymethyl methacrylate, the copolymer of methacrylic acid 2-ethylhexyl and methacrylate, the copolymer of lauryl methacrylate and 2-hydroxyethyl methacrylate, and analog and their slaine; Poly-(Methacrylamide) resin, for example poly-(N-N-isopropylacrylamide), poly-(N-N, DMAA) and analog thereof; Styrene base resin, polystyrene for example, acrylonitrile and cinnamic copolymer, the copolymer of styrene and maleic acid, the copolymer of styrene and isoplene, and analog; Third ethene-acryl resin, for example copolymer of acrylic acid and n-butyl acrylate, and analog; Various saturated and unsaturated polyester resins; Polyolefin-type resin, for example polypropylene and analog thereof; Halogen polymer, polyvinyl chloride for example, polyvinylidene chloride and analog thereof; Vinylite, polyvinyl acetate for example, the copolymer of vinyl chloride and vinyl, and analog; Polycarbonate resin; Epoxy resin; Polyurethane resin; Acetal resin, polyvinyl formal for example, polyvinyl butyral, Pioloform, polyvinyl acetal and analog thereof; Polyvinyl resin, the copolymer of ethene and vinyl acetate for example, the copolymer of ethene and ethyl acrylate, and analog; Amino resins, for example benzoguanamine and analog thereof; Urea resin; Melamine resin, polyvinyl alcohol resin and their anion or cation changing matter; Polyvinylpyrrolidone and copolymer thereof; Homopolymers copolymer, and crosslinked alkylene oxide, PEO for example, carboxylation poly epoxy resin and analog thereof; Poly-alkyl diol, polyethylene glycol for example, polypropylene glycol and analog thereof; PPG; SBR, NBR rubber; Dextrin; Alginates; Natural or semi-synthetic resin, for example colloid and delivertives thereof, casein casein, Sunset Abelmoschus Root, tragacanth, the mould polysaccharide of short stalk, gum arabic, locust bean gum, guar gum, pectin, carrageenan, hide glue, albumin, various starch, cornstarch, nutrition mashed potatoes, laver, agar, soybean protein and analog thereof; The terpene hydrocarbon resin; Ketone resin; Rosin and rosin fat; Polyvinyl isobutyl ether, polymine, poly-(sulfonic acid ethylidene ester), poly-(sulfonic acid vinyl acetate).These resins not only can be used as homopolymers, and can be by mixed, as long as they are compatible.
Use liquid injection device 10 as a kind of situation that forms method of patterning under, it generally is used in the display application.Specifically, this equipment is used to form the fluorescent material of plasma display panel, the rib of formation plasma display panel, be used to form the electrode of plasma display panel, be used to form the fluorescent material of CRT, be used to form the fluorescent material of FED (Field Emission Display) plate, be used to form the rib of FED plate, the colour filter of LCD (RGB dye layer, black matrix layer), be used for the spacer (corresponding to the pattern of black matix, dot pattern etc.) of LCD.The rib here generally refers to a kind of barrier, and for example is used to be used to isolate the plasma area of every kind of color in the plasma display panel.As for other application, that can mention has: lenticule; The patterned coatings of magnetisable material, ferroelectric, conductive paste (wiring, antenna), and the analog that uses in the semiconductor; The printing of standard; Printing on special media (film, cloth, steel plate etc.); Printing on curved surface; The printed panel that is used for various printings as the drawing use; Use the coating of the present invention as binder, sealing substance and the analog thereof of processing method; As the medical supplies of biology or medical application (for example mixed multiple a spot of composition), be used for the coating of the sample and the analog thereof of diagnostic gene; And other similar application.
(carrier)
As carrier K, can use any of following substances: (1) is by having 10
9Ω/cm
2Or the material of littler sheet resistance makes, and (2) have the surface-treated layer that forms on the matrix material of insulation, will deposit the surface portion of droplet thereon, and described processing layer is by having 10
9Ω/cm
2Or the formation of the material of littler sheet resistance, (3) have the surface-treated layer that forms on insulating materials, wherein will deposit the described processing layer surfactant-coated of surface portion of droplet thereon.
Under any circumstance, when droplet is deposited on the surface of carrier K, because the low resistance of surface portion, helps the releasing of electric charge of droplet, thereby suppress electric field effects from carrier surface.
As a kind of method that forms surface-treated layer on the surface of the insulating materials in carrier K described in superincumbent (2), can use following method.
Use chemical plating, vacuum evaporation, sputter or similar processing to form metal film from the teeth outwards.
On the other hand, can adopt such method: on the surface of insulating materials the solution of coated with conductive polymer, with the mixed solution of metal oxide or organic semiconductor or be dissolved with the solution of surfactant, described metal oxide is metal dust, metallic fiber, carbon black, carbon fiber, tin-oxide, indium oxide etc.As painting method, can use sputter coating, immersion coating, brush coating, erasing coating, roller coating, screw mandrel (wire bar) coating, extrusion coated, spin coating etc.Can use any method.
As a kind of method that forms surface-treated layer on the surface of the insulating materials that is coated with surfactant in carrier K described in superincumbent (2), wherein can use low-molecular-weight surfactant.By scrub, with cloth or its analog erasing or because low thermal resistance and be decomposed and be removed by heating can easily be removed low-molecular-weight surfactant from carrier.Therefore, preferably on carrier surface, apply low-molecular-weight surfactant in advance, and finish the unwanted part of removing surface-treated layer after using droplet ejection.This processing makes liquid injection device 20 can form the circuit of the insulation with maintained carrier surface, and this describes in the back.
Because low-molecular-weight surfactant has big dependence to humidity, temperature-adjusting device 41 preferably is adjusted to the atmosphere of the environment with required absolute humidity by air regulator 70, so that the carrier K that is coated with surfactant was retained at least one hour or the longer time therein.
As low molecular weight surfactants, what relevant nonionics can be mentioned has: glyceride fat acid fat, polyethylene glycol oxide, alkyl ether, alkyl polyethylene oxides, phenyl ether, N, N-pair-(2-hydroxyethyl), alkylamine (alkyl diethanol amine) N-2-ethoxy-N-2-hydroxyalkyl amine (hydroxyalkyl MEA), the macrogol hydrocarbyl ether, polyethylene glycol oxide, alkylamine fatty acid ester, the alkyl diethanol amine, the alkyl sulfonium salt, alkylbenzene sulfonium salt, alkyl phosphoric acid tetraalkylammonium salt, triakyl benzyl, ammonium salt, alkyl betaine, alkyl imidazole betaine and analog thereof.
In addition, about the surfactant of polymer, that can mention has: polyether ester amine (PEEA), polyetheramides acid imide (PEAI), the copolymer and the analog thereof of PEO-chloropropylene oxide (PEO-ECH).About anionic surfactant, that can mention for example has: alkylphosphonate (for example, Electrostripper A of Kao Corporation, Elenon No.19of Dai-ichi Kogyo Seiyaku Co., LTD (both is a trade mark)), about zwitterionic surfactant, that can mention has: and betaine (for example, Amogen K (trade mark) ofDai-ichi kogyo Seiyaku Co., LTD), about non-ionic surface active agent, that can mention has: polyoxyethylene fatty acid esters (for example Nonion L (trade mark) of NOFCorporation), and (Emulgen 106,120 in the emulsified transparent agent, 147,420,220,905,910 ofKao Corporation, Nonion E of NOF Corporation (both is a trade mark)).About other non-ionic surface active agent, also available has: polyoxyethylenealkylphenol ether, polyglycerol fatty acid alcohol ester, polyethylene glycol oxide sorbitan fatty ester, and polyethylene glycol oxide alkylamine.
About having 10
9Ω/cm
2Or the material of littler sheet resistance, operable have: the polymeric material of metal, conduction, metallic fiber, carbon black, carbon fiber, metal oxide be tin oxide and indium oxide, organic semiconductor and their analog for example.
About insulating materials, operable have: lacca, japan, phenolic resins, urea resin, polyester, epoxy resin, silicones, polyethylene, polystyrene, flexible vinyl chloride resin, hard vinyl chloride resin, cellulose acetate, PETG, Teflon (trade mark), natural rubber, flexible rubber, ebonite hard rubber, butyl rubber, neoprene neoprene, silicon rubber, muscovite, micanite, micarex, asbestos board, porcelain material, talcum, alumina ceramics, titanium oxide ceramics, soda-lime glass (soda glass), pyrex, quartz glass, and their analog.
(thermostat)
Thermostat 41 has the feed opening that is used for carrier K and outlet opening (not shown) and at the memory of the inside of the jet head liquid 56 of liquid jet mechanism 50.Thermostat 41 links to each other with inlet tube 48 and outlet 49, this inlet tube is used for the air regulator 70 supply air from the temperature and humidity of regulating air, this outlet is used for inner air is delivered to air regulator 70, it forms a kind of structure of sealing, remove outside the above-mentioned circulation, close flow passage from the air that opens wide.Thermostat also has the less heat insulation structure that is subjected to the influence of external temperature.
At the upstream side of the air regulator 70 of outlet 49, provide the inlet 49a of unlimited air, the air that opens wide that is entered by this inlet carries out air conditioning by air regulator 70, so that be provided for thermostat 41.Can provide a hair-dryer at the middle part of outlet 49, so that emptying or the air that suck to open wide reliably.In addition, can in inlet tube 48 or outlet 49, provide a flowmeter, be used to detect flow, and the result is outputed to controller 60.
Suck air in the present embodiment, but can use inert gas or other gas to replace and do not suck unlimited air from the air that opens wide.When using inert gas, can be provided for supplying the unit of this gas, to be used to the described inert gas that circulates.Wherein, as inert gas, can use nitrogen, argon, helium, neon, xenon, krypton etc.
Air cleaner 42 is provided at the middle part of inlet tube 48, but can additionally be provided at the inlet 49a of unlimited air.
(differential pressure gauge, flow control valve and rate of discharge control valve)
Differential manometer 43 detects the pressure reduction between thermostat 41 inside and outside, and the result is outputed to controller 60.Flow control valve 44 and rate of discharge control valve 45 are magnetic valves, the control signal control of the stroke origin self-controller 60 of each valve.Controller 60 is controlled according to the pressure reduction that differential manometer 43 detects, so that regulate the flow of the air that is passed through by flow control valve 44 and rate of discharge control valve 45, makes the internal pressure of thermostat 41 equal external pressure or a little more than external pressure.Described internal pressure preferably is set to a little more than external pressure, and the extraneous air that has the temperature and humidity that is different from desired value with prevention flows into thermostat 41.
(cold-spot hygrometer)
Cold-spot hygrometer 46 detects the dew point of the atmosphere of thermostat 41 inside, and the result is sent to controller 60.Dew point can be calculated by the internal temperature and the humidity of thermostat, therefore hygrothermograph can be installed replace cold-spot hygrometer 46, can calculate dew point by its output.
Because dew point and absolute humidity (mixing ratio) have the relation shown in Figure 15 and 16, dew point can be calculated after obtaining absolute humidity.
Similarly, according to the relation between dew point and relative humidity shown in Figure 17, dew point can be calculated after obtaining relative humidity.Relative humidity is represented the percentage of the saturation capacity of the steam in the gas by the steam in the gas.
(air regulator)
(controller)
Remove outside the control of internal pressure of above-mentioned thermostat 41, controller 60 is also controlled the dew point of the atmosphere of thermostat 41 inside.That is, controller 60 calculates dew point and saturation temperature by the output of cold-spot hygrometer 46, and for example temperature control is carried out in PID (proportional-integral-differential) control, humidity is controlled or their combination control to use control method, so that dew point is more than 9 ℃ or 9 ℃.
(liquid jet mechanism)
The sectional view of the liquid jet mechanism 50 that Figure 12 gets along nozzle.
For convenience of description, show the tip portion of nozzle 51 with the direction that makes progress in Figure 12, nozzle 51 is towards horizontal direction or towards the below, preferably vertically downward during still actual the use.
(nozzle)
The plate portion of nozzle 51 and nozzle plate 56c forms an integral body, and installs perpendicular to the flat horizontal surface of nozzle plate 56c.When droplet was injected, nozzle 51 was used for leading along the receiving surface (surface that droplet falls) perpendicular to carrier K.Nozzle 51 has the fluid passage 52 of a nozzle interior that 51 center is passed through from tip portion along nozzle.
Illustrate in greater detail nozzle 51 now.Diameter in the opening diameter of tip portion and nozzle fluid passageway 52 in nozzle 51 is identical, and they have minimum diameter, as mentioned above.Specifically, for example, the internal diameter of nozzle fluid passageway 52 is set to 25 microns or littler, preferably, more preferably be 10 microns or littler, be preferably 8 microns or littler again less than 20 microns, especially preferably less than 4 microns or littler, be set to 1 micron in the present embodiment.The external diameter of the tip portion of nozzle 51 is set to 2 microns, and the diameter of the root of nozzle 51 is 5 microns, and the height of nozzle 51 is set to 100 microns.Nozzle is formed and is approximately frustoconical.The internal diameter of nozzle preferably is set to larger than 0.2 micron.Simultaneously, the height of nozzle 51 can be 0 micron.That is, nozzle 51 can be configured has the height identical with nozzle plate 56c, sprays the lower surface place that opening can be formed on flat nozzle plate 56c simply, arrives solution cavity 54 by nozzle fluid passageway 52.
In Figure 12,56 of jet head liquids have a nozzle 51, but can provide a plurality of nozzles 51.When providing a plurality of nozzle 51, each nozzle 51 preferably has jetelectrode 58, service duct 57 and solution cavity 54 individually.
(solution feeding unit)
The supply pressure that the transfer pump utilization keeps (is not seen Figure 13 A) to the tip portion supply solution of nozzle 51 so that solution can not overflow outside the tip portion.
Transfer pump comprises such housing: it utilizes because the pressure reduction that the position that is provided with between jet head liquid and cassette for supplying causes, and can be constituted and independent solution feeding unit is not provided by the solution feed path.Though relevant with design, basically when starting when solution is provided for jet head liquid pump start working, to spray liquid from injector head 56.Solution is supplied according to the injection of liquid, makes in the volume change of injector head 56 inside and the pressure optimization of transfer pump.
(injection electric feeding unit)
Injection electric feeding unit 35 comprises the jetelectrode 58 at the boundary position place between the fluid passage 52 that is provided at solution cavity 54 and jet head liquid 56 inside, is used to provide injection electric; Bias generator 30 is used for providing Dc bias consistently to jetelectrode 58; And injection electric source 31, be used for to jetelectrode 58 be provided at superpose on the bias voltage be used to spray required pulse voltage.
The bias voltage that is produced by bias generator 30 is provided for solution always on such degree, that is, make solution not be ejected, and so as to reducing the voltage that will apply in advance when spraying, and improves the response of spraying.
31 in injection electric source just provides the pulse voltage that is superimposed upon on the bias voltage when sprayed solution.This pulse voltage is provided with like this, makes the voltage V of stack satisfy the condition of being represented by following formula (1):
γ wherein: the surface tension of solution (N/m), ε
0: permittivity of vacuum (F/m), d: nozzle diameter (m), h: the distance between nozzle and the carrier (m), k: the proportionality constant (1.5＜k＜8.5) that depends on nozzle form.
As an example, when bias voltage is DC 300V, when pulse voltage was 100V, the voltage of stack was 400V when spraying.
(jet head liquid)
Bottom 56a is made by the resin or the pottery of silicon substrate or high insulation.On bottom, be formed with soluble resin bed, remove other parts outside the given pattern forming service duct 57 and solution cavity 54, and on the part that is removed, form the resin bed of insulation.The resin bed of this insulation becomes fluid channel layer 56b.Above the resin bed of insulation, form jetelectrode 58 by plating conductive material (for example NiP), and above this electrode and then form the photoresist resin bed of insulation.This photoresist resin bed will become nozzle plate 56c, make this resin bed have the thickness that the height of nozzle 51 is taken into account.Utilize beam methods or fly (thousand part per trillion) second laser the photoresist resin bed of this insulation is carried out photoetching to form nozzle form.Nozzle fluid passageway 52 also is formed by photoetching and development.Then, remove along the soluble resin layer of service duct 57 and solution cavity 54, so just make jet head liquid 56 to form service duct 57 and solution cavity 54.
Wherein, specifically, the material of nozzle plate 56c and nozzle 51 can be an insulating materials, for example epoxy resin, PMMA, phenol, soda-lime glass, quartz glass etc.; Semiconductor, for example silicon; Perhaps conductor, for example Ni, SUS etc.But, when nozzle plate 56c and nozzle 51 are made by conductor, the top sides edge of the tip portion of nozzle 51 at least, preferably the periphery of tip portion will cover dielectric film.When nozzle 51 is made by insulating materials or made by the dielectric film on the surface that covers tip portion, can suppress electric current leakage when injection electric puts on solution effectively from the nozzle tip part to comparative electrode 23.
The nozzle plate 108 that comprises nozzle 51 can have repellency (for example nozzle plate 108 is made by fluorine-containing resin), perhaps (for example make by the moisture film of scolding with repellency at the superficial layer of nozzle 51, the superficial layer of nozzle plate 108 is made by metal film, and by utilize metal or scold water-resin to carry out the eutectoid plating and above metal film, form scold water layer).Wherein the feature of repellency is to repel liquid.By scolding method for treating water, can control the repellency of nozzle plate 108 according to liquid selective.As scolding method for treating water, that can mention has: anion or or the electro-deposition of cationic fluorochemical resin; The topical application of fluoropolymer, silicones, dimethyl silicone polymer; Sintering method; The eutectoid deposit of fluoropolymer; The vapor deposition of non-crystaline amorphous metal plated film; Adhering to of organo-silicon compound, fluorine-containing organo-silicon compound and analog thereof, they are mainly made by dimethyl silicone polymer, described dimethyl silicone polymer is that the plasma polymerization effect by the plasma CVD method obtains, and use therein monomer is a HMDO.
(comparative electrode)
In liquid jet mechanism 50, because nozzle 51 is minimum, concentrate at the electric field of the tip portion of nozzle 51 to make electric field be enhanced, so droplet can spray without inducing of comparative electrode 23, but preferably induce by the electrostatic force between nozzle 51 and the comparative electrode 23.In addition, this structure makes it possible to by making comparative electrode 23 ground connection that the electric charge of charged droplet is released.
(spraying of the droplet that is undertaken by liquid jet mechanism)
Below with reference to Figure 12 to Figure 13 B explanation spraying in liquid jet mechanism 50.
Solution is supplied to nozzle interior fluid passage 52, and in this state, bias generator 30 provides bias voltage by jetelectrode 58 to solution.This makes that solution can be charged and form recessed curved liquid (Figure 13 A) at the tip portion of nozzle 51.
Then, when the 31 supply ejection pulse voltage of injection electric source, the tip portion of solution directional nozzle 51, this forms the curved liquid of the projection of outwards protruding by means of the caused electrostatic force of the electric field of the tip portion that concentrates on nozzle 51.Electric field concentrates on the summit of the curved liquid of this projection, thereby the surface tension of resistance solution finally arrives comparative electrode side (Figure 13 B) to droplet ejection.
(overall operation of liquid injection device)
Carrier K is carried on the comparative electrode 23 of liquid jet mechanism 50 of thermostat 41 inside.At this moment, according to the testing result of differential pressure gauge 43, controller 60 control flow control valve 44 and rate of discharge control valves 45, with regulation thermostat 41 pressure inside a little more than external pressure.Air regulator 70 is operated the air with circulation thermostat 41 inside, and when the dew point that is provided by cold-spot hygrometer 46 is lower than 9 ℃, controller 60 by means of air regulator 70 heat with humidification dew point be adjusted to 9 ℃ or more than.
In this atmosphere, carry out the spraying of droplet by above-mentioned liquid jet mechanism 50.
(effect of present embodiment)
Because little footpath of nozzle, because low nozzle conductibility, can easily realize reducing the control of the injection flow of time per unit, and realize having the injection of the droplet of enough little diameter (being 0.8 micron under these conditions).
In addition, because the droplet that sprays is charged, even make that steam pressure also is reduced for droplet, thereby by suppressing the loss that evaporation reduces the droplet quality, this has stablized flight, and stops the landing precision of droplet to reduce.
In addition, in liquid injection device 10, because the dew point of the atmosphere of controller 60 regulation thermostats 41 inside be 9 ℃ or more than, the electric charge of droplet that has quickened deposition makes and suppresses by the caused electric field effects of the electric charge of the lip-deep droplet that is deposited on carrier K from the leakage of carrier surface.This makes it possible to improve the positional precision that droplet lands, and makes it possible to suppress and stablize the size change of the point of the droplet that sprays and deposition.
In addition, according to the material of carrier K itself, the material of surface-treated layer or the coating of surfactant, in the zone that droplet lands on the surface of carrier K, sheet resistance is set to 10 at least
9Ω/cm
2Therefore, the electric charge of droplet that more quickens deposition is from the leakage of carrier surface, suppresses to be deposited on the electric field effects that the electric charge of the lip-deep droplet of carrier K causes better.This makes it possible to further to improve the positional precision that droplet lands, and also makes it possible to suppress better and stablize the size change of the point of the droplet that sprays and deposition.
(other)
In order to obtain wet (electro-wetting) effect of electricity, an electrode can be provided on the outer surface of nozzle 51, an electrode perhaps is provided on the inner surface of nozzle interior fluid passage 52, be insulated film on this internal electrode and cover.When voltage was added on this electrode, for by jetelectrode 58 it being applied the solution of voltage, electric wet effect can be improved the wettable of the inner surface of fluid passage 52, thereby made it possible to convection cell path 52 supply solution and improvement injection response smoothly.
In injection electric feeding unit 35, under the condition that applies bias voltage consistently, apply pulse voltage to trigger the injection of droplet, but can use such structure: apply consistently to have and be used to spray the alternating voltage of required amplitude or continuous square-wave voltage, and spray by the height of inversion frequency.Because droplet ejection need make solution charged, when applying frequency and exceed the injection electric that makes the charged speed of solution, solution is not injected, by being frequency inverted to make solution can fully charged frequency cause the injection of solution.Therefore, the injection of solution can be controlled like this: when injection is stopped, apply the high injection electric of frequency that its frequency ratio can be sprayed, and only just frequency is reduced to the frequency band that can spray when spraying.In this case, the current potential itself that puts on solution does not change, but makes further improvement time response, and the result makes the landing precision of improving droplet.
In above-mentioned jet head liquid 56, the material of nozzle 51 itself insulate, and the breakdown voltage of the nozzle of formation can be 10kV/mm or higher, is preferably 21Kv/mm or higher, more preferably is 30kV/mm or higher.These situations also can realize and nozzle 51 effect much at one.
(forming the application of the wiring pattern of circuit board)
Above-mentioned liquid injection device 10 can be used for forming the wiring pattern of circuit board.
In this case, the sticky particle that the solution of injected equipment 20 to spray comprises multiple particulate therein or has viscosity is used to interconnect and forms electronic circuit, and comprises dispersant and be used to disperse described particulate or sticky particle.
About particulate, can use the particle of metal and metallic compound.About fine grained, the fine grained that conduction is arranged that can mention, Au for example, Pt, Ag, In, Cu, Ni, Cr, Rh, Pd, Zn, Co, Mo, Ru, W, Os, Ir, Fe, Mn, Ge, Sn, Ga, and analog., during the metal fine of Ag or Cu, then be preferred, particularly because can realize having the circuit of low resistance and high corrosion resistance as use Au.About the fine grained of metallic compound, that can mention has: the fine grained of conduction, ZnS for example, CdS, Cd
2SnO
4, ITO (In
2O
3-SnO
2), RuO
2, TrO
2, O
sO
2, MoO
2, ReO
2, WO
2, YBa
2Cu
3O
7-x, and their analog; By adding the fine grained that thermal reduction presents electric conductivity, ZnO for example, CdO, SnO
2, InO
2, SnO
4, and their analog; The semiconductor fine grained, Ni-Cr for example, Cr-SiO, Cr-MgF, Au-SiO
2, AuMgF, PtTa
2O
5, AuTa
2O
5Ta
2, Cr
3Si, TaSi
2, and their analog; The fine grained of conduction, for example SrTiO
3, BaTiO
3, Pb (Zr, Ti) O
3, and their analog; And semiconductor fine grained, for example SiO
2, Al
2O
3, TiO
2, and their analog.
About sticky particle, that can mention has: the binder of thermosetting resin type, the binder of rubber-type, the binder of emulsion-type, polycyclic aromatic hydrocarbons (PAH), the binder of ceramic mould, and their analog.
Dispersant is as fine grain protective colloid.About this dispersant, the operable block copolymer that polyurethane and alkanolamine are arranged, polyester, polyacrylonitrile, and their analog.
According to the affinity selective solvent of particle, specifically, about solvent, that can mention has: with the solvent of water as main component, PGMEA, cyclohexylamine, (butyl)-carbitol acetic acid esters, 3-dimethyl-2-imidazoline BMA, (propylene monomethyl acetate) is the solvent of main component with propyleneglycol monomethyl acetates, and their analog.
Provide below and be used for the explanation of preparation example such as dissolution of metals particulate as the method for the aqueous solution of particulate.At first, at metal ion source for example in gold chloride and the silver-colored nitrate, the polymer of dissolving water soluble, and when stirring, add alkanol, for example dimethylaminoethanol.Tens seconds in the time of a few minutes, metal ion is reduced, the deposition average particulate diameter is equal to or less than the metal fine of 100 nanometers.Then, utilize for example hyperfiltration technology of certain methods to remove chlorion and nitrate ion from contain this sedimentary solution, the solution of gained is concentrated and is dry.Solution with the water support of method for preparing can dissolve with being stabilized, and and be used for the binding agent that collosol and gel is handled, for example water, solvent, tetraethoxysilane based on alcohol, triethoxysilane and their analog are mixed.
The following describes to be used to prepare and have the method for metal fine as the solution of the fine grain oil support of dissolving.
At first, in water miscible organic solvent dissolved oil polymer soluble in the acetone for example, this solution and the solution of supporting with the water of method for preparing are mixed.Originally the gained mixture is a kind of heterogeneous system, and but, by when stirring this mixture being added alkanol, metal fine just precipitates in oil phase, is the form of disperseing in polymeric material.By solution being washed, concentrate and dry, obtain the solution that oil is supported.Solution with the oil support of method for preparing can dissolve with being stabilized, and mixes mutually with solvent, and described solvent for example is aromatic solvent, ketone, ester and their analog; Polyester; Epoxy resin; Acrylic resin; Polyurethane resin and their analog are mixed.
When forming wiring pattern, at first, coating surface activating agent on the surface of the plate of making as the glass of substrate will be formed for the surface (formation of surface-treated layer is handled) of wiring pattern thereon.As this surfactant, consider later removal, preferably use aforesaid low molecule agent.Specifically, in the present embodiment, applying antistatic agent C olcoat200 (trade mark of Colcoat company), is 10 so as to the sheet resistance of the surface-treated layer that makes formation
9Ω/cm
2
Then, plate is arranged in the thermostat 41, and by liquid jet mechanism 50 droplet ejection to form wiring pattern (processing uses droplet ejection).At this moment, use especially Silver Nano Paste (trade mark of Harima chemical company) as droplet to form the wiring pattern of 10 microns of live widths and long 10 millimeters.
After droplet ejection, the solvent of solution is evaporated, after this or simultaneously, under 200 ℃ plate heating 60 minutes (pattern is fixing to be handled).
After this, the glass plate of having finished the formation of wiring pattern thereon utilizes pure water to be cleaned 10 minutes (surface-treated layer is removed and handled).Utilize this to handle, remove the surface-treated layer of the Colcote 200 outside the position of deposition and washed off and remove.The sheet resistance of part of wherein having removed the glass pane surface of surface-treated layer becomes 10
14Ω/cm
2
That is, the part except wiring pattern has high insulating capacity, and this makes it possible to form thin high density wiring pattern and is not short-circuited or analogue.
[second embodiment]
Below with reference to the liquid jet mechanism 101 of Figure 18 explanation according to second embodiment of electrostatic attraction type liquid injection device.Figure 18 is the schematic diagram of the major part of express liquid injection equipment 101.Nozzle 51 be expressed as with mode identical when reality is used towards below.Above-mentioned liquid jet mechanism 50 components identical of its neutralization are represented with identical label, and are omitted the explanation of its repetition.
Suppose that liquid jet mechanism 101 is not used in the thermostat 41 that can be set to suitable dew point, these are different with above-mentioned liquid jet mechanism 50.Therefore, the diverse ways that uses in liquid jet mechanism 101 uses and the liquid jet mechanism 50 suppresses the influence from the uneven Potential distribution on the carrier surface.
As shown in figure 18, liquid jet mechanism 101 comprises the jet head liquid 56 that is used for spraying towards the carrier 102 of insulation electrifiable liquid, and injection electric applying unit with charhing unit 104, this charhing unit is used to utilize voltage signal to drive injector head 56 to carry out spraying, also is used to drive injector head 56 so that insulating carrier 102 is charged.
(insulating carrier)
Insulating carrier 102 is made by the insulating materials with very high resistivity (dielectric), and the surface resistivity of surperficial 102a is preferably 10
10Ω/cm
2Or more than, more preferably be 10
12Ω/cm
2Or more than.For example, insulating carrier is made by following material: lacca, japan, phenolic resins, urea resin, polyester, epoxy resin, silicone, polyethylene, polystyrene, flexible Corvic, hard Corvic, cellulose acetate, PETG, Teflon (trade mark), natural rubber, flexible rubber, hard rubber, butyl rubber, neoprene, silicon rubber, muscovite, micanite, micarex, asbestos board, porcelain material, talcum, alumina ceramics, titanium oxide ceramics, soda-lime glass, pyrex (bolosilicateglass), quartz glass, and their analog.Wherein insulating carrier 102 can have the shape of plate, dish, sheet or pedestal.
Wherein insulating carrier 102 can have the shape of plate, dish, sheet or pedestal.
Insulating carrier 102 and conductive material be earth connection, lead or electrode isolation for example, and is in electric quick condition.Thereby surperficial 102a can or be discharged by charged (not having the restriction of positive and negative charge).
Resistivity is considered on other surface except the surperficial 102a of carrier 102, can for example earth connection, wiring, electrode contact with conductive component.Wiring or electrode can be formed on the part of surperficial 102a rather than all on.That is wiring,, electrode or other conductive component can be formed on the surface 102 except the part of deposit liquid.Aforesaid comparative electrode 23 can be provided at the back side (being the reverse side of carrier 102 for injector head 56) of carrier 102.
(injection electric applying unit) with charhing unit
Injection electric applying unit with charhing unit 104 comprises burning voltage applying portion 104a, is used for jetelectrode 58 is applied with respect to one of ground stable voltage.Wherein, described stable voltage is a voltage that keeps constant potential.This stable voltage can be positive or negative.The value of the voltage that this is stable is represented by Vs (V).This stable voltage Vs is set up according to the surface potential (with respect to ground) of surperficial 102a, and surperficial 102a is the surface of injector head 56 sides of carrier 102.That is, when the surface potential of measurement in surperficial 102a distributes, by V
Max(V) provide maximum, by V with respect to the earth's surface current potential
Min(V) minimum of a value (V of presentation surface current potential
Min＜V
Max), use V
| max-min|(V) expression maximum V
MaxWith minimum of a value V
MinBetween potential difference, use V
Mid(V) expression maximum V
MaxWith minimum of a value V
MinBetween intermediate value, burning voltage applying portion 104a applies the stable voltage Vs that satisfies following formula (A) to jetelectrode 58:
V
s≤V
mid-V
|max-min|，V
mid+V
|max-min|≤V
s (A)
Wherein, potential difference V
| max-min|By maximum V
MaxWith minimum of a value V
MinAccording to formula (B) expression, intermediate value V
MidSatisfy following formula (C):
V
|max-min|＝|V
max-V
min| (B)
V
mid＝(V
max+V
min)/2 (C)
The surface potential of insulating carrier 102 is current potentials of using electrostatic potential instrumentation amount before burning voltage applying portion 104a applies stable voltage Vs to jetelectrode 58.The waveform of the stable voltage that is applied by burning voltage applying portion 104a is shown in Figure 19 A and 19B.In Figure 19 A and Figure 19 B, trunnion axis represents to put on the voltage of jetelectrode 58, and vertical axis is represented elapsed time when jetelectrode 58 is applied voltage.When as Figure 19 A, when the stable voltage shown in the 19B was stabilized voltage application portion and divides 104a to apply, just produce electric field, this electric field made the surperficial 102a of carrier 102 charged.Simultaneously, in Figure 18, the positive negative direction of burning voltage applying portion 104a can be put upside down.
(using the operation of the liquid jet method and this liquid jet mechanism of this liquid jet mechanism)
Before the burning voltage applying portion 104a by the injection electric applying unit with charhing unit 104 applies stable voltage, distribute with the surface potential of electrostatic potential instrumentation amount in the surperficial 102a of carrier 102, being distributed by surface potential obtains the maximum V of surface potential
MaxWith minimum of a value V
MinFor maximum V
MaxWith minimum of a value V
Min, stable voltage Vs (B), (C) is obtained by formula (A).
When carrier travel mechanism moves insulating carrier 102, head moving mechanism moving liquid injector head 56.Wherein, the two all is moved carrier 102 and injector head 56, perhaps removable wherein any one.Almost in carrier 102 and injector head 56 setting in motions, the voltage that is applied by burning voltage applying portion 104s is set to stable voltage Vs, and this voltage Vs is applied in jetelectrode 58.When this stable voltage puts on jetelectrode 58, between the tip portion of nozzle 51 and carrier 102, produce electric field, so as to making injection opening that liquid forms from the tip portion at nozzle 51 when carrier 102 sprays.As Figure 19 A, shown in the 19B, when jetelectrode 58 is represented as the function V (T) of time T with respect to the voltage on ground, voltage V (T) is constant stable voltage Vs, and always satisfy the Vs in the formula (A), when waveform is held when putting on jetelectrode 58 by the stable voltage Vs shown in the block curve among Figure 19 A, liquid is kept spraying continuously, and 104a stops to apply voltage up to the burning voltage applying portion.When keeping liquid to be sprayed continuously, at least one of carrier 102 and injector head 56 is moved (injector head 56 relatively scans carrier 102), therefore forms the pattern of the line that is made of liquid on the surperficial 102a of carrier 102.Replacement is by the waveform shown in the curve of Figure 19 A, and the stable voltage Vs with waveform of being represented by the block curve shown in Figure 19 B can divide 104a to put on jetelectrode 58 by stable voltage application portion.
When nozzle 51 during by point in the surperficial 102a of carrier 102, this is charged by means of the electric field that is produced by jetelectrode 58, thereby the surface potential of this point is changed.Though the surface potential at the moment surface 102a that measures changes, satisfy formula (A) because put on the stable voltage Vs of jetelectrode 58, any point in surperficial 102a is changed into constant current potential, this makes any point in surperficial 102a be changed is a constant voltage, and to make surface potential in surperficial 102a distribute be uniform.The amount of the liquid that this uniformity make to be sprayed is uniformly, and can avoid the ejection failure with the liquid of spot correlation.
In addition, the surface potential that can not measure on the surperficial 102a of carrier 102 distributes, and in this case, can apply the enough big stable voltage that surpasses a predetermined maximum surface potential on the surperficial 102a to jetelectrode 58, perhaps jetelectrode 58 be applied enough little stable voltage less than a predetermined minimal surface current potential.
[the 3rd embodiment]
Below with reference to the liquid jet mechanism 201 of Figure 20 explanation according to the 3rd embodiment of electrostatic attraction type liquid injection device.
(difference)
As shown in figure 20, liquid jet mechanism 201 is used by the outside at thermostat 41, as in liquid jet mechanism 101, and comprises jet head liquid 56, and the injection electric applying unit with charhing unit 204.Jet head liquid 56 have with second embodiment in identical structure, but have the different of the injection electric applying unit of charhing unit 204 and second embodiment.Apply stable voltage though have the injection electric applying unit of charhing unit 104 in a second embodiment, the injection electric applying unit that has charhing unit 204 in the 3rd embodiment applies pulse voltage.
Injection electric applying unit with charhing unit 204 comprises burning voltage applying portion 204a, is used for jetelectrode 58 is applied constant bias V with respect to ground always
1(V) (bias voltage V
1Can be positive, negative or zero), and be used for jetelectrode 58 applied and be superimposed upon bias voltage V
1On pulse voltage V
2(V) (pulse voltage V
2Can be positive or negative) pulse voltage applying portion 204b.When jetelectrode 58 was represented as the function V (T) of time T with respect to the voltage on ground, when pulse voltage applying portion 204b was in cut-off state, voltage V (T) was constant bias voltage V
1, when pulse voltage applying portion 204b was in conducting state, then V (T) equaled (bias voltage V
1+ pulse voltage V
2).
Wherein, unit 204 is provided with like this, feasible bias voltage V at least
1Or (bias voltage V
1+ pulse voltage V
2) in any one satisfy voltage Vs in the formula (A).
Specifically, as bias voltage V
1Be set to larger than minimum of a value V
MinAnd less than maximum V
MaxThe time, the waveform of the voltage V (T) of jetelectrode 107 is followed the block curve among Figure 21 A or the 21B.In Figure 21 A and 21B, ordinate is represented voltage, and abscissa is represented the time.The waveform of Figure 21 A is represented pulse voltage V
2Be set to positive situation, the waveform of Figure 21 B is represented pulse voltage V
2The situation that is set to bear.In this case, bias voltage V
1Do not satisfy the voltage Vs in the formula (A), so pulse voltage V
2Feasible (bias voltage V must be set like this
1+ pulse voltage V
2) satisfy the voltage Vs in the formula (A).
In the curve of Figure 21 A, the maximum of voltage V (T) is (bias voltage V
1+ pulse voltage V
2, minimum of a value is V
1, and (bias voltage V
1+ pulse voltage V
2-intermediate value V
Mid) greater than (bias voltage V
1-intermediate value V
Mid).In the curve of Figure 21 B, the maximum of voltage V (T) is greater than intermediate value V
MidBias voltage V
1, intermediate value is (bias voltage V
1+ pulse voltage V
2), it is lower than intermediate value V
MidIn the curve of Figure 21 B, (intermediate value V
Mid-bias voltage V
1-pulse voltage V
2) greater than (bias voltage V
1-intermediate value V
Mid).
As bias voltage V
1Be set to larger than maximum V
MaxAnd pulse voltage V
2Be timing, the waveform of voltage V (T) is shown in the solid line of Figure 22 A.As bias voltage V
1Be set to less than minimum of a value V
MinAnd pulse voltage V
2When being negative, the waveform of voltage V (T) is shown in the solid line of Figure 22 B.In Figure 22 A and 22B, ordinate is represented voltage, and abscissa is represented the time.In Figure 22 A and 22B, as bias voltage V
1When satisfying the voltage Vs in the formula (A), can give pulse voltage V
2Any value, but as bias voltage V
1When not satisfying the Vs in the formula (A), pulse voltage V
2Feasible (bias voltage V must be set like this
1+ pulse voltage V
2) satisfy the voltage Vs in the formula (A).
In the curve of Figure 22 A, the maximum of voltage V (T) is (bias voltage V
1+ pulse voltage V
2), maximum is V
1, and (bias voltage V
1+ pulse voltage V
2-intermediate value V
Mid) greater than (bias voltage V
1-intermediate value V
Mid).In the curve of Figure 22 B, the maximum of voltage V (T) is bias voltage V
1, (bias voltage V
1+ pulse voltage V
2), and (intermediate value V
Mid-bias voltage V
1-pulse voltage V
2) greater than (intermediate value V
Mid-bias voltage V
1).
As bias voltage V
1Be set to larger than maximum V
MaxAnd pulse voltage V
2When being negative, the waveform of voltage V (T) is shown in the block curve of Figure 23 A.As bias voltage V
1Be set to less than minimum of a value V
MinAnd pulse voltage V
2Be timing, the waveform of voltage V (T) is shown in the block curve of Figure 23 B.In Figure 23 A and 23B, ordinate is represented voltage, and abscissa is represented the time.In Figure 23 A and 23B, as bias voltage V
1When satisfying the voltage Vs in the formula (A), can give pulse voltage V
2Any value, but as bias voltage V
1When not satisfying the Vs in the formula (A), pulse voltage V
2Feasible (bias voltage V must be set like this
1+ pulse voltage V
2) satisfy the voltage Vs in the formula (A).
In the curve of Figure 23 A, the maximum of voltage V (T) is V
1, it is greater than intermediate value V
Mid, minimum of a value is (bias voltage V
1+ pulse voltage V
2), it is less than intermediate value V
MidOr in the curve of Figure 23 A, (bias voltage V
1-intermediate value V
Mid) and (intermediate value V
Mid-bias voltage V
1-pulse voltage V
2) in any one all greater than other one.On the other hand, in the curve of Figure 23 B, the maximum of voltage V (T) is (bias voltage V
1+ pulse voltage V
2), it is greater than intermediate value V
Mid, minimum of a value is V
1, it is less than intermediate value V
MidOr in the curve of Figure 23 B, (bias voltage V
1+ pulse voltage V
2-intermediate value V
Mid) and (intermediate value V
Mid-bias voltage V
1) in any one all greater than other one.
(use the liquid jet method of this liquid jet mechanism, and the operation of this liquid jet mechanism)
Before applying voltage by the burning voltage applying portion 204a of injection electric applying unit and pulse voltage applying portion 204b with charhing unit 204, utilize the interior surface potential of surperficial 102a of electrostatic potential instrumentation loading gage body 102 to distribute, and obtain maximum V by the surface potential distribution
MaxWith minimum of a value V
MinFor this maximum V
MaxWith minimum of a value V
Min,, (B), (C) obtain bias voltage V by expression formula (A)
1With pulse voltage V
2, feasible bias voltage V at least
1Or (bias voltage V
1+ pulse voltage V
2) in any one satisfy voltage Vs in expression formula (A).
When carrier travel mechanism moves insulating carrier 102, head moving mechanism moving liquid injector head 56.Wherein, the two all is moved carrier 102 and injector head 56, and perhaps wherein any one is moved.Almost in carrier 102 and injector head 56 setting in motions, the stable voltage that is applied by burning voltage applying portion 204a is set to bias voltage V
1, and bias voltage V
1Put on jetelectrode 58.When any one in carrier 102 or injector head 56 moves at least, jetelectrode 58 applied be superimposed on bias voltage V
1On pulse voltage V
2As (bias voltage V
1+ pulse voltage V
2) when being applied on the jetelectrode 58, liquid sprays towards carrier 102 from the injection opening that the tip portion at nozzle 51 forms as droplet, thereby forms a point by the droplet that lands on carrier 102.Apply pulse voltage V repeatedly
2The time, in carrier 102 and the injector head 56 at least one moved, therefore, on the surperficial 102a of carrier 102, form the pattern that constitutes by point.
When passing through on certain point in the surperficial 102a of nozzle 51 at carrier 102, the electric field charging that this is produced by jetelectrode 58, thereby the surface potential of point changes.Though the surface potential of surface 102a is in each some place difference, because bias voltage V when measuring
1Or (bias voltage V
1+ pulse voltage V
2) at least one satisfy expression formula (A), any point in surperficial 102a all becomes constant current potential, this makes any point in the surperficial 102a all change into constant voltage, and makes surface potential in the surperficial 102a distribute to become uniformly.The amount of the liquid that this uniformity make to be sprayed is uniformly, and makes and avoid liquid ejection failure with spot correlation.
[the 4th embodiment]
Below with reference to the liquid jet mechanism 301 of Figure 24 explanation according to the 4th embodiment of electrostatic attraction type liquid injection device.
(difference)
As shown in figure 24, liquid jet mechanism 301 and the same outside that is used in thermostat 41 in liquid jet mechanism 101, and it comprises jet head liquid 56.Liquid jet mechanism 301 also comprises injection electric applying unit 304, only be used for when atomizing of liquids jetelectrode 58 is applied impulse waveform with respect to the injection electric on ground, and as the alternating voltage applying unit 305 of static elimination unit, by before atomizing of liquids, jetelectrode 58 being applied the alternating voltage with the center that is set to 0V, be used to eliminate the electric charge on the surperficial 102a of carrier 102.Injection electric applying unit 304 comprises pulse voltage applying portion 304a.The injection electric V that is applied by pulse voltage applying portion 304a is even as big as nozzle 51 atomizing of liquids from injector head 56, and this voltage is obtained by following formula (1) in theory.Utilize this injection electric, between nozzle 51 and insulating carrier 102, produce electric field, with injection opening atomizing of liquids from nozzle 51.
γ wherein: the surface tension of liquid (N/m), ε
0: the capacitivity of permittivity of vacuum (F/m), d: nozzle inside diameter (injection opening diameter) (m), h: the distance between nozzle and the carrier (m), k: the proportionality constant (1.5＜k＜8.5) that depends on nozzle form.
(using the operation of the liquid jet method and this liquid jet mechanism of this liquid jet mechanism)
Alternating voltage applying unit 305 work and injection electric applying unit 304 is not worked at first, be not provided under the state of liquid to nozzle 51.Then, under the state of alternating voltage applying unit 305 work, when carrier travel mechanism moves insulating carrier 102, head moving mechanism moving liquid injector head 56.Wherein, the two all is moved carrier 102 and injector head 56, and perhaps wherein any one is moved.
By jetelectrode 58 is applied alternating voltage, the surperficial 102a of carrier 102 is being discharged with nozzle 51 relative parts.At least any one in carrier 102 or the injector head 51 is moved, and makes that whole surperficial 102a is discharged, thereby makes the surface potential of surperficial 102a be evenly distributed.
Then, alternating voltage applying unit 305 quits work, and carrier travel mechanism and head moving mechanism also quit work.After this, liquid is provided for fluid chamber 111 and nozzle fluid passageway 113.Then, carrier travel mechanism is mobile vehicle 102 once more, and also moving liquid injector head 56 of head moving mechanism.Wherein, the two all is moved carrier 102 and injector head 56, and perhaps wherein any one is moved.Injection electric applying unit 304 is operated, and when in carrier 102 and injector head 56 at least one move, applies injection electric with predetermined timing by 304 pairs of jetelectrodes 58 of injection electric applying unit.When jetelectrode 58 was applied injection electric, liquid sprayed towards carrier 102 from the injection opening that the tip portion at nozzle 51 forms as droplet, so that formed a little by the droplet that lands on carrier 102.Like this, when repeatedly applying injection electric, at least one in carrier 102 and the injector head 56 is moved, and therefore forms the pattern that is made of point on the surperficial 102a of carrier 102.At this, because being discharged and have uniform surface potential, the surperficial 102a of carrier 102 distributes, make that the emitted dose of liquid is constant, and can avoid the liquid ejection failure relevant with the position.
In the superincumbent explanation, jetelectrode 58 is applied the object of alternating voltage by alternating voltage applying unit 305, also is used as the electrode that is used to eliminate static.But can near nozzle 51, provide another electrode as the object that applies alternating voltage, be used to eliminate static (another electrode preferably needle-like).
Injection electric applying unit 304 applies the injection electric of impulse waveform with predetermined timing, but also can be always jetelectrode 58 be applied constant voltage (that is, stable voltage).In this case, as long as keep injection electric to be applied on the jetelectrode 58, nozzle 51 just continues atomizing of liquids.
[the 5th embodiment]
Below with reference to the liquid jet mechanism 401 of Figure 25 explanation according to the 5th embodiment of electrostatic attraction type liquid injection device.
(difference)
As shown in figure 25, liquid jet mechanism 401 also comprises jet head liquid 56, and injection electric applying unit 304, as in the liquid jet mechanism 301.
Liquid jet mechanism 401 replaces alternating voltage applying unit 305, also comprises the Xelminator 405 that the surperficial 102a with insulating carrier 102 relatively is provided with, and is used to eliminate the static of surperficial 102a.Xelminator 405 can be provided like this, makes it with injector head 56 motion, itself and injector head 56 dividually, along perpendicular to apparent motion from the direction of injector head 56 atomizing of liquids, or fixing and do not move.Xelminator 405 can be a corona discharge type, wherein use the local dielectric breakdown of concentrating the air that causes owing to electric field, it can be the grenz ray irradiation type, wherein use the photoelectron emissions of disperseing photon to cause owing to grenz ray (faint X ray) non-resiliently, it can be ultraviolet irradiation type, wherein use the electronics emission that causes owing to ultraviolet photonic absorption, or the radioactive ray irradiation type, wherein use the ionization that causes by from radioisotopic alpha ray.When Xelminator 405 was corona discharge type, it can be the self discharge type, or applied type by applying voltage that voltage produces corona discharge.In addition, Xelminator 405 is the airless type preferably, and it can not be accompanied by discharge process and produce air-flow.At this, the Xelminator of corona discharge type can not be the ac power frequency type, but high-frequency corona discharge-type preferably, it produces corona discharge by spray point being applied much higher (approximately 30kHz or the higher) high pressure of frequency ratio supply frequency, with cation and the anion that produces many balances well.Preferably make this electrode near insulating carrier 102, can not blow out the air-flow of ionization with the atmosphere of giving carrier 102 ionization by air pressurized.
(use the liquid jet method of this liquid jet mechanism, and the operation of this liquid jet mechanism)
At first, do not providing under the state of liquid to nozzle 51, the whole surperficial 102a of insulating carrier 102 is inoperation injection electric applying unit 304 by Xelminator 405 discharges.This makes that the surface potential of surperficial 102a is uniform.
Then, liquid is supplied to fluid chamber 111 and nozzle fluid passageway 113.Then, carrier travel mechanism moves insulating carrier 102, head moving mechanism moving liquid injector head 56.At this, carrier 102 and injector head 56 can the two all be moved, and perhaps wherein any one is moved.And injection electric applying unit 304 is operated, and when in carrier 102 and injector head 56 at least one be moved, applies injection electric with predetermined timing from 304 pairs of jetelectrodes 58 of injection electric applying unit.When injection electric is added on jetelectrode 58, between nozzle 51 and carrier 102, produce electric field, liquid sprays towards carrier 102 from the injection opening that the tip portion at nozzle 51 forms as droplet, to form point by the droplet that lands on carrier 102.Like this, when repeatedly applying pulse voltage, in carrier 102 and the injector head 56 at least one moved, therefore, on the surperficial 102a of carrier 102, form the pattern that constitutes by point.Wherein, because the surperficial 102a of carrier 102 is discharged, and have uniform surface potential distribution, the amount of the liquid of injection can be constant, and can stop the liquid ejection failure relevant with the position.
Injection electric applying unit 304 still also can apply constant voltage (promptly stable voltage) to jetelectrode 58 at the predetermined injection electric that regularly applies impulse waveform always.In this case, as long as keep jetelectrode 58 is applied injection electric, nozzle 51 just continues atomizing of liquids.
[the 6th embodiment]
Below with reference to the liquid jet mechanism 501 of Figure 26 explanation according to the 6th embodiment of electrostatic attraction type liquid injection device.
As shown in figure 26, liquid jet mechanism 501 also comprises jet head liquid 56, also comprises electrostatic potential meter 512, and it is used to detect the current potential of each point on the surperficial 102a of carrier 102 as the detecting unit with probe 511; Signal generator 513, being used for output pulse signal provides pulse voltage with the jetelectrode 58 to injector head 56; Amplifier 514 is used for amplifying pulse signal from signal generator 513 outputs to offer jetelectrode 58 with given coefficient; Controller 515; And travel mechanism's (not shown), be used for probe 511 is positioned at a plurality of positions that will be sampled on the surperficial 102a of carrier 102; Controller 515 is used for control signal generator 513, it is provided the voltage of signal waveform, at least a portion of the magnitude of voltage of described signal waveform satisfies the voltage Vs (V) of aforesaid expression formula (A), supposes that the maximum and the minimum of a value of surface potential of the insulating carrier of detection is respectively V
Max(V) and V
Min(V).
Utilization towards the surperficial 102a of carrier 102 and and its probe that separates 511, electrostatic potential meter 512 can detect the current potential of a small area of correspondence position.Therefore, in liquid jet mechanism 501, travel mechanism is positioned at probe 511 on each test point, and described test point is numerous point, and they are separated from each other a small parasang, thereby detects the current potential of each point.The current potential of each point that detects is output to controller.Wherein travel mechanism can have and mutually crew-servedly is used for the mobile unit of mobile vehicle 102 and is used for perhaps making carrier move to each point by a traveling probe or carrier along the mobile unit of the direction traveling probe nozzle 511 different with the moving direction of carrier.
Controller 515 is the control circuits with chip of the program that is used for the storage control signal generator.Controller 515 is determined the maximum V of the surface potential of carrier 102 from the output of electrostatic potential meter 512
MaxWith minimum of a value V
MinIn addition, controller 515 uses described V
MaxAnd V
MinBy expression formula (A), (B), (C) calculate the scope of Vs, satisfy the steady state value Vs of this scope with identification.Determine an example of method as this, at condition Vs≤V by expression formula (A)
Mid-V
| max-min|Determine that Vs is by Vs=V under the situation of Vs
Mid-V
| max-min|-a determines (a is the constant that sets in advance).
Controller is the output of control signal generator 513 also, makes that the pulse voltage that puts on jetelectrode 58 can be the Vs that is determined by computing, and this pulse voltage is the output signal by amplifier 514 amplifying signal generators 513.
In liquid jet mechanism 501, above-mentioned processing makes it possible to carry out the injection of droplet by means of suitable pulse voltage, and the measurement of in another is handled, insulating carrier 102 not being carried out formerly, wherein the distribution of the surface potential of carrier is unknown.This processing makes it possible to form point with required size.In addition, repeatedly under the situation of spraying on this carrier 102, the influence of the surface potential of carrier is suppressed, thereby can form uniform point.
In addition, replace the above-mentioned signal generator 513 that is used for voltage pulse output, can use burning voltage applying portion 104a, as shown in figure 18, be used for applying continuously constant voltage.
Replace the above-mentioned signal generator that is used for voltage pulse output 513, also can use injection electric applying unit, as shown in figure 20, be used to apply the pulse voltage that is added on the bias voltage with charhing unit 204.In this case, controller 515 is preferably controlled the injection electric applying unit with charhing unit 204, makes the magnitude of voltage of the stack expression formula (A) that can satisfy condition.
＜application examples 1 〉
(test of carrying out for the relation between the dispersion of the droplet diameter of the sheet resistance that obtains carrier and deposition)
Figure 27 is illustrated in the sheet resistance of carrier and about the chart of the relation between the deviation ratio of dispersion of the diameter of the droplet of deposition.This test is carried out under the following conditions: dew point is 6 ℃; Nozzle has the structure identical with liquid jet mechanism 50, and is made by glass, and nozzle diameter is 1 micron; Distance between the tip portion of nozzle and the carrier K is 100 microns; Each sheet resistance of carrier K is adjusted to 10
14, 10
10, 10
9, 10
8With 10
5Ω/cm
2Each sheet resistance of carrier K is conditioned by following processing: (1) is without coating, (2) apply antistatic agent C OLCOAT P (trade mark, Colcoat company makes), (3) apply antistatic agent C OLCOAT 200 (trade marks, Colcoat company makes), (4) apply antistatic agent C OLCOAT N-103X (trade mark, Colcoat company makes), apply antistatic agent C OLCOAT SP2001 (trade mark, Colcoat company makes).
Use metal cream as solution (Silver Nano Paste
TMHarima chemical company makes), and the identical square wave that uses 350V is as injection electric, injection frequency is 10Hz, and dutycycle is 50%, and the quantity of droplet ejection is 1000 points.Measure the diameter of the droplet of each deposition, calculated the deviation ratio (standard deviation/mean value) of the dispersion of droplet diameter.
According to above-mentioned test, observe: when sheet resistance is reduced to 10
9Ω/cm
2The time, deviation ratio reduces (10 suddenly
9Ω/cm
2The time 1/3 or littler), under the sheet resistance littler than this, the diameter of deposited liquid is stable significantly.
＜application examples 2 〉
(being used to obtain the test of the relation between the deviation ratio of dispersion of droplet diameter of surface potential distribution, injection electric and deposition of dew point, carrier)
Figure 28 is the chart of the relation between the deviation ratio of dispersion of droplet diameter of surface potential distribution, injection electric and deposition of expression dew point, carrier.This test is carried out under the following conditions: environment temperature is 23 ℃; Have structure with liquid jet mechanism 50 identical and be 1 micron nozzle by the diameter that glass is made; Distance between nozzle tip part and the carrier K is 100 microns; Each dew point of the carrier K that glass is made is adjusted to 1,3,6,9,14 and 17 ℃.
(model is 347 to use the electrostatic potential meter
TM, TREK company makes) and each point in the surface of the carrier K that makes for glass, the surface potential of measuring under each dew point distributes.At this, surface potential is measured on each point of 10000 points on the grid, and described grid has the point of 100 vertical points and 100 levels, and these points are spaced apart 3 millimeters along the vertical and horizontal directions.Measurement result is shown in Figure 28, wherein shows the central maximum potential V of 10000 points
Max, the minimum level V in the middle of 10000 points
Min, the difference between maximum potential and minimum level absolute value V
| max-min|And the mean value V of maximum potential and minimum level
Mid
Use metal cream as solution (the Silver NanoPaste that makes by Harima chemical company
TM), and the identical square wave that uses 350V is as injection electric, and injection frequency is 10Hz, dutycycle is 50%, has sprayed 1000 droplet.Measured each saltation point diameter, and calculate the deviation ratio (standard deviation/mean value) of the dispersion of these diameters.
According to above-mentioned experimental observation to: when dew point rose to 9 ℃, deviation ratio reduced (deviation ratio when being 6 ℃ 1/2) suddenly, and when being higher than this dew point, it is stable that the diameter of deposited liquid becomes significantly.
That is, verified, dew point is set to 9 ℃ or higher diameter for the stable droplet that sprays and has significant effect.
Verify the relation between dew point, Potential distribution and injection electric below.Second embodiment and explanation after a while reduce the condition from the influence of the Potential distribution of carrier K side that causes owing to surface distributed and injection electric.That is, work as V
Max, V
Min, V
| max-min|, V
MidWhen satisfying the condition of expression formula (A) (referring to the explanation of second embodiment), then the influence in the Potential distribution of carrier K side is reduced.
When dew point was 1 and 3 ℃, injection electric Vs did not satisfy expression formula (A), therefore, because the influence of the Potential distribution of carrier K side, caused the big deviation ratio of deposited liquid diameter.
When dew point was 6 ℃, injection electric Vs satisfied formula (A), but Vs/V
| max-min|Less than 5, so deviation ratio is big.
On the other hand, in satisfying 3 application examples of dew point condition, the dispersion of surface potential is reduced, and injection electric Vs satisfies formula (A), and Vs/V
| max-min|Be equal to and greater than 5.As a result, the deviation ratio of the diameter of deposited liquid is reduced.
＜application examples 3 〉
(test of carrying out for the relation between the deviation ratio of the dispersion of the droplet diameter of the surface potential distribution, injection electric and the deposition that obtain dew point, carrier)
In this application examples, utilize the bias voltage V that changes
1With pulse voltage V
23 patterns have been tested, so that the relatively dispersion of the diameter of Chen Ji droplet.This test is carried out in the mode identical with second embodiment, and the dew point of atmosphere is 14 ℃, has wherein obtained good result, as shown in figure 28, and uses glass carrier K to test under identical environment and condition.That is, identical among following condition and second embodiment: the maximum of the surface potential of carrier K and minimum of a value, solution, the quantity of the droplet of injection, the frequency that applies is used to detect the method for Potential distribution, and the method for deviation ratio that is used to calculate the diameter of deposition.
In test, bias voltage V
1Kept being applied on the jetelectrode bias voltage V continuously
1Instantaneous being applied of injection only.
In first pattern, bias voltage V
1Be set to 0V, pulse voltage V
2Be 350V, to obtain injection electric the Vs (=V identical with second application examples
1+ V
2).In second pattern, bias voltage V
1Be set to-50V pulse voltage V
2Be 350V.In the 3rd pattern, bias voltage V
1Be set to-50V pulse voltage V
2Be 550V.
Figure 29 is the chart of the relation between the dispersion of the diameter of the droplet of bias voltage and pulse voltage and deposition under the dew point environment that is illustrated in.The graphical presentation of Figure 29 is for the bias voltage V of each pattern
1, pulse voltage V
2, V
1+ V
2, | V
1+ V
2|/V
| max-min|, and the deviation ratio of the diameter of deposition.Consider V below
Max, V
Min, V
| max-min|And V
MidBetween relation, the relation between the diameter of the droplet of bias voltage and pulse voltage and deposition under the good dew point environment is described.At this, about V
Max, V
Min, V
| max-min|And V
Mid, will be with reference to being explanation in 14 ℃ the delegation at dew point among Figure 28.
Suppose that first pattern is a standard, in second pattern, value V
1+ V
2Be that Vs is reduced, but bias voltage V
1Be lower than V
Min, make this state corresponding to the state of Figure 23 B of aforesaid the 3rd embodiment, observe and improved deviation ratio.
In the 3rd pattern, | V
1+ V
2|/V
| max+min|Greater than 10, observe and improved deviation ratio.
＜application examples 4 〉
Be described more specifically the present invention below by application examples of explanation.
In application examples 4, used electrostatic attraction type liquid injection device 101 according to second embodiment.Used the Silver Nano Paste that makes by Harima chemical company
TMAs the liquid that offers nozzle 110, nozzle 110 is made by glass, and internal diameter (spraying the diameter of opening 112) is 2 microns, uses glass plate as insulating carrier 102, and the distance between the surperficial 102a of the tip portion of nozzle 110 and carrier is 100 microns.
Then, (model is 347 to use the electrostatic potential meter
TM, TREK company makes) and measure the surface potential of the every bit in the surface of the glass plate that is used as carrier 102, distribute to obtain surface potential.Wherein, surface potential is measured on each point of 10000 points on the grid, and described grid has the point of 100 vertical points and 100 levels, and these points are spaced apart 3 millimeters along the vertical and horizontal directions.Measurement result is: the maximum V in the surface potential of glass plate
MaxBe 400V, minimum of a value V
MinBe 100V, intermediate value V
MidBe 250V, potential difference V
| max-min|Be 300V.
Be set to the condition shown in the table 1 by voltage Vs, voltage Vs divides 104a to provide by the stable voltage application portion of the injection electric applying unit with charhing unit 104, liquid sprays towards glass plate from nozzle 110, forms the pattern of liquid line when nozzle 110 is removed on the surface of glass plate.The deviation of the width of the line pattern that measurement forms on the surface of glass plate.The deviation of the width of described line is shown in table 1.Wherein, described deviation is by utilizing laser microscope (being made by TEYENCE company) observation line, handling to measure to calculate along the line width of the arbitrfary point of described line and by mean value, maximum and the minimum of a value of described line width by image and obtain.
Table 1
| Vs | Vs-V mid | Vs/V |max-min| | The deviation of live width | |
| Condition (a) | 600V | 350V | 2.0 | 10％ |
| Condition (b) | 1000V | 750V | 3.3 | 7％ |
| Condition (c) | 400V | 150V | 1.3 | 55％ |
Be appreciated that in condition (a) and (b), voltage Vs satisfies expression formula (A) by table 1, so condition (a) has 10% little deviation, condition (b) also has 7% little deviation.Therefore in condition (c), voltage Vs does not satisfy expression formula (A), has the deviation of 55% big line width.Thereby condition (a) and (b) can access the constant quality that uses droplet ejection has stoped the use droplet ejection fault relevant with the position.
＜application examples 5 〉
In application examples 5, used electrostatic attraction type liquid injection device 101 according to second embodiment.Used the Silver Nano Paste that makes by Harima chemical company
TMAs the liquid that offers nozzle 110, nozzle 110 is made by glass, and internal diameter (spraying the diameter of opening 112) is 2 microns, uses glass plate as insulating carrier 102, and the distance between the surperficial 102a of the tip portion of nozzle 110 and carrier is 100 microns.
Then, use and application examples 4 identical electrostatic potential instrumentation amounts are used as the surface potential of the every bit in the surface of glass plate of carrier 102, to obtain the surface potential distribution.Measurement result is: the maximum V in the surface potential of glass plate
MaxBe 70V, minimum of a value V
MinFor-20V, intermediate value V
MidBe 25V, potential difference V
| max-min|Be 90V.
Be set to the condition shown in the table 2 by voltage Vs, voltage Vs is provided by the burning voltage applying portion 104a of the injection electric applying unit with charhing unit 104, liquid sprays towards glass plate from nozzle 110, forms the pattern of liquid line on the surface at glass plate when nozzle 110 moves.The same with application examples 1, measure the deviation that on the surface of glass plate, forms the width of line pattern.The deviation of the width of described line is shown in table 2.Also obtained Vs/V
| max-min|And be shown in Table 2.
Table 2
| Vs | Vs/V |max-min| | The deviation of line width | |
| Condition (d) | 400V | 4.4 | 6％ |
| Condition (e) | 600V | 6.7 | 3％ |
| Condition (f) | 1000V | 11.1 | 1％ |
Be appreciated that at condition (d) by table 2, (e) and (f) in, voltage Vs satisfies expression formula (A), so condition (d) has the little deviation of 6%r, condition (e) has 3% little deviation, condition (f) has 1% little deviation.Along with Vs/V
| max-min|Become big, the deviation of live width is more little, therefore finds Vs/V
| max-min|Being preferably 5% or bigger, more preferably is 10% or bigger.
＜application examples 6 〉
In application examples 6, used electrostatic attraction type liquid injection device 201 according to the 3rd embodiment.Used the Silver Nano Paste that makes by Harima chemical company
TMAs the liquid that offers nozzle 110, nozzle 110 is made by glass, and internal diameter (spraying the diameter of opening 112) is 2 microns, uses glass plate as insulating carrier 102, and the distance between the surperficial 102a of the tip portion of nozzle 110 and carrier is 100 microns.
Then, use and application examples 1 identical electrostatic potential instrumentation amount is used as the surface potential of the every bit in the surface of glass plate of carrier 102, to obtain the surface potential distribution.Measurement result is: the maximum V in the surface potential of glass plate
MaxBe 70V, minimum of a value V
MinFor-20V, intermediate value V
MidBe 25V, potential difference V
| max-min|Be 90V.
By bias voltage V
1With pulse voltage V
2Be set to the condition shown in the table 3, voltage V
1Burning voltage applying portion 204a by the injection electric applying unit with charhing unit 204 provides voltage V
2204b provides by the pulse voltage applying portion, moves at nozzle 110 and repeatedly applies pulse voltage V
2250 times, spray 250 times towards glass plate from nozzle 110 as droplet so as to making liquid, thereby on the surface of glass plate, form pattern by the point of droplet.Obtained the deviation ratio of the diameter of the dot pattern that on the surface of glass plate, forms.The deviation ratio of the diameter of point also is shown in table 3.About deviation ratio, utilize laser microscope (making) to observe described point by KEYENCE company, by being that the zone of point of circle is carried out image and handled and measure each point from supposition, obtained the standard deviation and the mean value of the diameter measured, and by described standard deviation divided by described mean value to obtain deviation ratio.
Table 3
| V 1 | V 2 | V 1+V 2 | Deviation ratio | ||
| Condition (g) | | 350V | 350V | 12％ | |
| Condition (h) | | 350V | 450V | 8％ | |
| Condition (i) | -450V | 350V | - | 8％ | |
| Condition (j) | - | 350V | 250V | 5％ |
Be appreciated that at condition (g) by table 3, (h), in (i) and (j) any one, at least or bias voltage V
1(it is the minimum of a value that is applied to the voltage of jetelectrode 107), perhaps maximum (bias voltage V
1+ pulse voltage V
2) satisfy expression formula (A).Condition (g) has the deviation ratio of 12% little spot diameter, and condition (h) has 8% littler deviation ratio, and condition (i) has 8% little deviation ratio, and condition (j) has 5% much smaller deviation ratio.Thereby condition (g)-(j) makes and has obtained the constant quality that uses droplet ejection, avoided the use droplet ejection fault relevant with the position.At this, the reason of the deviation ratio under the deviation ratio greater than condition (h)-(j) under the condition (g) is considered to because bias voltage V
1Minimum of a value V greater than surface potential
MinAnd less than maximum V
MaxFor the deviation ratio that makes spot diameter is littler, recognize that the pulse voltage that puts on jetelectrode 107 is not the waveform shown in Figure 21 A and the 21B, and the waveform shown in Figure 22 A and 22B or 23A and the 23B preferably.Deviation ratio minimum under condition (j), this is because (V
1+ V
2) greater than V
Mid, and V
1Less than V
Mid
＜application examples 7 〉
In application examples 7, used electrostatic attraction type liquid injection device 201 according to the 3rd embodiment.Used the Silver Nano Paste that makes by Harima chemical company
TMAs the liquid that offers nozzle 110, nozzle 110 is made by glass, and internal diameter (spraying the diameter of opening 112) is 2 microns, uses glass plate as insulating carrier 102, and the distance between the surperficial 102a of the tip portion of nozzle 110 and carrier is 100 microns.
Then, use and application examples 4 identical electrostatic potential instrumentation amounts are used as the surface potential of the every bit in the surface of glass plate of carrier 102, to obtain the surface potential distribution.Measurement result is: the maximum V in the surface potential of glass plate
MaxBe 70V, minimum of a value V
MinFor-20V, intermediate value V
MidBe 25V, potential difference V
| max-min|Be 90V.
By bias voltage V
1With pulse voltage V
2Be set to each condition shown in the table 4, voltage V
1Burning voltage applying portion 204a by the injection electric applying unit with charhing unit 204 provides voltage V
2204b provides by the pulse voltage applying portion, repeatedly applies pulse voltage V when nozzle 110 moves
2250 times, spray 250 times towards glass plate from nozzle 110 as droplet so as to making liquid, thereby on the surface of glass plate, form pattern by the point of droplet.With the same deviation ratio that has obtained the diameter of the point of formation pattern on the surface of glass plate in the application examples 3.The deviation ratio of the diameter of point also is shown in table 4.Also obtained the peaked absolute value of voltage or the absolute value of minimum of a value (that is, | V
1| or | V
1+ V
2|) to V
| max-min|Ratio (that is, | V
1+ V
2|/V
| max-min|), also be shown in Table 4.
Table 4
| V 1 | V 2 | V 1+V 2 | |V 1+V 2|/V |max-min| | Deviation ratio | |
| Condition (k) | -100V | 350V | 250V | 2.8 | 5％ |
| Condition (l) | -100V | 600V | 500V | 5.6 | 2％ |
| Condition (m) | -100V | 1100V | 1000V | 11.1 | 0.8％ |
Be appreciated that at condition (k) by table 4, in (l) and (m) any one, at least or bias voltage V
1(it is the minimum of a value that is applied to the voltage of jetelectrode 107), perhaps maximum (bias voltage V
1+ pulse voltage V
2) satisfy expression formula (A).Condition (k) has the deviation ratio of 5% little spot diameter, and condition (l) has 2% littler deviation ratio, and condition (m) has 0.8% much smaller deviation ratio.Thereby condition (k)-(m) makes and has obtained the constant quality that uses droplet ejection, avoided the use droplet ejection fault relevant with the position.Along with | V
1+ V
2|/V
| max-min|Become big, deviation ratio also diminishes, and therefore finds | V
1+ V
2|/V
| max-min|Preferably 5 or bigger, be more preferably 10 or bigger.
＜application examples 8 〉
In the condition (n) of application examples 8, used electrostatic attraction type liquid injection device 301 according to the 4th embodiment.At condition (o), (p), (q) and (r) in, used electrostatic attraction type liquid injection device 401 according to the 5th embodiment.In condition (s), used the electrostatic attraction type liquid injection device 401 of the Xelminator 405 that does not have shown in the 5th embodiment.In any condition (n)-(r), used the Silver Nano Paste that makes by Harima chemical company
TMAs the liquid that offers nozzle 110, nozzle 110 is made by glass, and internal diameter (spraying the diameter of opening 112) is 2 microns, uses glass plate as insulating carrier 102, and the distance between the surperficial 102a of the tip portion of nozzle 110 and carrier is 100 microns.
Use and application examples 4 identical electrostatic potential instrumentation amounts are used as the surface potential of the every bit in the surface of glass plate of carrier 102, to obtain the surface potential distribution.Measurement result is: the maximum V in the surface potential of glass plate
MaxBe 300V, minimum of a value V
MinFor-100V, intermediate value V
MidBe 100V, potential difference V
| max-min|Be 400V.
In condition (n), apply by 305 pairs of jetelectrodes 107 of alternating voltage applying unit have ± alternating voltage of the frequency of 500V and 1Hz in, by make the whole surface-discharge of glass plate with jet head liquid 103 scanning glass plates.
In condition (0), use the static of self discharge type to eliminate brush (by the Non Spark of Achilles company manufacturing) as Xelminator 405.Make the whole surface-discharge of glass plate with these Xelminator 405 scanning glass plates.
In condition (p), use the corona discharge type of Xelminator with the a-c cycle that is set to 33kHz especially (SJ-S that makes by KEYENCE company) and alternating voltage applying method as Xelminator 405.This Xelminator 405 scanning glass plates and make the whole surface-discharge of glass plate.
In condition (q), use the high-frequency corona discharge-type of Xelminator with the a-c cycle that is set to 38kHz especially (Zapp that makes by Shishido Electrostatic company) and alternating voltage applying method as Xelminator 405.This Xelminator 405 scanning glass plates and make the whole surface-discharge of glass plate.
In condition (r), use and utilize the grenz ray irradiation type Xelminator (by the Photoionizer of Hamamatsu Photonics K.K. manufacturing) that produces ion by the photo-ionisation effect as Xelminator 405.This Xelminator 405 utilizes grenz ray irradiation glass plate and makes the whole surface-discharge of glass plate.
In condition (s), do not carry out static discharge.
In condition (n)-(s), stable voltage is applied on the jetelectrode 107, makes when nozzle 110 moves from nozzle 110 towards the glass plate atomizing of liquids, so as to forming line by the liquid that forms pattern on glass pane surface.Then, measure the deviation of the width of the line that on glass pane surface, forms pattern.The method of methods and applications example 1 of deviation that is used to obtain live width is identical.Static discharge method and measurement result are shown in table 5.
Table 5
| The static discharge method | The deviation of live width | |
| Condition (n) | Injector electrode is applied alternating voltage to discharge | 3％ |
| Condition (o) | Static is eliminated the self discharge method of | 70％ |
| Condition (p) | | 10％ |
| Condition (q) | The high-frequency | 7％ |
| Condition (r) | The grenz | 4％ |
| Condition (s) | Do not discharge | 90％ |
Be appreciated that by table 5 deviation of live width is up to 90% when glass plate is not discharged as condition (s).Relative therewith, when glass plate is discharged under condition (n)-(r), little under the situation that the deviation ratio of live width does not discharge.Specifically, condition (n) has 3% little live width deviation, and condition (p) has 10% little live width deviation, and condition (q) has 7% little live width deviation, and condition (r) has 4% little live width deviation.Thereby condition (n)-(r) has realized the constant emitted dose of droplet, has avoided the use droplet ejection fault relevant with the position.
[theoretical explanation of liquid injection device]
Provide the theoretical explanation that liquid sprays below, and provide a ground instance according to described explanation.Certainly, be included in the theory of explained later and the full content of the material behavior of each part of the nozzle arrangements described in the ground instance, sprayed solution, the structure of periphery that makes an addition to nozzle and the controlled condition that spraying is associated etc., all be applied in the above embodiments as much as possible.
[be used to reduce injection electric and be used to implement the unit of stable injection of the small amount of droplet]
Think always that in the past droplet ejection is impossible outside by the following formula restricted portion:
λ wherein
cBe make it possible to by means of electrostatic attraction from the tip portion droplet ejection of nozzle, at the growth wavelength (m) of solution surface, and by λ
c=2 π γ h
2/ ε
0v
2Obtain.
In the present invention, looked back the effect of the nozzle in the electrostatic attraction type ink-jet printer, and by using Maxwell force or its analog can form droplet in the zone of never attempting in the past spraying because of its impossibility.
Found about realizing reducing and the approximate explanation of the injection conditions that trace sprays of driving voltage, be described as follows.
Following explanation can be applied to the liquid injection device described in the embodiments of the invention.
Suppose that conducting solution is provided for the nozzle with inner diameter d, nozzle distance is h as the vertical height of the infinitely great conductive plane of carrier.This state as shown in figure 30.Suppose that the charge Q of responding at the tip portion of nozzle concentrates on a hemispherical portion of nozzle tip part, and be expressed from the next approx.
Q＝2πε
0αVd (7)
Q wherein: at the electric charge of the tip portion induction of nozzle, ε
0: the dielectric constant of vacuum (F/m), ε: the dielectric constant of carrier (F/m), h: the distance between nozzle and the carrier (m), d: the internal diameter of nozzle (m), V: the total voltage that puts on nozzle, α: the proportionality constant relevant with its shape of nozzle and analog thereof, be 1-1.5, particularly d＜＜be approximately 1.0 under the situation of h.
At the plate as carrier is under the situation of conductive plate, suppose at the opposite electric charge of near surface induction to offset because the current potential that charge Q causes, and this state is equivalent to the symmetric position induction of distribution of charges in plate and has the mirror charge Q of contrary sign ' state.When plate was the plate of insulation, respond to opposite charges in the polarization of the surface of plate in face side, this state was equivalent to the mirror charge Q similarly determined by the dielectric constant with contrary sign in the symmetric position induction ' state.
Simultaneously, suppose that the radius of curvature at the top of the male bend liquid of nozzle tip part is R (m), electric field strength E at the top of male bend liquid
Loc(V/m) provide by following formula:
K wherein: proportionality constant, it changes according to its shape of nozzle, and its value is 1.5-8.5, in most of the cases is approximately 5 (P.J.Birdseye and D.A.Smith, SurfaceScience, 23 (1970) 198-210).
Supposing has d/2=R simply.This is equivalent to surface tension makes conducting solution partly rise at nozzle tip to be hemispherical, to have the radius identical with the radius of nozzle.
Consider to act on the balance of the pressure on the nozzle tip liquid partly.At first, by Sm
2Be illustrated in the surface area of the liquid of nozzle tip part, electrostatic force Pe is provided by following formula:
By formula (7), (8) and (9), and get α=1, obtain
On the other hand, the surface tension Ps at nozzle tip liquid is partly provided by following formula:
Wherein γ is surface tension (N/m).
Condition by the electrostatic force atomizing of liquids is that electrostatic force is greater than surface tension, promptly
P
e＞P
s (12)
By using enough little nozzle diameter d, can be so that static pressure surpass surface tension,
Expressed by this, the relation between V and d is provided by following formula:
This formula has provided sprays required minimum voltage.Obtain by formula (6) and (13):
This formula has provided operating voltage of the present invention.
The correlation of critical injection electric Vc and certain nozzle diameter is shown in aforesaid Fig. 9.Be appreciated that the field concentration effect of considering owing to using little diameter nozzle to have by this figure,, spray the starting voltage step-down along with nozzle diameter reduces.
In the mode of the consideration electric field of routine, that is, when only considering by the determined electric field of distance between the voltage that puts on nozzle and nozzle and the comparative electrode, when nozzle became small, being used to spray required voltage increased.In contrast, when concentrating local electric field strength,, nozzle diameter small can reduce injection electric by being become.
By means of the injection of electrostatic attraction based on charging at the liquid of nozzle-end.It approximately is the time constant of being determined by dielectric relaxation that charging rate is considered to.
τ＝ε/σ (2)
ε wherein: the dielectric constant of solution (F/m), σ: the conductance of solution (S/m).When supposing that relative dielectric constant is 10, conductance is 10
-6During S/m, then obtain τ=1.854 * 10
-5Sec.Perhaps, when critical frequency was represented by fc Hz, fc was provided by following formula:
f
c＝σ/ε (14)
For the bigger variation of the electric field that is higher than this frequency f c, nozzle may not respond, thereby can not spray.About last example, the critical frequency of estimation is approximately 10kHz.At this moment, be 2 microns at spout radius, and under the situation of voltage a little less than 500V, the flow G in nozzle can be estimated as 10
-13m
3/ s.For the liquid of last example, it is possible spraying under 10kHz, therefore can realize each about 10f1 that circulates (femto-liter (millimicro microlitre), 1f1:10
-15Liter) minimum injection limit.
As shown in figure 30, the effect for the image force of relative plate of the effect concentrated of electric field and induction is the feature among above-mentioned each embodiment.Thereby, not needing as in the prior art, plate or plate support component conduct electricity, and perhaps plate or plate support component are applied voltage.That is, in these embodiments, can use insulation glass plate, use plastics for example plate, ceramic wafer, semiconductor board or its analog of polyimides as plate.
In these embodiments, about putting on the voltage of electrode, can use any voltage in positive voltage and the negative voltage.
In addition, to keep distance between nozzle and the carrier be 500 microns or make that the injection of solution is easier forr a short time.In addition, use the FEEDBACK CONTROL (not shown) that detects nozzle location can advantageously make nozzle can keep constant with respect to the position of carrier.
Carrier can be mounted and remain on carrier bracket conduction or insulation.
Figure 31 represents the sectional view as the nozzle segment of the liquid injection device of the example of another basic embodiment of the present invention.Electrode 15 is provided at the side surface portion of nozzle 1, is used for applying controlled voltage between the solution 3 in this electrode and nozzle.Provide electrode 15 to be used for the wet effect of control electricity.When enough big electric field was added on the insulator that constitutes nozzle, expectation did not have this electrode that the wet effect of electricity also can take place.But, in this ground instance, this electrode is positively controlled the wet effect of electricity, thereby is used for spraying control.Constitute by insulating materials at nozzle 1, the thickness of blast tube tip portion is that 1 micron, the internal diameter of nozzle are that 2 microns and the voltage that applies are under the situation of 300V, about 30P the wet effect of electricity takes place down greatly.This pressure is not enough for injection, but can be used for partly supplying solution to nozzle tip, and expects that this control electrode makes it possible to control and sprays.
Fig. 9 represents the correlation of injection beginning voltage of the present invention and nozzle diameter.Wherein use mechanism shown in Figure 12 as liquid injection apparatus.Verified, when nozzle becomes when small, injection beginning voltage becomes lower, so as to making and the situation of routine is compared, can utilize lower voltage to spray.
In each the above embodiments, the condition that is used for atomizing of liquids is the function of the frequency (f) of the amplitude (V) of the distance (h) between nozzle and the carrier, the voltage that applies and the voltage that applies, and wherein each must satisfy certain condition as injection conditions.Relative therewith, when any one condition is not satisfied, the essential parameter that changes other.
This situation describes with reference to Figure 32.
There is certain the critical electric field Ec that is used to spray, then can not sprays less than this electric field.This critical electric field is according to the surface tension of nozzle diameter, liquid and viscosity and the value that changes.Under the value less than critical electric field Ec, injection is difficult.Under intensity, that is, under the electric-field intensity that can spray, between the amplitude of nozzle-carrier distance (h) and the voltage (V) that applies, has approximate proportionate relationship greater than critical electric field Ec.When nozzle-when the carrier distance was shortened, critical voltage V can be reduced.
Relative therewith, when nozzle-carrier distance (h) greatly thereby the voltage V that applies when also big, even when the identical electric-field intensity of maintenance, the blast of the liquid droplets that caused by corona discharge effect or its analog also takes place, promptly quick-fried spray.
As mentioned above, be applicable to that according to liquid injection device of the present invention and liquid jet method the liquid according to each purposes of following various uses sprays: composition, for example printing of standard, the printing on special media (film, cloth are knitted, metallic plate etc.), utilize wiring that liquid or paste conductive material carry out, be applied to constitute antenna pattern etc.; In handling purposes, for example coating of binder, sealant, etc.; Be used for biology and medical applications, the sample of for example Yi Yao coating (for example under the situation of the multiple micro constitutent of combination), diagnostic gene etc.
The method that is used for formation wiring pattern on circuit board is applicable to the pattern that forms circuit board.
Claims (38)
1. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Voltage applying unit is used for described jetelectrode is applied voltage;
The carrier that comprises insulating materials is used to receive the droplet of injection; And
Spray the atmosphere regulon, the atmosphere that is used for standing the injection of jet head liquid remains more than 9 ℃ or 9 ℃ and less than the dew point of water saturation temperature.
2. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Voltage applying unit is used for described jetelectrode is applied voltage; And
The carrier that comprises insulating materials, it has 10 in the zone that receives the droplet that sprays at least
9Ω/cm
2Or lower sheet resistance.
3. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Voltage applying unit is used for described jetelectrode is applied voltage; And
The carrier that comprises insulating materials, it has surface-treated layer in the zone that receives the droplet that sprays at least, makes that sheet resistance is 10
9Ω/cm
2Or it is lower.
4. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Voltage applying unit is used for described jetelectrode is applied voltage; And
The carrier that comprises insulating materials, it has the surface-treated layer that forms by the coating surface activating agent in the zone that receives the droplet that sprays at least.
5. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage; And
Voltage applying unit, be used for described jetelectrode is applied a kind of voltage of signal waveform, the magnitude of voltage of described signal waveform satisfies the Vs (V) in the expression (A) at least in part, and wherein the maximum of the surface potential of the insulating carrier of the droplet of reception injection is by V
Max(V) expression, minimum of a value is by V
Min(V) expression:
V
s≤V
mid-V
|max-min|，V
mid+V
|max-min|≤V
s (A)
Wherein, V
| max-min|(V) determine V by following formula (B)
Mid(V) determine by following formula (C):
V
|max-min|＝|V
max-V
min| (B)
V
mid＝(V
max+V
min)/2 (C)
6. liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Detecting unit is used to detect the surface potential of the insulating carrier that receives the droplet that sprays; And
Voltage applying unit is used to apply a kind of voltage of signal waveform, and the magnitude of voltage of described signal waveform satisfies the Vs (V) in the expression (A) at least in part, and wherein the maximum of the surface potential of the insulating carrier that is detected by detecting unit is by V
Max(V) expression, minimum of a value is by V
Min(V) expression:
V
s≤V
mid-V
|max-min|，V
mid+V
|max-min|≤V
s (A)
Wherein, V
| max-min|(V) determine V by following formula (B)
Mid(V) determine by following formula (C):
V
|max-min|＝|V
max-V
min| (B)
V
mid＝(V
max+V
min)/2 (C)
7. as claim 5 or 6 described liquid injection devices, wherein the signal waveform by voltage applying unit output is to keep constant current potential so that satisfy the waveform of the Vs of above-mentioned expression formula (A).
8. as claim 5 or 6 described liquid injection devices, wherein the signal waveform by voltage applying unit output is a kind of pulse voltage waveform, and satisfies one of at least the Vs of above-mentioned expression formula (A) in the maximum of described pulse voltage or the minimum of a value.
9. liquid injection device as claimed in claim 8, wherein satisfy such condition: the maximum of the pulse voltage that is applied by voltage applying unit is greater than V
Mid, the minimum of a value of the pulse voltage that is applied by voltage applying unit is less than V
Mid
10. as claim 5 or 6 described liquid injection devices, one of them condition is: at the maximum and the V of the pulse voltage that is applied by voltage applying unit
MidBetween difference and at V
MidAnd in the middle of the difference between the minimum of a value of the pulse voltage that is applied by voltage applying unit, a difference is poor greater than another.
11. a liquid injection device comprises:
Jet head liquid, it has the nozzle that is used for spraying from tip portion the droplet of charged solution;
Be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage;
Voltage applying unit is used for described jetelectrode is applied voltage; And
With the Xelminator that the insulating carrier that receives the droplet that sprays relatively is provided with, be used to make the insulating carrier discharge.
12. liquid injection device as claimed in claim 11, wherein said Xelminator is the electrode that is used to discharge, carrier of itself and the droplet that receive to spray relatively is provided with, and described equipment also comprises the alternating voltage applying unit, is used for the described electrode that is used to discharge is applied alternating voltage.
13. liquid injection device as claimed in claim 12, wherein said jetelectrode and the described electrode that is used to discharge are same electrodes.
14. liquid injection device as claimed in claim 11, wherein said Xelminator are the Xelminators of corona discharge type.
The Xelminator of described insulating carrier discharge 15. liquid injection device as claimed in claim 11, wherein said Xelminator are to the insulating carrier irradiates light.
16. as any one described liquid injection device among the claim 1-15, wherein the internal diameter of nozzle is 20 microns or littler.
17. liquid injection device as claimed in claim 16, wherein the internal diameter of nozzle is 8 microns or littler.
18. liquid injection device as claimed in claim 17, wherein the internal diameter of nozzle is 4 microns or littler.
19. the liquid jet method of a liquid injection device, described liquid injection device comprises: have the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, thereby it is applied voltage spray described droplet to produce electric field, and voltage applying unit, be used for described jetelectrode is applied voltage, said method comprising the steps of:
Towards the carrier droplet ejection that comprises insulating materials, described atmosphere is retained as 9 ℃ dew point or higher and less than the water saturation temperature in a kind of atmosphere.
20. the liquid jet method of a liquid injection device, described liquid injection device comprises: have the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, thereby it is applied voltage spray described droplet to produce electric field, and voltage applying unit, be used for described jetelectrode is applied voltage, said method comprising the steps of:
Towards the carrier droplet ejection that comprises insulating materials, described carrier has 10 in the zone that receives the droplet that sprays at least
9Ω/cm
2Or lower sheet resistance.
21. the liquid jet method of a liquid injection device, described liquid injection device comprises: have the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, thereby it is applied voltage spray described droplet to produce electric field, and voltage applying unit, be used for described jetelectrode is applied voltage, said method comprising the steps of:
Towards the carrier droplet ejection that comprises insulating materials, described carrier has surface-treated layer in the zone that receives the droplet that sprays at least, makes that sheet resistance is 10
9Ω/cm
2Or it is lower.
22. the liquid jet method of a liquid injection device, described liquid injection device comprises: have the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, thereby it is applied voltage spray described droplet to produce electric field, and voltage applying unit, be used for described jetelectrode is applied voltage, said method comprising the steps of:
Towards the carrier droplet ejection that comprises insulating materials, described carrier has the surface-treated layer that forms by the coating surface activating agent in the zone that receives the droplet that sprays at least.
23. a liquid jet method may further comprise the steps:
Comprising on the carrier of insulating materials by forming surface-treated layer at the regional coating surface activating agent that receives the droplet that sprays at least;
By the solution in the nozzle is applied injection electric from tip droplet ejection on the surface-treated layer of carrier of nozzle; And
In the droplet drying of spraying with after solidifying, except the part that is attached with droplet, remove surface-treated layer.
24. the liquid jet method of a liquid injection device, described liquid injection device comprises: have the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, spray described droplet to produce electric field thereby it is applied voltage; And voltage applying unit, being used for described jetelectrode is applied described voltage, this method may further comprise the steps:
Jetelectrode is applied a kind of voltage of signal waveform, and the magnitude of voltage of described signal waveform satisfies the Vs (V) in the expression (A) at least in part, and the maximum of surface potential of insulating carrier that wherein receives the droplet that sprays is by V
Max(V) expression, minimum of a value is by V
Min(V) expression:
V
s≤V
mid-V
|max-min|，V
mid+V
|max-min|≤V
s (A)
Wherein, V
| max-min|(V) determine V by following formula (B)
Mid(V) determine by following formula (C):
V
|max-min|＝|V
max-V
min| (B)
V
mid＝(V
max+V
min)/2 (C)
25. liquid jet method as claimed in claim 24 is further comprising the steps of:
Before being applied voltage, measures jetelectrode the surface potential of insulating carrier; And, obtain maximum V
Max(V) and minimum of a value V
Min(V).
26. as claim 24 or 25 described liquid jet methods, the constant potential of the Vs of above-mentioned expression formula (A) is satisfied in the signal waveform maintenance that wherein puts on the voltage of jetelectrode.
27. as claim 24 or 25 described liquid jet methods, the signal waveform that wherein puts on the voltage of jetelectrode is a kind of pulse voltage waveform, and satisfies one of at least the Vs of above-mentioned expression formula (A) in the maximum of described pulse voltage or the minimum of a value.
28. liquid jet method as claimed in claim 27 wherein satisfies such condition: the maximum of described pulse voltage is greater than V
Mid, and minimum of a value is less than V
Mid
29. as claim 27 or 28 described liquid jet methods, wherein, at the maximum and the V of described pulse voltage
MidBetween difference and at V
MidAnd in the middle of the difference between the minimum of a value of pulse voltage, a difference is poor greater than another.
30. the liquid jet method of a liquid injection device, described liquid injection device comprises having the jet head liquid of nozzle that is used for spraying from tip portion the droplet of charged solution, be provided at the jetelectrode on the described jet head liquid, thereby it is applied voltage spray described droplet to produce electric field, and voltage applying unit, be used for described jetelectrode is applied described voltage, this method may further comprise the steps:
By jetelectrode being applied injection electric and before the droplet ejection insulating carrier being discharged.
31. liquid jet method as claimed in claim 30 wherein carries out discharge to insulating carrier by the electrode that is used to discharge being applied alternating voltage, described electrode is facing to described insulating carrier setting.
32. liquid jet method as claimed in claim 31, wherein said electrode that is used to discharge and described jetelectrode are same electrodes.
33. liquid jet method as claimed in claim 30 is wherein by using the corona discharge type Xelminator to carry out described discharge to insulating carrier.
34. liquid jet method as claimed in claim 30 is wherein by using the Xelminator to the insulating carrier irradiates light to carry out described discharge to insulating carrier.
35. as any one described liquid jet method of claim 19 to 34, wherein the diameter of the injection opening of nozzle is 20 microns or littler.
36. liquid jet method as claimed in claim 35, wherein the diameter of the injection opening of nozzle is 8 microns or littler.
37. liquid jet method as claimed in claim 35, wherein the diameter of the injection opening of nozzle is 4 microns or littler.
38. a method that is used to form the wiring pattern of circuit board may further comprise the steps:
Use as any one described liquid jet method in the claim 19 to 37; And
The droplet of metal injection cream on described carrier.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003290544 | 2003-08-08 | ||
| JP290544/2003 | 2003-08-08 | ||
| JP290612/2003 | 2003-08-08 |
Related Child Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102102822A Division CN101386226B (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210286A Division CN100595064C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210287A Division CN100595067C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1849215A true CN1849215A (en) | 2006-10-18 |
| CN100528569C CN100528569C (en) | 2009-08-19 |
Family
ID=37078389
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800257443A Expired - Fee Related CN100528569C (en) | 2003-08-08 | 2004-07-29 | Liquid jetting device, liquid jetting method, and method of forming wiring pattern on circuit board |
| CN2008102102822A Active CN101386226B (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210287A Expired - Fee Related CN100595067C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210286A Active CN100595064C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
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| CN2008102102822A Active CN101386226B (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210287A Expired - Fee Related CN100595067C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
| CN200810210286A Active CN100595064C (en) | 2003-08-08 | 2004-07-29 | Liquid ejection apparatus, liquid ejection method, and method for forming wiring pattern of circuit board |
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| CN (4) | CN100528569C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152626A (en) * | 2008-09-09 | 2011-08-17 | 精工爱普生株式会社 | Liquid ejecting apparatus and ejection inspecting method |
| CN104584142A (en) * | 2012-08-20 | 2015-04-29 | 柯尼卡美能达株式会社 | Parallel line pattern containing conductive material, parallel line pattern formation method, substrate with transparent conductive film, device and electronic apparatus |
| CN110816058A (en) * | 2018-08-10 | 2020-02-21 | 顺天乡大学校产学协力团 | Electrospray printing system |
| CN112744805A (en) * | 2021-01-21 | 2021-05-04 | 宁波埃氪新材料科技有限公司 | Electrode injection device, carbon nanotube reactor and carbon nanotube preparation method |
| CN114536978A (en) * | 2020-11-24 | 2022-05-27 | 研能科技股份有限公司 | Wafer structure |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102431289B (en) * | 2010-08-09 | 2015-05-06 | Ntn株式会社 | Pattern modification device and method |
| JP6225698B2 (en) * | 2013-12-26 | 2017-11-08 | セイコーエプソン株式会社 | Recording device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9721555D0 (en) * | 1997-10-10 | 1997-12-10 | Xaar Technology Ltd | Droplet deposition apparatus and methods of manufacture thereof |
-
2004
- 2004-07-29 CN CNB2004800257443A patent/CN100528569C/en not_active Expired - Fee Related
- 2004-07-29 CN CN2008102102822A patent/CN101386226B/en active Active
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102152626A (en) * | 2008-09-09 | 2011-08-17 | 精工爱普生株式会社 | Liquid ejecting apparatus and ejection inspecting method |
| CN104584142A (en) * | 2012-08-20 | 2015-04-29 | 柯尼卡美能达株式会社 | Parallel line pattern containing conductive material, parallel line pattern formation method, substrate with transparent conductive film, device and electronic apparatus |
| CN110816058A (en) * | 2018-08-10 | 2020-02-21 | 顺天乡大学校产学协力团 | Electrospray printing system |
| CN110816058B (en) * | 2018-08-10 | 2021-07-06 | 顺天乡大学校产学协力团 | Electrospray printing system |
| CN114536978A (en) * | 2020-11-24 | 2022-05-27 | 研能科技股份有限公司 | Wafer structure |
| CN112744805A (en) * | 2021-01-21 | 2021-05-04 | 宁波埃氪新材料科技有限公司 | Electrode injection device, carbon nanotube reactor and carbon nanotube preparation method |
| CN112744805B (en) * | 2021-01-21 | 2022-07-26 | 宁波埃氪新材料科技有限公司 | Electrode injection device, carbon nanotube reactor and carbon nanotube preparation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100595064C (en) | 2010-03-24 |
| CN100528569C (en) | 2009-08-19 |
| CN101352965A (en) | 2009-01-28 |
| CN100595067C (en) | 2010-03-24 |
| CN101352963A (en) | 2009-01-28 |
| CN101386226B (en) | 2012-07-04 |
| CN101386226A (en) | 2009-03-18 |
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Effective date of registration: 20090904 Address after: Tokyo, Japan, Japan Patentee after: Konica Minolta Holding Ind Address before: Tokyo, Japan Co-patentee before: Independent Administrative Corporation Industrial Comprehansive Technologles Institute Patentee before: Konica Minolta Holdings Co., Ltd. |
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