CN1844996A - Technology and apparatus for precise control of femtosecond laser pulse phase - Google Patents

Technology and apparatus for precise control of femtosecond laser pulse phase Download PDF

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CN1844996A
CN1844996A CN 200610026303 CN200610026303A CN1844996A CN 1844996 A CN1844996 A CN 1844996A CN 200610026303 CN200610026303 CN 200610026303 CN 200610026303 A CN200610026303 A CN 200610026303A CN 1844996 A CN1844996 A CN 1844996A
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signal
module
laser pulse
michelson interferometer
output
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孙真荣
曹瑛
杨岩
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East China Normal University
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East China Normal University
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Abstract

The invention discloses a femtosecond laser impulse phase accurate control technique and relative device, based on Michelson interferometer, belonging to the technique of ultra-quick laser impulse accurate control. Wherein, said device comprises: a Michelson interferometer, an optical electric detector, and a serve circuit control system; the inventive laser impulse phase accurate control technique uses said laser impulse phase accurate control device, via adjusting the amplitude of piezoelectric ceramic drive signal of Michelson interferometer, to micro adjust the optical path difference between two laser impulses with different optical paths of Michelson interferometer in one laser wavelength, to realize the accurate control on the femtosecond laser impulse phase.

Description

Femto-second laser pulse position phase accurate control technique and device
Technical field
The present invention relates to the technology and the device thereof of the accurate mutually control in a kind of femto-second laser pulse position, particularly based on the femto-second laser pulse position phase accurate control technique and the device of Michelson interferometer.The technical field that belongs to the accurate control of ultrafast laser pulse.
Background technology
Since laser was born, that coherent control has become was main in the physics, one of the most fruitful research field.In numerous coherent control technology, laser pulse position phase control technology is widely used in the field, forward position of developments in science and technology such as ultrashort pulse measurement, ultrashort pulse are synthetic, quantum coherent control chemical reaction.
Relatively the Chang Yong facies-controlled technical method in realization laser pulse position is to utilize dispersive medium to change the phase contraposition phase of the pulse of different optical maser wavelengths, but the method is not high for the control precision of laser pulse position phase, and the control ratio that further is applied to femtosecond, inferior femtosecond and even Ah second's laser pulse position phase is difficult.The present invention then adopts the piezoelectric ceramics (being designated hereinafter simply as " PZT ") that possesses nano-precision as control element, utilizes the piezoelectric property of PZT material, comes the position phase of accurate control ultrafast laser pulse by the variation that adds drive signal.
The existing PZT of utilization carries out the laser pulse position technology of accurate control mutually, employing method of load-modulate current signal in laser light source is carried out the modulation of signal mostly, this method is easily when carrying out the signal modulation, with the undesired signal that comprises in the modulating current also drawing-in system together, cause the position mutually control have deviation.At this situation, this device directly is loaded into modulation signal on the control element PZT by circuit module, causes the subtle change of PZT length, and system is carried out the signal modulation, so both reduce the passage of introducing undesired signal, improved the facies-controlled precision in position simultaneously again.Simultaneously, this device can be set at scanning operational mode and phase-locked operational mode as required respectively, can realize the precision control of laser pulse position phase more easily.
Summary of the invention
The object of the present invention is to provide a kind of technology that can realize the accurate mutually control in femto-second laser pulse position.
Another object of the present invention is to provide the accurate control device that realizes this femto-second laser pulse position phase accurate control technique.
Femto-second laser pulse of the present invention position phase accurate control device mainly comprises: Michelson interferometer, photodetector and servo circuit control system.
Michelson interferometer mainly is made up of LASER Light Source, optics high reflective mirror, 50% beam splitting chip and the pipe shape PZT that fixed high reflective mirror.Innovation part of the present invention is that the high reflective mirror back side of an arm of Michelson interferometer is fixed with on the control element PZT, and another arm is made up of two orthogonal high reflective mirrors.Telescopic takes place in PZT under the driving of servo circuit system output signal, carry out minute adjustment for the Michelson interferometer light path.
Photodetector receives the light signal of interferometer output, and is translated into electric signal, and the output terminal of photodetector links to each other with an input end of the signal demodulation module of servo circuit control system.
The servo circuit control system is a kind of new system of the present invention according to existing correlation technique invention, mainly comprises: signal scanning module, signal modulation module, signal demodulation module, mode switch module, compound amplification module and power module.
The signal scanning module is made up of sweep generator and signal follower.The output terminal of sweep generator links to each other with the input end of signal follower, and the output terminal of signal scanning module links to each other with an input end of compound amplification module by mode switch module.
The signal modulation module is made up of modulation signal generator and signal follower.The output terminal of modulation signal generator links to each other with the input end of signal follower.This module has two output terminals: one links to each other with the input end of phase shifter of phase lock circuitry in the signal demodulation module; Another output terminal links to each other with an input end of compound amplification module.
The signal demodulation module is made up of photoelectricity receiving circuit, phase lock circuitry and integrating circuit.The input signal of photoelectricity receiving circuit is the photosignal of photodetector output, and its output terminal links to each other with an input end of phase lock circuitry.Another input end of phase lock circuitry links to each other with an output terminal of modulation signal module.Wherein, the photoelectricity receiving circuit is made up of bandpass filter (being designated hereinafter simply as " BPF ") and signal amplifier.The input end of BPF links to each other with the output terminal of photodetector, and the output terminal of BPF links to each other with the input end of signal amplifier, and the output signal end of signal amplifier links to each other with an input end of multiplier in the phase lock circuitry.Phase lock circuitry is made up of phase shifter, multiplier and low-pass filter (being designated hereinafter simply as " LPF ").The input end of phase shifter links to each other with an output terminal of modulation signal.Multiplier is the core of whole phase lock circuitry, and a signal input part of multiplier links to each other with the output terminal of photoelectricity receiving circuit; Another input end is connected with the output terminal of phase shifter.The output signal end of multiplier links to each other with the input end of LPF, and the input end of the prime signal follower in the output terminal of LPF and the integrating circuit is connected.Integrating circuit is made up of integrator and two signal follower.Level connects signal follower respectively in the front and back of integrator, the output terminal of LPF in the input end of prime signal follower and the phase lock circuitry is connected, the output signal of back level signal follower is a restituted signal, is connected with an input end of composite amplifier by mode-changeover device.
Compound amplification module is made up of pre-amplifier, back level high-voltage amplifier and bias voltage circuit.Compound amplification module has three signal input parts, and wherein two input ends are connected with the output terminal of signal modulation circuit and the output terminal of bias voltage circuit respectively.Wherein, the offset signal circuit produces the adjustable dc offset voltage signal of amplitude.The 3rd signal input part then is connected with the restituted signal circuit output end with the output terminal of sweep signal circuit by mode switch module.
The power module of servo circuit control system is provided by the low-voltage regulated power supply circuit of two groups of two-way outputs and the high voltage regulated power supply circuit of one group of single channel output.
Laser pulse provided by the invention specifically position phase accurate control technique comprises following two steps:
The first step: operational mode is switched to the scanning operational mode, this moment, servo-control system was not handled the photosignal of input, the signal that produces is the superposed signal (carrying out the signal stack in compound amplification module amplifies) of sweep signal (scan module generation) and modulation signal (modulation module generation), this superposed signal acts directly on the PZT, the effect of modulation signal produces by modulating frequency PZT, telescopic is by a small margin realized the signal modulation for light path; The effect of sweep signal then is that PZT produces by certain frequency, and the telescopic of the about optical maser wavelength of amplitude swings back and forth PZT about its equilibrium position, and the vertical film in the closed laser chamber that interferometer is formed scans.By regulating the high reflective mirror of Michelson interferometer two arms, the closed laser chamber that Michelson interferometer forms is regulated, realize the preliminary adjusting of interferometer light path.
Second step: after finishing the preliminary adjusting of interferometer light path, the operational mode of servo-drive system can be adjusted to lock chamber pattern (selecting) by handover module.Under this operational mode, raise the clothes circuit control system and will handle the photosignal of input, and the output of interrupt scanning signal.System will import photosignal by the photoelectricity receiving circuit carry out bandwidth filtering, pre-amplify etc. handle after, be input in the multiplier in the phase lock circuitry as an one input signal; The modulation signal that modulation module produces is input in the phase shifter of phase lock circuitry of demodulation module, is input in the multiplier as its second input signal again, and the output signal of multiplier enters low-pass filter (LPF) and carries out low-pass filtering, the output restituted signal; At this moment, input modulating signal, restituted signal reach the dc offset voltage that is produced by bias voltage generator to three of compound amplification module input ends respectively.After this three signal amplified stack through the two-stage of composite amplifier, output PZT control signal was carried in PZT and upward it is carried out FEEDBACK CONTROL.Wherein, the effect of modulation signal is that light path is carried out the signal modulation; Control signal then is the change in location by control PZT, realizes the precision control of laser pulse position phase.
Laser pulse provided by the invention position phase accurate control technique is to utilize laser pulse provided by the invention position phase accurate control device, by regulating the amplitude of the PZT drive signal in the Michelson interferometer, optical path difference between the laser pulse of in the scope of an optical maser wavelength two different light paths in by Michelson interferometer being propagated is finely tuned, and realizes the precision control between the laser pulse position mutually.
Description of drawings
Fig. 1 is the general frame figure of laser pulse position phase accurate control device;
Fig. 2 is the principle framework figure of servo circuit control system;
Fig. 3 is the principle framework figure of signal modulation module;
Fig. 4 is the principle framework figure of signal scanning module;
Fig. 5 is the principle framework figure of signal demodulation module;
Fig. 6 is the principle framework figure of compound amplification module;
Fig. 7 is the principle framework figure of power module;
Fig. 8 be the frequency setting that records of oscillograph at 10KHz, the peak-to-peak value amplitude is the modulation signal waveform figure of 2V;
Fig. 9 frequency setting that to be oscillograph record with 1: 10 ratio is 1KHz, the sweep signal oscillogram of peak-to-peak value amplitude 100V;
Figure 10 is the output waveform figure of this device servo circuit system when moving with scan pattern;
Figure 11 is that oscillograph records+ripple of 5V power supply;
Figure 12 is that oscillograph records-ripple of 5V power supply;
Figure 13 is that oscillograph records+ripple of 18V power supply;
Figure 14 is that oscillograph records-ripple of 18V power supply;
To be oscillograph record+ripple of 220V power supply with 1: 10 ratio Figure 15.
Embodiment
Below in conjunction with accompanying drawing and example, the present invention is described in further detail.
Femto-second laser pulse of the present invention position phase accurate control device mainly comprises: Michelson interferometer light path system and servo circuit control system.
Fig. 1 is the general frame figure of laser pulse position phase accurate control device.Chief component has: LASER Light Source 11; 50% beam splitting chip 12; Two interferometer one arms 13 that mutually perpendicular high reflective mirror is formed; 50% beam splitting chip 14; Photodetector 15; Incident angle is the optics high reflective mirror 16 of 0 degree; Pipe shape piezoelectric ceramics (PZT) 17; The photosignal 18 of photodetector output; The output signal 19 of servo circuit control system promptly is loaded into the signal on the PZT; Servo circuit control system 20.
Fig. 2 is the principle framework figure of servo circuit control system.Mainly comprise: the photosignal 18 of photodetector output; The output signal 19 of servo circuit control system; Signal modulation module 21; Signal demodulation module 22; Signal scanning module 23; Mode-changeover device 24; Compound amplification module 25; Power module 26.
Fig. 3 is the principle framework figure of signal modulation module.Mainly comprise: modulation signal generator 31; Signal follower 32; The signal 34 (modulation signal) of signal amplifier 33 and output.
Fig. 4 is the principle framework figure of signal scanning module.Mainly comprise: sweep generator 41; Signal follower 42; The signal 44 (sweep signal) of signal amplifier 43 and output.
The signal modulation module is similar with signal scanning module principle frame diagram, and difference is: modulation signal is the adjustable sinusoidal signal of frequency, amplitude, and the chamber sweep signal is the adjustable triangular signal of frequency, amplitude.The output terminal of sweep generator 41 links to each other with the input end of signal follower 42, and the output terminal of signal scanning module links to each other with an input end of compound amplification module 25 by mode-changeover device 24.The output terminal of modulation signal generator 31 links to each other with the input end of signal follower 32.This module has two output terminals: one links to each other with the input end of phase shifter of phase lock circuitry in the signal demodulation module; Another output terminal links to each other with an input end of compound amplification module.
Fig. 5 is signal demodulation module principle framework figure.The signal demodulation module is made up of photoelectricity receiving circuit 51, phase lock circuitry 52 and integrating circuit 58, and right empty frame is a photoelectricity receiving circuit 51, and left empty frame is a phase lock circuitry 52.The input signal of photoelectricity receiving circuit 51 is photosignals 18 that photodetector 15 obtains, and its output terminal links to each other with an input end of phase lock circuitry 52.Another input end of phase lock circuitry 52 links to each other with an output terminal of modulation signal module 21.Wherein, photoelectricity receiving circuit 51 is made up of bandpass filter 53 (being designated hereinafter simply as " BPF53 ") and signal amplifier 54.The input end of BPF53 links to each other with the output terminal of photodetector 15, and the output terminal of BPF53 links to each other with the output terminal of signal amplifier 54, and the output signal end of signal amplifier 54 links to each other with an input end of multiplier 56 in the phase lock circuitry 52.Phase lock circuitry 52 is made up of phase shifter 55, multiplier 56 and low-pass filter 57 (being designated hereinafter simply as " LPF57 ").The input end of phase shifter 55 links to each other with the output terminal of modulation signal 34.Multiplier 56 is cores of whole phase lock circuitry 52, and a signal input part of multiplier 56 links to each other with the output terminal of photoelectricity receiving circuit 51; Another input end is connected with the output terminal of phase shifter 55.The output signal end of multiplier 56 links to each other with the input end of LPF57, and the input end of the prime signal follower in the output terminal of LPF57 and the integrating circuit 58 is connected.Integrating circuit 58 is made up of integrator and two signal follower.Level connects signal follower respectively in the front and back of integrator, the output terminal of LPF57 in the input end of prime signal follower and the phase lock circuitry 52 is connected, the output signal of back level signal follower is a restituted signal 59, is connected with an input end of composite amplifier 25 by mode-changeover device 24.
Fig. 6 is compound amplification module principle framework figure.Compound amplification module is made up of bias voltage generator 61, composite amplifier 62 (comprising pre-amplifier and two parts of back level high-voltage amplifier) and the signal 19 (directly being loaded into the drive signal on the PZT) of output.Compound amplification module has three signal input parts, and wherein two input ends are connected with the output terminal of signal modulation circuit (output be 34 modulation signals) and the output terminal of bias voltage circuit (the adjustable dc offset voltage signal of generation amplitude) respectively.Another signal input part then is connected with the restituted signal circuit output end with the output terminal of sweep signal circuit by mode switch module.Wherein, the amplitude of modulation signal and frequency can need be regulated according to experiment.The amplitude of biasing voltage signal also can be regulated in the scope of 3.6-11.2V.The signal of another signal input part input is then selected to switch between sweep signal and restituted signal by mode switch module.Composite amplifier amplifies three input signals and the signal stack by different gain multiples, and wherein, modulation signal does not amplify, and d. c. voltage signal, restituted signal and chamber sweep signal gain multiple all are 10.The signal of compound amplification module output acts directly on the PZT, and the telescopic of control PZT is realized the precision control to laser pulse position phase.
Fig. 7 is power module principle framework figure.Comprise R type transformer 71; The two-way voltage signal 72 of+18V/-18V; The two-way voltage signal 73 of+15V/-15V; The single channel voltage signal 74 of+220V; The rectifier 75,77,79 of three groups of voltages; The voltage stabilizer 76,78,80 of three groups of voltages; What export is+5V/-5V two-way DC voltage 81; What export is+18V/-18V two-way DC voltage 82; What export is+220V single channel DC voltage 83.Wherein+voltage stabilizer of 220V in, the band current foldback circuit is to prevent causing power supply short circuit because of electric current is excessive.Signal 81 output be+5V/-5V two-way DC voltage, the ripple that measures is less than 2mV, about 0.04%; Signal 72 output be+18V/-18V two-way DC voltage, the ripple that measures is less than 2mV, about 0.011%; The single channel direct current signal of signal 74 output+220V, the ripple that measures be less than 40mV, and about 0.018%.Above ripple all measures under loaded situation.In three groups of out-put supplies, maximum ripple is no more than 40mV.Control element PZT17 length variations 500nm in this device needs drive voltage amplitude to change 43V, therefore, and the under-effected 0.5nm that the power supply ripple of 40mV changes for control element PZT17 telescopic.In this device operation, can not cause interference substantially less than the accuracy error of 0.5nm to the facies-controlled precision in laser pulse position and stability, this with regard to strong assurance this device can well realize that the precision of laser pulse position phase controls.
Embodiment: femto-second laser pulse position phase control technology:
Laser pulse is produced by LASER Light Source 11, enters Michelson interferometer, and laser is divided into the two-beam that light intensity equates by first 50% beam splitting chip 12, and a branch of light is propagated along an arm 13 of the interferometer of being made up of two mutually perpendicular optics high reflective mirrors; Another Shu Guang propagates via another arm of the interferometer that the PZT17 that has fixed optics high reflective mirror 16 constitutes, and two-beam is synthetic at second 50% beam splitting chip 14 places.Synthetic light is converted to photosignal 18 by photodetector 15, and as the input electrical signal of servo circuit control system 20, input electrical signal 18 is after servo-drive system 20 is handled, and output signal 19 acts directly on the PZT17.Utilize the piezoelectric property of PZT material, the variation of control electric signal is converted into the telescopic variation of PZT17 length, thereby regulate the position of the high reflective mirror 16 of interferometer one arm, change the optical path difference between interferometer two arms, reach and realize the facies-controlled purpose in laser pulse position.Wherein, the effect of photodetector is that laser signal is converted into electric signal, is input in the servo circuit system and is controlled; And the effect of PZT is the variation that the control electric signal of servo circuit system output is converted into interferometer output light signal.
The first step: select servo-control system 20 is moved with scan pattern by mode switch module 24, under this operational mode, servo-control system 20 will not handled the photosignal 18 of input, and the signal 19 of servo-control system 20 outputs is the superposed signal (carrying out the signal stack in compound amplification module amplifies) of sweep signal (scan module generation) and modulation signal (modulation module generation).This superposed signal acts directly on the PZT17, and the effect of modulation signal produces by modulating frequency PZT17, and telescopic is by a small margin realized the signal modulation for light path; The effect of sweep signal then is that PZT17 produces by certain frequency, and the telescopic of the about optical maser wavelength of amplitude swings back and forth PZT17 about its equilibrium position, and optical cavity scanning is carried out in the closed laser chamber that interferometer forms.The variation of photosignal in scanning that obtains according to photodetector, the suitable fine adjustment light path system of interferometer is once realized the minute adjustment of interferometer light path.
Second step: select servo-control system 20 with lock chamber mode operation by mode switch module 24.Under this operational mode, servo circuit system 20 will handle the photosignal 18 of input, and the output of interrupt scanning signal.System will import photosignal 18 by photoelectricity receiving circuit 51 carry out bandwidth filtering, pre-amplify etc. handle after, be input in the multiplier 56 in the phase lock circuitry 52 as an one input signal; The modulation signal that modulation module 21 produces is input in the phase shifter 55 of phase lock circuitry 52 of demodulation module 22, be input to again in the multiplier 56 as its second input signal, the output signal of multiplier 56 enters low-pass filter 57 (LPF57) and carries out low-pass filtering, the output restituted signal; At this moment, input modulating signal 34, restituted signal 59 reach the dc offset voltage that is produced by bias voltage generator to three of compound amplification module 25 input ends respectively.After this three signal amplified stack through the two-stage of composite amplifier 25, output PZT17 control signal was carried in PZT17 and upward it is carried out FEEDBACK CONTROL.Wherein, the effect of modulation signal 34 is that light path is carried out the signal modulation; Restituted signal then is the change in location by control PZT17, realizes the precision control of laser pulse position phase.Control accuracy can reach several nanometer scale.

Claims (3)

1. femto-second laser pulse position phase accurate control device, mainly comprise: Michelson interferometer, photodetector and servo circuit control system, high reflective mirror (16) back side that it is characterized in that constituting an arm of Michelson interferometer is fixed with pipe shape piezoelectric ceramics (17); The servo circuit control system is made up of signal scanning module, signal modulation module, mode switch module, signal demodulation module, compound amplification module and power module; Photodetector (15) receives the light signal of interferometer output, and is translated into electric signal (18), and the output terminal of photodetector links to each other with an input end of the demodulation module of servo circuit control system.
2. a femto-second laser pulse position phase accurate control technique is characterized in that comprising the steps:
The first step: operational mode is switched to the scanning operational mode, film scanning is indulged in the closed laser chamber that Michelson interferometer forms, by regulating the high reflective mirror of Michelson interferometer two arms, the closed laser chamber that Michelson interferometer forms is regulated, realized the preliminary adjusting of interferometer light path;
Second step: operational mode is switched to phase-locked operational mode, the photosignal (18) of photodetector (15) output after filtering, phase-locked, integration, processing and amplifying, is driven control element pipe shape piezoelectric ceramics (17) in the Michelson interferometer and realizes precision control for laser pulse position phase.
3. a kind of femto-second laser pulse as claimed in claim 2 position phase accurate control technique, it is characterized in that by regulating the amplitude of pipe shape piezoelectric ceramics (17) drive signal in the Michelson interferometer, optical path difference between the laser pulse of in the scope of an optical maser wavelength two different light paths in by Michelson interferometer being propagated is finely tuned, and realizes the precision control between the femto-second laser pulse position mutually.
CN 200610026303 2006-04-30 2006-04-30 Technology and apparatus for precise control of femtosecond laser pulse phase Pending CN1844996A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102566057A (en) * 2012-01-15 2012-07-11 中国人民解放军国防科学技术大学 Multi-beam beam combiner with optical distance adjusting ability
CN103888111A (en) * 2014-04-11 2014-06-25 北京理工大学 Pulse sequence modulation method based on Michelson interferometer and modulator
CN104218441A (en) * 2013-05-31 2014-12-17 中自高科(苏州)光电有限公司 Ultrafast laser pulse sequence modulation method
CN105720472A (en) * 2014-12-23 2016-06-29 门罗系统股份有限公司 Optical resonator arrangement and a method for adjusting a round-trip time in a resonator
CN106290249A (en) * 2016-10-12 2017-01-04 武汉智勤创亿信息技术有限公司 A kind of integrated small laser gas detection components
CN108899745A (en) * 2018-09-07 2018-11-27 成都师范学院 Femto-second laser pulse frequency spectrum shaping device and its application method
CN111638387A (en) * 2020-06-12 2020-09-08 中国科学院长春光学精密机械与物理研究所 STM dynamic response detection system and method based on double displacement tables
CN111650404A (en) * 2020-06-12 2020-09-11 中国科学院长春光学精密机械与物理研究所 Light-induced STM dynamic response detection system and method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102566057A (en) * 2012-01-15 2012-07-11 中国人民解放军国防科学技术大学 Multi-beam beam combiner with optical distance adjusting ability
CN102566057B (en) * 2012-01-15 2013-06-12 中国人民解放军国防科学技术大学 Multi-beam beam combiner with optical distance adjusting ability
CN104218441A (en) * 2013-05-31 2014-12-17 中自高科(苏州)光电有限公司 Ultrafast laser pulse sequence modulation method
CN103888111A (en) * 2014-04-11 2014-06-25 北京理工大学 Pulse sequence modulation method based on Michelson interferometer and modulator
CN103888111B (en) * 2014-04-11 2016-06-01 北京理工大学 Based on pulse sequence modulator approach and the modulator of Michelson interferometer
CN105720472A (en) * 2014-12-23 2016-06-29 门罗系统股份有限公司 Optical resonator arrangement and a method for adjusting a round-trip time in a resonator
CN106290249A (en) * 2016-10-12 2017-01-04 武汉智勤创亿信息技术有限公司 A kind of integrated small laser gas detection components
CN108899745A (en) * 2018-09-07 2018-11-27 成都师范学院 Femto-second laser pulse frequency spectrum shaping device and its application method
CN111638387A (en) * 2020-06-12 2020-09-08 中国科学院长春光学精密机械与物理研究所 STM dynamic response detection system and method based on double displacement tables
CN111650404A (en) * 2020-06-12 2020-09-11 中国科学院长春光学精密机械与物理研究所 Light-induced STM dynamic response detection system and method
CN111638387B (en) * 2020-06-12 2021-08-03 中国科学院长春光学精密机械与物理研究所 STM dynamic response detection system and method based on double displacement tables
CN111650404B (en) * 2020-06-12 2021-08-03 中国科学院长春光学精密机械与物理研究所 Light-induced STM dynamic response detection system and method

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