CN1836124A - Extended stroke valve and diaphragm - Google Patents

Extended stroke valve and diaphragm Download PDF

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Publication number
CN1836124A
CN1836124A CN 200480023069 CN200480023069A CN1836124A CN 1836124 A CN1836124 A CN 1836124A CN 200480023069 CN200480023069 CN 200480023069 CN 200480023069 A CN200480023069 A CN 200480023069A CN 1836124 A CN1836124 A CN 1836124A
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mentioned
valve
diaphragm
membrane
polymer material
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CN 200480023069
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CN100381732C (en
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约汉·A·雷伊斯
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Entegris Inc
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Entegris Inc
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Abstract

An extended stroke poppet valve particularly suited for handling caustic fluids and having features enabling an extended service life for the valve. The valve includes a two part primary diaphragm assembly with a wetted diaphragm made from highly fatigue resistant fluoropolymer material, and a diaphragm backer made from high strength fluoropolymer material designed to withstand the high stress loads imposed by an extended valve stroke. The combination of these two layers in a single primary diaphragm assembly yields a highly durable, caustic chemical resistant, diaphragm capable of use in a long stroke poppet valve and having a relatively long service life.

Description

The valve of extended stroke and barrier film
Related application
The application require name be called " valve of extended stroke and barrier film " respectively at proposed on July 11st, 2003 the 60/486th, reach for No. 301 in the 60/486th of proposition on July 14th, 2003, the preference of No. 959 U.S. Provisional Patent Application, the full content of these two applications all is incorporated in this.
Technical field
Present invention relates in general to valve, relate in particular to the valve of the extended stroke that flows high fluidity, that be used to control corrosive fluid.
Background technique
Semi-conductor industry uses various types of valves with the control fluid, comprises flowing of highly corrosive fluid.It is essential that these valves can not cause in process fluid flow becomes fluid to stagnate and degenerates or catch static point or the dead point that solid causes fluid contamination.Fluid must have suitable flow sometimes in the semiconductor manufacturing, and any valve that importantly is used for pipe-line system does not cause the unsuitable pressure loss or flow restriction.In addition, because the highly corrosive fluid is in being usually used in semi-conductor industry, it also is very important that the quantity of potential source of leaks or sealing is remained on bottom line.
These valves must be made by the high material of corrosion resistance fluid property.Generally speaking, corrosive fluid should be avoided with contacting of metalwork.The parts that contact with fluid are for example crossed Fluoroalkyloxy (PFA), polyvinylidene fluoride (PVDF) or polytetrafluoroethylene (PTFE) and are formed typically by fluoropolymer.Typically, the valve that part directly contacts with fluid, for example valve body, valve and valve seat, one-level barrier film and sealing or liner will be formed by fluorinated polymer material.
Usually the driver by using extended stroke improves a bigger distance with valve increases gap between valve and the valve seat and can reduce flow restriction by poppet valve.Yet in the valve that uses fluoropolymer diaphragms, a problem is that this barrier film does not generally speaking have long fatigue life, and it will wear and tear in the short relatively time.In addition, the fluoropolymer diaphragms that have enough elasticity, can cooperate with the driver of extended stroke rightly is impaired and easy overload easily, thereby causes the too early damage of valve.In the semiconductor machining operation of key, the damage of valve causes work in-process the delay of cost heaviness and causes key equipment and the damage of product.
In industry, still need the poppet valve of extended stroke that is used for corrosive fluid, has the performance of the service life that can prolong valve.
Summary of the invention
The invention provides a kind of poppet valve that is specially adapted to handle the extended stroke of corrosive fluid, compare the performance that it has the service life that can prolong valve with existing valve.This valve comprises two-part one-level septum assembly of the diaphragm backer of a high pressure load that has the wet barrier film made by the highly anti-fatigue fluorinated polymer material and made by the high strength fluorinated polymer material, apply with the Valve travel of keeping out lengthening.In single one-level septum assembly, this two-layer combination will form high durable, the corrosion resistance chemical substance, can in long stroke poppet valve, use and have a barrier film than long service life.Its direct result is that the serviceability and the service life of valve is improved, thereby work efficiency is improved, and cost reduces.
Hold above-mentionedly, membrane valve comprises the valve body that forms inlet passage, outlet passage and fluid chamber.Fluid chamber has inwall and opening side.Inlet passage and outlet passage form opening at inwall makes fluid to circulate between inlet passage, outlet passage and fluid chamber.Valve seat part is surrounded the inlet passage opening in the fluid chamber.Elastic diaphragm assembly is used for the opening side of closed fluid chamber hermetically.Elastic diaphragm has over against the valve portion of fluid chamber inside, and optionally is placed at least one valve portion and valve seat part and engages hermetically with block fluid flow and pass the valve operating position of valve and be placed on valve portion and valve seat separates so that fluid flows and passes the valve opening position of valve.Elastic diaphragm assembly comprises having the one-level septum assembly that the one-level diaphragm element that is formed by the antifatigue fluorinated polymer material reaches the contiguous diaphragm backer member that is formed by the high strength fluorinated polymer material.Septum assembly also can comprise the secondary diaphragm that separates with the one-level septum assembly.Valve also can comprise being operably connected with elastic diaphragm assembly and is used for optionally elastic diaphragm assembly being placed the driven unit of opening of valves and valve operating position.
Description of drawings
Fig. 1 is the stereogram of valve of the present invention;
Fig. 2 is the plan view of valve shown in Figure 1;
Fig. 3 is the exploded view of valve of the present invention;
Fig. 4 is that expression is positioned at the valve of valve operating position along the sectional view of 4-4 part among Fig. 2;
Fig. 5 is that expression is positioned at the valve of valve opening position along the sectional view of 5-5 part among Fig. 2;
Fig. 6 is the amplification view of a part among Fig. 4;
Fig. 7 is the amplification view of a part among Fig. 5;
Fig. 8 is the sectional view along 8-8 part among Fig. 2; And
Fig. 9 is another embodiment's of a valve of the present invention sectional view.
Embodiment
The valve 10 of extended stroke generally speaking comprises body 12, septum assembly 14 and driven unit 16.Body 12 has the core 18 that has a pair of protrusion threaded nipple 20,22.Inlet passage 24 extends in the core 18 from threaded nipple 20, and it upwards changes and terminates in fluid chamber 26.The terminal that valve seat 28 surrounds the inlet passage 24 in the fluid chamber 26.Outlet passage 30 extends through core 18 and threaded nipple 22 from fluid chamber 26.Cooperate ring 32 to divide 18 to extend upward from central division, and have and be used to install the septum assembly 14 that will be described below and the internal whorl zone 34 and the exterior threaded region 36 of driven unit 16.Each threaded nipple 20,22 has and is used to install the threaded portion 38 of screw thread crimp sleeve 40 so that valve 10 can be fixed in pipeline or conduit (not shown).In addition, the accessory or the joint of any other type comprise that taper joint, straight thread connector or weldment can be used for pipeline or conduit are connected to valve 10 certainly.
Septum assembly 14 generally speaking comprises one-level septum assembly 42, diaphragm protector washer 44, secondary diaphragm 46 and valve rod 48.One-level septum assembly 42 generally speaking comprises wet barrier film 50 and diaphragm backer 52.Wet barrier film 50 is preferably formed by the highly anti-fatigue fluorinated polymer material, preferred PTFE material.At present, the most preferred material that is used for wet barrier film 50 is the Da Jin M112 that is made by Daikin Industrial Co., Ltd.Another kind of preferred material is " HyQ " PTFE.Diaphragm backer 52 is preferably formed by high strength modified fluoropolymer material, preferred PTFE material.At present, the most preferred material that is used for diaphragm backer 52 is the GORE-TEXR that the Ge Er company by Delaware state Newark makes.Certainly, be readily appreciated that, select that wet barrier film 50 can be by the high strength modified fluoropolymer material manufacturing, and diaphragm backer 52 can be made by the highly anti-fatigue fluorinated polymer material as another kind.
Wet barrier film 50 has core 54 and the peripheral ring 56 that connects by thin elastic part 58.Peripheral ring 56 is installed in the groove up 60 of core 18 of body 12 hermetically.Valve member 62 divides 54 to protrude and have an expansion projection 64 that has lower surface 66 from central division downwards.The hermetic unit 68 that tilts is formed on the lower surface 66, and its position and size cooperate hermetically with valve seat 28.Groove 70 is formed at the top surface 72 of core 54, and has the internal whorl 73 that is used to install the valve rod 48 that will be described below.
Diaphragm protector washer 44 has exterior threaded region 74 and is screwed with the internal whorl zone 34 that cooperates ring 32.Wet barrier film 50 and diaphragm backer 52 are pressed between the convex shoulder 76 of diaphragm protector washer 44 and body 12, see the most clearly in Fig. 6 and Fig. 7.When diaphragm protector washer 44 was tightened, peripheral ring 56 was pressed in the groove 60, thereby formed sealing in the periphery of one-level septum assembly 42.Diaphragm protector washer 44 has center hole 78.Valve rod 48 extends through center hole 78 with mesh groove 70.
Secondary diaphragm 46 covers diaphragm protector washer 44, and has periphery ring 80 and the center ring 82 that connects by thin elastic part 84.Hole 86 in the center ring 82 is enclosed within on the intermediate portion 88 of valve rod 48 and with the intermediate portion 88 of valve rod 48 and engages.When periphery ring 80 was contained in the top convex shoulder 94 that cooperates ring 32, the lower surface 90 of secondary diaphragm 46 engaged with the convex shoulder 92 of valve rod 48.If one-level septum assembly 42 leaks, secondary diaphragm 46 will be as upper barrier, and secondary diaphragm 46 can be made by any suitable elasticity and material antifatigue, that have suitable strength characteristics.At present most preferably the synthetic of PTFE, fabric and fluoroelastomer material is used for secondary diaphragm 46.Preferred fluoroelastomer material is the Viton  by elastomer company of the Du Pont manufacturing in Wilmington city, Delaware state.
Valve rod 48 has following helical thread portion 96, enlarged 98, stepped shaft intermediate portion 88 and goes up helical thread portion 100.Following helical thread portion 96 have be used for one-level septum assembly 42 in the external screw-thread 102 that screws togather of the internal whorl 73 of groove 70.Enlarged 98 has the lower surface 104 on the top surface 72 that is pressed in one-level septum assembly 42.Last helical thread portion 100 screws togather with the driven unit 16 that will be described below.
Driven unit 16 generally speaking comprises piston 106, cluster spring 108, seal ring 110,112, housing 114 and guard ring ring 116.Piston 106 is slidably mounted in the housing 114, and generally speaking comprises valve stem part 118 and the piston guide part 120 that connects by connecting plate part 122.Valve stem part 118 has 126 endoporus 124 that extend from the bottom side.Endoporus 124 can have the internal whorl 128 of the last helical thread portion 100 that is used to install valve rod 48.Piston guide part 120 has peripheral groove 130, and the size of this peripheral groove 130 can be installed seal ring 110, and sealing ring 110 forms the sealing of sliding with the inwall 132 of housing 114.The orientation of valve stem part 118, connecting plate part 122 and piston guide part 120 preferably makes 106 one-tenth in piston have the cup-shapeds of groove 134 upwards.Cluster spring 108 is contained in the groove 134, and is pressed against the inwall 132 of the internal surface 136 of groove 134 and housing 114 so that the power that will lean on puts on piston 106 and septum assembly 14 downwards.In illustrated embodiment, cluster spring 108 comprises external springs 138, middle springs 140 and contained spring 142.Yet, be readily appreciated that, cluster spring 108 can comprise any amount and structure, with hydrodynamic pressure that uses with valve and and the compatible spring of feature of the special driver that uses together of valve 10.Be readily appreciated that also though described common closo valve arrangement here, septum assembly 14 of the present invention also can be applicable in the design of common open type valve.
Housing 114 has the hole 144 in roof 146.The valve stem part 118 of piston 106 extends through hole 144 and slides in hole 144.Seal ring 112 is enclosed within on the valve stem part 118 and is installed in the peripheral groove 147.Seal ring 112 is used to prevent to pass hole 144 and the leakage around valve stem part 118.Housing 114 also has the peripheral flange 148 that is engaged by guard ring ring 116.Guard ring ring 116 has internal whorl 150, and this internal whorl 150 screws togather the exterior threaded region 36 of cooperation ring 32 so that driven unit 16 is held on body 12.The selectivity that motor-driven or manual driving arrangement (not shown) can engage with valve stem part 118 to be implemented in the piston 106 in the housing 114 moves.
Can provide from the leakage signal mouth 152 that extends in the zone 154 of the periphery of one-level septum assembly 42 escape of liquid to be provided to pass or flow through the indication of one-level septum assembly 42.Leakage signal mouth 152 can be by little fluoropolymer connector (not shown) sealing, and this connector will be sprayed by the hydrodynamic pressure that leakage applies.In addition, as shown in Figure 9, can provide threaded nipple 153 with the connecting duct (not shown) so that any escape of liquid of passing leakage hole 152 can be away from around the valve 10.
In operation, cluster spring 108 is pushing away piston 106 and septum assembly 14 downwards usually in the valve operating position, so that valve member 62 engages hermetically with valve seat 28, the fluid that obturation is passed valve 10 flows.Then, piston 106 can be against the thrust of cluster spring 108 upward displacement optionally, so that valve member 62 is moved to valve opening position away from valve seat 28, thereby make fluid can flow through inlet passage 24, fluid chamber 26 and outlet passage 30.Therefore, septum assembly 14 and valve member 62 optionally place opening of valves or valve closed position.
Fig. 9 has represented another embodiment of the valve 156 of extended stroke.Valve 156 generally speaking comprises body 158, septum assembly 160 and driven unit 162.Body 158 has the core 164 that has a pair of protrusion threaded nipple 166,168.Inlet passage 170 extends in the core 164 from threaded nipple 166, and it upwards changes and terminates in fluid chamber 172.The terminal that valve seat 174 surrounds the inlet passage 170 in the fluid chamber 172.Outlet passage 176 extends through core 164 and threaded nipple 168 from fluid chamber 172.Cooperate ring 178 to divide 164 to extend upward from central division, and have internal whorl zone 180 and the exterior threaded region 182 that is used to install above-mentioned septum assembly 160 and driven unit 162.In addition, each threaded nipple 166,168 has the threaded portion 184 that is used to install screw thread crimp sleeve 186.
Septum assembly 160 generally speaking comprises wet septum assembly 188, diaphragm protector washer 190 and valve rod 192.One-level septum assembly 188 generally speaking comprises wet barrier film 194 and diaphragm backer 196.In addition, wet barrier film 194 is preferably formed by the highly anti-fatigue fluorinated polymer material, preferred PTFE material, for example Da Jin M112 or " HyQ " PTFE.Diaphragm backer 196 is preferably formed by high strength modified fluoropolymer material, preferred PTFE, for example GORE-TEX .
Wet barrier film 194 has core 198 and the peripheral ring 200 that connects by thin elastic part 202.Peripheral ring 200 is installed in the groove up 204 of core 164 of body 158 hermetically.Valve member 206 divides 198 to protrude and have an expansion projection 208 that has lower surface 210 from central division downwards.The hermetic unit 212 that tilts is formed on the lower surface 210, and its position and size cooperate hermetically with valve seat 174.Groove 214 is formed at the top surface 216 of core 198, and has the internal whorl 218 that is used to install valve rod 192.
Diaphragm protector washer 190 has exterior threaded region 220 and is screwed with the internal whorl zone 180 that cooperates ring 178.Wet barrier film 194 and diaphragm backer 196 are pressed between the convex shoulder 222 of diaphragm protector washer 190 and body 158.When diaphragm protector washer 190 was tightened, peripheral ring 200 was pressed in the groove 204, thereby formed sealing in the periphery of wet septum assembly 188.Diaphragm protector washer 190 has center hole 224.Valve rod 192 extends through center hole 224 with mesh groove 214.
Valve rod 192 has following helical thread portion 226, enlarged 228 and goes up helical thread portion 230.Following helical thread portion 226 has the external screw-thread 232 of the internal whorl 218 that is used to screw togather the groove 214 in the wet septum assembly 188.Enlarged 228 has the lower surface 232 on the top surface 216 that is pressed in wet septum assembly 188.Last helical thread portion 230 screws togather with the driven unit 16 that will be described below.
Driven unit 162 generally speaking comprises piston 234, cluster spring 236, seal ring 238,240, housing 242 and guard ring ring 244.Piston 234 is slidably mounted in the housing 242, and generally speaking comprises valve stem part 246 and the piston guide part 248 that connects by connecting plate part 250.Valve stem part 246 has 254 endoporus 252 that extend from the bottom side.Endoporus 252 can have the internal whorl 256 of the last helical thread portion 230 that is used to install valve rod 192.Piston guide part 248 has peripheral groove 258, and the size of this peripheral groove 258 can be installed seal ring 238, and sealing ring 238 forms the sealing of sliding with the inwall 260 of housing 242.The orientation of valve stem part 246, connecting plate part 250 and piston guide part 248 preferably makes 234 one-tenth in piston have the cup-shapeds of groove 262 upwards.Cluster spring 236 is contained in the groove 262, and is pressed against the inwall 260 of the internal surface 264 of groove 262 and housing 242 so that the power that will lean on puts on piston 234 and septum assembly 160 downwards.In illustrated embodiment, cluster spring 236 comprises external springs 266, middle springs 268 and contained spring 270.Yet, be readily appreciated that, cluster spring 236 can comprise any amount and structure, with hydrodynamic pressure that uses with valve and and the compatible spring of feature of the special driver that uses together of valve 156.Be readily appreciated that also though described common closo valve arrangement here, septum assembly 160 of the present invention also can be applicable in the design of common open type valve.
Housing 242 has the hole 272 in roof 274.The valve stem part 246 of piston 234 extends through hole 272 and slides in hole 272.Seal ring 240 is enclosed within on the valve stem part 246 and is installed in the peripheral groove 276.Seal ring 240 is used to prevent to pass hole 272 and the leakage around valve stem part 246.Housing 242 also has the peripheral flange 278 that is engaged by guard ring ring 244.Guard ring ring 244 has internal whorl 280, and this internal whorl 280 screws togather the exterior threaded region 182 of cooperation ring 178 so that driven unit 162 is held on body 158.The selectivity that motor-driven or manual driving arrangement (not shown) can engage with valve stem part 246 to be implemented in the piston 234 in the housing 242 moves.
In the embodiment shown in fig. 9, provide secondary seal with the O-ring.Piston 234 has the piston guide part 282 that lets droop, form groove 284.The enlarged 228 of valve rod 192 is installed in the groove 284.Diaphragm protector washer 190 has groove 286 up.O-ring 288 is contained in the groove 286 and is contained in around the outer surface 290 of piston guide part 282.In addition, diaphragm protector washer 190 has outwardly groove 292 so that O-ring 294 to be installed between the inwall 260 of diaphragm protector washer 190 and housing 242.In addition, the cooperation ring 178 of body 158 has groove 246 in upper surface 298 between ring 178 and the housing 242 O-to be installed and to encircle 300 cooperating.These O-ring 288,294,300 provides the additional sealing of passing the septum assembly 194 that wets because of the leakage of breaking or the seepage of fluid causes of preventing.
Can provide from the leakage signal mouth 302 that extends in the zone 304 of the periphery of wet septum assembly 194 escape of liquid to be provided to pass or flow through the indication of wet septum assembly 194.Leakage signal mouth 302 can be by little fluoropolymer connector (not shown) sealing, and this connector will be sprayed by the hydrodynamic pressure that leakage applies.In addition, can provide accessory 306 with the connecting duct (not shown) so that any escape of liquid of passing leakage hole 302 can be away from around the valve 152.
Diaphragm assembly 14 of the present invention, 160 has significant advantage than prior art. One-level/wet barrier film Assembly 42, two parts of 188 structure comprise the wet barrier film of being made by the highly anti-fatigue fluorinated polymer material And the high pressure that the stroke of valve to keep out lengthening of being made by the high strength fluorinated polymer material applies is negative The diaphragm backer of carrying. In single one-level diaphragm assembly, this two-layer combination will form high durable, The corrosion resistance chemical substance, that can in long stroke lift valve, use and have than long service life Barrier film. Its direct result is that durability and the service life of valve will be improved, thereby so that adds work efficiency Rate is improved, cost. Although two kinds of positions logical normally closed two logical lift valves have been described here, But understand easily, that diaphragm assembly of the present invention is applicable to is wider, comprise common unlatching, And three, the valve arrangement of the extended stroke of cross valve.
Claims
(according to the modification of the 19th of treaty)
1. membrane valve is characterized in that comprising:
Valve body, it forms inlet passage, outlet passage and has inwall and the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber;
Valve seat part, it surrounds the inlet passage opening in the fluid chamber;
Elastic diaphragm assembly, its hermetically closed above-mentioned fluid chamber opening side and have over against the valve portion of above-mentioned fluid chamber inside, above-mentioned elastic diaphragm assembly optionally engages hermetically that the valve operating position of passing above-mentioned valve with block fluid flow separates with above-mentioned valve portion and above-mentioned valve seat so that fluid flows changes between the valve opening position that passes above-mentioned valve at least one above-mentioned valve portion and above-mentioned valve seat part, above-mentioned elastic diaphragm assembly comprises the one-level septum assembly of being made up of one-level diaphragm element and diaphragm backer member, this one-level diaphragm element produces a pair of facing surfaces and is formed by thin antifatigue fluorinated polymer material, this diaphragm backer member is contiguous and extend simultaneously with one of them of a pair of facing surfaces of one-level diaphragm element in fact, the diaphragm backer member is formed by thin high strength fluorinated polymer material, and above-mentioned elastic diaphragm assembly also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly; And
Driven unit, it is operably connected with above-mentioned elastic diaphragm assembly, is used for optionally above-mentioned elastic diaphragm assembly being placed each above-mentioned opening of valves and above-mentioned valve operating position.
2. membrane valve according to claim 1 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
3. membrane valve according to claim 1 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
4. membrane valve according to claim 1 is characterized in that above-mentioned valve body is formed by the PTFE material.
5. membrane valve according to claim 1 is characterized in that above-mentioned driven unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
6. membrane valve according to claim 5 is characterized in that above-mentioned driven unit also comprises to above-mentioned piston to apply by power, makes above-mentioned driven unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
7. membrane valve according to claim 5 is characterized in that above-mentioned valve comprises and is used for elastic diaphragm assembly is held on diaphragm protector washer in the valve.
8. membrane valve according to claim 7, it is characterized in that diaphragm protector washer has center hole, wherein a part of piston is positioned at the center hole of diaphragm protector washer slidably, and wherein valve also comprises pair of O-ring, one of them O-ring is installed between the inwall of piston and housing hermetically, and another O-encircles and is installed in diaphragm protector washer hermetically and extends through in the center hole between a part of piston of this diaphragm protector washer.
9. membrane valve according to claim 5 is characterized in that valve also comprises the secondary diaphragm that is installed in the elastic diaphragm assembly top.
10. membrane valve is characterized in that:
Valve body, it forms inlet passage, outlet passage and has inwall and the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber and form glide path;
The valve seat device, it is in fluid chamber and be placed in the above-mentioned glide path;
Diaphragm apparatus, it is the opening side of closed above-mentioned fluid chamber hermetically, diaphragm apparatus has optionally the control valve unit with above-mentioned valve seat means for engaging, above-mentioned control valve unit optionally separates with above-mentioned control valve unit and above-mentioned valve seat device so that change between the enable possition that above-mentioned glide path does not get clogged in the operating position that at least one above-mentioned control valve unit blocks above-mentioned glide path, above-mentioned diaphragm apparatus comprises at least one diaphragm element and a diaphragm backer member, this diaphragm element produces a pair of facing surfaces and is formed by thin antifatigue fluorinated polymer material, this diaphragm backer member is contiguous and extend simultaneously with one of them of a pair of facing surfaces of one-level diaphragm element in fact, and the diaphragm backer member is formed by thin high strength fluorinated polymer material; And
Drive unit, it is operably connected with above-mentioned diaphragm apparatus and is used for optionally above-mentioned diaphragm apparatus being placed each above-mentioned opening of valves and above-mentioned valve operating position.
11. membrane valve according to claim 10 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
12. membrane valve according to claim 10 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
13. membrane valve according to claim 10 is characterized in that above-mentioned valve body is formed by the PTFE material.
14. membrane valve according to claim 10 is characterized in that above-mentioned drive unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
15. membrane valve according to claim 14 is characterized in that above-mentioned drive unit also comprises to above-mentioned piston to apply by power, makes above-mentioned drive unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
16. membrane valve according to claim 10, it is characterized in that above-mentioned diaphragm apparatus comprises one-level diaphragm element that is formed by the antifatigue fluorinated polymer material and the one-level septum assembly of being made up of the contiguous diaphragm backer member that the high strength fluorinated polymer material forms, wherein above-mentioned diaphragm apparatus also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly.
17. a membrane valve of being made by a kind of course of working is characterized in that this course of working comprises the steps:
Provide and form inlet passage, outlet passage and have inwall and the valve body of the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber; Above-mentioned valve body also comprises the valve seat part of surrounding the inlet passage opening in the fluid chamber;
Be formed for the elastic diaphragm assembly of the opening side of closed above-mentioned fluid chamber hermetically, above-mentioned septum assembly has over against the valve portion of above-mentioned fluid chamber inside, above-mentioned elastic diaphragm assembly optionally is placed at least one above-mentioned valve portion and above-mentioned valve seat part and engages hermetically with block fluid flow and pass the valve operating position of above-mentioned valve and be placed on above-mentioned valve portion and above-mentioned valve seat separates so that fluid flows and passes the valve opening position of above-mentioned valve, above-mentioned elastic diaphragm assembly comprises the one-level septum assembly of being made up of one-level diaphragm element and diaphragm backer member, this one-level diaphragm element produces a pair of facing surfaces and is formed by thin antifatigue fluorinated polymer material, this diaphragm backer member is contiguous and extend simultaneously with one of them of a pair of facing surfaces of one-level diaphragm element in fact, the diaphragm backer member is formed by thin high strength fluorinated polymer material, and above-mentioned elastic diaphragm assembly also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly; And
Above-mentioned elastic diaphragm assembly and above-mentioned valve body are engaged opening side with the above-mentioned fluid chamber of closure hermetically.
18. membrane valve according to claim 17 is characterized in that the course of working of making valve also comprises step: be provided for optionally placing the driven unit of above-mentioned elastic diaphragm assembly, and be operably connected above-mentioned driven unit and above-mentioned elastic diaphragm assembly.
19. a membrane valve is characterized in that comprising:
(a) valve body of formation import and outlet;
(b) be placed on above-mentioned import and the outlet between valve seat; And
(c) comprise the membrane configuration of one-level barrier film and secondary diaphragm, above-mentioned one-level barrier film has and can optionally engage the valve portion that passes above-mentioned import and outlet with block fluid flow with above-mentioned valve seat, above-mentioned one-level barrier film is by the one-level diaphragm element that produces a pair of facing surfaces and vicinity and form with one of them diaphragm backer member that extends simultaneously of a pair of facing surfaces of one-level diaphragm element in fact, one of them of wherein above-mentioned one-level diaphragm element and above-mentioned diaphragm backer member formed by thin high strength fluorinated polymer material, and another is formed by thin antifatigue fluorinated polymer material.
20. membrane valve according to claim 19 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
21. membrane valve according to claim 19 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
22. membrane valve according to claim 19 is characterized in that above-mentioned valve body is formed by the PTFE material.
23. membrane valve according to claim 19 is characterized in that also comprising being operably connected with above-mentioned membrane configuration being used for optionally placing above-mentioned membrane configuration and passing the driven unit of above-mentioned valve to block to flow.
24. membrane valve according to claim 23 is characterized in that above-mentioned driven unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
25. membrane valve according to claim 24 is characterized in that above-mentioned driven unit also comprises to above-mentioned piston to apply by power, makes above-mentioned driven unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
26. a membrane valve is characterized in that comprising:
(a) valve body of formation import and outlet;
(b) be placed on above-mentioned import and the outlet between valve seat;
(c) have and optionally to engage the wet septum assembly that passes the valve portion of above-mentioned import and outlet with block fluid flow with above-mentioned valve seat, above-mentioned wet septum assembly is by the one-level diaphragm element that produces a pair of facing surfaces and vicinity and form with one of them diaphragm backer member that extends simultaneously of a pair of facing surfaces of one-level diaphragm element in fact, one of them of wherein above-mentioned one-level diaphragm element and above-mentioned diaphragm backer member formed by thin high strength fluorinated polymer material, and another is formed by thin antifatigue fluorinated polymer material;
(d) housing that is operably connected with above-mentioned valve body is equipped with piston slidably in above-mentioned housing, piston is operably connected with wet septum assembly so that wet septum assembly and piston are optionally placed;
(e) be operably connected with body and be used for wet septum assembly is held on diaphragm protector washer in the valve, diaphragm protector washer has center hole, and a part of piston is positioned at the center hole of diaphragm protector washer slidably; And
(f) pair of O-ring, one of them O-ring is installed between the inwall of piston and housing hermetically, and another O-encircles and is installed in diaphragm protector washer hermetically and extends through in the center hole between a part of piston of this diaphragm protector washer.
27. membrane valve according to claim 26 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
28. membrane valve according to claim 26 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
29. membrane valve according to claim 26 is characterized in that above-mentioned valve body is formed by the PTFE material.
30. membrane valve according to claim 19 is characterized in that also comprising being operably connected with above-mentioned piston being used for optionally placing above-mentioned wet septum assembly and passing the driver of above-mentioned valve to block to flow.

Claims (30)

1. membrane valve is characterized in that comprising:
Valve body, it forms inlet passage, outlet passage and has inwall and the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber;
Valve seat part, it surrounds the inlet passage opening in the fluid chamber;
Elastic diaphragm assembly, its hermetically closed above-mentioned fluid chamber opening side and have over against the valve portion of above-mentioned fluid chamber inside, above-mentioned elastic diaphragm assembly optionally engages hermetically that the valve operating position of passing above-mentioned valve with block fluid flow separates with above-mentioned valve portion and above-mentioned valve seat so that fluid flows changes between the valve opening position that passes above-mentioned valve at least one above-mentioned valve portion and above-mentioned valve seat part, above-mentioned elastic diaphragm assembly comprises one-level diaphragm element that is formed by the antifatigue fluorinated polymer material and the one-level septum assembly of being made up of the contiguous diaphragm backer member that the high strength fluorinated polymer material forms, and above-mentioned elastic diaphragm assembly also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly; And
Driven unit, it is operably connected with above-mentioned elastic diaphragm assembly, is used for optionally above-mentioned elastic diaphragm assembly being placed each above-mentioned opening of valves and above-mentioned valve operating position.
2. membrane valve according to claim 1 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
3. membrane valve according to claim 1 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
4. membrane valve according to claim 1 is characterized in that above-mentioned valve body is formed by the PTFE material.
5. membrane valve according to claim 1 is characterized in that above-mentioned driven unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
6. membrane valve according to claim 5 is characterized in that above-mentioned driven unit also comprises to above-mentioned piston to apply by power, makes above-mentioned driven unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
7. membrane valve according to claim 5 is characterized in that above-mentioned valve comprises and is used for elastic diaphragm assembly is held on diaphragm protector washer in the valve.
8. membrane valve according to claim 7, it is characterized in that diaphragm protector washer has center hole, wherein a part of piston is positioned at the center hole of diaphragm protector washer slidably, and wherein valve also comprises pair of O-ring, one of them O-ring is installed between the inwall of piston and housing hermetically, and another O-encircles and is installed in diaphragm protector washer hermetically and extends through in the center hole between a part of piston of this diaphragm protector washer.
9. membrane valve according to claim 5 is characterized in that valve also comprises the secondary diaphragm that is installed in the elastic diaphragm assembly top.
10. membrane valve is characterized in that:
Valve body, it forms inlet passage, outlet passage and has inwall and the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber and form glide path;
The valve seat device, it is in fluid chamber and be positioned at above-mentioned glide path;
Diaphragm apparatus, it is the opening side of closed above-mentioned fluid chamber hermetically, diaphragm apparatus has optionally the control valve unit with above-mentioned valve seat means for engaging, the operating position that above-mentioned control valve unit optionally blocks above-mentioned glide path at least one above-mentioned control valve unit separates with above-mentioned control valve unit and above-mentioned valve seat device so that change between the enable possition that above-mentioned glide path does not get clogged, and above-mentioned diaphragm apparatus comprises diaphragm element and contiguous diaphragm backer member that is formed by the high strength fluorinated polymer material that at least one is formed by the antifatigue fluorinated polymer material; And
Drive unit, it is operably connected with above-mentioned diaphragm apparatus, is used for optionally above-mentioned diaphragm apparatus being placed each above-mentioned opening of valves and above-mentioned valve operating position.
11. membrane valve according to claim 10 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
12. membrane valve according to claim 10 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
13. membrane valve according to claim 10 is characterized in that above-mentioned valve body is formed by the PTFE material.
14. membrane valve according to claim 10 is characterized in that above-mentioned drive unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
15. membrane valve according to claim 14 is characterized in that above-mentioned drive unit also comprises to above-mentioned piston to apply by power, makes above-mentioned drive unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
16. membrane valve according to claim 10, it is characterized in that above-mentioned diaphragm apparatus comprises one-level diaphragm element that is formed by the antifatigue fluorinated polymer material and the one-level septum assembly of being made up of the contiguous diaphragm backer member that the high strength fluorinated polymer material forms, wherein above-mentioned diaphragm apparatus also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly.
17. a membrane valve of being made by a kind of course of working is characterized in that this course of working comprises the steps:
Provide and form inlet passage, outlet passage and have inwall and the valve body of the fluid chamber of opening side, each above-mentioned inlet passage and above-mentioned outlet passage form opening at above-mentioned inwall, make fluid to circulate between above-mentioned inlet passage, above-mentioned outlet passage and above-mentioned fluid chamber; Above-mentioned valve body also comprises the valve seat part of surrounding the inlet passage opening in the fluid chamber;
Be formed for the elastic diaphragm assembly of the opening side of closed above-mentioned fluid chamber hermetically, above-mentioned septum assembly has over against the valve portion of above-mentioned fluid chamber inside, above-mentioned elastic diaphragm assembly optionally is placed at least one above-mentioned valve portion and above-mentioned valve seat part and engages hermetically with block fluid flow and pass the valve operating position of above-mentioned valve and be placed on above-mentioned valve portion and above-mentioned valve seat separates so that fluid flows and passes the valve opening position of above-mentioned valve, above-mentioned elastic diaphragm assembly comprises one-level diaphragm element that is formed by the antifatigue fluorinated polymer material and the one-level septum assembly of being made up of the contiguous diaphragm backer member that the high strength fluorinated polymer material forms, and above-mentioned elastic diaphragm assembly also comprises the secondary diaphragm that separates with above-mentioned one-level septum assembly; And
Above-mentioned elastic diaphragm assembly and above-mentioned valve body are engaged opening side with the above-mentioned fluid chamber of closure hermetically.
18. membrane valve according to claim 17 is characterized in that the course of working of making valve also comprises step: be provided for optionally placing the driven unit of above-mentioned elastic diaphragm assembly, and be operably connected above-mentioned driven unit and above-mentioned elastic diaphragm assembly.
19. a membrane valve is characterized in that comprising:
(a) valve body of formation import and outlet;
(b) be placed on above-mentioned import and the outlet between valve seat; And
(c) comprise the membrane configuration of one-level barrier film and secondary diaphragm, above-mentioned one-level barrier film has and can optionally engage the valve portion that passes above-mentioned import and outlet with block fluid flow with above-mentioned valve seat, above-mentioned one-level barrier film is made up of one-level diaphragm element and contiguous diaphragm backer member, one of them of wherein above-mentioned one-level diaphragm element and above-mentioned diaphragm backer member formed by the high strength fluorinated polymer material, and another is formed by the antifatigue fluorinated polymer material.
20. membrane valve according to claim 19 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
21. membrane valve according to claim 19 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
22. membrane valve according to claim 19 is characterized in that above-mentioned valve body is formed by the PTFE material.
23. membrane valve according to claim 19 is characterized in that also comprising with above-mentioned membrane configuration being operably connected, and is used for optionally placing above-mentioned membrane configuration and passes the driven unit of above-mentioned valve to block to flow.
24. membrane valve according to claim 23 is characterized in that above-mentioned driven unit comprises the housing that is operably connected with above-mentioned valve body and is slidably mounted on piston in the above-mentioned housing.
25. membrane valve according to claim 24 is characterized in that above-mentioned driven unit also comprises to above-mentioned piston to apply by power, makes above-mentioned driven unit rely on the cluster spring of one of above-mentioned opening of valves or above-mentioned valve closed position.
26. a membrane valve is characterized in that comprising:
(a) valve body of formation import and outlet;
(b) be placed on above-mentioned import and the outlet between valve seat;
(c) have and optionally to engage the wet septum assembly that passes the valve portion of above-mentioned import and outlet with block fluid flow with above-mentioned valve seat, above-mentioned wet septum assembly is made up of one-level diaphragm element and contiguous diaphragm backer member, one of them of wherein above-mentioned one-level diaphragm element and above-mentioned diaphragm backer member formed by the high strength fluorinated polymer material, and another is formed by the antifatigue fluorinated polymer material;
(d) housing that is operably connected with above-mentioned valve body is equipped with piston slidably in above-mentioned housing, piston is operably connected with wet septum assembly so that wet septum assembly and piston are optionally placed;
(e) be operably connected with body, be used for wet septum assembly is held on diaphragm protector washer in the valve, diaphragm protector washer has center hole, and a part of piston is positioned at the center hole of diaphragm protector washer slidably; And
(f) pair of O-ring, one of them O-ring is installed between the inwall of piston and housing hermetically, and another O-encircles and is installed in diaphragm protector washer hermetically and extends through in the center hole between a part of piston of this diaphragm protector washer.
27. membrane valve according to claim 26 is characterized in that above-mentioned high strength fluorinated polymer material is PTFE.
28. membrane valve according to claim 26 is characterized in that above-mentioned antifatigue fluorinated polymer material is PTFE.
29. membrane valve according to claim 26 is characterized in that above-mentioned valve body is formed by the PTFE material.
30. membrane valve according to claim 19 is characterized in that also comprising that being operably connected, being used for optionally to place above-mentioned wet septum assembly with above-mentioned piston passes the driver of above-mentioned valve to block to flow.
CNB2004800230690A 2003-07-11 2004-07-09 Extended stroke valve and diaphragm Active CN100381732C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US48630103P 2003-07-11 2003-07-11
US60/486,301 2003-07-11
US60/486,959 2003-07-14
US10/886,938 2004-07-08

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Cited By (2)

* Cited by examiner, † Cited by third party
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CN102575786A (en) * 2009-10-16 2012-07-11 卓越剂量技术有限公司 Pressure retention valve
CN104421439A (en) * 2013-09-05 2015-03-18 德威诺斯有限公司 Valve gate with floating sealing member

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SE532056C2 (en) 2007-02-02 2009-10-13 Millipore Ab valve seal
JP7061794B2 (en) * 2018-08-10 2022-05-02 アドバンス電気工業株式会社 Diaphragm member

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5924441A (en) * 1996-09-11 1999-07-20 Fluoroware, Inc. Diaphragm valve
US6000416A (en) * 1997-06-04 1999-12-14 Furon Company Compact valve with rolling diaphragm poppet
US5967173A (en) * 1997-07-14 1999-10-19 Furon Corporation Diaphragm valve with leak detection
CN2537864Y (en) * 2002-04-04 2003-02-26 扬中新亚自控工程有限公司 Cut-off diaphragm valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102575786A (en) * 2009-10-16 2012-07-11 卓越剂量技术有限公司 Pressure retention valve
CN102575786B (en) * 2009-10-16 2014-12-10 卓越有限公司 Pressure retention valve
CN104421439A (en) * 2013-09-05 2015-03-18 德威诺斯有限公司 Valve gate with floating sealing member
US9528611B2 (en) 2013-09-05 2016-12-27 Definox Sas Gate valve with floating seal
CN104421439B (en) * 2013-09-05 2017-10-20 德威诺斯有限公司 Gate valve with floating seal

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