CN1827545B - System for coating substrate and inserted element - Google Patents
System for coating substrate and inserted element Download PDFInfo
- Publication number
- CN1827545B CN1827545B CN2006100093177A CN200610009317A CN1827545B CN 1827545 B CN1827545 B CN 1827545B CN 2006100093177 A CN2006100093177 A CN 2006100093177A CN 200610009317 A CN200610009317 A CN 200610009317A CN 1827545 B CN1827545 B CN 1827545B
- Authority
- CN
- China
- Prior art keywords
- insertion element
- chamber
- coating
- substrate
- negative electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
A system 1 for coating a substrate 3 , in particular a transparent substrate, comprises at least one coating chamber 2 , at least one pump means 5 for producing a vacuum within the coating chamber 2 , and at least one sputtering cathode 9 . One or more cathodes 9 are integrated within an insert 8 together with system components which undergo process-induced dirt pick-up, for example shields, covers or transport rollers 6 for conveying a substrate 3 through the process chamber 2 . The insert 8 can slide, like a drawer, through a lateral opening 10 within the chamber wall 2 a, into the interior of the chamber. For maintenance purposes, any components of the coating system 1 which require thorough maintenance and cleaning can be removed easily from the interior of the coating chamber 2 by means of the insert 8 . The removed insert 8 can be replaced directly by an insert that has just been serviced.
Description
Technical field
The present invention relates to the system of coating one substrate (an especially transparent substrates); Specifically; Relate to the system that produces glass for building purposes, it comprises that at least one applies chamber, the invention still further relates to one be used to apply a substrate (especially transparent substrate) system the insertion element.
Background technology
Be used to apply the glass application system of the large-area substrates such as large-area sheet glass for building, just brought into play function by lock continuously after surely one by one in substrate usually.Substrate is directed to through the chamber of a large amount of continuous layouts or chamber portion, thus, in the discrete chamber, can carry out identical or different processing and coating process.Be used for preventing that a plurality of pump chambers of polluting between the adjacent coating chamber can be arranged between them.
In such system, the needed device of technological process such as negative electrode, anode, shielding, screen, gas supply line, cooling apparatus etc., is attached to bead, covers, or directly is attached on the wall that applies chamber interior.Especially, be provided with and be used for transmitting continuously substrate and also be assemblied in securely in the chamber shell through the transportation roller that applies chamber.As for the replacing of the maintenance of negative electrode, target or receive foul to influence the cleaning of parts, then be shelved on the cover plate on the chamber opening top through dismounting, can enter into and apply in the chamber.Yet, get into very inconvenience of chamber interior, and need the suitable time and efforts of cost.With regard to the maintenance service that relates to, it is also very inconvenient that all parts of design and planning are fixed on the coating chamber interior.All parts possibly must be dismantled to come and could implement maintaining work.The very long shut-down period takes place in its result.
In known continuously coating system, in the situation that is used for the large-area substrates system, confirmed already especially that being adjacent to and applying chamber was that foot is fruitful with upside and/or the way on the downside that pumping unit is arranged in pump chambers.Pumping unit is connected on dismountable cover plate, and its result because weight increases, must use a crane to take off cover plate usually.
Apply chamber or be attached in the very inconvenient problem of parts on the bead except being fixed on, after maintenance service is accomplished,, the problem of relevant opening sealing then also occurs as long as opening need be closed near those.This is because foul can be deposited in the cause on the trim (it is flatly located and can be arrived by the maintenance personnel) at an easy rate.Reason for this reason, in case cover plate is removed, the maintenance personnel must cover trim immediately, or with a framework they is covered.
Generally speaking, be not only time-consuming but also thing laboriously for the purpose of maintaining treatment system in operation shut-down process.Surrounding cathode and itself are difficult to entering because the process that applies has received the zone of foul influence.Otherwise, can negative electrode be shifted out, the zone of surrounding cathode must be cleaned in chamber.Especially, fixing in the enclosure and be used for transmitting the transportation roller of substrate, also have only time and efforts just can clean with a great deal of.Any particle that has fallen is difficult to from chamber, remove.
Summary of the invention
Summarize the above as origin, the objective of the invention is to design the parts of an application system or an application system, make the replacing of maintenance, cleaning and target can be simplified and in short time, accomplish.
Through designing a system and an insertion element as claimed in claim 12 that is used to apply a substrate as claimed in claim 1, can realize this purpose.
Be used to apply a substrate, especially a transparent substrates; Particularly be used for producing the system of glass for building purposes; It comprises that at least one applies chamber and inserts element with at least one; This element has and is used for coating is coated to suprabasil coating tool, and these instruments are arranged in and insert on the element, and it can insert these instruments to apply chamber interior and from wherein they being recalled together with inserting element.
The single insertion element of system or a plurality of insertion element can comprise all characteristics and the characteristics of the following stated, especially, and in conjunction with inserting those characteristics that element is advocated.
Use several to insert element and be inserted in the system that can form a module in the single facility, wherein, whole negative electrode stations can easily be replaced with the unit of a full-scale weaponry.Therefore, can change target more apace.It is particularly advantageous that this point is proved to be, maybe be different because of target because must implement the timed interval of target replacing.In principle, when two inserts are pulled out, enough working spaces need be arranged when every in practice, thus, can on the insert of withdrawing from, carry out work simultaneously.Yet,, can on all insertion elements, carry out work simultaneously when whenever when two inserts move to the station further from system.In principle, also can be the structure that is positioned at the insertion element on the chamber both sides.
Specifically, at least one opening is formed on the sidewall that applies chamber, can slip in the coating chamber so that insert element.Insert element and connected parts through getting into, can avoid the shortcoming of bringing from top entering from side.It is the bead through a surface mounting that tradition applies closing of chamber, and this sealing means that tradition applies chamber opening causes problems, and these problems are caused by the foul that influences the horizontal seal surface., opening must cover or cover sealing face immediately after being opened.Get into the risk that has then reduced foul from the side, because trim is not flatly to locate, and those parts that need to safeguard are not near trim, to get into.In addition, the sealing area on the side direction insertion opening is shorter than the sealing area on the opening in the cover plate zone.
Apply chamber and preferably adapt each other, insert element and can as a drawer, slip in the opening that applies chamber with the insertion element.
System comprises that at least one is used for vacuum pumping unit in applying chamber.Pumping unit is positioned on the upside and/or downside of chamber shell.A structure that is positioned at the pump case side is from applying chamber upwards and/or to extending below, it make things convenient for aspect the entering favourable especially.Yet this layout only just might realize under the situation that this thinking is placed core of the present invention (that is, provide and insert element), because it needs handiness largely with regard to pump configuration.The length of total system can reduce, and makes it might save the pump chambers between application station because above-mentioned favourable pump is arranged.
No matter pumping unit how, insert element and be positioned to removable usually with respect to the coating chamber.And pumping unit is fixed to chamber, and this possibly move and insert element together with any parts that are integrally formed therewith.In order to arrive the function part that is attached on the insert, need not move cover plate or pump.
Specifically, system is designed to make the planar substrate to transmit through applying chamber with a substantially horizontal mode.But the present invention still is intended to design directed toward substrate vertically.
Therefore, be integrated in the negative electrode best level ground alignment of inserting in the element.
In a preferred embodiment; Insert element and comprise that one is used to insert the terminals of element voltage input; This terminal design becomes: slip into and apply in the chamber as long as insert element, these terminals just engage the terminals that are installed in accordingly in the system, connect so that form power supply.Whenever this insertion element is when chamber is recalled, and this contact is automatically broken off, and therefore, need not have the people manually to break off this connection.
In the inside that applies chamber,, one or more coupling devices are arranged especially in order to be connected with the transportation roller that is attached to the insertion element.All remain essentially in the chamber is the coupling of handling monitoring sensor and transportation-roller.Apply those parts that chamber only is equipped with does not need regular entering.Chamber itself is a simple outer cover of steel plate, and it is equipped with insertion element shifter and is connected with the transportation roller.
System can comprise that one is connected to the gas control module that applies chamber; Making the gas control module have at least one gas that is connected with chamber interior connects; Have suitable gas connection and gas pipeline and insert element; The processing gas of being presented by the gas control module can lead through applying chamber interior by means of pipeline, handles gas and can be introduced in the chamber through it.
Defined of the present invention and be used for a coated substrates (specifically; The insertion element of system one transparent substrates) has the coating tool that coating is coated to substrate, and these tool positioned are being inserted on the element; And can slip into the inside that applies chamber together with inserting element, maybe can be from wherein recalling.
Here coating tool is used for forming the splash source especially, its splash negative electrode, magnetron etc.Yet, the invention is intended to comprise and other coating technology bonded instrument, for example, the evaporation of coating deposition, or use an ion source that substrate is carried out initially/follow-up processing.
One unit provided for oneself is provided, and it can slip in the chamber, or it can therefrom recall, and coating tool is attachable on it, provides such unit to be convenient to enter into these parts.On the one hand, cover plate or bead must be mentioned.On the other hand, once pulling out the purpose of coating tool to be used to safeguard is provided when the unit from the coating chamber.Therefore, need not add expensive cathode transport frame, and, in order to process further, this frame comprise one be used for pivoting negative electrode device, just can accomplish this point in the case.For example, need not enter into chamber interior, just detachable coating tool.What is more, and the unit that needs to safeguard can be replaced with the insert of the replacing of having repaired apace and easily.Cleaning can have no restrictedly to carry out any time with maintaining work because work carrying out in system begin to operate with regard to the insert of available replacing.This method has been simplified maintaining.System reduces stoppage time significantly.
Whenever it slips into and applies chamber or when therefrom recalling, and inserting element can be by means of a lift unit or screw block on the roller, on the air cushion, moves on the track etc.
Specifically, insert the mode that element can drawer and slip into the coating chamber interior, maybe can be from wherein recalling.
Be integrated in the parts that preferably also have application system that insert in the element, their experience are handled wearing and tearing, the foul that is brought out and/or are exposed to coating material.Therefore, all these parts all get into easily.
Be positioned at these parts in the zone of surrounding cathode, they receive coating particle or foul and directly or indirectly impact in coating process, and these parts are the foul that brings out of acceptant processing especially.Shielding, screen, the relative wall of negative electrode and anode can be affected thus especially.These parts must clean termly, and for example, they need sandblast.Certainly, experience is handled the parts as much as possible that bring out foul, that is, they directly are exposed to coating particles (or being exposed to dispersed particles), should be integrated in and insert in the element.This can save any needs (for maintaining) that enter into chamber interior.Insert element and be used for recalling any system component that intention gets in maintenance process.This also is applicable to the part of wearing and tearing, especially, and the negative electrode of splash.
In addition, insert element and comprise shielding and/or screen.This insertion element can be configured to make screen attached at suitable some place, so that prevent to apply the inside of chamber or the influence that other parts receive foul.Like this, there is not coating material to arrive the outside space of unsighted insertion element with any speed.
Coating tool can comprise at least one negative electrode.This can be that at least one is put down or the planar negative electrode, or at least one rotating negative electrode.Rotatable negative electrode can be integrated in every way and insert in the element.In a preferred embodiment, the tubular target of a rotation negative electrode is fixed to the rotating vacuum of a break-through, and the pivot center that this vacuum is parallel to tubular target is positioned in the end face bead of inserting element.In the opposite end of inserting element, tubular target is rotatably supported in one and is positioned in the regional interior fabricated section of pivot center extension.
In another embodiment, whole sleeve cathodes go to the product that sell in market for help.In this case, coating tool comprises at least two fabricated sections that are used for fixing negative electrode.One cathode electrode unit be by together with target (this target can be a tubular target especially), and forms together with the mounting blocks that medium supply line and negative electrode drive.Negative electrode is rotatably fixed on two mounting blocks.
In traditional system, cathode electrode unit hangs also mounted thereto from the cover plate on the vacuum facility.The cathode electrode unit that is designed to a magnetron have one be positioned at sleeve cathode magnetic array.This magnetic array is designed to a tape, and for the purpose of operating, this magnetic array must promptly, align towards the direction of substrate along the splash direction.
Yet in the present invention, mounting blocks preferably is fixed to the insertion element with the mode that makes progress according to the present invention.In coating process, substrate moves through between two mounting blocks of cathode tube below.Therefore different with traditional structure, cathode electrode unit is installed in together with magnetic array and inserts in the element in assembling process, and like this, magnetic recording tape portion is towards substrate, but correctly deviates from the chamber top ceiling.Therefore, have only magnetic recording tape must turn over 180 °, so that cathode electrode unit is installed in the insertion element, because the attachment member of symmetric design is positioned at tubular target, so this can realize immediately.In order to change tubular target, insert element and can from apply chamber, recall, and from insert element, dismantle target, after medium (water coolant, electric power) supply is thrown off, need not to move the whole unit that comprise chamber cover plate, mounting blocks and negative electrode.In other words; The cover plate of legacy system must promote on the device that is fixed to a special purpose; And turn over 180 °, so that after connection line is removed, change exhausted target (installation or removal target), the mode that makes progress remains fixed in inserts in the element and cathode electrode unit of the present invention and magnet system can be on mounting blocks; In case the appropriate device of annex is thrown off, then target is removable.Like this, not only maintenance time can be reduced, and the risk that has an accident in the target replacing process can be reduced.In addition, can save the device that is used for rotating negative electrode.
In addition, in this design, by means of mounting blocks, the medium connection can be positioned on and is positioned on the substrate lower side to be applied, that is, the medium pipeline leads towards the below of substrate downwards from negative electrode.
Insert element can have one be used for negative electrode (the especially situation of the Pingyin utmost point) is turned to a certain position device, this position is for the purpose safeguarded and/or change negative electrode admission passage is provided.For example, this can be a crank or a lever, and after the insertion element was recalled from apply chamber, the Pingyin utmost point of in downward splash pattern, operating relies on can turn over about 180 ° in crank or lever, therefore causes above the cathode directed.This makes the maintenance personnel get into being threaded of negative electrode easily, and can make them change target apace and easily.
In addition, insert element and can have the unitor that a driver element or is used for driver element, so that rotate a rotating negative electrode.Driver element can be positioned on the part of the insertion element that is positioned at the chamber outside.Whenever this driver element also can be fixed on chamber outside, is positioned at and inserts the relative side of opening, during system closing, then drives rotating negative electrode through unitor.
In addition, can conceive by means of the insertion element that is positioned on the system front negative electrode can be arrived, and can conceive will transport roller or surrounding cathode zone location in insertion element of another back.Several discrete that can operate independently insert element and also can be positioned on the both sides.Because two or more discrete insert element and are engaged with each other, so can realize such purpose.The individual component of application system, especially, those are exposed to handles the wearing and tearing bring out or the parts of foul can be properly positioned on the independent insertion element.The insertion element that is not only proposed itself is used for constituting part of the present invention, and other coating member is carried in these combinations of inserting element and other insertion elements (but they do not comprise any negative electrode) really.
Insert element and can comprise at least one anode.In this case, if the foul that the anode experience is caused by coating material, then anode should be a part of inserting element at least.
Insert element preferably comprise one be used for preferably transmitting continuously substrate conveyer.
Conveyer comprises the transportation roller that causes substrate to be moved especially.The transportation roller drive can be positioned on and applies in the chamber or outer, and drives the transportation roller through a unitor.The transportation roller can be sheltered by protecting sheet, and protecting sheet is the part of inserting element equally.
In addition, insert element and comprise that one is used for cooling off the device of shielding, screen and/or coating tool.Heat-eliminating medium is supplied to the insertion element, and it is directed to corresponding component to be cooled through pipeline.
Insert element and preferably comprise a bead, it is used for sealing an opening that applies in the chamber, this opening is set is used for inserting this insertion element.
The insertion circuit elements design should can make the insertion element move especially or slide.For this purpose, a roller or an air cushion can be set.Also can use the supplementary unit such as lift unit or screw block, they can join the following of insertion element to and raise up, or use track, and the insertion element can be moved above that.
Inserting element can have and be used for the feeding mechanism of supplying media.Specifically, they are with the pipeline of gas and/or chilled(cooling) water supply (CWS) chamber, and/or with the circuit of voltage to its supply to shielding and/or negative electrode.
The body that gas supply source is set so that Metrology Division is regulated the flow of vital energy.Inserting element also can comprise especially and be used for the control unit of adjustments of gas source of supply.Gas supply source can be regulated like this: gas traverses the whole width that apply chamber with mode even or part and supplies.For example, can use manifold gas pipeline, so that the point of the regulation selectively in chamber place regulates the entering stream of handling gas.The advantage that has near the control unit of the gas stream that inserts arrangements of elements is, because that gas flows to the distance of the exit opening in the chamber is shorter, so gas stream can be fast and the flexible way change.
In a preferred embodiment, the gas stream control unit is near being attached to the coating chamber with inserting isolating certain the some place of element, and therefore, they are assigned to a specific treatment chamber.Its result inserts element and can design more cheaply.The separation that gas connects is transformed into vacuum chamber, and like this, any leakage that influences the gas pipeline separation point can not have influence on the outside.After the gas stream control unit, gas pipeline almost is stress-free,, is adapted to the pressure of treatment chamber that is, and has the pressure of about 3 crust (bar) up to the gas feed pipeline of gas stream control unit from gas source.Therefore, in the stress-free part of gas tube, realize more easily separating, if there is any leakage, then gas escape arrives and handles in the chamber, in any case, and the place that it is hoped just.
In addition, insert element and can comprise connection for the medium supply.Be used for supply gas and/or water coolant to shielding and/or negative electrode and/or the supply of supply voltage and/or the connection of disposal, be arranged on the insertion element portion office that always is positioned at coating chamber outside.
Inserting element can preferably be designed to: being used for the coating tool of coated substrates both sides is positioned on the both sides of substrate transportation route.In this example, negative electrode and screen are substantially symmetrically located with respect to planar substrates.The both sides of substrate apply simultaneously.
Specifically, the transportation roller can position like this, that is, the coating tool that can be disposed on the wheels side towards the base side of roller applies.Coating in this so-called splash pattern need have special roller structure.Drive shaft is coherent and it moves the transportation roller along transporting direction, and the distance between the drive shaft must be fully big, so that splash goes out enough materials and can strike substrate from the target that is placed on the substrate below.Simultaneously, this distance also must be set for and guarantee that substrate can transport reliably, prevents that simultaneously substrate is sagging.
In addition, the transportation roller can be sheltered with screen, like this, can prevent that roller from picking up from the foul that material caused of the direct splash of coating tool.Not protected roller can be applied as substrate.Yet on behalf of roller, this kind coating polluted, the surface that it causes substrate with subject to extra stress after roller contacts, and can cause this surface distress.
On the both sides of a through hole, advantageously design the screen that roller is transported in such being used to for thin-film material, traversing the disconnection that has no on whole width of system.If all screens just be arranged in respectively transport roller around and stay unlimited gap, then these screens can capture from the negative electrode splash to go out and can not arrive the coating material of substrate in this zone.Because the thickness of film has suitable variation, so, observe if traverse the width of substrate, then the result can see striped on substrate of glass.
Owing to needn't enter into inside termly, so can prolong the working time of system.In addition, also improved the condition of maintenance personnel's work, the time of the adjustment of minimizing system significantly, and can prevent that chamber is coated.
Description of drawings
At present will be according to accompanying drawing, explain other advantage and characteristic of the present invention according to following description to a preferred example embodiment, in the accompanying drawing:
Fig. 1 illustrates the sectional view according to application system of the present invention perpendicular to the substrate transporting direction;
Fig. 2 illustrates along another sectional view of an application system of substrate transporting direction;
Fig. 3 illustrates the sectional view that has according to two chamber portions of insertion element of the present invention, and this cross section is the transporting direction along substrate;
Fig. 4 illustrates the sectional view of several chamber portions of the insertion element with various designs, and this cross section is the transporting direction along substrate;
Fig. 5 illustrates the stereographic map according to an insertion element of the present invention;
Fig. 6 illustrates another stereographic map according to an insertion element of the present invention;
Fig. 7 illustrates the synoptic diagram that inserts element replacement;
Fig. 8 illustrates the synoptic diagram of the specific embodiment of a gas control module;
Fig. 9 illustrates the details of Fig. 8;
Figure 10 a illustrates the cathode electrode unit that is fixed in a conventional manner on the bead;
Figure 10 b illustrates and is fixed on the cathode electrode unit that inserts on the element according to of the present invention;
Figure 11 a illustrates one and has a coating compartment according to the cathode electrode unit of Figure 10 b, and this figure is longitdinal cross-section diagram (with respect to the transporting direction of substrate);
Figure 11 b illustrates the compartment of Figure 11 a, and this figure is sectional view (with respect to the transporting direction of substrate); And
Figure 12 illustrates to have one and is positioned at the coating chamber that near the present invention who applies the chamber inserts element.
Embodiment
Fig. 1 illustrates one and comprises that one applies the sectional view of glass application system 1 of the operate continuously of chamber 2.Extend perpendicular to the transporting direction of substrate 3 in this cross section through application system 1.In the sketch map of the cardinal principle of system 1, substrate 3 is transmitted through roller 6 in perpendicular to the level attitude of paper plane one.
Applying chamber 2 is delimited by sidewall 2a, 2b in the side.The chamber cover plate 4 of closing an opening 7 of chamber 2 is supported by two bead 2c, 2d, and these two beads extend internally from the upper water level land of sidewall 2a and 2b.
In traditional system, pumping unit is usually located on this cover plate.The opening representative of being closed by cover plate at this moment, gets into unique passage of chamber interior.When whenever needing to be serviced maintenance, therefore this cover plate must difficultly be removed, so that obtain to get into the passage that is fixed in the coating chamber or is attached in the parts on the bead.Yet it is always inconvenient to enter into the chamber interior of wherein arranging all parts.In addition, the size of opening and the horizontal location of trim cause many sealing problems, because foul impurity can easily be deposited on the trim.
As shown in Figure 1, be arranged in basically in the lateral region that applies chamber 2 belows according to the pump 5 in the application system 1 of the present invention (turbomolecular pump or TMP).This kind layout is for maintenance purpose and enter into pump 5 particularly advantageouies.In this example embodiment, adopted one " going up splash " technology.Substrate 3 is flatly located in transportation with in the coating process.Coating is upwards implemented from the bottom, that is, negative electrode 9 is positioned at the below of substrate 3.This situation is then turned around in " following splash " pattern.Yet pump 5 also can be positioned on and applies chamber 2 tops, and its result does not bring any main shortcoming; In addition, can imagine two kinds of technology of combination coated substrates on both sides, thus, pump 5 can be arranged in the above and below that applies chamber 2 symmetrically.Experience shows that the above-mentioned layout of pump 5 makes whenever need not provide the chamber of pump between two continuously coating chambers 2.Its result, the structure of system can design shortlyer
Yet the present invention is depended on provides one to insert element 8, therefore, more need not enter into the inside that applies chamber 2 through opening 7 for regular maintenance.
The insertion element 8 of drawer appearance is one to insert the unit that the various parts in the element 8 are formed by being combined in.Insert element 8 and have the flat bead 11 of a vertical alignment, in operational process, this bead 11 seals up the lateral openings 10 in the wall 2a that applies chamber 2.
The parts of the thorough maintaining of any needs are fixed to and insert on the element 8; For example; Can cause its transportation roller 6, shielding, screen of picking up foul when the splash negative electrode 9 that must regularly replace, processing, and any other parts that in operating process, directly or indirectly are exposed to coating material.Screen as much as possible and protecting sheet are connected to and insert element 8, and they prevent to apply the inwall of chamber 2, for example (that is, in this particular instance, substrate 3 tops) picks up foul in the background of substrate.
In addition, whole medium supplies, for example, handle gas supply, be used for the chilled(cooling) water supply (CWS) of negative electrode and screen, or the supply of voltage all is achieved through being connected to the pipeline that inserts element 8.
According in shown in Fig. 1, insert element 8 and from left to right slide, slip into applying in the chamber 2 (direction of insertion E) through the opening 10 in the sidewall 2a as a drawer, up to the bead 11 of insertion element 8 with till sidewall 2a contacts.Find time to apply chamber 2 and can between bead 11 and sidewall 2a, form a sealing.Sealing area is located with constant vertical mode basically, therefore, is not easy to pick up foul, and littler than the sealing area on the bead that is positioned at upper shed 74.
Whenever inserting element 8 is incorporated into when applying in the chamber 2; For example; By means of a lift unit or screw block, be arranged in the roller 12 that inserts on the element 8 before the position that arrives operation with the final section of route on a guiding mechanism 13 cooperations, insert element 8 with adjustment correctly.In addition, a similar guide frame can be arranged in the zone of opening 10, so that make insertion element 8 more easily slide into and skid off.As the alternate scheme, can likewise imagine one in the end the distance last joint guide finger.
Being connected to the transportation roller 6 that inserts element 8 can be by means of connecting 14 and be connected to a drive member 15 and by its driving.The rotation that connection 14 for example will be positioned at the one group of driving gear that applies chamber 2 outsides is delivered to roller 6.The driving 15 of transportation roller can design in every way.For example, driving can be positioned in the system or be outer.If drive arrangement is applying chamber 2 outsides, then by means of the rotation vacuum of break-through, drive shaft is directed to through chamber sidewall 2b.The transmission of power can be through in groups realizations such as twisted spur gear, belt transmission (odontoid belt), master wheel.
Fig. 2 illustrates the vertical cross-section diagram of the chamber portion 2 ' with an insertion element 8, and it is the cross section along substrate 3 transporting direction T.By means of transportation roller 6 and lock 16, substrate 3 moves through the inside of chamber portion 2 '.The conveyer 6 that is used for substrate 3 forms the part of inserting element 8 and is connected to it.In addition, in this embodiment, insert element 8 and comprise two rotating negative electrodes 9, shielding or anode 17, and be used to transport the additional screen 18 of roller.Therefore, for the purpose of safeguarding, above-mentioned parts can be recalled from the inside that applies chamber 2 together with inserting element 8.
In this embodiment, screen cover (be here shielding 17) be designed to one open wide trapezoidal, and also present the anodic function.In the space of negative electrode 9 back, the screen of horizontal location can have a plurality of disconnections in operation, and any gas that is present in the chamber passes through to break off the pump 5 that arrives high vacuum.
Also visible from Fig. 2, substrate 3 can apply by means of being arranged in substrate 3 following negative electrodes 9.Transportation roller 6 can be arranged on the same side of negative electrode 9 with respect to substrate, that is, and and below the substrate 3.In order to reach effectively coating of substrate 3 in " upward splash " pattern at this, the distance between the transportation roller 6 must so that enough splash coating materials can impact substrate 3, and not disturbed with the transportation of substrate along the transporting direction setting.
Fig. 3 illustrates two chamber portions 2 ', 2 ", they respectively have inserts element 8, and Fig. 3 is the vertical cross-section diagram along the transporting direction T of substrate.Chamber portion 2 ', 2 " be used for " following splash " technology.Each substrate 3 is directed to through chamber portion 2 ', 2 by means of two transportation rollers 6 ".
First inserts element 8 (being presented at the left side) has a Pingyin utmost point 9, and the second insertion element 8 (being presented at the right) has two rotating circular cathodes 9.The negative electrode 9 of splash also can be magnetron usually.In addition, it is contemplated that core concept of the present invention is applied to other coating technology, for example, evaporation deposition (PVD, CVD).The required coating tool of special process always is integrated in any case and inserts in the element 8, so that change and easy maintenance.
The driving that is used for circular cathode 9 is integrated in the outside of inserting element 8.The insertion element 8 that is used for the Pingyin utmost point 9 has a lever (not shown), the Pingyin utmost point 9 utilize this lever rotatable through about 180 ° so that it is removed.
The outline of bead 11 is indicated with label 11 ', and is represented by dotted lines; The outline that inserts element 8 is with label 8 ', 8 " indicate, and represent with continuous lines.Work the influence that coating material is avoided in the inside of making anodic shielding 17 and other screen protection coating chamber 2 walls simultaneously.Screen board 8 at the bottom of the back of the body of substrate 3 in (with respect to negative electrode 9) " have identical functions, this screen board 8 thus " also form the part of inserting element 8.One cooling unit (not shown) is arranged in the zone of shielding 17.Another cooling unit that is used for negative electrode 9 likewise is integrated in and inserts in the element 8.
Fig. 3 just illustrates two and inserts element 8; Yet, common a series of successive chamber portions 2 ', 2 ", 2
... the insertion element 8 corresponding with it will be arranged in the glass application system 1 (as shown in Figure 4).
Identical or different processing and/or coating process can be at chamber portions 2 ', 2 ", 2
... in carry out.Chamber portion 2 ', 2 ", 2
... separated from one another by means of the lock of grooved; that said lock is placed on chamber portion 2 ', 2 ", 2
... Preceding and rear wall on; Like this, substrate 3 can be through therebetween.Substrate 3 is by means of being transported to next chamber portion through all locks from a chamber portion.
When " go up splash " pattern is set up chamber portion 2 ', 2 " time, then " following splash " occur in the chamber portion 2
.Chamber portion 2 " " be the place that applies simultaneously in the upper and lower side of substrate.Therefore, be used for chamber portion 2 " " the transportation plane that is designed to respect to substrate 3 of insertion element 8 be essentially symmetry, on the substrate both sides, have the negative electrode 9 of two rotations respectively, and a mirror symmetry mask array 17.Through chamber portion 2 " " lock 3 transportation rollers 6 altogether of being used for transmitting substrate 3 have a simply design.If substrate 3 applies on both sides, then pump 5 is arranged on cover plate and corresponding chamber portion 2 " " the bottom on.Sprengel pump (TMP) screws in system 1, and can be independent of the remaining part of system 1 and pull down.
One pump chambers is inserted in chamber portion 2 ", 2
between; if but pump 5 construct to combine mode of the present invention, then can save this chamber usually.
Fig. 5 and 6 illustrates the stereographic map by the insertion element 8 of the present invention regulation, and it is recalled from apply chamber 2, and the label that is used for individual component is with before used identical.
In this example, the bottom member 20 of insertion element 8 is designed to: lift unit 21 can engage and insert element 8 and be convenient to transportation.
Fig. 7 is the synoptic diagram that inserts element replacement.The operator upwards moves to system 1 with lift unit 21 from the side.This lift unit moves and engages with insertion element 8 specified bottom members 20 along direction of insertion E.Then, insert element 8 and be raised and pull out coating chamber 2 along recalling direction A.
Perhaps, inserting element 8 can move on roller, air cushion, track etc.
Can get into the parts that insert element 8 easily carrying out maintaining there, or the insertion element of available one replacing of repairing is replaced at present.Can take (if environment needs) in orbit away from the insertion element 8 that applies chamber 2 taking-ups; Simultaneously; The insertion element 8 to be on active service of removable second new equipment moves up up to the lateral openings 10 that applies chamber 2 from opposite side, and is inserted in the empty chamber portion 2 '.
Inserting element 8 can fully withdraw from from apply chamber 2.Therefore, no longer need get into to apply in the chamber 2 and safeguard or clean built-in parts.This method has not only been simplified maintenance, and can reduce the stoppage time of system 1 widely.The parts of the foul that any easy pick process causes are positioned at and insert element 8 or form the part of inserting element 8.In addition, if operation restarts with the insertion element of changing 8 in system, and maintenance service is also being carried out simultaneously, then can carry out cleaning and maintaining and restriction on having no time.Generally speaking, for the operation of glass application system 1, this method not only saves time but also save money.
Fig. 8 illustrate one be connected to the gas control module 22 that applies chamber 2 specific embodiment.This gas control module 22 is fixed to and applies chamber 2 and comprise a plurality of discrete gas stream control units.Its result inserts element and can design comparatively cheaply.Gas tube 23 leads to the inside that applies chamber 2.Gas tube 23 is combined to one and is projected into the interior single gas tube 23 ' of the interior parts of chamber downwards.This gas tube 23 ' terminates in a separation point 24, and it converges to the pipeline 23 that is integrated in the parts 25 there " in.Parts 25 form the part of inserting element 8, that is, it can be recalled from apply chamber 2 together with inserting element.Gas tube 23 " converge in the gas tube 26.Opening (being shown as circle) is arranged in the gas tube 26; Make the processing gas of supplying through gas control module 22 arrive vacuum chamber through these openings just.As the sketch map among Fig. 9 at length shown in, pipeline 23 ' and 23 " between realize through pipeline (gas tube 23 ") being incorporated in the hole (this pipe forms gas tube 23 ') in the connection at separation point 24 places.
By means of one or more wear rings 27, pipeline 23 ' can be with respect to hole 23 ' sealing.Likewise, for the sealing transition part, a wear ring 28 can be placed on separation point 24 places, so that the part on the insert side is separated with the part on the chamber side.
Like this, the separation point 24 that gas connects is transformed into vacuum chamber, and therefore, any leakage effects that prevents gas tube separation point place is to the outside.Connecting zone 24 is positioned at and applies chamber 2, is in to apply under the chamber pressure, and has the pressure of about 3 crust (bar) up to the gas feed pipeline of gas stream control unit from gas source.
Figure 10 a and 10b illustrate a specific embodiments of coating tool 9.Cathode electrode unit 31 is formed together with two mounting blocks 29 by sleeve cathode or tubular target, and in arbitrary situation, sleeve cathode all is attached to the end of these mounting blocks.These figure respectively illustrate two cathode electrode units 31 side by side.
Figure 10 a illustrate one be similar to prior art situation, wherein, cathode electrode unit 31 is attached to the bead 4 of lid, for example, hangs from Pit cover.The negative electrode that is designed to magnetron has a magnetic recording tape 30, and it is provided with the magnetic field that forms towards substrate 3 alignment.Magnetic recording tape 30 is arranged in the lower region of tubular target, and towards substrate 3 (that is, downward) alignment.Therefore, splash direction S towards substrate 3 to extending below.
If use the cathode electrode unit of buying on market so, then cathode electrode unit 31 must be shown in Figure 10 b be arranged in the mode of the present invention's regulation and inserts on the element 8.Mounting blocks 29 is detachably fixed to axial mode and inserts element 8.In modes of application, substrate 3 moves through between the mounting blocks 29 of cathode tube below.Just in the processing in being installed to sleeve cathode, magnetic recording tape 30 is along splash direction S with along the alignment that is directed downwards through substrate 3 between the mounting blocks 29 of negative electrode 9 belows.In order to dismantle target, insert element 8 and can pull out, and target can take out from insert element 8 from applying chamber 2.Overall design not only is convenient to installation but also is convenient to from negative electrode, take out magnetic systems.
Figure 11 a illustrates the structure of a correspondence, and wherein, cathode electrode unit 31 is placed on one by regulation of the present invention and inserts on the element 8.T representes the transportation and the planar transporting direction of substrate.Also shown in Figure 11 b, an inlet chamber has the eddy current molecular pump of laterally arranging above that 5, is positioned at the Pit cover 4 that applies chamber 2 tops.Substrate 3 advantageously moves through the chamber portion on the transportation roller 6 of negative electrode 9 belows.In this embodiment, described in combination Figure 10 b, just in the process of installing and removing, the magnetic recording tape in the magnetic tube must be positioned in the bottom of sleeve cathode 9.
Visible from Figure 11 b, medium connects can be by the mounting blocks 29 of downward guiding through the end of supporting negative electrode 9.Like this, can below substrate, walk for the supply line of required medium.
Figure 12 illustrates one and applies chamber 2; Its next door is from applying the insertion element 8 that chamber 2 (direction of insertion E) is pulled out; It has transportation roller 6, a sleeve cathode 9, and the mounting blocks 29 that is arranged in place, sleeve cathode 9 ends, and it forms a cathode electrode unit 31 together with negative electrode 9.Mounting blocks removably is fixed on axial mode and inserts on the element 8.In operating process, substrate betransported between the mounting blocks 29 through the negative electrode below.Cathode electrode unit comprises that also the medium on being positioned at below the mounting blocks 29 connects.
Claims (34)
1. system (1) that is used to apply a substrate (3) comprising:
At least one applies chamber (2); It is characterized in that; At least one inserts element (8); This insertion element has and is used for coating is coated to the coating tool (9) in the said substrate (3), and the conveyer (6) that is used to transport said substrate, and said instrument and said conveyer (6) are arranged on the said insertion element (8); It is inner or from wherein recalling that said instrument and said conveyer can insert said coating chamber (2) together with said insertion element (8), and at least one opening (10) that is positioned on the sidewall of said coating chamber (2) is designed so that said insertion element (8) can insert said coating chamber (2) as drawer.
2. the system of claim 1 (1) is characterized in that, said coating chamber (2) and said insertion element (8) are fit to each other, so that said insertion element (8) can insert in the opening (10) of said coating chamber (2).
3. according to claim 1 or claim 2 system (1) is characterized in that said system (1) comprises at least one pumping unit (5), and it is used in said coating chamber (2), producing a vacuum.
4. system as claimed in claim 3 (1) is characterized in that, said insertion element (8) is independent of said pumping unit (5) and arranges movably with respect to said coating chamber (2).
5. according to claim 1 or claim 2 system (1) is characterized in that, said system (1) is designed so that a planar substrate essentially horizontally transports through said coating chamber (2).
6. according to claim 1 or claim 2 system (1) is characterized in that said coating tool (9) comprises the negative electrode of horizontal alignment.
7. according to claim 1 or claim 2 system (1); It is characterized in that; Said insertion element (8) comprises the terminals of a pair of said insertion element (8) supply voltage; Said terminal design becomes: in the time of in said insertion element (8) inserts said coating chamber (2), said terminals engage one and are arranged in the terminals of the coupling in the said system (1), connect so that form a power supply.
8. according to claim 1 or claim 2 system (1) is characterized in that said coating chamber (2) comprises at least one unitor (15) that is positioned at said chamber interior, so that connect with the transportation roller of said insertion element (8).
Whenever 9. according to claim 1 or claim 2 system (1) is characterized in that said coating chamber (2) comprises at least one unitor that is positioned at said chamber interior, so that connect with rotating negative electrode during system closing and drive said negative electrode.
10. according to claim 1 or claim 2 system (1); It is characterized in that; Said system (1) comprises that one is connected to the gas control module (22) of said coating chamber (2); Said gas control module (22) has at least one gas that is connected with said chamber interior and connects; And said insertion element (8) comprises that corresponding gas connects and gas pipeline (23 "), and through said coating chamber (2) inside, processing gas is introduced in the said chamber (2) through this pipeline any processing gas of being presented by said gas control module (22) by means of this pipeline.
11. insertion element (8) that is used to apply the system (1) of a substrate (3); It is characterized in that; Said insertion element (8) comprises coating is coated to the coating tool (9) of said substrate (3) and is used to transport the conveyer (6) of said substrate; Said instrument and said conveyer (6) are arranged on the said insertion element (8); Said instrument and said conveyer can insert one together with said insertion element (8) and apply the inside of chamber (2) or from wherein recalling, and at least one opening (10) that is positioned on the sidewall of said coating chamber (2) is designed so that said insertion element (8) can insert said coating chamber (2) as drawer.
12. insertion element as claimed in claim 11 (8) is characterized in that, other the parts of application system that experience is handled wearing and tearing, the foul brought out and/or is exposed to coating material are integrated in the said insertion element (8).
13. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises Abschirmblech (17) and/or screen (18).
14. insertion element as claimed in claim 11 (8) is characterized in that, said coating tool (9) comprises at least one negative electrode.
15. insertion element as claimed in claim 14 (8); It is characterized in that said coating tool (9) comprises a cathode electrode unit (31), this cathode electrode unit (31) has at least two fabricated sections (29) that are used for keeping said negative electrode; Specifically, said negative electrode is a tubular target.
16. insertion element as claimed in claim 15 (8) is characterized in that, said fabricated section (29) is arranged on the said insertion element with upright mode.
17. insertion element as claimed in claim 15 (8) is characterized in that, said fabricated section (29) is parallel to the axis arranged of tubular target.
18. insertion element as claimed in claim 11 (8) is characterized in that, said coating tool (9) comprises at least one Pingyin utmost point.
19. insertion element as claimed in claim 18 (8) is characterized in that, said insertion element (8) comprises that one is used for said negative electrode is turned to the position that allow to get into so that safeguard and/or change the device of target.
20. insertion element as claimed in claim 11 (8) is characterized in that, said coating tool (9) comprises at least one rotating negative electrode.
21. insertion element as claimed in claim 20 (8) is characterized in that, said insertion element (8) comprises that a driver element or is used for the unitor of the driver element of the said negative electrode of a rotation.
22. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises at least one anode.
23. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises a conveyer (6), so that the preferably said substrate of transmission continuously.
24. insertion element as claimed in claim 23 (8) is characterized in that, said conveyer (6) comprises the transportation roller that moves said substrate.
25. insertion element as claimed in claim 13 (8) is characterized in that, said insertion element (8) comprises that one is used for cooling off the device of said Abschirmblech, screen (17,18) and/or coating tool (9).
26. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises a bead (11), is used for sealing the opening (10) in the said coating chamber (2), and said opening is used for inserting said insertion element (8).
27. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) is designed to removable or slides.
28. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises the feeding mechanism that is used to provide medium.
29. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises the connection that is used to provide medium.
30. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) comprises the control unit that is used for regulating the supply of processing gas.
31. insertion element as claimed in claim 11 (8) is characterized in that, said insertion element (8) is designed to: the coating tool (9) that is used for applying said substrate (3) both sides is placed on the both sides of transportation route of said substrate (3).
32. like any one described insertion element (8) in the claim 24 to 31, it is characterized in that said transportation roller is arranged to: by means of the coating tool that is positioned at wheels side (9), but coated substrates (3) is towards that side of said roller.
33. insertion element as claimed in claim 32 (8) is characterized in that, said transportation roller comprises a screen (18), like this, can prevent that said roller from picking up because of the direct foul that causes of the material of splash of said coating tool (9).
34. insertion element as claimed in claim 33 (8) is characterized in that, the said screen (18) that is used for said transportation roller traverses whole application width extensions of substrate, and covers a plurality of transportation rollers.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP05004725.7 | 2005-03-03 | ||
| EP05004725 | 2005-03-03 | ||
| EP05021176A EP1698715A1 (en) | 2005-03-03 | 2005-09-28 | Coating apparatus with parts on a drawer |
| EP05021176.2 | 2005-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1827545A CN1827545A (en) | 2006-09-06 |
| CN1827545B true CN1827545B (en) | 2012-11-07 |
Family
ID=34934050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2006100093177A Expired - Fee Related CN1827545B (en) | 2005-03-03 | 2006-02-23 | System for coating substrate and inserted element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1827545B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101045610B (en) * | 2007-03-29 | 2010-10-13 | 刘东平 | Self-clean film material and preparation method |
| EP2709138B1 (en) * | 2010-05-11 | 2016-11-30 | Applied Materials, Inc. | Chamber for physical vapor deposition |
| CN102641811B (en) * | 2011-02-18 | 2016-01-27 | 深圳烟草工业有限责任公司 | A kind of drawer type perfuming nozzle mechanism with cape |
| CN106929824A (en) * | 2015-12-29 | 2017-07-07 | 中国建材国际工程集团有限公司 | The method and apparatus and coating facility of substrate transport establishment in cleaning coating facility |
| WO2019189122A1 (en) * | 2018-03-30 | 2019-10-03 | Ｊｆｅスチール株式会社 | Target exchanging device and surface treatment facility |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693803A (en) * | 1984-03-28 | 1987-09-15 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
| US20030033983A1 (en) * | 2001-08-14 | 2003-02-20 | Song Hee Soo | Apparatus and method for depositing thin films on a glass substrate |
| EP1475458A1 (en) * | 2003-05-09 | 2004-11-10 | INTERPANE Entwicklungs- und Beratungsgesellschaft mbH & Co. KG | Apparatus for coating a substrate. |
-
2006
- 2006-02-23 CN CN2006100093177A patent/CN1827545B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4693803A (en) * | 1984-03-28 | 1987-09-15 | General Engineering Radcliffe Limited | Vacuum coating apparatus |
| US20030033983A1 (en) * | 2001-08-14 | 2003-02-20 | Song Hee Soo | Apparatus and method for depositing thin films on a glass substrate |
| EP1475458A1 (en) * | 2003-05-09 | 2004-11-10 | INTERPANE Entwicklungs- und Beratungsgesellschaft mbH & Co. KG | Apparatus for coating a substrate. |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1827545A (en) | 2006-09-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20060196414A1 (en) | System for coating a substrate, and an insert element | |
| CN1827545B (en) | System for coating substrate and inserted element | |
| US8821638B2 (en) | Continuous deposition apparatus | |
| KR100796626B1 (en) | Machine for Coating a Substrate, and Module | |
| US9738967B2 (en) | Sputtering apparatus including target mounting and control | |
| CN103765571A (en) | Vacuum processing device | |
| US7594970B2 (en) | Web coating apparatus with a vacuum chamber and a coating cylinder | |
| CN101271836A (en) | Transfer cart, manufacturing apparatus, and transfer system | |
| CN110972483A (en) | Device with movable shade carrier | |
| KR100592675B1 (en) | Substrate conveyor | |
| KR100523040B1 (en) | Substrate conveyor | |
| US4214972A (en) | Sheet handling apparatus | |
| JP7191922B2 (en) | Conveying apparatus, film forming apparatus, film forming method, and electronic device manufacturing method | |
| CN216827626U (en) | Magnetic core clearance subassembly convenient to transport magnetic core | |
| JP7212662B2 (en) | Conveying apparatus, film forming apparatus, film forming method, and electronic device manufacturing method | |
| JP2008174389A (en) | Apparatus for transporting plate-shaped work piece | |
| JP7213226B2 (en) | Conveying device and deposition device | |
| WO2011013697A1 (en) | Film-forming apparatus | |
| CN219448261U (en) | Sealing structure for conveying roller mechanism and plate processing unit | |
| KR101865315B1 (en) | EMS rail Cleaning System | |
| KR20070018488A (en) | Window cleaning apparatus for lcd | |
| CN114457313A (en) | Shielding device for vacuum sputtering machine | |
| KR200404232Y1 (en) | Window cleaning apparatus for lcd | |
| JP2022092405A (en) | Film deposition apparatus | |
| KR20200087442A (en) | Floating device for sheet material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CI02 | Correction of invention patent application |
Correction item: Priority Correct: 2005.09.28 EP 05 021 176.2 False: Lack of priority second Number: 36 Page: The title page Volume: 22 |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: PRIORITY; FROM: MISSING THE SECOND ARTICLE OF PRIORITY TO: 2005.9.28 EP 05 021 176.2 |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121107 Termination date: 20150223 |
|
| EXPY | Termination of patent right or utility model |