CN1796120A - Piezoelectric type microdroplet sprayer with membrane - Google Patents
Piezoelectric type microdroplet sprayer with membrane Download PDFInfo
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- CN1796120A CN1796120A CN 200410104158 CN200410104158A CN1796120A CN 1796120 A CN1796120 A CN 1796120A CN 200410104158 CN200410104158 CN 200410104158 CN 200410104158 A CN200410104158 A CN 200410104158A CN 1796120 A CN1796120 A CN 1796120A
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- diaphragm
- piezoelectric
- jet orifice
- liquid drop
- spray
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- 239000012528 membrane Substances 0.000 title 1
- 239000012530 fluid Substances 0.000 claims abstract description 42
- 239000007921 spray Substances 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 206010044565 Tremor Diseases 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003205 fragrance Substances 0.000 description 1
- 230000032696 parturition Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
The present invention relates to a piezoelectric microdroplet jet device with diaphragm. Said device includes jet orifice seat, jet orifice plate placed on the jet orifice seat, diaphragm, piezoelectric plate and piezoelectric plate supporting seat which is used for placing piezoelectric plate and whose four edges are fitted with jet orifice seat; on the jet orifice seat a cavity body and a fluid channel capable, of guiding fluid into said cavity body are set; on the jet orifice plate several small jet orifices are set; said diaphragm is placed between jet orifice plate and piezoelectric plate, and the periphery of the diaphragm is fitted between the jet orifice seat and piezoelectric plate supporting seat; at least a portion of piezoelectric plate is connected with diaphragm, and can be used for driving said diaphragm to produce vibration.
Description
Technical field
The invention belongs to injection apparatus, particularly a kind of piezoelectric type fine liquid drop spray device with diaphragm.
Background technology
In recent years, micro-electromechanical technology is owing to the significantly progressive and ample resources input research of process technique has rapid progress.Wherein, the development of minitype ejector more becomes the plentifulest and substantial product of MEMS achievement in research and technology because of the shiploads of merchandise application of ink jet type printer, and because minitype ejector has the flow velocity of the liquid that can accurately control trace and the effect of flow, therefore, more be widely used in such as giving birth to skill medical treatment, micro-coating or fields such as quantitative control device, room air fragrance generation device.
Existing minitype ejector mainly can be divided into two kinds of thermal bubble type, piezoelectric types, because the field of the application's case belongs to the piezoelectric type minitype ejector, therefore, the know-why of thermal bubble type minitype ejector is not added explanation in addition in this paper.
The piezoelectric type minitype ejector mainly is to produce fast the principle of vibrations a little when utilizing piezoelectric element to bear voltage, produces compressed action with the drive compression element, thereby fluid is ejected from spray orifice.
The minitype ejector of piezoelectric type and thermal bubble type injection apparatus are compared down, because speed and flow that it utilizes mechanical type control fluid to spray, therefore, generally speaking its accuracy is higher than the minitype ejector of thermal bubble type, so use the minitype ejector of piezoelectric type usually for the higher occasion of precision requirement of fluid injection.
But still there are many improvements that need in the use in existing piezoelectric type minitype ejector:
At first, the most important element of piezoelectric type minitype ejector is a piezoelectric element, yet piezoelectric element is to be made by piezoelectric, but piezoelectric is if Long contact time has corrosive liquids, will be because of the corrosion function of corrosive liquids, and make the placement property of piezoelectric element fade away, cause the situation of piezoelectric element damage even, so that existing piezoelectric type fine liquid drop spray device can't be applied to spray the occasion with corrosive liquids usually.
In addition, existing piezoelectric type fine liquid drop spray device keeps a cavity usually between piezoelectric board and spray orifice, and fluid enters into cavity, relends by the fluid in the piezoelectric element compression chamber, thereby makes fluid spouting from spray orifice.Yet; known designs; the gap of cavity is usually all much larger than in the vibration amplitude of piezoelectric element; institute is so that piezoelectric element when vibrations; only can cause cavity volume-variation by a small margin, therefore the compression effectiveness that piezoelectric element is produced is limited, and can't produce high pressure; to such an extent as to the aperture of jet orifice plate can not be too small, so the fluid particle that existing this type fine liquid drop spray device is sprayed is not easy to micronize.
Summary of the invention
The purpose of this invention is to provide a kind of piezoelectric element of avoiding and be subjected to that corrosive fluid destroys, improves the fluid compression pressure, makes fluid jet particle microminiaturization, the piezoelectric type fine liquid drop spray device with diaphragm applied widely.
The present invention includes the spray orifice seat, be arranged at jet orifice plate on the spray orifice seat, diaphragm, piezoelectric board and the voltage supply electroplax is provided with and the piezoelectric board bearing of fitting with the spray orifice seat all around; The spray orifice seat is provided with cavity and reaches so as to fluid being guided to the fluid passage of cavity; Jet orifice plate is provided with several small spray orifices; Diaphragm arrangement and makes the diaphragm periphery fit between spray orifice seat and the piezoelectric board bearing between jet orifice plate and piezoelectric board; At least a portion piezoelectric board connects and the driving diaphragm produces vibrations.
Wherein:
One end of piezoelectric board is fixed on the piezoelectric board bearing, and its other end contacts with diaphragm.
The fluid passage comprises the entrance channel that is communicated to the spray orifice seat outside from cavity.
Diaphragm and jet orifice plate are parallel to each other.
There is the gap in diaphragm when dynamic and between the jet orifice plate.
Cavity is around being arranged at the jet orifice plate peripheral region.
Cavity is communicated to the runner in the spray orifice seat outside.
The piezoelectric board bearing is provided with perforate and draw-in groove.
One end of piezoelectric board is fastened in the draw-in groove, and its other end extend out to the central authorities of perforate vacantly.
Diaphragm is interconnected with cavity around the gap when dynamic and between the jet orifice plate.
Because the present invention includes the spray orifice seat, be arranged at jet orifice plate on the spray orifice seat, diaphragm, piezoelectric board and the voltage supply electroplax is provided with and the piezoelectric board bearing of fitting with the spray orifice seat all around; The spray orifice seat is provided with cavity and reaches so as to fluid being guided to the fluid passage of cavity; Jet orifice plate is provided with several small spray orifices; Diaphragm arrangement and makes the diaphragm periphery fit between spray orifice seat and the piezoelectric board bearing between jet orifice plate and piezoelectric board; At least a portion piezoelectric board connects and the driving diaphragm produces vibrations.When piezoelectric board bears voltage, piezoelectric board can produce vertical tremor, thereby drive the vibrations of diaphragm generation perpendicular to the jet orifice plate direction, fluid between diaphragm and the jet orifice plate is compressed and spouting from the spray orifice of jet orifice plate, and because of diaphragm arrangement between jet orifice plate and piezoelectric board, make piezoelectric board isolated and can not touch fluid, so the material of piezoelectric board can be by fluid breaks, the injection purposes that makes the present invention to be used in to have corrosive fluid by diaphragm.Not only avoid piezoelectric element to be subjected to corrosive fluid and destroy, improve the fluid compression pressure, and make fluid jet particle microminiaturization, applied widely, thereby reach purpose of the present invention.
Description of drawings
Fig. 1, for decomposition texture schematic isometric of the present invention.
Fig. 2, for decomposition texture schematic isometric of the present invention (another visual angle).
Fig. 3, for side-looking structural representation cutaway view of the present invention.
Fig. 4, for injection action schematic diagram of the present invention.
The specific embodiment
As shown in Figure 1 and Figure 2, the present invention includes spray orifice seat 10, jet orifice plate 20, diaphragm 30, piezoelectric board 40 and piezoelectric board bearing 50.
As Fig. 2, shown in Figure 3, diaphragm 30 is arranged between spray orifice seat 10 and the piezoelectric board bearing 50.
As shown in Figure 2, piezoelectric board bearing 50 is provided with perforate 51 and is positioned at the draw-in groove 52 of perforate 51 tops.
One end of piezoelectric board 40 is fastened in the draw-in groove 52, and its other end extend out to the central authorities of perforate 51 vacantly, and an end that is inserted into perforate 51 contacts with the back side of diaphragm 30.
As shown in Figure 4, when piezoelectric board 40 bears voltage, one end of piezoelectric board 40 activities can produce vertical tremor, thereby drives the vibrations that diaphragm 30 produces perpendicular to jet orifice plate 20 directions, fluid between diaphragm 30 and the jet orifice plate 20 is compressed and spouting from the spray orifice of jet orifice plate 20.
The present invention is characterized in the relative position relation between jet orifice plate 20, diaphragm 30 and the piezoelectric board 40.
As shown in Figure 3, Figure 4, the cavity 12 of spray orifice seat 10 and jet orifice plate 20 are to be arranged at diaphragm 30 1 sides, piezoelectric board 40 then is arranged at the other side of diaphragm 30 with respect to cavity 12 and jet orifice plate 20, make piezoelectric board 40 to be completely cut off by diaphragm, and can not touch fluid, therefore the material of piezoelectric board 40 can be by fluid breaks, the injection purposes that makes the present invention to be used in to have corrosive fluid.
In addition, another one of the present invention is characterized as diaphragm 30 and is parallel to each other with jet orifice plate 20, and between diaphragm 30 and the jet orifice plate 20 when dynamic, there is gap 31 between the two, along with frequency change, when reaching resonant frequency, this gap can bump apical pore plate causes gap 31 to be strengthened because amplitude is big; And the cavity on the spray orifice seat 10 12 is to be interconnected with around the gap 31, therefore, makes the fluid of cavity 12 inside can enter into gap 31 because of capillarity.
When diaphragm 30 is subjected to that piezoelectric board 40 drives and when producing vibrations, gap 31 makes the fluid that enters in the gap 31 be compressed, thereby impels fluid spouting from the spray orifice 21 of jet orifice plate 20 in change procedure.
By above technological means, the present invention not only can reach and avoid piezoelectric element to be subjected to corrosive fluid destruction, and can increase the fluid compression pressure again, thereby the purpose that helps fluid jet particle microminiaturization, therefore, make the present invention can break through the use restriction of existing device, make its range of application more extensive.
Claims (10)
1, a kind of piezoelectric type fine liquid drop spray device with diaphragm, the piezoelectric board bearing that it comprises the spray orifice seat, be arranged at that jet orifice plate, piezoelectric board and voltage supply electroplax on the spray orifice seat is provided with and fit with the spray orifice seat all around; The spray orifice seat is provided with cavity and reaches so as to fluid being guided to the fluid passage of cavity; Jet orifice plate is provided with several small spray orifices; It is characterized in that between described jet orifice plate and piezoelectric board, being provided with diaphragm, and make the diaphragm periphery fit between spray orifice seat and the piezoelectric board bearing; At least a portion piezoelectric board connects and the driving diaphragm produces vibrations.
2, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that an end of described piezoelectric board is fixed on the piezoelectric board bearing, and its other end contacts with diaphragm.
3, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that described fluid passage comprises the entrance channel that is communicated to the spray orifice seat outside from cavity.
4, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that described diaphragm and jet orifice plate are parallel to each other.
5, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that there is the gap in described diaphragm when dynamic and between the jet orifice plate.
6, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that described cavity is around being arranged at the jet orifice plate peripheral region.
7,, it is characterized in that described cavity is communicated to the runner in the spray orifice seat outside according to claim 1 or 6 described piezoelectric type fine liquid drop spray devices with diaphragm.
8, the piezoelectric type fine liquid drop spray device with diaphragm according to claim 1 is characterized in that described piezoelectric board bearing is provided with perforate and draw-in groove.
9, according to claim 1 or 8 described piezoelectric type fine liquid drop spray devices with diaphragm, it is characterized in that an end of described piezoelectric board is fastened in the draw-in groove, its other end extend out to the central authorities of perforate vacantly.
10,, it is characterized in that described diaphragm is interconnected with cavity around the gap when dynamic and between the jet orifice plate according to claim 3,5 or 6 described piezoelectric type fine liquid drop spray devices with diaphragm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410104158XA CN100349741C (en) | 2004-12-30 | 2004-12-30 | Piezoelectric type microdroplet sprayer with membrane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410104158XA CN100349741C (en) | 2004-12-30 | 2004-12-30 | Piezoelectric type microdroplet sprayer with membrane |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1796120A true CN1796120A (en) | 2006-07-05 |
| CN100349741C CN100349741C (en) | 2007-11-21 |
Family
ID=36817533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410104158XA Expired - Fee Related CN100349741C (en) | 2004-12-30 | 2004-12-30 | Piezoelectric type microdroplet sprayer with membrane |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100349741C (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9713872D0 (en) * | 1997-07-02 | 1997-09-03 | Xaar Ltd | Droplet deposition apparatus |
| US6254223B1 (en) * | 1998-10-21 | 2001-07-03 | Samsung Electro-Mechanics Co., Ltd | Ink jet printer head actuator and manufacturing method thereof |
| JP2000246891A (en) * | 1999-02-26 | 2000-09-12 | Hitachi Koki Co Ltd | Ink jet head and manufacture thereof |
| JP4075317B2 (en) * | 2001-04-11 | 2008-04-16 | 富士ゼロックス株式会社 | Inkjet recording head and inkjet recording apparatus |
| JP2003039676A (en) * | 2002-07-22 | 2003-02-13 | Brother Ind Ltd | Ink jet printer head |
-
2004
- 2004-12-30 CN CNB200410104158XA patent/CN100349741C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN100349741C (en) | 2007-11-21 |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20071121 Termination date: 20181230 |
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| CF01 | Termination of patent right due to non-payment of annual fee |